Characterization of MEMS Devices
|
|
- Alexis Harper
- 5 years ago
- Views:
Transcription
1 MEMS: Characterization Characterization of MEMS Devices Prasanna S. Gandhi Assistant Professor, Department of Mechanical Engineering, Indian Institute of Technology, Bombay,
2 Recap Characterization of MEMS Motivation Principles of optics Tools for optical characterization Microscope Ellipsometer Profilometer
3 Today s Class Scanning Probe Microscopy based tools: STM and AFM Methods for characterization of mechanical properties
4 Limitations of Microscope Q: is it possible to increase the magnification of microscope indefinitely and expect improved resolution?? Minimum resolution possible is comparable with wavelength of light
5 SPM: STM and AFM STM invented in early 80s by Binnig and Rohrer. Real limitations: only used to image conducting materials. Cannot distinguish between atoms of different elements within a compound material.
6 STM: Fundamentals
7 STM: Fundamentals Tip Cantilever Electron Tunneling Surface University of Southampton Surface Science Group Tunneling current at distance about 10A Two methods Constant current mode Constant height mode: faster Remarkable sensitivity: current being exponential function of distance (1A change order of magnitude change in current) Measures surface of constant tunneling probability Surface has small area oxidized?? Valid for conductors only
8 STM Image STM image of copper and nickel atoms
9 AFM: Fundamentals Force Sample Contact Repulsive Tip-sample separation Attractive Non-Contact Force of interaction between molecules Tip <100A in dia Scanning of sample or tip to generate image Van der Waals forces between tip and sample Contact: few A, noncontact: A Force balance in contact regime? Additional force: Capillary force + cantilever force = repulsive VW force ( N) Detection using photodiodes
10 AFM: Operation Contact Mode Constant-height Fast speeds Atomic scale images Constant-force: cantilever deflection used as feedback to adjust z to maintain deflection constant Speed of scanning is limited Scan path Sample Non-Contact mode / tapping mode
11 AFM: Operation Non-Contact mode / tapping mode Vibration of AFM cantilever near surface of a sample Total force: N very small Stiffer cantilevers necessary Operation near resonance frequency (typically KHz), amplitude A Change in the resonance frequency during scanning of sample Control can be used to keep resonance amplitude or freq constant Soft samples can be probed in this mode
12 AFM: Operation Other modes MFM: magnetic force microscopy LFM: lateral force microscopy EFM: Electrostatic force microscopy TSM: Thermal scanning microscopy NSOM: Near field scanning optical microscopy Nanolithography
13 Atomic Force Microscope Actual system details Multi-mode nanoscope from Digital Instruments: Physics Dept., IIT Bombay
14 Atomic Force Microscope The SPM head All figures of actual system are taken from Multimode SPM installation manual, RevB, Digital Instruments, 2004.
15 Atomic Force Microscope
16 Atomic Force Microscope
17 Atomic Force Microscope Application to MEMS Measurement of MEMS cantilever stiffness using AFM BioMEMS sensor characterization (ongoing activity) Nanoindentation using diamond tip Thin film surface characterization
18 AFM Image Kriptan- polymer surface characteristics using AFM
19 Application of techniques Characterization of Mechanical Properties Properties: E, ν, internal stress etc. Various Techniques Bending test Cantilever Beam Bulge test Resonance method M-Test Nanoindentation
20 Bending Test Cantilever k = 3 Ebt 4 l ( 1 ν 2 ) 3 k is the stiffness, E is the elastic modulus, b is the cantilever width, v is Poisson s ratio, t is thickness, and l is the length of cantilever at the point of contact,
21 Bending Test Fixed-fixed Beam = F = k bending z + k stress z + k stretching z 3 4 Ewπ t 6L 3 3 z bending, stress, and stretching components: Small loads: - bending and stress Large loads: - Stretching 2 wσ 0π t + z + 2L 4 Ewπ t z 3 8L E is the elastic modulus, b is the cantilever width, v is Poisson s ratio, t is thickness, and l is the length of cantilever at the point of contact, 3
22 Bulge Test Pressure on circular membrane p = 4tσ r 2 0 h + 8t 3r 4 E h 1 ν 3
23 Resonance method Vibrating cantilever f 0i = 2 λi t 4πl 2 E 3ρ Where E, ρ, l and t are the Young s modulus, density, length and thickness of the cantilever. λi is the eigen value, where i is an integer that describes the resonance mode number; for the first mode λ =
24 M-Test K V eff pi = = 27 8K eff g 1 + γ g ω 0 ε 0 n S L 1 + kl 2 sinh kl { cosh } 2 kl 2 12S ~ 3 k =, S = σtg 0, B = B ~ Et 3 g Set of cantilever, fixed-fixed beam, circular diaphragm, fabricated on substrate: actuated by electrostatic pull Characterization is based on pull in voltage No necessity of displacement measurement 3 0
25 Nanoindentation: AFM Additional attachment to AFM r S = dp dh = 2 E π r A 2 2 ( 1 ν ) ( 1 ) 1 ν i = + E E E i
26 Conclusions Various optical principles Characterization tools Microscope Ellipsometer Profilometer Various methods of characterization of mechanical properties
27 Next class Polytec Laser Doppler Vibrometer [2]
28 Atomic Force Microscope Laser Alignment Crucial issues -Alignment -Calibration
Characterization of MEMS Devices
MEMS: Characterization Characterization of MEMS Devices Prasanna S. Gandhi Assistant Professor, Department of Mechanical Engineering, Indian Institute of Technology, Bombay, Recap Fabrication of MEMS Conventional
More informationModule 26: Atomic Force Microscopy. Lecture 40: Atomic Force Microscopy 3: Additional Modes of AFM
Module 26: Atomic Force Microscopy Lecture 40: Atomic Force Microscopy 3: Additional Modes of AFM 1 The AFM apart from generating the information about the topography of the sample features can be used
More informationAtomic Force Microscopy imaging and beyond
Atomic Force Microscopy imaging and beyond Arif Mumtaz Magnetism and Magnetic Materials Group Department of Physics, QAU Coworkers: Prof. Dr. S.K.Hasanain M. Tariq Khan Alam Imaging and beyond Scanning
More informationLecture 4 Scanning Probe Microscopy (SPM)
Lecture 4 Scanning Probe Microscopy (SPM) General components of SPM; Tip --- the probe; Cantilever --- the indicator of the tip; Tip-sample interaction --- the feedback system; Scanner --- piezoelectric
More informationBasic Laboratory. Materials Science and Engineering. Atomic Force Microscopy (AFM)
Basic Laboratory Materials Science and Engineering Atomic Force Microscopy (AFM) M108 Stand: 20.10.2015 Aim: Presentation of an application of the AFM for studying surface morphology. Inhalt 1.Introduction...
More informationGeneral concept and defining characteristics of AFM. Dina Kudasheva Advisor: Prof. Mary K. Cowman
General concept and defining characteristics of AFM Dina Kudasheva Advisor: Prof. Mary K. Cowman Overview Introduction History of the SPM invention Technical Capabilities Principles of operation Examples
More informationScanning Probe Microscopy. Amanda MacMillan, Emmy Gebremichael, & John Shamblin Chem 243: Instrumental Analysis Dr. Robert Corn March 10, 2010
Scanning Probe Microscopy Amanda MacMillan, Emmy Gebremichael, & John Shamblin Chem 243: Instrumental Analysis Dr. Robert Corn March 10, 2010 Scanning Probe Microscopy High-Resolution Surface Analysis
More informationAtomic and molecular interactions. Scanning probe microscopy.
Atomic and molecular interactions. Scanning probe microscopy. Balázs Kiss Nanobiotechnology and Single Molecule Research Group, Department of Biophysics and Radiation Biology 27. November 2013. 2 Atomic
More informationScanning Tunneling Microscopy
Scanning Tunneling Microscopy References: 1. G. Binnig, H. Rohrer, C. Gerber, and Weibel, Phys. Rev. Lett. 49, 57 (1982); and ibid 50, 120 (1983). 2. J. Chen, Introduction to Scanning Tunneling Microscopy,
More informationNIS: what can it be used for?
AFM @ NIS: what can it be used for? Chiara Manfredotti 011 670 8382/8388/7879 chiara.manfredotti@to.infn.it Skype: khiaram 1 AFM: block scheme In an Atomic Force Microscope (AFM) a micrometric tip attached
More informationInstrumentation and Operation
Instrumentation and Operation 1 STM Instrumentation COMPONENTS sharp metal tip scanning system and control electronics feedback electronics (keeps tunneling current constant) image processing system data
More informationIntegrating MEMS Electro-Static Driven Micro-Probe and Laser Doppler Vibrometer for Non-Contact Vibration Mode SPM System Design
Tamkang Journal of Science and Engineering, Vol. 12, No. 4, pp. 399 407 (2009) 399 Integrating MEMS Electro-Static Driven Micro-Probe and Laser Doppler Vibrometer for Non-Contact Vibration Mode SPM System
More informationSTM: Scanning Tunneling Microscope
STM: Scanning Tunneling Microscope Basic idea STM working principle Schematic representation of the sample-tip tunnel barrier Assume tip and sample described by two infinite plate electrodes Φ t +Φ s =
More informationScanning Probe Microscopy (SPM)
Scanning Probe Microscopy (SPM) Scanning Tunneling Microscopy (STM) --- G. Binnig, H. Rohrer et al, (1982) Near-Field Scanning Optical Microscopy (NSOM) --- D. W. Pohl (1982) Atomic Force Microscopy (AFM)
More informationContents. What is AFM? History Basic principles and devices Operating modes Application areas Advantages and disadvantages
Contents What is AFM? History Basic principles and devices Operating modes Application areas Advantages and disadvantages Figure1: 2004 Seth Copen Goldstein What is AFM? A type of Scanning Probe Microscopy
More informationImaging Methods: Scanning Force Microscopy (SFM / AFM)
Imaging Methods: Scanning Force Microscopy (SFM / AFM) The atomic force microscope (AFM) probes the surface of a sample with a sharp tip, a couple of microns long and often less than 100 Å in diameter.
More informationAnd Manipulation by Scanning Probe Microscope
Basic 15 Nanometer Scale Measurement And Manipulation by Scanning Probe Microscope Prof. K. Fukuzawa Dept. of Micro/Nano Systems Engineering Nagoya University I. Basics of scanning probe microscope Basic
More informationIntroduction to Scanning Probe Microscopy Zhe Fei
Introduction to Scanning Probe Microscopy Zhe Fei Phys 590B, Apr. 2019 1 Outline Part 1 SPM Overview Part 2 Scanning tunneling microscopy Part 3 Atomic force microscopy Part 4 Electric & Magnetic force
More informationMS482 Materials Characterization ( 재료분석 ) Lecture Note 11: Scanning Probe Microscopy. Byungha Shin Dept. of MSE, KAIST
2015 Fall Semester MS482 Materials Characterization ( 재료분석 ) Lecture Note 11: Scanning Probe Microscopy Byungha Shin Dept. of MSE, KAIST 1 Course Information Syllabus 1. Overview of various characterization
More informationScanning Tunneling Microscopy
Scanning Tunneling Microscopy Scanning Direction References: Classical Tunneling Quantum Mechanics Tunneling current Tunneling current I t I t (V/d)exp(-Aφ 1/2 d) A = 1.025 (ev) -1/2 Å -1 I t = 10 pa~10na
More informationIntermittent-Contact Mode Force Microscopy & Electrostatic Force Microscopy (EFM)
WORKSHOP Nanoscience on the Tip Intermittent-Contact Mode Force Microscopy & Electrostatic Force Microscopy (EFM) Table of Contents: 1. Motivation... 1. Simple Harmonic Motion... 1 3. AC-Mode Imaging...
More informationMicroscopie a stilo: principi ed esempi di applicazione
Microscopie a stilo: principi ed esempi di applicazione Adele Sassella Dipartimento di Scienza dei Materiali Università degli Studi di Milano Bicocca adele.sassella@unimib.it Pavia, 22 aprile 2009 SCANNING
More informationSOLID STATE PHYSICS PHY F341. Dr. Manjuladevi.V Associate Professor Department of Physics BITS Pilani
SOLID STATE PHYSICS PHY F341 Dr. Manjuladevi.V Associate Professor Department of Physics BITS Pilani 333031 manjula@bits-pilani.ac.in Characterization techniques SEM AFM STM BAM Outline What can we use
More informationEcole Franco-Roumaine : Magnétisme des systèmes nanoscopiques et structures hybrides - Brasov, Modern Analytical Microscopic Tools
1. Introduction Solid Surfaces Analysis Group, Institute of Physics, Chemnitz University of Technology, Germany 2. Limitations of Conventional Optical Microscopy 3. Electron Microscopies Transmission Electron
More informationSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
G01Q SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM] Scanning probes, i.e. devices having at least a tip of nanometre sized dimensions
More informationOutline Scanning Probe Microscope (SPM)
AFM Outline Scanning Probe Microscope (SPM) A family of microscopy forms where a sharp probe is scanned across a surface and some tip/sample interactions are monitored Scanning Tunneling Microscopy (STM)
More informationTechniken der Oberflächenphysik (Techniques of Surface Physics)
Techniken der Oberflächenphysik (Techniques of Surface Physics) Prof. Yong Lei & Dr. Yang Xu Fachgebiet 3D-Nanostrukturierung, Institut für Physik Contact: yong.lei@tu-ilmenau.de yang.xu@tu-ilmenau.de
More informationScanning Probe Microscopy (SPM)
CHEM53200: Lecture 9 Scanning Probe Microscopy (SPM) Major reference: 1. Scanning Probe Microscopy and Spectroscopy Edited by D. Bonnell (2001). 2. A practical guide to scanning probe microscopy by Park
More informationSantosh Devasia Mechanical Eng. Dept., UW
Nano-positioning Santosh Devasia Mechanical Eng. Dept., UW http://faculty.washington.edu/devasia/ Outline of Talk 1. Why Nano-positioning 2. Sensors for Nano-positioning 3. Actuators for Nano-positioning
More informationINTRODUCTION TO SCA\ \I\G TUNNELING MICROSCOPY
INTRODUCTION TO SCA\ \I\G TUNNELING MICROSCOPY SECOND EDITION C. JULIAN CHEN Department of Applied Physics and Applied Mathematics, Columbia University, New York OXFORD UNIVERSITY PRESS Contents Preface
More informationScanning Probe Microscopy. EMSE-515 F. Ernst
Scanning Probe Microscopy EMSE-515 F. Ernst 1 Literature 2 3 Scanning Probe Microscopy: The Lab on a Tip by Ernst Meyer,Ans Josef Hug,Roland Bennewitz 4 Scanning Probe Microscopy and Spectroscopy : Theory,
More informationAFM for Measuring Surface Topography and Forces
ENB 2007 07.03.2007 AFM for Measuring Surface Topography and Forces Andreas Fery Scanning Probe : What is it and why do we need it? AFM as a versatile tool for local analysis and manipulation Dates Course
More informationIntroduction to Scanning Probe Microscopy
WORKSHOP Nanoscience on the Tip Introduction to Scanning Probe Microscopy Table of Contents: 1 Historic Perspectives... 1 2 Scanning Force Microscopy (SFM)... 2 2.1. Contact Mode... 2 2.2. AC Mode Imaging...
More informationProgram Operacyjny Kapitał Ludzki SCANNING PROBE TECHNIQUES - INTRODUCTION
Program Operacyjny Kapitał Ludzki SCANNING PROBE TECHNIQUES - INTRODUCTION Peter Liljeroth Department of Applied Physics, Aalto University School of Science peter.liljeroth@aalto.fi Projekt współfinansowany
More informationCHAPTER 4 DESIGN AND ANALYSIS OF CANTILEVER BEAM ELECTROSTATIC ACTUATORS
61 CHAPTER 4 DESIGN AND ANALYSIS OF CANTILEVER BEAM ELECTROSTATIC ACTUATORS 4.1 INTRODUCTION The analysis of cantilever beams of small dimensions taking into the effect of fringing fields is studied and
More informationScanning Force Microscopy
Scanning Force Microscopy Roland Bennewitz Rutherford Physics Building 405 Phone 398-3058 roland.bennewitz@mcgill.ca Scanning Probe is moved along scan lines over a sample surface 1 Force Microscopy Data
More information3.052 Nanomechanics of Materials and Biomaterials Thursday 02/15/07 Prof. C. Ortiz, MIT-DMSE I LECTURE 4: FORCE-DISTANCE CURVES
I LECTURE 4: FORCE-DISTANCE CURVES Outline : LAST TIME : ADDITIONAL NANOMECHANICS INSTRUMENTATION COMPONENTS... 2 PIEZOS TUBES : X/Y SCANNING... 3 GENERAL COMPONENTS OF A NANOMECHANICAL DEVICE... 4 HIGH
More informationScanning Probe Microscopy
1 Scanning Probe Microscopy Dr. Benjamin Dwir Laboratory of Physics of Nanostructures (LPN) Benjamin.dwir@epfl.ch PH.D3.344 Outline: Introduction: What is SPM, history STM AFM Image treatment Advanced
More informationLecture 26 MNS 102: Techniques for Materials and Nano Sciences
Lecture 26 MNS 102: Techniques for Materials and Nano Sciences Reference: #1 C. R. Brundle, C. A. Evans, S. Wilson, "Encyclopedia of Materials Characterization", Butterworth-Heinemann, Toronto (1992),
More information3.052 Nanomechanics of Materials and Biomaterials Thursday 02/08/06 Prof. C. Ortiz, MIT-DMSE I LECTURE 2 : THE FORCE TRANSDUCER
I LECTURE 2 : THE FORCE TRANSDUCER Outline : LAST TIME : WHAT IS NANOMECHANICS... 2 HOW CAN WE MEASURE SUCH TINY FORCES?... 3 EXAMPLE OF A FORCE TRANSDUCER... 4 Microfabricated cantilever beams with nanosized
More informationSoftlithography and Atomic Force Microscopy
Praktikum I, Autumn Semester 2008/09 Experiment 13/14; 03.12.2008 Softlithography and Atomic Force Microscopy Authors: Claudio Zihlmann (zclaudio@student.ethz.ch) and Philippe Knüsel (pknuesel@student.ethz.ch)
More informationNanostructure. Materials Growth Characterization Fabrication. More see Waser, chapter 2
Nanostructure Materials Growth Characterization Fabrication More see Waser, chapter 2 Materials growth - deposition deposition gas solid Physical Vapor Deposition Chemical Vapor Deposition Physical Vapor
More informationEffect of AFM Cantilever Geometry on the DPL Nanomachining process
Int J Advanced Design and Manufacturing Technology, Vol. 9/ No. 4/ December 2016 75 Effect of AFM Cantilever Geometry on the DPL Nanomachining process A. R. Norouzi Department of New Sciences and Technologies,
More informationApplication of electrostatic force microscopy in nanosystem diagnostics
Materials Science, Vol., No. 3, 003 Application of electrostatic force microscopy in nanosystem diagnostics TEODOR P. GOTSZALK *, PIOTR GRABIEC, IVO W. RANGELOW 3 Fulty of Microsystem Electronics and Photonics,
More informationDesign and Analysis of Various Microcantilever Shapes for MEMS Based Sensing
ScieTech 014 Journal of Physics: Conference Series 495 (014) 01045 doi:10.1088/174-6596/495/1/01045 Design and Analysis of Various Microcantilever Shapes for MEMS Based Sensing H. F. Hawari, Y. Wahab,
More information9-11 April 2008 Measurement of Large Forces and Deflections in Microstructures
9-11 April 28 Measurement of Large Forces and Deflections in Microstructures Kai Axel Hals 1, Einar Halvorsen, and Xuyuan Chen Institute for Microsystem Technology, Vestfold University College, P.O. Box
More informationChapter 10. Nanometrology. Oxford University Press All rights reserved.
Chapter 10 Nanometrology Oxford University Press 2013. All rights reserved. 1 Introduction Nanometrology is the science of measurement at the nanoscale level. Figure illustrates where nanoscale stands
More information2.76/2.760 Multiscale Systems Design & Manufacturing
2.76/2.760 Multiscale Systems Design & Manufacturing Fall 2004 MOEMS Devices for Optical communications system Switches and micromirror for Add/drops Diagrams removed for copyright reasons. MOEMS MEMS
More informationThe most versatile AFM platform for your nanoscale microscopy needs
The most versatile AFM platform for your nanoscale microscopy needs Atomic Force Microscopy (AFM) for nanometer resolution imaging with electrical, magnetic, thermal, and mechanical property measurement
More informationLecture Note October 1, 2009 Nanostructure characterization techniques
Lecture Note October 1, 29 Nanostructure characterization techniques UT-Austin PHYS 392 T, unique # 5977 ME 397 unique # 1979 CHE 384, unique # 151 Instructor: Professor C.K. Shih Subjects: Applications
More informationOptimal Design and Evaluation of Cantilever Probe for Multifrequency Atomic Force Microscopy
11 th World Congress on Structural and Multidisciplinary Optimisation 07 th -12 th, June 2015, Sydney Australia Optimal Design and Evaluation of Cantilever Probe for Multifrequency Atomic Force Microscopy
More informationLecture 12: Biomaterials Characterization in Aqueous Environments
3.051J/20.340J 1 Lecture 12: Biomaterials Characterization in Aqueous Environments High vacuum techniques are important tools for characterizing surface composition, but do not yield information on surface
More informationCHARACTERIZATION of NANOMATERIALS KHP
CHARACTERIZATION of NANOMATERIALS Overview of the most common nanocharacterization techniques MAIN CHARACTERIZATION TECHNIQUES: 1.Transmission Electron Microscope (TEM) 2. Scanning Electron Microscope
More informationChapter 4. Characterization
Chapter 4. Characterization Tools for Characterization Structural analysis: SEM, TEM, XRD, SAM, SPM, PEEM, LEEM, STXM, SXPEM Chemical analysis: AES, XPS, TPD, SIMS, EDX, SPM Electronic, optical analysis:
More informationReducing dimension. Crystalline structures
Reducing dimension 2D surfaces, interfaces and quantum wells 1D carbon nanotubes, quantum wires and conducting polymers 0D nanocrystals, nanoparticles, lithographically patterned quantum dots Crystalline
More informationFrom nanophysics research labs to cell phones. Dr. András Halbritter Department of Physics associate professor
From nanophysics research labs to cell phones Dr. András Halbritter Department of Physics associate professor Curriculum Vitae Birth: 1976. High-school graduation: 1994. Master degree: 1999. PhD: 2003.
More informationHow Does a Microcantilever Work?
How Does a Cantilever Work? Participant Guide Description and Estimated Time to Complete The microcantilever is a widely used component in microsystems devices or microelectromechanical systems (MEMS).
More informationDetermining the Elastic Modulus and Hardness of an Ultrathin Film on a Substrate Using Nanoindentation
Determining the Elastic Modulus and Hardness of an Ultrathin Film on a Substrate Using Nanoindentation The Harvard community has made this article openly available. Please share how this access benefits
More informationImproving the accuracy of Atomic Force Microscope based nanomechanical measurements. Bede Pittenger Bruker Nano Surfaces, Santa Barbara, CA, USA
Improving the accuracy of Atomic Force Microscope based nanomechanical measurements Bede Pittenger Bruker Nano Surfaces, Santa Barbara, CA, USA How can we improve accuracy in our nanomechanical measurements?
More informationScanning Force Microscopy And Related Techniques. With the help of.
With the help of. 1. Yosi Shacham TAU 2. Yossi Rosenwacks TAU 3. Julio Gomez-Herrero UAM 4. Adriana Gil - UAM 5. Serge Lemay - Delft 6. Hezy Cohen - HUJI 7. Scanning Force Microscopy And Related Techniques
More informationMagnetic Force Microscopy
Magnetic Force Microscopy June 1, 1998 Kim Byung-Il Dept. of Physics Seoul National Univ. 6/19/1 1 Superconductivity Lab. Development of MFM Noncontact mode weak interaction magnetic, electric and attr.
More informationLecture 20. Measuring Pressure and Temperature (Chapter 9) Measuring Pressure Measuring Temperature MECH 373. Instrumentation and Measurements
MECH 373 Instrumentation and Measurements Lecture 20 Measuring Pressure and Temperature (Chapter 9) Measuring Pressure Measuring Temperature 1 Measuring Acceleration and Vibration Accelerometers using
More informationA MEMS nanoplotter with high-density parallel dip-pen nanolithography probe arrays
INSTITUTE OF PHYSICS PUBLISHING Nanotechnology 13 (2002) 212 217 NANOTECHNOLOGY PII: S0957-4484(02)29674-9 A MEMS nanoplotter with high-density parallel dip-pen nanolithography probe arrays Ming Zhang
More informationMEMS Metrology. Prof. Tianhong Cui ME 8254
MEMS Metrology Prof. Tianhong Cui ME 8254 What is metrology? Metrology It is the science of weights and measures Refers primarily to the measurements of length, weight, time, etc. Mensuration- A branch
More informationVEDA - Virtual Environment for Dynamic Atomic Force Microscopy
VEDA - Virtual Environment for Dynamic Atomic Force Microscopy John Melcher, Daniel Kiracofe, doctoral students Steven Johnson, undergraduate Shuiqing Hu, Veeco Arvind Raman, Associate Professor Mechanical
More informationMeasurements of interaction forces in (biological) model systems
Measurements of interaction forces in (biological) model systems Marina Ruths Department of Chemistry, UMass Lowell What can force measurements tell us about a system? Depending on the technique, we might
More informationScanning Force Microscopy II
Scanning Force Microscopy II Measurement modes Magnetic force microscopy Artifacts Lars Johansson 1 SFM - Forces Chemical forces (short range) Van der Waals forces Electrostatic forces (long range) Capillary
More informationLecture 19. Measurement of Solid-Mechanical Quantities (Chapter 8) Measuring Strain Measuring Displacement Measuring Linear Velocity
MECH 373 Instrumentation and Measurements Lecture 19 Measurement of Solid-Mechanical Quantities (Chapter 8) Measuring Strain Measuring Displacement Measuring Linear Velocity Measuring Accepleration and
More informationScanning Force Microscopy And Related Techniques
Scanning Force Microscopy And Related Techniques Danny Porath 2003 With the help of. 1. Yosi Shacham TAU 2. Yossi Rosenwacks TAU 3. Julio Gomez-Herrero UAM 4. Adriana Gil - UAM 5. Serge Lemay - Delft 6.
More informationCNPEM Laboratório de Ciência de Superfícies
Investigating electrical charged samples by scanning probe microscopy: the influence to magnetic force microscopy and atomic force microscopy phase images. Carlos A. R. Costa, 1 Evandro M. Lanzoni, 1 Maria
More informationChapter 12. Nanometrology. Oxford University Press All rights reserved.
Chapter 12 Nanometrology Introduction Nanometrology is the science of measurement at the nanoscale level. Figure illustrates where nanoscale stands in relation to a meter and sub divisions of meter. Nanometrology
More informationSpring 2009 EE 710: Nanoscience and Engineering
Spring 2009 EE 710: Nanoscience and Engineering Part 1: Introduction Course Texts: Bhushan, Springer Handbook of Nanotechnology 2 nd ed., Springer 2007 Hornyak, et.al, Introduction ti to Nanoscience, CRC
More informationSingle-Molecule Recognition and Manipulation Studied by Scanning Probe Microscopy
Single-Molecule Recognition and Manipulation Studied by Scanning Probe Microscopy Byung Kim Department of Physics Boise State University Langmuir (in press, 2006) swollen collapsed Hydrophilic non-sticky
More informationEXPLORING SCANNING PROBE MICROSCOPY WITH MATHEMATICA
EXPLORING SCANNING PROBE MICROSCOPY WITH MATHEMATICA Dror Sarid University of Arizona A WILEY-1NTERSCIENCE PUBLICATION JOHN WILEY & SONS, INC. New York Chichester Weinheim Brisbane Singapore Toronto CONTENTS
More informationNanomechanics Measurements and Standards at NIST
Nanomechanics Measurements and Standards at NIST Robert F. Cook Deputy Chief, Ceramics Division Leader, Nanomechanical Properties Group robert.cook@nist.gov NIST Mission Promote U.S. innovation and industrial
More informationNitride HFETs applications: Conductance DLTS
Nitride HFETs applications: Conductance DLTS The capacitance DLTS cannot be used for device trap profiling as the capacitance for the gate will be very small Conductance DLTS is similar to capacitance
More informationNANOTRIBOLOGY - The road to no WEAR! by Richie Khandelwal (MT03B023) & Sahil Sahni (MT03B024)
NANOTRIBOLOGY - The road to no WEAR! by Richie Khandelwal (MT03B023) & Sahil Sahni (MT03B024) Feynman once said "there is plenty of room at the bottom". Today we experience the relevance of this statement
More informationScanning Tunneling Microscopy and its Application
Chunli Bai Scanning Tunneling Microscopy and its Application With 181 Figures SHANGHAI SCIENTIFIC & TECHNICAL PUBLISHERS Jpl Springer Contents 1. Introduction 1 1.1 Advantages of STM Compared with Other
More informationSCANNING PROBE ALLOYING NANOLITHOGRAPHY (SPAN) A Dissertation HYUNGOO LEE
SCANNING PROBE ALLOYING NANOLITHOGRAPHY (SPAN) A Dissertation by HYUNGOO LEE Submitted to the Office of Graduate Studies of Texas A&M University in partial fulfillment of the requirements for the degree
More informationTECHNIQUE TO EVALUATE NANOMECHANICS OF CANTILEVER AT NANOSCALE BY USING AFM
TECHNIQUE TO EVALUATE NANOMECHANICS OF CANTILEVER AT NANOSCALE BY USING AFM Upendra Sharan Gupta 1, Rahul Singh 2, Savan Parmar 3, Prasanna Gupta 4, Vipul Pandey 5 1 Reader Dept. of Mech. Engineering,
More informationThe New Boundary Condition Effect on The Free Vibration Analysis of Micro-beams Based on The Modified Couple Stress Theory
International Research Journal of Applied and Basic Sciences 2015 Available online at www.irjabs.com ISSN 2251-838X / Vol, 9 (3): 274-279 Science Explorer Publications The New Boundary Condition Effect
More informationFinite Element Analysis of Piezoelectric Cantilever
Finite Element Analysis of Piezoelectric Cantilever Nitin N More Department of Mechanical Engineering K.L.E S College of Engineering and Technology, Belgaum, Karnataka, India. Abstract- Energy (or power)
More informationUniversità degli Studi di Bari "Aldo Moro"
Università degli Studi di Bari "Aldo Moro" Table of contents 1. Introduction to Atomic Force Microscopy; 2. Introduction to Raman Spectroscopy; 3. The need for a hybrid technique Raman AFM microscopy;
More informationDetermining thermal noise limiting properties of thin films
Determining thermal noise limiting properties of thin films Courtney Linn Institute for Gravitational Research University of Glasgow Summer 2011 Abstract In order to make thermally stable mirrors to be
More informationPoint mass approximation. Rigid beam mechanics. spring constant k N effective mass m e. Simple Harmonic Motion.. m e z = - k N z
Free end Rigid beam mechanics Fixed end think of cantilever as a mass on a spring Point mass approximation z F Hooke s law k N = F / z This is beam mechanics, standard in engineering textbooks. For a rectangular
More informationIntroduction to Scanning Tunneling Microscopy
Introduction to Scanning Tunneling Microscopy C. JULIAN CHEN IBM Research Division Thomas J. Watson Research Center Yorktown Heights, New York New York Oxford OXFORD UNIVERSITY PRESS 1993 CONTENTS List
More informationAtomic Force Microscopy (AFM) Part I
Atomic Force Microscopy (AFM) Part I CHEM-L2000 Eero Kontturi 6 th March 2018 Lectures on AFM Part I Principles and practice Imaging of native materials, including nanocellulose Part II Surface force measurements
More informationMagnetic Force Microscopy (MFM) F = µ o (m )H
Magnetic Force Microscopy (MFM) F = µ o (m )H 1. MFM is based on the use of a ferromagnetic tip as a local field sensor. Magnetic interaction between the tip and the surface results in a force acting on
More informationAn Accurate Model for Pull-in Voltage of Circular Diaphragm Capacitive Micromachined Ultrasonic Transducers (CMUT)
An Accurate Model for Pull-in Voltage of Circular Diaphragm Capacitive Micromachined Ultrasonic Transducers (CMUT) Mosaddequr Rahman, Sazzadur Chowdhury Department of Electrical and Computer Engineering
More informationBioAFM spectroscopy for mapping of Young s modulus of living cells
BioAFM spectroscopy for mapping of Young s modulus of living cells Jan Přibyl pribyl@nanobio.cz Optical microscopy AFM Confocal microscopy Young modulus Content Introduction (theory) Hook s law, Young
More informationIntroduction to Microeletromechanical Systems (MEMS) Lecture 9 Topics. MEMS Overview
Introduction to Microeletromechanical Systems (MEMS) Lecture 9 Topics MicroOptoElectroMechanical Systems (MOEMS) Grating Light Valves Corner Cube Reflector (CCR) MEMS Light Modulator Optical Switch Micromirrors
More informationScanning Probe Microscopy (SPM)
http://ww2.sljus.lu.se/staff/rainer/spm.htm Scanning Probe Microscopy (FYST42 / FAFN30) Scanning Probe Microscopy (SPM) overview & general principles March 23 th, 2018 Jan Knudsen, room K522, jan.knudsen@sljus.lu.se
More informationHow do we see the Nano-World? Microscopic Techniques
Lecture 2 How do we see the Nano-World? Microscopic Techniques Comparison of Microscopies 10 6 Vertical scale (A) 10 4 10 2 1 TEM SPM SEM OM 1 10 2 10 4 10 6 Lateral scale (A) Comparison of Microscopies
More informationPiezoelectric Actuator for Micro Robot Used in Nanosatellite
Piezoelectric Actuator for Micro Robot Used in Nanosatellite R Bansevicius, S Navickaite, V Jurenas and A Bubulis PIEZOELECTRIC ACTUATOR FOR MICRO ROBOT USED IN NANOSATELLITE. R Bansevicius 1, S Navickaite,
More informationSupplementary Figure 3. Transmission spectrum of Glass/ITO substrate.
Supplementary Figure 1. The AFM height and SKPM images of PET/Ag-mesh/PH1000 and PET/Ag-mesh/PH1000/PEDOT:PSS substrates. (a, e) AFM height images on the flat PET area. (c, g) AFM height images on Ag-mesh
More informationContents. Preface XI Symbols and Abbreviations XIII. 1 Introduction 1
V Contents Preface XI Symbols and Abbreviations XIII 1 Introduction 1 2 Van der Waals Forces 5 2.1 Van der Waals Forces Between Molecules 5 2.1.1 Coulomb Interaction 5 2.1.2 Monopole Dipole Interaction
More informationINDIAN INSTITUTE OF TECHNOLOGY ROORKEE NPTEL NPTEL ONLINE CERTIFICATION COURSE. Biomedical Nanotechnology. Lec-05 Characterisation of Nanoparticles
INDIAN INSTITUTE OF TECHNOLOGY ROORKEE NPTEL NPTEL ONLINE CERTIFICATION COURSE Biomedical Nanotechnology Lec-05 Characterisation of Nanoparticles Dr. P. Gopinath Department of Biotechnology Indian Institute
More informationMicrostructure cantilever beam for current measurement
264 South African Journal of Science 105 July/August 2009 Research Articles Microstructure cantilever beam for current measurement HAB Mustafa and MTE Khan* Most microelectromechanical systems (MEMS) sensors
More informationDesign and Simulation of A MEMS Based Horseshoe Shaped Low Current Lorentz Deformable Mirror (LCL-DM).
Design and Simulation of A MEMS Based Horseshoe Shaped Low Current Lorentz Deformable Mirror (LCL-DM). Byoungyoul Park 1, Tao Chen 1, Cyrus Shafai 1 1 Electrical and Computer Engineering, University of
More informationA CONTROL SYSTEMS PERSPECTIVE ON NANOINTERROGATION
A CONTROL SYSTEMS PERSPECTIVE ON NANOINTERROGATION Scanning Probe Microscopy At the 1959 annual meeting of the American Physical Society, Richard Feynman gave a seminal talk titled There s Plenty of Room
More information