2012/01/20. Thierry EPICIER. MATEIS-CLYM, umr CNRS5510, Director METSA (FR 3507 CNRS) M. AOUINE, JP MILLET et al.
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1 2012/01/20 Thierry EPICIER MATEIS-CLYM, umr CNRS5510, Director METSA (FR 3507 CNRS) M. AOUINE, JP MILLET et al.
2 MATERIALS SCIENCES & NANOTECHNOLOGIES HIGH RESOLUTION MICROSCOPY (including ATOM PROBE) techniques allow ACCURATE CHARACTERIZATION of the (ATOMIC) STRUCTURE, CHEMISTRY and CRYSTALLOGRAPHY
3 The network started in platforms 15 microscopes 3 atom probes 90 researchers and engineers / technicians PFNC 280 experiments treated in 3 years
4 The network?? 2. PROPOSAL (twice a year) facilitates the access of the French community to state-of-art TEM and AP (MET & Sonde Atomique in French) organizing the TEM and AP community (equipment strategy, joined developments) TEACHING (specialized schools and workshops) and TRAINING 1. CONTACT plateform(s) 4. Access through the permanent staff of the platform or direct access (trained users) 7. REPORT / scientific communication(s) 3. EXPERTISE (programme committee) 5. FUNDING of accepted experiments Dialog between platforms and steering committees
5 ELECTRON MICROSCOPES - High Resolution (atomic) imaging Illustration 1 nm FEI Tecnai SACTEM (C s -corrector) FEI TITAN (C s -corrector), PACA FEI TITAN (C s -corrector), PFNC JEOL 2100F (C s -corrector) METSA 2009 A23: T1 phase and local strain around nano-precipitates in Al alloys (HRTEM) P. DONNADIEU, J. DOUIN, F. HOUDELLIER, 200 kv - FEG image C s -corrector (resolution : 0.12 nm) rotatif biprism Gatan Imaging Filter (GIF) Tridiem (0.7 ev) 2K x 2K camera 300kV FEG image C s -corrector (résolution : 0.1 nm) Caméra 2K 2K, HAADF /BF detectors EDAX EDX GIFTridiem (0.7 ev) 300kV FEG image C s -corrector (résolution : 0.1 nm) biprism Caméra 2K 2K HAADF / BF detectors EDAX EDX GIFTridiem (0.7 ev) Probe C s correctior (resolution 0.11 nm) HAADF / BF detectors Biprism GIF Tridiem (0.7 ev) EDX 2K x 2K camera Heating stage (973K) high tilt cryo stage Tomographic holder +/- 80
6 ELECTRON MICROSCOPES - High Resolution (atomic) imaging Illustration Quantitative STEM simulations various models for the hexagonal b phase a 0.7 nm, c = nm (Mg0.48Si0.49Cu0.03) 2 nm METSA 2009 A8, 2010 A40 Cs-corrected HAADF study of (Al-Mg-Si-Cu) precipitates in Al 6XXX industrial alloys; T. EPICIER, C. CAYRON, to appear
7 ELECTRON MICROSCOPES - Chemical Analysis / Spectroscopic imaging Illustration VG STEM 501 NION ultra-stem 200 kv CFEG, LPS UHV column Spatial resolution 70 pm Energy resolution < 0.4 ev 100 kv cold FEG Spatial resolution > 0.7 nm Energy resolution: 0.6 ev EELS Spectrum imaging EFTEM devices (GIF/Tridiem/Quantum GATAN), EDX-SDD detectors (Oxford Instruments, JEOL, EDAX), all platforms METSA 2010 A2: LiMn 1 /2Ni 1 /2O 2 electrode/electrolyte interphase, M. CUISINIER et al., Solid State Nucl. Magn. Reson., (2011), in press, doi: /j.ssnmr
8 ELECTRON MICROSCOPES - Chemical Analysis / Spectroscopic imaging Illustration: chemical composition electronic structure at the atomic scale Nano-optics: mapping surface plasmon modes Mn La Ti M. WALLS et coll. Mn La Ti J. NELAYAH et al., Nature Phys (2007)
9 100 kv - FEG froid résolution spatiale > 0.7 nm résolution en énergie : 0.6 ev ELECTRON MICROSCOPES - Nano-machining / Sample prep. 10 µm Illustration SEM-FEG Zeiss (resolution : 1.1 nm) Ion column Orsay Physics Ga/AuSi ions (resolution : 5-7 nm) Dual Beam SEM-FEG high resolution FIB Ga+ (low voltage 500 V) Omniprobe micromanipulator SEM-FEG Zeiss (resolution : 1.1 nm) Ion Column Orsay Physics Ga/AuSi ions (resolution : 5-7 nm) flood gun 5 gas injectors Klocke micro-manipulator EBSD and EDX 3D Oxford Instruments METSA 2010 A3 nano-machining of Atom probe TIPS of the interface Cu-nanowires / sapphire substrate, S. CURIOTTO, D. CHATAIN, E. CADEL
10 ELECTRON MICROSCOPES - Nano-machining / Sample prep. Illustration: cutting matter for nano-tomography in a FIB. X-Y resolution 1 nm, Z resolution (slicing) 3 nm slicing (Ga + ions) SEM viewing direction FIB tomography: 3D structure of a metallic alloy (Cu-based with intra- and intergranular precipitation) 5 µm 5 µm
11 ELECTRON MICROSCOPES - In situ & Environmental microscopy Illustration JEOL 2010F (cooling He 10 K) IRMA, CRISMAT Resolution 0.24 nm Heating stage (1273K) cooling stage N 2 (92K) cooling stage He (10K) 1Kx1K camera EP: Electron Precession EDX JEOL 3010 (environmental cell), PACA-CINAM 300 kv LaB 6 environmental cell resolution 0.21 nm under gas pressure camera JEOL 2100F (C s -corrector), IPCMS Probe C s corrector (resolution 0.11 nm) HAADF/ BF detectors Biprism GIF Tridiem (0.7 ev) EDX 2K x 2K camera Heating stage (973K) high tilt cryo stage Tomographic holder +/- 80 METSA 2010 A37: high temperature ( o C) growth mechanisms of transient phases (d, q-nisi 2, ) in the Ni / Si reactive system K. HOUMMADA, M. DESCOINS, F. BANHART FEI XL30, ESEM-FEG (environmental & heating 1773 K), CLYM FEG controlled pressure (hydrated objects) Traction stage Heating stages 1273 / 1773K STEM / WET-STEM detectors EDX Home-made Tomography holder 180
12 ELECTRON MICROSCOPES - In situ & Environmental microscopy Illustration: In-situ growth of carbon nanomaterials in the TEM Growth of graphene from catalytically active metals In situ straining experiment: emission of pyramidal dislocations at a fracture tip in Ti 3 Al strained at 400 o C M. LEGROS et coll. F. BANHART et coll. ACS Nano 5, 1529 (2011) graphene
13 Illustration ATOM PROBES 240 nm 3 µm ECOTAP (electric mode), IRMA, GPM Mass resolution M/DM(FWHM) = 500 detection limit 50 ppm, ionic microscopy (He, Ar, Ne) Pulse 100 khz, cryostat: K average analyzed volume nm 3 CAMECA LAWATAP (laser-assisted) electric & pulsed modes, IRMA, GPM Laser femto-second laser (400 fs, IR / Visible / UV), wide angle analysis (diameter 100 nm) adld detector, cryostat: K, voltage 1-15 kv IMAGO LEAP3000XHR, (laser-assisted) PACA-IM2NP METSA 2009 A23: Nanostructure of a Si/Ni/Sn/C composite F. CUEVAS, D. MANGELINCK Mass resolution M/DM(FWHM) > 1000 laser for bad conductors analysis, pulse 250 khz average analyzed volume: nm 3 detection limit 50 ppm, cryostat : K, voltage 1-15 kv
14 1 mm NiSi ATOM PROBES Illustration: Thin film reaction: formation of Ni silicide NiSi 2 from a Ni thin film alloyed with Pt Ni 2 Si D. MANGELINCK et al., Scripta Mater (2010) Atomic resolution at a grain-boundary Iron tip with atomic NbN platelets Field Ion Microscopy D. BLAVETTE et coll F. DANOIX et al., J. Mater. Sci., (2012)
15 QUANTITATIVE in situ DIFFRACTION & CRYSTALLOGRAPHY ATOM PROBE (Tomography) SPECIFIC EXPERTISE tilted TOMOGRAPHY / EFTEM C s -corrected in situ HRTEM Atomic STEM / EELS SpectroMicroscopy Environmental SEM multi-tem 3D-FIB PFNC HR STEM / TEM Chemical Information EELS / EFTEM quantitative TEM C s -corrected HRTEM In situ TEM ATOM PROBE corrected HRTEM Environmental TEM
16 The network SCHOOLS / WORKSHOPS in preparation Soc. Fr. Microscopies TOMOGRAPHY ovidiu.ersen@ipcms.u-strasbg.fr Strasbourg, Nov. 2012, 1 week, participants HRTEM michael.texier@univ-cezanne.fr Marseille (not defined), 3-4 days, participants ATOM PROBE xavier.sauvage@univ-rouen.fr Rouen, Oct. 2012, 1 week, 20 participants QEM 2013 / snoeck@cemes.fr European School on Quantitative Electron Microscopy
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