Operational Progress in Compact-ERL and Development of ERL-FEL for EUV Light Source at KEK ERL project Office, KEK Hiroshi KAWATA
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1 Operational Progress in Compact-ERL and Development of ERL-FEL for EUV Light Source at KEK ERL project Office, KEK Hiroshi KAWATA Contents Progress in Compact-ERL Design study of ERL-FEL for EUV light Source
2 cerl Team High Energy Accelerator Research Organization (KEK) M. Adachi, S. Adachi, T. Akagi, M. Akemoto, D. Arakawa, S. Araki, S. Asaoka, K. Enami,K. Endo, S. Fukuda, T. Furuya, K. Haga, K. Hara, K. Harada, T. Honda, Y. Honda, H. Honma, T. Honma, K. Hosoyama, K. Hozumi, A. Ishii, X. Jin, E. Kako, Y. Kamiya, H. Katagiri, R. Kato, H. Kawata, Y. Kobayashi, Y. Kojima, Y. Kondou, T. Konomi, A. Kosuge, T. Kubo, T. Kume, T. Matsumoto, H. Matsumura, H. Matsushita, S. Michizono, T. Miura,T. Miyajima, H. Miyauchi, S. Nagahashi, H. Nakai, H. Nakajima, N. Nakamura, K. Nakanishi,K. Nakao, K. Nigorikawa, T. Nogami, S. Noguchi [on leave], S. Nozawa, T. Obina, T. Ozaki, F. Qiu,H. Sagehashi, H. Sakai, S. Sakanaka,S. Sasaki, K. Satoh, M. Satoh, Y. Seimiya, T. Shidara, M. Shimada, K. Shinoe, T. Shioya,T. Shishido,M. Tadano, T. Tahara, T. Takahashi, R. Takai, H. Takaki, O. Tanaka, T. Takenaka,Y. Tanimoto, N. Terunuma, M. Tobiyama, K. Tsuchiya,T. Uchiyama, A. Ueda, K. Umemori, J. Urakawa,K. Watanabe, M. Yamamoto, N. Yamamoto, Y. Yamamoto, Y. Yano, M. Yoshida Japan Atomic Energy Agency (JAEA) R. Hajima, S. Matsuba [on leave], M. Mori, R. Nagai, N. Nishimori, M. Sawamura, T. Shizuma Hiroshima University M. Kuriki The Graduate University for Advanced Studies (Sokendai) E. Cenni [on leave] 2
3 Future Plan: ERL Light Source Project at KEK Recirculation Loop (Ref.) Energy Recovery Linac Conceptual Design Report, KEK Report (7) GeV l rf /2 path-length changer Normalized emittance Beam current Bunch charge RF frequency mm-mrad ma pc 1.3 GHz 3 GeV ERL Diffraction-limited X-ray source Ultra-short-pulse light source Driver for XFEL-O (2nd stage) demonstrate The Compact ERL Injector (low e, high I 0 ) Main linac (CW, ~15 MV/m) Beam dynamics Beam losses 3
4 The Compact ERL (cerl) The cerl contains all important technologies. The first arc Injector diagnostic beamline Recirculation loop Dump chicane Main-linac cryomodule Beam dump Merger Parameters of the cerl The second arc Rey.Hori/KEK Circumference: ~ 90 m Injector cryomodule Photocathode DC gun (JAEA) Design In operation Beam energy E 35 MeV 20 MeV Injector energy E inj 5 MeV MeV Gun high voltage 500 kv 390 kv E acc in main linac 15 MV/m 8.2 MV/m Beam current 10 ma 80 ma Normalized emittance [mm mrad] Repetition frequency of bunches RMS bunch length pc pc See, page GHz 1.3 GHz (usual) MHz (for LCS) 1-3 ps (usual) ~ 100 fs (compress.) 1-3 ps (usual) Max. heat load at 2K 80 W W 4
5 Construction and Commissioning of cerl Refurbishment of building Clearing radioactive materials Construction of radiation shielding Construction of injector ERL2013 Commissioning of injector Construction of recirculation loop Commissioning of cerl (with loop) Construction of LCS system Construction Commissioning/Operation Commissioning of LCS system 5 ERL2015
6 Picture of the cerl Injector diagnostic beamline Photocathode DC gun Main-linac cryomodule Recirculation loop Injector cryomodule 6
7 The First Transportation of Beams to the Dump (Feb. 6, 2014) Beam energy (E) Injector: 2.9 MeV Recirculation loop: 19.9 MeV Dump FC MS31 (dump line) Parameters Gun voltage: 390 kv Buncher: OFF Injector cavities: E acc = (3.3, 3.3, 3.1) MV/m Main-Linac cavities: Vc = (8.57, 8.57) MV Beam profiles on screen monitors. Beam pulses (macropulse) peak current: ~24 ma macropulse width: 1.2 ms repetition of bunches: 1.3 GHz repetition frequency: 5 Hz average beam current: ~ 140 pa beam current MS11 MS3 Gun FC (faraday cup) MS1 beam current MS14 Dump line Main linac Injector The 1st arc The 2nd arc MS29 beam current MS15 MS17 MS19 Movable FC MS26 MS27 7
8 Correction of Path Length for Optimum Energy Recovery Two measures for path-length correction were prepared Path length was corrected so that the beam momentum took a minimum at the dump line Dump line Position at a screen monitor in the dump line (momentum at the dump line) Optimum Path-length control chicane Orbit bump in the arc Determination of an optimum path length Tuning range: 5 mm Large hysteresis Currently fixed Tuning range: 10 mm/arc Routinely used 8
9 Demonstration of Energy Recovery (I 0 = 30 ma) ERL operation Cavities 1 and 2: acceleration (1st pass) and deceleration (2st pass) Non-ERL operation Cavity 2: deceleration (Vc=8.57 MV/cavity) Cavity 1: acceleration (Vc=8.57 MV/cavity) E=19.9 MeV E=2.9MeV E=2.9 MeV E=2.9 MeV E=2.9 MeV Energy recovery: % (within accuracy of the measurement) No beam loading Beam loading (+ and -) Cavity 1: P in -P ref Cavity 2: P in -P ref 275W -294W Cavity 1: P in -P ref Beam current Cavity 2: P in -P ref 30 ma 30 ma Beam current (Power lost in cavity) = (P in : input power to cavity) - (P ref : reflected power from cavity) 9
10 Beam Current of 80 ma (CW) was Recirculated Presented by Dr. Sakanaka 10
11 Beam Currents: Achievement and Prospect At present Prospect 10 ma 1 ma With recirculation loop 100 ma Injector 11
12 Summary and Outlook for cerl The Compact ERL was commissioned and is in stable operation. Learned many lessons from the commissioning. The photocathode DC gun and both (injector and ML) SC cavities are operating very stably. Achieved beam current of 80 ma. Achieved low beam emittance (< 1 mm mrad) at low bunch charges (< 0.5 pc/bunch). X-ray production from Laser Compton Scattering was successfully demonstrated. Subjects in the near future Lower emittance at high buhch-charges (q b 7.7 pc) Beam current: 1 ma ( 10 ma) Bunch compression (s t ~ 100 fs) and THz production We have established many important technologies for the ERL light source. We continue to conduct R&D effort on remaining issues such as: Improved cavity-assembly technique for higher accelerating gradient Mass-production technique for main-linac cavities 12
13 Acknowledgment We have learned much from designs and experiences of JLab IR-FEL and Cornell Injector. We appreciate useful information and advices from JLab: George Neil, Steve Benson, Geoffrey Krafft, David Douglas, Kevin Jordan, Carlos Hernandez-Garcia, Pavel Evtushenko, Vashek Vylet, Andrew Hutton, Cornell: Georg Hoffstaetter, Bruce Dunham, Ivan Bazarov, Christopher Mayes, and many other people. We would also thank the people of ERL community for useful discussions and encouragement. 13
14 Design study for high power EUV light source based on ERL-FEL
15 ERL-EUV Light Source Design Group (KEK) H. Kawata, Y. Kobayashi, T. Furuya, K. Haga, I. Hanyu, K. Harada, T. Honda, Y. Honda, E. Kako, Y. Kamiya, R. Kato, S. Michizono, T. Miyajima, H. Nakai, N. Nakamura, T. Obina, K. Oide, H. Sakai, S. Sakanaka, M. Shimada, K. Tsuchiya, K. Umemori, M. Yamamoto, S. Chen, T. Konomi, T. Kubo (JAEA) R. Hajima, N. Nishimori The design study has been done under collaboration with a Japanese company.
16 Motivation 10-kW class EUV sources are required in the future for lithography In order to realize 10-kW class EUV light source, ERL-FEL is the most promising light source (High repetition rate ( 1.3 GHz) and high current linac system).
17 X-ray free electron laser (XFEL) RIKEN, Harima, Japan SPring-8 In case of normal conducting accelerator, The repetition rate is less than 100Hz SACLA (SPring-8 Angstrom Compact X-ray Laser) X-ray pulse duration ~ 50 ps I N Micro-bunching -> SASE lasing X-ray pulse duration ~ 10 fs I N 2
18 Image of ERL-EUV Design 1 st Arc Beam Dump 2 nd Arc Gun Merger Injector Linac Presented by Norio NAKAMURA ERL2015( )
19 Design Concept Target : 10kW 13.5 nm, 800 MeV Use available technology without too much development Make the most of the cerl designs, technologies and operational experiences
20 FEL Performance Electron beam parameters: E=800 MeV, Q b =60 pc, f b =162.5/325 MHz Helical undulator parameters: K=1.652, l u =28 mm, L u =2.8m (segment length) Bunch compression scheme: 1 st Arc + Chicane mj 54.8 mj FEL power without tapering: 8.9/ /19.5 ma FEL power with 8% tapering: 18.0/ /19.5 ma
21 ERL&FEL Parameters Parameters Injection Energy Beam Energy Bunch Charge Repetition Rate Ave. Current Energy Spread Normalized Emittance* Undulator Period Undulator Gap EUV Wavelength EUV output power * entrance of 1 st arc Values 10.5 MeV 800 MeV 60 pc 162.5/325 MHz 9.75/19.5 ma 0.1 % rms 0.6 mm mrad 28 mm 7 mm 13.5 nm 18/36 kw
22 Presentation of the feasibility study 2014 International Workshop on EUV and Soft X-ray Sources 2014/Nov./3-6 Kako, Hajima AAA technical workshop 2015/April/14 Kawata ERL2015 at BNL (USA), 2015/June 7~12 Nakamura EUV-Litho WS in Hawaii (USA) 2015/June 15~19 Nakamura NGL Workshop 2015/July/7 Kawata Particle Accelerator Society of Japan 2015/Aug./4-7 Miyajima SRF2015 at TRIUNF (Canada) 2015/Sept./13~18 Kawata Today EUV-Source WS in Dublin (Ireland) 2015/Nov./9~12 Umemori We also start to prepare a committee to establish the consortium to realize the EUV light source in Japan.
23 Summary & Outlook for EUV Light Source Design of ERL-EUV Light Source Injector (gun, SRF cryomodule, tracking) Main linac (cavity, optics, HOM BBU and heating) Arcs and chicane (lattice, optics) Bunch compression simulation Performance of the designed ERL-EUV 8.9 kw power at 9.75 ma without tapering 18 kw at 9.75 ma with tapering Further design work and optimization Improvement of FEL power (tapering, optics, beam&undulator parameters etc.) Bunch decompression simulation
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