Low Temperature Physics Measurement Systems

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Domenic Brooks
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PAGE 6 & 2008 2007 PRODUCT CATALOG Accelerate your Semiconductor Research & Developments towards Nanoscale Products.

attocube systems presents its product line of low temperature physics measurement systems.

Confocal Microscopy Atomic Force Microscopy Magnetic Force Microscopy With this novel ultra-modular system a variety of scanning probe microscopy (SPM)

This is realized by a modular basic system in combination with flexible, high end control electronics supporting your individual research task.

projects. For details on the different microscopy and probe station inserts, please refer to the nanoscopy and nanotoo- LING sections in this catalog.

1 PAGE 6 & PRODUCT CATALOG Accelerate your Semiconductor Research & Developments towards Nanoscale Products. Experience your new working horse in the emerging field of semiconductor research for the nanoscale age. attocube systems presents its product line of low temperature physics measurement systems. Perform your experiments time efficiently resulting in your company s future nanoscale products. Confocal Microscopy Atomic Force Microscopy Magnetic Force Microscopy With this novel ultra-modular system a variety of scanning probe microscopy (SPM) techniques as well as a probing station at low temperatures down to the mk regime can be covered within one single device. This is realized by a modular basic system in combination with flexible, high end control electronics supporting your individual research task. For this system, a variety of microscopy inserts are available which are tailored for your individual measurement tasks and can simply be expanded for future projects. For details on the different microscopy and probe station inserts, please refer to the nanoscopy and nanotoo- LING sections in this catalog. Spectral lines of one single quantum dot. Scanning Near-Field Optical Microscopy Lattice of lateral InAs quantum dot molecules. Scanning Tunneling Microscopy 5 mm MFM image of a hard disk. Cryogenic Probe Station 5 mm SNOM images of Vanadium rhomb structures in reflection (4 K, 8 T). Atomic resolution image of an HOPG surface recorded at 300 mk. CCD image of an HF probe touching the contact pads. attocube systems explore your nanoworld

PAGE 7 & 2008 2007 PRODUCT CATALOG INTRODUCTION LTSYS.

......................... 10 ultra-stable low temperature physics measurement systems CRYOGEN-FREE SYSTEMS LTSYS-Cc.

2 PAGE 7 & PRODUCT CATALOG INTRODUCTION LTSYS the new line of low temperature physics measurement systems LIQUID HELIUM SYSTEMS LTSYS-He ultra-stable low temperature physics measurement systems CRYOGEN-FREE SYSTEMS LTSYS-Cc cryogen-free low temperature physics measurement systems nanopositioning Ultra Compact Positioners for Extreme Environments

PAGE 8 & 2008 2007 PRODUCT CATALOG LTSYS attocube systems offers various versions of the two basic systems: LTSYS-He ultra-stable low temperature physics measurement systems The basic LTSYS-He4

Options as a variable temperature insert (VTI), a He3 insert, or a dilution refrigerator unit, enable to cover a large temperature range down to the mk regime.

The compatible microscopy inserts range from Confocal Microscopy (CFM) and Scanning Nearfield Optical Microscopy (SNOM) to Atomic Force Microscopy (AFM) and related techniques (Magnetic Force

3 PAGE 8 & PRODUCT CATALOG LTSYS attocube systems offers various versions of the two basic systems: LTSYS-He ultra-stable low temperature physics measurement systems The basic LTSYS-He4 systems are based on a liquid Helium bath cryostat and optimized for highest stability of your measurements. Options as a variable temperature insert (VTI), a He3 insert, or a dilution refrigerator unit, enable to cover a large temperature range down to the mk regime. Superconducting magnets up to 15 T are compatible with the system. The compatible microscopy inserts range from Confocal Microscopy (CFM) and Scanning Nearfield Optical Microscopy (SNOM) to Atomic Force Microscopy (AFM) and related techniques (Magnetic Force Microscopy (MFM) and Electric Force Microscopy (EFM), as well as Scanning Tunneling Microscopy (STM) for measurements with atomic resolution. Furthermore, probe station modules for cryogenic probing of your NEMS/MEMS samples are available. LTSYS-Cc cryogen-free low temperature physics measurement systems This cooling system includes a cryogen-free closed-cycle cryostat for applications where liquid Helium is not available or desired. Expensive running costs and security issues can be avoided. An optional Adiabatic Demagnetization Refrigerator (ADR), or dilution refrigerator unit enables ultra-low temperature setups. The automation level allows for set and forget operation for non-expert users. For these systems, a variety of Confocal Microscopy (CFM) inserts, the Atomic Force Microscopy (AFM) insert with MFM and EFM functionality, as well as the probe station inserts are available. attocube systems explore your nanoworld

PAGE 9 & 2008 2007 PRODUCT CATALOG Configure your Low Temperature Physics Measurement System vibration isolation system cryostat superconducting magnet electronic controller microscope insert 1 2 3

4 PAGE 9 & PRODUCT CATALOG Configure your Low Temperature Physics Measurement System vibration isolation system cryostat superconducting magnet electronic controller microscope insert Cryostat liquid He bath cryostat with optional VTI, He3, or dilution refrigerator insert. pulse tube cooler with optional ADR or dilution refrigerator insert. Magnets with variable field strengths (e.g. 5, 7, 8, 9, 10, 12 or 15 Tesla). Microscope Inserts Confocal Microscopy (CFM) Atomic Force Microscopy (AFM) Scanning Near-Field Optical Microscopy (SNOM) Scanning Tunneling Microscopy (STM) Cryogenic Probe Station (CPS) 4 5 Isolation System each LTSYS is equipped with an accoustic and mechanic damping and vibration isolation system to minimize noise levels enabling atomic resolution imaging. Electronics Scanning Probe Microscopy Controller (ASC500) Scanning Confocal Microscopy Controller (ASC400) Piezo Motion Controller (ANC350) Piezo Step Controller (ANC150) Piezo Scan Controller (ANC200) Position Readout Controller (ARC200) Laser Detection Module (LDM 600,...) LTSYS

5 PAGE 10 & PRODUCT CATALOG LTSYS-He ultra-stable low temperature physics measurement systems :... This system is based on a liquid Helium bath cryostat and has been optimized for highest stability. This system enables e.g. ultra high resolution imaging using Scanning Tunneling Microscopy (STM) or long-term investigations of single quantum dots over several weeks. A large variety of microscopy and probing heads cover a broad spectrum of measurement tasks. Superconducting magnets up to 15 T are available with this system. Three LTSYS-He systems are available: LTSYS-He4: Dependent on the pumping system, temperatures down to 1.5 K can be achieved. With an additional heating stage the temperature of the sample can be swept up to 70 K. A Variable Temperature Insert (VTI, optional) enables sweeping the temperature between 1.8 and 300 K. LTSYS-He3: Operating down to 300 mk, this state of the art system features integrated designs for the He3 insert with the high efficiency He bath cryostat. Reduction of the vapor pressure is achieved by an internal sorption pump (charcoal cooling) optimized for lowest vibrations. LTSYS-DIL: Operating down to 20 mk, this state of the art system features lowest base temperatures for combination with e.g. the confocal microscopy insert attocfm II. The basic system includes the following components: > liquid Helium bath cryostat with a 2 insert fitting all attocube microscope and probing inserts > vibration and acoustic noise damping system attodamp enabling high resolution imaging > high-end SPM controller ASC500 or confocal microscopy controller ASC400 for intuitive controlling of the microcope modules > Piezo Scan Controller for fine scanning of the sample > Piezo Step Controller for sample coarse positioning > workstation PC with TFT-monitor Options: > sample heating stage for temperature control from 1.5 to 70 K > Variable Temperature Insert (VTI) for temperature control from 1.8 to 300 K > He3 insert for base temperatures down to 300 mk > superconducting magnets up to 12 T by default (15 T on request) PRODUCT KEY FEATURES > ultra high stability > highest flexibility > base temperature: down to 300 mk with He3 insert, down to 20 mk with dilution refrigerator insert > compatible with superconducting magnets up to 15 T EXAMPLE APPLICATIONS > ultra high resolution imaging in STM or AFM on semiconductor structures > solid state physics and quantum dot optics (CFM) > materials science research on ceramics, polymers, additives, alloys,.. > quantitative surface characterization in the sub-micron range attocube systems explore your nanoworld

6 PAGE 11 & PRODUCT CATALOG LTSYS

7 PAGE 12 & PRODUCT CATALOG Specifications LTSYS-He attocube systems explore your nanoworld

8 PAGE 13 & PRODUCT CATALOG LTSYS

9 PAGE 14 & PRODUCT CATALOG Specifications LTSYS-He attocube systems explore your nanoworld

10 PAGE 15 & PRODUCT CATALOG LTSYS

11 PAGE 16 & PRODUCT CATALOG Specifications LTSYS-HeDIL attocube systems explore your nanoworld

12 PAGE 17 & PRODUCT CATALOG LTSYS

13 PAGE 18 & PRODUCT CATALOG LTSYS-Cc cryogen-free low temperature physics measurement system :... This measurement system relies on a pulse tube based closed cycle cryostat allowing measurements at low temperatures down to 4 K and high magnetic fields up to 9 T (optional) without the need of liquid coolants. Expensive running costs for the purchase, transport, and storage of liquid Helium as well as security training for users can be avoided. With the optional Adiabatic Demagnetization Refrigerator (ADR) temperatures of < 100 mk can be achieved. The lowest base temperature of 20 mk is now available in combination with the dilution refrigerator unit. For this system, a variety of SPM inserts as well as the probe station inserts are available covering a large variety of semiconductor applications. Three LTSYS-Cc systems are available: LTSYS-Cc: Temperatures down to 4 K can be reached with the standard closed-cycle system. Optional, superconducting magnets up to 9 T are available. The inserts are cooled by a controlled exchange gas atmosphere. The basic system includes the following components: > closed-cycle cryostat with a 2 insert fitting attocube microscope and probing inserts > patented vibration and acoustic noise damping system attodamp > high-end SPM controller ASC500 or confocal microscopy controller ASC400 for intuitive controlling of the microcope modules > Piezo Scan Controller for fine scanning of the sample > Piezo Step Controller for sample coarse positioning > laser / detector module for sensing and adjusting > workstation PC with TFT-monitor Options: > ADR insert for base temperatures down to 100 mk > dilution refrigerator insert for base temperatures down to 20 mk > superconducting magnets up 9 T PRODUCT KEY FEATURES > cryogen-free > very easy to use, set and forget operation > base temperature: 4 K, with ADR 100 mk, with dilution refrigerator 20 mk LTSYS-CcADR: This system allows plug-andplay cryogenic measurements at temperatures as low as 100 mk. The automation level facilitates an operation for non-expert users. LTSYS-CcDIL: The lowest base temperature of 20 mk can be achieved with this system. EXAMPLE APPLICATIONS > Confocal microscopy (CFM) > Atomic Force Microscopy (AFM) > solid state physics and quantum dot optics > materials science research on ceramics, polymers, additives, alloys,.. > semiconductor device characterization attocube systems explore your nanoworld

14 PAGE 19 & PRODUCT CATALOG LTSYS

15 PAGE 20 & PRODUCT CATALOG Specifications LTSYS-Cc attocube systems explore your nanoworld

16 PAGE 21 & PRODUCT CATALOG 4 Kelvin Closed-Cycle Cooler Cross-Section LTSYS

17 PAGE 22 & PRODUCT CATALOG Specifications LTSYS-CcADR attocube systems explore your nanoworld

18 PAGE 23 & PRODUCT CATALOG LTSYS

19 PAGE 24 & PRODUCT CATALOG Specifications LTSYS-CcDIL attocube systems explore your nanoworld

20 PAGE 25 & PRODUCT CATALOG LTSYS

21 PAGE 26 & PRODUCT CATALOG Overview on available microscope and probing inserts Confocal Microscopes Scanning Near-Field attocfm I attocfm II attocfm III attosnom I attosnom II LTSYS-He4 yes yes yes yes yes LTSYS-He3 no yes yes no on request LTSYS-HeDIL no yes on request no no LTSYS-Cc on request yes yes on request on request LTSYS-CcADR no yes yes no no LTSYS-CcDIL no yes yes no no Description low temperature scanning confocal microscope, highly modular and flexible low temperature scanning confocal microscope, highly stable and compact low temperature scanning confocal microscope, optimized for transmission measurements cantilever based, low temperature scanning near-field optical microscope, interferometric sensor fiber based low temperature, scanning near-field optical microscope, interferometric sensor attocube systems explore your nanoworld

22 PAGE 27 & PRODUCT CATALOG Optical Microscopes Atomic Force Microscopes Scanning Tunneling Microscope Probe Station attosnom III attoafm I attoafm II attoafm III attostm attcps yes yes yes yes yes yes yes yes no yes yes no on request on request no on request no no on request yes on request on request no yes on request yes no on request no no on request yes no on request no no fiber based, low temperature scanning near-field optical microscope, tuning fork sensor low temperature atomic force microscope, interferometric sensor low temperature atomic force microscope, modular and flexible, interferometric sensor low temperature atomic force microscope, tuning fork sensor low temperature scanning tunneling microscope, highly compact and stable cryogenic probe station with four ultra stable nano-manipulation stages LTSYS

Low Vibration Cryogenic Equipment

Low Vibration Cryogenic Equipment PAGE 12 PAGE 13 ATTOCUBE S CRYOSTATS ATTODRY attodry1000....................... 14 cryogen-free cryostats with/without s attodry700.........................18 cryogen-free table-top cryostats with optical