The goal of this project is to enhance the power density and lowtemperature efficiency of solid oxide fuel cells (SOFC) manufactured by atomic layer
|
|
- Barnaby Richardson
- 5 years ago
- Views:
Transcription
1 Stanford University Michael Shandalov1, Shriram Ramanathan2, Changhyun Ko2 and Paul McIntyre1 1Department of Materials Science and Engineering, Stanford University 2Division of Engineering and Applied Sciences, Harvard University
2 The goal of this project is to enhance the power density and lowtemperature efficiency of solid oxide fuel cells (SOFC) manufactured by atomic layer deposition. These enhancements will be achieved by engineering the morphology of the electrolyte at the nanoscale, and microstructure-related conductivity of the thin film SOFC membranes will be studied. The efficiency of a fuel cell is limited by the loss mechanisms inherent to its operation. The power density of a fuel cell is limited by the area of its electrolyte membrane. These two operational parameters are related by the fact that thinner electrolytes not only limit the resistive losses within the fuel cell, but they also allow the incorporation of more active area into a given stack volume [1].
3 Introduction While an increase in membrane performance can be achieved via reduction of its thickness, the major increase in membrane area proposed by this research will be achieved by forming the electrolyte as an array of metal oxide nanotubes instead of planar films. In this part of our work we investigate novel membrane synthesis methods for increased SOFC power density by using HfO 2 oxide nanotubes to produce an enhancement of the effective membrane surface area per planar area of the device. Schematic illustration of fuel cell basic function Sketch made by Prof. Paul McIntyre
4 Atomic Layer Deposition (ALD) Using ALD we are capable of making a pinhole-free ultra-thin electrolyte layers. Furthermore, ALD-grown layers are highly conformal to the substrate, even over rough surfaces. Using this advantage, we are able to produce HfO 2 nanotubes on vertical Ge nanowire template. The chemical composition of the membrane was determined by the mix of precursor and water vapor admitted to the deposition chamber. It has been shown that the crystalline structure can be controlled by annealing at a specified temperature. ALD process
5 Initially, 1.5µm-long Ge vertical nanowires were used as template for growth of HfO 2 nanotubes Chemichal mechanical polishing (CMP) to expose HfO 2 nanotubes Processing conditions for ALD of HfO 2 ultra-thin layers Deposition of 2-8nm-thick HfO 2 layer using ALD followed by anneal at 800 o C for 3hrs in Ar Ge selective wet etch out of HfO 2 nanotubes Deposition of 1.5µm-thick SiO 2 encapsulation layer using plasma enhanced chemical vapor deposition (PECVD) Buffered oxide etch (BOE) of SiO 2 encapsulation layer HfO 2 Precursor (Temp.) Hf[N-(CH 3 ) 2 ] 4 (90 o C) Oxidant (Temp.) H 2 O (25 o C) Growth per cycle 0.85A Film roughness 2A Substrate temp. 300 o C
6 HfO 2 nanotube 5nm High-resolution TEM cross section images of HfO 2 nanotubes and films HfO 2 film 40 nm SiO 2 SiO 2 Si(111) 5nm Si(111) Vertical, having ultra-thin walls, crystalline (except 2nm-thick sample) HfO 2 nanotubes were observed within SiO 2 encapsulation layer. Additionally, HfO 2 nanocrystalline films on Si(111)surface were characterized
7 (a) 3.1nm (b) 7.8nm HfO 2 thickness Observed phase 1.8nm Amorphous 3.1nm Tetragonal 4.3nm Tetragonal 5.5nm Monoclinic 7.8nm Monoclinic (c) 3.1nm (d) 7.8nm Annealed HfO 2 Monoclinic (111) tet (-102) mono (110) mono (-111) mono (111) mono (020) mono Thickness Tetragonal (211) mono (220) tet, mono (022) mono (-221) mono Amorphous Nanodiffraction patterns obtained from cross-section samples show (a) mixed tetragonal and monoclinic structure (for 3.1nm-thick wall sample) of and (b) monoclinic (for 7.8nm-thick wall sample) structure of HfO 2 nanotubes. Selected area electron diffraction (SAED) obtained from plan-view samples confirmed (c) tetragonal and monoclinic structure (from 3.1nm-thick wall) and (b) monoclinic (from 7.8nm-thick wall) structure of HfO 2 nanotubes.
8 (a) (b) 50nm Schematic energy map for HfO 2 [2] by A. Navrotsky HfO 2 nanocrystalline film, exhibiting <111> texture on Si(111) HfO 2 exhibits a number of crystalline modifications, with phases of higher symmetry becoming increasingly stable with increasing temperature. The surface energies of nanocrystalline oxides play a major role in phase stability. Metal oxides of identical bulk composition with different crystal structures can have vastly different surface energies. Figure (a) above shows results reported recently by A. Navrotsky [2] for the enthalpy of the different polymorphs of HfO 2, referenced to the bulk enthalpy of the monoclinic phase. Because amorphous HfO 2 has a lower surface energy than either the tetragonal or the monoclinic variants, it is predicted to be the most stable form of this oxide at large molar surface areas, e.g. in nanocrystalline films.
9 Thick-wall nanotubes ultra large surface area SOFC membranes Planned future process Au nanoparticles dispersion on Si(111) surface Ge vertical nanowires will be used as template for growth HfO 2 nanotubes Deposition of 2-8nm-thick HfO 2 layer using ALD followed by anneal at 800 o C for 3hrs in Ar ALD of LSCO cathode Deposition of 1.5µm-thick SiO 2 encapsulation layer using PECVD, through-si windows wet etch Ge selective wet etch out of HfO 2 nanotubes CVD of porous Pt anode BOE of SiO 2 encapsulation layer
10 Thick-wall nanotubes towards device fabrication SEM images of hollow vertical HfO 2 nanotubes: plan view 50nm First, Ge selective wet etching was applied to broken Ge nanowires on Si substrate covered by ALD HfO 2. Ge is highly susceptible to aqueous corrosion as result of solubility of GeO 2 in water. The results showed that Ge nanowire cores were dissolved after few minutes in 30% H 2 O 2 aqueous solution at 40 o C in ultrasonic bath, without producing any etching of HfO 2 nanotubes. SEM of the etched samples showed hollow broken HfO 2 nanotubes. Unbroken HfO 2 nanotubes were not etched, since H 2 O 2 solution could not reach encapsulated Ge core.
11 Thick-wall nanotubes towards device fabrication (a) (b) 100nm 10nm (a) TEM image of hollow HfO 2 nanotubes synthesized by ALD of HfO 2 on Ge NWs of 20nm diameter, and selective wet etching of the Ge in dilute H 2 O 2 ; (b) cross-section view of a HfO 2 nanotube note that the facet structure of the NW surface is evident in the shape of the inner nanotube surface.
12 Thick-wall nanotubes towards device fabrication 100nm EDS analysis area EDS - confirmation of Ge removal from HfO 2 nanotubes Ge Energy dispersive spectroscopy (EDS) analysis shows absence of residual Ge inside HfO 2 nanotubes after selective wet etching. Note that Cu contamination is from TEM grid after ion milling of the sample.
13 Conductivity measurements of HfO 2 films on MgO substrates - varying temperature (by Changhyun Ko, Harvard) Impedance can be represented as a complex number: Nyquist plot represents complex impedance: We assume that the equivalent circuit model for our sample system is composed of three components: contact resistance, film resistance and capacitor considering the shape of Z' vs Z'' plots is semi-circle. By fitting the plots based on this simple model, the values of film resistances are obtained. Then we can convert the film resistance into the conductivity since we know films thickness, width and length. In our measurements, the length is a distance between two parallel stripe electrodes made with Pt paste.
14 Conductivity measurements of HfO 2 films on MgO substrates - varying temperature (by Changhyun Ko, Harvard) TEM cross-section image showing 57nm thick HfO 2 film on MgO isolative substrate 100nm Glue Activation energies HfO 2 MgO Single crystal 10% bulk YSZ In the reduced environment, the range of P(O 2 ) is ~ atm. 5% FG means 5% Hydrogen forming gas. Plot above shows total (ionic and electronic) conductivity data of HfO2 nanocrystalline films as function of temperature. Thinner films show increased conductivity, compared to thicker films. The films exhibit increased conductivity in oxygen-rich environment (air), while different calculated activation energies indicate a different conduction mechanism in low and high oxygen partial pressure.
15 Conductivity measurements of HfO 2 films on MgO substrates - P(O 2 ) dependence Conductivity measurements of HfO 2 films as function of P(O 2 ) are underway at this moment. These measurements are critical in determining the conductivity mechanism in HfO 2 films. The future results may show oxygen ionic conductivity and/or electronic conductivity in these films. Conclusions We showed ability to fabricate both ultra-thin wall and thick wall HfO 2 vertical nanotubes, which can be used as SOFC membranes Phase stability study of HfO 2 nanotubes and films confirmed microstructure-related crossover in polymorph stability at the nanoscale Conductivity measurements suggest possible oxygen ionic conductivity in HfO 2 films, making them attractive material for SOFC membranes
16 1. C. Ginestra, R. Sreenivasan, A. Karthikeyan, S. Ramanathan and P. McIntyre, Electrochem. Solid-State Lett., 10 (2007) B A. Navrotsky, J. Mater. Chem., 15 (2005) Acknowledgements GCEP funding Ge nanowire template fabrication: Irene Goldthorpe, Makoto Koto, Shu Hu Assistance in ALD: Yasuhiro Oshima, Cynthia Ginestra, Andy Lin
Chapter - 8. Summary and Conclusion
Chapter - 8 Summary and Conclusion The present research explains the synthesis process of two transition metal oxide semiconductors SnO 2 and V 2 O 5 thin films with different morphologies and studies
More informationSupplementary Information. Atomic Layer Deposition of Platinum Catalysts on Nanowire Surfaces for Photoelectrochemical Water Reduction
Supplementary Information Atomic Layer Deposition of Platinum Catalysts on Nanowire Surfaces for Photoelectrochemical Water Reduction Neil P. Dasgupta 1 ǂ, Chong Liu 1,2 ǂ, Sean Andrews 1,2, Fritz B. Prinz
More informationPorous silicon as base material of MEMS-compatible fuel cell components
Porous silicon as base material of MEMS-compatible fuel cell components José Geraldo Alves Brito Neto Tokyo University of Science - Faculty of Science and Technology Department of Mechanical Engineering
More information5. Building Blocks I: Ferroelectric inorganic micro- and nano(shell) tubes
5. Building Blocks I: Ferroelectric inorganic micro- and nano(shell) tubes 5.1 New candidates for nanoelectronics: ferroelectric nanotubes In this chapter, one of the core elements for a complex building
More informationThe first three categories are considered a bottom-up approach while lithography is a topdown
Nanowires and Nanorods One-dimensional structures have been called in different ways: nanowires, nanorod, fibers of fibrils, whiskers, etc. The common characteristic of these structures is that all they
More informationPlasma Deposition (Overview) Lecture 1
Plasma Deposition (Overview) Lecture 1 Material Processes Plasma Processing Plasma-assisted Deposition Implantation Surface Modification Development of Plasma-based processing Microelectronics needs (fabrication
More informationNanostrukturphysik (Nanostructure Physics)
Nanostrukturphysik (Nanostructure Physics) Prof. Yong Lei & Dr. Yang Xu Fachgebiet 3D-Nanostrukturierung, Institut für Physik Contact: yong.lei@tu-ilmenau.de; yang.xu@tu-ilmenau.de Office: Unterpoerlitzer
More informationNanowires and nanorods
Nanowires and nanorods One-dimensional structures have been called in different ways: nanowires, nanorod, fibers of fibrils, whiskers, etc. These structures have a nanometer size in one of the dimensions,
More informationThere's Plenty of Room at the Bottom
There's Plenty of Room at the Bottom 12/29/1959 Feynman asked why not put the entire Encyclopedia Britannica (24 volumes) on a pin head (requires atomic scale recording). He proposed to use electron microscope
More informationTwo-Dimensional (C 4 H 9 NH 3 ) 2 PbBr 4 Perovskite Crystals for. High-Performance Photodetector. Supporting Information for
Supporting Information for Two-Dimensional (C 4 H 9 NH 3 ) 2 PbBr 4 Perovskite Crystals for High-Performance Photodetector Zhenjun Tan,,ǁ, Yue Wu,ǁ, Hao Hong, Jianbo Yin, Jincan Zhang,, Li Lin, Mingzhan
More informationSupplementary Materials
Atomic layer-deposited tunnel oxide stabilizes silicon photoanodes for water oxidation Yi Wei Chen 1, Jonathan D. Prange 2, Simon Dühnen 2, Yohan Park 1, Marika Gunji 1, Christopher E. D. Chidsey 2, and
More informationSupplementary information
Supplementary information Electrochemical synthesis of metal and semimetal nanotube-nanowire heterojunctions and their electronic transport properties Dachi Yang, ab Guowen Meng,* a Shuyuan Zhang, c Yufeng
More informationFabrication Methods: Chapter 4. Often two methods are typical. Top Down Bottom up. Begins with atoms or molecules. Begins with bulk materials
Fabrication Methods: Chapter 4 Often two methods are typical Top Down Bottom up Begins with bulk materials Begins with atoms or molecules Reduced in size to nano By thermal, physical Chemical, electrochemical
More informationProf. Mario L. Ferrari
Sustainable Energy Mod.1: Fuel Cells & Distributed Generation Systems Dr. Ing. Mario L. Ferrari Thermochemical Power Group (TPG) - DiMSET University of Genoa, Italy Lesson II Lesson II: fuel cells (electrochemistry)
More informationARC-ASSISTED CO-CONVERSION OF COAL-BASED CARBON AND ACETYLENE
ARC-ASSISTED CO-CONVERSION OF COAL-BASED CARBON AND ACETYLENE Jieshan Qiu*, Yongfeng Li, Yunpeng Wang Carbon Research Laboratory, Center for Nano Materials and Science, School of Chemical Engineering,
More informationAdvanced Analytical Chemistry Lecture 12. Chem 4631
Advanced Analytical Chemistry Lecture 12 Chem 4631 What is a fuel cell? An electro-chemical energy conversion device A factory that takes fuel as input and produces electricity as output. O 2 (g) H 2 (g)
More informationCarbon Nanotubes: Development of Nanomaterials for Hydrogen Storage
Carbon Nanotubes: Development of Nanomaterials for Hydrogen Storage Hongjie Dai Department of Chemistry & Laboratory for Advanced Materials Stanford University GCEP, September 19, 2006 Outline Can carbon
More informationSUPPLEMENTARY INFORMATION
doi:10.1038/nature17653 Supplementary Methods Electronic transport mechanism in H-SNO In pristine RNO, pronounced electron-phonon interaction results in polaron formation that dominates the electronic
More informationLithium-ion Batteries Based on Vertically-Aligned Carbon Nanotubes and Ionic Liquid
Electronic Supplementary Information Lithium-ion Batteries Based on Vertically-Aligned Carbon Nanotubes and Ionic Liquid Electrolytes Wen Lu, * Adam Goering, Liangti Qu, and Liming Dai * 1. Synthesis of
More informationFrequency dispersion effect and parameters. extraction method for novel HfO 2 as gate dielectric
048 SCIENCE CHINA Information Sciences April 2010 Vol. 53 No. 4: 878 884 doi: 10.1007/s11432-010-0079-8 Frequency dispersion effect and parameters extraction method for novel HfO 2 as gate dielectric LIU
More informationChemical Transformations in Ultrathin Chalcogenide Nanowires
Chemical Transformations in Ultrathin Chalcogenide Nanowires Geon Dae Moon, Sungwook Ko, Younan Xia, and Unyong Jeong Department Biomedical Engineering Washington University, St. Louis, Missouri 63130
More informationNanostructure. Materials Growth Characterization Fabrication. More see Waser, chapter 2
Nanostructure Materials Growth Characterization Fabrication More see Waser, chapter 2 Materials growth - deposition deposition gas solid Physical Vapor Deposition Chemical Vapor Deposition Physical Vapor
More informationCVD growth of Graphene. SPE ACCE presentation Carter Kittrell James M. Tour group September 9 to 11, 2014
CVD growth of Graphene SPE ACCE presentation Carter Kittrell James M. Tour group September 9 to 11, 2014 Graphene zigzag armchair History 1500: Pencil-Is it made of lead? 1789: Graphite 1987: The first
More informationTitle of file for HTML: Supplementary Information Description: Supplementary Figures and Supplementary References
Title of file for HTML: Supplementary Information Description: Supplementary Figures and Supplementary References Supplementary Figure 1. SEM images of perovskite single-crystal patterned thin film with
More informationSupporting Information
Supporting Information Assembly and Densification of Nanowire Arrays via Shrinkage Jaehoon Bang, Jonghyun Choi, Fan Xia, Sun Sang Kwon, Ali Ashraf, Won Il Park, and SungWoo Nam*,, Department of Mechanical
More informationA. Optimizing the growth conditions of large-scale graphene films
1 A. Optimizing the growth conditions of large-scale graphene films Figure S1. Optical microscope images of graphene films transferred on 300 nm SiO 2 /Si substrates. a, Images of the graphene films grown
More informationREFRACTORY METAL OXIDES: FABRICATION OF NANOSTRUCTURES, PROPERTIES AND APPLICATIONS
REFRACTORY METAL OXIDES: FABRICATION OF NANOSTRUCTURES, PROPERTIES AND APPLICATIONS S.K. Lazarouk, D.A. Sasinovich BELARUSIAN STATE UNIVERSITY OF INFORMATICS AND RADIOELECTRONICS Outline: -- experimental
More informationD DAVID PUBLISHING. Study the Synthesis Parameter of Tin Oxide Nanostructure. 1. Introduction. 2. Experiment
Journal of Materials Science and Engineering B 5 (9-10) (2015) 353-360 doi: 10.17265/2161-6221/2015.9-10.003 D DAVID PUBLISHING Study the Synthesis Parameter of Tin Oxide Nanostructure Gyanendra Prakash
More informationSupplementary Figures Supplementary Figure 1
Supplementary Figures Supplementary Figure 1 Optical images of graphene grains on Cu after Cu oxidation treatment at 200 for 1m 30s. Each sample was synthesized with different H 2 annealing time for (a)
More informationSupporting Information for
Supporting Information for Multilayer CuO@NiO Hollow Spheres: Microwave-Assisted Metal-Organic-Framework Derivation and Highly Reversible Structure-Matched Stepwise Lithium Storage Wenxiang Guo, Weiwei
More informationJoshua Whittam, 1 Andrew L. Hector, 1 * Christopher Kavanagh, 2 John R. Owen 1 and Gillian Reid 1
Supporting Information: Combination of Solid State and Electrochemical Impedance Spectroscopy to Explore Effects of Porosity in Sol-Gel Derived BaTiO3 Thin Films Joshua Whittam, 1 Andrew L. Hector, 1 *
More informationVI. EIS STUDIES LEAD NANOPOWDER
VI. EIS STUDIES LEAD NANOPOWDER 74 26. EIS Studies of Pb nanospheres Impedance (valid for both DC and AC), a complex resistance occurs when current flows through a circuit (composed of various resistors,
More informationGraphene Fundamentals and Emergent Applications
Graphene Fundamentals and Emergent Applications Jamie H. Warner Department of Materials University of Oxford Oxford, UK Franziska Schaffel Department of Materials University of Oxford Oxford, UK Alicja
More informationMicrostructure evolution during BaTiO 3 formation by solid-state reactions on rutile single crystal surfaces
Journal of the European Ceramic Society 25 (2005) 2201 2206 Microstructure evolution during BaTiO 3 formation by solid-state reactions on rutile single crystal surfaces Andreas Graff a,, Stephan Senz a,
More informationGold Nanoparticles Floating Gate MISFET for Non-Volatile Memory Applications
Gold Nanoparticles Floating Gate MISFET for Non-Volatile Memory Applications D. Tsoukalas, S. Kolliopoulou, P. Dimitrakis, P. Normand Institute of Microelectronics, NCSR Demokritos, Athens, Greece S. Paul,
More informationFabrication and Characterization of Metal and Metal Oxide Nanostructures Grown by Metal Displacement Deposition into Anodic Alumina Membranes
Fabrication and Characterization of Metal and Metal Oxide Nanostructures Grown by Metal Displacement Deposition into Anodic Alumina Membranes Rosalinda Inguanta, Germano Ferrara, Salvatore Piazza, Carmelo
More informationFabrication Technology, Part I
EEL5225: Principles of MEMS Transducers (Fall 2004) Fabrication Technology, Part I Agenda: Microfabrication Overview Basic semiconductor devices Materials Key processes Oxidation Thin-film Deposition Reading:
More informationA Novel Approach to the Layer Number-Controlled and Grain Size- Controlled Growth of High Quality Graphene for Nanoelectronics
Supporting Information A Novel Approach to the Layer Number-Controlled and Grain Size- Controlled Growth of High Quality Graphene for Nanoelectronics Tej B. Limbu 1,2, Jean C. Hernández 3, Frank Mendoza
More informationHydrogenation of Single Walled Carbon Nanotubes
Hydrogenation of Single Walled Carbon Nanotubes Anders Nilsson Stanford Synchrotron Radiation Laboratory (SSRL) and Stockholm University Coworkers and Ackowledgement A. Nikitin 1), H. Ogasawara 1), D.
More informationSUPPLEMENTARY NOTES Supplementary Note 1: Fabrication of Scanning Thermal Microscopy Probes
SUPPLEMENTARY NOTES Supplementary Note 1: Fabrication of Scanning Thermal Microscopy Probes Fabrication of the scanning thermal microscopy (SThM) probes is summarized in Supplementary Fig. 1 and proceeds
More informationHigh-resolution on-chip supercapacitors with ultra-high scan rate ability
Electronic Supplementary Material (ESI) for Journal of Materials Chemistry A. This journal is The Royal Society of Chemistry 214 Supporting Information High-resolution on-chip supercapacitors with ultra-high
More informationSupplementary Figure 1 a-c, The viscosity fitting curves of high-molecular-weight poly(vinyl alcohol) (HMW-PVA) (a), middle-molecular-weight
Supplementary Figure 1 a-c, The viscosity fitting curves of high-molecular-weight poly(vinyl alcohol) (HMW-PVA) (a), middle-molecular-weight poly(vinyl alcohol) (MMW-PVA) (b) and low-molecular-weight poly(vinyl
More informationNickel Sulfides Freestanding Holey Films as Air-Breathing Electrodes for. Flexible Zn-Air Batteries
Nickel Sulfides Freestanding Holey Films as Air-Breathing Electrodes for Flexible Zn-Air Batteries Kyle Marcus, 1,# Kun Liang, 1,# Wenhan Niu, 1,# Yang Yang 1,* 1 NanoScience Technology Center, Department
More informationBasic overall reaction for hydrogen powering
Fuel Cell Basics Basic overall reaction for hydrogen powering 2H 2 + O 2 2H 2 O Hydrogen produces electrons, protons, heat and water PEMFC Anode reaction: H 2 2H + + 2e Cathode reaction: (½)O 2 + 2H +
More informationSUPPLEMENTARY INFORMATION
SUPPLEMENTARY INFORMATION Facile Synthesis of High Quality Graphene Nanoribbons Liying Jiao, Xinran Wang, Georgi Diankov, Hailiang Wang & Hongjie Dai* Supplementary Information 1. Photograph of graphene
More informationSupplementary Information. Rapid Stencil Mask Fabrication Enabled One-Step. Polymer-Free Graphene Patterning and Direct
Supplementary Information Rapid Stencil Mask Fabrication Enabled One-Step Polymer-Free Graphene Patterning and Direct Transfer for Flexible Graphene Devices Keong Yong 1,, Ali Ashraf 1,, Pilgyu Kang 1,
More informationWafer-scale fabrication of graphene
Wafer-scale fabrication of graphene Sten Vollebregt, MSc Delft University of Technology, Delft Institute of Mircosystems and Nanotechnology Delft University of Technology Challenge the future Delft University
More informationSupporting Information. Fast Synthesis of High-Performance Graphene by Rapid Thermal Chemical Vapor Deposition
1 Supporting Information Fast Synthesis of High-Performance Graphene by Rapid Thermal Chemical Vapor Deposition Jaechul Ryu, 1,2, Youngsoo Kim, 4, Dongkwan Won, 1 Nayoung Kim, 1 Jin Sung Park, 1 Eun-Kyu
More informationHigh-Performance Silicon Battery Anodes Enabled by
Supporting Information for: High-Performance Silicon Battery Anodes Enabled by Engineering Graphene Assemblies Min Zhou,, Xianglong Li, *, Bin Wang, Yunbo Zhang, Jing Ning, Zhichang Xiao, Xinghao Zhang,
More informationElectronic Supplementary Information
Electronic Supplementary Information High Electrocatalytic Activity of Self-standing Hollow NiCo 2 S 4 Single Crystalline Nanorod Arrays towards Sulfide Redox Shuttles in Quantum Dot-sensitized Solar Cells
More informationperformance electrocatalytic or electrochemical devices. Nanocrystals grown on graphene could have
Nanocrystal Growth on Graphene with Various Degrees of Oxidation Hailiang Wang, Joshua Tucker Robinson, Georgi Diankov, and Hongjie Dai * Department of Chemistry and Laboratory for Advanced Materials,
More informationRecap (so far) Low-Dimensional & Boundary Effects
Recap (so far) Ohm s & Fourier s Laws Mobility & Thermal Conductivity Heat Capacity Wiedemann-Franz Relationship Size Effects and Breakdown of Classical Laws 1 Low-Dimensional & Boundary Effects Energy
More informationLarge Scale Direct Synthesis of Graphene on Sapphire and Transfer-free Device Fabrication
Supplementary Information Large Scale Direct Synthesis of Graphene on Sapphire and Transfer-free Device Fabrication Hyun Jae Song a, Minhyeok Son a, Chibeom Park a, Hyunseob Lim a, Mark P. Levendorf b,
More informationSupplementary Figure S1. AFM image and height profile of GO. (a) AFM image
Supplementary Figure S1. AFM image and height profile of GO. (a) AFM image and (b) height profile of GO obtained by spin-coating on silicon wafer, showing a typical thickness of ~1 nm. 1 Supplementary
More informationDesign of a new family of catalytic support based on thiol containing plasma polymer films
Design of a new family of catalytic support based on thiol containing plasma polymer films Dr. D. Thiry damien.thiry@umons.ac.be Chimie des Interactions Plasma Surface (ChIPS), CIRMAP, University of Mons,
More informationNanostructures Fabrication Methods
Nanostructures Fabrication Methods bottom-up methods ( atom by atom ) In the bottom-up approach, atoms, molecules and even nanoparticles themselves can be used as the building blocks for the creation of
More informationEnergy Storage material status and challenges for KSA and practical application of 3D holey-graphene structure. Imran Shakir
Energy Storage material status and challenges for KSA and practical application of 3D holey-graphene structure Imran Shakir Specific Power (W/kg) Energy Storage Research Group Objective Development of
More informationLecture 4. Conductance sensors. ChemFET. Electrochemical Impedance Spectroscopy. py Practical consideration for electrochemical biosensors.
Lecture 4 Conductance sensors. ChemFET. Electrochemical Impedance Spectroscopy. py Practical consideration for electrochemical biosensors. Conductivity I V = I R=, L - conductance L= κa/, l Λ= κ /[ C]
More informationHighly stable and flexible Li-ion battery anodes based on TiO 2 coated
Electronic Supplementary Material (ESI) for Journal of Materials Chemistry A. This journal is The Royal Society of Chemistry 2015 Supporting Information for Highly stable and flexible Li-ion battery anodes
More information1-amino-9-octadecene, HAuCl 4, hexane, ethanol 55 o C, 16h AuSSs on GO
Supplementary Figures GO Supplementary Figure S1 1-amino-9-octadecene, HAuCl 4, hexane, ethanol 55 o C, 16h AuSSs on GO Schematic illustration of synthesis of Au square sheets on graphene oxide sheets.
More informationRemoval of Cu Impurities on a Si Substrate by Using (H 2 O 2 +HF) and (UV/O 3 +HF)
Journal of the Korean Physical Society, Vol. 33, No. 5, November 1998, pp. 579 583 Removal of Cu Impurities on a Si Substrate by Using (H 2 O 2 +HF) and (UV/O 3 +HF) Baikil Choi and Hyeongtag Jeon School
More informationNanostrukturphysik (Nanostructure Physics)
Nanostrukturphysik (Nanostructure Physics) Prof. Yong Lei & Dr. Yang Xu Fachgebiet 3D-Nanostrukturierung, Institut für Physik Contact: yong.lei@tu-ilmenau.de; yang.xu@tu-ilmenau.de Office: Unterpoerlitzer
More informationSupplementary Figure S1. AFM images of GraNRs grown with standard growth process. Each of these pictures show GraNRs prepared independently,
Supplementary Figure S1. AFM images of GraNRs grown with standard growth process. Each of these pictures show GraNRs prepared independently, suggesting that the results is reproducible. Supplementary Figure
More informationJOHN G. EKERDT RESEARCH FOCUS
JOHN G. EKERDT RESEARCH FOCUS We study the surface, growth and materials chemistry of metal, dielectric, ferroelectric, and polymer thin films. We seek to understand and describe nucleation and growth
More informationSynthesis of LiFePO 4 Nanostructures for Lithium-Ion Batteries by Electrochemical Deposition
Synthesis of LiFePO 4 Nanostructures for Lithium-Ion Batteries by Electrochemical Deposition Erika Aragon and Alfredo A. Martinez-Morales Southern California Research Initiative for Solar Energy College
More informationRole of boric acid in nickel nanotube electrodeposition: a surface-directed growth mechanism
Electronic Supporting Information: Role of boric acid in nickel nanotube electrodeposition: a surface-directed growth mechanism Lauren M. Graham, Seungil Il Cho, Sung Kyoung Kim, Malachi Noked, and Sang
More informationChallenges and Opportunities. Prof. J. Raynien Kwo 年
Nanoelectronics Beyond Si: Challenges and Opportunities Prof. J. Raynien Kwo 年 立 Si CMOS Device Scaling Beyond 22 nm node High κ,, Metal gates, and High mobility channel 1947 First Transistor 1960 1960
More informationSupporting Information
Electronic Supplementary Material (ESI) for Journal of Materials Chemistry A. This journal is The Royal Society of Chemistry 2015 Supporting Information 1. Synthesis of perovskite materials CH 3 NH 3 I
More informationSupporting Information
Supporting Information Scalable Binder-Free Supersonic Cold Spraying of Nanotextured Cupric Oxide (CuO) Films as Efficient Photocathodes Jong Gun Lee, a,, Do-Yeon Kim, a,, Jong-Hyuk Lee, a, Min-woo Kim
More informationon Self-Assembly of Fullerene Molecules
Effect of Surface Preparation of Copper on Self-Assembly of Fullerene Molecules Dongni Ma, Selene Sandoval, Krishna Muralidharan, Srini Raghavan University of Arizona Department of Materials Science and
More informationGraphene: Plane and Simple Electrical Metrology?
Graphene: Plane and Simple Electrical Metrology? R. E. Elmquist, F. L. Hernandez-Marquez, M. Real, T. Shen, D. B. Newell, C. J. Jacob, and G. R. Jones, Jr. National Institute of Standards and Technology,
More informationAlternative deposition solution for cost reduction of TSV integration
Alternative deposition solution for cost reduction of TSV integration J. Vitiello, F. Piallat, L. Bonnet KOBUS 611 rue Aristide Bergès, Z.A. de Pré Millet, Montbonnot-Saint-Martin, 38330 France Ph: +33
More informationSupporting Information. High Wettable and Metallic NiFe-Phosphate/Phosphide Catalyst Synthesized by
Electronic Supplementary Material (ESI) for Journal of Materials Chemistry A. This journal is The Royal Society of Chemistry 2018 Supporting Information High Wettable and Metallic NiFe-Phosphate/Phosphide
More information3.155J/6.152J Microelectronic Processing Technology Fall Term, 2004
3.155J/6.152J Microelectronic Processing Technology Fall Term, 2004 Bob O'Handley Martin Schmidt Quiz Nov. 17, 2004 Ion implantation, diffusion [15] 1. a) Two identical p-type Si wafers (N a = 10 17 cm
More informationAdvanced Texturing of Si Nanostructures on Low Lifetime Si Wafer
Advanced Texturing of Si Nanostructures on Low Lifetime Si Wafer SUHAILA SEPEAI, A.W.AZHARI, SALEEM H.ZAIDI, K.SOPIAN Solar Energy Research Institute (SERI), Universiti Kebangsaan Malaysia (UKM), 43600
More informationKentaro INOUE. Introduction. Measurement principle (membrane polarographic method)
FFeature Article Article Performance of the Dissolved Oxygen Monitor Used in the Semiconductor Wet Process; Low Concentration Monitoring, High Temperature, Small Amount of Sampling Volume, Chemical Resistance
More informationSupporting Information
Supporting Information A General Strategy for the Synthesis of Transition-Metal Phosphide/N-doped Carbon Frameworks for Hydrogen and Oxygen Evolution Zonghua Pu, Chengtian Zhang, Ibrahim Saana Amiinu,
More informationMulticolor Graphene Nanoribbon/Semiconductor Nanowire. Heterojunction Light-Emitting Diodes
Multicolor Graphene Nanoribbon/Semiconductor Nanowire Heterojunction Light-Emitting Diodes Yu Ye, a Lin Gan, b Lun Dai, *a Hu Meng, a Feng Wei, a Yu Dai, a Zujin Shi, b Bin Yu, a Xuefeng Guo, b and Guogang
More informationSynthesis of Ultra-long Hollow Chalcogenide Nanofibers
Supplementary Materials Synthesis of Ultra-long Hollow Chalcogenide Nanofibers By Kun-Jae Lee, Hanbok Song, Young-In Lee, Hyunsung Jung, Miluo Zhang, Yong-Ho Choa*, and Nosang V. Myung* Experimental Polyvinylpyrrolidone
More informationJournal of Power Sources
Journal of Power Sources 185 (2008) 917 921 Contents lists available at ScienceDirect Journal of Power Sources journal homepage: www.elsevier.com/locate/jpowsour Short communication Oxygen ion transference
More informationCVD: General considerations.
CVD: General considerations. PVD: Move material from bulk to thin film form. Limited primarily to metals or simple materials. Limited by thermal stability/vapor pressure considerations. Typically requires
More informationSupporting Information
Copyright WILEY-VCH Verlag GmbH & Co. KGaA, 69469 Weinheim, Germany, 2016. Supporting Information for Adv. Mater., DOI: 10.1002/adma.201604015 High Performance Graphene/Ni 2 P Hybrid Anodes for Lithium
More informationSupporting Information
Electronic Supplementary Material (ESI) for Journal of Materials Chemistry A. This journal is The Royal Society of Chemistry 2017 Supporting Information Experimental section Synthesis of Ni-Co Prussian
More informationSelf-assembled pancake-like hexagonal tungsten oxide with ordered mesopores for supercapacitors
Electronic Supplementary Material (ESI) for Journal of Materials Chemistry A. This journal is The Royal Society of Chemistry 2018 Electronic Supporting Information Self-assembled pancake-like hexagonal
More informationCHAPTER 6: Etching. Chapter 6 1
Chapter 6 1 CHAPTER 6: Etching Different etching processes are selected depending upon the particular material to be removed. As shown in Figure 6.1, wet chemical processes result in isotropic etching
More informationHigh-density data storage: principle
High-density data storage: principle Current approach High density 1 bit = many domains Information storage driven by domain wall shifts 1 bit = 1 magnetic nanoobject Single-domain needed Single easy axis
More informationCHAPTER 4. SYNTHESIS, CHARACTERIZATION OF TiO 2 NANOTUBES AND THEIR APPLICATION IN DYE SENSITIZED SOLAR CELL
93 CHAPTER 4 SYNTHESIS, CHARACTERIZATION OF TiO 2 NANOTUBES AND THEIR APPLICATION IN DYE SENSITIZED SOLAR CELL 4.1 INTRODUCTION TiO 2 -derived nanotubes are expected to be applicable for several applications,
More informationSupplementary material for High responsivity mid-infrared graphene detectors with antenna-enhanced photo-carrier generation and collection
Supplementary material for High responsivity mid-infrared graphene detectors with antenna-enhanced photo-carrier generation and collection Yu Yao 1, Raji Shankar 1, Patrick Rauter 1, Yi Song 2, Jing Kong
More informationJay A. Switzer Summary of Research
Jay A. Switzer Summary of Research I have dedicated most of my career to research on the electrodeposition of nanostructured metal oxide ceramics. Although the electroplating of metal films is a mature
More informationDominating Role of Aligned MoS 2 /Ni 3 S 2. Nanoarrays Supported on 3D Ni Foam with. Hydrophilic Interface for Highly Enhanced
Supporting Information Dominating Role of Aligned MoS 2 /Ni 3 S 2 Nanoarrays Supported on 3D Ni Foam with Hydrophilic Interface for Highly Enhanced Hydrogen Evolution Reaction Jiamu Cao a, Jing Zhou a,
More informationEE 527 MICROFABRICATION. Lecture 24 Tai-Chang Chen University of Washington
EE 527 MICROFABRICATION Lecture 24 Tai-Chang Chen University of Washington EDP ETCHING OF SILICON - 1 Ethylene Diamine Pyrocatechol Anisotropy: (100):(111) ~ 35:1 EDP is very corrosive, very carcinogenic,
More informationSupporting Information
Copyright WILEY-VCH Verlag GmbH & Co. KGaA, 69469 Weinheim, Germany, 2015. Supporting Information for Adv. Energy Mater., DOI: 10.1002/aenm.201500060 Interconnected Nanorods Nanoflakes Li 2 Co 2 (MoO 4
More informationSection 3: Etching. Jaeger Chapter 2 Reader
Section 3: Etching Jaeger Chapter 2 Reader Etch rate Etch Process - Figures of Merit Etch rate uniformity Selectivity Anisotropy d m Bias and anisotropy etching mask h f substrate d f d m substrate d f
More informationFabrication at the nanoscale for nanophotonics
Fabrication at the nanoscale for nanophotonics Ilya Sychugov, KTH Materials Physics, Kista silicon nanocrystal by electron beam induced deposition lithography Outline of basic nanofabrication methods Devices
More informationmaterials, devices and systems through manipulation of matter at nanometer scale and exploitation of novel phenomena which arise because of the
Nanotechnology is the creation of USEFUL/FUNCTIONAL materials, devices and systems through manipulation of matter at nanometer scale and exploitation of novel phenomena which arise because of the nanometer
More informationThierry Djenizian. Fabrication de microbatteries Li-ion à base de nanotubes de TiO2. Department of Flexible Electronics, CMP Gardanne
Department of Flexible Electronics, CMP Gardanne Fabrication de microbatteries Li-ion à base de nanotubes de TiO2 Thierry Djenizian 2 All-solid-state microbatteries Motivation : shrink the size of power
More informationCARBON NANOSTRUCTURES SYNTHESIZED THROUGH GRAPHITE ETCHING
CARBON NANOSTRUCTURES SYNTHESIZED THROUGH GRAPHITE ETCHING Q. Yang 1, C. Xiao 1, R. Sammynaiken 2 and A. Hirose 1 1 Plasma Physics Laboratory, University of Saskatchewan, 116 Science Place Saskatoon, SK
More informationGraphene-based Electrodes for Electrochemical Energy Conversion
Graphene-based Electrodes for Electrochemical Energy Conversion September 23, 2014 AVS North California Chapter Prof. Min Hwan Lee School of Engineering Graphene for electrochemical devices Properties
More informationSynthesis and Characterization of Innovative Multilayer, Multi Metal Oxide Thin Films by Modified Silar Deposition Method
STUDENT JOURNAL OF PHYSICS Indian Association of Physics Teachers Presentations Synthesis and Characterization of Innovative Multilayer, Multi Metal Oxide Thin Films by Modified Silar Deposition Method
More informationWafer Scale Homogeneous Bilayer Graphene Films by. Chemical Vapor Deposition
Supporting Information for Wafer Scale Homogeneous Bilayer Graphene Films by Chemical Vapor Deposition Seunghyun Lee, Kyunghoon Lee, Zhaohui Zhong Department of Electrical Engineering and Computer Science,
More information