RAPORT DE CERCETARE Nr. 8 /

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1 PROGRAMUL OPERAŢIONAL SECTORIAL CREŞTEREA COMPETITIVITĂŢII ECONOMICE AXA PRIORITARĂ 2 COMPETITIVITATE PRIN CDI Operaţiunea 2.1.2: "Proiecte CD de înalt nivel ştiinţific cu participarea unor specialişti din străinătate" Titlul / Acronimul proiectului: Facilitate pentru diagnoza de fascicul laser si caracterizare / certificare ISO a comportarii componentelor optice / materialelor sub actiunea fasciculelor laser de mare putere / ISOTEST. RAPORT DE CERCETARE Nr. 8 / Perioada de raportare:

2 INFLPR Sectia Laseri Raport de Cercetare nr. 8 / In cadrul activitatilor de dezvoltare experimentala si cercetare industriala prevazute pentru a 8-a perioada de raportare ( ) au fost obtinute urmatoarele rezultate: Activitatea 1.4. Dezvoltarea de subansamble si sub-sisteme ale setup-ului experimental privind: dirijarea, atenuarea si focalizarea fasciculului laser; diagnoza parametrilor de fascicul energetici, spatiali, temporali. Realizat. Au fost achizitionate urmatoarele componente pentru dezvoltarea set-up-urilor experimentale ale instalatiei ISOTEST: 1 celula Pockels cu cristal KD * P, 2 analizoare fascicul laser cu accesorii, 2 monitoare de energie laser, 5 detectoare de energie (3 detectoare piroelectrice, 2 detectoare optice), componente mecanice si accesorii curatire (Thorlabs), oglinzi laser, polarizori, lame semiunda, atenuatori, lentile, expandor fascicul, separatoare de fascicul, componente optomecanice, monturi de rotatie, carduri detectie fascicul (CVI Melles Griot), multimetru, panouri protectie si accesorii ecranare radiatie laser, actuator liniar, masuta translatie motorizata (Eksma). Componentele achizitionate in cadrul acestei etape au fost integrate si testate functional in subsistemele si subansamblele instalatiei ISOTEST. Testele efectuate au validat solutia tehnica initiala si dezvoltarile ulterioare privind componenta si structura functionala a instalatiei. A fost finalizata dezvoltarea setup-rilor experimentale ale instalatiei ISOTEST: statia automata de masurare a pragului de distrugere a componentelor laser (PDCL) in pulsuri de nanosecunde la lungimile de unda de 1064 nm, 532 nm si 355 nm; statia automata de masurare PDCL in pulsuri de femtosecunde la lungimea de unda de 775 nm; dispozitivul de diagnoza fascicule laser. Activitatea 1.5. Proiectarea si realizarea sistemului software-hardware de operare automata si de achizitie / procesare semnale Realizat. A fost finalizata realizarea unitatilor DSP pentru statia automata de masurare a PDCL in pulsuri de femtosecunde si pentru dispozitivul de diagnoza de fascicul laser. A fost receptionata Etapa a III-a de implementare software intitulata Dezvoltarea aplicatiei pentru stocarea datelor (realizarea unei baze de date), generarea raportului de test. Teste finale de buna functionare a procedurii automate S-on-1 conform Caietului de Sarcini , conform contractului de furnizare Nr.1246 din si a Actului Aditional nr. 2 /

3 incheiate cu Delisoft srl. In cadrul acestei etape au fost implementate urmatoarele rutine ale programului software de operare a procedurii S-on-1 de masurare a pragului de distrugere a componentelor laser (PDCL): - Baza de date unde sunt stocate codul probei, data efectuarii testului, datele primare obtinute in urma iradierii probelor (energia laser de test per sit setata de operator sau de program in modul automat, energia reala cu care s-a efectuat iradierea sitului, numarul de pulsuri la care a rezistat situl si starea sitului (distrus sau nedistrus), fisierul cu datele finale procesate de program, care sunt specificate in raportul de test; - Procedura de sortare a informatiilor din baza de date in ordine crescatoare sau descrescatoare din fiecare coloana pentru o identificare facila a punctelor experimentale; - Rutina de corelare a informatiilor din baza de date cu reprezentarea grafica a siturilor, pentru identificarea rapida a caracteristicilor siturilor interogate, identificare necesara pentru analiza ulterioara a morfologiei siturilor distruse la microscopul Nomarski. Au fost efectuate teste de buna functionare a procedurii automate S-on-1 care au confirmat functionarea corecta a statiei automate de masurare a PDCL in pulsuri de nanosecunde aplicand procedura automata S-on-1. Testele au fost efectuate in perioada pe componente optice (acoperiri antireflex si oglinzi laser) furnizate de Ophir Optics SRL. Rezultatele testelor sunt sintetizate in Anexa 1 a Raportului de Cercetare nr. 8 / In ultima Etapa a contractului Delisoft ( ) intitulata Asistenta si modificari ale software-ului de operare pe durata testelor tehnologice de optimizare a procedurii automate S-on- 1, pe baza testelor tehnologice efectuate pe statia automata in pulsuri de nanosecunde, au fost aduse o serie de imbunatatiri interfetei grafice a programului de operare S-on-1, prezentate in detaliu in cadrul Activitatii 2.3. Activitatea 2.2. Teste preliminare de functionare sistem software-hardware. Implementarea procedurilor ISO (diagnoza de fascicul, masurare PDCL) pe sistemul software-hardware - Realizat. Testele preliminare de functionare a sistemului software-hardware pentru masurarea PDCL au fost finalizate si raportate in cadrul Activitatii 2.2. din RC 7. Au fost finalizate testele preliminare de implementare a procedurilor de diagnoza de fascicul, conform standardului ISO :2005. Fasciculele laser de test au fost furnizate trei laseri He-Ne in unda continua: tip 1105P (JDS Uniphase, SUA); tip 3222H-PC (Hughes, SUA) si tip 05-LHP (Melles Griot, SUA). Au fost masurati urmatorii parametri spatiali de fascicul: dimensiunile transversale de fascicul (definite folosind metoda momentelor de ordinul doi, conform definitiei ISO), 3

4 divergenta unghiulara si factorul de propagare M 2. S-a urmarit cu precadere obtinerea unei reproductibilitati cat mai bune a marimilor masurate. Cu aceasta ocazie s-a descoperit cauza principala care impiedica o buna reproductibilitate a masurarii - lumina parazita fluctuanta din laborator. Ca masura de eliminare a acestei cauze, in prezent se proiecteaza un sistem de ecranare atat a mesei de laborator cat si a analizorului de fascicul laser cu care se fac masurarile respective. Prin masuri de ecranare preliminara, incertitudinile de masura s-au redus de 3-4 ori. Rezultatele testelor sunt prezentate pe larg in Anexele 2 si 3 ale Raportului de Cercetare Nr. 8. Activitatea 2.3. Teste preliminare si finale pentru optimizarea functionarii instalatiei automate privind derularea automata a procedurilor de masurare, detectarea PDCL, achizitia si procesarea datelor furnizate de senzorii de masura.- Realizat partial conform calendar Au fost initiate testele tehnologice finale pentru optimizarea functionarii instalatiei automate ISOTEST. Testele au fost efectuate pe statia automata in pulsuri de nanosecunde pentru masurarea PDCL prin procedura ISO S-on-1, cu componente optice de test furnizate de Ophir Optics SRL (Newport-Ophir, Israel). In afara monitorizarii derularii secventelor procedurii automate de masurare, sunt verificati in detaliu pasii algoritmului de calcul al procedurii S-on-1: - definirea intervalelor de energie laser utilizate pentru ridicarea experimentala a caracteristicilor de probabilitate de distrugere, pe baza datelor experimentale acumulate in baza de date a procedurii de masurare; - calculul energiei laser de test pentru iradierea sitului urmator; - distributia uniforma a punctelor experimentale in cadrul intervalelor de energie mentionate mai sus. Pentru a facilita monitorizarea de catre operator a procedurii automate de masurare, au fost aduse o serie de imbunatatiri interfetei grafice a programului de operare: - Afisarea explicita a intervalelor de energie definite de program; - Afisarea punctelor experimentale corespunzatoare fiecarui interval de energie; - Posibilitatea de a intrerupe procedura automata de masurare si de a reface calibrarea atenuatorului de energie, daca operatorul constata o diferenta semnificativa intre energia laser de test calculata de program si energia laser setata efectiv de atenuator. - Afisarea valorii medii a energiei laser utilizate in cadrul procedurii de test, valoare care reprezinta un indicator global al durabilitatii probei testate. In Fig. 1 este aratata ultima varianta a interfetei grafice a procedurii automate S-on-1 de masurare a PDCL. 4

5 Testele au fost efectuate pe doua tipuri de acoperiri antirefex pentru lungimea de unda laser de 1064 nm (SJ6624- MgO si SJ6623). A fost evaluata incertitudinea standard in masurarea densitatii de energie (fluenta) si a densitatii de putere (iradianta) la pragul de distrugere a suprafetei optice in camp laser. Incertitudinea globala a rezultatelor masurarii este determinata de trei factori majori: 1. Microdefectele si neomogenitatile structurale ale suprafetei optice testate distorsioneaza dependenta liniara a probabilitatii de distrugere de energia plusurilor laser de test, relatie liniara indicata de modelele teoretice care studiaza interactia laser materie. [1, 2] 2. Eroarea intrinseca a algoritmului S-on-1 cauzata de largimea finita ΔQ a intervalelor de energie Q i ΔQ utilizate in calculul probabilitatii de distrugere. Considerand o distributie rectangulara de probabilitate a acestui tip de eroare, incertitudinea standard corespunzatoare poate fi estimata cu relatia Q Q, 3Q unde Q este energia per puls mediata pe toate siturile interogate. Energia medie Subintervale de energie Puncte experimentale din subintervalul de energie Fig. 1. Interfata grafica a programului software de operare al procedurii S-on-1 3. Incertitudunea standard combinata (de tip A si B) in evaluarea parametrilor pulsurilor laser de test (energie, durata efectiva,aria efectiva a spotului laser pe suprafata probei): 3.1. Incertitudinea de tip A determinata experimental prin masurarea parametrilor laser; 5

6 3.2. Incertitudinea de tip B cauzata de erorile de calibrare ale aparatelor de masura (detectoare / monitoare de energie, profilometru laser cu camera CCD, osciloscop digital de banda larga, fotodioda rapida. Primele doua surse de erori contribuie semnificativ la stabilirea cuantumului erorii standard medii ε fit de fitare parametrica a celor 9 caracteristici de probabilitate de distrugere ridicate experimental de programul S-on-1, in sensul ca exista o valoare de saturatie a marimii ε fit care, dupa un anumit numar de situri interogate, nu mai poate fi micsorata prin adaugarea de noi date experimentale. Conform datelor experimentale publicate in literatura, este de asteptat o valoare de saturatie uzuala de pana la ε fit 20 %. [3] Masurarile efectuate pe probele SJ6624- MgO si SJ6623 au evidentiat valori de saturatie ale erorii de fitare de 12,3 % si respectiv 14.2 %. Luand in considerare si erorile in evaluarea parametrilor de fascicul specificate mai sus, a rezultat o eroare globala in evaluarea PDCL (densitatea de putere la pragul de distrugere) de 16 %, respectiv de 18 %. Mentionam ca, in conformitate cu experienta internationala acumulata in acest domeniu, o eroare absoluta de pana la 25 % in masurarea PDCL este considerata uzuala si atesta in general o procedura de masurare corecta, relativ precisa. [4] Rezultatele detaliate ale acestor teste tehnologice sunt prezentate in Anexele 4 si 5 ale prezentului raport. Activitatea 2.4. Intocmirea documentatiei pentru acreditare RENAR. Se vor defini operatiunile de certificare pentru care se solicita acreditarea RENAR, tinand cont de prioritatile potentialilor beneficiari ai facilitatii ISOTEST. - Realizat partial conform calendar. In prezent sunt purtate discutii cu reprezentantii RENAR - Asociatia de Acreditare din Romania, pentru stabilirea organismului de certificare (Sectia Laseri din cadrul INFLPR, sau direct INFLPR). De asemenea, a fost initiata activitatea de selectie a documentatiei tehnice specifice in vederea acreditarii organismului de certificare, pentru efectuarea urmatoarelor proceduri dezvoltate in cadrul proiectului ISOTEST: - Masurare /certificare PDCL a componentelor optice in conformitate cu standardul ISO ; - Testare /certificare fiabilitate in camp laser a componentelor optice in conformitate cu standardul ISO Testele preliminare si tehnologice efectuate pana in prezent pe statia automata de masurare PDCL in pulsuri de nanosecunde au evidentiat interesul companiei Ophir Optics srl, principalul producator de componente optice din Romania, pentru cele doua proceduri mentionate mai sus. 6

7 Lucrari stiintifice prezentate / acceptate la Conferinte Internationale 3 lucrari prezentate la International Student Conference on Photonics (ISCP) 2012, Sinaia, 8-12 May 2012: - Laser induced damage threshold test station: development and measurements - preliminary results, A. Zorilă, L. Rusen, S. Sandel, A. Stratan, C. Blanaru, C. Fenic, G. Nemeş. - ISO Procedure for Laser Beam diagnosis, L. Rusen, A. Zorilă, L. Neagu, A. Stratan, G. Nemeş. - Automation development for laser induced damage threshold ISOTEST facility, S. Sandel, C.Blanaru, C. Baicu. 2 lucrari acceptate la SPIE Laser Damage Symposium XLIV: Annual Symposium on Optical Materials for High Power Lasers, Sept. 2012, NIST, Boulder, Colorado, USA (evenimentul stiintific mondial cel mai important pentru domeniul caracterizarii materialelor optice pentru laseri de mare putere): - Effective area of pulsed laser spots within ISO ,2,3 standards: critical analysis, extensions, and measurements in near ultraviolet - near infrared domain, Paper , Authors: G. Nemes, A. Stratan, A. Zorila, L. Rusen. - Automated test station for laser-induced damage threshold measurements according to ISO ,2,3,4 standards, Paper , Authors: A. Stratan, G. Nemes, A. Zorila, L. Rusen, S. Simion, C. Blanaru, C. Fenic, L. Neagu. Lucrari stiintifice trimise spre publicare / brevete inregistrate Real-time detection of optical damage induced by high-power laser pulses, A. Zorila, S. Simion, L. Rusen, A. Stratan, P. Schiopu, Scientific Bulletin UPB, Submission ID: 1422/ Dispozitiv integrat in statie automata de masuare ISO a pragului de distrugere a componentelor optice iradiate cu laser, S. Simion, C. Blanaru, A. Stratan, A. Zorila, Cerere de Brevet de Inventie nr. A /00425 / Concluzii Apreciem ca au fost indeplinite activitatile de dezvoltare experimentala si cercetare industriala prevazute pentru pentru a saptea perioada de raportare: Pana in prezent nu sunt de semnalat factori care ar putea intarzia derularea planificata a activitatilor proiectului. 7

8 Referinte 1. E.G. Gamaly, A.V. Rode, B. Luther-Davies, V.T. Tikhonchuk, Ablation of solids by femtosecond lasers: Ablation mechanism and ablation thresholds for metals and dielectrics, Phys. Plasmas 9, (2002). 2. S. Nolte, C. Momma, H. Jacobs, A. Tünnermann, B.N. Chichkov, B. Wellegehausen, H. Welling, Ablation of metals by ultrashort laser pulses, JOSA B 14, (1997). 3. K. Starke, T. Gro, D. Ristau, W. Riggers, J. Ebert, Laser-induced damage threshold of optical components for high repetition rate Nd:YAG lasers, Proc. SPIE 3578, (1990). 4. C.J. Stolz, D. Ristau, M. Turowski, H. Blaschke, Thin Film Femtosecond Laser Damage Competition, Boulder Damage Symposium, Boulder, CO, United States, September 2009, Director proiect Dr. George Nemes Director stiintific, Dr. Aurel Stratan 8

9 ANEXA 1 PV de receptie Etapa III nr. din (contract Delisoft srl) Rezultatele testelor si a masurarilor efectuate de beneficiar pe instalatia ISOTEST : 1. Dezvoltarea aplicatiei pentru stocarea datelor (realizarea unei baze de date), generarea raportului de test. A fost realizata o aplicatie care este capabila sa stocheze informatiile rezultate dupa iradierea probelor, cu urmatoarele caracteristici: - baza de date este compusa din cinci campuri care reprezinta de la stanga la dreapta ordinea in care s-a facut iradierea, energia setata de operator sau de program in modul automat, energia reala cu care s-a efectuat iradierea sitului, numarul de pulsuri la care a rezistat situl si starea sitului (distrus sau nedistrus); - a fost implementata o procedura de sortare a informatiilor din baza de date in ordine crescatoare sau descrescatoare din fiecare coloana pentru o identificare facila a punctelor; - a fost implementata o rutina de corelare a informatiilor din baza de date cu reprezentarea grafica a siturilor, pentru identificarea rapida a caracteristicilor siturilor interogate, identificare necesara pentru analiza ulterioara a morfologiei siturilor distruse la microscopul Nomarski. - programul software proceseaza datele experimentale sintetizate in cele 9 caracteristici de probabilitate de distrugere ridicate experimental in timpul procedurii de interogare a siturilor probei testate si, pe aceasta baza, furnizeaza datele finale specificate in raportul de test. 2. Teste finale de buna functionare a procedurii automate S-on-1 conform Caietului de Sarcini Au fost efectuate teste finale de masurare a pragului de distrugere optica aplicand procedura automata S-on-1 pe urmatoarele componente furnizate de Ophir Optics SRL: - Acoperire antireflex nm SY Oglinda nm R-88% GR1978Q - Oglinda laser nm; GR1975/76; SJ Acoperire antireflex ARW@1064 nm - SJ Oglinda laser nm 45 - SJ Acoperire antireflex - Acoperire antireflex nm, 0-7 BATCH 6536 Pentru a facilita monitorizarea procedurii automate de interogare a siturilor, pe interfata grafica au fost afisate intervalele de energie laser definite de program in vederea uniformizarii distributiei punctelor experimentale in gama de lucru a energiei laser per puls (figura1). 9

10 Fig. 1. Interfata grafica a procedurii automate S-on-1. In figura 2 (extrasa din raportul de test) este aratata caracteristica de distrugere a probei ARW@1064 nm - SJ6413 determinata experimental prin procedura automata S-on-1. Fig. 2. Characteristic damage curve of the sample. X number of pulses, N; Y energy density threshold, H(N) (J/cm 2 ); 1 threshold energy density at 0 % damage probability, H 0 (N) experimental data; 2 threshold energy density at 50 % damage probability, H 50 (N) experimental data;3 H 0 (N) - nonlinear fit;4 H 50 (N) - nonlinear fit. Caracteristica H 0 (N) din figura 2 este extrapolata de program pentru un numar foarte mare de pulsuri, asa cum se arata in figura 3. X 10

11 Fig.3. Measured and extrapolated S-on-1 damage threshold versus number of pulses, N. X number of pulses, N; Y threshold energy density at 0 % damage probability, H 0 (N) (J/cm 2 ); 1 extrapolated H 0 (N) for large number of pulses; 2 experimental data. In figura 4 este aratata imaginea unui sit distrus, obtinuta cu un microscop Nomarski cu marire 200x Fig. 4. Normarski micrograph of a damaged site (energy density 40 J/cm 2, damage after 1 pulse) Testele au demonstat o functionare corecta a procedurii automate S-on-1, conform cerintelor specificate in Caietul de Sarcini. Dr. Aurel Stratan Ing. Alexandru Zorila 11

12 NILPRP ISOTEST Project ANEXA 2 Preliminary Test Report No. 3 / Evaluation of laser beam widths, divergence angles and beam propagation ratios according to standard ISO :2005 a) General information 1) Test has been performed in accordance with ISO :2005 2) Date of test: ) Name and address of test organization: Solid State Lasers Laboratory, National Institute for Lasers, Plasma and Radiation Physics, 409, Atomistilor Str., P.O. Box MG 36, Magurele, Bucharest, Romania 4) Name of individual performing the test: Laurentiu Rusen b) Information concerning the tested laser 1) Laser type: He-Ne laser 2) Manufacturer: Hughes, USA 3) Manufacturer s model designation: 3222H-PC 4) Serial number: c) Test conditions 1) Laser wavelength(s) at which tested: 633 nm 2) Operating mode (CW or pulsed): CW 3) Laser parameter settings i) Output power: 2.6 mw 5) Polarization: linear, partially polarized 6) Environmental conditions: clean filtered air, controlled temperature 22 o C 1 o C; room stray light. d) Information concerning testing and evaluation 1) Evaluation method used: Second-order moments 2) Test equipment: Camera PHOTON BeamPro, SN ) Beam forming optics and attenuating method: i) Type of attenuator: neutral density (ND) glass ii) Type of focusing element: convergent lens, f = nm e) Test Results 1) Beam waist diameter/widths and Rayleigh length(s) Beam waist location z 01 = 1596 mm before the front principal plane of the focusing lens (subscript 1). Mean value mm Standard deviation % Beam waist diameter d σ Beam waist width d σ01x Beam waist width d σ01y

13 Rayleigh length z R Rayleigh length z R1x Rayleigh length z R1y ) Beam divergence angles (in accordance with Clause 8, before the front principal plane of the focusing lens, subscript 1) Focusing element used: convergent lens, f = nm Mean value mrad Standard deviation % Beam divergence angle Θ σ Beam divergence angle Θ σ1x Beam divergence angle Θ σ1y ) Beam propagation parameters derived from hyperbolic fit (in accordance with Clause 9, after the back principal plane of the focusing lens, subscript 2) Beam waist locations z 02 measured from the rear principal plane of the focusing lens Mean value Standard deviation % Beam waist location z mm 3 Beam waist location z 02x 539 mm 3 Beam waist location z 02y 478 mm 2 Beam waist diameter d σ mm 4 Beam waist width d σ02x 0.21 mm 3 Beam waist width d σ02y 0.19 mm 2 Azimuth angle ϕ Rayleigh length z R2 54 mm 4 Rayleigh length z R2x 52 mm 3 Rayleigh length z R2y 43 mm 2.5 Beam divergence angle Θ σ2 4.1 mrad 1.5 Beam divergence angle Θ σ2x 4.0 mrad 1 Beam divergence angle Θ σ2y 4.4 mrad 1.5 Beam propagation ratio M Beam propagation ratio M 2 x Beam propagation ratio M 2 y

14 Dmean (mm) 2.4 Dmean Fit of Dmean 1.6 Equation y = sqrt ( A + B*x + C*x*x ) Value Standard Error Dmean A Dmean B E-4 Dmean C E E Z (mm) Fig.1. Hyperbolic fit to the measured beam widths along the propagation distance z. Fig. 2. Spatial beam profile measured at the beam waist of the focused beam. 14

15 ANEXA 3 NILPRP ISOTEST project Preliminary Test Report No. 5/ Evaluation of laser beam widths, divergence angles and beam propagation ratios according to standard ISO :2005 a) General information 1) Test has been performed in accordance with ISO :2005 2) Date of test: ) Name and address of test organization: Solid State Lasers Laboratory: National Institute for Lasers, Plasma and Radiation Physics, 409, Atomistilor Str., P. O. Box MG 36, Magurele, Bucharest, Romania 4) Name of individual performing the test: Laurentiu Rusen b) Information concerning the tested laser 1) Laser type: He-Ne laser 2) Manufacturer: Hughes, USA 3) Manufacturer s model designation: 3222H-PC 4) Serial number: c) Test conditions 1) Laser wavelength(s) at which tested: 633 nm 2) Operating mode (CW or pulsed): CW 3) Laser parameter settings i) Output power: 2.6 mw 5) Polarization: linear, partially polarized 6) Environmental conditions: clean filtered air, controlled temperature 22 o C 1 o C, room stray light partially eliminated d) Information concerning testing and evaluation 1) Evaluation method used: Second order moment 2) Test equipment: Camera PHOTON BeamPro, SN ) Beam forming optics and attenuating method: i) Type of attenuator: neutral density (ND) glass ii) Type of focusing element: convergent lens, f = nm e) Test Results 1) Beam waist diameter/widths and Rayleigh length(s) Beam waist location z 01 = 1519 mm before the front principal plane of the focusing lens (subscript 1) Mean value mm Standard deviation % Beam waist diameter d σ Beam waist width d σ01x Beam waist width d σ01y

16 Rayleigh length z R Rayleigh length z R1x Rayleigh length z R1y ) Beam divergence angles (in accordance with Clause 8, before the front principal plane of the focusing lens, subscript 1)) Focusing element used: convergent lens, f = nm Mean value mrad Standard deviation % Beam divergence angle Θ σ1 1.4 (?) 1.5 Beam divergence angle Θ σ1x Beam divergence angle Θ σ1y ) Beam propagation parameters derived from hyperbolic fit (in accordance with Clause 9, after the back principal plane of the focusing lens, subscript 2)) Beam waist locations z 02 measured from the rear principal plane of the focusing lens Mean value Standard deviation % Beam waist location z mm 0.2 Beam waist location z 02x 523 mm 0.7 Beam waist location z 02y 523 mm 0.2 Beam waist diameter d σ mm 0.2 Beam waist width d σ02x 0.19 mm 0.8 Beam waist width d σ02y 0.20 mm 0.2 Azimuth angle ϕ Rayleigh length z R2 49 mm 0.2 Rayleigh length z R2x 49 mm 1 Rayleigh length z R2y 48 mm 0.2 Beam divergence angle Θ σ2 4.1 mrad 0.1 Beam divergence angle Θ σ2x 4.0 mrad 0.3 Beam divergence angle Θ σ2y 4.1 mrad 0.1 Beam propagation ratio M Beam propagation ratio M 2 x Beam propagation ratio M 2 y

17 Dmean (mm) 0.9 Dmean Fit of Dmean Equation y = sqrt ( A + B*x + C*x*x ) 0.6 Value Standard Error Dmean A Dmean B E-5 Dmean C E E Z (mm) Fig.1. Hyperbolic fit to the measured beam widths along the propagation distance z. Fig. 2. Spatial beam profile measured at the beam waist of the focused beam. 17

18 ANEXA 4 National Institute for Lasers, Plasma, and Radiation Physics (NILPRP/INFLPR) Solid State Lasers Laboratory ISOTEST Test report # 11 Laser-induced damage threshold (LIDT) by S-on-1 test according to ISO , 2, 3, 4 Tester s name: Alexandru Zorila Date: Order #: Specimen Type of specimen: AR coating Specifications: 1064 nm, MgF 2, LASF40 Shape and size: round, 1 inch Manufacturer/ supplier: Ophir Optics SRL, Bucharest, Romania Part ID # SJ6624 TR Date of production Storage: original package Cleaning procedure: blowing with Duster S Preliminary inspection comments: small dots after cleaning see comments Mounting of test specimen: kinematic mount, vertical position Test equipment Laser source Type: Manufacturer: Model #: Energy meter Manufacturer: Model #: Calibration date: Calibration due date: Temporal diagnosis Photodiode Oscilloscope Spatial diagnosis Beam profiler Q-switched, single longitudinal mode Quantel (France) Brilliant B 10 SLM Coherent, Inc. J-25MT-10 khz pyroelectric detector Sept.10 Sept.11 Alphalas, type UPD-200-UD Tektronix, type DPO-7104 Newport-Ophir-Spiricon, type Gras20 18

19 Diagnosis - Pulse energy real time monitored with type J-25MT-10 khz pyroelectric detector and calibrated by making a measurement before and after the full test with type J-50MB-YAG pyroelectric detector. - Temporal profile recorded before and after test. Effective pulse duration calculated using waveform recorded data. - Spatial profile recorded before and after test. Beam diameter/widths obtained directly from beam profiler. Effective beam diameter/widths calculated from beam profiler raw data. Laser parameters Wavelength: 1064 nm Operating mode: pulsed, repetitively Output energy: adjustable, up to 450 mj Pulse repetition frequency: 10 Hz Polarization state: linear, totally polarized, horizontal Pulse duration - FWHM: 4.4 ns Pulse duration effective, τ eff : 5.3 ns Measurement specifications Beam diameter/widths - second moments: - Beam diameter/widths - 1/e 2 clip level: - Beam diameter/widths - effective: 0.21 mm Spatial beam profile: see typical figure Angle of incidence (AOI): 4 ± 1 Polarization: type P Number of sites per specimen: 276 Number of shots per site, S: 500 Arrangement of test sites: near-circular, close packed Distance between sites: 1 mm Number of specimens tested: 1 Total number of sites for the test: 276 Real time damage detection method: scattered radiation Damage detection after test: visual, Nomarski microscope (50x, 200x, 500x) Environmental conditions Test environment: clean filtered air Temperature: 24 C ± 1 C Humidity: 40 % Comments: Typical 200x Nomarski picture of the sample after cleaning, before test. 19

20 Error budget: a) random (type A) errors Pulse energy standard deviation: ± 1 % Pulse spot effective area standard deviation: ± 2 % Effective pulse duration standard deviation: ± 2 % b) instrument (type B) standard uncertainties Pulse energy measuring system (4 instruments overall): ± 4 % Pulsed spot effective area uncertainty (1 instrument): ±5 % Effective pulse duration uncertainty (2 instruments): ± 5 % Estimated LIDT standard uncertainty: ± 16 % Fig. 1. Temporal profile of the laser pulse. Y detector output (a.u.); X time (ns). Fig. 2. Spatial laser beam profile in the target plane. Effective spot area = cm 2. 20

21 Y Test Results: X Fig. 3. Characteristic damage curve of the sample. X number of pulses, N (N S) for which the damage probability is calculated; Y threshold energy density, H(N) (J/cm 2 ); 1 threshold energy density at 0 % damage probability, H 0 (N) experimental data; 2 threshold energy density at 50 % damage probability, H 50 (N) experimental data; 3 H 0 (N) - nonlinear fit *1 ; 4 H 50 (N) - nonlinear fit *1. 21

22 Y Fig. 4. Measured and extrapolated S-on-1 damage threshold versus number of pulses, N. X number of pulses, N; for N S, calculated from experimental results; for N > S, extrapolated data; Y threshold energy density at 0 % damage probability, H 0 (N) (J/cm 2 ); 1 experimental data; 2 extrapolated *2 H 0 (N) for large number of pulses Summary of LIDT values Extrapolated 0 % LIDT for N = 10 8 pulses: energy density H 0 (10 8 ) = 19 J/cm 2. Extrapolated power density for τ eff = 5.3 ns effective pulse duration: E 0 (10 8 ) = H 0 (10 8 )/ τ eff = 3.5 GW/cm 2. Extrapolated equivalent *3 energy density for τ eff,eq = 20 ns: H 0,eq (10 8 ) = 36 J/cm 2. Extrapolated equivalent *4 power density for τ eff,eq = 20 ns: E 0,eq (10 8 ) = 1.8 GW/cm 2. X Recommendations for durability The extrapolation curve for 10 8 pulses may not take into account all possible factors leading to potential damage. We recommend an additional safety factor of approximately 0.9 applied to each of the above values. *1 Fitting equation: H th (N) = H th, + (H th,1 H th, )/[1 + log 10 (N)/Δ], notations according to ISO Annex E *2 Fitting equation: H th (N) = H th, d + (H th,1 H th, )/[1 + log 10 (N)/Δ], notations according to ISO Annex E *3 Equivalence equation used: H 0,eq (10 8 ) = H 0 (10 8 ) ( τ eff,eq /τ eff ) 1/2 *4 Equivalence equation used: E 0,eq (10 8 ) = E 0 (10 8 ) ( τ eff /τ eff,eq ) 1/2 22

23 Fig. 5. Example of 200x Normarski micrograph of a damaged site (energy density 37 J/cm 2, damage after 1 pulse) Statement related to certification of the test results ISOTEST laboratory certifies that the Laser Induced Damage Threshold of this sample was tested according to recommendations of the ISO ,2,3,4:2011 standards. During 2013 ISOTEST will submit the paperwork to obtain the accreditation as a test laboratory from Romanian Accreditation Association (RENAR). Currently these results represent ISOTEST internal results. Test performed by Signatures Alexandru Zorila For ISOTEST: Dr. George Nemes 23

24 ANEXA 5 National Institute for Lasers, Plasma, and Radiation Physics (NILPRP/INFLPR) Solid State Lasers Laboratory ISOTEST Test report # 10 Laser-induced damage threshold (LIDT) by S-on-1 test according to ISO , 2, 3, 4 Tester s name: Alexandru Zorila Date: Order #: Specimen Type of specimen: AR coating Specifications: 1064 nm Shape and size: 1 inch, round Manufacturer/ supplier: Ophir Optics SRL, Bucharest, Romania Part ID # SJ 6623 Date of production Storage: original package Cleaning procedure: blowing with Duster S Preliminary inspection comments: lines on the surface Mounting of test specimen: kinematic mount, vertical position Test equipment Laser source Type: Manufacturer: Model #: Energy meter Manufacturer: Model #: Calibration date: Calibration due date: Temporal diagnosis Photodiode Oscilloscope Spatial diagnosis Beam profiler Q-switched, single longitudinal mode Quantel (France) Brilliant B 10 SLM Coherent, Inc. J-25MT-10 khz pyroelectric detector Sept.10 Sept.11 Alphalas, type UPD-200-UD Tektronix, type DPO-7104 Newport-Ophir-Spiricon, type Gras20 Diagnosis - Pulse energy real time monitored with type J-25MT-10 khz pyroelectric detector and calibrated by making a measurement before and after the full test with type J-50MB-YAG pyroelectric detector. - Temporal profile recorded before and after test. Effective pulse duration calculated using waveform recorded data. 24

25 - Spatial profile recorded before and after test. Beam diameter/widths obtained directly from beam profiler. Effective beam diameter/widths calculated from beam profiler raw data. Laser parameters Wavelength: Operating mode: Output energy: Pulse repetition frequency: Polarization state: Pulse duration - FWHM: Pulse duration effective, τ eff : 1064 nm pulsed, repetitively adjustable, up to 450 mj 10 Hz linear, totally polarized, horizontal 4.5 ns 5.3 ns Measurement specifications Beam diameter/widths - second moments: - Beam diameter/widths - 1/e 2 clip level: - Beam diameter/widths - effective: mm Spatial beam profile: see typical figure Angle of incidence (AOI): 4 ± 1 Polarization: type P Number of sites per specimen: 276 Number of shots per site, S: 500 Arrangement of test sites: near-circular, close packed Distance between sites: 1 mm Number of specimens tested: 1 Total number of sites for the test: 276 Real time damage detection method: scattered radiation Damage detection after test: visual, Nomarski microscope (50x, 200x, 500x) Environmental conditions Test environment: clean filtered air Temperature: 24 C ± 1 C Humidity: 40 % Comments: Typical 200x Nomarski picture of the sample after cleaning, before test. 25

26 Error budget: a) random (type A) errors Pulse energy standard deviation: ± 1 % Pulse spot effective area standard deviation: ± 2 % Effective pulse duration standard deviation: ± 2 % b) instrument (type B) standard uncertainties Pulse energy measuring system (4 instruments overall): ± 4 % Pulsed spot effective area uncertainty (1 instrument): ±5 % Effective pulse duration uncertainty (2 instruments): ± 5 % Estimated LIDT standard uncertainty: ± 18 % Fig. 1. Temporal profile of the laser pulse. Y detector output (a.u.); X time (ns). Fig. 2. Spatial laser beam profile in the target plane. Effective spot area = cm 2. Test Results: 26

27 Y Fig. 3. Characteristic damage curve of the sample. X number of pulses, N (N S) for which the damage probability is calculated; Y threshold energy density, H(N) (J/cm 2 ); 1 threshold energy density at 0 % damage probability, H 0 (N) experimental data; 2 threshold energy density at 50 % damage probability, H 50 (N) experimental data; 3 H 0 (N) - nonlinear fit *1 ; 4 H 50 (N) - nonlinear fit *1. X 27

28 Y X Fig. 4. Measured and extrapolated S-on-1 damage threshold versus number of pulses, N. X number of pulses, N; for N S, calculated from experimental results; for N > S, extrapolated data; Y threshold energy density at 0 % damage probability, H 0 (N) (J/cm 2 ); 1 experimental data; 2 extrapolated *2 H 0 (N) for large number of pulses Summary of LIDT values Extrapolated 0 % LIDT for N = 10 8 pulses: energy density H 0 (10 8 ) = 19.5 J/cm 2. Extrapolated power density for τ eff = 5.3 ns effective pulse duration: E 0 (10 8 ) = H 0 (10 8 )/ τ eff = 3.7 GW/cm 2. Extrapolated equivalent *3 energy density for τ eff,eq = 20 ns: H 0,eq (10 8 ) = 37 J/cm 2. Extrapolated equivalent *4 power density for τ eff,eq = 20 ns: E 0,eq (10 8 ) = 1.9 GW/cm 2. Recommendations for durability The extrapolation curve for 10 8 pulses may not take into account all possible factors leading to potential damage. We recommend an additional safety factor of approximately 0.9 applied to each of the above values. *1 Fitting equation: H th (N) = H th, + (H th,1 H th, )/[1 + log 10 (N)/Δ], notations according to ISO Annex E *2 Fitting equation: H th (N) = H th, d + (H th,1 H th, )/[1 + log 10 (N)/Δ], notations according to ISO Annex E *3 Equivalence equation used: H 0,eq (10 8 ) = H 0 (10 8 ) ( τ eff,eq /τ eff ) 1/2 *4 Equivalence equation used: E 0,eq (10 8 ) = E 0 (10 8 ) ( τ eff /τ eff,eq ) 1/2 28

29 Fig. 5. Example of 200x Normarski micrograph of a damaged site (energy density 37 J/cm 2, damage after 1 pulse) Statement related to certification of the test results ISOTEST laboratory certifies that the Laser Induced Damage Threshold of this sample was tested according to recommendations of the ISO ,2,3,4:2011 standards. During 2013 ISOTEST will submit the paperwork to obtain the accreditation as a test laboratory from Romanian Accreditation Association (RENAR). Currently these results represent ISOTEST internal results. Test performed by Signatures Alexandru Zorila For ISOTEST: Dr. George Nemes 29