Lead time reduction by optimal test sequencing

Transcription

1 Lead time reduction by optimal test sequencing Roel Boumen, Ivo de Jong, Asia van de Mortel-Fronczak, Koos Rooda / Slide

2 Bibliography Ir. Roel Boumen MSc degree in Mechanical Engineering in 24 on supervisory machine control of lithographic machines PhD student, Systems Engineering Group, U/e Ing. Ivo de Jong ASML since 996 Various integration and test roles PhD student, Systems Engineering Group, U/e / Slide 2 Confidential

3 Contents Problem Aspects of testing manufacturing systems What do we take into account for test strategies? est method Static analysis of the test model he test process Result based test selection Overview ASML case study Manufacturing case Results Conclusions / Slide 3 Confidential

4 Aspects of testing manufacturing machines ight specification Many components (+) Multi disciplinary components Incomplete designs ime-to-market Concurrent engineering Incomplete test phases Problem characteristics Large integration and test plans Much rework while testing / Slide 4 Confidential

5 What do we take into account for test strategies? he system under test Quality of the system Coverage of test cases Cost of testing, cost of developing tests, etc. he test process est execution, diagnosing, fixing Available resources Release moment est selection method Random (leave it up to the tester) Risk based test selection Result based test selection / Slide 5 Confidential

6 he system under test: a telephone example t m: receiver Inputs: i i2 m2: cable FMEA/FMECA m3: device Known faulty components Requirements Use cases Operational profiles t t4 t2 t5 t3 s s4 s2 m i m2 i2 m3 S \ t t t2 t3 t4 t5 P s s2 s5 s3 s4 s5 C s3 / Slide 6 Confidential

7 Static analysis of the test model t t t4 t2 t5 t3 s s4 s2 s5 s3 m i m2 i2 m3 S \ t t t2 t3 t4 t5 P s s2 s3 s4 s5 C Un-covered faults S \ t t t2 t3 t4 t5 P s s2 s3 s4 s5 C Hard to diagnose t t t4 t2 t5 t3 s s4 s2 s5 s3 m i m2 i2 m3 S \ t t t2 t4 t3 t5 P s s2 s4 s3 s5 C Parallel testing possible S \ t t t2 t3 t4 t5 t6 P s? s2? s3? s4? s5? C 3 2 2? Determine the next best test case / Slide 7 Confidential

8 he test process S \ s s2 s3 s4 s5 C t 3 t t2 t3 t4 2 t5 2 P (Re-)test case est est execution execution duration duration Fix Fix duration duration Select test sequence Dispatch test case est case Execute test case Failed test case Diagnose failed test case Faulty states Fix fault Passed est case Diagnose Diagnose duration duration Fixed fault states Apply fix Fix for faulty states / Slide 8 Confidential

9 he impact of diagnose and fix duration % 9% 8% 7% 6% 4% 3% 2% % % % 9% 8% 7% 6% 4% 3% 2% % % Probability More 2 3 φ=38 stdev=3 t D,F,AF = 4 5 otal test duration φ More % 9% 8% 7% 6% 4% 3% 2% % % Cumulative probability Probability % 9% 8% 7% 6% 4% 3% 2% % % 2 3 φ=53 stdev=36 t D,F,AF = 6 4 Probability % 9% 8% 7% 6% 4% 3% 2% % % Cumulative probability % 9% 8% 7% 6% 4% 3% 2% % % More otal test duration φ 5 More % 9% 8% 7% 6% 4% 3% 2% % % Cumulative probability φ=76 stdev=45 t D,F,AF = 2 Probability φ=25 stdev=68 t D,F,AF = 24 % 9% 8% 7% 6% 4% 3% 2% % % Cumulative probability otal test duration φ otal test duration φ / Slide 9 Confidential

10 he impact of the sequence % 9% % 9% Random test selection Probability 8% 7% 6% 4% 3% 2% 8% 7% 6% 4% 3% 2% Cumulative probability % % Risk based selection % otal test duration φ More % S \ t t4 t5 t t2 t3 P I s s2 s3 s4 s5 C R Probability % 9% 8% 7% 6% 4% 3% 2% % % More % 9% 8% 7% 6% 4% 3% 2% % % Cumulative probability Result based selection otal test duration φ / Slide Confidential

11 Contents Problem Aspects of testing manufacturing systems What do we take into account for test strategies? est method Static analysis of the test model he test process Result based test selection Overview ASML case study Manufacturing case Results Conclusions / Slide Confidential

12 Result based test selection (/3) S \ t t t2 t3 t4 t5 P s s2 s3 s4 s5 C / Slide 2 Confidential

13 Result based test selection (2/3) S\ t t t2 t3 t4 t5 P s % s2 % s3 % s4 % s5 % C ree cost = 4.5 / Slide 3 Confidential

14 Result based test selection (3/3) S \ t t t2 t3 t4 t5 P s % s2 % s3 % s4 % s5 % C / Slide 4 Confidential

15 est method S\ t t t2 t3 t4 t5 P s s2 s3 s4 s5 C Calculate (Re-)test case 2 2% % 2% Select test case est case Execute test case 8% Failed test case Diagnose failed test case Faulty states Fix fault 6% Passed test case % 4% 2% More % 55 % S\ t t t2 t3 t4 t5 P s s2 s3 s4 s5 C Fixed fault states Apply fix Simulate est / Slide 5 Fix for faulty states Confidential

16 ASML case study Objective Validate test method Reduce lead time esting Development of software Development of proto machine Manufacturing of machines Operation of machines (diagnosis) / Slide 6 Confidential

17 ASML wafer scanner / Slide 7 Confidential

18 Manufacturing Subsystem test est at ASML Disassemble Install at Customer Assemble ship assemble Reticle handler Wafer handler Reticle stage Dual wafer stage Lens Laser ime / Slide 8 Confidential

19 Results (/2) est at ASML Install at customer Old time New time Reduction Old time New time Reduction Alignment % % Setup fine % % Illumination % / Slide 9 Confidential

20 Results (2/2) Alignment test at ASML Simulation results 2 2% -7% Probability % % otal test duration More / Slide 2 Confidential

21 Conclusions est modeling and simulation Straight forward modeling of test problems Creating and simulating test models gives insight Result based test selection Less test costs than known test selection methods Applicable during (software) development test, manufacturing test and production diagnosis Case ~2% test time reduction during manufacturing New test sequences for the manufacturing of wafer scanners / Slide 2 Confidential