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1 Ultraviolet Deposition of Thin Films and Nanostructures Ian W. Boyd ETC Brunel University Kingston Lane Uxbridge Middx UB8 3PH UK T: +44 (0) W: etcbrunel.co.uk E:
2 Outline of Talk 1. Principles & properties of UV Excimer Lamps 2. Development of UV deposition system 3. Potential Applications: Surface engineering Oxide, metal deposition Interface engineering Nanoparticle deposition & doping
3 Outline of Talk 1. Principles & properties of UV Excimer Lamps 2. Development of UV deposition system 3. Potential Applications: Surface engineering Oxide, metal deposition Interface engineering Nanoparticle deposition & doping
4 Excimer Excitation Schematic: Rare Gas (R g ) Xe atoms excited by energetic es to higher electronic states & even ionised Excimer (Excited Dimer) molecules formed by collision Excimer relaxes by collisions and photon emission to ground state continuum Ground state: Dissociation to original atoms Non-absorbing to the light produced Atoms are Renewable Non-polluting chemistry
5 Exciplex Excitation Schematic: Rare Gas Halide (R g X*) B 1/2 High energy electron excitation & ionisation 3-body recombination or harpooning reaction X 1/2 Exciplexes unstable (ns lifetime) & emit UV or quench (low P) or trimer formation (high P)
6 Summary of Excimer UV Sources Excimer (nm) E (ev) UV range NeF* Ar 2 * Kr 2 * VUV F 2 * ArBr* Xe 2 * ArCl* KrI* ArF* KrBr* KrCl* KrF* XeI* UV-C Cl 2 * XeBr* Br 2 * UV-B XeCl* I 2 * XeF* UV-A
7 Summary of Excimer UV Sources Excimer (nm) E (ev) UV range NeF* Ar 2 * Kr 2 * VUV F 2 * ArBr* Xe 2 * ArCl* KrI* ArF* KrBr* KrCl* KrF* XeI* UV-C Cl 2 * XeBr* Br 2 * UV-B XeCl* I 2 * XeF* UV-A
8 Summary of Excimer UV Sources Excimer (nm) E (ev) UV range NeF* Ar 2 * Kr 2 * VUV F 2 * ArBr* Xe 2 * ArCl* KrI* ArF* KrBr* KrCl* KrF* XeI* UV-C Cl 2 * XeBr* Br 2 * UV-B XeCl* I 2 * XeF* UV-A
9 Summary of Excimer UV Sources Excimer (nm) E (ev) UV range NeF* Ar 2 * Kr 2 * VUV F 2 * ArBr* Xe 2 * ArCl* KrI* ArF* KrBr* KrCl* KrF* XeI* UV-C Cl 2 * XeBr* Br 2 * UV-B XeCl* I 2 * XeF* UV-A
10 Summary of Excimer UV Sources Excimer (nm) E (ev) UV range NeF* Ar 2 * Kr 2 * VUV F 2 * ArBr* Xe 2 * ArCl* KrI* ArF* KrBr* KrCl* KrF* XeI* UV-C Cl 2 * Common Excimer Lasers XeBr* Br 2 * UV-B XeCl* I 2 * XeF* UV-A
11 Summary of Excimer UV Sources Excimer (nm) E (ev) UV range NeF* Ar 2 * Kr 2 * VUV F 2 * ArBr* Xe 2 * ArCl* KrI* ArF* KrBr* KrCl* KrF* XeI* UV-C Cl 2 * XeBr* Br 2 * UV-B XeCl* I 2 * XeF* UV-A Common Excimer Lasers V E R Y Expensive!
12 Classical v. Dielectric Barrier Discharges
13 Classical v. Dielectric Barrier Discharges V E R Y Cheap!
14 Classical v. Dielectric Barrier Discharges V E R Y Cheap!
15 Cylindrical Excimer UV Source
16 Efficiency & Long term stability: 222nm
17 Excimer lamp: Characteristic features o Incoherent, almost monochromatic, more than 20 wavelengths, high UV and VUV intensities o Robust and inexpensive, ecologically beneficial (Hg free) o Long stable lifetime o No self-absorption, high efficiency o o Easy to handle, no major cooling Scalable - large areas possible (cm 2 -m 2 )..
18 Bond Dissociation Energy of Covalent Bonds and Wavelengths of Excimer UV Radiation
19 Bond Dissociation Energy of Covalent Bonds and Wavelengths of Excimer UV Radiation.lots of available photochemistry!
20 Outline of Talk 1. Principles & properties of UV Excimer Lamps 2. Development of UV deposition system 3. Potential Applications: Surface engineering Oxide, metal deposition Interface engineering Nanoparticle deposition & doping
21 Lamp Chamber Reactor Chamber
22 Large area excimer lamp system
23 Uniformity modelling of three lamp system
24 UV intensity (W/m ) 2 UV intensity profile of three lamp system cm from lamps Extent of 100 mm wafer edge of left lamp center of middle lamp Distance (cm) edge of right lamp
25 Outline of Talk 1. Principles & properties of UV Excimer Lamps 2. Development of UV deposition system 3. Potential Applications: Surface engineering Oxide, metal deposition Interface engineering Nanoparticle deposition & doping
26 Outline of Talk 1. Principles & properties of UV Excimer Lamps 2. Development of UV deposition system 3. Potential Applications: Surface engineering Oxide, metal deposition Interface engineering Nanoparticle deposition & doping
27 Treatment of Polymer Surfaces Low UV irradiation Polymer c leaning Polymerisation, cross-linking Oxidation, bond/chain breaking Fluence Surface modification, roughening Removal by laser ablation or photoetching High Hole drilling
28 VUV Surface Modification of Polymide: 126nm Non-irradiated 100nm 20 seconds No-irradiation 60 seconds 120 seconds, 126 nm lamp 120 seconds, 126 nm lamp XPS results show photo-dissociation of imide groups in Polyimide during 126 nm VUV irradiation
29 UV Surface modification of PET Surface changes of PET irradiated for different times with a 222nm excimer lamp
30 UV Surface modification of PET Surface changes of PET irradiated for different times with a 222nm excimer lamp.can be used to promote surface adhesion
31 Patterned Treatment of Polymer Surfaces
32 Copper structures on aluminium nitride 5 µm
33 Photo-oxidation of Silicon: Si +h + O2
34 Bond Dissociation Energy of Covalent Bonds and Wavelengths of Excimer UV Radiation O 2
35 Emission spectrum of the second excimer continua of Ar 2 * rare gas dimer Wavelength (nm)
36 FTIR spectra of SiO 2 grown by 126nm excimer lamp at room temperature
37 Thickness (nm) Growth of SiO 2 with 126 nm excimer radiation: 15 10
38 Thickness (nm) Growth of SiO 2 with 126 nm excimer radiation: Room Temperature! 15 10
39 126nm Oxidation: Summary Successful room temperature oxidation of Si using 126nm radiation XPS and FTIR confirm high quality and stoichiometric SiO 2 formed. Leakage current densities as low as 5 x10-8 A/cm 2 at an applied electric field of 1 MV/cm. Significant oxidation rates, as high as 8 nm/min achieved. Thicknesses up to 24 nm readily obtained with no growth saturation. Rapid oxidation related to creation of aggressive O 1S oxidant.
40 Photo-oxidation of Silicon-Germanium
41 High-resolution XTEM image of UV Oxidised SiGe
42 High-resolution XTEM image of UV Oxidised SiGe
43 High-resolution XTEM image of UV Oxidised SiGe
44 Outline of Talk 1. Principles & properties of UV Excimer Lamps 2. Development of UV deposition system 3. Potential Applications: Surface engineering Oxide, metal deposition Interface engineering Nanoparticle deposition & doping
45 Photo DEPOSITION of Dielectrics
46 Photo-CVD Apparatus UV Lamp Chamber Precursors UV SiH 4, O 2, N 2 O, NH 3 Wafer Shower head Processing Chamber Sample heater To pumps
47 Deposition of Si oxide, oxynitride, and nitride using SiH 4 with various N 2 O/NH 3 precursor ratios Wavenumber (cm -1 )
48 Metal Oxide Deposition: Photo-CVD reactor incorporating bubbler/digital liquid injection & designer precursors Designer Precursor
49 Excimer lamp deposition of metal oxides using UV-Injection Liquid Source (UVILS): TiO 2 Ta 2 O 5 HfO 2
50 Excimer lamp deposition of metal oxides using UV-Injection Liquid Source (UVILS): TiO 2 Ta 2 O 5 HfO 2
51 Tantalum Precursor Tetra ethoxy (dimethyl amino ethoxy) tantalum Ta (OEt) 4 (O CH 2 CH 2 N Me 2 ) Et : CH 3 - CH 2 Me: CH 3 EtO EtO EtO Ta EtO O N CH 2 CH 2 Me Me
52 Precursor Injector
53 T ox (nm) UVILS-CVD: Ta 2 O Thickness (nm) 2.5 Å / injection Number of drops
54 Thickness (Å) Refractive index Uniformity of UV processed Ta 2 O 5 films Thickness: < 1.7% Refractive index: 2.09±0.004 (< 0.43%) Distance across a 4 inch wafer (cm)
55 lnr (nm/min) Growth rate of photo- and thermal- CVD of Ta 2 O 5 films C 400 C 300 C 200 C Photo-CVD Thermal-CVD 2 1 E a =1.97 ev E a =0.078 ev /T (1000/K)
56 Transmittance (a.u.) FTIR spectra for for Ta 2 O 5 films deposited by photo-cvd at 350 C and UV annealed at 400 C as-deposited suboxides 0.5h annealing 1.0h annealing Ta-O 10% Si-O Wavenumber (cm -1 )
57 The SiO 2 interface layer: UV Annealing As deposited 15 mins 25 mins 40 mins
58 The SiO 2 interface layer: UV Annealing As deposited 15 mins 25 mins 40 mins.can the interfacial oxide be reduced?
59 Outline of Talk 1. Principles & properties of UV Excimer Lamps 2. Development of UV deposition system 3. Potential Applications: Surface engineering Oxide, metal deposition Interface engineering Nanoparticle deposition & doping
60 Suppression of interface oxide by Predeposition UV-anneal in N 2 O 0 minutes 10 minutes 20 minutes Demonstrated previously, BUT typically T > 800 o C Pre photo-cvd at 350 o C
61
62 Comparison of leakage current densities in Ta 2 O 5 films obtained by different methods CVD 1) Plasma - CVD 2) Photo - CVD (our work) 3) Leakage current density at 1 MV/cm (A/cm 2 ) Deposited or annealed temp annealing annealing asdeposited asdeposited asdeposited annealing x x C 800 C 500 C 700 C 350 C 400 C
63 Summary Snapshot overview of UV excimer lamp technology Example applications towards low temperature deposition of high quality electronic films demonstrated Rapid photo-oxidation Photo-deposition of dielectrics Metallization & nanocrystalline formation Surface modification & patterning NC-embedded matrices Applications in many other areas Surface modification, crystallisation Packaging Pollution control & Water treatment Curing of Paints, Varnishes, Coatings, Dry lithography, Printing Biological/Medical..
64 Thank you for your attention!
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