Soft and Hard X-Ray Microscopy

Transcription

1 Soft and Hard X-Ray Microscopy David Attwood University of California, Berkeley and Advanced Light Source, LBNL Cheiron School October 2010 SPring-8 1

2 The short wavelength region of the electromagnetic spectrum n = 1 δ + iβ δ, β << 1 2

3 Two common soft x-ray microscopes 3

4 A Fresnel zone plate lens for x-ray microscopy Erik Anderson, LBNL 4

5 λ = 1.52 nm (815 ev) Δr = 15 nm N = 500 D = 30 µm f = 300 µm σ = Δr = 12 nm Cr/Si test pattern (Cr L 574 ev) (2000 X 2000, 10 4 ph/pixel) 5

6 Novel zone plates for specific functionality Courtesy of Anne Sakdinawat, UC Berkeley 6

7 High resolution zone plate microscopy Well engineered Sample indexing Tiling for larger field of view Pre-focused High sample throughput Illumination important Phase contrast 7

8 The water window for biological x-ray microscopy 8

9 Fast freeze cryo fixation strongly mitigates radiation dose effects Fast Freeze Helium passes through LN, is cooled, and directed onto sample windows Temperature (Celsius) ΔT Δt = 50 c 16 ms Time (milliseconds) W. Meyer-Ilse, G. Denbeaux, L. Johnson, A. Pearson (CXRO-LBNL) 9

10 Organelle details imaged with cryogenic preservation and high spatial resolution Cryo x-ray microscopy of 3T3 fibroblast cells ER Filopodia Nucleus Cell border Nucleoli C. Larabell, D. Yager, D. Hamamoto, M. Bissell, T. Shin (LBNL Life Sciences Division) W. Meyer-Ilse, G. Denbeaux, L. Johnson, A. Pearson (CXRO-LBNL) 10

11 Bending magnet radiation used with a soft x-ray microscope to form a high resolution image of a whole, hydrated mouse epithelial cell Courtesy of C. Larabell and W. Meyer-Ilse (LBNL) hw = 520 ev 32 µm x 32 µm Ag enhanced Au labeling of the microtubule network, color coded blue. Cell nucleus and nucleoli, moderately absorbing, coded orange. Less absorbing aqueous regions coded black. W. Meyer-Ilse et al. J. Microsc. 201, 395 (2001) 11

12 Bio-nanotomography for 3D imaging of cells Nanotomography of Cryogenic Fixed Cells Soft X-Ray Nanotomography of a Yeast Cell Courtesy of G. Schneider (BESSY) Surf. Rev. Lett. 9, 177 (2002) λ = 2.4 nm Courtesy of C. Larabell (UCSF & LBNL) and M. LeGros (LBNL) 12

13 Bio-nanotomography for 3D imaging of cells Nanotomography of Cryogenic Fixed Cells Soft X-Ray Nanotomography of a Yeast Cell λ = 2.4 nm (517 ev) Δr = 35 nm N = 320 NA = D = 45 µm f = 650 µm σ = 0.64 Resolution = 60 nm λ = 2.4 nm Courtesy of C. Larabell (UCSF & LBNL) and M. LeGros (LBNL) 13

14 Nanoscale 3-D biotomography Mother daughter yeast cells just before separation 2-D slice from 3-D Tomogram. Images every 2, 180 data set, several minutes. Δr = 45 nm Color coding identifies subcellular components by their x-ray absorption coefficients Courtesy of Carolyn Larabell, UCSF/LBNL. 14

15 Applications of soft x-ray microscopy Biotomography at 60 nm resolution Cryofixation 2 angular intervals Depth of focus limits resolution New XM-2 dedicated to biological applications, will become major facility worldwide to draw biologists to this evolving capability Courtesy of C. Larabell (UCSF & LBNL) 15

16 Magnetic x-ray microscopy using x-ray magnetic circular dichroism (XMCD) Magnetic X-Ray Microscopy High spatial resolution in transmission Bulk sensitive (thin films) Complements surface sensitive PEEM Good elemental sensitivity Good spin-orbit sensitivity Allows applied magnetic field Insensitive to capping layers In-plane and out-of-plane measurements 100 nm lines & spaces 1 µm Courtesy of P. Fischer, (MPI, Stuttgart) and G. Denbeaux (CXRO/LBNL) 16

17 Magnetic domains imaged at different photon energies 1 µm FeGd Multilayer Contrast reversal ħω = 704 ev below Fe L-edges ħω = ev Fe L 3 -edge ħω = ev Fe L 2 -edge P. Fischer, T. Eimueller, M. Koehler (U. Wuerzberg) S. Tsunashima (U. Nagoya) and N. Tagaki (Sanyo) G. Denbeaux, L. Johnson, A. Pearson (CXRO-LBNL) 17

18 Magnetic recording of nanomagnetic patterns to 15 nm spatial resolution CoCrPt alloy Co L 3 -edge at 778 ev (1.59 nm) 200 nm Courtesy of Peter Fischer (LBNL) P. Fischer et al., Mat. Today 9, 26 (2006). 18

19 Time resolved studies of vortex dynamics in patterned permalloy thin films Pump and Probe setup requires: Pump: Current pulse to pump sample Probe: X-ray pulses (70ps) from ALS 2 Bunch mode Perfect repeatability of dynamics Sample: 50 nm thick 2µmx4µm permalloy (Ni 80 Fe 20 ) 100nm thick gold waveguide ( I along waveguide generates field to pump sample) Before Pump (t=0) t=+1 ns B.L. Mesler, P. Fischer,W. Chao, E. H. Anderson, D.H. Kim J. Vac. Sci. Technol. B 25, 2598 (2007). t=+1.6 ns 19

20 Environmental Consequences of Portland cement 1.5 billion ton of cement Problem! Generates 1.5 billion ton of CO 2 Responsible for 7% CO 2 production in the world Courtesy of Professor Paulo Monteiro, CEE, UC Berkeley

21 Nanoscale x-ray imaging of cement processes: early hydrates forming during the pre-induction period 1 µm Early hydrates (Sheaf of wheat) Grain C3S hydrated for 34 min. in saturated lime and calcium sulfate at w/c = 5, 1 s exposure time, 516 ev, scale bar 1µm. Courtesy of Professor Paulo Monteiro, CEE, UC Berkeley EE298 Seminar/ David Attwood / April 17, EE298_Seminar_17Apr2010.ppt

22 Nanoscale x-ray imaging of cement processes 13 min 34 min 50 min 10 min 20 min 1 hr 49 min EE298 Seminar/ David Attwood / April 17, min 34 min 1 hr 8 min Courtesy of Professor Paulo Monteiro, CEE, UC Berkeley 520 ev, 40 nm spatial resolution 22 EE298_Seminar_17Apr2010.ppt

23 Spectromicroscopy: high spatial and high spectral resolution of surface and thin films 23

24 Biofilm from Saskatoon River RESULTS Ni, Fe, Mn, Ca, K, O, C elemental map, (there was no sign of Cr.) Different oxidation states for Fe and Ni OD Fe 2p µm 0.5 Protein (gray), Ca, K µm Different oxidation states (minerals) found for Fe & Ni Tohru Araki, Adam Hitchcock (McMaster University) Tolek Tyliszczak, LBNL Sample from: John Lawrence, George Swerhone (NWRI- Saskatoon), Gary Leppard (NWRI-CCIW) 24

25 Patterned polymer photoresists ALS-MES M.K. Gilles, R. Planques, S.R. Leone LBNL Samples from B. Hinsberg, F. Huele IBM Almaden 280 ev 290 ev Exposure to UV light results in loss of carbonyl peak Map chemical spectra taken of pure samples onto a sample containing both components Courtesy of Mary Gilles, LBNL 25

26 Hard x-ray zone plate microscopy Shorter wavelengths, potentially better spatial resolution and greater depth-of-field. Less absorption (β); phase shift (δ) dominates, higher efficiency. Thicker structures required (e.g., zones), higher aspect ratios pose nanofabrication challenges. Contrast of nanoscale samples minimal; will require good statistics, uniform background, dose mitigation. 26

27 nanoxct: Schematic and Challenges X-ray Zone-plate Lens Challenges for achieving nm scale resolution: High resolution objective lens: limiting the ultimate resolution High numerical aperture condenser lens: Detector: high efficiency for lab. source and high speed for synchrotron sources Precision mechanical system Courtesy of Wenbing Yun and Michael Feser, Xradia 1

28 Xradia nanoxct: Sub-25 nm Hard X-ray Image Xradia Resolution Pattern 50 nm bar width 150 nm thick Au 8keV x-ray energy 3 rd diffraction order F. Duewer, M. Tang, G. C. Yin, W. Yun, M. Feser, et al. Xradia nano-xct 8-50S installed at NSRRC, Taiwan 400 nm 2

29 Elemental contrast by tuning energy across the copper absorption edge ( Guan-Chian Yin et al) 8.4 kev 9.5 kev Intensity difference between E = 8.4 kev and 9.5 kev 3

30 Tomography of a Tungsten plug with keyhole at ~60 nm spatial resolution Xradia and NSRRC APL. 88, (2006)

31 Scanning x-ray fluorescence microprobe (µ-xrf) J.H. Underwood and A.C. Thompson, NIM A266, 296 & 318 (1988). 5

32 X-ray microprobe at SPring-8 98m f1: 252mm 45m f2: 150mm Optical microscope PIN photodiode Undulator DCM TC1Slit SDD Mirror manipulator Beam monitor Ion chamber Sample & Scanner Incident Slit Experimental hutch S. Matsuyama et al., Rev. Sci. Instrum. 77, (2006) Front end Courtesy of K. Yamauchi and H. Mimura, Osaka University. 6

33 Sub-cellular elemental analysis using the hard x-ray fluorescence microprobe at SPring-8 S. Matsuyama et al., X-Ray Spectrom.(2010). Courtesy of K. Yamauchi and H. Mimura, Osaka University. 7

34 Breaking the 10 nm barrier in hard x-ray focusing 8 In-situ phase compensation 7 nm Piezo-electric phase compensator Focusing mirror with phase error H. Mimura et al., Nature Physics, 6, 122 (2009) Focusing mirror with phase error

35 Optical configuration for active phase compensation 9 Fizeau interferometer Knife edge scanner X-ray Deformable mirror Optical interferometer (ZYGO GPI) Focusing mirror (Mirror B) Focusing mirror Focal point CCD camera (for alignment) Zooming tube + CCD Zooming tube + X-ray CCD Ion chamber Adaptive mirror APD placed at dark field 150mm H. Mimura et al., Nature Physics, 6, 122 (2009) 250mm

36 Synchrotron-based art conservation at ESRF µ-xrf, µ-xrd, µ-xanes Courtesy of Marine Cotte (ESRF, Grenoble, France) 1

37 Examples of µ-xanes K-edge spectra occurring in art materials Sulfur Chlorine Courtesy of Marine Cotte (ESRF, Grenoble, France) 2

38 18 th Dynasty Egyptian glass vase studied for an understanding of color and opaqueness in antiquity 1 st production of glass objects Egypt (1500 B.C.), opaque, colored, nanoscale calcium antimonate Courtesy of Marine Cotte (ESRF, Grenoble, France) 3

39 Swiss Light Source Synchrotron radiation x-ray tomographic microscopy (SRXTM) Courtesy of Marco Stampanoni, Swiss Light Source. 4

40 Swiss Light Source TOMCAT Microscope 1 10% MTF reached routinely Courtesy of Marco Stampanoni, Swiss Light Source. 5

41 Swiss Light Source TOMCAT Microscope To CCD X-ray beam scintillator objective mirror rotation stage centering device 1 10% MTF reached routinely Courtesy of Marco Stampanoni, Swiss Light Source. 6

42 Swiss Light Source Hard x-ray 3D x-ray tomography: microvascular architecture of a mouse brain SRXTM, 25 kev, 15 µm resolution Tomcat Beamline, Swiss Light Source M. Stampanoni, T. Krucker et al., Adv. Neur. Res. (2008) Courtesy of Marco Stampanoni, Swiss Light Source. 1

43 Swiss Light Source Tomographic reconstruction of a 500 million year old fossilized embryo from Southern China Markelia hunanensis relative of modern roundworms and arthropods SRXTM, 17.5 kev, 15 µm resolution Tomcat Beamline, Swiss Light Source P. Donoghue, S. Bengtson, M. Stampanoni et al., Nature 442, (2006) Courtesy of Marco Stampanoni, Swiss Light Source. 2

44 A lens is not necessarily required Δr resol. = k 1 λ / NA Lensless coherent diffraction imaging (CDI) is being aggressively pursued. Frontiers in Optics, OSA, San Jose, CA, October 15,

45 Coherent diffractive imaging (CDI) Frontiers in Optics, OSA, San Jose, CA, October 15,

46 Coherent diffractive imaging (CDI) examples Femtosecond diffractive imaging with a free electron laser CDI with laboratory scale high harmonic generation (HHG) Flash FEL, λ = 32 nm (39 ev) 25 fsec, photons/pulse 62 nm resolution Chapman, et al. Nature Physics (2006) Synchrotron based CDI of 100 nm Au spheres HHG, n = 27, λ= 29 nm (43 ev ) 94 nm spatial resolution Sandberg, et al. PNAS (2008) Synchrotron based CDI of a freeze dried yeast cell CDI ALS/9.0.1 λ = 1.66 nm (750 ev) STXM NSLS/X1 λ = 2.3 nm (540 ev) 42 nm resolution Tilted 3 Tilted 4 Synchrotron CDI of Au particles λ = nm (15 kev), 5 nm resolution Schroer, et al. PRL (2008) Shapiro, et al. PRL (2005) 30 nm fine features Frontiers in Optics, OSA, San Jose, CA, October 15,

47 Lensless imaging of magnetic nanostructures by x-ray spectro-holography Frontiers in Optics, OSA, San Jose, CA, October 15,

48 Lectures online at Amazon.com UC Berkeley