Micro Spectro Photometer ROCHESTER INSTITUTE OF TECHNOLOGY MICROELECTRONIC ENGINEERING. Dr. Lynn Fuller. Webpage:

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1 ROCHESTER INSTITUTE OF TECHNOLOGY MICROELECTRONIC ENGINEERING Micro Spectro Photometer Dr. Lynn Fuller Webpage: 82 Lomb Memorial Drive Rochester, NY Tel (585) Fax (585) Department Webpage: Acknowledgments: Marion Jess, Visiting Scholar from Germany Wessel Valster, Student of Hogeschool Enschede,The Netherlands Zoran Uskokovic, RIT, graduate student in MicroE Revision Date: 4206 spectro.ppt Page 1

2 OUTLINE Introduction Diffraction Grating Emission Spectra Applications The Photodiode First Test Chip Multiplexer / Associated Electronics Second Test Chip Results Page 2

3 INTRODUCTION Light Diffraction Grating Output Electronics 1.0 iline, 365 nm clock 0.5 h gline, 436 nm f e Diodes Wavelength (nm) Photodiode Number Page 3

4 APPLICATIONS Plasma Etch Endpoint Detection Nanospec Like Film Thickness Light Source Characterization Page 4

5 DIFFRACTION GRATING S a a x Light is diffracted into a series of intensity spots called diffraction orders d 1 3rd 2nd 1st 1st 2nd 3rd r1 Page 5

6 CALCULATIONS Grating of 2 um lines and 2 um space gives S=4 um k is the diffraction order l is wavelength The angle x sin x = k l / n S and tan x = r/d for d = 1000um, and n = 1.5 for glass x1 x2 r1 r2 350 nm um 117um 550 nm um 187um 750 nm um 259um Page 6

7 EMISSION SPECTRA OF HIGH PRESSURE MERCURY ARC LAMP 1.0 iline, 365 nm gline, 436 nm 0.5 h f e Wavelength (nm) Photodiode Number Page 7

8 MICROSPECTROPHOTOMETER Diffraction Grating 1mm Glass Analog Switches Multiplexer Shift Registers I/O Pads 128 Ion Implanted p+ diode Photo Detectors ntype silicon Page 8

9 TRANSMISSION PROPERTIES OF OPTICAL GLASS Transmission, % Quartz, 90 mil White Crown Glass 60 mils Borosilicate Glass 60 mils Green Soda Lime Glass 60 mils Wavelength (nm) Page 9

10 MEASURED TRANSMISSION OF GLASS PLATES Page 10

11 Attention: Robert Gesullo Hoya Electronics Corporation Electronic Materials Division 2 Corporate Ave Suite 341 Shelton, CT QUARTZ WAFERS Product Code: QZ 4w CSTD Standard Wafer Substrate, 4 inch quartz wafer with flat, mm thick minimum Quantity $39 each (Quote: August 29, 1996) Fax P.O. to (203) , Tel (203) Quartz wafers can be made from quartz mask blanks 60 mils thick (1.524mm). Most glass shops have standard circle cutters and can easily cut and sand edges making nice substrates. Page 11

12 DICING SAW BLADES FOR WAFERS, GLASS AND CERAMIC Resinbonded dicing blades are made of epoxy with diamond grit for cutting glass, ceramic, pzt, sapphire, etc. Thermocarbon Inc., 391 Melody Lane, P.O. Box , Casselberry, Florida , Tel (407) supply a variety of metal and resin bonded blades. We have 2.25M15B46Ru73 hubless blades and hubs to hold them. The blades are $25.50 each in Qty of 10. The 2.25 is 2 1/4 inch diameter, the 15 is in thick, the 46 is the diamond grit size in µm. Mike Reeves (800) said that this blade should be good for 1 mm thick glass. Kulicke and Soffa Industries Inc., MicroSwiss Division, 2101 Blair Mill Road, Willow Grove, PA Tel(215) make metal bonded and resin bonded dicing blades. Their Resinoid Blades with and without hubs are for cutting glass, ceramics, pzt, sapphire, etc. They also have a wide range of nickel hubless and hubtype blades for silicon and GaAs wafers. At RIT we have a Microautmation/Tempress Model 602 Dicing Saw. Page 12

13 PHOTODIODE space charge layer B + B + B ptype B I + + P+ P+ B B B P+ B B P+ e + P+ P+ + P+ electron and hole pair P+ Phosphrous donor atom and electron P+ Ionized Immobile Phosphrous donor atom B Ionized Immobile Boron acceptor atom + B P+ P+ Boron acceptor atom and hole P+ ntype P+ Page 13

14 PHOTODIODE V I n p I + V I No Light More Light Most Light V φ(x) = φ(0) exp α x M.A.Green and Keevers Find % adsorbed for Green light at x=5 µm and Red light at 5 µm Page 14

15 FIRST TEST CHIP Photo diodes Marion Jess 1996 Shielded area Pads to 128 diodes Page 15

16 RESULTS OF FIRST TEST CHIP Some Light More Light Photodiode Current vs Voltage Measurements from 128 diodes illuminated through different color filters Page 16

17 MICROSPECTROPHOTOMETER ON CHIP ELECTRONICS FOR ELECTRONIC READOUT 128 PHOTODIODES D1 D2 D3 D4 D5 D6 D7 D8 SWITCHES A A B B C C Analog out A.G 7 BIT COUNTER Sync Sync pulse (at B) Clock Reset Page 17

18 POLY GATE PMOS + DEPLETION MODE IMPLANT MULTIPLEXER 7 B it Counter A B C A B C Reset C Internal Rf 100 pf + Vout + Ri D7 D0 Page 18

19 ANALOG AMPLIFIER ELECTRONICS Reset C + Internal 100 pf Ri Rf + Analog Vout Integrator and amplifier allow for measurement at low light levels Page 19

20 T TYPE FILPFLOP RS FLIP FLOP R S Q QBAR R S Q 0 0 Qn INDETERMINATE TOGGEL FLIP FLOP T Q QBAR T Qn1 Q Q: TOGGELS HIGH AND LOW WITH EACH INPUT Page 20

21 BINARY COUNTER USING T TYPE FLIP FLOPS A State Table for Binary Counter Input Pulses T A T B Tc A B B C C T A Qn TOGGEL FLIP FLOP Present Next FF State State Inputs B A B C T A T B T C C Q A BC T A Page 21 A BC T B A BC T C

22 BINARY COUNTER WAVEFORMS The binary counter has flip flops that change state in a binary count sequence, that is: 000, 001, 010, 011, 100, 101, 110, 111, Page 22

23 SECOND TEST CHIP Multiplexer T Type FF Binary Counter Photodiodes Page 23

24 REFERENCES 1. Micro Spectro Photometer by Marion Jess, Carl Duisberg Gesellschaft e.v., Fachhochschule Koln, Germany, August Design of a PhotoSpectroMeter by Wessel Valster, Student of Hogeschool Enschede, The Netherlands, December Scientific Measurement Systems, Inc., 2527 Foresight Circle, Grand Junction, CO Page 24

25 HOMEWORK SPECTROMETER 1. Design a diffraction grating for this project. Assume the diffraction grating is 1mm (on glass) above the photodiode array. Assume that we are interested in the visible spectrum between 350 nm and 750 nm projected on the 128 photodiodes. Sketch a picture. Page 25