SEMICONDUCTOR TECHNICAL DATA
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1 EIODUTOR TEHIL DT Order this document by PX5700/D The PX5700 series piezoresistive transducer is a state of the art monolithic silicon pressure sensor designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with /D inputs. This patented, single element transducer combines advanced micromachining techniques, thin film metallization, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure. eatures 2.5% aximum Error over 0 to 85 Ideally uited for icroprocessor or icrocontroller ased ystems vailable in Differential and auge onfigurations Patented ilicon hear tress train auge Durable Epoxy Unibody Element ITERTED PREURE EOR 0 to 700 kpa (0 to psi) 0.2 to 4.7 V OUTPUT I HIP RRIER ELEET E , TYLE 1 V 3 X ducer EI ELEET THI IL TEPERTURE OPETIO D I TE #1 I TE #2 D ROUD REEREE HIT IRUITRY 1 Vout DIERETIL PORT OPTIO E , TYLE 1 XIU RTI(1) 2 D PI 4, 5 D 6 RE O OET igure 1. ully Integrated Pressure ensor chematic Parametrics ymbol Value Unit Overpressure (P2 1 tmosphere) P1max 2800 kpa urst Pressure (P2 1 tmosphere) P1burst 5000 kpa torage Temperature Tstg 40 to +125 Operating Temperature T 40 to T = 25 unless otherwise noted. aximum Ratings apply to ase only. 2. Extended exposure at the specified limits may cause permanent damage or degradation to the device. 3. This sensor is designed for applications where P1 is always greater than, or equal to P2. PI UER 1 Vout 4 / 2 nd 5 / 3 V 6 / OTE: Pins 4, 5, and 6 are internal device connections. Do not connect to external circuitry or ground. Pin 1 is noted by the notch in the Lead. enseon and X ducer are trademarks of otorola, Inc. REV 2 otorola ensor Device Data otorola, Inc
2 OPERTI HRTERITI (V = 5.0 Vdc, T = 25 unless otherwise noted, P1 > P2) haracteristic ymbol in Typ ax Unit Pressure Range(1) POP kpa upply Voltage(2) V Vdc upply urrent Io mdc Zero Pressure Offset(3) (0 to 85 ) Voff Vdc ull cale Output(4) (0 to 85 ) VO Vdc ull cale pan(5) (0 to 85 ) V 4.5 Vdc ccuracy(6) (0 to 85 ) ± 2.5 %V ensitivity V/P 6.4 mv/kpa Response Time(7) tr 1.0 ms Output ource urrent at ull cale Output IO+ 0.1 mdc Warm Up Time(8) 20 ms Decoupling circuit shown in igure 4 required to meet electrical specifications. EHIL HRTERITI haracteristic ymbol in Typ ax Unit Weight, asic Element (ase 867) 4.0 rams avity Volume 0.01 I3 Volumetric Displacement I kpa (kilopascal) equals psi. 2. Device is ratiometric within this specified excitation range. 3. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 4. ull cale Output (VO) is defined as the output voltage at the maximum or full rated pressure. 5. ull cale pan (V) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 6. ccuracy (error budget) consists of the following: Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25. Tcpan: Output deviation over the temperature range of 0 to 85, relative to 25. TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85, relative to 25. Variation from ominal: The variation from nominal values, for Offset or ull cale pan, as a percent of V, at Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 8. Warm up is defined as the time required for the device to meet the specified output voltage after the pressure has been stabilized. 9. P2 max is 500 kpa. 2 otorola ensor Device Data
3 O HIP TEPERTURE OPETIO, LIRTIO D IL ODITIOI igure 3 illustrates both the Differential/auge and the bsolute ensing hip in the basic chip carrier (ase 867). fluorosilicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the sensor diaphragm. (or use of the PX5700D in a high pressure, cyclic application, consult the factory.) The PX5700 series pressure sensor operating characteristics, and internal reliability and qualification tests are based on use of dry air as the pressure media. edia, other than dry air, may have adverse effects on sensor performance and long term reliability. ontact the factory for information regarding media compatibility in your application. igure 4 shows a typical decoupling circuit for interfacing the sensor to the /D input of a microprocessor. Proper decoupling of the power supply is recommended. igure 2 shows the sensor output signal relative to pressure input. Typical, minimum, and maximum output curves are shown for operation over a temperature range of 0 to 85 using the decoupling circuit below. (The output will saturate outside of the specified pressure range.) OUTPUT (V) TRER UTIO: Vout = V*( *P+0.04) ± ERROR V = 5.0 Vdc TEP = 0 to 85 X I TYPIL DIERETIL PREURE (kpa) igure 2. Output versus Pressure Differential WIRE OD LED RE LUORO ILIOE DIE OT DIE TILE TEEL ETL OVER ÉÉ P1 ÉÉ ÉÉÉ ÉÉÉ ÉÉÉ ÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉ P2 EPOXY E igure 3. ross ectional Diagram (ot to cale) RTV DIE OD PX5700 OUTPUT (PI 1) 50 p 51 k /D µ PROEOR igure 4. Typical Decoupling ilter for ensor to icroprocessor Interface otorola ensor Device Data 3
4 PREURE (P1)/VUU (P2) IDE IDETIITIO TLE otorola designates the two sides of the pressure sensor as the Pressure (P1) side and the Vacuum (P2) side. The Pressure (P1) side is the side containing fluoro silicone gel which protects the die from harsh media. The otorola PX pressure sensor is designed to operate with positive differential pressure applied, P1 > P2. The Pressure (P1) side may be identified by using the table below: Part umber ase Type Pressure (P1) ide Identifier PX5700D tainless teel ap PX5700DP ide with Part arking PX5700P ide with Port ttached PX E 03 ide with Port ttached PX5700X ide with Port ttached ORDERI IORTIO The PX5700 pressure sensor is available in differential and gauge configurations. Devices are available in the basic element package or with pressure port fittings that provide printed circuit board mounting ease and barbed hose pressure connections. PX eries Device Type Options ase Type Order umber Device arking asic Element Differential PX5700D PX5700D Ported Elements Differential Dual Ports PX5700DP PX5700DP auge PX5700P PX5700P auge, xial 867E 03 PX5700 PX5700D auge, xial P ount PX5700X PX5700D 4 otorola ensor Device Data
5 PKE DIEIO R POITIVE PREURE (P1) 1. DIEIOI D TOLERI PER I Y14.5, OTROLLI DIEIO: IH. 3. DIEIO I ILUIVE O THE OLD TOP RI. OLD TOP RI OT TO EXEED (0.630). ETI PLE PI 1 T L (0.005) T IHE ILLIETER DI I X I X D L O 30 O R E IUE PI 1. VOUT 2. ROUD 3. V 6. VEX I ELEET (, D) T R ETI PLE PI 1 P 0.25 (0.010) T Q V U L E IUE E PORT #1 POITIVE PREURE (P1) Q K 0.13 (0.005) T P Q 1. DIEIOI D TOLERI PER I Y14.5, OTROLLI DIEIO: IH. IHE ILLIETER DI I X I X D K L P Q R U V PI 1. V OUT 2. ROUD 3. V 6. V EX PREURE IDE PORTED (P, P) otorola ensor Device Data 5
6 PKE DIEIO OTIUED PORT #1 POITIVE PREURE (P1) PORT #2 VUU (P2) X ETI PLE T T P 0.25 (0.010) T Q R ETI PLE PI U W L V E IUE PORT #2 VUU (P2) PORT #1 POITIVE PREURE (P1) Q 0.13 (0.005) K 1. DIEIOI D TOLERI PER I Y14.5, OTROLLI DIEIO: IH. IHE ILLIETER DI I X I X D K L P Q R U V W X PI 1. V OUT 2. ROUD 3. V 6. V EX PREURE D VUU IDE PORTED (DP) 1. DIEIOI D TOLERI PER I Y14.5, OTROLLI DIEIO: IH. V PORT #1 POITIVE PREURE (P1) E T K E 867E 03 IUE D PI (0.005) T IHE ILLIETER DI I X I X D E K V PI 1. V OUT 2. ROUD 3. V 6. V EX PREURE IDE PORTED (, ) 6 otorola ensor Device Data
7 PKE DIEIO OTIUED E T U Q 1. DIEIOI D TOLERI PER I Y14.5, OTROLLI DIEIO: IH. V PORT #1 POITIVE PREURE (P1) P 0.25 (0.010) T 0.13 (0.005) T P Q Q K PI 1 R IHE ILLIETER DI I X I X D E K P Q R U V E IUE D PI 1. V OUT 2. ROUD 3. V 6. V EX PREURE IDE PORTED (X, X) otorola ensor Device Data 7
8 otorola reserves the right to make changes without further notice to any products herein. otorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does otorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. Typical parameters which may be provided in otorola data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. ll operating parameters, including Typicals must be validated for each customer application by customer s technical experts. otorola does not convey any license under its patent rights nor the rights of others. otorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the otorola product could create a situation where personal injury or death may occur. hould uyer purchase or use otorola products for any such unintended or unauthorized application, uyer shall indemnify and hold otorola and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that otorola was negligent regarding the design or manufacture of the part. otorola and are registered trademarks of otorola, Inc. otorola, Inc. is an Equal Opportunity/ffirmative ction Employer. fax is a trademark of otorola, Inc. How to reach us: U / EUROPE / Locations ot Listed: otorola Literature Distribution; P: ippon otorola Ltd.; Tatsumi PD LD, 6 eibu utsuryu enter, P.O. ox 5405, Denver, olorado or Tatsumi Koto Ku, Tokyo 135, apan fax : RX0@ .sps.mot.com TOUHTOE I/PII: otorola emiconductors H.K. Ltd.; 8 Tai Ping Industrial Park, U & anada OLY Ting Kok Road, Tai Po,.T., Hong Kong ITERET: 8 otorola ensor Device PX5700/D Data
9 This datasheet has been download from: Datasheets for electronics components.
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