Industry needs: Characterisation & Analysis. Prof. Valeria Nicolosi

Transcription

1 Industry needs: Characterisation & Analysis Prof. Valeria Nicolosi

2 Cleanroom Facility Cleanroom Facility Class 100 and 10,000 cleanroom facility.

3 Cleanroom Sample Preparation Substrates are diced Into test samples. Substrate Disco DAD3220 Dicer. Solvent Preparation Bench. Sample cleaning using solvents And Ultra-sonics baths. Arias Wet Benches. Spin Coater Bench. Used to spin coated samples with photo-resists and polymer Coatings. Acid Wet Bench. Used for etching silicon native oxide, Silicon Dioxide and Silicon Nitride.

4 Cleanroom Dry and Wet Etch Capability Substrate Patterning OAI nanoimprint Module. Imprinting micro and nanoscale features into polymers. Silicon Stamp for nano-imprint UV Lithography Optical micro-disk. Courtesy David McCloskey E-beam lithography Plasmalab 100 ICP etcher Controlled etching of nanoscale features. Self assembly Acid Wet Bench used for sacrificial layer removal. NEMS Components Fabrication

5 Photonics Laboratory

6 Developing New Functional Materials Plasmonic Structures Fabrication Development of sensing platforms fs-pld of Ag nanoparticle Hybrid Nano-Bio Bacteriorhodopsin in the presence of semiconductor quantum dots Surface enhanced Raman scattering (SERS) Characterization Enhanced linear and nonlinear properties Improved nonlinear functionality Light modulation Optical limiting

7 Force ( N) AFM Topography Electrical Mechanical Surface composition Magnetic Thermal Raman Electrical Mechanical Topography AFM Directly Mapping We can relate measure the conduction surface the local path structure and mechanical Accurate its evolution with surface properties chemical through roughness of soft composition. nanowire materials analysis. networks. like Very cells useful and Important for for polymers. the transparent, pharmaceuticals flexible industry electronics. High resolution e.g. tablet imaging of compositions Can structured also measure devices analysis hard and Visualising materials. and the nanoscale conductive and insulating objects. Magnetic Thermal components of Visualise devices. the magnetic Can map the thermal Fine structural imaging of soft structure Extremely of a materials, such useful surface as technique as a conductivity and effects of cancer function Mapping for cells. analysing of location. local local conductivity variations local heating. of rough in material surfaces mechanics, in bulk materials important for light weight 3.0 In-liquid analysis of bio-matter Strength composite materials in Elastcity under controllable 1.5 aviation for example. - Plasticty 1.0 environmental conditions Displacement (nm)

8 Raman Spectroscopy Characteristic Frequencies Composition Peak shifts Stress/Strain Polarisation of Peak Crystal Orientation Peak Widths Crystal Quality Peak Intensity Amount of Material

9 Renishaw/NT-MDT System Photonics Laboratory (CRANN 3.26) SNOM capabilities 488, 532 & 633 nm lasers AFM Witec Alpha 300 ASIN Lab Fast mapping with 532 nm Polarisation possible

10 X-ray Photoelectron Spectroscopy Who should use XPS? Anyone who is interested in knowing; What elements are present at their surface. What chemical states of these elements are present. How much of each chemical state of each element is present. If the material is present as a thin film; How thick is it? How uniform is the thickness? How uniform is the chemical composition? Failure analysis Evaluate changes in the surface chemistries. Surface contamination.

11 X-ray Photoelectron Spectroscopy

12 Advanced Microscopy Laboratory It operates in a custom built microscopy suite, located in the Trinity Technology and Enterprise Campus, Dublin. A team of highly trained scientists and engineers: Manager of the Facility: Cathal McAuley Dermot Daly Clive Downing Alan Bell TCD CRANN AML Shortlisted for the SFI Irish Laboratory Award 2013

13 Supporting academic and industry needs Supporting Research Supporting Industrial Access AML Supporting National and Transnational Access

14 Ultra-high resolution SEM 2.5 nm Focussed ion beam Sub 20nm EBL capability High-end microscopes for imaging, analysis and nanofabrication Characterisation He ion microscope (S)TEM with EDX & EELS

15 The new addition: Aberration-Corrected STEM FEATURE STEM probe-correction of all aberrations up to and including 5 th order BENEFIT Larger probe angles, higher beam current 0.6 Å information transfer at 200 kev and 1.2 Å information transfer at 60 kev Operating energies: 200, 100, 60 and 40kV >0.5 na current in an atomsized probe Larger sample chamber configured for in-situ experiments 3 rd order aberration correction for EELS Wide range of experimental regimes adaptable to different sample types Rapid atomic-resolution EELS elemental mapping Enabling of a wide range of in-situ experiments >50 mrad acceptance semiangle

16 FIB - Versatile material manipulation and modification Key Hole Surgery Porous Glass used in Medical industry Internal structure observed 20um Courtesy : Dr. Aran Rafferty Internal of fibre optic Metal stack FIB cut in Stent Courtesy : Cathal McAuley

17 3D reconstructions are possible... Slice and view - Polish with FIB and then capture high resolution SEM image. 3D reconstructions then carried out using CAD based software packages. Currently becoming very popular in Biology for cell and tissue reconstructions Below animation: Porous Glass sample used as a filter in the medical device industry. Courtesy : Dr. Aran Rafferty Example of 3D reconstruction Source : Nicolas Vivet

18 TEM (Transmission Electron Microscopy) sample preparation The FIB is also used for TEM sample prep of various materials and samples. TEM has higher resolution and magnification than SEM but needs very thin samples. Trenches milled either side Needle doing sample Lift out Side on view. Lamella work in progress Top down FIB view of lamella Ready for TEM (Electron Transparent) Ready for TEM (Electron Transparent)

19 Masks, holes and patterns - nanostructuring Gallium and five gases assist in deposition, masks and etching of materials. Ion beam blanking system (Raith) used to create patterns, gaps and holes. 20nm Nano pillar AFM tips Platinum protective strap Gold 3nm gaps Courtesy : Adama Innovations Courtesy : Dr. Colm Faulkner 100 x 100 photonic array 150nm holes

20 FEI Titan High-Resolution Transmission Electron Microscopy TEM STEM Gatan GIF Tridiem post-column energy filter (EF- TEM / EELS STEM) Oxford Instruments EDX Acceleration voltage: 300kV 80kV

21 TEM - Nanoparticles Ann O Connell, Centre for BioNano Interactions, UCD Bi2O3 nanoparticles for in vivo in vitro toxicology investigations

22 STEM + Analysis Atomically thin layer Ru dust

23 High resolution Analysis HAADF image MAADF Single Er atoms Spectrum-image 1.4 nm Er-N Er-N4,5 C-K C-K Er The size of the atoms in the Er image are only about 3 Å

24 Atom by Atom Analysis C ring is deformed Cx6 O N B C O Longer bonds Na adatom C

25 A closer look: Mixed stoichiometries!

26 Orion Plus, Helium Ion Microscope 1 st in Ireland; one of few in the world.. A new imaging technology based on a scanning helium ion beam.

27 Orion Plus, Helium Ion Microscope Resolution (probe size) ~ 0.35 nm Accelerating Voltage: kv±5 kv Beam Current: Range: 1 fa 100 pa (Typically pa for highest resolution) Detectors for Secondary Electrons and Rutherford Backscattered Ions

28 Imaging of biological material High resolution (0.35 nm) Large depth of focus High surface sensitivity Charge control achieved using flood gun

29 Imaging of block copolymers Increased contrast in HIM compared to SEM Superior surface sensitivity and chemical contrast in HIM

30 What else can it do? Lithography Raith system attached sub 10 nm lines demonstrated Material analysis Superior surface sensitivity over SEM allows extraction of elemental information Direct sputtering of materials Graphene nanoribbon fabrication Probe sharpening enabling electrical characterisation of ultra small features

31 Contact us Prof. Valeria Nicolosi, Dr. Chris Keely, Mr. Cathal McAuley,