Development of Radiation Hydrodynamic code STAR for EUV plasmas. Atsushi Sunahara. Institute for Laser Technology
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1 Development of Radiation Hydrodynamic code STAR for EUV plasmas Atsushi Sunahara Institute for Laser Technology 2013 International Workshop on EUV and Soft x-ray Sources University College Dublin November
2 Introduction EUV conversion efficiency consists of three factors. EUV 1) Conversion efficiency (CE) 1) 13.5nm wavelength with 2% bandwidth X-ray = laser absorption fraction conversion fraction EUV spectral efficiency absorbed laser energy input laser energy x-ray emission energy inputed energy into plasma EUV emission energy x-ray emission energy In order to get high EUV CE, we have to maximize the product of three factors. Especially, we pay attention to the laser absorption fraction.
3 Laser absorption fraction CO2 Laser :10 10 W/cm 2, pulse duration:110ns, spot diameter:200μm Φ (cm) electron density electron temperature EUV emission BMP êlí ÉvÉçÉOÉâÉÄ BMP êlí ÉvÉçÉOÉâÉÄ BMP êlí ÉvÉçÉOÉâÉÄ (cm) (cm) (cm) critical density ncr ne Te ~ constant in space low absorption 1/e ncr density scale length Density scale length keeps 25 μm in time due to the lateral flow from the laser spot.
4 Double pulse irradiation was proposed to atcheive Efficient, High Power EUV light Double pulse irradiation scheme delay Sn droplet X100KHz pre-pulse λl=arbitrary main-pulse λl=10.6um minimum mass target pre-formed plasma EUV emission Dynamics of tin droplet is key issue for achieving high CE.
5 One fluid two temperature model of plasma fluid continuity equation momentum equation pdv work ion conduction ion energy equation Fluid pdv work ion-electron T relaxation e conduction electron energy equation Laser heating term Laser multi-group diffusion approximation Radiation heating term Radiation EOS dependent Atomic physics calc. dependent
6 Te Log10(Te (ev)) Sn EOS Log10(P) dyn/cm 2 pressure L-V region Density Log10(ρ (g/cm 3 ))
7 Position (μm) Sn Sphere 100μm Φ wavelength: 1.06μm intensity : 5X10 10 W/cm 2 (cm -3 ) Ion Density STAR1D laser peak timing (10ns) (ev) Temperature (cm) Time (ns) (cm)
8 Temperature Temperature Sn EOS Sphere (r0=100μm) 100ns (cm -3 ) (cm -3 ) ns Ion Density L=75μm (μm) Liquid-gas mix L=250μm (μm) Expanding region can enter in the liquid-vapor mix phase.
9 STAR2D 2D cylindrical simulation (cm) Microsoft Video 1 êlí ÉvÉçÉOÉâÉÄ 20μmΦ Sn Droplet Laser 1.06μm 1x10 11 W/cm 2 (cm) axis symmetry
10 Pressure dyn/cm 2 BMP êlí ÉvÉçÉOÉâÉÄ (cm) axis symmetry
11 Pressure dyn/cm 2 BMP êlí ÉvÉçÉOÉâÉÄ (cm) axis symmetry
12 Density g/cm 3 BMP êlí ÉvÉçÉOÉâÉÄ (cm) axis symmetry
13 Temperature ev BMP êlí ÉvÉçÉOÉâÉÄ (cm) axis symmetry
14 electron density (cm -3 ) (cm) BMP êlí ÉvÉçÉOÉâÉÄ (cm) axis symmetry
15 1E10W/cm (16) spot diam. =100μm Pressure 1E10W/cm (22) spot diam. =100μm Pressure 1E10W/cm 2 Spot=100μm 1E10W/cm (30) spot diam. =100μm Pressure E10W/cm (35) spot diam. =100μm Pressure 1E10W/cm (44) spot diam. =100μm Pressure 1E10W/cm (51) spot diam. =100μm Pressure
16 Summary & Conclusion We simulated the tin droplet irradiated by the 1.06μm nano-second laser. pre-formed plasma Most expanding region is in the liquid-vapor region Increase of the scale length Droplet Sn Dynamics of over-dense region Laser Liquid-vapor region is very important for the dynamics of tin droplet irradiated by the pre-pulse.
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