INAC.

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1 ESRF ILL INAC MINATEC 1

2 LNCMI CRETA 120 CNRS scientists 50 Prof and associate Prof 130 technical and admin staff 100 PhD students

3 Nanofab PTA Epitaxy, nanofabrication and cristal growth Theory Instrumentation Condensed Matter and Low Temperature Physics Condensed Matter, Materials and Functions Nanosciences Physical properties: Optical properties Transport Magnetic properties structural properties Applications LPMMC INAC SPINTEC LETI G2ELab And many others worldwide: collaborations with 34 different countries CRG

4 Near field microscopy and NEMS Micro-magnets for MEMS Silicon nanowires Graphene Semiconductor nanowires

5 Near field microscopy and NEMS At NEEL: AFM and nanomechanics SNOM Joël Chevrier, Serge Huant, Florence Marchi, Jean-François Motte, Hermann Sellier At LETI: NEMS accelerometer LKB, IOTA, ESRF 1. The Casimir force 2. A nanovibrometer

6 1. The Casimir force 2. A nanovibrometer Vacuum fluctuations pressure P = 2 π hc L Confined modes 2 metal plates at 10 nm: 1 Atm the NEMS is sticked at 1 µm, 8 orders of magnitude less the MEMS works. Accelerometer developped at LETI γ Equil. Position [nm] theory acceleration [g] with Casimir without Casimir

7 1. The Casimir force 2. A nanovibrometer Fabry-Pérot Thinned optical fiber A near-field interferometric nano-vibrometer Today s issue!

8 Micro-magnets for MEMS MEMS: machines which range in size from µm to mm, e.g. actuators, motors, generators, switches, sensors. i) Remarkable features of magnetic interactions ti large forces large energy densities Long range ( µm ) Contactless actuation (action through sealed membranes suspension / levitation) (Bi)stability (magnets permanent forces without power consumption) Bidirectionality (repulsion / attraction) ii) Specific advantages of magnetism for MEMS - down-scaling : system size by factor L, magnetic forces by factor L - integrated µ-coils : very high current densities (< 10 6 A/mm² in pulses) 1st fully integrated prototype Magnetic MEMS: bistable ultra-fast levitating µ-switch LETI / G2Elab fixed moving fixed magnet magnet magnet BUT Performance limited by low quality magnets (Co 80 Pt 20 ) Need high quality (NdFeB, SmCo) integrated magnets: NEEL 200 µm planar coil

9 Thick hard magnetic films at Institut Néel Triode sputtering : Deposition rate 20 µm/h; Substrate 200 mm ANR project* Nanomag2 LETI, G2Elab, Néel and Alenia (12/05-12/08) µ 0 M (T) 1,5 1,0 0,5 0,0-0,5 05-1,0 oop NdFeB -1, µ 0 H i (T) Thick hard magnetic films (5 µm) on Si ip out-of-plane applications APL90_ (2007) M (a.u.) ip oop SmCo sub µ H (T) 0 in-plane applications above IC JAP_103_ (2008).u.) M (a. oop FePt ip "cold" 400 C 500 C 600 C µ H(T) 0 applications in corrosive environments Patterning of magnet films for integration Deposition on Pre-patterned subst. NdFeB 10 µm Wet etching of magnetic layer NdFeB Thermo-magnetic patterning Si SiO 2 JMMM (2009) Si NEEL: Nora Dempsey, Dominique Givord, Frederic Dumas-Bouchiat LETI: Christophe Billard, Philippe Robert, Carine Marcoux, Arnaud Walther (common PhD, now at LETI) G2ELab: Jerome Delamare, Orphée Cugat

10 Applications of µ-structured hard magnetic films Diamagnetic levitation Cell manipulation, microgravity conditions, etc Collaboration G2ELab + Biopuces Bismuth in air human cells in para. buffer Liposomes + magnetic nanoparticles Empty liposomes Magnetic trapping Micro-magnets Collaboration: Ampere, G2ELab, GIN fluorescent liposomes encapsulating magnetic nanoparticules on a magnetically patterned NdFeB film

11 Silicon nanowires

12 Silicon nanowires step 1: mesoscopic effects in the thermal conductance Nanofabrication at LETI Low temperature t experiments at Institut t Néel Theory in collaboration NEEL-LETI PhD Jean-Savin Héron (at NEEL) The characteristic length is the thermal wavelength of phonons. In silicon: at 1K λ T ~0.1μm, at 0.1K λ T ~1μm The conductance is quantized Roughness effects are observed Mesoscopic Size Effects on the Thermal Conductance of Silicon nanowire J.-S. Héron, T. Fournier, N. Mingo, O. Bourgeois, Nano Lett. 9, 1861 (2009)

13 Silicon nanowires step 2a: Electrical detection of biological events Nanofabrication at NEEL/Nanofab Fonctionalization and measures at LETI PhD Cécile Halté at LETI Cécile Halté 1, Guillaume Delapierre 1, Thierry Fournier 2, Thierry Baron 3, Françoise Vinet 1 1 -LETI/DTBS CNRS/Institut t Néel- 3 - CNRS/LTM The electrical conductance of a silicon nanowire is modified in the presence of charges at the surface step 2b: Thermoelectric effects in nanostructures Olivier Bourgeois (NEEL), Natalio Mingo, Marc Plissonnier (LITEN), Denis Renaud (LETI), IEMN

14 Graphene 1. Epitaxial graphene on SiC Preparation and STM NEEL: P.Mallet, J.Y.Veuillen 2. Graphene on other substrates Transport in graphene (ANR Xp-Graphene) NEEL: L.P.Lévy, C.Naud, C.Berger also GeorgiaTech IEMN: D. Vignaud, X. Wallart, H. Happy, G. Dambrine LETI: T. Poiroux, J.-F. Dayen Epitaxy of graphene on iridium NEEL: J.Coraux, O.Fruchart LETI: Aziz Zenasni, F.Fournel

15 Semiconductor nanowires NEEL + INAC MBE and MOCVD growth, contacts Spectroscopy Transport Light emitting diodes photovoltaics p o o o a cs Talk by H.Mariette at 4:55 today