TF-1000 Series MINI THERMAL MASS FLOWMETER PERFECT LINE-UP, BEST COST PERFORMANCE OUTLOOK FEATURES OPERATION PRINCIPLE PRODUCT LINE-UP

Transcription

1 PERFET INE-UP, EST OST PERFORMANE TF-000 Series MINI TERMA MASS FOWMETER OUTOOK TF-000 MINI TERMA MASS FOWMETERS are designed and developed to offer the remote indication and control of gas flow process where glass tube purgemeters have been commonly used. TF-000 MINI TERMA MASS FOWMETERS are very competitive in price and very compact in size and can be a good substitution for such glass tube purgemeters. New type in the mid to large diameter has been added to TF-000 series. Different types of sensors cover all requirements for gas measurement. Also All-in-One type panel mount convertors are ready for easy loop design. FEATURES ow cost, igh performance ompetitive with purgemeter prices! Why do you stick with purgemeters? igh accuracy Direct mass flow measurement using thermal theory Free from changes of pressure and temperature! No compensation required. Quick response 0.5sec. for %! Easy maintenance No by-pass tube used. igh durability Newly designed sensing element offers high durability. Supporting instruments are ready. Wide range Min. 0~ /min(nor)., Max. 7m 3 /h(nor). can be covered by one line. The piping layout can be freely made due to the short required straight run. PRODUT INE-UP Different sensors and panel mount convertors are ready to choose Mass flowmeter ow price, ompact TF-00 P Engineering plastic body TF-00 S 36SS casted body Standard type TF- Stainless steel body, Mid to large connection types are available. TF-3 Stainless steel body, ow pressure loss Outdoor use, Water tight housing TF- Stainless steel body, Mid to large connection types are available TF-4 Stainless steel body, ow pressure loss TF-5 Stainless steel body, With indicator, Mid to large connection types are available onvertor TM-000 Flow rate, Totalizing, and alarm indication, Analog output, Totalizing pulse output, Alarm output OPERATION PRINIPE Temperature detection sensor Ra and velocity detection sensor Rw are installed in the gas flow path of TF-000 MINI-TERMA MASS FOWMETER. The internal electronics circuits keep the temperature gap between Rw (Tw) and Ra (Ta = Gas temp.) constant by supplying electric current I. The transferred heat from Ra to passed gas (Rw I ) is proportional to the mass flow rate of the gas to be measured which can be calculated from supplied corrent I. The detection principle is completely free from the change of gas pressure and the change of temperature. It is compensated by internal software and finally the measurement is totally independent of any operating conditions. The flow rate is calculated from supplied current I and output in the form of electric signal. I Ra Ta Rw Tw O W F TG-ES65-3E JUN., 004

2 TF-000 SERIES MINI-TERMA MASS FOW METER STANDARD SPEIFIATION AND MODE ODE [up to 000/min(nor)] Model TF-00 P/S TF- TF- Type ompact type Stainless steel body, Standard type Gas to be measured Scale range All kinds of gases, except gases containing more than 0%(Vol.) of or e and mixture of or e and nm Min. 0 to /min(nor) Max. 0 to 0/min(nor) Amb. and Gas temp. 0 to 60 [0 to for TF-000P (Poly-acethal resin body)] Gas press to.0mpa Accuracy ±.0% F.S. Temp. change effect Within ±0.% F.S. / Press. change effect Within ±0.% F.S. /0.MPa Rangeability : 0 Gas contact part material Tube Sensor Seal Power supply/ Output TF-00 P : Poly-Acethal, PFA, SUS36 TF-00 S : SS4, PFA, SUS36 SUS36[SUS36 and PFA (TF- )] ombination of SUS36, Glass, PT and TFE Viton or R Min. 0 to /min(nor) Max. 0 to 000/min(nor) TF- 0 D±V or D±5V, +ma, -0mA/D0~5V (oad resistance:more than 5kΩ) TF- D4V±0%, +ma/d4~0ma (oad resistance:ess than 4Ω) Stainless steel body, Water tight housing ousing material AS resin IP0 equ. (Indoor use) AD IP65 equ. (Water tight) TF- : Rc/4 OD/4, 3/8, / SW 5A, 0A, 5A, JIS0K Flange TF- : Rc/4, 3/8 OD/4, 3/8, / SW TF-00 P : Rc/4 Process connection 5A, 0A, 5A, JIS0K Flange TF-00 S : Rc/4 or OD/4 SW TF- 3 : Rc3/8, / OD3/8, /, 3/4 SW 5A, 0A, 5A, JIS0K Flange TF- 4 : Rc3/8, /, 3/4 OD3/8, /, 3/4 SW 5A, 0A, 5A, JIS0K Flange Electric connection Exclusive cable with connector G/, M3 screw terminal TF Flow range Power supply/ 0 Output P ody material S Scale range rating up to 0/min(nor) D±V(5V)D0~5V D4V/D4~0mA Poly-Acethal SS4 0~ /min(nor) 0~3 /min(nor) 0~5 /min(nor) 0~8 /min(nor) 0~0 /min(nor) 0~5 /min(nor) 0~0 /min(nor) 0~ /min(nor) 0~ /min(nor) 0~80 /min(nor) 0~00 /min(nor) 0~0 /min(nor) P Rc thread S Swagelok* 04/4(8A) *Swagelok connection is available only for TF-00 S type. TF- - - Flow range 3 4 Power supply/ 0 Output Scale range rating (hoose the connection size from the abovementioned process connection.) P S F TF- - - up to 0/min(nor) up to /min(nor) Flow up to 0/min(nor) range 3 up to 000/min(nor) 4 D±V(5V)D0~5V Power supply/ 0 D4V/D4~0mA Output 0~ /min(nor) 00 0~3 /min(nor) 0 0~5 /min(nor) 0 0~8 /min(nor) 080 0~0 /min(nor) 00 0~5 /min(nor) TF- 0~0 /min(nor) 00 0~ /min(nor) 0 0~ /min(nor) 0 0~80 /min(nor) 800 0~00 /min(nor) Scale range 0 0~0 /min(nor) 0~ /min(nor) 5 0~00 /min(nor) TF- 0 0~ /min(nor) 5 0~0 /min(nor) 0~400 /min(nor) TF ~0 /min(nor) 0~600 /min(nor) 60 0~800 /min(nor) TF ~000/min(nor) 0 Rc thread Swagelok rating JIS0K Flange /4(8A) 3/8(0A) /(5A) 3/4(0A) (5A) ((hoose the connection size from the abovementioned process connection.) P S F up to 0/min(nor) up to /min(nor) up to 0/min(nor) up to 000/min(nor) D±V(5V)D0~5V D4V/D4~0mA 0~ /min(nor) 0~3 /min(nor) 0~5 /min(nor) 0~8 /min(nor) 0~0 /min(nor) 0~5 /min(nor) TF- 0~0 /min(nor) 0~ /min(nor) 0~ /min(nor) 0~80 /min(nor) 0~00 /min(nor) 0~0 /min(nor) 0~ /min(nor) 0~00 /min(nor) TF- 0~ /min(nor) 0~0 /min(nor) 0~400 /min(nor) TF-3 0~0 /min(nor) 0~600 /min(nor) 0~800 /min(nor) TF-4 0~000/min(nor) Rc thread Swagelok JIS0K Flange /4(8A) 3/8(0A) /(5A) 3/4(0A) (5A) O., TD. TG-ES65-3E

3 TF-000 MINI-TERMA MASS FOW METER TF-3 TF-4 TF-5 ow pressure loss, Indoor use ow pressure loss, Water tight type All kinds of gases, except gases containing more than 0%(Vol.) of or e and mixture of or e and nm Min. 0 to /min(nor) Min. 0 to /min(nor) Max. 0 to 000/min(nor) Max. 0 to 000/min(nor) 0 to to.0mpa ±.0%F.S. Within ±0.%F.S. / Within ±0.%F.S. /0.MPa : 0 With indicator, Water tight type AS resin IP0 equ. (Indoor use) SUS36 TF- : Rc/ or 5AJIS0K Flange TF- 3 : Rc3/4 or 0AJIS0K Flange TF- 4 : Rc or 5AJIS0K Flange ombination of SUS36, Glass, PT and TFE Viton or R AD IP65 equ. (Water tight) TF- 0 D±V or D±5V, +ma, -0mA/D0~5V (oad resistance:more than 5kΩ) TF- D4V±0%, +ma/d4~0ma (oad resistance:ess than 4Ω) SUS36 [SUS36 and PFA (TF-5)] AA IP65 equ. (Water tight) TF-5: Rc/4, 3/8, / OD/4, 3/8, / SW 5A, 0A, 5A, JIS0K Flange TF-5: Rc/4, 3/8, / OD/4, 3/8, / SW 5A, 0A, 5A, JIS0K Flange TF-53: Rc3/8, / OD3/8, / SW 5A, 0A, 5A, JIS0K Flange TF-54: Rc3/8, /, 3/4 OD3/8, /, 3/4 SW 5A, 0A, 5A, JIS0K Flange A85~40V, 4VA D4~0mA (oad resistance:ess than 4Ω) Exclusive cable with connector G/, M3 screw terminal -G/, M3 screw terminal TF Flow range 3 4 Power supply/ 0 Output Scale range rating (hoose the connection size from the above-mentioned process connection.) P F 08 6 up to /min(nor) up to 0/min(nor) up to 000/min(nor) D±V(5V)D0~5V D4V/D4~0mA 0~ /min(nor) 0~00 /min(nor) TF-3 0~ /min(nor) 0~0 /min(nor) 0~400 /min(nor) TF-33 0~0 /min(nor) 0~600 /min(nor) 0~800 /min(nor) TF-34 0~000 /min(nor) Rc thread JIS0K Flange /(5A) 3/4(0A) (5A) *TF- is recommended for scale range smaller than 0/min(nor). *Required straight run for upstream is 5D and downstream is 0D. Installation of the pipe is the same connection of flowmeter. TF Flow range 3 4 Power supply/ 0 Output Scale range rating (hoose the connection size from the above-mentioned process connection.) P F 08 6 up to /min(nor) up to 0/min(nor) up to 000/min(nor) D±V(5V)D0~5V D4V/D4~0mA 0~ /min(nor) 0~00 /min(nor) TF-4 0~ /min(nor) 0~0 /min(nor) 0~400 /min(nor) TF-43 0~0 /min(nor) 0~600 /min(nor) 0~800 /min(nor) TF-44 0~000/min(nor) Rc thread JIS0K Flange /(5A) 3/4(0A) (5A) *TF- is recommended for scale range smaller than 0/min(nor). *Required straight run for upstream is 5D and downstream is 0D. Installation of the pipe is the same connection of flowmeter. TF Flow range 3 4 Power supply/ Output Scale range rating (hoose the connection size from the above-mentioned process connection.) P S F up to 0/min(nor) up to /min(nor) up to 0/min(nor) up to 000/min(nor) A85~40V/D4~0mA 0~ /min(nor) 0~3 /min(nor) 0~5 /min(nor) 0~8 /min(nor) 0~0 /min(nor) 0~5 /min(nor) TF-5 0~0 /min(nor) 0~ /min(nor) 0~ /min(nor) 0~80 /min(nor) 0~00 /min(nor) 0~0 /min(nor) 0~ /min(nor) 0~00 /min(nor) TF-5 0~ /min(nor) 0~0 /min(nor) 0~400 /min(nor) TF-53 0~0 /min(nor) 0~600 /min(nor) 0~800 /min(nor) TF-54 0~000/min(nor) Rc thread Swagelok JIS0K Flange /4(8A) 3/8(0A) /(5A) 3/4(0A) (5A) TG-ES65-3E O., TD. 3

4 FOW RATE FOW RATE FOW RATE FOW RATE FOW RATE FOW RATE TF-000 SERIES MINI-TERMA MASS FOW METER DIMENSION AND WEIGT TF-000 ompact type [TF-000P.TF-000S] Rc screw connection /4 TF-000P Approx.0g TF-000S Approx.g MINI-TERMA MASS FOWMETER TF-000 FOW MFG.No. FOW RATE 6 7 SW connection (Approx.3g for TF-000S) -SW MINI-TERMA MASS FOWMETER TF-000 FOW MFG.No. FOW RATE 6 7 -M3d4 3 -M3d4 3, Rating /4SW 3/8SW 4 40 TF-0 Stainless steel body, Standard type [TF-0] Rc screw connection (Approx.4g) 40 SW connection (Approx.5g) /SW 8 TF- 6mm MINI-TERMA MASS FOWMETER MINI-TERMA MASS FOWMETER /4 MFG. NO. FOW.5 -SW MFG. NO. FOW.5, Rating /4SW 7 3/8SW /SW 34 Flange connection (Approx..9kg) MINI-TERMA MASS FOWMETER MFG. NO. FOW.5 [Rc, SW and Flange connection] Mounting dimension (ottom face) M4d4 80 [TF-0] Rc screw connection (Approx.6g) SW connection (Approx.740g) MINI-TERMA MASS FOWMETER MINI-TERMA MASS FOWMETER MFG. NO. MFG.NO. FOW 77 -SW FOW 77, Rating /4SW 7 3/8SW 6 6 /SW Flange connection (Approx.3.0kg) MINI-TERMA MASS FOWMETER MFG. NO. FOW 6 77 [Rc, SW and Flange connection] Mounting dimension (ottom face) M4d O., TD. TG-ES65-3E

5 NO. MFG.NO. FOW RATE FOW RATE NO. NO. FOW RATE FOW RATE NO. NO. FOW RATE FOW RATE TF-000 MINI-TERMA MASS FOW METER [TF-] Rc screw connection (Approx.kg) SW connection (Approx..kg) MINI-TERMA MASS FOWMETER MFG. FOW 83 9 MINI-TERMA MASS FOWMETER MFG. FOW 83 9 [Flange connection] Mounting dimension (ottom face) M4d6 00 MINI-TERMA MASS FOWMETER FOW MINI-TERMA -SW MASS FOWMETER MFG. FOW, Rating 3/8SW 9 /SW /4SW 06 [Rc and SW connection] Mounting dimension (ottom face) 33 -M4d6 45 MINI-TERMA MASS FOWMETER MFG. -SW FOW 83, Rating 3/8SW 68 /SW /4SW 8 [Rc and SW connection] Mounting dimension (ottom face) 3 -M4d6.5 Flange connection (Approx..5kg) [TF-40] Rc screw connection (Approx..5kg) SW connection (Approx..8kg) Flange connection (Approx.3.3kg) MINI-TERMA MASS FOWMETER MFG. FOW [Flange connection] Mounting dimension (ottom face) 8 9 -M4d6 TG-ES65-3E O., TD. 5

6 FOW RATE MASS FOWMETER MFG. NO. FOW FOW RATE TF-000 SERIES MINI-TERMA MASS FOW METER TF-00 Stainless steel body, Water tight housing type Rc screw connection SW connection 54 G/ -SW 5 [Rc, SW and Flange connection] Mounting dimension (ottom face) A -M4d6 Size A Weight (kg) Model /4 59 3/ TF- / 66 /4 7 3/8 76 / TF- /4 88 3/ / TF-3 3/8 6 3/4 / TF-4 Flange connection () Size 5A 0A 5A 5A 0A 5A 5A 0A 5A 5A 0A 5A Rating JIS 0K (RF) (FF) JIS 0K (RF) (FF) JIS 0K (RF) (FF) JIS 0K (RF) (FF) A Weight (kg) Model TF- TF- TF-3 TF-4 TF-0 ow pressure loss, Indoor use type Rc screw connection Flange connection MINI-TERMA MASS FOWMETER MFG.NO. FOW MINI-TERMA () [Rc, and Flange connection] Mounting dimension (ottom face) A -M4d6 Size Rating / 3/4 5A 0A 5A Rc connection Flange connection JIS0K (RF) (FF) A Weight (kg) Model TF-30 TF-3 TF-340 TF-30 TF-3 TF-340 TF-3 6mm 6 O., TD. TG-ES65-3E

7 TF-000 MINI-TERMA MASS FOW METER TF-400 ow pressure loss, Water tight type Rc screw connection Flange connection 54 G/ 5 [Rc, and Flange connection] Mounting dimension (ottom face) A TF-0 With indicator, Water tight type Rc screw connection 06 -M4d6 Size / 3/4 5A 0A 5A Rating Rc connection Flange connection JIS0K (RF) (FF) A Weight (kg) Model TF-4 TF-43 TF-44 TF-4 TF-43 TF-44 SW connection 86 -G/ -SW Rc, and connection] Mounting dimension (ottom face) A -M4d6 Size /4 3/8 / /4 3/8 / /4 3/8 / 3/8 / 3/ A Weight (kg) Model TF-5 TF-5 TF-53 TF-54 Flange connection 5A 0A 5A 5A 0A 5A 5A 0A 5A 5A 0A 5A Size Rating JIS 0K (RF) (FF) JIS 0K (RF) (FF) JIS 0K (RF) (FF) JIS 0K (RF) (FF) A Weight (kg) Model TF-5 TF-5 TF-53 TF-54 TG-ES65-3E O., TD. 7

8 TF-000 SERIES MINI-TERMA MASS FOW METER STANDARD SPEIFIATION AND MODE ODE [Middle to arge connection type] Model TF-5 TF-5 TF-55 Type Standard type Water tight housing Gas to be measured Amb. and Gas temp. Gas press. Accuracy Temp. change effect Press. change effect Gas contact part material Rangeability Tube Sensor Seal All kinds of gases, except gases containing more than 0%(Vol.) of or e and mixture of or e and nm 0 to to.0mpa ±.0%F.S. Within ±0.%F.S. / Within ±0.%F.S. /0.MPa ousing material AS resin IP0 equ. (Indoor use) AD IP65 equ. (Water tight) AA IP65 equ. (Water tight) Process connection : 0 SUS36 ombination of SUS36, Glass, PT and TFE Viton or R Rc female screw ( to ) JIS0K Flange (5 to 80A) With indicator, Water tight type Power supply / Output Electric connection TF- 0 D±V or D±5V, +ma, -0mA/D0~5V (oad resistance:more than 5kΩ) TF- D4V±0%, +ma/d4~0ma (oad resistance:ess than 4Ω) A85~40V, 4VA D4~0mA (oad resistance:ess than 4Ω) Exclusive cable with connector G/, M3 screw terminal -G/, M3 screw terminal TF- - - TF- - - Flow range 5 up to 7m 3 /h(nor) up to 7m 3 /h(nor) (Refer to the following Scale range table.) Flow range 5 (Refer to the following Scale range table.) Power supply/ 0 D±V(5V)D0~5V Power supply/ 0 D±V(5V)D0~5V Output D4V/D4~0mA Output D4V/D4~0mA Scale range A Flow rate rating Scale range A Flow rate rating rating P Rc thread ( to ) P Rc thread ( to ) rating F JIS0K Flange (5A to 80A) F JIS0K Flange (5A to 80A) 5 (5A) 5 (5A) 3-/4 (3A) 3 -/4 (3A) 40-/ (40A) 40 -/ (40A) (A) (A) (hoose the connection size from the (hoose the connection size from the following Scale range table.) 65-/ (65A) 65 following Scale range table.) -/ (65A) 803 (80A) 80 3 (80A) *Scale range=(a) 0 m 3 /h(nor) *Scale range=(a) 0 m 3 /h(nor) (Ex.) m 3 /h(nor) 0 (Ex.) m 3 /h(nor) 0 400m 3 /h(nor) m 3 /h(nor) 40 7m 3 /h(nor) 75 7m 3 /h(nor) 75 TF Flow range 5 Power supply/ Output Scale range rating A (hoose the connection size from the following Scale range table.) P F *Scale range=(a) 0 m 3 /h(nor) (Ex.) m 3 /h(nor) 0 400m 3 /h(nor) 40 7m 3 /h(nor) 75 up to 7m 3 /h(nor) (Refer to the following Scale range table.) A85~40V/D4~0mA Flow rate rating Rc thread ( to ) JIS0K Flange (5A to 80A) (5A) -/4 (3A) -/ (40A) (A) -/ (65A) 3 (80A) Scale range according to connection 5A 3A 40A A 65A 80A Gas Min. Max. Min. Max. Min. Max. Min. Max. Min. Max. Min. Max. AIR 0 ~ 0 ~ 75 0 ~ 65 0 ~ 0 ~ 0 ~00 0 ~40 0 ~0 0 ~50 0 ~7 N 0 ~ 0 ~ 75 0 ~ 65 0 ~ 0 ~ 0 ~00 0 ~40 0 ~0 0 ~50 0 ~7 O 0 ~ 0 ~ 75 0 ~ 65 0 ~ 0 ~ 0 ~00 0 ~40 0 ~0 0 ~50 0 ~7 O 0 ~ 0 ~ 75 0 ~ 65 0 ~ 0 ~ 0 ~00 0 ~40 0 ~0 0 ~50 0 ~7 O 0 ~ 0 ~ 75 0 ~ 65 0 ~ 0 ~ 0 ~00 0 ~40 0 ~0 0 ~50 0 ~7 Ar 0 ~ 0 ~ 75 0 ~ 65 0 ~ 0 ~ 0 ~00 0 ~40 0 ~0 0 ~50 0 ~7 N3 0 ~ 3 0 ~ 57 0 ~ 49 0 ~4 0 ~ 68 0 ~5 0 ~06 0 ~43 0 ~67 0 ~395 0 ~43 0 ~5 4 0 ~ 5 0 ~ 0 ~ 33 0 ~ 75 0 ~ 45 0 ~00 0 ~ 0 ~60 0 ~0 0 ~60 0 ~60 0 ~ ~ 7 0 ~ 4 0 ~ 36 0 ~ 84 0 ~ 0 ~ 0 ~ 78 0 ~79 0 ~3 0 ~9 0 ~79 0 ~40 0 ~ 4 0 ~ 35 0 ~ 0 ~ 69 0 ~ 4 0 ~ 9 0 ~ 64 0 ~47 0 ~0 0 ~39 0 ~47 0 ~ ~ 0 ~ 0 ~ 6 0 ~ 60 0 ~ 36 0 ~ 80 0 ~ 56 0 ~8 0 ~ 88 0 ~08 0 ~8 0 ~0 m 3 /h(nor) 3A 0 ~ 5 0 ~ 37 0 ~ 3 0 ~ 74 0 ~ 44 0 ~ 98 0 ~ 69 0 ~57 0 ~08 0 ~55 0 ~57 0 ~368 8 O., TD. TG-ES65-3E

9 FOW RATE FOW RATE MASS FOWMETER MFG. NO. FOW FOW RATE MASS FOWMETER MFG. NO. FOW RATE FOW TF-000 MINI-TERMA MASS FOW METER TF-5 6mm TF-5 Standard type Rc screw connection (Rc) Width across flat of joints: 46 (Approx..9kg) Rc screw connection (Rc-/4 to Rc) MINI-TERMA MASS FOWMETER MFG.NO. FOW (68) () MINI-TERMA D 95 Size -/4 -/ Rating Rc connection (Width across flat) D Weight (kg) Flange connection (5A) (Approx.3.6kg) Flange connection (3 to 80A) MINI-TERMA MASS FOWMETER MFG.NO. FOW (68) () MINI-TERMA 95 Size 3A 40A A 65A 80A Rating Flange connection JIS0K (RF) (FF) Weight (kg) TF-5 Water tight housing type Rc screw connection (Rc) Width across flat of joints: 46 (Approx..4kg) G/ 54 G/ Rc screw connection (Rc-/4 to Rc) 54 (43) D () 5 95 Size Rating (Width across flat) D -/4 -/ Rc connection Weight (kg) TG-ES65-3E O., TD. 9

10 TF-000 SERIES MINI-TERMA MASS FOW METER Flange connection (5A) (Approx.4.kg) Flange connection (3 to 80A) (43) () 95 Size 3A 40A A 65A 80A Rating Flange connection JIS0K (RF) (FF) Weight (kg) TF-55 With indicator, Water tight type Rc screw connection (Rc) Width across flat of joints: 46 (Approx..9kg) 06 Rc screw connection (Rc-/4 to Rc) 06 Size -/4 -/ Rating Rc connection (Width across flat) D Weight (kg) (43) () 86 () 86 -G/ (43) -G/ D 5 95 Flange connection (5A) (Approx.4.6kg) Flange connection (3 to 80A) 95 Size 3A 40A A 65A 80A Rating Flange connection JIS0K (RF) (FF) Weight (kg) O., TD. TG-ES65-3E

11 TF-000 MINI-TERMA MASS FOW METER PREAUTIONS FOR INSTAATION Required straight run (d: diameter) PRESSURE OSS (The following graphic chart is data in case of air.) Model TF-00 P TF-00 S TF- TF- TF-3 TF-4 TF-5 TF- TF- TF-3 TF-4 TF-5 TF-3 TF-33 TF-34 TF-4 TF-43 TF-44 TF-5 TF-5 TF-53 TF-54 TF-55 Upstream 5d (*, *) 5d (*, *) 5d (*3) 5d (*3) 5d (*, *) Downstream 5d (*, *) 5d (*, *) (*3) (*3) 5d (*, *) Press. loss [kpa] TF-00 S/00 P/ / /5 Primary pressure ATM 0 0/min (nor) /min (nor) 0/min (nor) 000/min (nor) Flow rate [/min (nor)] (*) The piping different from the diameter of flowmeter is up to ± size. Make the piping after installing the required straight run in the same diameter as the flowmeter. TF-3 /4 ow press. loss type Primary pressure ATM 0 /min (nor) 0/min (nor) 000/min (nor).5 Press. loss [kpa] (*) Make use of Rc screw fittings less than Sch. 80. (*3) Make use of the piping in the same diameter as that of the flowmeter. efore installing the flowmeter onto process piping, flush and clean the whole piping. Install valves downstream if any. Use the shielded cable for wiring and do not locate it near to power supply line etc. to avoid the electric noise. onfirm the arrow mark on the tube which indicates the flow direction. In case of TF-5 (With indicator type), the flow direction and configuration are as follows. Specify the flow direction at the time of an order Flow rate [/min (nor)] TF-5 /5 /55 Middle to arge connection type Primary pressure ATM 0 5A 3A 40A A 65A 80A orizontal installation orizontal installation Press. loss [kpa] 5 0 Flow direction eft to Right Flow direction Right to eft 5 It is recommended to provide bypass piping for maintenance Flow rate [m 3 /h (nor)] TG-ES65-3E O., TD.

12 TF-000 SERIES MINI-TERMA MASS FOW METER TM-000 MINI ONVERTOR UNIT OUTINE TM-000 MINI ONVERTOR UNIT is power supply and indication unit which is used in combination with Tokyo Keiso s TF-000 and TF-00 series MINI TERMA MASS FOWMETERS. All necessary functions of power supply to the detectors and scaled flow indication is provided in DIN 7mm compact housing. Additionally, either totalization (with scaled pulse output) of flow or high and low alarm is available for total gas volume management or stable gases supply applications. Also, analog re-output function (D4 to 0mA or D0 to 5 V) is provided as standard for further connection to recorders and/or process control loop. STANDARD SPEIFIATION FOW RATE INDIATION Indication : y 4 digit D (3mm height) Accuracy : 0.% F.S. last digit additional to detector accuracy Analog re-output (Alternative) : a) D4 to 0mA Max.load 0Ω : b) D0 to 5V Min.load 00kΩ Output accuracy : 0.% F.S. additional to detector accuracy TOTAIZATION FUNTION Indication : y 7 digit D (6mm height) Scaled pulse : Output Open collector Rating DV, 0mA Max. Pulse width 00mS (Fixed) Pulse rate Equal to counter increments Indication accuracy : 0.% F.S. additional to detector accuracy Scaling factor : 8,000 c/h (Max.) Total re-set : y manual push button or short-circuiting of terminal OW UT : Standard % (Freely programmable) orresponding function : Flow rate indication, Flow rate output, Totalization indication, and Scaled pulse output AARM FUNTION Alarm indication Alarm output ontact rating Setting point Setting range Setting ysteresis width : Red color ED (The light is turned on in operation) : SPST NO (Make contact) or N (reak contact) (The contact will be opened without power supply.) : A5V, 0.4A/DV, A : points (igh and ow) : 0 to 00% of span : Field adjustable through front panel key :.0% F.S.(Fixed) ANAOG INPUT (Alternative) :a) D4 to 0mA Input resistance Ω b) D0 to 5V Input resistance 00kΩ OTER FUNTION Multi-data : Max.8 different data can be programmed. (hannel selection by front panel key) inearise function (Option) : a) Fourth formula multiplier method : b) Extraction of square-root multiplier method Data back up : Total count and operation parameters are memorized by EEROM for 0 years. EXTERNA POWER SUPPY : D V, +00mA, -00mA OTER SPEIFIATION Power supply : A85 to V /60z Power consumption : 5VA Electrical connection : Pin terminal Ambient temp : 0 to (To be free from condensation) Withstand voltage : Power supply to Earth terminal A0V, min. Insulation resistance : Power supply to Earth terminal More than 0MΩ (D0V) onstruction : Indoor use (IP0 equ.) ousing material : AS resin containing glass fiber Weight : Approx.4g MODE ODE TM - Analog Input Analog Output Alarm Output Input & Output characteristics 3 4 Standard Option Option R D4 ~ 0mA D0 ~ 5V D4 ~ 0mA D0 ~ 5V : NO, : NO : igh : N, : N : ow : NO, : N NO : Make contact : N, : NO N : reak contact inear Fourth formula multiplier method Extraction of square-root multiplier method APPIAE FOWMETERS AND EXUSIVE AE Applicable flowmeters TF-0/000/00/0 TF-00/400 TF-/60 M-000/00 (Option) able code S-MM S-MA S-FM S-M able length m : Standard 00m (Max.) O., TD. TG-ES65-3E

13 TF-000 MINI-TERMA MASS FOW METER DIMENSIONS PANE UT AND MOUNT DISTANE More than TM-000 ONVERTOR More than 00 7 Note) Recommending mount panel in to 5mm thickness. FRONT PANE TERMINA igh alarm TM-000 ONVERTOR UNIT:(nor) Indication Upper : Flow rate ower : Totalization ow alarm I /h m 3 /h /min Unit m 3 O MODE PUSE OUT ANAOG OUT D POWER TO METER ANAOG IN MODE Up Down Shift Mode NO WIRING () (E) RESET (+) NO N (-) D4 ~ 0mA D0 ~ 5V IG AARM +V OM OW AARM NO N -V F.G. (+) (-) D4 ~ 0mA D0 ~ 5V POWER A85 ~ V WIRING No. No Non - use () Pulse (E) Output (+) Analog ( ) Output (+V) (OM) D power to meter ( V) Non - use Reset igh alarm output ow alarm output F. G. able wiring when mass flow meter is used and model change is made from TM-000 to TM-000 should cut the cable of the connector socket part inserted in a converter, and strip cable coating about 7mm and carry out connection as follows V OM -V (+) (-) Red Green Yellow White lack 9 0 (+) Analog ( ) Input 9 0 A power supply Detector Exclusive cable TG-ES65-3E O., TD. 3

14 TF-000 SERIES MINI-TERMA MASS FOW METER APPIATIONS For D0 to 5V Output version In case standard power supply unit is used; In case TM-000 series converter unit is used; TF-000P, TF-000S, TF- 0, TF-3 0 TF-000P, TF-000S, TF- 0, TF-3 0 S-M cable S-MM cable D±V or D±5V D0~5V To control loop TF-000 Power supply TF cable D0~5V To control loop TF- 0, TF-4 0 S-MA cable Analog output Scaled pulse output and alarm output D±V or D±5V Power supply TM- A For cable with exclusive connector, D4 to 0mA Output version For M3 screw terminal, D4 to 0mA Output version TF-00P, TF-00S, TF-, TF-3 TF-, TF-4 S-MP cable 4 cable D4~0mA To control loop D4~0mA To control loop TF-00 Power supply D4V Power supply D4V For TF5 series (With indicator) version 999 cable D4~0mA To control loop Analog output Scaled pulse output AE TERMINA Y TE SIDE OF DETETOR S-MP Red Green 3 White 4 lack mm 5.6 A TM- and alarm output A S-MM Red Green 3 Yellow 4 White 5 lack 5 0.3mm 6 S-MA Power supply Output signal of flow rate (D0~5V) +V OM -V + - Red Green 3 Yellow 4 White 5 lack 5 0.3mm 6 4 O., TD. TG-ES65-3E

15 TF-000 MINI-TERMA MASS FOW METER OREDRING INFORMATION Specify the following for order /inquiry MINI-TERMA MASS FOW METER Model Gas to be measured Pressure Temperature Full scale type Flow direction (TF-5 ) TF- - - Max. /4 (8A) 3/8 (0A) / (5A) 3/4 (0A) (5A) -/4 (3A) -/ (40A) (A) (65A) (80A) Rc thread Swagelok JIS0K Flange VR (Option) eft to Right Nor. Min. MPa kpa Max. Nor. Min. Right to eft /h (nor) /min (nor) m 3 /h (nor) SUPPORTING INSTRUMENTS Mini converter Exclusive cable TM- S-MM S-MA TG-ES65-3E O., TD. 5

16 TF-000 SERIES MINI-TERMA MASS FOW METER * Specification subject to change without notice ead Office : Shiba Toho uilding, 7 4 Shibakoen, Minato-ku, Tokyo Tel : (KEY) ; Fax : overseas.sales@tokyokeiso.co.jp ; UR : 6 O., TD. TG-ES65-3E