Graphene Pellicles. Richard van Rijn

Transcription

1 Graphene Pellicles Richard van Rijn

2 Applied Nanolayers Scalable automated produc;on of high quality graphene up to 200 mm wafer sizes by CVD 2DM (graphene and related materials) supplier of choice Strong verifiable automated quality assurance Robust high volume supply chain Focus on applica;ons and integra;on with CMOS Global 2DM device foundry 2

3 Technology Produc'on of high quality graphene on 200 mm wafers using epitaxial metal films Developed fully automated produc'on pla>orm engineered for lowest cost per cm 2 Pla>orm and method compa'ble with h-bn and other 2D materials 4

4 Wafer scale graphene up to 200mm Mono-Pure Graphene SEM Raman 5

5 Technology Produc;on of high quality graphene on 200 mm wafers using epitaxial metal films Developed fully automated produc;on platorm engineered for lowest cost per cm 2 PlaTorm and method compa;ble with h-bn and other 2D materials Wafer to wafer transfer up to 200 mm Fully mechanical transfer Full automa'on 6

6 Wafer to wafer transfer 2 mm 50 um 7

7 Technology Produc;on of high quality graphene on 200 mm wafers using epitaxial metal films Developed fully automated produc;on platorm engineered for lowest cost per cm 2 PlaTorm and method compa;ble with h-bn and other 2D materials Wafer to wafer transfer up to 200 mm Fully mechanical transfer Full automa;on Automated quality control on 200 mm Raman spectroscopy Op'cal microscopy 8

8 Applica;ons Semiconductor Biotech MEMS Defense & space EUV pellicle Ac+ve devices Sensors Optoelectronics RF Thin membranes Gene sensing Biocompa+ble coa+ng Bio I/O Low fric+on layer Flexible membrane Sensing Lab on chip Devices & sensors Advanced sensing Solar power Membranes BEOL integra+on PlaDorm substrate BEOL integra+on Advanced pladorms 9

9 Graphene pellicles BoMom up construc+on > build membrane layer by layer using wafer to wafer transfer Advantages Precise control over the number of layers Heterostructures: incorporate other layers to improve pellicle proper;es (h-bn) Control interlayer orienta;on No need to thin membrane Supported ANL graphene proven to be resistant to EUV + H 2 > 24h Challenge Integra;on with pellicle support structure 10

10 Raman quality control for mono and mul;layer graphene Uniform crack-free transfer on >cm-size domains for both 1L and ML. Stronger G peak on ML à stronger scacering à more material present. 11

11 Raman quality control for mono and mul;layer graphene Uniform crack-free transfer on >cm-size domains for both 1L and ML. Stronger G peak on ML à stronger scacering à more material present. Negligible D peak à low defect density also on ML Small change width G/2D peak à negligible interac;on between layers. 12

12 Suspended single-layer graphene drums over cavi;es SEM of single layer graphene suspended over a 1 μm diameter hole on SiO 2 13

13 Suspended mul;-layer graphene drums over cavi;es SEM of mul;layer graphene suspended over a 20 μm diameter hole on SiO 2 14

14 Suspended mul;-layer graphene drums over meshes SEM of mul;layer graphene suspended over a mesh 15

15 Suspended mul;-layer graphene over 2.5 mm window Transmission microscopy of mul;layer graphene suspended over a frame 16

16 Suspended mul;-layer graphene over 2.5 mm window Raman data at two points over the suspended membrane Clear G and 2D peak à graphene is present G > 2D à mul;layer graphene Small D peak à low defect density 17

17 Next steps Increase membrane to full size (ANL) Incorporate other materials (ANL) Frame integra;on (with partners) Membrane characteriza;on (with partners) 18

18 Thank you Applied Nanolayers B.V. Tarweweg AM Nijmegen The Netherlands Paul Hedges Chief Execu've Officer M +31 (0) p.hedges@appliednanolayers.com Dr. Richard van Rijn Chief Technology Officer M +31 (0) r.van.rijn@appliednanolayers.com 19