Equipment and Facilities of National Institute for Materials Science
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1 Equipment and Facilities of National Institute for Materials Science March 9, 2018 The followings are facilities which are provided for shared use to any person who engages in scientific and technological research and development outside the National Institute for Materials Science. ( :Available Use for The Nanotechnology Platform Program; by Ministry of Education, Culture, Sports and Technology.) 1. Research Network and Facility Services Division 1) Materials Manufacturing and Engineering Station 1. Cold crucible levitation melting furnace 2. 5kg vacuum induction furnace 3. 20kg vacuum induction furnace 4. Pressure electro slag remelting furnace 5. Forging machine 6. 2Hi hot rolling machine 7. Caliber rolling machine 8. 4Hi cold rolling machine 9. 70ton swaging machine ton swaging machine 11. Furnace for forging and rolling(max.1,250 ) 12. Movable furnace for forging and rolling(max.1,200 ) 13. Deformation rate control caliber rolling machine 14. Furnace for caliber rolling(max.1,250 ) 15. Furnace(max.1,400 ) 16. Furnace for annealing(max.850 ) 17. Electron beam welding machine 18.Lath cutting machine for glass working 19. High vacuum evacuation device for glass working Inquiry about Materials Manufacturing and Engineering Station 1 / 10
2 2) Materials Analysis Station 1. Glow Discharge Mass Spectrometer (VG9000) 2. Micro Energy Dispersive X-ray Fluorescence Spectrometer (ORBIS PC) 3. Sequential Type Inductively Coupled Plasma Optical Emission Spectrometer (ICPS8100CL) 4. Simultaneous Type Inductively Coupled Plasma Atomic Emission Spectrometer (icap6300) 5. Double wavelength CCD-type single crystal diffractometer with low-temperature equipment (VariMax DW with Saturn) 6. Field Emission Electron Probe Micro-Analyzer (JXA-8900R 改 ) 7. Ultra Low Voltage Field Emission Scanning Electron Microscope (SU8000) 8. Ultra High Resolution Field Emission Scanning Electron Microscope (S-5500) 9. Cross-section Polisher (SM-09020CP) 10. Scanning Auger Electron Microprobe (JAMP-9500F) 11. Scanning Auger Electron Microprobe (PHI 680) 12. X-ray Photoelectron Spectroscopy (Quantera SXM) 13. Field Emission Electron Probe Micro-Analyzer (FE-EPMA) (JXA-8500F) 14. Electron Probe Micro-Analyzer (JXA-8900RL) 15. Field Emission Scanning Electron Microscope (JSM-6500F) 16. Scanning Electron Mocroprobe (JSM-6510) 17. Nitrogen/Oxygen Determination (LECO TC600) Hydrogen Determination (LECO RH404) Carbon/Sulfur Determination (LECO CS444LS) 18. Inductively Coupled Plasma Atomic Emission Spectrometer (720 ICP-OES) 19. Double Focusing Magnetic Sector Field ICP-MS (ELEMENT XR) 20. Femtosecond Laser System (IFRIT) 21. Inductively Coupled Plasma Optical Emission Spectrometer (SPS3520UV-DD) 22. Temperature variable type powder X-ray diffractometer 23. High-power and high-sensitivity type powder X-ray diffractometer 24. Compact type powder X-ray diffractometer 25. Time-of-flight Secondary Ion Mass Spectrometry (TOF-SIMS) 26. High-sensitivity type powder X-ray diffractometer 27. Ion chromatograph system Inquiry about Materials Analysis Station 2 / 10
3 3) Transmission Electron Microscopy Station 1. Real working environment physical characterization TEM (JEM-ARM200F-G) kV transmission electron microscope (Tecnai G2 F30) kv field-emission transmission electron microscope (JEM-2100F1) kv field-emission transmission electron microscope (JEM-2100F2) kV transmission electron microscope(jem-2100) 6. Focused Ion Beam systems (JEM-9320FIB, JEM-9310FIB1, JEM-9310FIB2, JIB-4000) 7. Field emission scanning electron microscope (JSM-7000F) 8. Ultramicrotome (Leica EM UC6) 9. HRTEM Analysis system 10. Electron tomography analysis system 11. TEM sample preparation apparatus kV field emission transmission electron microscope (JEM-3000F) 13. High voltage transmission electron microscope (JEM-ARM1000) 14. Atomic-resolution analytical electron microscope (FEI-Titan Cubed) 15. Scanning transmission electron microscope (HD-2300C) 16. Cold-FEG transmission electron microscope (HF-3000S) 17. Cold-FEG Lorentz microscope (HF-3000L) kV transmission electron microscope (JEM-1010) kV transmission electron microscope (JEM-2000EX) 20. Ultrahigh vacuum transmission electron microscope (JEM2000VF) 21. Dual Beam system 22. Pick-up system 23. Real working environmental electron holography microscope (JEM-ARM200F-B) 24. Focused ion beam system (Hitachi FB-2000S) Inquiry about Transmission Electron Microscopy Station 4) Synchrotron X-ray Station at SPring-8 3 / 10
4 1. Hard X-ray photoelectron spectrometer with an automatic sample exchange device 2. Hard X-ray Photoelectron Spectrometer 3. High-resolution X-ray powder diffractometer 4. 8-axis diffractometer for structural analysis of functional thin films Inquiry about Synchrotron X-ray Station At SPring-8 5) High Magnetic Field Station 1. Hybrid Magnet 2. Water-Cooled Magnet 3. 18T Superconducting Magnet 4. 15T Split-Paired Magnet 5. 10T Cryocooler-Cooled Magnet 6. Vibrating Sample Magnetometer (VSM) 7. 12T Cryocooler-Cooled Magnet 8. 20T Superconducting Magnet with dilution refrigerator 9. 20T Superconducting Magnet with 3He cryostat T Superconducting Magnet with 4He VTI cryostat MHz Solid-State NMR (Ⅰ) MHz Solid-State NMR (Ⅱ) MHz Solid-State NMR MHz Solid-State NMR Magnet 15. Advanced magneto-optical system MHz Solid-State NMR 17. Large Bore 17T Magnet 18. Cryocoil MAS Probe 19. Devices for optical observation and control of material processings under high magnetic fields 20. Helium liquefier system Inquiry about High Magnetic Field Station 6) Nanotechnology Innovation Station --- Nano-fabrication Group 4 / 10
5 6)-1 Foundry at Sengen-site kV-EB Writer 2. Laser Lithography System 3. Mask Aligner 4. Nano-Imprint Lithography System 5. Automatic Sputtering System 6. UHV Sputtering System 7. E-gun Evaporator 8. UHV E-gun Evaporator 9. Atomic Layer Deposition System (1) 10. Plasma-Enhanced CVD System 11. CCP-RIE System 12. ICP-RIE System 13. Silicon Deep-RIE System 14. High Power ICP-RIE System 15. FIB-SEM Dual Beam System 16. Rapid Thermal Annealing System 17. Thermal Oxidation and Annealing Furnace 18. FE-SEM 19. Atomic Force Microscope 20. 3D Measurement Laser Microscope 21. Dicing Saw (1) 22. Automatic Scriber 23. Chemical Mechanical Polishier 24. Wire Bonder (1) 25. Room Temperature Probing System 26. Cryogenic Probing System kV-EB Writer 28. Maskless Lithography System 29. Wet Station 30. CAD System 31. Clean Room 32. Wafer RTA system 33. High-pressure jet liftoff system 34. Plasma Asher (1) 35. UV Ozone cleaner 5 / 10
6 36. Excimer Cleaner 37. Ellipsometer 38. Surface Profiler 39. Ion Sputtering System 40. Os Coater (2) 41. LN2 Prober 42. Thin Film Stress Measurement System 6) - 2 Foundry at Namiki-site 1. Spectroscopic Elipsometer 2. FE-SEM(SU8230) +EDX 3. Surface Profilometer 4. E-beam Evapolator 5. Resistive Heating Evaporator 6. Sputtering System #1 7. Sputtering System #2 8. Pulsed Laser Deposition System 9. Atomic Layer Deposition System (2) 10. E-beam Drawing System 11. Contact mask aligner 12. Dry Etching System 13. Plasma Asher (2) 14. Focused Ion Beam System 15. Dicing Saw (2) 16. Room Temperature Prober 17. Low Temperature Prober 18. Wire Bonder (2) 19. RTA (Rapid Thermal Annealing Furnace : 6 inch) 20. RTA (Rapid Thermal Annealing Furnace : 20 mm) 21. Oxidation Furnace 22. Cleanroom at Namiki-site 23. Atomic Force Microscopy 24. TEM 25. XRD (Thin film) 26. XRD (Powder) 27. TG/DTA+DSC 6 / 10
7 28. High Temperature TG/DTA+DSC 29. Zeta-potential/Particle-size analyzer 30. Mechanical Testing Machine 31. Micro Raman Spectrometer 32. FT-IR 33. UV-Vis-NIR Spectrometer V UV-Vis-NIR Spectrometer V Fluorescent Spectrometer 36. Micro PL Spectrometer 37. Multi-Mode SPM 38. Color Laser Microscope 39. FE-SEM (S-4800) +EDX 40. FE-SEM (SU8000) +EDX 41. Mini SEM +EDX 42. Cooling Centrifuge Inquiry about Nanotechnology Innovation Station--- Nano-fabrication Group 7) Nanotechnology Innovation Station --- Nano-biotechnology Group 1. LC/MS/MS 2. Confocal laser scanning fluorescence microscope 3. NMR 4. Total Internal Reflection Fluorescence Microscope 5. Nano-search microscope 6. Raman microscope 7. Real time PCR 8. Surface plasmon resonance analyzer (Biacore) 9. Circular dichroism spectropolarimeter 10. Recycling GPC 11. Desk Top Electron Microscope 12. Freezing microtome 13. Plate reader 14. Glove Box 15. LC/MS/MS(Q-exactive) 16. Microarray scanner 7 / 10
8 17. Laser Micro Disection system 18. Cell sorter and analyzer 19. Fluorescent Microscopes 20. Bio-molecule centrifuges and chromatographs 21. Material preparation instruments 22. Material analysis instruments 23. Photometers 24. Nanomaterial analysis instruments 25. Analytical GPCs 26. FT-IR spectrometer Inquiry about Nanotechnology Innovation Station --- Nano-biotechnology Group 8) Microstructural Characterization Platform 1. Low Temperature Scanning Tunneling Microscope with superconducting magnets 2. Environment-Control Frequency-Modulation Scanning Probe Microscope 3. Multifunction Scanning Probe Microscope 4. Atom-discriminating electron microscope (JEM-3100FEF) 5. Ceramics sample preparation facilities 6. Low Temperature Scanning Tunneling Microscope 7. 3D multi-scale triple-beam analytical microscope 8. Damage-less TEM specimen milling apparatus 9. Microfocus X-ray CT 10. Helium Ion Microscope 11. Surface area and pore size analyzer by gas sorption 12. Spin-polarized low energy electron microscope Inquiry about Microstructural Characterization Platform 2. Center for Research on Energy and Environmental Materials Division --- Battery Research Platform 1. Super-Dry Room 8 / 10
9 2. Cell Assembly Equipment 3. FTIR 4. Laser Raman Microscope 5. Ellipsometer 6. Gas Transmission-rate Measuring Equipment 7. TG/MS 8. Compact SEM 9. Laser Microscope 10. Viscometer 11. Battery Charge/Discharge System 12. Precision Electrochemical Measurement System 13. Single-Particle Measurement System 14. ICP/MS 15. LC/MS 16. Ion Chromatography 17. O2,N2,H2 analyzer 18. GD-OES 19. GC/MS 20. Mass Spectroscopy 21. XRF 22. XPS 23. HAXPES 24. XRD 25. BET 26. Particle Size Analyzer 27. Environment-controlled SPM 28. TOF-SIMS 29. TEM/STEM 30. FIB 31. FIB-SEM 32. SEM 33. Scanning Auger Electron Spectroscopy 34. Cross-section polisher Inquiry about Battery Research Platform Battery-PF[at]nims.go.jp (Please change [at ] to ] ) Please see this site: 9 / 10
10 3. Center for Materials Research by Information Integration Division --- Data Platform 1. NIMS Materials Database (MatNavi) Inquiry about Data Platform matnavi-ss[=]ml.nims.go.jp (Please change [ = ] to ] ) Please see this site: 10 / 10
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