200 kpa On-Chip Temperature Compensated Silicon Pressure Sensors
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1 Freescale Semiconductor Data Sheet: Technical Data Pressure Document Number: Rev 8, 10/ kpa On-Chip Temperature Compensated Silicon Pressure The devices series are silicon piezoresistive pressure sensor providing a highly accurate and linear voltage output directly proportional to the applied pressure. The sensor is a single monolithic silicon diaphragm with the strain gauge and a thin-film resistor network integrated on chip. The chip is laser trimmed for precise span and offset calibration and temperature compensation. They are designed for use in applications such as pump/ motor controllers, robotics, level indicators, medical diagnostics, pressure switching, barometers, altimeters, etc. Features Temperature Compensated Over 0 C to +85 C Easy-to-Use Chip Carrier Package Options Available in Absolute, Differential and Gauge Configurations Ratiometric to Supply Voltage Available in Easy-to-Use Tape and Reel Series 0 to 200 kpa (0 to 29 psi) 40 mv Full Scale (Typical) Application Examples Pump/Motor Controllers Robotics Level Indicators Medical Diagnostics Pressure Switching Barometers Altimeters ORDERING INFORMATION Device Name Case # of Ports Pressure Type Device Marking No. None Single Dual Gauge Differential Absolute Unibody Package ( Series) A 344 A DP 344C DP AP 344B AP GP 344B GP ASX 344F A Small Outline Package (MPXV2202 Series) MPXV2202GP 1369 MPXV2202GP MPXV2202DP 1351 MPXV2202DP MPXV2202GC6TI 482A MPXV2202G MPAK Package (MPXM2202 Series) MPXM2202D 1320 MPXM2202D MPXM2202DT MPXM2202D MPXM2202A 1320 MPXM2202A MPXM2202GS 1320A MPXM2202GS MPXM2202GST1 1320A MPXM2202GS MPXM2202AS 1320A MPXM2202AS , 2012 Freescale Semiconductor, Inc. All rights reserved.
2 UNIBODY PACKAGES A CASE AP/GP CASE 344B-01 DP CASE 344C-01 ASX CASE 344F-01 SMALL OUTLINE PACKAGES MPAK MPXV2202DP CASE MPXV2202GP CASE MPXV2202GC6T1 CASE 482A-01 MPXM2202A CASE MPXM2202GS/AS CASE 1320A-02 2 Freescale Semiconductor, Inc.
3 Operating Characteristics Pressure Table 1. Operating Characteristics (V S = 10 Vdc, T A = 25 C unless otherwise noted, P1 > P2) Characteristics Symbol Min Typ Max Unit Pressure Range (1) Absolute Pressure Range A Differential Pressure Range D P OP 20 P OP kpa kpa Supply Voltage (2) V S Vdc Supply Current I o 6.0 madc Full Scale Span (3) V FSS mv Offset (4) D, MPXM2202D/G Series A, MPXM2202A Series V off mv Sensitivity V/ P 0.2 mv/kpa Linearity (5) MPXM2202D/G, D Series MPXM2202A, A Series %V FSS Pressure Hysteresis (5) (0 to 200 kpa) 0.1 %V FSS Temperature Hysteresis (5) (-40 C to +125 C) 0.5 %V FSS Temperature Effect on Full Scale Span (5) TCV FSS %V FSS Temperature Effect on Offset (5) TCV off mv Input Impedance Z in Output Impedance Z out Response Time (6) (10% to 90%) t R 1.0 ms Warm-Up 20 ms Offset Stability (7) 0.5 %V FSS kpa (kilopascal) equals psi. 2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self-heating. 3. Full Scale Span (V FSS ) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 4. Offset (V off ) is defined as the output voltage at the minimum rated pressure. 5. Accuracy (error budget) consists of the following: Linearity:Output deviation from a straight line relationship with pressure, using end point method, over the specified pressure range. Temperature Hysteresis:Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. Pressure Hysteresis:Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25 C. TcSpan:Output deviation at full rated pressure over the temperature range of 0 to 85 C, relative to 25 C. TcOffset:Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85 C, relative to 25 C. 6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 7. Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. Freescale Semiconductor, Inc. 3
4 Maximum Ratings Table 2. Maximum Ratings (1) Rating Max Value Unit Maximum Pressure (P1 > P2) 400 kpa Storage Temperature -40 to 125 C Operating Temperature -40 to 125 C 1. Exposure beyond the specified limits may cause permanent damage or degradation to the device. Voltage Output versus Applied Differential The differential voltage output of the sensor is directly proportional to the differential pressure applied. The absolute sensor has a built-in reference vacuum. The output voltage will decrease as vacuum, relative to ambient, is drawn on the pressure (P1) side. The output voltage of the differential or gauge sensor increases with increasing pressure applied to the pressure (P1) side relative to the vacuum (P2) side. Similarly, output voltage increases as increasing vacuum is applied to the vacuum (P2) side relative to the pressure (P1) side. Figure 1 illustrates a block diagram of the internal circuitry on the stand-alone pressure sensor chip. V S 3 Sensing Element Thin Film Temperature Compensation and Calibration Circuitry 2 +V OUT 4 V OUT 1 GND Figure 1. Temperature Compensated and Calibrated Pressure Sensor Schematic 4 Freescale Semiconductor, Inc.
5 On-Chip Temperature Compensation and Calibration Pressure 40 VS = 10 V DC 35 T A = 25 C 30 P1 > P2 TYP MAX MIN 5 0 kpa PSI Pressure Figure 2. Output vs. Pressure Differential Figure 2 shows the output characteristics of the series at 25 C. The output is directly proportional to the differential pressure and is essentially a straight line. Output (mv DC ) Span Range (TYP) Offset (TYP) The effects of temperature on full scale span and offset are very small and are shown under Operating Characteristics. Silicone Gel Die Coat Wire Bond Differential/Gauge Die P1 Stainless Steel Metal Cover Epoxy Case Wire Bond Silicone Gel Die Coat Absolute Die P1 Stainless Steel Metal Cover Epoxy Case Lead Frame Differential/Gauge P2 Element Bond Die Lead Frame Absolute Element P2 Die Bond Figure 3 illustrates the differential/gauge die in the basic chip carrier (Case 344). A silicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm. The series pressure sensor operating characteristics and internal reliability and qualification tests are based on use of dry air as the pressure media. Media other than dry air may have adverse effects on sensor performance and long term reliability. Contact the factory for information regarding media compatibility in your application. LINEARITY Linearity refers to how well a transducer's output follows the equation: V out = V off + sensitivity x P over the operating pressure range. There are two basic methods for calculating nonlinearity: (1) end point straight line fit (see Figure 4) or (2) a least squares best line fit. While a least squares fit gives the best case linearity error (lower numerical value), the calculations required are burdensome. Conversely, an end point fit will give the worst case error (often more desirable in error budget calculations) and the calculations are more straightforward for the user. Freescale s specified pressure sensor linearities are based on the end point straight line method measured at the midrange pressure. Figure 3. Cross Sectional Diagram (not to scale) Relative Voltage Output Least Squares Fit Exaggerated Performance Curve Offset End Point Straight Line Fit Pressure (% Full Scale) Least Square Deviation Straight Line Deviation Figure 4. Linearity Specification Comparison Freescale Semiconductor, Inc. 5
6 PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE Freescale designates the two sides of the pressure sensor as the Pressure (P1) side and the Vacuum (P2) side. The Pressure (P1) side is the side containing silicone gel which isolates the die from the environment. The Freescale MPX pressure sensor is designed to operate with positive differential pressure applied, P1 > P2. The Pressure (P1) side may be identified by using the following table. Table 3. Pressure (P1) Side Delineation Part Number Case Type Pressure (P1) Side Identifier A 344 Stainless Steel Cap DP 344C Side with Part Marking GP/AP 344B Side with Port Attached ASX 344F Side with Port Attached GP 1369 Side with Port Attached DP 1351 Side with Part Marking MPXV2202GP 1369 Side with Port Attached MPXV2202DP 1351 Side with Part Marking MPXV2202GC6TI 482A Side with Port Attached MPXM2202A/ATI/DT/DTI 1320 Side with Part Marking MPXM2202GS/GSTI/AS/ASTI 1320A Side with Port Attached 6 Freescale Semiconductor, Inc.
7 PACKAGE DIMENSIONS N B J 5 8 A S V 4 1 G C D 8 PL 0.25 (0.010) M T B S A S W H T NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, CONTROLLING DIMENSION: INCH. 3. DIMENSION A AND B DO NOT INCLUDE MOLD PROTRUSION. 4. MAXIMUM MOLD PROTRUSION 0.15 (0.006). 5. ALL VERTICAL SURFACES 5 TYPICAL DRAFT. INCHES MILLIMETERS DIM MIN MAX MIN MAX A B C D G BSC 2.54 BSC H J K M N S V W K M PIN 1 IDENTIFIER SEATING PLANE CASE 482A 01 ISSUE A DATE 05/13/98 Freescale Semiconductor, Inc. 7
8 PACKAGE DIMENSIONS B J C M PIN 1 -T- SEATING PLANE -A- F D 4 PL R (0.005) M T G N A M L 1 F 2 3 Y DAMBAR TRIM ZONE: THIS IS INCLUDED WITHIN DIM. "F" 8 PL 4 Z NOTES: DIMENSIONING AND TOLERANCING PER ASME Y14.5M, CONTROLLING DIMENSION: INCH. DIMENSION -A- IS INCLUSIVE OF THE MOLD STOP RING. MOLD STOP RING NOT TO EXCEED (0.630). INCHES MILLIMETERS DIM MIN MAX MIN MAX A B C D F G BSC 2.54 BSC J L M 30 NOM 30 NOM N R Y Z STYLE 1: PIN 1. GROUND 2. + OUTPUT 3. + SUPPLY 4. - OUTPUT STYLE 2: PIN 1. VCC 2. - SUPPLY 3. + SUPPLY 4. GROUND STYLE 3: PIN 1. GND 2. -VOUT 3. VS 4. +VOUT CASE ISSUE AA UNIBODY PACKAGE SEATING PLANE -P- -T- J R C N B -Q- PORT #1 POSITIVE PRESSURE (P1) 0.25 (0.010) M T Q PIN 1 S F G H L S K D 4 PL 0.13 (0.005) M S Q S T S -A- U NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, CONTROLLING DIMENSION: INCH. INCHES MILLIMETERS DIM MIN MAX MIN MAX A B C D F G BSC 2.54 BSC H J K L N P Q R S U BSC BSC STYLE 1: PIN 1. GROUND 2. + OUTPUT 3. + SUPPLY 4. - OUTPUT CASE 344B-01 ISSUE B UNIBODY PACKAGE 8 Freescale Semiconductor, Inc.
9 PACKAGE DIMENSIONS R PORT #2 SEATING PLANE B PORT #1 N SEATING PLANE PORT #2 VACUUM (P2) J V C W F G D 4 PL -Q- PIN 1 -P- -T- -T (0.010) M T Q S -A- U (0.005) M T S S Q S S L H PORT #1 POSITIVE PRESSURE (P1) K NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, CONTROLLING DIMENSION: INCH. INCHES MILLIMETERS DIM MIN MAX MIN MAX A B C D F G BSC 2.54 BSC H J K L N P Q R S U BSC BSC V W STYLE 1: PIN 1. GROUND 2. + OUTPUT 3. + SUPPLY 4. - OUTPUT CASE 344C-01 ISSUE B UNIBODY PACKAGE R -T- N B SEATING PLANE PORT #2 VACUUM (P2) PIN S POSITIVE PRESSURE (P1) -A- U L H -Q- K NOTES: 1. DIMENSIONING AND TOLERANCING PER ASME Y14.5M, CONTROLLING DIMENSION: INCH. INCHES MILLIMETERS DIM MIN MAX MIN MAX A B C D F G BSC 2.54 BSC H J K L N P Q R S U BSC BSC J C -P (0.010) M T F Q S G D 4 PL 0.13 (0.005) M T S S Q S STYLE 1: PIN 1. GROUND 2. + OUTPUT 3. + SUPPLY 4. - OUTPUT CASE 344D-01 ISSUE B UNIBODY PACKAGE Freescale Semiconductor, Inc. 9
10 PACKAGE DIMENSIONS CASE ISSUE A SMALL OUTLINE PACKAGE PAGE 1 OF 2 10 Freescale Semiconductor, Inc.
11 CASE ISSUE A SMALL OUTLINE PACKAGE PAGE 2 OF 2 Freescale Semiconductor, Inc. 11
12 CASE ISSUE B SMALL OUTLINE PACKAGE 12 Freescale Semiconductor, Inc.
13 PACKAGE DIMENSIONS Pressure CASE ISSUE B SMALL OUTLINE PACKAGE Freescale Semiconductor, Inc. 13
14 PACKAGE DIMENSIONS CASE ISSUE B MPAK 14 Freescale Semiconductor, Inc.
15 PACKAGE DIMENSIONS Pressure CASE ISSUE B MPAK Freescale Semiconductor, Inc. 15
16 PACKAGE DIMENSIONS PIN 4 PIN 1 CASE 1320A-02 ISSUE A MPAK 16 Freescale Semiconductor, Inc.
17 PACKAGE DIMENSIONS Pressure CASE 1320A-02 ISSUE A MPAK Freescale Semiconductor, Inc. 17
18 REVISION HISTORY Revision number Revision date Description of changes Pressure 7 01/2012 In Table 1. Operating Characteristics, in the Characteristic column under Pressure Range, added rows for Absolute Pressure Range A and Differential Pressure Range D devices 8 10/2012 Deleted references to device number MPXV2022GC6U throughout the document Freescale Semiconductor, Inc. 18
19 How to Reach Us: Home Page: freescale.com Web Support: freescale.com/support Information in this document is provided solely to enable system and software implementers to use Freescale products. There are no express or implied copyright licenses granted hereunder to design or fabricate any integrated circuits based on the information in this document. Freescale reserves the right to make changes without further notice to any products herein. Freescale makes no warranty, representation, or guarantee regarding the suitability of its products for any particular purpose, nor does Freescale assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. Typical parameters that may be provided in Freescale data sheets and/or specifications can and do vary in different applications, and actual performance may vary over time. All operating parameters, including typicals, must be validated for each customer application by customer s technical experts. Freescale does not convey any license under its patent rights nor the rights of others. Freescale sells products pursuant to standard terms and conditions of sale, which can be found at the following address: freescale.com/salestermsandconditions. Freescale and the Freescale logo are trademarks of Freescale Semiconductor, Inc., Reg. U.S. Pat. & Tm. Off. All other product or service names are the property of their respective owners Freescale Semiconductor, Inc. All rights reserved. Rev. 8 10/2012
ORDERING INFORMATION # of Ports Pressure Type Device Name
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ORDERING INFORMATION. # of Ports Pressure Type No. None Single Dual Gauge Differential Absolute
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