HMA Series Amplified pressure sensors

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1 FEATURES 00 to 0 bar, to 0 psi gage or differential pressure Increased media compatibility Analog output Precision ASIC signal conditioning Calibrated and temperature compensated 2 SIL and DIP housings RoHS compliant Quality Management System according to ISO 348:2003 and ISO 900:2008 MEDIA COMPATIBILITY,2 : To be used with gases and liquids which are compatible with the wetted materials (high temperature polyamide, ceramic AL 2 O 3, epoxy, fluorosilicone, glass, silicon). Low pressure port: To be used with non-corrosive, non-ionic working fluids such as clean dry air, dry gases and the like. SPECIFICATIONS Maximum ratings Supply voltage V S HMA...3 HMA... Output current Sink Source Environmental V DC V DC max. 6. V DC ma ma Temperature ranges Compensated C Operating C Storage C Humidity limits (non-condensing)...9 %RH 0 (00 % condensing or direct liquid media on high pressure port ) Vibration max. 0 g, Hz, random (EN ) Mechanical shock max. 0 g, ms (EN ) Lead solder temperature max. 270 C (JESD22-B06D) ELECTRICAL CONNECTION +Vs 3 HMA 4 2 Vout C GND 00 nf 0 nf 00 nf /

2 PRESSURE SENSOR CHARACTERISTICS (T A =2 C, RH=0 %) Part no. HMAM00U... HMAM00B... HMAM20U... HMAM20B... HMAB00U... HMAB00B... HMAB2xU... HMAB00U... HMAB00U... HMAP00U... HMAP00B... HMAP00U... Operating pressure 4 Proof pressure bar 0...±00 2 bar bar 0...±20 2 bar 0... bar bar 0...± bar bar bar 0 bar 0... bar 4 bar bar 4 bar 0... psi 30 psi 0...± psi 30 psi psi 200 psi Other pressure ranges (e.g. 00, psi, 0 psi) are available on request. Please contact First Sensor. PERFORMANCE CHARACTERISTICS 2 (V S =.0 V DC, T A =2 C, RH=0 %, analog output signal is ratiometric to V S in the range of V S = V) All HMA...H devices (V S =.0) C haracteristics M in. T yp. Max. Units 6 N on-linearity ( C) ±0.2 7 Accuracy ±0.2 %FSS 8 Total accuracy ( C) ±. 9 Response delay 0. ms A/D resolution 2 D/A resolution bit Current consumption. 3 ma All HMA...U...H (unidirectional devices) C haracteristics M in. T yp. Max. Zero pressure offset Full scale span (FSS) 4.00 Full scale output All HMA...B...H (bidirectional devices) C haracteristics M in. T yp. Max. Zero pressure offset Full scale span (FSS) 4.00 Output at max. specified pressure at min. specified pressure Units V Units V 2/

3 PERFORMANCE CHARACTERISTICS 2 (V S =3.0 V DC, T A =2 C, RH=0 %, analog output signal is ratiometric to V S in the range of V S = V) All HMA...H3 devices (V S = 3.0) C haracteristics M in. T yp. Max. Units 6 N on-linearity ( C) ±0.2 7 Accuracy ±0.2 %FSS 8 Total accuracy ( C) ±. 9 Response delay 0. ms A/D resolution 2 D/A resolution bit Current consumption 4. ma All HMA...U...H3 (unidirectional devices) C haracteristics M in. T yp. Max. Zero pressure offset Full scale span (FSS) 2.40 Full scale output All HMA...B...H3 (bidirectional devices) C haracteristics M in. T yp. Max. Zero pressure offset Full scale span (FSS) 2.40 Output at max. specified pressure at min. specified pressure Units V Units V Specification notes:. All wetted materials are selected to give a high level of media compatibility. Media compatibility refers to media inside the pressure port and lid. Improved media compatibility on high pressure port (backward side of sensor chip) since media has no contact to electronic components. Nevertheless tests with the media used in the specific application are recommended. 2. Sensor is calibrated in air, changes in sensor behaviour based on physical effects caused by the specific media can occur. Weight of the media and wetting forces can influence the sensor characteristics. 3. Storage temperature of the sensor without package. 4. Proof pressure is the maximum pressure which may be applied without causing durable shifts of the electrical parameters of the sensing element.. Full Scale Span (FSS) is the algebraic difference between the output signal for the highest and lowest specified pressure. 6. Non-linearity is the measured deviation based on Best Fit Straight Line (BFSL). 7. Accuracy is the combined error from non-linearity and hysteresis. Hysteresis is the maximum output difference at any point within the operating pressure range for increasing and decreasing pressure. 8. Total accuracy is the combined error from offset and span calibration, non-linearity, pressure hysteresis, and temperature effects. Calibration errors include the deviation of offset and full scale from nominal values. 9. Max. delay time between pressure change at the pressure die and signal change at the output. 0. Tested h, up to 8 C. Sensors are electronic components and should be handled only in ESD save environments. 3/

4 PHYSICAL DIMENSIONS AND ELECTRICAL CONNECTION HMA...U... (SIL, axial no ports) High pressure 4/

5 HMA...W... (DIP, axial no ports) I / C* 6 I / C* 7 I / C* 8 I / C* * Internal connection. Do not connect for any reason High pressure /

6 HMA...U7... (SIL, 2 ports axial opposite side, barbed) /

7 HMA...X7... (SIL, port axial, barbed) /

8 HMA...Z7... (DIP, port axial, barbed) I / C* 6 I / C* 7 I / C* 8 I / C* * Internal connection. Do not connect for any reason 8/

9 HMA...U6... (SIL, 2 ports axial opposite side, straight big) /

10 HMA...X6... (SIL, port axial, straight big) /

11 HMA...Z6... (DIP, port axial, straight big) I / C* 6 I / C* 7 I / C* 8 I / C* * Internal connection. Do not connect for any reason /

12 HMA...U... (SIL, 2 ports axial opposite side, needle big) /

13 HMA...X... (SIL, port axial, needle big) /

14 HMA...Z... (DIP, port axial, needle big) I / C* 6 I / C* 7 I / C* 8 I / C* * Internal connection. Do not connect for any reason 4/

15 NOMENCLATURE Options Example: Series HMA M00 Pressure range M20 B00 B2x B00 B00 P00 P00 Calibratio n Housing Porting Grade Voltage B U Bidirectional Unidirectiona l U SIL, 2 ports axial opposite side ( ) 7 no port Barbed H H igh ( 3) 3 V V bar ( W) DIP, 2 ports axial ( ) Needle big 2. bar opposite side ( 6) Straight big bar X SIL, port axial 0 bar Z DIP, port axial psi 00 psi ( ) available on request. Please contact First Sensor. HMA M00 U U 7 H LABEL INFORMATION Digit Series Pressure range Pressure unit / pressure mode / calibration Housing Porting Grade/ voltage Char M A - HMA 6 psi U bar, U SIL, no port - High, V 7 00 gage/differential, 2 ports axial unidirectional opposite side 7 B arbed / High, 3 V 8 20 B bar, W DIP, Needle big A bar gage/differential, 2 ports axial bidirectional opposite side 6 Straight big B 2. bar X SIL, C bar port, axial L 00 psi Z DIP, M 0 bar port axial Production code First Sensor reserves the right to make changes to any products herein. First Sensor does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. /

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