Atomic Layer Deposition of Nanostructured Materials
|
|
- Christian Parrish
- 5 years ago
- Views:
Transcription
1 Edited by Nicola Pinna and Mato Knez Atomic Layer Deposition of Nanostructured Materials WILEY- VCH WILEY-VCH Verlag GmbH gc. Co. KGaA
2 Contents Foreword V Preface XV/I Introduction XXI List of Contributors )0(XI// Part One introduction to ALD 1 1 Theoretical Modeling of ALD Processes 3 Charles B. Musgrave 1.1 Introduction Overview of Atomistic Simulations Quantum Simulations Wave Function-Based Quantum Simulations Density Functional-Based Quantum Simulations Finite and Extended Quantum Simulations Basis Set Expansions Calculation of Properties Using Quantum Simulations Calculation of Transition States and Activation Barriers Calculation of Rates of Reaction Prediction of ALD Chernical Mechanisms Gas-Phase Reactions in ALD Surface Reactions in ALD Adsorption Reactions in ALD Ligand Exchange Reactions Example of a Calculated ALD Mechanism: ALD of Al203 Using TMA and Water 16 References 20 2 Step Coverage in ALD 23 Sovan Kumar Panda and Hyunjung Shin 2.1 Introduction Growth Techniques Step Coverage Models in ALD 28
3 Xi Contents Gordon's Model for Step Coverage 28 Parameters for Step Coverage 28 Kim's Model for Step Coverage 31 Experimental Verifications of Step Coverage Models 34 Summary 38 References 38 3 Precursors for ALD Processes 41 Matti Putkonen 3.1 Introduction General Requirements for ALD Precursors Metallic Precursors for ALD Inorganic Precursors Elemental Precursors Halides Oxygen-Coordinated Compounds Nitrogen-Coordinated Precursors Precursors Coordinated through Other Inorganic Elements Organometallic ALD Precursors Metal Alkyls Cyclopentadienyl-Type Compounds Other Organometallic Precursors Nonmetal Precursors for ALD Reducing Agents Oxygen Sources Nitrogen Sources Sulfur ant Other Chalcogenide Precursors Conclusions 50 References 51 4 Sol Cel Chemistry and Atomic Layer Deposition 61 Guyihaine Clavel, Catherine Marichy, and Nicola Pinna 4.1 Aqueous and Nonaqueous Sol Gel in Solution Aqueous Sol Gel Introduction Development of Sol Gel Chemistry Nonaqueous Sol Gel Introduction Synthesis of Nanomaterials Sol Gel and ALD: An Overview Metal Oxide Formation via Hydrolytic Routes Reaction with Metal Halides Reaction with Metal Alkoxide Reaction with Organometallic Compounds Metal Oxide Deposition under Nonaqueous Conditions 67
4 Contents I XI Alkyl Halide Elimination Ether Elimination Ester Elimination Other Reactions Concluding Remarks Mechanistic and In Situ Studies General Considerations Differences between Sol Gel in Solution and in ALD Reaction Mechanism Study Comparison of Selected Reactions Case of the Silica Deposition Case of Alkyl Halide Condensation Conclusions 76 References 76 5 Molecular Layer Deposition of Hybrid Organic lnorganic Films 83 Steven M. George, B. Yoon, Robert A. Hall, Aziz I. Abdulagatov, Zachary M. Gibbs, Younghee Lee, Dragos Seghete, and Byoung H. Lee 5.1 Introduction General Issues for MLD of Hybrid Organic Inorganic Films MLD Using Trimethylaluminum and Ethylene Glycol in an AB Process Expansion to an ABC Process Using Heterobifunctional and Ring-Opening Precursors Use of a Homotrifunctional Precursor to Promote Cross-Linking in an AB Process Use of a Heterobifunctional Precursor in an ABC Process MLD of Hybrid Alumina Siloxane Films Using an ABCD Process Future Prospects for MLD of Hybrid Organic Inorganic Films 103 References Low-Temperature Atomic Layer Deposition 109 Jens Meyer and Thomas Ried! 6.1 Introduction Challenges of LT-ALD Materials and Processes Toward Novel LT-ALD Processes Thin Film Gas Diffusion Barriers Encapsulation of Organic Electronics Encapsulation of Organic Light Emitting Diodes Encapsulation of Organic Solar Cells Conclusions 125 References 125
5 XIII Contents 7 Plasma Atomic Layer Deposition 131 Erwin Kessels, Harald Profijt, Stephen Potts, and Richard yan de Sanden 7.1 Introducfion Plasma Basics Plasma ALD Configurations Merits of Plasma ALD Challenges for Plasma ALD Concluding Remarks and Outlook 153 References 154 Part Two Nanostructures by ALD Atomic Layer Deposition for Microelectronic Applications 161 Cheol Seong Hwang 8.1 Introduction ALD Layers for Memory Devices Mass Production Level Memories Dynamic Random Access Memory Flash Memory Phase Change Memory Emerging Memories Ferroelectric Memory Magnetic Random Access Memory Resistive Random Access Memory Three-Dimensional Stacked Memories ALD for Logic Devices Front End of the Line Process Back End of the Line Process Conduding Remarks 187 References Nanopatterning by Area-Selective Atomic Layer Deposition 193 Han-Bo-Ram Lee and Stacey F. Bent 9.1 Concept of Area-Selective Atomic Layer Deposition Change of Surface Properties Self-Assembled Monolayers Polymers Inherent Surface Reactivity Vapor-Phase Deposition Patteming Surface Modification without Patterning Microcontact Printing Photolithography Nanotemplating Scanning Probe Microscopy 213
6 Contents I XIII 9.4 Applications of AS-ALD Current Challenges 216 References Coatings on High Aspect Ratio Structures 227 Jeffrey W. Elam 10.1 Introduction Models and Analysis Analytical Method Monte Carlo Simulations Characterization Methods for ALD Coatings in High Aspect Ratio Structures Examples of ALD in High Aspect Ratio Structures Aspect Ratio of Trenches MEMS Aspect Ratio of Anodic Aluminum Oxide Inverse Opals Aspect Ratio of 1000 and Beyond Silica gel Aerogels Nonideal Behavior during ALD in High Aspect Ratios Conclusions and Future Outlook 245 References Coatings of Nanoparticies and Nanowires 251 Hongfin Fan and Kornelius Nielsch 11.1 ALD on Nanoparticles Vapor Liquid Solid Growth of Nanowires by ALD Atomic Layer Epitaxy on Nanowires ALD on Semiconductor NWs for Surface Passivation ALD-Assisted Formation of Nanopeapods Photocorrosion of Semiconductor Nanowires Capped by ALD Shell Interface Reaction of Nanowires with ALD Shell ZnO Al ZnO Ti Zn0-5i Mg0 Al ALD ZnO on NWs/Tubes as Seed Layer for Growth of Hyperbranch Conclusions 267 References 268
7 XIVI Contents 12 Atomic Layer Deposition on Soft Materials 271 Gregor), N. Parsons 12.1 Introduction ALD on Polymers for Passivation, Encapsulation, and Surface Modification ALD for Bulk Modification of Natural and Synthetic Polymers and Molecules ALD for Polymer Sacrificial Templating: Membranes, Fibers, and Biological and Optical Structures ALD Nudeation on Pattemed and Planar SAMs and Surface Oligomers Reactions during Al203 ALD on Representative Polymer Materials Al203 ALD on Polypropylene Al203 ALD on Polyvinyl Alcohol Al203 ALD on Polyamide Mechanisms for Al203 ALD on PP, PVA, and PA Summary 291 References Application of ALD to Biomaterials and Biocompatible Coatings 301 Mato Knez 13.1 Application of ALD to Biomaterials Protein-Based Nanostructures Tobacco Mosaic Virus Ferritin and Apoferritin S-Layers Peptide Assemblies Natural Fibers DNA Collagen Spider Silk Cellulose Fibers from Paper Cotton Fibers Sea Mouse Bristles Patterned Biomaterials Butterfly Wings Fly Eyes Legumes Water Strider Legs Biomineralized Structures Biocompatible Coatings Biocompatibility of Alumina Biocompatibility of Titania Biocompatibility of Hydroxyapatite 318
8 Biocompatibility of Pt-, Ti02-, or ZnO-Coated Porous Alumina Biocompatibility of TiN-Coated Cotton Fabrics Summary 320 References 321 Contents I XV 14 Coating of Carbon Nanotubes 327 Catherine Marichy, Andrea Pucci, Marc-Georg Willinger, and Nicola Pinna 14.1 Introduction Purification and Surface Functionalization of Carbon Nanotubes Decoration/Coating of Carbon Nanotubes by Solution Routes In Situ Coating Attachment of Preformed Nanobuilding Blocks Decoration/Coating of Carbon Nanotubes by Gas-Phase Techniques Atomic Layer Deposition on Carbon Nanotubes Coating of Large Quantity of CNTs by ALD ALD Coating of Other sp2-bonded Carbon Materials Conclusions 340 References Inverse Opal Photonics 345 Davy P. Gaillot and Christopherf Summers 15.1 Introduction and Background Properties of Three-Dimensional Photonic Band Structures Synthetic Opals and Inverse Opals Large-Pore and Non-Close-Packed Inverse Opals Experimental Studies Inversion of Opal Structures Atomic Layer Deposition Multilayer Fabrication Steps for Advanced Photonic Crystals Tunable PC Structures Summary 369 References Nanolaminates 377 Adriana V. Szeghalmi and Mato Knez 16.1 Introduction Optical Applications Interference Optics Diffractive Optical Elements Thin Film Encapsulation Applications in Electronics Dielectric Properties of Inorganic Nanolaminates Dielectric Properties of Organic Inorganic Nanolaminates 390
9 XVI Contents Applications for Memories Copper Electroplating Applications Solid Oxide Fuel Cells Complex Nanostructures Summary 395 References Challenges in Atomic Layer Deposition 401 Markku Leskelä 17.1 Introduction Metals Nonmetal Elements Binary Compounds Oxides Nitrides Other III V Compounds Carbides Silicides and Borides Halides Compounds with Oxoanions Ternary and Quaternary Compounds Nucleation Conclusions 416 References 417 Index 423
SELF-ASSEMBLY AND NANOTECHNOLOGY A Force Balance Approach
SELF-ASSEMBLY AND NANOTECHNOLOGY A Force Balance Approach Yoon S. Lee Scientific Information Analyst Chemical Abstracts Service A Division of the American Chemical Society Columbus, Ohio WILEY A JOHN WILEY
More informationContents. Preface XI List of Contributors XIII
V Contents Preface XI List of Contributors XIII 1 Introduction to Nanoparticles 1 1.1 General Introduction to Nanoparticles 1 1.2 Methods of Nanoparticle Synthesis 8 1.3 Surface Plasmon Resonance and Coloring
More informationMarkus Niederberger Max Planck Institute of Colloids and Interfaces, Potsdam, Germany.
Markus Niederberger Max Planck Institute of Colloids and Interfaces, Potsdam, Germany Markus.Niederberger@mpikg-golm.mpg.de Outline of the Lecture Self-Assembly of Nanocrystals to Superstructures What
More informationChapter 12 - Modern Materials
Chapter 12 - Modern Materials 12.1 Semiconductors Inorganic compounds that semiconduct tend to have chemical formulas related to Si and Ge valence electron count of four. Semiconductor conductivity can
More informationComplex Nanostructures by Atomic Layer Deposition. Kornelius Nielsch.
Complex Nanostructures by Atomic Layer Deposition Kornelius Nielsch Institute of Applied Physics, University of Hamburg (Germany) knielsch@physnet.uni-hamburg.de Outline History and Principle Ferromagnetic
More informationSolutions for Assignment-8
Solutions for Assignment-8 Q1. The process of adding impurities to a pure semiconductor is called: [1] (a) Mixing (b) Doping (c) Diffusing (d) None of the above In semiconductor production, doping intentionally
More informationAppendix A. Assessments Points 4 Mode of Assessments. New Course Code and Title Course Coordinator. MS741M Nanomaterials
New Course Code and Title Course Coordinator Details of Course MS741M Nanomaterials AP Jason Xu (Course Coordinator) AP Xue Can Rationale for introducing this course This course will cover the subject
More informationPhysics and Chemistry of Interfaces
Hans Jürgen Butt, Karlheinz Graf, and Michael Kappl Physics and Chemistry of Interfaces Second, Revised and Enlarged Edition WILEY- VCH WILEY-VCH Verlag GmbH & Co. KGaA Contents Preface XI 1 Introduction
More informationNANOMEDICINE. WILEY A John Wiley and Sons, Ltd., Publication DESIGN AND APPLICATIONS OF MAGNETIC NANOMATERIALS, NANOSENSORS AND NANOSYSTEMS
NANOMEDICINE DESIGN AND APPLICATIONS OF MAGNETIC NANOMATERIALS, NANOSENSORS AND NANOSYSTEMS Vijay K. Varadan Linfeng Chen Jining Xie WILEY A John Wiley and Sons, Ltd., Publication Preface About the Authors
More informationComprehensive Handbook of Calorimetry and Thermal Analysis
Comprehensive Handbook of Calorimetry and Thermal Analysis Michio Sorai Editor-in-Chief The Japan Society of Calorimetry and Thermal Analysis John Wiley & Sons, Ltd Contents Preface xi Acknowledgements
More informationSeminars in Nanosystems - I
Seminars in Nanosystems - I Winter Semester 2011/2012 Dr. Emanuela Margapoti Emanuela.Margapoti@wsi.tum.de Dr. Gregor Koblmüller Gregor.Koblmueller@wsi.tum.de Seminar Room at ZNN 1 floor Topics of the
More informationNanotechnology Fabrication Methods.
Nanotechnology Fabrication Methods. 10 / 05 / 2016 1 Summary: 1.Introduction to Nanotechnology:...3 2.Nanotechnology Fabrication Methods:...5 2.1.Top-down Methods:...7 2.2.Bottom-up Methods:...16 3.Conclusions:...19
More informationJOHN G. EKERDT RESEARCH FOCUS
JOHN G. EKERDT RESEARCH FOCUS We study the surface, growth and materials chemistry of metal, dielectric, ferroelectric, and polymer thin films. We seek to understand and describe nucleation and growth
More informationGraphene Fundamentals and Emergent Applications
Graphene Fundamentals and Emergent Applications Jamie H. Warner Department of Materials University of Oxford Oxford, UK Franziska Schaffel Department of Materials University of Oxford Oxford, UK Alicja
More informationState of São Paulo. Brasil. Localization. Santo André
Brasil State of São Paulo Localization Santo André The Group www.crespilho.com Frank N. Crespilho Pablo R. S. Abdias Group Leader Synthesis of nanostructured materials using polyelectrolytes Andressa R.
More informationHalbleiter. Prof. Yong Lei. Prof. Thomas Hannappel.
Halbleiter Prof. Yong Lei Prof. Thomas Hannappel yong.lei@tu-ilemnau.de thomas.hannappel@tu-ilmenau.de Important Events in Semiconductors History 1833 Michael Faraday discovered temperature-dependent conductivity
More informationReport on Preparation of Nanotemplates for mab Crystallization
Deliverable number D2.1 Due date 30/09/2017 Deliverable title Report on Preparation of Nanotemplates for mab Crystallization Issue date 21/09/2017 WP number WP2 Author(s) J. Heng, W. Chen, H. Yang Lead
More informationnot to be confused with using the materials to template nanostructures
Zeolites as Templates: continued Synthesis: Most zeolite syntheses are performed by using template-synthesis not to be confused with using the materials to template nanostructures templates are often surfactants
More informationmaterials, devices and systems through manipulation of matter at nanometer scale and exploitation of novel phenomena which arise because of the
Nanotechnology is the creation of USEFUL/FUNCTIONAL materials, devices and systems through manipulation of matter at nanometer scale and exploitation of novel phenomena which arise because of the nanometer
More informationScanning Tunneling Microscopy and its Application
Chunli Bai Scanning Tunneling Microscopy and its Application With 181 Figures SHANGHAI SCIENTIFIC & TECHNICAL PUBLISHERS Jpl Springer Contents 1. Introduction 1 1.1 Advantages of STM Compared with Other
More informationFabrication Methods: Chapter 4. Often two methods are typical. Top Down Bottom up. Begins with atoms or molecules. Begins with bulk materials
Fabrication Methods: Chapter 4 Often two methods are typical Top Down Bottom up Begins with bulk materials Begins with atoms or molecules Reduced in size to nano By thermal, physical Chemical, electrochemical
More informationNanoparticles, nanorods, nanowires
Nanoparticles, nanorods, nanowires Nanoparticles, nanocrystals, nanospheres, quantum dots, etc. Drugs, proteins, etc. Nanorods, nanowires. Optical and electronic properties. Organization using biomolecules.
More informationNANOSTRUCTURES. Jaime Castillo-Leon Luigi Sasso Winnie E.Svendsen. Pan Stanford. Publishing. edited by ADVANCES AND APPLICATIONS IN NANOBIOTECHNOLOGY
edited by Jaime Castillo-Leon Luigi Sasso Winnie E.Svendsen Pmmim, EPTIDE «m> hhiiiuj nn a ywrnnma^ NANOSTRUCTURES ADVANCES AND APPLICATIONS IN NANOBIOTECHNOLOGY taim m Pan Stanford Publishing 0=C< Preface
More informationContents. Preface to the first edition
Contents List of authors Preface to the first edition Introduction x xi xiii 1 The nanotechnology revolution 1 1.1 From micro- to nanoelectronics 2 1.2 From the macroscopic to the nanoscopic world 4 1.3
More informationThe goal of this project is to enhance the power density and lowtemperature efficiency of solid oxide fuel cells (SOFC) manufactured by atomic layer
Stanford University Michael Shandalov1, Shriram Ramanathan2, Changhyun Ko2 and Paul McIntyre1 1Department of Materials Science and Engineering, Stanford University 2Division of Engineering and Applied
More informationc carbon aerogel TEM images 243 carbon nanotube (CNT) 307, 327, 328
j423 Index a AAO. see anodic aluminum oxide (AAO) ABC MLD system 92 mass gain from QCM measurements 92, 93 reaction sequence for growth of alumina siloxane film using 100 TMA diffusion 92 use of heterobifunctional
More informationInorganic compounds that semiconduct tend to have an average of 4 valence electrons, and their conductivity may be increased by doping.
Chapter 12 Modern Materials 12.1 Semiconductors Inorganic compounds that semiconduct tend to have an average of 4 valence electrons, and their conductivity may be increased by doping. Doping yields different
More informationNanostructures. Nanomaterials Synthesis, Properties, and Applications
Nanostructures and Nanomaterials Synthesis, Properties, and Applications 2nd Edition World Scientific Series in Nanoscience and Nanotechnology Series Editor: Mark Reed (Yale University) Vol. 1 Vol. 2 Molecular
More informationThere's Plenty of Room at the Bottom
There's Plenty of Room at the Bottom 12/29/1959 Feynman asked why not put the entire Encyclopedia Britannica (24 volumes) on a pin head (requires atomic scale recording). He proposed to use electron microscope
More informationNanostructure. Materials Growth Characterization Fabrication. More see Waser, chapter 2
Nanostructure Materials Growth Characterization Fabrication More see Waser, chapter 2 Materials growth - deposition deposition gas solid Physical Vapor Deposition Chemical Vapor Deposition Physical Vapor
More informationMURI: Nano-Engineered Energetic. Materials
MURI: Nano-Engineered Energetic Ralph G. Nuzzo Gregory S. Girolami Anatoly I. Frenkel Ray Twesten Materials The Frederick Seitz Materials Research Laboratory And School of Chemical Sciences University
More informationNanoporous Gold From an Ancient Technology to a
Nanoporous Gold From an Ancient Technology to a High-Tech Material Edited by Arne Wittstock Nanoscale Synthesis and Characterization Laboratory, Livermore, CA, USA; Institute of Applied and Physical Chemistry,
More informationP. M. Ajayan, L. S. Schadler, P. V. Braun Nanocomposite Science and Technology
P. M. Ajayan, L. S. Schadler, P. V. Braun Nanocomposite Science and Technology Nanocomposite Science and Technology. Edited by P.M. Ajayan, L.S. Schadler, P.V. Braun Copyright ª 2003 WILEY-VCH Verlag GmbH
More informationINORGANIC SUPPORTED POLYMERIC CATALYSTS INORGANIC SUPPORTED POLYMERIC CATALYSTS PDF ELENA GROPPO UNIVERSITY OF TORINO - ACADEMIA.
PDF ELENA GROPPO UNIVERSITY OF TORINO - ACADEMIA.EDU CATALYSIS - WIKIPEDIA 1 / 5 2 / 5 3 / 5 inorganic supported polymeric catalysts pdf A new heterogeneous catalyst for CO(2) activation was identified
More informationUsing the surface spontaneous depolarization field of ferroelectrics to direct the assembly of virus particles
Appl. Phys. Lett. Vol 85, Issue 16, 3537 (2004) Using the surface spontaneous depolarization field of ferroelectrics to direct the assembly of virus particles Working Title: Directed assembly of biological
More informationThe first three categories are considered a bottom-up approach while lithography is a topdown
Nanowires and Nanorods One-dimensional structures have been called in different ways: nanowires, nanorod, fibers of fibrils, whiskers, etc. The common characteristic of these structures is that all they
More informationULTRATHIN ORGANIC FILMS
An Introduction to ULTRATHIN ORGANIC FILMS From Langmuir-Blodgett to Self-Assembly Abraham Ulman Corporate Research Laboratories Eastman Kodak Company Rochester, New York Academic Press San Diego New York
More informationPrinting Silver Nanogrids on Glass: A Hands-on Investigation of Transparent Conductive Electrodes
Printing Silver Nanogrids on Glass: A Hands-on Investigation of Transparent Conductive Electrodes Silver Nanogrid/Nanowire Importance The next generation of optoelectronic devices requires transparent
More informationContents. 1 Matter: Its Properties and Measurement 1. 2 Atoms and the Atomic Theory Chemical Compounds Chemical Reactions 111
Ed: Pls provide art About the Authors Preface xvii xvi 1 Matter: Its Properties and Measurement 1 1-1 The Scientific Method 2 1-2 Properties of Matter 4 1-3 Classification of Matter 5 1-4 Measurement of
More informationJOHN G. EKERDT RESEARCH FOCUS
JOHN G. EKERDT RESEARCH FOCUS We study the surface, growth and materials chemistry of ultrathin metal and dielectric films. Our work seeks to: 1) develop and understand the reactions and chemistry that
More informationNanowires and nanorods
Nanowires and nanorods One-dimensional structures have been called in different ways: nanowires, nanorod, fibers of fibrils, whiskers, etc. These structures have a nanometer size in one of the dimensions,
More informationNanomaterials and their Optical Applications
Nanomaterials and their Optical Applications Winter Semester 2013 Lecture 02 rachel.grange@uni-jena.de http://www.iap.uni-jena.de/multiphoton Lecture 2: outline 2 Introduction to Nanophotonics Theoretical
More informationOverview of Nanotechnology Applications and Relevant Intellectual Property NANO POWER PATENTS
Overview of Nanotechnology Applications and Relevant Intellectual Property NANO POWER PATENTS Jeffrey H. Rosedale, Ph.D., J.D. Registered Patent Attorney Partner, Woodcock Washburn, LLP ~ 9000 Issued U.S.
More informationNEM Relays Using 2-Dimensional Nanomaterials for Low Energy Contacts
NEM Relays Using 2-Dimensional Nanomaterials for Low Energy Contacts Seunghyun Lee, Ji Cao 10/29/2013 A Science & Technology Professor H. -S. Philip Wong Electrical Engineering, Stanford University Center
More informationTop down and bottom up fabrication
Lecture 24 Top down and bottom up fabrication Lithography ( lithos stone / graphein to write) City of words lithograph h (Vito Acconci, 1999) 1930 s lithography press Photolithography d 2( NA) NA=numerical
More informationAlain Dufresne. Nanocellulose. From Nature to High Performance Tailored Materials OE GRUYTER
Alain Dufresne Nanocellulose From Nature to High Performance Tailored Materials OE GRUYTER Contents Preface - vii 1 Cellulose and potential reinforcement-1 1.1 Polysaccharides-1 1.2 Chemical structure
More informationPlasma Deposition (Overview) Lecture 1
Plasma Deposition (Overview) Lecture 1 Material Processes Plasma Processing Plasma-assisted Deposition Implantation Surface Modification Development of Plasma-based processing Microelectronics needs (fabrication
More informationIntroduction. Photoresist : Type: Structure:
Photoresist SEM images of the morphologies of meso structures and nanopatterns on (a) a positively nanopatterned silicon mold, and (b) a negatively nanopatterned silicon mold. Introduction Photoresist
More informationContents. Foreword by Darrell H. Reneker
Table of Foreword by Darrell H. Reneker Preface page xi xiii 1 Introduction 1 1.1 How big is a nanometer? 1 1.2 What is nanotechnology? 1 1.3 Historical development of nanotechnology 2 1.4 Classification
More informationINTRODUCTION TO ORGANIC SEMICONDUCTOR HETEROJUNCTIONS
INTRODUCTION TO ORGANIC SEMICONDUCTOR HETEROJUNCTIONS Donghang Yan Changchun Institute of Applied Chemistry, Chinese Academy of Sciences, China Haibo Wang Changchun Institute of Applied Chemistry, Chinese
More informationIn the name of Allah
In the name of Allah Nano chemistry- 4 th stage Lecture No. 1 History of nanotechnology 16-10-2016 Assistance prof. Dr. Luma Majeed Ahmed lumamajeed2013@gmail.com, luma.ahmed@uokerbala.edu.iq Nano chemistry-4
More information2.3 Modeling Interatomic Interactions Pairwise Potentials Many-Body Potentials Studying Biomolecules: The Force
Contents 1 Introduction to Computational Meso-Bio-Nano (MBN) Science and MBN EXPLORER.... 1 1.1 Meso-Bio-Nano Science: A Novel Field of Interdisciplinary Research.... 1 1.1.1 Structure and Dynamics of
More informationALD & ALE Tutorial Speakers and Schedule
ALD & ALE Tutorial Speakers and Schedule Sunday, July 29, 2018 1:00-1:05 Tutorial Welcome 1:05-1:50 1:50-2:35 2:35-3:20 Challenges of ALD Applications in Memory Semiconductor Devices, Choon Hwan Kim (SK
More informationNanotechnology. G. Schmid, H. Krug, R. Waser, V. Vogel, H. Fuchs, M. Grätzel, K. Kalyanasundaram, L Chi (Eds.) Volume 2: Environmental Aspects
G. Schmid, H. Krug, R. Waser, V. Vogel, H. Fuchs, M. Grätzel, K. Kalyanasundaram, L Chi (Eds.) Nanotechnology Volume 2: Environmental Aspects Edited by Harald Krug WILEY- VCH WILEY-VCH Verlag GmbH & Co.
More informationMolecular Sieves Principles of Synthesis and Identification
Molecular Sieves Principles of Synthesis and Identification Second Edition R. SZOSTAK Clark Atlanta University Atlanta, GA USA V D BLACKIE ACADEMIC & PROFESSIONAL An Imprint of Chapman & Hail London Weinheim
More informationFabrication at the nanoscale for nanophotonics
Fabrication at the nanoscale for nanophotonics Ilya Sychugov, KTH Materials Physics, Kista silicon nanocrystal by electron beam induced deposition lithography Outline of basic nanofabrication methods Devices
More informationUltra High Efficiency Thermo-Photovoltaic Solar Cells Using Metallic Photonic Crystals As Intermediate Absorber and Emitter
Ultra High Efficiency Thermo-Photovoltaic Solar Cells Using Metallic Photonic Crystals As Intermediate Absorber and Emitter A. Investigators Shanhui Fan, Associate Professor, Electrical Engineering, Stanford
More informationOPTI510R: Photonics. Khanh Kieu College of Optical Sciences, University of Arizona Meinel building R.626
OPTI510R: Photonics Khanh Kieu College of Optical Sciences, University of Arizona kkieu@optics.arizona.edu Meinel building R.626 Announcements HW#3 is assigned due Feb. 20 st Mid-term exam Feb 27, 2PM
More informationTransparent TiO 2 nanotube/nanowire arrays on TCO coated glass substrates: Synthesis and application to solar energy conversion
Transparent TiO 2 nanotube/nanowire arrays on TCO coated glass substrates: Synthesis and application to solar energy conversion Craig A. Grimes Department of Electrical Engineering Center for Solar Nanomaterials
More informationLAYER BY LAYER (LbL) SELF-ASSEMBLY STRATEGY AND ITS APPLICATIONS
LAYER BY LAYER (LbL) SELF-ASSEMBLY STRATEGY AND ITS APPLICATIONS A. Z. Cheng 1, R. Swaminathan 2 1 Nanotechnology Engineering, University of Waterloo, azcheng@uwaterloo.ca; 2 Nanotechnology Engineering,
More informationContents. Preface XI Abbreviation XV List of Contributors XIX
V Preface XI Abbreviation XV List of Contributors XIX 1 The Chemistry of Gold 1 M. Concepción Gimeno 1.1 Introduction 1 1.1.1 History 1 1.1.2 Chemical and Physical Properties 2 1.1.3 Theoretical Considerations
More informationReaction Mechanism of Area-Selective Atomic
Supporting Information Reaction Mechanism of Area-Selective Atomic Layer Deposition for Al 2 O 3 Nanopatterns Seunggi Seo 1, Il-Kwon Oh 1, Byung Chul Yeo 1, 2, Sang Soo Han 2, Chang Mo Yoon 1, JOON YOUNG
More informationm WILEY- ADSORBENTS: FUNDAMENTALS AND APPLICATIONS Ralph T. Yang Dwight F. Benton Professor of Chemical Engineering University of Michigan
ADSORBENTS: FUNDAMENTALS AND APPLICATIONS Ralph T. Yang Dwight F. Benton Professor of Chemical Engineering University of Michigan m WILEY- INTERSCIENCE A JOHN WILEY & SONS, INC., PUBLICATION Preface xi
More informationThe Program Committee of the 2013 Annual Joint Symposium of the Florida Chapter of the American Vacuum Society, and Florida Society for Microscopy
Florida Chapter American Vacuum Society, Grand Prize in Computational and Experimental Materials Science Alamgir Kabir MAGNETIC PROPERTIES OF Fe AND Fe-Pt NANOPARTICLES: APPLICATION OF THE DFT- INHOMOGENEOUS-DMFT
More informationContents. Zusammenfassung Abbreviations and Acronyms Notations for Precursor Molecules
Contents Abstract Zusammenfassung Abbreviations and Acronyms Notations for Precursor Molecules xvi xviii xx xxi Chapter 1 Introduction 1 1.1 General aspect of group-iii nitrides and their application 3
More informationLecture 4. Conductance sensors. ChemFET. Electrochemical Impedance Spectroscopy. py Practical consideration for electrochemical biosensors.
Lecture 4 Conductance sensors. ChemFET. Electrochemical Impedance Spectroscopy. py Practical consideration for electrochemical biosensors. Conductivity I V = I R=, L - conductance L= κa/, l Λ= κ /[ C]
More informationFabrication and Characterization of Metal and Metal Oxide Nanostructures Grown by Metal Displacement Deposition into Anodic Alumina Membranes
Fabrication and Characterization of Metal and Metal Oxide Nanostructures Grown by Metal Displacement Deposition into Anodic Alumina Membranes Rosalinda Inguanta, Germano Ferrara, Salvatore Piazza, Carmelo
More informationREFRACTORY METAL OXIDES: FABRICATION OF NANOSTRUCTURES, PROPERTIES AND APPLICATIONS
REFRACTORY METAL OXIDES: FABRICATION OF NANOSTRUCTURES, PROPERTIES AND APPLICATIONS S.K. Lazarouk, D.A. Sasinovich BELARUSIAN STATE UNIVERSITY OF INFORMATICS AND RADIOELECTRONICS Outline: -- experimental
More informationPolymers and Nanomaterials from Liquid-Liquid Interfaces: Synthesis, Self-Organisation and Applications
Preface My interest in liquid liquid interfaces, the reactions occurring at them and through them, as well as their physical properties and potential applications was initiated during my early days of
More informationI. NANOFABRICATION O AND CHARACTERIZATION Chap. 2 : Self-Assembly
I. Nanofabrication and Characterization : TOC I. NANOFABRICATION O AND CHARACTERIZATION Chap. 1 : Nanolithography Chap. 2 : Self-Assembly Chap. 3 : Scanning Probe Microscopy Nanoscale fabrication requirements
More informationDip-Pen Lithography 1
Dip-Pen Lithography 1 A Brief History of Writing Instruments From Quills and Bamboos to fountain pens and brushes M. Klein and Henry W. Wynne received US patent #68445 in 1867 for an ink chamber and delivery
More informationElectrophoretic Deposition. - process in which particles, suspended in a liquid medium, migrate in an electric field and deposit on an electrode
Electrophoretic Deposition - process in which particles, suspended in a liquid medium, migrate in an electric field and deposit on an electrode no redox differs from electrolytic in several ways deposit
More informationMulti-Layer Coating of Ultrathin Polymer Films on Nanoparticles of Alumina by a Plasma Treatment
Mat. Res. Soc. Symp. Vol. 635 2001 Materials Research Society Multi-Layer Coating of Ultrathin Polymer Films on Nanoparticles of Alumina by a Plasma Treatment Donglu Shi, Zhou Yu, S. X. Wang 1, Wim J.
More informationCH676 Physical Chemistry: Principles and Applications. CH676 Physical Chemistry: Principles and Applications
CH676 Physical Chemistry: Principles and Applications Crystal Structure and Chemistry Synthesis of Tetrahexahedral Platinum Nanocrystals with High-Index Facets and High Electro-Oxidation Activity Na Tian
More informationALD Nucleation and Area-Selective Deposition
ALD Nucleation and Area-Selective Deposition Prof Gregory N. Parsons Department of Chemical and Biomolecular Engineering North Carolina State University Raleigh North Carolina USA 1 Outline 1. Nucleation
More informationScienza e Tecnologia dei Materiali Ceramici. Modulo 2: Materiali Nanostrutturati
Università degli Studi di Trieste Dipartimento di Ingegneria e Architettura A.A. 2016-2017 Scienza e Tecnologia dei Materiali Ceramici Modulo 2: Materiali Nanostrutturati - Lezione 5 - Vanni Lughi vlughi@units.it
More informationSupramolecular Catalysis
Supramolecular Catalysis Edited by Piet W. N. M. van Leeuwen WILEY- VCH WILEY-VCH Verlag GmbH & Co. KGaA Contents Preface XI List of Authors XIII 1 Introduction to Supramolecular Catalysis 1 Pablo Ballester
More informationApplications of Quantum Dots to Biosensing
Applications of Quantum Dots to Biosensing CHEM 681 Student Seminar Series March 17 th, 2003 Heechang Ye Advisor : Dr. Richard M. Crooks Introduction Quantum dots (QDs) are semiconductor particles that
More informationSEPARATION BY BARRIER
SEPARATION BY BARRIER SEPARATION BY BARRIER Phase 1 Feed Barrier Phase 2 Separation by barrier uses a barrier which restricts and/or enhances the movement of certain chemical species with respect to other
More informationOrganic Molecular Solids
Markus Schwoerer, Hans Christoph Wolf Organic Molecular Solids BICENTENNIAL BICENTENNIAL WILEY-VCH Verlag GmbH & Co. KGaA VII Contents 1 Introduction 1 1.1 What are Organic Solids? 1 1.2 What are the Special
More informationquantum dots, metallic nanoparticles, and lanthanide ions doped upconversion
Chapter 1 Introduction 1.1 Background Nanostructured materials have significantly different characteristics from their bulk counterparts. 1 Inorganic nanoparticles such as semiconductor quantum dots, metallic
More informationSpecial Properties of Au Nanoparticles
Special Properties of Au Nanoparticles Maryam Ebrahimi Chem 7500/750 March 28 th, 2007 1 Outline Introduction The importance of unexpected electronic, geometric, and chemical properties of nanoparticles
More informationThe Materials Science of Semiconductors
The Materials Science of Semiconductors Angus Rockett The Materials Science of Semiconductors Angus Rockett University of Illinois 201a Materials Science and Engineering Building 1304 West Green Street
More informationLiquid Chromatography
Liquid Chromatography 1. Introduction and Column Packing Material 2. Retention Mechanisms in Liquid Chromatography 3. Method Development 4. Column Preparation 5. General Instrumental aspects 6. Detectors
More informationCHAPTER EIGHT: PHOTONIC CRYSTALS: MATERIALS, END USES, AND MARKETS, MATERIALS PROPERTIES... 78
CHAPTER ONE: INTRODUCTION... 1 STUDY BACKGROUND... 1 STUDY GOALS AND OBJECTIVES... 1 INTENDED AUDIENCE... 2 SCOPE AND FORMAT... 2 INFORMATION SOURCES AND METHODOLOGY... 3 ANALYST CREDENTIALS... 4 RELATED
More informationZinc Catalysis: Applications In Organic Synthesis READ ONLINE
Zinc Catalysis: Applications In Organic Synthesis READ ONLINE If looking for the book Zinc Catalysis: Applications in Organic Synthesis in pdf format, then you have come on to the faithful website. We
More informationOPTICAL PROPERTIES AND SPECTROSCOPY OF NANOAAATERIALS. Jin Zhong Zhang. World Scientific TECHNISCHE INFORMATIONSBIBLIOTHEK
OPTICAL PROPERTIES AND SPECTROSCOPY OF NANOAAATERIALS Jin Zhong Zhang University of California, Santa Cruz, USA TECHNISCHE INFORMATIONSBIBLIOTHEK Y World Scientific NEW JERSEY. t'on.don SINGAPORE «'BEIJING
More informationSimulating mechanism at the atomic-scale for atomically precise deposition and etching
SEMICON TechArena session on Advanced Materials 14 November 2017 Simulating mechanism at the atomic-scale for atomically precise deposition and etching Simon D. Elliott & Ekaterina Filatova simon.elliott@tyndall.ie
More informationCARBON. Electrochemical ond Physicochemicol Properties KIM KINOSHITA. Lawrence Berkeley Laboratory Berkeley, California
CARBON Electrochemical ond Physicochemicol Properties KIM KINOSHITA Lawrence Berkeley Laboratory Berkeley, California A Wiley-Interscience Publicotion JOHN WILEY & SONS New York / Chichester / Brisbane
More informationSupporting Information
Copyright WILEY-VCH Verlag GmbH & Co. KGaA, 69469 Weinheim, Germany, 2016. Supporting Information for Adv. Mater., DOI: 10.1002/adma.201604015 High Performance Graphene/Ni 2 P Hybrid Anodes for Lithium
More informationModel Solutions Spring 2003
Exam I BE.462J/3.962J Model Solutions Spring 2003 (60 points total) 1. (5 points) Explain the following observation: autocatalysis generally has a smaller influence on the degradation rate of surface-eroding
More informationNanostructured Materials and New Processing Strategies Through Polymer Chemistry
Nanostructured Materials and New Processing Strategies Through Polymer Chemistry Professor Christopher J. Ellison McKetta Department of Chemical Engineering and Texas Materials Institute The University
More informationE SC 412 Nanotechnology: Materials, Infrastructure, and Safety Wook Jun Nam
E SC 412 Nanotechnology: Materials, Infrastructure, and Safety Wook Jun Nam Lecture 17 Outline Colloids and Colloidal Chemistry What is Colloids? Properties of Colloids Examples of Colloids Synthesis of
More informationHigh-density data storage: principle
High-density data storage: principle Current approach High density 1 bit = many domains Information storage driven by domain wall shifts 1 bit = 1 magnetic nanoobject Single-domain needed Single easy axis
More informationJay A. Switzer Summary of Research
Jay A. Switzer Summary of Research I have dedicated most of my career to research on the electrodeposition of nanostructured metal oxide ceramics. Although the electroplating of metal films is a mature
More informationChemistry. Physical Organic Inorganic. Chemistry. Crystallography. X-ray. Bioinorganic Solid State. Theory. Group. Polymers.
Chemistry Physical Organic Inorganic Organometallics, Metal Complexes Clusters, Cages Bioinorganic Solid State Chemistry Group Theory X-ray Crystallography Polymers What is Solid State Chemistry? What
More informationToward Modular Molecular Composite Nanosystems
Toward Modular Molecular Composite Nanosystems K. Eric Drexler, PhD U.C. Berkeley 26 April 2009 Intended take-away messages: Paths are now open toward complex, self-assembled, heterogenous nanosystems
More informationKavli Workshop for Journalists. June 13th, CNF Cleanroom Activities
Kavli Workshop for Journalists June 13th, 2007 CNF Cleanroom Activities Seeing nm-sized Objects with an SEM Lab experience: Scanning Electron Microscopy Equipment: Zeiss Supra 55VP Scanning electron microscopes
More informationPrevious Faraday Discussions
Previous Faraday Discussions All previous volumes can be viewed at Faraday Discussions from 2011 onwards are listed at Faraday Discussions 2000-2010 147: Chemistry of the Planets Introductory Lecture:
More informationMonolayers. Factors affecting the adsorption from solution. Adsorption of amphiphilic molecules on solid support
Monolayers Adsorption as process Adsorption of gases on solids Adsorption of solutions on solids Factors affecting the adsorption from solution Adsorption of amphiphilic molecules on solid support Adsorption
More information