Tutorial Software as Integrating Technology in Complex Systems

Transcription

1 Tutorial Software as Integrating Technology in Complex Systems by Gerrit Muller University of South-Eastern Norway-NISE Abstract This tutorial describes the integrating value of software in complex systems. The extensive use of software technology to integrate other technologies has a significant impact on the product characteristics and on the product creation organization and process. This tutorial provides insight in the relation between software and the system, and it provides insight in the consequences for the product and the organization. Some recommendations are provided to cope with these consequences. Distribution This article or presentation is written as part of the Gaudí project. The Gaudí project philosophy is to improve by obtaining frequent feedback. Frequent feedback is pursued by an open creation process. This document is published as intermediate or nearly mature version to get feedback. Further distribution is allowed as long as the document remains complete and unchanged. status: concept logo TBD

2 Program Case: the waferstepper and it s context The role of software in general Levels of abstraction Software -> System Functionality and Qualities Requirements perspective Evolution and Growth Why do we always have problems with software? Conclusion 2 Gerrit Muller

3 Twinscan AT Gerrit Muller ASMLtwinscanPhoto

4 What is a waferstepper source reticle lens wafer 4 Gerrit Muller ASMLlithographyPrinciple

5 From stepping to scanning n n+1 stepper: wafer step static exposure of field reticle slit 250 mm/s vx vy vy expose step expose expose step expose t t scanner: dynamic exposure through slit 5 Gerrit Muller ASMLstepperVsScanner

6 Key specifications waferstepper imaging alignment 130 nm line width 45 nm overlay 10 nm critical dimension 6 Gerrit Muller ASMLkeySpecifications

7 Moore s law 1000 line width in nm Gerrit Muller ASMLmooresLaw

8 Overlay budget (1999) global alignment accuracy 6 nm off axis pos. meas. accuracy 4nm stage Al. pos. meas. accuracy 4 nm off axis Sensor repro 3 nm blue align sensor repro 3 nm reticule 15 nm lens matching 25 nm system adjustment accuracy 2 nm interferometer stability 1 nm process overlay 80 nm matched machine 60 nm process dependency sensor 5 nm single machine 30 nm matching accuracy 5 nm stage overlay 12 nm stage grid accuracy 5 nm metrology stability 5 nm position accuracy 7 nm alignment repro 5 nm frame stability 2.5 nm tracking error X, Y 2.5 nm tracking error phi 75 nrad tracking error WS 2 nm tracking error RS 1 nm 8 Gerrit Muller ASMLoverlayBudget

9 Everything influences overlay Overlay Influence Diagram. (Maarten Bonnema, ) Heat flow from LoS into IF beams and compartment Fiducial Stability Fiducial Calibration Reticle Heating Reticle Errors Illumination settings (NA ) Light Energy Reticle Clamping induced Distortion Chuck expansion P and T of Air, Turbulences : Fiducial Heat flow from SS into RS chuck and compartment Metroframe Temperature Drift -> Effect on Showers -> Effect on Position of mirrors and IF's Airmount Noise, Limited Vibration Isolation Metroframe vibration due to water cooling (lens and coolplates) RS Bal Mass LoS Motor Airmount s T stability in LS lightpath Baseframe SS Motor ATHENA Measurement Accuracy ATHENA Mounting Accuracy/Stability LS Disturbance of Horizontal WS Servo by LS setpoints Wafer Distortion due to Wafer table/chuck Wafer Expansion by input temperature offset Wafer Expansion by Exposure Z-sensors T at top element of Lens (Mag) P and T in Lens Compartment Athena Chuck deformation Reticle RS Chuck Acceler ometer s P&T correction of Lens Lens Acceler ometer s Wafer WS Chuck SS Motor Air Foot Chuck Dimensional Stability Lens Heating IF Ref-IF Accuracy of Lensmanipulators Lens Dynamics WS Balance Mass Z-mirror Ref-IF Airshower RS RS Sensorframe + IF Block Metroframe IF LoS Motor Heat flow from SS into WS chuck Airshower WS IF Block Gravity Compensator noise Inaccurate Lens acceleration Feedforward Sound TIS Measurement Fiducial Stability Fiducial Calibration Heat flow from LoS into IF beams Data Delay Metrology inaccuracy Metrology Errors Metrolog y Servo error Feedforward errors HP Inaccuracy HP Rack MO PAC/PA 9 Gerrit Muller ASMLoverlayInfluenceDiagram

10 Exercise 1, 10 minutes Make a 3 picture description (What, How, biggest challenge) of your own system. 10 Gerrit Muller

11 Fab Context of Waferstepper reticule production reticule logistics semiconductor design maintenance wafer reticules operator utilization devices resists processing waferstepper fab layout fab cost model fab logistics tracks contamination fab infrastructure fab automation metrology matching SPC inspection and monitoring yield optimization wafer logistics 11 Gerrit Muller TSAITcontextWaferstepper

12 Business Context value of performance (MHz) yield key driver trade-off CD control business models of the customer: design houses foundries vertical integration other players: equipments vendors system integrators lease companies fab designers consultants mask makers resist makers wafer makers OEM s: laser intimate partners: lens Limited number of customers; Many systems per customer 12 Gerrit Muller INSEbusinessContext

13 Human Context: Stakeholders "external" "internal" customer purchaser decision maker user operator maintainer other government customer's customer banks, insurance managers business manager marketing manager product manager operational manager project leader sales manager quality manager logistics manager line manager technology manager engineers system engineers experts manufacturing engineers customer support suppliers component manufacturer outsourced design 13 Gerrit Muller INSEstakeholders

14 Multitude of Disciplines cooling air showers vacuum clamping mirrors actuators motors measurement lasers C&T robotics interferometers capacitive sensors modes servo's hall sensors stiffness construction mechanics dynamics home sensors real time executives temperature sensitivity construction materials lithography measurement SW control digital infrastructure UV senistivity optical materials digital signal processing transmission imaging optics measurement gratings analog signal processing reflection lens gratings dose control preamplifiers coatings lasers lamps light sensor uniformity energy dose sensor bandwidth frequency pulse timing 14 Gerrit Muller INSEtechnologies

15 Complexity of Waferstepper Context yield value of performance CD control (MHz) key driver trade-off business models of the customer: design houses foundries vertical integration market, business other players: equipments vendors system integrators lease companies fab designers consultants mask makers resist makers wafer makers OEM s: laser intimate partners: lens Limited number of customers; Many systems per customer "external" customer purchaser decision maker user operator maintainer other government customer's customer banks, insurance "internal" managers business manager marketing manager product manager operational manager project leader sales manager quality manager logistics manager line manager technology manager stakeholders engineers system engineers experts manufacturing engineers customer support suppliers component manufacturer outsourced design reticle production reticle logistics semiconductor design maintenance fab context reticles devices wafer operator utilization resists processing waferstepper fab layout fab cost model fab logistics tracks metrology contamination fab infrastructure fab automation matching SPC inspection and monitoring yield optimization wafer logistics waferstepper multitude of disciplines temperature stiffness UV modes sensitivity senistivitytransmission motors construction construction reflection optical actuators materials materials coatings servo's lens uniformity C&T gratings mechanics imaging bandwidth lasers dynamics optics frequency robotics pulse lithography lamps timing mirrors interferometers energy air showers cooling vacuum clamping measurement lasers capacitive sensors hall sensors home sensors measurement dose control dose measurement sensor gratings light SW control sensor digital analog preamplifiers real time digital signal signal executives infrastructureprocessing processing 15 Gerrit Muller INSEcomplexity

16 Symptom: Delays appear during Integration component 1 scheduled closing date realized closing date component 2 component 3 integration and test component 4 delay Do you have any design issues for the design meeting? During integration numerous problems become visible The default answer is: No. 16 Gerrit Muller MSintegration

17 Exercise 2, 10 minutes Make a 3 picture description (Application context, Value chain, technologies) of your own system. 17 Gerrit Muller

18 Relative Contribution of SW 100% relative effort physics / chemical etcetera mechanics electronics SW time 18 Gerrit Muller SWrelativeEffort

19 Control Hierarchy along Technology axis Human User Application SW Control Control SW Digital electronics Feedback Analog or power electronics Mechanical device sensor 19 Gerrit Muller SWcontrolHierarchy

20 Characterization of disciplines concrete tangible mature production lead-time abstract intangible immature flexible? material cost Mechanics Analogue / power Electronics Digital Electronics Software 20 Gerrit Muller SWdisciplineCharacterization

21 Exponential Pyramid, from requirement to bolts and nuts number of details system requirements design decisions parts connections lines of code research focus system multi- disciplinary mono- disciplinary 21 Gerrit Muller IALApyramid

22 Waferstepper Example source reticule overlay: CD control: productivity: 45nm 10nm 100Wph lens wafer 10 Mloc 22 Gerrit Muller ATpyramidExamples

23 From Components to System Qualities overlay CD control productivity system qualities prepare transport wafer align and calibrate functions scan and expose transport reticle laser illuminator lens stages handlers subsystems electronics infra metro frame source mirrors fiducials lens elements flaps air showers frames motors sensors robot bolts nuts air mounts PCBs ICs cables cabinets components OS computer disks monitor drivers database user interface TCP/IP comms package 23 Gerrit Muller ATlayers

24 Role of Software system qualities functions SW implements functionality determines emerging qualities subsystems components SW 24 Gerrit Muller TSAITlayers

25 Exercise 3, 10 minutes Make a toplevel decomposition of the software in your system and estimate the amount of software of the constituting parts 25 Gerrit Muller

26 System or Software? When SW engineers demand "requirements", then they expect frozen inputs to be used for the design, implementation and validation of the software 26 Gerrit Muller VREQsystemOrSoftware

27 System vs Software Requirements number of details system system requirements multi-disciplinary software requirements mono-disciplinary 27 Gerrit Muller VREQpyramid

28 Why is the Software Requirement Specification so Large? operational choices synergy, tools,... user interface system behavior software subsystem control of physical subsystems: sensors, actuators limited computing resources 28 Gerrit Muller VREQsoftwareSubsystem

29 And why is it never up-to-date? number of details multidisciplinary monodisciplinary system system requirements software requirements avalanche changes market fashion format competition legislation problems technical effort duration cost 29 Gerrit Muller VREQdynamics

30 Exercise 4, 2 minutes How many pages are in your Software Requirements Specification? 30 Gerrit Muller

31 Block Diagram of a Waferstepper laser light source illuminator beam shaping light reticle stage positioning reticle handler input/output reticles system control coordination measurement alignment, levelling lens projection wafer stage positioning C&T contanimation, temperature wafer handler input/output wafers 31 Gerrit Muller FAIwaferstepperSubsystems

32 Control Hierarchy of a Waferstepper system control coordination ethernet laser lens illuminator measurement C&T reticle stage reticle handler wafer stage wafer handler VME VME vertical motion horizontal motion vertical motion horizontal motion 32 Gerrit Muller FAIcontrolHierarchy

33 Frequency of Control Actions trend with increasing performance requirements SW sampling per die per wafer per batch per day preventive maintenance seconds 33 Gerrit Muller FAIcontrolFrequency

34 Evolution of System Control user interface automation interface monitoring and optimization user interface static simple calibration sequencer kloc data store production and installation support feedforward metro exposure control dynamic calibration infrastructure kloc job control data management monitoring 34 Gerrit Muller FAIcontrolEvolution

35 Consequences of Evolution Performance and functionality demands causes Complexity threatens Reliability loss of overview (150kloc fits in 1 mind, 2Mloc not) (more than?) exponential increase of coupling 1:1 relation HW:SW becomes n:m relation autonomous subsystems paradigm shift! integrated system 35 Gerrit Muller FAIevolutionConsequences

36 Exercise 5, 10 minutes Visualize the (SW) evolution of your system. What is your current phase? 36 Gerrit Muller

37 Different Focus of Software and System System engineering focus qualities productivity image quality reliability concerns integral design (quality, balance) system context lifecycle operational processes education principles heuristics analysis and synthesis processes concepts domain requirements models SW engineering focus qualities functionality maintainability variability concepts structure (generic) mechanisms concerns configuration management release procedure tools SW processes SW problems, change requests education languages operating systems algorithms formal methods 37 Gerrit Muller TSAITfocus

38 Caricature of a SW Architecture Property editor NameSpace server Application Session manager Broker Spool server Queue manager Resource scheduler Event manager Transparant Communication Configurable pipeline Registry Monitor Compliance profile Abstraction Layer Persistent Storage Plug-in framework Device independent format Plug & play 38 Gerrit Muller MVmechanismArchitecture

39 Caricature of Physics Systems View sensor laser pulse-freq, bw, wavelength,.. illuminator uniformity reticle NA abberations transmission lens aerial image wafer 39 Gerrit Muller TSAITphysicsView

40 Relation SW and Physics sensor laser pulse-freq, bw, wavelength,.. illuminator uniformity reticule measure adjust calibrate analyse process log control lens NA abberations transmission aerial image wafer 40 Gerrit Muller TSAITphysicsAndSW

41 Symptoms of too isolated SW efforts symptoms counter measures SW people are clustered together colocation per function, subsystem or quality SW is alpha tested before system integration continuous system integration higher level processes are shared SW team uses own specification and design process SW specification is in SW jargon or formalism interaction between SW, HW and system engineers 41 Gerrit Muller TSAITisolationSymptoms

42 Exercise 6, 5 minutes What is the degree of integration or isolation of SW in your organization? 42 Gerrit Muller

43 Different Mindsets and Characteristics System product: sellable self-sustained entity operating in a broader context inherent performance reliability different focus: " qualities " concerns " concepts " education actual performance reliability HW engineering tangible concrete goods flow costs & lead times physics laws SW engineering intangible abstract no goods flow costs "everything is possible" 43 Gerrit Muller TSAITconclusion