Type. Page 518. A support guide is designed to support workpieces with significant overhang.

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1 Environment Clean Room Specification ISO Class 4 *1 (ISO ) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate. LEFS LEFB LEJB Slider Type Ball Screw Drive/Series 11-LEFS Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Type High Rigidity Slider Type Ball Screw Drive/Series 11- C Servo Motor Type Page 524 LEL LEM Page 55 C Servo Motor Type Page 513 LEY LEYG Vacuum port Vacuum port * Port locations can be selected. LEPY LEPS Vacuum suction from the vacuum port minimizes external particle generation from the ball screw and guide. Vacuum suction Vacuum suction from the vacuum port minimizes external particle generation from the ball screw and guide. Vacuum suction 11-LEFS LER LEH LES LESH LEY-X5 Support Guide/Series 11-LEFG support guide is designed to support workpieces with significant overhang. s the dimensions are the same as the LEF series body, installation is simple and contributes to a reduction in installation and assembly labor. The standard equipped seal bands prevent grease from splashing and external foreign matter from entering. pplication example LEF (Drive side) Support guide Page 518 Caution fter installing the actuator on the drive side, perform the alignment of the support guide. However, when the mounting flatness exceeds.1, install a floating mechanism separately on the workpiece installation surface (table) LT3 Motorless LECYM LECYU LECSS-T LECS LEC 5

2 Series spage 123 Electric ctuator/high Rigidity Slider Type Series LEJBsPage 128 Series 11-sPage 524 C Servo Motor Ball Screw Drive/Series Belt Drive/Series LEJB Ball Screw Drive/Series 11- Clean Room Specification Model Selection Selection Procedure Step 1 Check the speed work load. Step 2 Check the cycle time. Step 3 Check the allowable moment. Selection Example Operating conditions Refer to Dynamic llowable Moment graphs (Pages 118 and 119). Mep L3 Work load: 6 [kg] Workpiece mounting condition: Speed: 3 [mm/s] cceleration/deceleration: 3 [mm/s 2 ] W Stroke: 3 [mm] Mounting orientation: Horizontal Motor type: Incremental encoder External force: 1 [N] Step 1 Check the speed work load. Select the product by referring to Speed-Work Load Graph (Page 112). Selection example) The 63S3B-3 is temporarily selected based on the graph shown on the right side. The regeneration option may be necessary. Refer to page 112 for Required Conditions for Regeneration Option. Step 2 Check the cycle time. Refer to method 1 for a rough estimate, and method 2 for a more precise value. Method 1: Check the cycle time graph (Page 113) The graph is based on the maximum speed of each size. Method 2: Calculation Cycle time T can be found from the following equation. T = T1 + T2 + T3 + T4 [s] Calculation example) T1 to T4 can be calculated as T1 and T3 can be obtained by the following equation. follows. T1 = V/a1 [s] T3 = V/a2 [s] T1 = V/a1 = 3/3 =.1 [s], m 1 The acceleration and deceleration values have upper limits depending on the workpiece mass and the duty ratio. Check that they do not exceed the upper limit, by referring to Work load cceleration/deceleration Graph (Guide) (Pages 115 to 117). For the ball screw type, there is an upper limit of the speed depending on the stroke. Check that if it does not exceed the upper limit, by referring to the specifications (Page 124). T2 can be found from the following equation. T2 = T4 =.5 [s] L.5 V (T1 + T3) V [s] T4 varies depending on the motor type and load. The value below is recommended. Step 3 Check the allowable moment. T3 = V/a2 = 3/3 =.1 [s] L.5 V (T1 + T3) T2 = V (.1 +.1) = 3 =.9 [s] T4 =.5 [s] Therefore, the cycle time can be obtained as follows. T = T1 + T2 + T3 + T4 = = 1.15 [s] Speed: V [mm/s] L3 [mm] a1 T1 T2 Lead 1: 63 B rea where the regeneration option is required. Lead 2: 63 Lead 3: 63 H Speed [mm/s] <Speed Work load graph> (63) T6 L : Stroke [mm] V : Speed [mm/s] a1: cceleration [mm/s 2 ] a2: Deceleration [mm/s 2 ] Duty ratio: Ratio of T to T6 T T6 x 1 L 1 mm/s 2 a2 Time [s] T3 T4 T5 T1: cceleration time [s] Time until reaching the set speed T2: Constant speed time [s] Time while the actuator is operating at a constant speed T3: Deceleration time [s] Time from the beginning of the constant speed operation to stop T4: Settling time [s] Time until positioning is completed T5: Resting time [s] Time the product is not running T6: Total time [s] Total time from T1 to T5 3 mm/s 2 5 mm/s 2 1 mm/s 2 2 mm/s Selection example) Select the 63S3B-3 from the graph on the right side. Confirm that the external force is 2 [N] or less. (The external force is the resistance due to cable duct, flexible trunking or air tubing.) <Dynamic allowable moment> (63)

3 Model Selection Series LEJ C Servo Motor Clean Room Specification Speed Work Load Graph/Required Conditions for Regeneration Option (Guide) 4/Ball Screw Drive Horizontal Lead 8: 4 B rea where the regeneration option is required. Lead 16: 4 Lead 24: 4 H Speed [mm/s] Vertical Lead 8: 4 B rea where the regeneration option is required. Lead 16: 4 Lead 24: 4 H 63/Ball Screw Drive Horizontal Vertical Lead 1: 63 B rea where the regeneration option is required. Lead 2: 63 Lead 3: 63 H Speed [mm/s] B Lead 1: 63 B rea where the regeneration option is required. Lead 2: 63 Lead 3: 63 H LEFS LEFB LEJB LEL LEM LEY LEYG LES LESH LEPY LEPS Speed [mm/s] Speed [mm/s] LER LEJB4/Belt Drive Horizontal rea where the regeneration option is required. If the stroke exceeds 1 mm Speed [mm/s] When the stroke of the LEJB4 series exceeds 1 mm, the work load is 1 kg. Required conditions for Regeneration option Regeneration option is required when using product above regeneration line in graph. (Order separately.) llowable Stroke Speed Model 4 63 C servo motor 1 W/ m4 2 W/ m6 Lead LEJB63/Belt Drive Horizontal rea where the regeneration option is required Speed [mm/s] Stroke [mm] Regeneration Option Models Operating condition B Regenerative condition Duty ratio 1% Regeneration option LEC-MR-RB-32 LEC-MR-RB-12 Symbol [mm] Up to 2 Up to 3 Up to 4 Up to 5 Up to 6 Up to 7 Up to 8 Up to 9 Up to 1 Up to 11 Up to 12 Up to 13 Up to 14 Up to 15 H B (Motor rotation speed) (45 rpm) (3938 rpm) (2925 rpm) (225 rpm) (18 rpm) (1463 rpm) (12 rpm) (113 rpm) H B (Motor rotation speed) (36 rpm) (279 rpm) (222 rpm) (18 rpm) (15 rpm) (126 rpm) (18 rpm) (93 rpm) (81 rpm) [mm/s] 112 LEH LEY-X5 11-LEFS LT3 Motorless LECYM LECYU LECSS-T LECS LEC

4 Series LEJ C Servo Motor Clean Room Specification Cycle Time Graph (Guide) 4/Ball Screw Drive 4 H 2. 63/Ball Screw Drive 63 H Cycle time [s] 1. cceleration/deceleration: 1 mm/s 2 cceleration/deceleration: 5 mm/s 2 Cycle time [s] 1. cceleration/deceleration: 1 mm/s 2 cceleration/deceleration: 5 mm/s cceleration/deceleration: 2 mm/s 2 cceleration/deceleration: 2 mm/s Stroke [mm] Stroke [mm] Cycle time [s] cceleration/deceleration: 1 mm/s 2 cceleration/deceleration: 5 mm/s 2 Cycle time [s] cceleration/deceleration: 1 mm/s 2 cceleration/deceleration: 5 mm/s 2.5 cceleration/deceleration: 2 mm/s 2.5 cceleration/deceleration: 2 mm/s Stroke [mm] Stroke [mm] 4 B Cycle time [s] cceleration/deceleration: 1 mm/s 2 cceleration/deceleration: 5 mm/s 2 cceleration/deceleration: 2 mm/s Stroke [mm] Maximum speed/acceleration/deceleration values graph for each stroke 63 B Cycle time [s] cceleration/deceleration: 1 mm/s cceleration/deceleration: 5 mm/s cceleration/deceleration: 2 mm/s Stroke [mm] 113

5 Model Selection Series LEJ C Servo Motor Clean Room Specification Cycle Time Graph (Guide) LEJB4/Belt Drive LEJB63/Belt Drive 1.5 cceleration/deceleration: 5 mm/s 2 2. cceleration/deceleration: 5 mm/s 2 LEFS LEFB Cycle time [s] 1..5 cceleration/deceleration: 1 mm/s 2 Cycle time [s] cceleration/deceleration: 1 mm/s 2 LEJB LEL cceleration/deceleration: 2 mm/s Stroke [mm].5 cceleration/deceleration: 2 mm/s Stroke [mm] Maximum speed/acceleration/deceleration values graph for each stroke LT3 Motorless LECYM LECYU LECSS-T LECS LEC LEFS LEY-X5 LEM LEY LEYG LEH LER LEPY LEPS LES LESH 114

6 Series LEJ C Servo Motor Clean Room Specification Work Load cceleration/deceleration Graph (Guide) 4/Ball Screw Drive: Horizontal 63/Ball Screw Drive: Horizontal 4 H 63 H cceleration/deceleration [mm/s 2 ] The value of 5% or less is the same as duty ratio 5% Duty ratio: 5% Duty ratio: 1% cceleration/deceleration [mm/s 2 ] Duty ratio: 5% Duty ratio: 25% Duty ratio: 1% cceleration/deceleration [mm/s 2 ] 2 The value of 5% or less is the same as duty ratio 5% 15 Duty ratio: 5% 1 5 Duty ratio: 1% cceleration/deceleration [mm/s 2 ] 2 Duty ratio: 5% 15 Duty ratio: 25% 1 5 Duty ratio: 1% B 2 63 B 2 cceleration/deceleration [mm/s 2 ] The value of 5% or less is the same as duty ratio 5% Duty ratio: 5% Duty ratio: 1% cceleration/deceleration [mm/s 2 ] Duty ratio: 5% Duty ratio: 25% Duty ratio: 1%

7 Model Selection Series LEJ C Servo Motor Clean Room Specification Work Load cceleration/deceleration Graph (Guide) 4/Ball Screw Drive: Vertical 63/Ball Screw Drive: Vertical 4 H 63 H cceleration/deceleration [mm/s 2 ] 2 Duty ratio: 5% 15 Duty ratio: 1% 1 5 The value of 5% or less is the same as duty ratio 5% cceleration/deceleration [mm/s 2 ] 2 15 Duty ratio: 1% 1 Duty ratio: 5% 5 Duty ratio: 25% LES LESH LEFS LEFB LEJB LEL LEM LEY LEYG 4 cceleration/deceleration [mm/s 2 ] cceleration/deceleration [mm/s 2 ] B Duty ratio: 1% Duty ratio: 5% The value of 5% or less is the same as duty ratio 5% Duty ratio: 1% Duty ratio: 5% The value of 5% or less is the same as duty ratio 5% cceleration/deceleration [mm/s 2 ] 2 Duty ratio: 25% 15 1 Duty ratio: 1% 5 Duty ratio: 5% B cceleration/deceleration [mm/s 2 ] 2 Duty ratio: 5% Duty ratio: 25% 15 1 Duty ratio: 1% LEPY LEPS LER LEH LEY-X5 11-LEFS LT3 Motorless LECYM LECYU LECSS-T LECS LEC 116

8 Series LEJ C Servo Motor Clean Room Specification Work Load cceleration/deceleration Graph (Guide) LEJB4/Belt Drive: Horizontal LEJB63/Belt Drive: Horizontal cceleration/deceleration [mm/s 2 ] The value of 5% or less is the same as duty ratio 5% Duty ratio: 5% Duty ratio: 1% cceleration/deceleration [mm/s 2 ] The value of 5% or less is the same as duty ratio 5% Duty ratio: 5% Duty ratio: 1%

9 Model Selection Series LEJ C Servo Motor Clean Room Specification Dynamic llowable Moment * This graph shows the amount of allowable overhang (guide unit) when the center of gravity of the workpiece overhangs in one direction. When selecting the overhang, refer to Calculation of Guide Load Factor or the Electric ctuator Selection Software for confirmation, cceleration/deceleration 1 mm/s 2 3 mm/s 2 5 mm/s 2 1 mm/s 2 2 mm/s 2 Orientation Load overhanging direction m : Me: Dynamic allowable moment [N m] L : Overhang to the work load center of gravity [mm] Model 4 63 LEJB4 LEJB63 LEFS LEFB Me m L1 X L1 [mm] mm/s 2 or less is same as 5 mm/s 2 L1 [mm] mm/s 2 or less is same as 5 mm/s L1 [mm] mm/s 2 or less is same as 5 mm/s 2 L1 [mm] mm/s 2 or less is same as 5 mm/s LEJB LEL LEM Horizontal L2 m Me Y L2 [mm] L2 [mm] L2 [mm] L2 [mm] LEY LEYG LES LESH LEPY LEPS L3 Me m Z L3 [mm] L3 [mm] L3 [mm] L3 [mm] LER LEH LEY-X5 m Me L4 X L4 [mm] mm/s 2 or less is same as 5 mm/s 2 L4 [mm] mm/s 2 or less is same as 5 mm/s L4 [mm] mm/s 2 or less is same as 5 mm/s 2 L4 [mm] mm/s 2 or less is same as 5 mm/s LEFS Bottom L6 m Me L5 m Me Y Z L6 [mm] L5 [mm] L5 [mm] L6 [mm] L6 [mm] L5 [mm] L5 [mm] L6 [mm] LT3 Motorless LECYM LECYU LECSS-T LECS LEC

10 Series LEJ C Servo Motor Clean Room Specification Dynamic llowable Moment * This graph shows the amount of allowable overhang (guide unit) when the center of gravity of the workpiece overhangs in one direction. When selecting the overhang, refer to Calculation of Guide Load Factor or the Electric ctuator Selection Software for confirmation, cceleration/deceleration 1 mm/s 2 3 mm/s 2 5 mm/s 2 1 mm/s 2 2 mm/s 2 Orientation Load overhanging direction m : Me: Dynamic allowable moment [N m] L : Overhang to the work load center of gravity [mm] Model 4 63 LEJB4 LEJB63 Me m L7 X L7 [mm] mm/s 2 or less is same as 5 mm/s 2 L7 [mm] mm/s 2 or less is same as 5 mm/s L7 [mm] mm/s 2 or less is same as 5 mm/s 2 L7 [mm] mm/s 2 or less is same as 5 mm/s Wall L8 Me m Y L8 [mm] L8 [mm] L8 [mm] L8 [mm] L9 m Me Z L9 [mm] L9 [mm] L9 [mm] L9 [mm] Vertical m Me L1 Y L1 [mm] L1 [mm] m Me L11 Z L11 [mm] L11 [mm]

11 Model Selection Series LEJ C Servo Motor Clean Room Specification Calculation of Guide Load Factor 1. Decide operating conditions. Model: /LEJB Size: 4/63 Mounting orientation: Horizontal/Bottom/Wall/Vertical Example 1. Operating conditions Model: Size: 4 Mounting orientation: Horizontal cceleration [mm/s 2 ]: 5 : 2 Work load center position [mm]: Xc =, Yc = 5, Zc = 2 2. Select the graph on page 118, top and left side first row. 1 1 cceleration [mm/s 2 ]: a : m Work load center position [mm]: Xc/Yc/Zc 2. Select the target graph with reference to the model, size and mounting orientation. 3. Based on the acceleration and work load, obtain the overhang [mm]: Lx/Ly/Lz from the graph. 4. Calculate the load factor for each direction. αx = Xc/Lx, αy = Yc/Ly, αz = Zc/Lz 5. Confirm the total of αx, αy and αz is 1 or less. αx + αy + αz 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series Horizontal z 3. Wall x 2. Bottom x Mounting orientation z y y x 4. Vertical 3. Lx = 22 mm, Ly = 21 mm, Lz = 43 mm 4. The load factor for each direction can be obtained as follows. αx = /22 = αy = 5/21 =.24 αz = 2/43 = αx + αy + αz =.71 1 z y x z y LEFS LEFB LEJB LEL LEM LEY LEYG LES LESH LEPY LEPS LER L1 [mm] 6 4 L2 [mm] 6 4 L3 [mm] 6 4 Lz LEH 2 Lx Ly LT3 Motorless LECYM LECYU LECSS-T LECS LEC LEFS LEY-X

12 Series LEJ C Servo Motor Clean Room Specification Table ccuracy (Reference Value) B side side w D side q C side Model Traveling parallelism [mm] (Every 3 mm) q C side traveling parallelism to side w D side traveling parallelism to B side LEJl4.5.3 LEJl Note) Traveling parallelism does not include the mounting surface accuracy. Table Displacement (Reference Value) L W.2 Displacement [mm].1 LEJ 4 (L = 52.5 mm) LEJ 63 (L = 64.5 mm) Load W [N] Note) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table. (Table clearance is included.) 121

13 Series 11-sPage 524 C Servo Motor Electric ctuator/high Rigidity Slider Type Ball Screw Drive/Series 11- Particle Generation Measuring Method Clean Room Specification Particle Generation Characteristics The particle generation data for 11- series are measured in the following test method. Test Method (Example) Operate the specimen that is placed in an ISO Class 5 equivalent clean bench, and measure the changes of the particle concentration over time until the number of cycles reaches the specified point. Measuring Conditions Measuring instrument Setting conditions Description Laser dust monitor (utomatic particle counter by lightscattering method) Minimum measurable particle diameter.1 μm Suction flow rate 28.3 L/min (NR) Sampling time 5 min Interval time 55 min Sampling air flow L (NR) Clean bench (ISO Class 5 equivalent) Particle generation measuring circuit Vacuum suction from vacuum port Laser dust monitor LEFS LEFB LEJB LEL LEM LEY LEYG LES LESH LEPY LEPS LER Test Conditions Size 4 63 Speed [mm/s] Model Workpiece mass [kg] cceleration [mm/s 2 ] B B-3 1 Duty ratio [%] Evaluation Method To obtain the measured values of particle concentration, the accumulated value Note 1) of particles captured every 5 minutes, by the laser dust monitor, is converted into the particle concentration in every 1 m 3. When determining particle generation grades, the 95% upper confidence limit of the average particle concentration (average value), when each specimen is operated at a specified number of cycles Note 2) is considered. The plots in the graphs indicate the 95% upper confidence limit of the average particle concentration of particles with a diameter within the horizontal axis range. Note 1) Sampling air flow rate: Number of particles contained in L (NR) of air Note 2) ctuator: 1 million cycles Note 3) The particle generation characteristics (Page 523) provide a guide for selection but is not guaranteed. 1 * Mounting position: Horizontal LEH LEY-X5 11-LEFS LT3 Motorless LECYM LECYU LECSS-T LECS LEC 522

14 Series 11- C Servo Motor Clean Room Specification Particle Generation Characteristics 11-4/Ball Screw Drive Speed 6 mm/s 1 Speed 12 mm/s ISO Class 8 1 ISO Class 7 1 L/min (NR) ISO Class 7 Particle concentration [particles/m 3 ] L/min (NR) 2 L/min (NR) 3 L/min (NR) ISO Class 6 ISO Class 5 ISO Class 4 Particle concentration [particles/m 3 ] L/min (NR) 7 L/min (NR) ISO Class 6 ISO Class 5 ISO Class Particle diameter [µm] Particle diameter [µm] 11-63/Ball Screw Drive Speed 6 mm/s 1 Speed 12 mm/s 1 ISO Class ISO Class 7 1 L/min (NR) ISO Class 7 Particle concentration [particles/m 3 ] L/min (NR) L/min (NR) ISO Class 6 ISO Class 5 ISO Class 4 Particle concentration [particles/m 3 ] L/min (NR) 9 L/min (NR) ISO Class 6 ISO Class 5 ISO Class L/min (NR) Particle diameter [µm] Particle diameter [µm] 523

15 C Servo Motor Electric ctuator/high Rigidity Slider Type Ball Screw Drive Clean Room Specification Clean series 11 Vacuum type Series 11-4, 63 Refer to page 111 for model selection and page 522 for particle generation characteristics. 11 H 4 q w How to Order S2 e 5 r t y u i o!!1 LEFS LEFB LEJB LEL q ccuracy Nil Basic type H High precision type w Size 4 63 e Motor type *1 Symbol Type Output [W] ctuator size Compatible driver *2 S2 C servo motor (Incremental encoder) 1 4 LECS -S1 S3 C servo motor (Incremental encoder) 2 63 LECS -S3 S6 S7 C servo motor (bsolute encoder) C servo motor (bsolute encoder) LECSB -S5 LECSC -S5 LECSS -S5 LECSB -S7 LECSC -S7 LECSS -S7 1 For motor type S2 and S6, the compatible driver part number suffixes are S1 and S5 respectively. 2 For details of the driver, refer to page 598. r Lead [mm] Symbol B 8 1 t Stroke [mm] *3 2 to 15 *3 Refer to the applicable stroke table for details. LEM LEY LEYG LES LESH LEPY LEPS y Motor option Nil Without option B With lock u Vacuum port *5 Nil Left R Right D Both left and right 5 Select D for the vacuum port for suction of 5 L/min (NR) or more. R: Right Driver type Pulse input type/ Positioning type i Cable type *6, *7, *8 Nil Without cable S Standard cable R Robotic cable (Flexible cable) 6 When the driver type is selected, the cable is included. Select cable type and cable length. Example) S2S2: Standard cable (2 m) + Driver (LECSS2) S2: Standard cable (2 m) Nil: Without cable and driver 7 The motor and encoder cables are included. (The lock cable is also included when the motor with lock option is selected.) 8 Standard cable entry direction is () xis side. o Cable length [m]*6, *9 Pulse input type CC-Link direct input type! Driver type *6 Compatible driver Power supply voltage [V] Nil Without driver 1 LECS1-S 1 to 12 2 LECS2-S 2 to 23 B1 LECSB1-S 1 to 12 B2 LECSB2-S 2 to 23 C1 LECSC1-S 1 to 12 C2 LECSC2-S 2 to 23 S1 LECSS1-S 1 to 12 S2 LECSS2-S 2 to 23!1 I/O cable length [m] *1 Nil: Left Nil Without cable *9 The length of the Nil Without cable 2 2 m encoder, motor and lock H Without cable (Connector only) 5 5 m cables are the same m *1 When Without driver is selected for driver type, only Nil: Without cable can pplicable Stroke Table *4 V: Standard be selected. Stroke [mm] Refer to page 615 if I/O cable is Model required. 4 V V V V V V V V V V (Options are shown on page 615.) 63 V V V V V V V V V V 4 Please consult with SMC for non-standard strokes as they are produced as special orders. Compatible Driver For auto switches, refer to pages 133 to 135. SSCNET # type Series LECS LECSB LECSC LECSS Number of point tables Up to 7 Up to 255 Pulse input v v pplicable network CC-Link SSCNET# Control encoder Incremental 17-bit encoder bsolute 18-bit encoder bsolute 18-bit encoder bsolute 18-bit encoder Communication function USB communication USB communication, USB communication, RS422 communication RS422 communication USB communication Power supply voltage [V] 1 to 12 VC (5/6 Hz), 2 to 23 VC (5/6 Hz) Reference page Page LER LEH LEY-X5 11-LEFS LT3 Motorless LECYM LECYU LECSS-T LECS LEC

16 Series 11- C Servo Motor Clean Room Specification Specifications 11-4, 63 C Servo Motor ctuator specifications Electric specifications Lock unit specifications Model 11-4S S 3 7 Stroke [mm] Note 1) 2, 3, 4, 5, 6, 7, 8 3, 4, 5, 6, 7, 8, 9 9, 1, 12 1, 12, 15 Note 2) Horizontal Vertical Speed Note 3) [mm/s] Weight Stroke range Up to to to to to to to to to to to (Refer to pages 115 and 116 for limit according to work load and duty ratio.) Basic type ±.2 High precision type ±.1 Max. acceleration/deceleration [mm/s 2 ] Positioning repeatability [mm] Lost motion [mm] Note 4) Basic type.1 or less High precision type.5 or less Lead [mm] Impact/Vibration resistance [m/s 2 ] Note 5) 5/2 ctuation type Ball screw Guide type Linear guide Grease Ball screw/linear guide portion Low particle generation grease Cleanliness class Note 6) ISO Class 4 (ISO ) llowable external force [N] 2 Operating temperature range [ C] 5 to 4 Operating humidity range [%RH] 9 or less (No condensation) Regeneration option May be required depending on speed and work load. (Refer to page 112.) Motor output [W]/Size [mm] 1/ 4 2/ 6 Motor type C servo motor (1/2 VC) Encoder Motor type S2, S3: Incremental 17-bit encoder (Resolution: p/rev) Motor type S6, S7: bsolute 18-bit encoder (Resolution: p/rev) Power consumption [W] Note 7) Horizontal 65 8 Vertical Standby power consumption Horizontal 2 2 when operating [W] Note 8) Vertical 1 12 Max. instantaneous power consumption [W] Note 9) Type Note 1) Non-magnetizing lock Holding force [N] Power consumption [W] at 2 C Note 11) Rated voltage [V] 24 VDC 1% Note 1) Please consult with SMC for non-standard strokes as they are produced as special orders. Note 2) Refer to Speed Work Load Graph (Guide) on page 112 for details. Note 3) The allowable speed changes according to the stroke. Note 4) reference value for correcting an error in reciprocal operation. Note 5) Impact resistance: No malfunction occurred when the actuator was tested with a drop tester in both an axial direction and a perpendicular direction to the lead screw. (Test was performed with the actuator in the initial state.) Vibration resistance: No malfunction occurred in a test ranging between 45 to 2 Hz. Test was performed in both an axial direction and a perpendicular direction to the lead screw. (Test was performed with the actuator in the initial state.) Note 6) The amount of particle generation changes according to the operating conditions and suction flow rate. Refer to the particle generation characteristics for details. Note 7) The power consumption (including the driver) is for when the actuator is operating. Note 8) The standby power consumption when operating (including the driver) is for when the actuator is stopped in the set position during the operation. Note 9) The maximum instantaneous power consumption (including the driver) is for when the actuator is operating. This value can be used for the selection of the power supply. Note 1) Only when motor option With lock is selected. Note 11) For an actuator with lock, add the power consumption for the lock. Note 12) Sensor magnet position is located in the table center. For detailed dimensions, refer to uto Switch Mounting Position on page 133. Note 13) Do not allow collisions at either end of the table traveling distance. dditionally, when running the positioning operation, do not set within 2 mm of both ends. Note 14) For the manufacture of intermediate strokes, please contact SMC. (4/Manufacturable stroke range: 2 to 12 mm, 63/ Manufacturable stroke range: 3 to 15 mm) Model 11-4 Stroke [mm] Product weight [kg] dditional weight with lock [kg].2 (Incremental encoder)/.3 (bsolute encoder) Model Stroke [mm] Product weight [kg] dditional weight with lock [kg].4 (Incremental encoder)/.7 (bsolute encoder) 525

17 Electric ctuator/high Rigidity Slider Type Ball Screw Drive Series 11- C Servo Motor Clean Room Specification Dimensions: Ball Screw Drive 11-4 Body mounting reference plane Note 2) 18 M4 x.7 depth 8 (F.G. terminal) 4 x M6 x 1 depth 1 (16) ø5h9 ( ) depth 6 (3.1) Motor cable (ø6) LEFS LEFB 35 LEJB LEL H9 ( ) depth (Table traveling distance) Stroke 6 37 (4) 2±1 11 n x ø5.5 L Vacuum port Rc1/8 Note 3) H9 ( ) depth 6 (6) E C x 2 (= D) 2 64 Note 2) (128) Note 2) B Encoder cable (ø7) Encoder Z-phase detecting position (58) 167 (B: With lock/27) 17 ø6h9 ( ) depth 4 Note 1) Please consult with SMC for adjusting the Z-phase detecting position at the stroke end of the end side. Note 2) When mounting the actuator using the body mounting reference plane, use a pin. Set the height of the pin to be 5 mm or more because of round chamfering. (Recommended height 6 mm) Note 3) This drawing shows the left type. Note 4) The amount of particle generation changes according to the operating conditions and suction flow rate. 5.8 Encoder cable (ø7) Motor option B: With lock Motor cable (ø6) Lock cable (ø4.5) [mm] Model L Without lock With lock B n C D E 11-4S S S S S S S S S S LEM LEY LEYG LES LESH LEPY LEPS LER LEH LEY-X5 11-LEFS LT3 Motorless LECYM LECYU LECSS-T LECS LEC

18 Series 11- C Servo Motor Clean Room Specification Dimensions: Ball Screw Drive Body mounting reference plane Note 2) 4 x M8 x 1.25 depth M4 x.7 depth 8 (F.G. terminal) (172) ø6h9 ( ) depth 7 (3.1) 68 Motor cable (ø6) H9 ( ) depth Note 2) 79 Note 2) (158) 39 (4) 13 n x ø6.8 E Stroke 114 L 7 (Table traveling distance) +.3 6H9 ( ) depth 7 (64) (64) 2±1 Vacuum port Rc1/8 Note 3) Encoder cable (ø7) 35 B 3 2 C x 2 (= D) ø8h9 ( ) depth 6 Encoder cable (ø7) Encoder Z-phase detecting position (B: With lock/226) Motor option B: With lock Motor cable (ø6) Lock cable (ø4.5) Note 1) Please consult with SMC for adjusting the Z-phase detecting position at the stroke end of the end side. Note 2) When mounting the actuator using the body mounting reference plane, use a pin. Set the height of the pin to be 5 mm or more because of round chamfering. (Recommended height 6 mm) Note 3) This drawing shows the left type. Note 4) The amount of particle generation changes according to the operating conditions and suction flow rate. [mm] Model L Without lock With lock B n C D E 11-63S S S S S S S S S S

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20 Series LEJ uto Switch Mounting uto Switch Mounting Position B (Table center) (C) Model Size B C Operating range LEJB LEJB 6.5 Note) The operating range is a guideline including hysteresis, not meant to be guaranteed. There may be large variations (as much as ±3%) depending on the ambient environment. [mm] uto Switch Mounting When mounting the auto switches, they should be inserted into the actuator s auto switches mounting groove from the direction shown in the drawing on the below. Once in the mounting position, use a flat head watchmaker s screwdriver to tighten the included auto switch mounting screw. uto Switch Mounting Screw Tightening Torque [N m] uto switch model D-M9l(V) D-M9lW(V) Tightening torque.1 to.15 Flat head watchmaker s screwdriver (not an accessory) ø5 to ø6 Note) When tightening the auto switch mounting screw, use a watchmaker s screwdriver with a handle diameter of about 5 to 6 mm. 133

21 Solid State uto Switch Direct Mounting Style D-M9N(V)/D-M9P(V)/D-M9B(V) Grommet P 2-wire load current is reduced (2.5 to 4 m). P Flexibility is 1.5 times greater than the former model (SMC comparison). P Using flexible cable as standard. uto Switch Specifications RoHS Refer to SMC website for the details about products conforming to the international standards. PLC: Programmable Logic Controller D-M9l, D-M9lV (With indicator light) uto switch model D-M9N D-M9NV D-M9P D-M9PV D-M9B D-M9BV Electrical entry In-line Perpendicular In-line Perpendicular In-line Perpendicular Wiring type 3-wire 2-wire Output type NPN PNP pplicable load IC circuit, Relay, PLC 24 VDC relay, PLC Power supply voltage 5, 12, 24 VDC (4.5 to 28 V) Current consumption 1 m or less Load voltage 28 VDC or less 24 VDC (1 to 28 VDC) Load current 4 m or less 2.5 to 4 m Internal voltage drop.8 V or less at 1 m (2 V or less at 4 m) 4 V or less Leakage current 1 m or less at 24 VDC.8 m or less Indicator light Standards Red LED lights up when turned ON. CE marking, RoHS LEFS LEFB LEJB LEL LEM LEY LEYG Caution Precautions Fix the auto switch with the existing screw installed on the auto switch body. The auto switch may be damaged if a screw other than the one supplied is used. Oilproof Heavy-duty Lead Wire Specifications uto switch model D-M9Nl D-M9Pl D-M9Bl Sheath Outside diameter [mm] 2.7 x 3.2 (ellipse) Insulator Number of cores 3 cores (Brown/Blue/Black) 2 cores (Brown/Blue) Outside diameter [mm] ø.9 Conductor Effective area [mm 2 ].15 Strand diameter [mm] ø.5 Minimum bending radius [mm] (Reference value) 2 Note 1) Refer to the Best Pneumatics No. 2 for solid state auto switch common specifications. Note 2) Refer to the Best Pneumatics No. 2 for lead wire lengths. Weight uto switch model D-M9N(V) D-M9P(V) D-M9B(V) Lead wire length.5 m (Nil) m (M) m (L) m (Z) [g] LES LESH LEPY LEPS LER LEH LEY-X5 11-LEFS 11- Dimensions [mm] 25- D-M9m M2.5 x 4 L Slotted set screw Indicator light Most sensitive position D-M9mV M2.5 x 4 L Indicator light Slotted set screw Most sensitive position 2.7 LT3 Motorless LECYM LECYU LECSS-T LECS LEC 134

22 2-Color Indication Solid State uto Switch Direct Mounting Style D-M9NW(V)/D-M9PW(V)/D-M9BW(V) Grommet P 2-wire load current is reduced (2.5 to 4 m). P Flexibility is 1.5 times greater than the former model (SMC comparison). P Using flexible cable as standard. P The optimum operating range can be determined by the color of the light. (Red Green Red) uto Switch Specifications RoHS Refer to SMC website for the details about products conforming to the international standards. PLC: Programmable Logic Controller D-M9lW, D-M9lWV (With indicator light) uto switch model D-M9NW D-M9NWV D-M9PW D-M9PWV D-M9BW D-M9BWV Electrical entry In-line Perpendicular In-line Perpendicular In-line Perpendicular Wiring type 3-wire 2-wire Output type NPN PNP pplicable load IC circuit, Relay, PLC 24 VDC relay, PLC Power supply voltage 5, 12, 24 VDC (4.5 to 28 V) Current consumption 1 m or less Load voltage 28 VDC or less 24 VDC (1 to 28 VDC) Load current 4 m or less 2.5 to 4 m Internal voltage drop.8 V or less at 1 m (2 V or less at 4 m) 4 V or less Leakage current 1 m or less at 24 VDC.8 m or less Indicator light Standards Operating range... Red LED lights up. Optimum operating range... Green LED lights up. CE marking, RoHS Caution Precautions Fix the auto switch with the existing screw installed on the auto switch body. The auto switch may be damaged if a screw other than the one supplied is used. Oilproof Flexible Heavy-duty Lead Wire Specifications uto switch model D-M9NW D-M9PW D-M9BW Sheath Outside diameter [mm] 2.7 x 3.2 (ellipse) Insulator Conductor Number of cores 3 cores (Brown/Blue/Black) 2 cores (Brown/Blue) Outside diameter [mm] ø.9 Effective area [mm 2 ].15 Strand diameter [mm] ø.5 Minimum bending radius [mm] (Reference value) 2 Note 1) Refer to the Best Pneumatics No. 2 for solid state auto switch common specifications. Note 2) Refer to the Best Pneumatics No. 2 for lead wire lengths. Weight [g] uto switch model D-M9NW(V) D-M9PW(V) D-M9BW(V).5 m (Nil) m (M) Lead wire length 3 m (L) m (Z) Dimensions [mm] D-M9mW D-M9mWV Indicator light M2.5 x 4 L M2.5 x 4 L Slotted set screw Slotted set screw Indicator light Most sensitive position 4 6 Most sensitive position 135

23 Series LEJ Electric ctuator/ Specific Product Precautions 1 Be sure to read this before handling. Refer to page 96 for Safety Instructions. For Electric ctuator Precautions, refer to pages 97 to 912, or Handling Precautions for SMC Products and the Operation Manual on SMC website, Caution Warning Design 1. Do not apply a load in excess of the specification limits. Select a suitable actuator by work load and allowable moment. If the product is used outside of the specification limits, the eccentric load applied to the guide will be excessive and have adverse effects such as creating play on the guide, degrading accuracy and shortening the life of the product. 2. Do not use the product in applications where excessive external force or impact force is applied to it. The product can be damaged. The components including the motor are manufactured to precise tolerances. So that even a slight deformation may cause a malfunction or seizure. Selection 1. Do not increase the speed in excess of the specification limits. Select a suitable actuator by the relationship of the allowable work load and speed, and the allowable speed of each stroke. If the product is used outside of the specification limits, it will have adverse effects such as creating noise, degrading accuracy and shortening the life of the product. 2. When the product repeatedly cycles with partial strokes (1 mm or less), lubrication can run out. Operate it at a full stroke at least once a day or every a thousand cycles. 3. When external force is applied to the table, it is necessary to add external force to the work load as the total carried load for the sizing. When a cable duct or flexible moving tube is attached to the actuator, the sliding resistance of the table increases and may lead to operational failure of the product. Caution Handling 1. Do not allow the table to hit the end of stroke. When incorrect instructions are inputted, such as using the product outside of the specification limits or operation outside of actual stroke through changes in the controller/driver setting and/or origin position, the table may collide against the stroke end of the actuator. Check these points before use. If the table collides against the stroke end of the actuator, the guide, belt or internal stopper can be broken. This may lead to abnormal operation. Handle the actuator with care when it is used in the vertical direction as the workpiece will fall freely from its own weight. 2. The actual speed of this actuator is affected by the work load and stroke. Check specifications with reference to the model selection section of the catalog. 3. Do not apply a load, impact or resistance in addition to the transferred load during return to origin. 4. Do not dent, scratch or cause other damage to the body and table mounting surfaces. This may cause unevenness in the mounting surface, play in the guide or an increase in the sliding resistance. 5. Do not apply strong impact or an excessive moment while mounting the product or a workpiece. If an external force over the allowable moment is applied, it may cause play in the guide or an increase in the sliding resistance. 6. Keep the flatness of mounting surface.1 mm or less. Unevenness of a workpiece or base mounted on the body of the product may cause play in the guide and an increase in the sliding resistance. In the case of overhang mounting (including cantilever), to avoid deflection of the actuator body, use a support plate or support guide. 7. When mounting the actuator, use all mounting holes. If all mounting holes are not used, it influences the specifications, e.g., the amount of displacement of the table increases. 8. Do not hit the table with the workpiece in the positioning operation and positioning range. 9. Do not apply external force to the dust seal band. Particularly during the transportation 136 LEFS LEFB LEJB LEL LEM LEY LEYG LES LESH LEPY LEPS LER LEH LEY-X5 11-LEFS LT3 Motorless LECYM LECYU LECSS-T LECS LEC

24 L Series LEJ Electric ctuator/ Specific Product Precautions 2 Be sure to read this before handling. Refer to page 96 for Safety Instructions. For Electric ctuator Precautions, refer to pages 97 to 912, or Handling Precautions for SMC Products and the Operation Manual on SMC website, Body fixed Workpiece fixed Handling Caution 1. When mounting the product, use screws with adequate length and tighten them with adequate torque. Tightening the screws with a higher torque than recommended may cause a malfunction, whilst the tightening with a lower torque can cause the displacement of the mounting position or in extreme conditions the actuator could become detached from its mounting position. ø Model Screw Max. tightening ø L size torque [N m] [mm] [mm] LEJ 4 M LEJ 63 M To prevent the workpiece retaining screws from touching the body, use screws that are.5 mm or shorter than the maximum screw-in depth. If long screws are used, they can touch the body and cause a malfunction. 11. Do not operate by fixing the table and moving the actuator body. 12. The belt drive actuator cannot be used vertically for applications. 13. Vibration may occur during operation, this could be caused by the operating conditions. If it occurs, adjust response value of auto tuning of driver to be lower. During the first auto tuning noise may occur, the noise will stop when the tuning is complete. 14. When mounting the actuator using the body mounting reference plane, use a pin. Set the height of the pin to be 5 mm or more because of round chamfering. (Recommended height 6 mm) L Model Screw Max. tightening size torque [N m] L (Max. screw-in depth) [mm] LEJ 4 M6 x LEJ 63 M8 x Warning Maintenance Maintenance frequency Perform maintenance according to the table below. Frequency ppearance check Internal check Belt check Inspection before daily operation Inspection every 6 months/1 km/ 5 million cycles Select whichever comes first. Items for visual appearance check 1. Loose set screws, bnormal dirt 2. Check of flaw and cable joint 3. Vibration, Noise Items for internal check 1. Lubricant condition on moving parts. For lubrication, use lithium grease No Loose or mechanical play in fixed parts or fixing screws. Items for belt check Stop operation immediately and replace the belt when belt appear to be below. Further, ensure your operating environment and conditions satisfy the requirements specified for the product. a. Tooth shape canvas is worn out. Canvas fiber becomes fuzzy. Rubber is removed and the fiber becomes whitish. Lines of fibers become unclear. b. Peeling off or wearing of the side of the belt Belt corner becomes round and frayed thread sticks out. c. Belt partially cut Belt is partially cut. Foreign matter caught in teeth other than cut part causes flaw. d. Vertical line of belt teeth Flaw which is made when the belt runs on the flange. e. Rubber back of the belt is softened and sticky. f. Crack on the back of the belt Body mounting reference plane 137