Waseda University. Design of High Brightness Laser-Compton Light Source for EUV Lithography Research in Shorter Wavelength Region
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1 Waseda University Research Institute for Science and Engineering Design of High Brightness Laser-Compton Light Source for EUV Lithography Research in Shorter Wavelength Region Research Institute for Science and Engineering, Waseda University Kazuyuki Sakaue, Akira Endo, Masakazu Washio
2 Contents Laser Compton Scattering Laser-Compton Experiments Design of EUV Light Source Low Repetition Case High Repetition Case Summary
3 Laser Compton Scattering Comparison of Undulator Radiation and Laser-Compton Scattering Undulator Radiation Laser-Compton Scattering E X = 2 2γ hc λ u λ u >> λ L E 2 2 X γ hc ( λ (cosφ + 1/ β)) = L Undulation period can be shortened over 3-order of magnitude High energy photon is produced with small accelerator system
4 Laser-Compton Experiment Facility Outlook at Waseda University Small Accelerator Facility based on Laser Photocathode RF Electron Gun
5 Soft X-ray Generation at Waseda Results of Soft X-ray Generation Photons were produced in 1pulse Ex~420eV (2.8nm) K. Sakaue et al., Radi. Phys. Chem. 77(2008)1134
6 Laser-Compton with Super-Cavity Super-Cavity Laser System at LUCX LaserCompton X-rays Stored Pulse Vacuum Chamber Pulse Flash Amplifier Electron Beam K. Sakaue et al., Nucl. Instrum. Meth. A637(2011)S107 Storage Laser
7 Laser-Compton with Super-Cavity Waveform from Micro-Channel Plate X-ray signal can be detected with laser on/off. K. Sakaue et al., RSI 80(2009) X-ray Pulses in 280nsec
8 Design of EUV Light Source Design of EUV Light Source based on Laser-Compton Scattering Use CO 2 Laser for Longer Wavelength (Undulation Period) RF-Gun can generate high brightness electron beam Generated photon has around 6.7nm wavelength 7.2MeV electron & 10.6µm laser
9 Design of EUV Light Source We have 2 case of designs Low Rep. Case (100kHz) and High Rep. Case (100MHz) 100kHz 100MHz Bunch charge 1nC/bunch 77pC/bunch Bunch length 3psec (rms) 3psec Pulse energy 1J/pulse 20µJ/pulse Pulse duration 20nsec 20psec Enhancement None 5000 Source Size 10µm 20µm Colliding angle 0deg 5deg EUV power 12.8µW/2%bw 1mW/2%bw Electron Beam Laser EUV
10 EUV Light Source (Low Rep. Case) Components of Low Rep. Case Electron Accelerator CO 2 Laser SC-RF-Gun (Teichert et al., FEL08) NC-RF-Gun (Now under testing at KEK) 1J/pulse is also feasible technology
11 EUV Light Source (High Rep. Case) Components of High Rep. Case (Electron Beam) >Almost same requirements with ERL (Energy Recovery Linac) electron source These will be mature in near future SC-RF-Gun DC-Gun & SC Linac Photocathode DC-Gun SC Linear Accelerator 500kV DC-Gun was achieved at JAEA SC-RF-Gun (Teichert et al., FEL08) R. Nagai et al., RSI 81(2010)033304
12 EUV Light Source (High Rep. Case) Components of High Rep. Case (Laser Beam) >Need to use Super-cavity technology Demonstrated at 1µm wavelength K. Sakaue et al., RSI 80(2009) Need to R&D at 10.6µm CO2 laser storage in optical super-cavity with enhancement of 5000
![CO2 Laser Super-Cavity R&D We started R&D of CO2 laser Super-Cavity (CW) 1 800 Schematic of setup Intensity [a.u.] 0.8 0.6 0.4 0.](/docs-images/77/76112066/images/13-0.jpg "2 Transmission Reflection Stored 600 400 200 Enhancement in Super-Cavity 0 0-0.02-0.01 0")
13 CO2 Laser Super-Cavity R&D We started R&D of CO2 laser Super-Cavity (CW) Schematic of setup Intensity [a.u.] Transmission Reflection Stored Enhancement in Super-Cavity Phase Advance [rad] Calculated results of enhancement in Super-cavity with commercial mirrors (HTrans Mirror and HRef Mirror) CO2 laser Super-Cavity test bench
14 CO2 Laser Super-Cavity R&D Study Plan of CO2 laser Super-Cavity 1 st step CW storage demonstration 2 nd step High power test Mirror damage test 3 rd step Higher enhancement Need super-mirror development Short pulsed CO2 laser development Need short pulse demonstration Now considering QCL, DFG
15 Summary We have been developing a laser-compton scattering Soft X-ray was demonstrated by 4.6MeV electron and 1um laser Super-Cavity Laser-Compton scattering was performed 2 types of EUV light source designed by our experiences of laser- Compton scattering <Low Rep. Case (100kHz)> SC(NC)-RF-Gun and CO2 laser will generate 10µW/2%b.w. EUV (6.7nm) <based on mature technologies <High Rep. Case (100MHz)> SC-RF-Gun (or DC-Gun+SC Linac) and CO2 laser with Super-cavity 1mW/2%b.w. EUV (6.7nm) <Need R&Ds, already started at Waseda
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