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1 Shinsuke Fujioka, Teruyuki Ugomori, Kensuke Yoshida, Chaogang Li, Atsushi Sunahara A, Katsunobu Nishihara, Nozomi Tanaka, Hiroaki Nishimura Institute of Laser Engineering, Osaka University A Institute for Laser Technology
2 Radiation hydrodynamic simulation shows that only 50 70% of an incident CO 2 laser energy is absorbed even in a high-ce (3 4%) EUV source plasma. Laser absorption must increase for >6% Non-absorbed laser energy will be measured with an integral sphere to validate the calculation by a radiation hydrodynamic simulation. Angular distribution of non-absorbed CO 2 laser energy will be measured to identify the physical mechanism of laser absorption/scattering in a plasma. Measurement of absorbed CO 2 laser energy in a pre-expanded droplet To validate enhancement of laser absorption in a long-scale rarefied plasma. Control of droplet expansion by changing laser pulse duration, wavelength, and irradiation geometry. Measurement of density profile of a expanded droplet with CO 2 laser shadowgraph. Characterization of high-ce EUV source plasma Measurement of density and temperature of high-ce EUV source plasma for benchmarking radiation-hydrodynamic code.
3 !Facility upgrade Pulse CO2 laser (sub-j/100 ns) and pulse OPO laser (2 µmwavelength) are now installed.! Pulse CO2 laser! GAM! Wavelength:!!9.3 µm/10.6 µm!!!!! (changeable)! Energy/Duration: 650 mj/100 ns! Reputition:!single shot ~ 100 Hz! Near field pattern is controllable.! Pulse OPO laser! Coherent! Wavelength!0.7 ~ 2.5 µm!!!(tunable)! Energy/Duration 25 mj/4 µm! Repeation!single shot ~ 10 Hz!
4 ! Absorbed energy measurement Only 40 70% of the incident CO 2 laser energy is absorbed even in a high-ce EUV source plasma. Relation between absorbed energy fraction and EUV-CE! sim # Condition Laser abs. EUV CE(%) (%) 56 2E+10W/cm Confidential 2E10 W/cm2 X E10 W/cm2 X E10 W/cm2 (40-80) X E10 W/cm2 (40-80) X E10W/cm2 (40-80) X Do we have a margin enough for 6%?
5 ! Absorbed energy measurement Absorption laser energy will be measured! with an integration sphere for CO 2 laser.! Absorption fraction measurement with an Integration sphere! Window" for a spectrometer Inner surface:" pearskin finished + gold coating Scattered light Incident laser Nano-volt meter Window" for an EUV calorimeter Thermopile sensor EUV-CE and absorption fraction can be measured simultaneously.
6 ! Absorbed energy measurement Angular distribution of scattered CO 2 laser will be measured with themopile sensor array.! Themopile sensor! Angular distribution measurement! with themopile sensor array! Thermopile 60, 90, 180 deg. Scattered laser Target Piled thermocouple device" Sensitive only for µm Incident laser Angular distribution is essential to identify scatter mechanism.
7 ! Optimization of droplet explosion Density profile of CO 2 laser absorption region can be probed with a CO 2 laser shadowgraph.! Visible light 1.2 kev x-ray Univ.! Pyrocam detector will be used for CO 2 shadowgraphy. "
8 CE, absorption, density, and temperature will be measured simultaneously to establish guideline to >6%.! 400 µm Stalk Before After Plasma 200 µm Laser Laser shadowgraph" Laser absorption" ne, Te Thomson scattering" Ti = Te, ni EUV spectrometer (TG/GIS)" EUV image camera" EUV calorimeter
9 Items 13 Q2 13 Q3 13 Q4 14 Q1 14 Q2 14 Q3 14 Q4 15 Q1 15 Q2 15 Q3 15 Q4 OPO laser Install Operation CO 2 laser Install Operation Integral sphere Angular distribution Visible light backlight CO 2 laser backlight Optimization of preexpansion High-Rep droplet Integration experiment Design Fab. Install Test Operation Design Fab. Install Test Operation Design Install Operation Design Install Operation Try & Error Optimized Design Fab. Intro Operation Experiment
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