NUANCE Center. Northwestern University Atomic and Nanoscale Experimental Characterization Center. Professor Vinayak P. Dravid, Ph.D.
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1 NUANCE Center Northwestern University Atomic and Nanoscale Experimental Characterization Center Professor Vinayak P. Dravid, Ph.D. Director
2 NUANCE CENTER NU Atomic and Nanoscale Characterization Experimental User Facilities Professor Vinayak P. Dravid, Director NIFTI Nanoscale Integrated Fabrication, Testing and Instrumentation EPIC Electron Probe Instrumentation Center Keck-II Keck Interdisciplinary Surface Science SPF Specimen Preparation Facility A Unique, Centralized, and Integrated NU Resource Atomic-Scale Characterization Surfaces, Interfaces, Nano-Bio Structures
3 NUANCE CENTER Facility Collaboration Keck-I Biophysics Soft and Hard Lithography Nano- to Microscale APS-CATs Dip-Pen Nanolithography (DPN) Microcontact Printing (mcp) Nanoimprint Lithography (NIL) FEG Electron Beam Lithography (ebl) Focused Ion Beam (FIB) Measurement/Testing & Preparation Imaging, Spectroscopy and Analysis Nano- to Microscale Contact Angle Zeta Potential and Particles Size Controlled Vacuum Evaporation Controlled Atmosphere Ovens Plasma Cleaning System Cryo-Preparation Laminar Flow Hoods with Sonicators Controlled Atmosphere Spin Coaters ToF-SIMS, XPS, UHV STM/AFM 4 SEMs, 3 TEMs Energy Filtered Cryo-TEM SNOM, with Femto-s Spectroscopy Surface Plasmon Resonance (SPR) Scanning Molecular Force Probe Laser Fluorescence Optical Microscope FTIR Microscopy/Spectroscopy
4 NUANCE CENTER Integrated Atomic-Nanoscale Surface/Interface Bio/Nano Analytical Capabilities Merging Length-Scales From Micro-to Nanoscale Fabrication and Analysis Complete and Open-Access Training Collaboration User Feed-back Complementary Capabilities Keck Biophysics Argonne-CATs
5 EPIC & Sample Prep
6 Managers for EPIC TEM: Jian-Guo Zheng, Ph.D. & Shuyou Li, Ph.D. SEM: Ben Myers Gajendra Shekhawat, Ph.D. also on Quanta Specimen Preparation: Shuyou Li, Ph.D.
7 Electron Probe Instrumentation Center TEM Transmission Electron Microscopes TEM (JEOL JEM-2100F, Hitachi HF-2000, H-8100) SEM Scanning Electron Microscopes SEM (LEO Gemini 1525, Hitachi S-4500, S-3500, FEI Quanta 600) Focused Ion Beam FIB (Hitachi FIB 2000A) FIB
8 Atomic resolution of novel carbon nanostructure Electron diffraction patterns of a membrane protein: Before and after energy filtering Atomic resolution of HfO2/SiO2/Si Elemental mapping of Fe-B nano-capsules
9 CdSe nano-material: Bright/dark field micrographs and diffraction pattern DNA-linked gold nanoparticles Nano-diffraction pattern from nano-ag prisms Gold flowers Liposome-nanoparticle assembly for drug/gene delivery Focused Ion Beam: Site- and shape-specific trenches for microfluidics
10 Orientational imaging Nano-cheerios! Hollow nanoparticles of Pd catalyst Poly-crystal grains via EBSD Mapping crystallography and orientation
11 Image of Ebola virus depicting the deadly thread morphology Processed cheese: Note the fat globules! Images of human dentinal Alumina FE tip Nano-fetti
12 Sample Preparation Facility Complete Metallography Set-Up JEOL Carbon Evaporator Fischione Plasma Cleaner For TEM VCR Precision Dimplers Gatan Dry Pumping Station South Bay Electropolisher (Single Jet) Ultrasonic and Slurry Disc Cutters Precision Ion Polishing System IBT
13 Keck-II
14 Manager for Keck-II Nick Wu, Ph.D.
15 Keck Interdisciplinary Surface Science Fourier Transform Infrared Spectroscopy (FT-IR) Time-of-Flight Ion Mass Spectrometry (ToF-SIMS) Ultra-high Vacuum Scanning Tunneling Microscopy/Atomic Force Microscopy (UHV STM/AFM) X-ray Photoelectron Spectroscopy (XPS/ESCA)
16 Keck-II Power Focus: Commission: surface analysis and nano-scale characterization research, collaboration, education and outreach SIMS-PHI TRIFT II UHV STM/AFM-Omicron Digital Instrument SPM XPS-Omicron
17 Boron map Mg map Chemical map of Mg/MgB 2 composite using SIMS
18 STM image, HOPG STM image, atomic terrace of Au
19 NIFTI
20 NIFTI Manager Gajendra Shekhawat, Ph.D.
21 Nano-Scale Integrated Testing, Imaging and Instrumentation User Facility (NIFTI) Nano-Scale Characterization and Nanopatterning Novel, Unique Capabilities and Operational Platform Novel Nanometrology Instrumentation and Techniques Nano-Modeling and Integrated Electrical Testing (in development)
22 Nano-Scale Characterization & Nanopatterning Novel and Unique Capabilities & Operational Platform tip piezo NIFTI Broad Outreach Stress (MPa) Sample Novel Nanometrology Instrumentation & Techniques Nano-modelling and Integrated Electrical Testing
23 The NIFTI Arsenal Nanofabrication & Surface Probe Characterization Instrumentation JEOL Environmental SPM Pico Force Microscope Digital Instrument SPM NanoInk NSCRIPTOR Femto-NSOM
24 SPM Imaging of Soft and Hard Materials in Air/Ambient 20 m DPN nanopatterning of magnetic carriers 2.5 m 5 m Latex spheres Magnetotactic bacteria 500 nm ZnS nanoparticles 500 nm Ge Quantum Dots 2000 nm CdS nanoparticles
25 JEOL and NSOM Imaging of Soft and Hard Materials in Air/Vacuum 25 m Transmission NSOM image of check board patterns on glass DNA Single wall carbon nanotube 12 m Nano-hole arrays with NSOM Pores in AO membrane Self-assembled organic molecules
26 Development of a Unique Near-Field Ultrasonic Holography (NFAH) System on JEOL 5200 Platform PROJECTED PERFORMANCE GAINS w Tip tip piezo Nanostructural Metrology In-Line 3D Nanomechanical Imaging nondestructive surface/ subsurface defect identification XY resolution: < 1nm Z resolution < 2 nm (defect size) AFM tip sample piezo Sample Sample w S Sub-surface high resolution modulus imaging Acoustic object waves excited through wafer In-vitro imaging of biopolymer, biomaterials and biological structures Eliminate Far-Field Acoustic Lenses and Couplers Detect phase of transmitted acoustic wave directly at wafer/device surface: Eliminate coupling fluid
27 Proof-of-Concept AFM NFAH 800 nm Defects in Cu Trenches at 50 nm below from Surface 1.5 m Defects in Spin on Dielectric Trenches AFM NFAH Looking Inside Carbon Nanotubes
28 Administrative Staff for NUANCE Center Ruth McCullough, Business Manager Carolyn Turek, Program Assistant NUANCE Web site:
EPIC: Keck-II: SPID:
The Northwestern University Atomic and Nanoscale Characterization Experimental Center (NUANCE) was established during 2001-02 to integrate complementary analytical instruments and characterization capabilities
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