Integrated Silicon Pressure Sensor Altimeter/Barometer Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated and Calibrated
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1 reescale emiconductor Technical Data Integrated ilicon Pressure ensor ltimeter/arometer Pressure ensor On-hip ignal onditioned, Temperature ompensated and alibrated The PX4115 series is designed to sense absolute air pressure in an altimeter or barometer (P) applications. reescale's P sensor integrates on-chip, bipolar op amp circuitry and thin film resistor networks to provide a high level analog output signal and temperature compensation. The small form factor and high reliability of on-chip integration makes the reescale P sensor a logical and economical choice for application designers. eatures 1.5% aximum Error over 0 to 85 Ideally suited for icroprocessor or icrocontroller-ased ystems vailable in bsolute, Differential and auge onfigurations Durable Epoxy Unibody Element Easy-to-Use hip arrier Option Typical pplications ltimeter aromete Document umber: PX4115 Rev 5, 08/2006 PX4115 ERIE OPERTI OVERVIEW ITERTED PREURE EOR 15 to 115kPa (2.18 to 16.7 psi) 0.2 to 4.8 Volts Output PX4115P E PX4115 E ORDERI IORTIO (1) Device Options ase o. asic Element bsolute, Element Only PX eries Order o. arking ase PX4115 PX4115 PX4115 E 867E-03 Ported Elements bsolute, Ported ase PX4115P PX4115P bsolute, tove Pipe Port ase 867E-03 PX4115 PX4115 bsolute, xial Port ase PX4115X PX The PX4115 P ensor is available in the asic Element package or with pressure port fittings that provide mounting ease and barbed hose connections. PX4115X E V OUT (1) PI UER 4 / (2) 2 D 5 / (2) 3 V 6 / (2) 1. Pin 1 is noted by the notch in the lead. 2. Pins 4, 5, and 6 are internal device connections. Pin 1 is noted by the notch in the Lead. Do not connect to external circuitry or ground.
2 V ensing Element Thin ilm Temperature ompensation and ain tage #1 ain tage #2 and round Reference hift ircuitry V OUT D Pins 4, 5, and 6 are O OET igure 1. Integrated Pressure ensor chematic Table 1. aximum Ratings (1) Parametrics ymbol Value Unit Overpressure (2) (P1 > P2) P max 400 kpa urst Pressure (2) (P1 > P2) P burst 1000 kpa torage Temperature T stg -40 to +125 Operating Temperature T -40 to T = 25 unless otherwise noted. 2. Exposure beyond the specified limits may cause permanent damage or degradation to the device. 2
3 Table 2. Operating haracteristics (V = 5.1 Vdc, T = 25 unless otherwise noted, P1 > P2 Decoupling circuit shown in igure 3 required to meet electrical specifications.) haracteristic ymbol in Typ ax Unit Pressure Range (1) upply Voltage (2) P OP kpa V Vdc upply urrent I o mdc inimum Pressure Offset V = 5.1 Volts ull cale V = 5.1 Volts ull cale V = 5.1 Volts (0 to 85 ) (0 to 85 ) (0 to 85 ) V off Vdc V O Vdc V 4.59 Vdc ccuracy (6) (0 to 85 ) ±1.5 %V ensitivity V/P 46 mv/kpa Response Time (7) t R 1.0 ms Output ource urrent at ull cale Output l o mdc Warm-Up Time (8) 20 mec Offset tability (9) ±0.5 %V kPa (kilopascal) equals psi. 2. Device is ratiometric within this specified excitation range. 3. Offset (V off ) is defined as the output voltage at the minimum rated pressure. 4. ull cale Output (V O ) is defined as the output voltage at the maximum or full rated pressure. 5. ull cale pan (V ) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 6. ccuracy (error budget) consists of the following: Linearity:Output deviation from a straight line relationship with pressure, using end point method, over the specified pressure range. Temperature Hysteresis:Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. Pressure Hysteresis:Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure at 25. Tcpan:Output deviation over the temperature range of 0 to 85, relative to 25. TcOffset:Output deviation with minimum pressure applied, over the temperature range of 0 to 85, relative to 25. Variation from ominal:the variation from nominal values, for Offset or ull cale pan, as a percent of V at Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 8. Warm-up is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized. 9. Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature ycling with ias Test. Table 3. echanical haracteristics haracteristic ymbol in Typ ax Unit Weight, asic Element (ase 867) 4.0 rams ommon ode Line Pressure (1) 690 kpa 1. ommon mode pressures beyond what is specified may result in leakage at the case-to-lead interface. 3
4 igure 2 illustrates the absolute sensing chip in the basic chip carrier (ase 867). fluorosilicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the sensor diaphragm. The PX4115 series pressure sensor operating characteristics, and internal reliability and qualification tests are based on use of dry air as the pressure media. edia, other than dry air, may have adverse effects on sensor performance and long-term reliability. ontact the factory for information regarding media compatibility in your application. igure 4 shows the sensor output signal relative to pressure input. Typical, minimum, and maximum output curves are shown for operation over a temperature range of 0 to 85. (The output will saturate outside of the specified pressure range.) luoro ilicone el Die oat Wire ond Die P1 tainless teel etal over Epoxy Plastic ase Lead rame ealed Vacuum Reference bsolute Element P2 Die ond igure 2. ross-ectional Diagram (ot to cale) +5.0 V 3 1 OUTPUT 1.0 µ 0.01 µ IP 2 igure 3. Recommended Power upply Decoupling. (or output filtering recommendations, please refer to pplication ote 1646.) Output (Volts) TRER UTIO: V out = V s * (.009*P-.095) ± Error V = 5.1 Vdc TEP = 0 to 85 I X Pressure (ref. to sealed vacuum) in kpa TYP igure 4. Output versus bsolute Pressure 4
5 Transfer unction (PX4115) ominal Transfer Value: V out = V (P x ) ± (Pressure Error x Temp. actor x x V ) V = 5.1 V ± 0.25 Vdc Temperature Error and PX4115 eries Temperature Error actor Temp ultiplier to Temperature in Pressure Error and 9.0 Pressure Error (kpa) Pressure (in kpa) Pressure Error (ax) 15 to 115 (kpa) ±1.5 (kpa) 5
6 PKE DIEIO -- R POITIVE PREURE (P1) OTE: DIEIOI D TOLERI PER I Y14.5, OTROLLI DIEIO: IH. DIEIO -- I ILUIVE O THE OLD TOP RI. OLD TOP RI OT TO EXEED (0.630). ETI PLE PI 1 -T L D 6 PL (0.005) T DI D L R IHE ILLIETER I X I X O 30 O TYLE 1: PI 1. VOUT 2. ROUD 3. V 4. V1 5. V2 6. VEX TYLE 2: PI 1. OPE 2. ROUD 3. -VOUT 4. VUPPLY 5. +VOUT 6. OPE TYLE 3: PI 1. OPE 2. ROUD 3. +VOUT 4. +VUPPLY 5. -VOUT 6. OPE E IUE I ELEET (, D) E IUE PREURE IDE PORTED (P, P) 6
7 PKE DIEIO OTE: 1. DIEIOI D TOLERI PER I Y14.5, OTROLLI DIEIO: IH. V PORT #1 POITIVE PREURE (P1) E -- -T- K D 6 PL PI (0.005) T DI D E K V IHE ILLIETER I X I X TYLE 1: PI 1. VOUT 2. ROUD 3. V 4. V1 5. V2 6. VEX E 867E-03 IUE D PREURE IDE PORTED (, ) E T U Q OTE: 1. DIEIOI D TOLERI PER I Y14.5, OTROLLI DIEIO: IH. V PORT #1 POITIVE PREURE (P1) P 0.25 (0.010) T Q D 6 PL 0.13 (0.005) T P Q K PI 1 R IHE ILLIETER DI I X I X D E K P Q R U V TYLE 1: PI 1. V OUT 2. ROUD 3. V 4. V1 5. V2 6. V EX E IUE D PREURE IDE PORTED (X, X) 7
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