Tailored surface modification of substrates by atmospheric plasma for improved compatibility with specific adhesive Nicolas Vandencasteele

Size: px
Start display at page:

Download "Tailored surface modification of substrates by atmospheric plasma for improved compatibility with specific adhesive Nicolas Vandencasteele"

Transcription

1 1 oating Plasma Innovation Tailored surface modification of substrates by atmospheric plasma for improved compatibility with specific adhesive Nicolas Vandencasteele

2 2 Plasma Applications Adhesion improvement Release Liners

3 3 Plasma 4 th state of matter: ionized gas

4 4 old atmospheric plasma old: T gas < 100 T ions,neutrals < 100 T electrons Hot: T gas T ions,neutrals T electrons 10 4 <T<10 8 Atmospheric: Plasma gas is at atmospheric pressure Open reactor, high density of particles Energetic electrons chemistry

5 5 orona High Voltage Used for activation or cleaning Flat substrate Most of the time need to be used inline with other process Gas used: none (ambient air) Ambient air Filamentary discharge

6 6 Plasma DBD High Voltage Used for activation or cleaning and deposition Flat substrate Used online or offline Gas used:n 2, (Ar, He) ontrolled atmosphere Homogeneous discharge

7 7 Plasma vs orona Surface energy measurements on BOPP film ontrolled chemistry Stable treatment

8 8 Plasma vs orona Microscopy (AFM) image of BOPP film 1 µm x 1 µm images (Tapping) Untreated Plasma DBD orona Es 30 mn/m Es = 60 mn/m Es = 38 mn/m Identical discharge power ontrolled chemistry, homogenous discharge no surface damage

9 9 Process Plasma gas + dopant Dopant: ppm of reactive gases mixed with plasma gas (only safe gas green top bottles)

10 10 APPLIATIONS

11 11 Applications: leaning Plasma O 2, H 2 O ontaminated surface Surface contamination leaned sample Removal of surface contamination without substrate degradation

12 12 Applications: Grafting O O O O H O O O O O H O Amine Amide Imide N H H 2 O NH O O N H Gas: N 2 + dopants Surface functionalization

13 Atomic % (XPS) Quantity (a.u.) 13 Applications: Grafting Plasma 1 Standard Plasma 2 Advanced Dopant 11 Plasma 3 Advanced Dopant Amine Amide Imide Grafting of nitrogen containing groups Tunable surface functionalization

14 14 Applications:oating Specific molecules (precursor ) are added to the plasma gas. Those molecules are activated ( ) by the plasma and react with the sample surface to form a thin film. HMDSO precursor SiO x film (hydrophilic) Si y O x film (hydrophobic) oating nature dependend on precursor AND plasma chemistry

15 15 ADHESION IMPROVEMENT

16 16 ETFE Surface energy increase Very limited ageing after 3 weeks

17 Peel Force [N/m] Surface energy [mn/m] ETFE Adhesion increase ETFE laminate (Araldite 2028) Untreated orona Plasma 1 Plasma 2 Plasma 3 Peel Force Surface Energy Different plasma chemistries Surface energy is not the main factor improving adhesion

18 Peel Force [N/m] at. % N 18 ETFE Adhesion increase ETFE laminate (Araldite 2028) Untreated orona Plasma 1 Plasma 2 Plasma 3 Peel Force %N grafted hemistry, not SE, is the main factor improving adhesion

19 Peel Force [N/m] Surface Enrgy [mn/m] 19 PET Adhesion increase PET thermoset adhesive Untreated orona Plasma a Plasma b Plasma c Peel force Surface Energy Adhesion not always directly related to surface energy

20 Peel Force [N/m] At. % Nitrogen 20 PET Adhesion increase PET thermoset adhesive Untreated orona Plasma a Plasma b Plasma c Peel force Surface omposition hemistry, not SE, is the main factor improving adhesion

21 21 Adhesion increase Acrylic PET Untreated vs orona 15% Untreated vs Plasma Up to 85% orona vs Plasma 35% Thermoset PET Untreated vs orona 200% Untreated vs Plasma Up to 2300% orona vs Plasma 800% Araldite 2028 ETFE Untreated vs orona 1000% Untreated vs Plasma Up to 4870% orona vs Plasma 350% Results depend on adhesive and plasma chemistries

22 22 RELEASE LINERS

23 23 Release coating Plasma allow deposition of nanometer thick coatings. Release liner developed for electronic industry Moderate to high release force Extremely low level of extractible silicone Recyclable oating 10 nm TEM crosssection image

24 24 Release coating Peel force (N/m) SA (%) Extractible Silicone (ng/cm²) Silicone RL Silicone RL Silicone RL Silicone RL Non silicone RL 1* Non silicone RL 2* n.d. Plasma n.d. *Not resistant to solvant Peel force measured with solvent based acrylic tape SA measured with Nitto 31b tape Extratible silicone measured based on IDEMA M 7 98 standard

25 RF [N/m] 25 Release coating ontrolled Release Solvent based acrylic PSA, 180 peel test at 300 mm/min Experimental parameter [a.u.] Release level can be adjusted by experimental parameters

26 26 onclusion Plasma treatment enables stable modification of surface energy Plasma allows to tailor the surface modifications to specific adhesive and substrate combination Level of adhesion can be controlled over a large range Plasma treatment can be applied to almost any materials (PEEK, Fluorinated polymers, PI ) Plasmas allow to produce very clean release liners (no silicone contamination) with tunable release force

Atmospheric Plasma treatment, effect on the plasma chemistry on adhesion Nicolas Vandencasteele

Atmospheric Plasma treatment, effect on the plasma chemistry on adhesion Nicolas Vandencasteele 1 oating Plasma Innovation Atmospheric Plasma treatment, effect on the plasma chemistry on adhesion Nicolas Vandencasteele 2 Plasma Applications Adhesion improvement onclusion 3 Plasma 4 th state of matter:

More information

FLEXIBLE FILMS TREATMENT

FLEXIBLE FILMS TREATMENT FLEXIBLE FILMS TREATMENT ROLL TO ROLL ATMOSPHERIC PRESSURE COLD PLASMA - SURFACE CHEMICAL ACTIVATION & FUNCTIONNALIZATION - DEPOSITION of NANO COATINGS At INDUSTRIALSCALE Eric GAT & TRAN Minh Duc PRODUCTS

More information

Surface and Interface Characterization of Polymer Films

Surface and Interface Characterization of Polymer Films Surface and Interface Characterization of Polymer Films Jeff Shallenberger, Evans Analytical Group 104 Windsor Center Dr., East Windsor NJ Copyright 2013 Evans Analytical Group Outline Introduction to

More information

Trends in Surface Treatment for Multi-Layer Packaging

Trends in Surface Treatment for Multi-Layer Packaging Trends in Surface Treatment for Multi-Layer Packaging Presented by Senthil Kumar C.O.O. Enercon Asia Pacific Major Presentation Topics Trends and Challenges Multi-Film Structures Wet vs. Dry Trapping on

More information

Electronic Supplementary Information. Molecular Antenna Tailored Organic Thin-film Transistor for. Sensing Application

Electronic Supplementary Information. Molecular Antenna Tailored Organic Thin-film Transistor for. Sensing Application Electronic Supplementary Material (ESI) for Materials Horizons. This journal is The Royal Society of Chemistry 2017 Electronic Supplementary Information Molecular Antenna Tailored Organic Thin-film Transistor

More information

Multi-Layer Coating of Ultrathin Polymer Films on Nanoparticles of Alumina by a Plasma Treatment

Multi-Layer Coating of Ultrathin Polymer Films on Nanoparticles of Alumina by a Plasma Treatment Mat. Res. Soc. Symp. Vol. 635 2001 Materials Research Society Multi-Layer Coating of Ultrathin Polymer Films on Nanoparticles of Alumina by a Plasma Treatment Donglu Shi, Zhou Yu, S. X. Wang 1, Wim J.

More information

Abstract... Zusammenfassung... List of abbreviations... I. List of figures... II. List of tables... III. Chapter 1: Introduction

Abstract... Zusammenfassung... List of abbreviations... I. List of figures... II. List of tables... III. Chapter 1: Introduction Zeinab R. F. Mohamed Synthesis and Characterization of Fire-Retardant Layers onto Polyolefin Substrates 2014 / 178 Seiten / 29,80 / ISBN 978-3-89574-873-8 Verlag Dr. Köster, Berlin / www.verlag-koester.de

More information

UNIT 3. By: Ajay Kumar Gautam Asst. Prof. Dev Bhoomi Institute of Technology & Engineering, Dehradun

UNIT 3. By: Ajay Kumar Gautam Asst. Prof. Dev Bhoomi Institute of Technology & Engineering, Dehradun UNIT 3 By: Ajay Kumar Gautam Asst. Prof. Dev Bhoomi Institute of Technology & Engineering, Dehradun 1 Syllabus Lithography: photolithography and pattern transfer, Optical and non optical lithography, electron,

More information

DEPOSITION OF THIN TiO 2 FILMS BY DC MAGNETRON SPUTTERING METHOD

DEPOSITION OF THIN TiO 2 FILMS BY DC MAGNETRON SPUTTERING METHOD Chapter 4 DEPOSITION OF THIN TiO 2 FILMS BY DC MAGNETRON SPUTTERING METHOD 4.1 INTRODUCTION Sputter deposition process is another old technique being used in modern semiconductor industries. Sputtering

More information

Solutions for Assignment-8

Solutions for Assignment-8 Solutions for Assignment-8 Q1. The process of adding impurities to a pure semiconductor is called: [1] (a) Mixing (b) Doping (c) Diffusing (d) None of the above In semiconductor production, doping intentionally

More information

Hydrophilization of Fluoropolymers and Silicones

Hydrophilization of Fluoropolymers and Silicones 2017 Adhesive and Sealant Council Spring Meeting Hydrophilization of Fluoropolymers and Silicones Aknowledgements: Wei Chen Mount Holyoke College NSF, NIH, Dreyfus, ACS-RF, MHC Bryony Coupe, Mamle Quarmyne,

More information

TMT4320 Nanomaterials November 10 th, Thin films by physical/chemical methods (From chapter 24 and 25)

TMT4320 Nanomaterials November 10 th, Thin films by physical/chemical methods (From chapter 24 and 25) 1 TMT4320 Nanomaterials November 10 th, 2015 Thin films by physical/chemical methods (From chapter 24 and 25) 2 Thin films by physical/chemical methods Vapor-phase growth (compared to liquid-phase growth)

More information

LECTURE 5 SUMMARY OF KEY IDEAS

LECTURE 5 SUMMARY OF KEY IDEAS LECTURE 5 SUMMARY OF KEY IDEAS Etching is a processing step following lithography: it transfers a circuit image from the photoresist to materials form which devices are made or to hard masking or sacrificial

More information

Repetition: Practical Aspects

Repetition: Practical Aspects Repetition: Practical Aspects Reduction of the Cathode Dark Space! E x 0 Geometric limit of the extension of a sputter plant. Lowest distance between target and substrate V Cathode (Target/Source) - +

More information

PLASMA-POLYMER MODIFICATION OF BASAL PLANE GRAPHITE SURFACES FOR IMPROVED BIOCOMPATIBILITY

PLASMA-POLYMER MODIFICATION OF BASAL PLANE GRAPHITE SURFACES FOR IMPROVED BIOCOMPATIBILITY PLASMA-POLYMER MODIFICATION OF BASAL PLANE GRAPHITE SURFACES FOR IMPROVED BIOCOMPATIBILITY Anca Orăşanu, Marcus R. Davidson, Robert H. Bradley Advanced Materials & Biomaterials Research Centre, School

More information

ARGON RF PLASMA TREATMENT OF PET FILMS FOR SILICON FILMS ADHESION IMPROVEMENT

ARGON RF PLASMA TREATMENT OF PET FILMS FOR SILICON FILMS ADHESION IMPROVEMENT Journal of Optoelectronics and Advanced Materials Vol. 7, No. 5, October 2005, p. 2529-2534 ARGON RF PLASMA TREATMENT OF FILMS FOR SILICON FILMS ADHESION IMPROVEMENT I. A. Rusu *, G. Popa, S. O. Saied

More information

FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST ATMOSPHERIC PRESSURE PLASMA PROCESSES

FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST ATMOSPHERIC PRESSURE PLASMA PROCESSES FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST ATMOSPHERIC PRESSURE PLASMA PROCESSES 1 2 ATMOSPHERIC PRESSURE PLASMA PROCESSES AT THE FRAUNHOFER IST Today, atmospheric pressure plasma

More information

Surface treatment of metals using an atmospheric pressure plasma jet and their surface characteristics

Surface treatment of metals using an atmospheric pressure plasma jet and their surface characteristics Surface and Coatings Technology 174 175 (2003) 839 844 Surface treatment of metals using an atmospheric pressure plasma jet and their surface characteristics M.C. Kim, S.H. Yang *, J.-H. Boo, J.G. Han

More information

Deposition of polymeric thin films by PVD process. Hachet Dorian 09/03/2016

Deposition of polymeric thin films by PVD process. Hachet Dorian 09/03/2016 Deposition of polymeric thin films by PVD process Hachet Dorian 09/03/2016 Polymeric Thin Films nowadays The evaporation of polymers Ionization-Assisted Method Vacuum deposition 0,055eV/molecule at 1000

More information

Bio-compatible polymer coatings using low temperature, atmospheric pressure plasma

Bio-compatible polymer coatings using low temperature, atmospheric pressure plasma High Performance and Optimum Design of Structures and Materials 579 Bio-compatible polymer coatings using low temperature, atmospheric pressure plasma S. Farhat, M. Gilliam, A. Zand & M. Rabago-Smith Department

More information

Lecture 6 Plasmas. Chapters 10 &16 Wolf and Tauber. ECE611 / CHE611 Electronic Materials Processing Fall John Labram 1/68

Lecture 6 Plasmas. Chapters 10 &16 Wolf and Tauber. ECE611 / CHE611 Electronic Materials Processing Fall John Labram 1/68 Lecture 6 Plasmas Chapters 10 &16 Wolf and Tauber 1/68 Announcements Homework: Homework will be returned to you on Thursday (12 th October). Solutions will be also posted online on Thursday (12 th October)

More information

Etching Issues - Anisotropy. Dry Etching. Dry Etching Overview. Etching Issues - Selectivity

Etching Issues - Anisotropy. Dry Etching. Dry Etching Overview. Etching Issues - Selectivity Etching Issues - Anisotropy Dry Etching Dr. Bruce K. Gale Fundamentals of Micromachining BIOEN 6421 EL EN 5221 and 6221 ME EN 5960 and 6960 Isotropic etchants etch at the same rate in every direction mask

More information

Accelerated Neutral Atom Beam (ANAB)

Accelerated Neutral Atom Beam (ANAB) Accelerated Neutral Atom Beam (ANAB) Development and Commercialization July 2015 1 Technological Progression Sometimes it is necessary to develop a completely new tool or enabling technology to meet future

More information

Nordson MARCH Concord, CA, USA

Nordson MARCH Concord, CA, USA Overcoming the Challenges Presented with Automated Selective Conformal Coating of Advanced Electronic Assemblies by Employing Plasma Treatment Technology David Foote Nordson MARCH Concord, CA, USA david.foote@nordsonmarch.com

More information

Plasma Deposition (Overview) Lecture 1

Plasma Deposition (Overview) Lecture 1 Plasma Deposition (Overview) Lecture 1 Material Processes Plasma Processing Plasma-assisted Deposition Implantation Surface Modification Development of Plasma-based processing Microelectronics needs (fabrication

More information

Atomic layer deposition of titanium nitride

Atomic layer deposition of titanium nitride Atomic layer deposition of titanium nitride Jue Yue,version4, 04/26/2015 Introduction Titanium nitride is a hard and metallic material which has found many applications, e.g.as a wear resistant coating[1],

More information

Case Study of Electronic Materials Packaging with Poor Metal Adhesion and the Process for Performing Root Cause Failure Analysis

Case Study of Electronic Materials Packaging with Poor Metal Adhesion and the Process for Performing Root Cause Failure Analysis Case Study of Electronic Materials Packaging with Poor Metal Adhesion and the Process for Performing Root Cause Failure Analysis Dr. E. A. Leone BACKGRUND ne trend in the electronic packaging industry

More information

Plasma based modification of thin films and nanoparticles. Johannes Berndt, GREMI,Orléans

Plasma based modification of thin films and nanoparticles. Johannes Berndt, GREMI,Orléans Plasma based modification of thin films and nanoparticles Johannes Berndt, GREMI,Orléans What is a plasma? A plasma is a ionized quasineutral gas! + electron electrons Neon bottle Ne atom Ne ion: Ne +

More information

Engineered Plastic Solutions TM. Surface Modification

Engineered Plastic Solutions TM. Surface Modification Engineered Plastic Solutions TM Surface Modification E n g i n e e r i n g C u s t o m F a b r i c a t i o n M a n u f a c t u r i n g Services A partnership with TriStar will give you a competitive edge.

More information

Innovative. Technologies. Chemie des Klebens Chemistry of Adhesives. Dr. Jochen Stock, Laboratory Manager CRL Germany: Neuss, November 27 th, 2013

Innovative. Technologies. Chemie des Klebens Chemistry of Adhesives. Dr. Jochen Stock, Laboratory Manager CRL Germany: Neuss, November 27 th, 2013 Chemie des Klebens Chemistry of Adhesives Dr. Jochen Stock, Laboratory Manager CRL Germany: Neuss, November 27 th, 2013 Innovative Technologies 1 Overview Chemie des Klebens Chemistry of Adhesives Introduction

More information

Correlating Substrate Surface Analysis to Adhesive Performance

Correlating Substrate Surface Analysis to Adhesive Performance Correlating Substrate Surface Analysis to Adhesive Performance Michaeleen Pacholski, PhD; Bill Griffith, PhD, David Keely and Terri Powell The Dow Chemical Company Introduction To create proper bonds for

More information

Application of Surface Analysis for Root Cause Failure Analysis

Application of Surface Analysis for Root Cause Failure Analysis Application of Surface Analysis for Root Cause Failure Analysis David A. Cole Evans Analytical Group East Windsor, NJ Specialists in Materials Characterization Outline Introduction X-Ray Photoelectron

More information

Copolymerization and water stability of atmospheric pressure plasma polymerized films from allylamine and styrene

Copolymerization and water stability of atmospheric pressure plasma polymerized films from allylamine and styrene 22 nd International Symposium on Plasma Chemistry July 5-10, 2015; Antwerp, Belgium Copolymerization and water stability of atmospheric pressure plasma polymerized films from allylamine and styrene R.

More information

EE C245 ME C218 Introduction to MEMS Design Fall 2007

EE C245 ME C218 Introduction to MEMS Design Fall 2007 EE C245 ME C218 Introduction to MEMS Design Fall 2007 Prof. Clark T.-C. Nguyen Dept. of Electrical Engineering & Computer Sciences University of California at Berkeley Berkeley, CA 94720 Lecture 4: Film

More information

Proceedings Novel Method for Adhesion between PI-PDMS Using Butyl Rubber for Large Area Flexible Body Patches

Proceedings Novel Method for Adhesion between PI-PDMS Using Butyl Rubber for Large Area Flexible Body Patches Proceedings Novel Method for Adhesion between PI-PDMS Using Butyl Rubber for Large Area Flexible Body Patches Shivani Joshi 1,2, *, Rishab Bagani 1, Lucas Beckers 2 and Ronald Dekker 1,2 1 Department of

More information

Promotion of Adhesive Polymer Bonding by Plasma Modification Using Defined Ambient Conditions and Process Gases

Promotion of Adhesive Polymer Bonding by Plasma Modification Using Defined Ambient Conditions and Process Gases Journal of Energy and Power Engineering 11 (17) 135-139 doi: 1.175/193-8975/17..8 D DAVID PUBLISHING Promotion of Adhesive Polymer Bonding by Plasma Modification Using Defined Ambient Conditions and Process

More information

T: +44 (0) W:

T: +44 (0) W: Ultraviolet Deposition of Thin Films and Nanostructures Ian W. Boyd ETC Brunel University Kingston Lane Uxbridge Middx UB8 3PH UK T: +44 (0)1895 267419 W: etcbrunel.co.uk E: ian.boyd@brunel.ac.uk Outline

More information

Surface modification of polyethylene terephthalate (PET) and oxide coated PET for adhesion improvement

Surface modification of polyethylene terephthalate (PET) and oxide coated PET for adhesion improvement Surface modification of polyethylene terephthalate (PET) and oxide coated PET for adhesion improvement AIMCAL 2016 Dresden Juliane Fichtner Tobias Beck Frank Simon (IPF, Dresden) page 1 Motivation oxygen

More information

Etching: Basic Terminology

Etching: Basic Terminology Lecture 7 Etching Etching: Basic Terminology Introduction : Etching of thin films and sometimes the silicon substrate are very common process steps. Usually selectivity, and directionality are the first

More information

CNR-ISMAC, Sede di Biella

CNR-ISMAC, Sede di Biella PLASMA-ASSISTED COATING TO IMPROVE TEXTILE PERFORMANCES CNR-ISMAC, Sede di Biella c.so Giuseppe Pella, 16 13900 Biella www.bi.ismac.cnr.it Sede di Biella GOAL: Study of the effect of low-pressure plasma

More information

Sciences and Analyses of Materials Department Surface Treatment Unit Centre de Recherche Public Gabriel Lippmann Belvaux - Luxembourg

Sciences and Analyses of Materials Department Surface Treatment Unit Centre de Recherche Public Gabriel Lippmann Belvaux - Luxembourg Sciences and Analyses of Materials Department Surface Treatment Unit Centre de Recherche Public Gabriel Lippmann Belvaux - Luxembourg Surface Treatment Unit, UTS BRIEF history : 2006 2009 : launched of

More information

STSM scientific report

STSM scientific report STSM scientific report Title project: Activation and functionalisation of nonwoven polypropylene by atmospheric pressure plasma Grantee: Nina Radic Host: Milorad Kuraica COST STSM Reference Number: COST-STSM-CM0601-05646

More information

Fabrication of Hydrophobic Films from OFCB Monomer by Plasma Polymerization at Atmospheric Pressure

Fabrication of Hydrophobic Films from OFCB Monomer by Plasma Polymerization at Atmospheric Pressure WDS'13 Proceedings of Contributed Papers, Part III, 155 160, 2013. ISBN 978-80-7378-252-8 MATFYZPRESS Fabrication of Hydrophobic Films from OFCB Monomer by Plasma Polymerization at Atmospheric Pressure

More information

CVD: General considerations.

CVD: General considerations. CVD: General considerations. PVD: Move material from bulk to thin film form. Limited primarily to metals or simple materials. Limited by thermal stability/vapor pressure considerations. Typically requires

More information

Section 3: Etching. Jaeger Chapter 2 Reader

Section 3: Etching. Jaeger Chapter 2 Reader Section 3: Etching Jaeger Chapter 2 Reader Etch rate Etch Process - Figures of Merit Etch rate uniformity Selectivity Anisotropy d m Bias and anisotropy etching mask h f substrate d f d m substrate d f

More information

Elektrospray Abscheidung dünner Polymerschichten Thin polymer layers deposited by electrospray

Elektrospray Abscheidung dünner Polymerschichten Thin polymer layers deposited by electrospray Elektrospray Abscheidung dünner Polymerschichten Thin polymer layers deposited by electrospray J. Friedrich, K. Altmann, G. Hidde, R. D. Schulze, R. Mix, Bundesanstalt für Materialforschung und prüfung

More information

Trends in plasma applications

Trends in plasma applications 3 International Conference on Frontiers of Plasma Physics and Technology Trends in plasma applications R. Barni Centro PlasmaPrometeo Bangkok 5 March 27 Plasma processing Trends towards atmospheric pressure:

More information

Introduction to Photolithography

Introduction to Photolithography http://www.ichaus.de/news/72 Introduction to Photolithography Photolithography The following slides present an outline of the process by which integrated circuits are made, of which photolithography is

More information

COMPARISON OF QUANTITATIVE HIGH TEMPERATURE TESTING METHODS FOR SILICONE PRESSURE SENSITIVE ADHESIVES

COMPARISON OF QUANTITATIVE HIGH TEMPERATURE TESTING METHODS FOR SILICONE PRESSURE SENSITIVE ADHESIVES COMPARISON OF QUANTITATIVE HIGH TEMPERATURE TESTING METHODS FOR SILICONE PRESSURE SENSITIVE ADHESIVES Elizabeth Kelley, Senior Chemist, The Dow Chemical Company, Midland, MI Timothy Mitchell, Associate

More information

1-amino-9-octadecene, HAuCl 4, hexane, ethanol 55 o C, 16h AuSSs on GO

1-amino-9-octadecene, HAuCl 4, hexane, ethanol 55 o C, 16h AuSSs on GO Supplementary Figures GO Supplementary Figure S1 1-amino-9-octadecene, HAuCl 4, hexane, ethanol 55 o C, 16h AuSSs on GO Schematic illustration of synthesis of Au square sheets on graphene oxide sheets.

More information

REMOTE SURFACE MODIFICATION OF POLYMERIC FOILS BY EXPANDING ATMOSPHERIC PRESSURE RADIOFREQUENCY DISCHARGES *

REMOTE SURFACE MODIFICATION OF POLYMERIC FOILS BY EXPANDING ATMOSPHERIC PRESSURE RADIOFREQUENCY DISCHARGES * REMOTE SURFACE MODIFICATION OF POLYMERIC FOILS BY EXPANDING ATMOSPHERIC PRESSURE RADIOFREQUENCY DISCHARGES * M.D. IONITA 1, M. TEODORESCU 1, T. ACSENTE 1, M. BAZAVAN 2, E.R. IONITA 1, G. DINESCU 1 1 National

More information

DEVELOPMENT OF NON-SOLVENT-TYPE ACRYLIC PSA WITH UV

DEVELOPMENT OF NON-SOLVENT-TYPE ACRYLIC PSA WITH UV DEVELOPMENT OF NON-SOLVENT-TYPE ACRYLIC PSA WITH UV IRRADIATION POLYMERIZATION Mitsuhiko Nakazawa, Researcher, Soken Chemical & Engineering Co.,Ltd., Japan Takayuki Shimada, Researcher, Soken Chemical

More information

General concept and defining characteristics of AFM. Dina Kudasheva Advisor: Prof. Mary K. Cowman

General concept and defining characteristics of AFM. Dina Kudasheva Advisor: Prof. Mary K. Cowman General concept and defining characteristics of AFM Dina Kudasheva Advisor: Prof. Mary K. Cowman Overview Introduction History of the SPM invention Technical Capabilities Principles of operation Examples

More information

DEPOSITION AND COMPOSITION OF POLYMER FILMS IN FLUOROCARBON PLASMAS*

DEPOSITION AND COMPOSITION OF POLYMER FILMS IN FLUOROCARBON PLASMAS* DEPOSITION AND COMPOSITION OF POLYMER FILMS IN FLUOROCARBON PLASMAS* Kapil Rajaraman and Mark J. Kushner 1406 W. Green St. Urbana, IL 61801 rajaramn@uiuc.edu mjk@uiuc.edu http://uigelz.ece.uiuc.edu November

More information

Electrochemically Exfoliated Graphene as Solution-Processable, Highly-Conductive Electrodes for Organic Electronics

Electrochemically Exfoliated Graphene as Solution-Processable, Highly-Conductive Electrodes for Organic Electronics Supporting Information Electrochemically Exfoliated Graphene as Solution-Processable, Highly-Conductive Electrodes for Organic Electronics Khaled Parvez, Rongjin Li, Sreenivasa Reddy Puniredd, Yenny Hernandez,

More information

Department of Chemistry, NanoCarbon Center, Houston, Texas 77005, United States, University of Central Florida, Research Parkway,

Department of Chemistry, NanoCarbon Center, Houston, Texas 77005, United States, University of Central Florida, Research Parkway, Flexible Nanoporous WO3-x Nonvolatile Memory Device Supporting Information Yongsung Ji,, Yang Yang,,&, Seoung-Ki Lee, Gedeng Ruan, Tae-Wook Kim, # Huilong Fei, Seung-Hoon Lee, Dong-Yu Kim, Jongwon Yoon

More information

Electron Beam Curable Varnishes. Rapid Processing of Planarization Layers on Polymer Webs

Electron Beam Curable Varnishes. Rapid Processing of Planarization Layers on Polymer Webs Electron Beam Curable Varnishes Rapid Processing of Planarization Layers on Polymer Webs Juliane Fichtner, Michaela Hagenkamp, Markus Noss, Steffen Günther Fraunhofer Institute for Organic Electronics,

More information

COMPARATIVE PROPERTIES OF SILYLATED POLYURETHANE, SILICONE AND NON-SILICONE PRESSURE SENSITIVE ADHESIVES

COMPARATIVE PROPERTIES OF SILYLATED POLYURETHANE, SILICONE AND NON-SILICONE PRESSURE SENSITIVE ADHESIVES COMPARATIVE PROPERTIES OF SILYLATED POLYURETHANE, SILICONE AND NON-SILICONE PRESSURE SENSITIVE ADHESIVES Roy M. Griswold and Robert L. Frye, Momentive Performance Materials, Wilton, CT Introduction SPUR

More information

ETCHING Chapter 10. Mask. Photoresist

ETCHING Chapter 10. Mask. Photoresist ETCHING Chapter 10 Mask Light Deposited Substrate Photoresist Etch mask deposition Photoresist application Exposure Development Etching Resist removal Etching of thin films and sometimes the silicon substrate

More information

Surfaces that Shed Dust:

Surfaces that Shed Dust: Surfaces that Shed Dust: Development, Performance and Characterization J. Devaud, A. Lawitzke, M. Crowder, R. Stover (BATC) X. Wang, A. Dove, S. Robertson, M. Horanyi (CCLDAS) Who we are: Ball Aerospace

More information

A New Dielectrophoretic Coating Process for Depositing Thin Uniform Coatings on Films and Fibrous Surfaces

A New Dielectrophoretic Coating Process for Depositing Thin Uniform Coatings on Films and Fibrous Surfaces A New Dielectrophoretic Coating Process for Depositing Thin Uniform Coatings on Films and Fibrous Surfaces by Angelo Yializis Ph.D., Xin Dai Ph.D. Sigma Technologies International Tucson, AZ USA SIGMA

More information

CHAPTER 6: Etching. Chapter 6 1

CHAPTER 6: Etching. Chapter 6 1 Chapter 6 1 CHAPTER 6: Etching Different etching processes are selected depending upon the particular material to be removed. As shown in Figure 6.1, wet chemical processes result in isotropic etching

More information

Wafer Scale Homogeneous Bilayer Graphene Films by. Chemical Vapor Deposition

Wafer Scale Homogeneous Bilayer Graphene Films by. Chemical Vapor Deposition Supporting Information for Wafer Scale Homogeneous Bilayer Graphene Films by Chemical Vapor Deposition Seunghyun Lee, Kyunghoon Lee, Zhaohui Zhong Department of Electrical Engineering and Computer Science,

More information

3.155J/6.152J Microelectronic Processing Technology Fall Term, 2004

3.155J/6.152J Microelectronic Processing Technology Fall Term, 2004 3.155J/6.152J Microelectronic Processing Technology Fall Term, 2004 Bob O'Handley Martin Schmidt Quiz Nov. 17, 2004 Ion implantation, diffusion [15] 1. a) Two identical p-type Si wafers (N a = 10 17 cm

More information

Fabrication at the nanoscale for nanophotonics

Fabrication at the nanoscale for nanophotonics Fabrication at the nanoscale for nanophotonics Ilya Sychugov, KTH Materials Physics, Kista silicon nanocrystal by electron beam induced deposition lithography Outline of basic nanofabrication methods Devices

More information

AN EXPERIMENTAL INVESTIGATION OF LOW TEMPERATURE PLASMA STERILIZATION, TREATMENT, AND POLYMERIZATION PROCESSES

AN EXPERIMENTAL INVESTIGATION OF LOW TEMPERATURE PLASMA STERILIZATION, TREATMENT, AND POLYMERIZATION PROCESSES AN EXPERIMENTAL INVESTIGATION OF LOW TEMPERATURE PLASMA STERILIZATION, TREATMENT, AND POLYMERIZATION PROCESSES A Dissertation Presented to the Faculty of the Graduate School University of Missouri-Columbia

More information

Abstract. The principles and applicability of surface structure and hydrophobicity of polymers (PS, PDMS),

Abstract. The principles and applicability of surface structure and hydrophobicity of polymers (PS, PDMS), Contact Angle Goniometer: Hydrophobicity of Biomaterial Surfaces and Protein Coatings Eman Mousa Alhajji North Carolina State University Department of Materials Science and Engineering MSE 255 Lab Report

More information

MICROCHIP MANUFACTURING by S. Wolf

MICROCHIP MANUFACTURING by S. Wolf by S. Wolf Chapter 15 ALUMINUM THIN-FILMS and SPUTTER-DEPOSITION 2004 by LATTICE PRESS CHAPTER 15 - CONTENTS Aluminum Thin-Films Sputter-Deposition Process Steps Physics of Sputter-Deposition Magnetron-Sputtering

More information

Combination of plasma treatment and solgel chemistry for enhanced rubber / fibre adherence

Combination of plasma treatment and solgel chemistry for enhanced rubber / fibre adherence Combination of plasma treatment and solgel chemistry for enhanced rubber / fibre adherence Kristina Klinkhammer, Esther Rohleder, Maike Rabe, Eberhard Janssen Aachen-Dresden-Denkendorf Deutsches Fachkolloquium

More information

Outline. Structure. Features. Applications. Standard Sizes. Thermal conductive double-coated adhesive tape TR-5310

Outline. Structure. Features. Applications. Standard Sizes. Thermal conductive double-coated adhesive tape TR-5310 Thermal conductive double-coated adhesive tape Outline Nitto Denko thermal conductive adhesive tape offers superior thermal conductive property by using the thermal conductive adhesive layer. offers excellent

More information

Repetition: Ion Plating

Repetition: Ion Plating Repetition: Ion Plating Substrate HV (bis ca. 1kV) Optional ionization system Source Ionized filling gas Source material, ionized or neutral Repetition: Ion Plating Ion Species Separated ion source Ions

More information

Avatrel Dielectric Polymers for Electronic Packaging

Avatrel Dielectric Polymers for Electronic Packaging Avatrel Dielectric Polymers for Electronic Packaging R. A., Shick, S. K. Jayaraman, B. L. Goodall, L. F. Rhodes, W.C. McDougall Advanced Technology Group BF Goodrich Company 9921 Brecksville Road Cleveland,

More information

EE-612: Lecture 22: CMOS Process Steps

EE-612: Lecture 22: CMOS Process Steps EE-612: Lecture 22: CMOS Process Steps Mark Lundstrom Electrical and Computer Engineering Purdue University West Lafayette, IN USA Fall 2006 NCN www.nanohub.org Lundstrom EE-612 F06 1 outline 1) Unit Process

More information

Nanostructure. Materials Growth Characterization Fabrication. More see Waser, chapter 2

Nanostructure. Materials Growth Characterization Fabrication. More see Waser, chapter 2 Nanostructure Materials Growth Characterization Fabrication More see Waser, chapter 2 Materials growth - deposition deposition gas solid Physical Vapor Deposition Chemical Vapor Deposition Physical Vapor

More information

Surface Modification Studies by Atomic Force Microscopy for Ar-Plasma Treated Polyethylene

Surface Modification Studies by Atomic Force Microscopy for Ar-Plasma Treated Polyethylene Macromolecular Research, Vol. 10, No. 5, pp 291-295 (2002) Notes Surface Modification Studies by Atomic Force Microscopy for Ar-Plasma Treated Polyethylene Eun-Deock Seo Division of Chemical Engineering,

More information

The Best Kept Secret in Industry By: Stephen L. Kaplan * Plasma Technology Systems 276 Harbor Blvd. Belmont, CA 94002

The Best Kept Secret in Industry By: Stephen L. Kaplan * Plasma Technology Systems 276 Harbor Blvd. Belmont, CA 94002 The Best Kept Secret in Industry By: Stephen L. Kaplan * Plasma Technology Systems 276 Harbor Blvd. Belmont, CA 94002 Abstract: Five decades ago there were only a few green choices to modify polymer surfaces,

More information

PHOTOINDUCED BACTERICIDAL ACTIVITY OF TiO 2 THIN FILMS OBTAINED BY RADIOFREQUENCY MAGNETRON SPUTTERING DEPOSITION

PHOTOINDUCED BACTERICIDAL ACTIVITY OF TiO 2 THIN FILMS OBTAINED BY RADIOFREQUENCY MAGNETRON SPUTTERING DEPOSITION Journal of Optoelectronics and Advanced Materials Vol. 7, No. 2, April 2004, p. 915-919 PHOTOINDUCED BACTERICIDAL ACTIVITY OF TiO 2 THIN FILMS OBTAINED BY RADIOFREQUENCY MAGNETRON SPUTTERING DEPOSITION

More information

A. Optimizing the growth conditions of large-scale graphene films

A. Optimizing the growth conditions of large-scale graphene films 1 A. Optimizing the growth conditions of large-scale graphene films Figure S1. Optical microscope images of graphene films transferred on 300 nm SiO 2 /Si substrates. a, Images of the graphene films grown

More information

Argon ion beam interaction on polyethylene terephthalate surface by a 4 kj plasma focus device

Argon ion beam interaction on polyethylene terephthalate surface by a 4 kj plasma focus device PRAMANA c Indian Academy of Sciences Vol. 86, No. 3 journal of March 2016 physics pp. 599 607 Argon ion beam interaction on polyethylene terephthalate surface by a 4 kj plasma focus device MORTEZA HABIBI

More information

NOVEL PHENYLETHYNYL IMIDE SILANES AS COUPLING AGENTS FOR TITANIUM ALLOY

NOVEL PHENYLETHYNYL IMIDE SILANES AS COUPLING AGENTS FOR TITANIUM ALLOY NOVEL PHENYLETHYNYL IMIDE SILANES AS OUPLING AGENTS FOR TITANIUM ALLOY. Park*, S. E. Lowther, J. G. Smith Jr., J. W. onnell, P. M. Hergenrother, and T. L. St. lair *National Research ouncil, omposites

More information

Supporting information

Supporting information Electronic Supplementary Material (ESI) for Nanoscale. This journal is The Royal Society of Chemistry 2014 Supporting information Self-assembled nanopatch with peptide-organic multilayers and mechanical

More information

Atmospheric pressure Plasma Enhanced CVD for large area deposition of TiO 2-x electron transport layers for PV. Heather M. Yates

Atmospheric pressure Plasma Enhanced CVD for large area deposition of TiO 2-x electron transport layers for PV. Heather M. Yates Atmospheric pressure Plasma Enhanced CVD for large area deposition of TiO 2-x electron transport layers for PV Heather M. Yates Why the interest? Perovskite solar cells have shown considerable promise

More information

Langmuir-Schaefer deposition of quantum dot multilayers. Supporting Information

Langmuir-Schaefer deposition of quantum dot multilayers. Supporting Information Langmuir-Schaefer deposition of quantum dot multilayers Supporting Information I. AFM, UV-VIS and TEM characterization of LS layers S1 Low-magnification TEM images of Q-CdSe layers, deposited on a carbon-coated

More information

Improving Adhesion: Examining the Electrochemistry of Organic Inhibitors

Improving Adhesion: Examining the Electrochemistry of Organic Inhibitors Improving Adhesion: Examining the Electrochemistry of rganic Inhibitors Benefits of rganics Chemisorb onto metallic substrates Complex with metal ions at substrate Neutralize & absorb the corrodents Decrease

More information

Supporting information

Supporting information Supporting information A Facile and Large-area Fabrication Method of Superhydrophobic Self-cleaning Flourinated Polysiloxane/TiO 2 Nanocomposite Coatings with Long-term Durability Xiaofeng Ding, Shuxue

More information

Supplementary Figure S1. AFM images of GraNRs grown with standard growth process. Each of these pictures show GraNRs prepared independently,

Supplementary Figure S1. AFM images of GraNRs grown with standard growth process. Each of these pictures show GraNRs prepared independently, Supplementary Figure S1. AFM images of GraNRs grown with standard growth process. Each of these pictures show GraNRs prepared independently, suggesting that the results is reproducible. Supplementary Figure

More information

PHYSICAL AND CHEMICAL PROPERTIES OF ATMOSPHERIC PRESSURE PLASMA POLYMER FILMS

PHYSICAL AND CHEMICAL PROPERTIES OF ATMOSPHERIC PRESSURE PLASMA POLYMER FILMS PHYSICAL AND CHEMICAL PROPERTIES OF ATMOSPHERIC PRESSURE PLASMA POLYMER FILMS O. Goossens, D. Vangeneugden, S. Paulussen and E. Dekempeneer VITO Flemish Institute for Technological Research, Boeretang

More information

Development of Photosensitive Polyimides for LCD with High Aperture Ratio. May 24, 2004

Development of Photosensitive Polyimides for LCD with High Aperture Ratio. May 24, 2004 Development of Photosensitive Polyimides for LCD with High Aperture Ratio May 24, 2004 utline Why is polymer dielectric required for TFT LCD? Requirements of the polymer dielectrics What is polyimide?

More information

Plasma polymers can be used to modify the surface chemistries of materials in a controlled fashion (without effecting bulk chemistry).

Plasma polymers can be used to modify the surface chemistries of materials in a controlled fashion (without effecting bulk chemistry). Plasma polymers can be used to modify the surface chemistries of materials in a controlled fashion (without effecting bulk chemistry). An example used here is the modification of the alumina surface of

More information

Two-Dimensional (C 4 H 9 NH 3 ) 2 PbBr 4 Perovskite Crystals for. High-Performance Photodetector. Supporting Information for

Two-Dimensional (C 4 H 9 NH 3 ) 2 PbBr 4 Perovskite Crystals for. High-Performance Photodetector. Supporting Information for Supporting Information for Two-Dimensional (C 4 H 9 NH 3 ) 2 PbBr 4 Perovskite Crystals for High-Performance Photodetector Zhenjun Tan,,ǁ, Yue Wu,ǁ, Hao Hong, Jianbo Yin, Jincan Zhang,, Li Lin, Mingzhan

More information

SURFACE ACTIVATION SYSTEMS FOR OPTIMIZING ADHESION TO POLYMERS

SURFACE ACTIVATION SYSTEMS FOR OPTIMIZING ADHESION TO POLYMERS SURFACE ACTIVATION SYSTEMS FOR OPTIMIZING ADHESION TO POLYMERS Rory A. Wolf Enercon Industries Corporation Abstract Many experiments have been performed globally to investigate ways of improving adhesion

More information

Roll-to-roll manufacture of organic transistors for low cost circuits

Roll-to-roll manufacture of organic transistors for low cost circuits Roll-to-roll manufacture of organic transistors for low cost circuits Hazel Assender Dr Gamal Abbas, Ziqian Ding Department of Materials University of Oxford DALMATIAN TECHNOLOGY 21 st Sept 2011 1 Acknowledgements

More information

ECE611 / CHE611: Electronic Materials Processing Fall 2017 John Labram Solutions to Homework 2 Due at the beginning of class Thursday October 19 th

ECE611 / CHE611: Electronic Materials Processing Fall 2017 John Labram Solutions to Homework 2 Due at the beginning of class Thursday October 19 th ECE611 / CHE611: Electronic Materials Processing Fall 017 John Labram Solutions to Homework Due at the beginning of class Thursday October 19 th Question 1 [3 marks]: a) Piranha solution consists of a

More information

Figure 1: Graphene release, transfer and stacking processes. The graphene stacking began with CVD

Figure 1: Graphene release, transfer and stacking processes. The graphene stacking began with CVD Supplementary figure 1 Graphene Growth and Transfer Graphene PMMA FeCl 3 DI water Copper foil CVD growth Back side etch PMMA coating Copper etch in 0.25M FeCl 3 DI water rinse 1 st transfer DI water 1:10

More information

Cold Gas Plasma Treatment For Re-engineering Films by Stephen L. Kaplan, 4th State, Inc.

Cold Gas Plasma Treatment For Re-engineering Films by Stephen L. Kaplan, 4th State, Inc. Cold Gas Plasma Treatment For Re-engineering Films by Stephen L. Kaplan, 4th State, Inc. With cold gas plasma treatment you may not have to trade one critical quality for another when treating your film

More information

XPS and contact angle study of N 2 and O 2 plasma-modified PTFE, PVDF and PVF surfaces

XPS and contact angle study of N 2 and O 2 plasma-modified PTFE, PVDF and PVF surfaces SURFACE AND INTERFACE ANALYSIS Surf. Interface Anal. 2006; 38: 526 530 Published online in Wiley InterScience (www.interscience.wiley.com)..2255 XPS and contact angle study of N 2 and O 2 plasma-modified

More information

Oxford Advanced Surfaces

Oxford Advanced Surfaces Oxford Advanced Surfaces The Practical Uses of Chemical Adhesion In Interlayer Bonding AIMCAL Europe 2012 Web Coating Conference www.oxfordsurfaces.com 1 Adhesion is important! In use and in process Adhesion

More information

4FNJDPOEVDUPS 'BCSJDBUJPO &UDI

4FNJDPOEVDUPS 'BCSJDBUJPO &UDI 2010.5.4 1 Major Fabrication Steps in CMOS Process Flow UV light oxygen Silicon dioxide Silicon substrate Oxidation (Field oxide) photoresist Photoresist Coating Mask exposed photoresist Mask-Wafer Exposed

More information

EE143 Fall 2016 Microfabrication Technologies. Lecture 6: Thin Film Deposition Reading: Jaeger Chapter 6

EE143 Fall 2016 Microfabrication Technologies. Lecture 6: Thin Film Deposition Reading: Jaeger Chapter 6 EE143 Fall 2016 Microfabrication Technologies Lecture 6: Thin Film Deposition Reading: Jaeger Chapter 6 Prof. Ming C. Wu wu@eecs.berkeley.edu 511 Sutardja Dai Hall (SDH) 1 Vacuum Basics Units 1 atmosphere

More information

UNIAQ Department of Physics

UNIAQ Department of Physics Nano4water, 2 nd dissemination Workshop Chalkidiki, 24-25 April 2012 Dr. Luca Lozzi Department of Physics University of L Aquila Italy UNIAQ Department of Physics N-doped TiO 2 nanostructured coatings

More information