EE C245 ME C218 Introduction to MEMS Design
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1 EE C45 ME C8 Introduction to MEMS Deign Fall 007 Prof. Clark T.-C. Nguyen Dept. of Electrical Engineering & Computer Science Univerity of California at Berkeley Berkeley, CA 9470 Lecture 5: Output t Sening EE C45: Introduction to MEMS Deign Lecture 5 C. Nguyen /5/08
2 Lecture Outline Reading: Senturia, Chpt. 6, Chpt. 4 Lecture Topic: Input/Output Modeling I/O Equivalent Circuit Model Electromechanical Coupling Mechanical Coupling Detection Circuit Poition Sening Velocity Sening EE C45: Introduction to MEMS Deign Lecture 5 C. Nguyen /5/08
3 F d Complete Electrical-Port Equiv. Circuit d d e Ele ectrode x b l x m Static electrode- c to-ma overlap k x k capacitance r x b I I m E lectrod I C C I V I :η e l x c x r x η e : V x C o C - o - C o I η e VP V P x d V C C o ηe VP VP V P x d EE C45: Introduction to MEMS Deign Lecture 5 C. Nguyen /5/08 3 C I V
4 Input Impedance Into Port I :η e l x c x r x η e : V x C o C - o - What i the impedance een looking into port with port horted to ground? I V EE C45: Introduction to MEMS Deign Lecture 5 C. Nguyen /5/08 4
5 Input Impedance Into Port I :η e l x c x r x η e : V x C o C - o - What i the impedance een looking into port with port horted to ground? I V EE C45: Introduction to MEMS Deign Lecture 5 C. Nguyen /5/08 5
6 Port to TranG Acro the Circuit I :η e l x c x r x η e : V x C o C - o - What i the tranconductance from port to port with port horted to ground? I V EE C45: Introduction to MEMS Deign Lecture 5 C. Nguyen /5/08 6
7 Port to v i -to-i o Tranfer Function EE C45: Introduction to MEMS Deign Lecture 5 C. Nguyen /5/08 7
8 Condened Equiv. Circuit (Symmetrical I I :η e l x c x r x η e : V x V Hold for the C o C o ymmetrical cae, - - I If η e η e, then L x C x R x I where port and port are identical L x m η where C x k V V C o C b o - - R x η EE C45: Introduction to MEMS Deign Lecture 5 C. Nguyen /5/08 8 e ηe e
9 Phaing of Signal F d x b k Below: plot of reonance electrical and mechanical ignal v. time, howing the phaing between them d d Ele ectrode m e lectrod E I C C I I V V V P EE C45: Introduction to MEMS Deign Lecture 5 C. Nguyen /5/08 9
10 Sening Circuit EE C45: Introduction to MEMS Deign Lecture 5 C. Nguyen /5/08 0
![MEMS 06] Drive Ocillation](/docs-images/94/121688741/images/11-6.jpg "Sutaining Amplifier")
11 MEMS-Baed Tuning Fork Gyrocope Sene Electrode Sene Ω r z Tuning Electrode Drive Voltage Signal (- Sene Output Current ( Sene Output Current Tuning Electrode Sene Electrode Drive Electrode Drive [Zaman, Ayazi, et al, MEMS 06] Drive Ocillation Sutaining Amplifier Differential TranR Sene Amplifier EE C45: Introduction to MEMS Deign Lecture 5 C. Nguyen /5/08
12 Detecting Velocity Veru Poition Velocity Tranfer Function: υ F ( ωo d ( k ( ω o Q ωo υ( ( F d Bandpa Biquad Poition (i.e., diplacement Tranfer Function: X F X ( F ( d ( ω o d ( k ( o ω Q ω o Lowpa Biquad ω o ω Detect velocity when the output i at reonance or when a bandpa repone i required ω o Detect poition when the output i varying lowly, i.e., at low frequencie ω EE C45: Introduction to MEMS Deign Lecture 5 C. Nguyen /5/08
13 Detecting Velocity Veru Poition Poition (i.e., diplacement Velocity Tranfer Function: Tranfer Function: ( o X ω Tranfer Function ( ( ( o Q k F ω υ ( ( ( o o o d Q k F ω ω ( ( o o d Q k F ω ω EE C45: Introduction to MEMS Deign Lecture 5 C. Nguyen /5/08 3
14 Output Current Meaure Velocity I :η e l x c x r x η e : V x C o C - o - Relationhip between output current and velocity: I V i η o e x& Output current i proportional p to velocity, and thu, directly meaure velocity To turn current into voltage (for a voltage output, end the current into a reitor R L To get poition, mut integrate end the current into a capacitor C L EE C45: Introduction to MEMS Deign Lecture 5 C. Nguyen /5/08 4
15 Velocity-to-Voltage Converion To convert velocity to a voltage, ue a reitive load EE C45: Introduction to MEMS Deign Lecture 5 C. Nguyen /5/08 5
EE C245 ME C218 Introduction to MEMS Design
EE C45 ME C8 Introduction to MEMS Design Fall 007 Prof. Clark T.-C. Nguyen Dept. of Electrical Engineering & Computer Sciences University of California at Berkeley Berkeley, CA 9470 Lecture 5: Output t
EE C245 ME C218 Introduction to MEMS Design
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