ARGON EXCIMER LAMP. A. Sobottka, L. Prager, L. Drößler, M. Lenk. Leibniz Institute of Surface Modification

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1 ARGON EXCIMER LAMP A. Sobottka, L. Prager, L. Drößler, M. Lenk 1

2 Introduction Ar-Zufuhr Excimer-Plasma Inertisierung Polymerfolie Sintermetall Inertisierung Post curing [1] EP A2 2

3 Introduction EXCITED DIMER EXCIMER - Gas excitation and ionization can lead to the emission of photons in the VUV range via the following processes Exitation: R*+R R2* R2* 2R + hν Ionization: ehot + (collisions) eth R++R R2+ R2++ eth R**+ R R** R* + heat R*+ R R2* R2* 2R + hν [2],[3][4]: R* - excited atom R2* - excited dimer R+ - ionized atom [2] Eliasson, B. and Kogelschatz, U. (1988), Appl. Phys. B. 46, [3] U. Kogelschatz, Plasma Chem. Plasma Proc. 23 (2003) 1. [4] S. Kanazawa, M. Kogoma, T. Moriwaki, S. Okazaki, J. Phys. D: Appl. Phys. 21 (1988)

4 Introduction SETUP FOR DIELECTRIC BARRIER DISCHARGE (DBD) - TWO METAL ELECTRODES - GAS FILLED GAP - ATMOSPHERIC PRESSUR - DIELECTRIC PLATES - BOTH ELECTRODES (OR AT LEAST ONE) COVERED WITH SILICA GLASS 4

5 Introduction MICRODISCHARGES : - ELECTRON STARTS SECUNDARY ELECTRONS ELECTRON AVALANCHES VERY FAST IONISATION WAVES WEAKLY IONIZED PLASMA - STREAMER (BRIDGES THE GAP) ELECTRIC FIELD COLLAPSE DIFFUSE ( GLOW ) AND FILAMENTARY DISCHARCHES 5

6 Introduction PROPERTIES IN AIR AT ATMOSPHERIC PRESSURE DURATION : ns [5] TOTAL CHARGE : C FILAMENT RADIUS : 0.1 mm ELECTRON DENSITY : /cm3 PEAK CURRENT : MEAN e- ENERGY : 1-10 ev STREAMER VELOCITY: m/s 0.1 A CURRENT DENSITY : A/m² [5] A. Chirokov, Thesis Master of Science, Drexel Univ., Nov

7 Introduction Various Excimers Ar2* 128 nm Xe2* 172 nm XeBr* 282 nm XeCl* 308 nm 7

8 Introduction TRANSMISSION OF QUARTZ GLASS 8

9 Introduction Fa. Alanod REFLECTION COEFFICIENT OF ALUMINIUM 9

10 Introduction conventional excimer lamp argon excimer lamp 10

11 Introduction ARGON LAMP FIRST CONCEPTION 11

12 Setup argon filling tube ground potential electrode water cooling quartz glass barrier gas gap high voltage electrode ecximer radiation 12

13 Setup - RADIATOR LENGTH : 540 mm - GP ELECTRODE LENGTH: 300 mm - HV ELECTRODE LENGTH: 170 mm - GAP DISTANCE: 14 mm - RADIATION FIELD: 305 mm x 32 mm 280 mm x 32 mm - ELECTRIC FIELD STRENGTH : 700 V/cm 900 V/cm - HOMOGENEITY - TEMPERATURE 13

14 Setup - GAS PRESSURE : 1..2 mbar - BACK PRESSURE : 5 10 mbar - GAS FLOW : 4 7 m³/h - HIGH VOLTAGE : 1 kv - IGNITION VOLTAGE : ~ 1 kv - FREQUENCY : 674 khz, 849kHz bar 10 kv 14

15 Setup ARGON LAMP PROTOTYPE 15

16 Measurments HIGH VOLTAGE- AND CURRENT CURVES 16

17 Measurments HIGH VOLTAGE AND UV-PULSE 17

18 Measurments SPECTRUM ARGON-LAMP FOR DIFFERENT ENERGIES 18

19 Measurments VUV-POWER-DENSITY 19

20 Discharges TYPICAL FILAMENTARY AND STREAMER DISCHARGES 20

21 Discharges TYPICAL GLOW DISCHARGES 21

22 Discharges ARGON LAMP SMALL CATHODE 22

23 Discharges ONLY CATHODE BARRIER 23

24 Discharges ONLY CATHODE BARRIER 24

25 Discharges and Problems TYPICAL DAMAGES BY PLASMA STREAMERS 25

26 Second Setup SECOND OPERATION MODE 26

27 Second Setup PARAMETER AT THE SECOND OPERATION MODE - HIGH VOLTAGE : 1 kv - 10 kv - IGNITION VOLTAGE : ~ 1 kv - FREQUENCY : 674 khz, 849kHz - ELECTRIC FIELD STRENGTH : 700 V/cm 900 V/cm - ENERGY DEPOSITION : mw/cm² 27

28 Second Setup SECOND OPERATION MODE 28

29 Second Setup HIGH VOLTAGE- AND CURRENT CURVES 29

30 Irradiation Unit 30

31 Irradiation Unit Ar VUV radiation facility 31

32 Irradiation Probes 1 EB % DPGDA 50 % + 2% TPO-L 2 CN % % TPO-L /1 + 2% /4 + 2% /4 + 2% % TAN the used formulations 32

33 Irradiation Results #

34 Irradiation Results #

35 Irradiation Results #

36 Irradiation Results 36

37 Irradiation Results 1,4e+5 oxygen nitrogen Gas permeation (ml/(m2 h bar)) 1,2e+5 1,0e+5 8,0e+4 6,0e+4 4,0e+4 2,0e+4 0, Irradiation time (min) Applications [6] : such as the etching of polymer surfaces degradation of organic surface residues surface activation [6] C. Elsner, M. Lenk, L. Prager, R. Mehnert: "Windowless Argon Excimer Source for Surface Modification" Applied Surface Science 252, (2006). oxygen sensor Argon inlet RF generator unwind rewind discharge zo ne inerting zone 37

38 Irradiation Results 38

39 Acknowledgment thanks to : Herwig Macholeth Ulrich Kogelschatz Michael Buchmeiser 39

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