(N)ZH 6.1 VACUUM E JECTOR (N)ZM 6.2 (N)ZL 6.4 M ULTI-STAGE VACUUM E JECTOR (N)ZFB 6.6 ZSM1 6.8 VACUUM S WITCH - DIAPHRAGM TYPE

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1 VACUUM 6.a VACUUM S ERIES PAGE N UMBER (N)ZH 6.1 VACUUM E JECTOR (N)ZM 6.2 VACUUM E JECTOR (N)ZZM 6.3 VACUUM E JECTOR M ANIFOLD (N)ZL 6.4 M ULTI-STAGE VACUUM E JECTOR (N)ZFA 6.5 A IR S UCTION F ILTER (N)ZFB 6.6 A IR S UCTION F ILTER ZS 6.7 VACUUM S WITCH ( SEE ALSO I NSTRUMENTATION S ECTION PAGES 7.10 TO 7.14) ZSM1 6.8 VACUUM S WITCH - DIAPHRAGM TPE T H ANDLE-OPERATED VACUUM R EGULATOR ZPT 6.10 VACUUM PADS - VERTICAL E NTR W ITHOUT B UFFER

2 6.b VACUUM S ERIES PAGE N UMBER ZPR 6.12 VACUUM PADS - HORIZONTAL T PE E NTR W ITH B UFFER / ONE-TOUCH F ITTINGS ZP 6.16 VACUUM PADS ZPT/ZPX 6.17 H EAV D UT VACUUM PADS VACUUM S OLENOID VALVE R EFERRAL PORT & 5 PORT (N)AK C HECK VALVE VVQ VACUUM E JECTOR U NIT F OR VQ1000 SERIES / BASE-MOUNTED P LUG-IN T PE ZCDUK 6.21 F REE M OUNT C LINDER F OR VACUUM ZU 6.22 C OMPACT VACUUM E JECTOR W ITH B UILT-IN S ILENCER

3 VACUUM VACUUM E JECTOR S ERIES NZH 6.1 NZH VACUUM E JECTOR Box type and body ported 7 nozzle diameters Large flow type One touch or threaded connection Built in silencer (box type only) B OX T PE B OD T PE NZHI VACUUM E JECTOR (N)ZHI E XHAUST P ORT (BOD T PE O NL) M ODEL 06 6mm Tube 07 1/4 08 8mm Tube 09 5/16 N Canada, USA 10 10mm Tube 11 3/8 Tube - Other (PT) 01 Rc 1 8 T01 1/8NPT 02 Rc 1 4 T02 1/4NPT N OZZLE D IAMETER mm mm mm mm T PE B Box type D Body type V ACUUM P RESSURE S 660mm Hg L 360mm Hg I NLET P ORT 06 6mm Tube 08 8mm Tube 01 Rc1/8 07 1/4 Tube 09 5/16 Tube T01 1/8NPT V ACUUM P ORT 06 6mm Tube 08 8mm Tube 01 Rc Rc /4 Tube 11 3/8 Tube T01 1/8NPT T02 1/4NPT Fluid Operating Pressure Range Max Operating Pressure Operating Temperature Range Lubrication S M B O L S Air 2.5~6 Bar / 37~90PSI 7 Bar / 100PSI 5 ~ 60ºC / 40~140ºF Forbidden ZH VACUUM E JECTOR ZH N OZZLE D IAMETER 15 ø1.5mm 18 ø1.8mm 20 ø2 mm T PE Body Ported V ACUUM P RESSURE S 660mm Hg L 400mm Hg D I NLET P ORT 10 10mm Tube 12 12mm Tube 02 Rc1/4 03 Rc3/8 T02 1/4NPTF T03 3/8NPTF V ACUUM P ORT 10 10mm Tube 12 12mm Tube 16 16mm Tube 03 Rc3/8 04 Rc1/2 T03 3/8NPTF T04 1/2NPTF E XHAUST P ORT 12 12mm Tube 16 16mm Tube 03 Rc3/8 04 Rc1/2 T03 3/8NPTF T04 1/2NPTF M AXIMUM S UCTION F LOW R ATE/ A IR C ONSUMPTION U NIT ( l n/min) Specifications Max Suction Flow Rate Air Consumption Max Vacuum Pressure* mmhg (Torr) S Type 660 (100) L Type (400) L Type (400) S Type (100) L Type (400) Nozzle Diameter mmø / / / / *Vacuum pressure is quoted as mmhg below atmospheric (Torr Absolute) 1 Torr = PSI M AXIMUM S UCTION F LOW R ATE/ A IR C ONSUMPTION U NIT ( l n/min) Specifications Max Suction Flow Rate SCFM (l n/min) Air Consumption SCFM (l n/min) 1 Torr = PSI Max Vacuum Pressure mmhg (Torr) S Type - 26 (6600) L Type - 16 (400) S Type - 26 (660) L Type - 16 (400) Nozzle Diameter mmø

4 6.2 VACUUM VACUUM E JECTOR S ERIES NZM VACUUM E JECTOR S ERIES NZM All in one vacuum system Two stage nozzle design Suction flow rate 40% higher than traditional designs Silencer and suction filter Optional air supply and vacuum release valve Optional diaphragm or solid state vacuum switch Manifold mountable version Fluid Max Operating Pressure Operating Pressure Operating Temperature Operating Valve (Air Supply & Release Valve) Switch Suction Filter Lubrication Solenoid Supply Air 7 Bar / 100PSI 2 ~ 5.5 Bar / 30~80PSI 5 ~ 50 C (with valve) 40~120ºF 5 ~ 60 C (w/o valve) 40~140ºF Main: Poppet Valve Pilot: VJ114 Solid State Type ZSE1-0 Diaphragm State Type ZSM1-0 30µm PE (Polyethylene) Forbidden 24V DC S M B O L S Supply Vacuum Exhaust B ASIC T PE W ITH V ACUUM S WITCH (N)ZM VACUUM E JECTOR (N)ZM N OZZLE D IAMETER mm mm mm mm T PE 2 Body Ported 4 Manifold Type-Common SUP 6 Manifold Type-Individual SUP S UPPL P RESSURE H 5 Bar M 3.5 Bar Model Standard Supply Pressure Max. Vacuum Pressure Max. Suction Flow Air Consumption NZM05H 5Kgf/cm 2 / 75PSI 630mmHg NZM07H 5Kgf/cm 2 / 75PSI 630mmHg NZM10H 5Kgf/cm 2 / 75PSI 630mmHg NZM13H 5Kgf/cm 2 / 75PSI 630mmHg NZM07M 3.5Kgf/cm 2 / 50PSI 630mmHg NZM10M 3.5Kgf/cm 2 / 50PSI 630mmHg NZM13M 3.5Kgf/cm 2 / 50PSI 630mmHg P ORT T HREAD Nil PT* Remove (N) when ordering T NPTF S WITCHES Nil Without E15L Solid State (NPN) E55L Solid State (PNP) M21L Reed M15L Non-contact

5 VACUUM VACUUM E JECTOR S ERIES NZM 6.3 W ITH V ALVE AND V ACUUM S WITCH NZM VACUUM E JECTOR WITH V ALVES AND S WITCH (N)ZM H K5LZ S STEM Supply C IRCUIT N OZZLE D IAMETER mm mm mm mm Exhaust V OLTAGE 5 24VDC 6 12VDC V ACUUM S WITCH Nil Without E15L Solid State (NPN) E55L Solid State (PNP) M21L Reed M15L Non-Contact P ORT T HREAD Nil PT* Remove (N) when ordering T NPTF T PE 1 Body Ported 3 Manifold Type - Common SUP 5 Manifold Type - Individual SUP Vacuum NZM VACUUM E JECTOR M ANIFOLD S ERIES NZM VACUUM E JECTOR M ANIFOLD 1 10 Stations Common supply and exhaust Maintenance and adjustment is possible without disassembly of the manifold (N)ZZM NZM VACUUM M ANIFOLD E JECTOR B Fitted with an Optional Silencer Series NAN: see section Air Preparation Accessories n L L L NUMBER OF STATIONS Station Stations to Stations EXHAUST PORT / /4 PORT THREAD Nil...PT* Remove (N) when ordering T...NPTF EXHAUST ADAPTOR LOCATION B...Both Ends

6 6.4 VACUUM M ULTISTAGE VACUUM E JECTOR M ULTISTAGE VACUUM E JECTOR S ERIES (N)ZL Three stage defuser system - for high flow, low air consumption and energy saving Compact design - aesthetic appearance, easy to locate Free Mount type - mounting from three sides possible Built-in One-touch Fittings - for easy piping Built-in Silencer and Suction Filter Optional Vacuum Pressure Switch or Gauge Model (N)ZL112 (N)ZL112-G (N)ZL112-E Nozzle Diameter Ø1.2mm Max Suction Flow 100 l/m (ANR) Air Consumption 63 l/m (ANR) Max Vacuum Pressure -84kPa (-12PSI) Max Operating Pressure 0.7MPa / 100PSI Supply Pressure Range 0.2 ~ 0.5MPa / 30 ~ 75PSI Standard Supply Pressure 0.4MPa / 160PSI Operating Temperature Range 5 ~ 50ºC / 40~120PSI Option Vacuum pressure gauge, Vacuum pressure switch O PTION VACUUM PRESSURE GAUGE Model GZ30S Fluid Air Pressure range -100 ~ 100kPa / -15~15PSI Scale angle 230º Accuracy + -3% F.S. (Full Span) Class Class 3 Operating temperature range 0 ~ 50ºC / 32~120ºF Material Case: Polycarbonate/ABS resin (N)ZL212 ø1.2mm x l/m (ANR) 126 l/m (ANR) -12PSI 100PSI 30 ~ 75 PSI 160PSI 40~120 PSI O PTION VACUUM PRESSURE DIGITAL SWITCH Model ZSE (L)-X105 ZSE (L)-X105 Output Specification 1 output, NPN open 1~5V + -5% FS load collector 30V 80mA impedence 1k Fluid Air Setting PressureRange 0~-101kPa, -760mmHg, -14.7PSI, 1.01bar Min Display Unit 1kPa, 5mmHg, 0.1PSI, 0.01 bar Hysteresis Hysteresis modo, wind comparator modo Temperature Specification + -3%F.S. (Full span) or less Repeatability + -1% or less Power supply DC12~24V (Ripple + -10%or less) Indicator light Light at ON Switch output 1 : Green Light at ON : Green Current consumption 25mA or less Error indicator Red indicator light flashes / LCD error message Max. operating pressure 200kPa / 130PSI Operating temperature range 0~50ºC / 32~120ºF Electrical entry Grommet Oil proof vinyl cabtire cable gray Ø mm 2 M ULTISTAGE V ACUUM E JECTOR S ERIES NZL (N)ZL112 M ODEL 1 NZL112 2 NZL212 S WITCH & WIRING S PECS (E OPTION O NL) 25L 3 wire LCD/Non Analog Output NPN 26L 3 wire Analog Output (1 ~ 5V) 65L 3 Wire LCD/Non Analog Output PNP G AUGE & SWITCH O PTION - No gauge or switch option G With vacuum pressure gauge E With vacuum pressure digital switch

7 VACUUM A IR S UCTION F ILTER S ERIE NZFA 6.5 NZFA AIR S UCTION F ILTER Compact and lightweight Protects vacuum equipment Large filtration area Easy replacement of element Fluid Air, Dry Nitrogen Operating Pressure Range Negative Pressure Proof Pressure 5 Bar / 75PSI Operating Temperature Range 5 ~ 60 C / 40~140ºF Filtration 30µm Element Proof Differential Pressure 1.5 Bar / 20PSI Model Port Size Recommendable Air Flow l n /min NZFA100-T NZFA200-T S M B O L S A PPLICATION TO E JECTOR S S T E M Install to protect vacuum equipment, avoid reverse positive pressure blow. A PPLICATION TO V ACUUM P UMP S STEM Cup (N)ZFA AIR S UCTION F ILTER (N)ZFA TPE Nl/Min Nl/Min A CCESSORIES N None L With Bracket -Left R With Bracket -Right P ORT T HREAD Nil PT* Remove N when ordering F PF* Remove N when ordering T NPTF P ORT S IZE 01 1/8 02 1/4 (N)ZFA AIR S UCTION F ILTER E LEMENT EJ001H-030N (100 Series) EJ101H-030N (200 Series) Model Port Size A B B RACKET BP-1H (N)ZFA / (N)ZFA /

8 6.6 VACUUM A IR S UCTION F ILTER A IR S UCTION F ILTER S ERIES NZFB Built-in one-touch fittings Tubing can be installed through 360 Compact and light weight Simple element change A IR S UCTION F ILTER S ERIES NZFB S M B O L S Fluid Air, dry nitrogen Operating Pressure Negative pressure Proof Pressure 5 Bar / 75PSI Temperature Range 0~60 C (No freezing) / 32~140ºF Filtration 30 µm Element Proof DP 1.5 Bar / 24PSI Applicable Tube Material Nylon, Soft Nylon, Polyurethane A PPLICATION TO P UMP S STEM V ACUUM MM size Inch size Model A B C D E F G H I J K L M ZFB ZFB ZFB ZFB ZFB ZFB (N)ZFB " (N)ZFB " (N)ZFB " 9.5 (N)ZFB " 11 (N)ZFB " 13.5 N A PPLICATION TO E JECTOR S STEM A IR S UCTION F ILTER S ERIES (N)ZFB (N)ZFB B OD S IZE 100 Max 20 ln/min 200 Max 50 ln/min 300 Max 75 ln/min 101 Max 20 ln/min 201 Max 30 ln/min 301 Max 60 ln/min 401 Max100ln/min T UBE S IZE ODMM 04 Ø4 06 Ø6 08 Ø8 10 Ø10 05 ø3/16 07 ø1/4 11 ø3/8 13 ø1/2 ACCESSORIES A IR S UCTION F ILTER S ERIES (N)ZF1B E LEMENT I-34S-A (N)ZFB100, 101 I-35S-A (N)ZFB200, 201 I-36S-A (N)ZFB300, 301 I-395-A (N)ZFB401

9 VACUUM S WITCH S ERIES ZSE1 VACUUM VACUUM S WITCH S ERIES ZS 6.7 Solid State Quick Response 10 ms Compact Size Semiconductor Type Pressure Sensor NPN and PNP Versions V ACUUM S WITCH S ERIES ZSE1 G ROMMET T PE Fluid Air Setting pressure range 0~760mmHg / 0~30inHg Hysteresis Adjustable 1~10% of range Accuracy ±3% F.S. (5~40 C) 40~100ºF ±5% F.S. (0~60 C) 32~140ºF Supply voltage 12~24VDC (Ripple ±10% or less) Output Open collector (NPN/PNP) 30V Max. 80mA Trimmer adjustment 200º Indicator light Lighting under ON condition Power consumption 17mA 24VDC (under ON condition) Max. pressure 2 Bar / 28PSI Temperature range 0 ~ 60 C / 32~140ºF C IRCUIT ZSE1 V ACUUM S WITCH S ERIES ZSE1 ZSE1 L Switch Type 15L Switch Type 55L ZSE1--55 C ONNECTION 00 NZM Ejector Mounting PT T1 1/8 NPTF E LECTRICAL E NTR - Grommet (24 ) L Grommet (120 ) C w/plug Connector (24 ) CL w/plug Connector (120 ) CN Plug Type (w/o Lead) S WITCH T PE 14 Solid State (NPN) 15 Solid State (NPN) 16 Solid State (NPN) 17 Solid State (NPN) 18 Solid State (NPN) 19 Solid State (NPN) 55 Solid State (PNP) ACCESSORIES V ACUUM S WITCH S ERIES ZS Interface plate for ZM Ejector P (blank) P (use with switch) S EE INSIDE FRONT COVER FOR DETAILS OF OUR LOCAL SALES OFFICE

10 6.8 VACUUM VACUUM S WITCH S ERIES ZS VACUUM S WITCH S ERIES ZSM1 DIAPHRAGM T PE 100 ms Response Time Compact Size ZSM1 (VACUUM E JECTOR T PE) Model ZSM1-115 ZSM1-121 V ACUUM S WITCH S ERIES ZSM1 (THREADED T PE) Electrical switch type Fluid Max. pressure Setting pressure range Adustment screw Solid state NPN Contact (reed switch) Air, Inert gases 5 Bar / 75PSI ~ - 600mmHg -8 ~ 26inHg Range = 18 turns Max. hysteresis 110mmHg 150mmHg Temperature range 5 ~ 60 C / 40~140ºF Supply voltage 10 ~ 26VDC 100VAC Indicator light Lighting under ON condition (LED) Wire 3wire 2wire Port size 1 8 (Male) C IRCUIT ZSM1-115 V ACUUM S WITCH S ERIES ZSM1 ZSM1 ZSM1-121 C ONNECTION 0 NZM Ejector Mounting PT T1 1/8 NPTF ACCESSORIES CONTACT PROTECTION BOX Diaphragm type switches have no built-in contact protection circuit. Use this box for induction load, 5m or more lead wire length and 100V AC. ACCESSORIES V ACUUM S WITCH S ERIES ZSE1 Interface plate for ZSM Ejector P (blank) P (use with switch) CD-P11 Contact protection box S WITCH T PE 15L Solid state (NPN) 21L Contact reed CONTACT PROTECTION BOX/INTERNAL CIRCUIT

11 H ANDLE O PERATED VACUUM R EGULATOR S ERIES T H ANDLE O PERATED VACUUM R EGULATOR S ERIES T203 Setting vacuum 10~750 Torr (mmhg) Sensitivity 1 Torr (mmhg) Repeatability ±3 Torr (mmhg) Max. flow rate 120 Nl/min Weight 520gf Operating temperature -5~+60ºC / 23~140ºF Connection port Rc 1 4, Rc 3 8 A vacuum regulator, installed after a vacuum pump, which regulates vacuum at any level Typical circuit layouts Vacuum Pump Tank Solenoid Valve Filter V ACUUM R EGULATOR Vacuum Pad Vacuum Pick - Up Solenoid Valves Pressure Transducer T *-X2 Panel Mount Type Vacuum Pump Object Vacuum Leak Test F L O W CHARACTERISTICS T * ACCESSORIES T203 Bracket Gauge (Scale in mmhg) GZ46-A-02 H OW V ACUUM R EGULATOR S ERIES T203 T203 1 P RESSURE CHARACTERISTICS P ORT S IZE 02 1/4 03 3/8 O PTION Nil None B With Bracket G With Gauge P ANEL M OUN PTION Nil Standard X2 Panel Mount Option S EE INSIDE FRONT COVER FOR FOR FURTHER TECHNICAL DETAILS ON THIS DETAILS OF OUR LOCAL SALES OFFICE PRODUCT REFER TO CATALOG REFERENCE N400

12 6.10 VACUUM VACUUM PADS S ERIES ZP ZPT VACUUM PADS V ERTICAL E NTR WITHOUT B UFFER Vacuum Entry Pad Type Flat type Flat with rib Deep type Pad Dia (mm) Material (Color) Hardness 2, 4, 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 Vertical type Mounting Use connection for vacuum entry 10, 13, 16, 20, 25, 32, 40, 50 NBR (Black) 50º shore 10, 16, 25, 40 P AD D IAMETERS Ø2, Ø4, Ø6, Ø8 P AD D IAMETERS Ø20, Ø25, Ø32 F LAT T PE - FLAT WITH RIB F LAT T PE Model ØA ØB ØC F:M5x0.8 F:M6x1 D E G D E G ZPT02U ZPT04U ZPT06U ZPT08U Model ØA ØB D EEP T PE D H : M6x1 H : M8x1 ØC E F G I ØC E F G I Flat Flat with rib ZPT20 U C ZPT25 U C ZPT32 U C H:M6x1 H:M8x1 Model ØA ØB D ØA E F G I ØC E F G I ZPT25D P AD D IAMETERS Ø10, Ø13, Ø16 P AD D IAMETERS Ø40, Ø50 F LAT TPE - FLAT WITH RIB Model D EEP T PE ØA ØB C D G:M5x0.8 G:M6x1 E F E F Flat Flat with rib ZPT10 U C ZPT13 U C ZPT16 U C G:M5x0.8 G:M6x1 F LAT TPE - FLAT WITH R IB Model D EEP T PE ØA ØB D E H:M6x1 H:M8x1 ØC F G ØC F G Flat Flat with rib ZPT40 U C ZPT50 U C Model ØA ØB C D E F E F H:M6x1 H:M6x1 Model ØA ØB D E ZPT10D ØC F G ØC F G ZPT16D ZPT40D S EE N EXT P AGE

13 VACUUM VACUUM PADS S ERIES ZP 6.11 ZPT PAD V ERTICAL T PE W ITHOUT B UFFER ZPT P AD D IAMETER 02 Ø2 04 Ø4 06 Ø6 08 Ø8 10 Ø10 13 Ø13 16 Ø16 20 Ø20 25 Ø25 32 Ø32 40 Ø40 50 Ø50 P AD M ATERIAL N Nitrile rubber (standard) S Silicon rubber U Urethane F Fluorine rubber GN Anti-static Nitrile rubber GS Anti-static Silicon rubber P AD T PE U Flat C Flat with Rib (Not ø2,4,6,8) D Deep (ø10,16,25,40) B Bellows (Not ø2,4) V ACUUM E NTR ( ALSO MOUNTING THREAD DIA) S MBOL T HREAD D IAMETER Ø2~Ø8 Ø 10~Ø16 Ø 20~Ø32 Ø 40Ø50 Male A5 M5x Thread A6 M6x1 A8 M8x1 - - B4 M4x Female B5 M5x0.8 - Thread B6 M6x1 - - B8 M8x B01 1/8PT - ZPT VACUUM PADS V ERTICAL E NTR WITH B UFFER P AD D IAMETERS Ø2, Ø4, Ø6, Ø8 P AD D IAMETERS Ø10, Ø13, Ø16 Vacuum entry Buffer type Buffer stroke Pad type Flat type Flat with rib Deep type 2, 4, 6, 8, 10, 13, Pad dia. (mm) 16, 20, 25, 32, 40, 50 Material (colour) Hardness S PRING F ORCE ( N ) Pad dia. (mm) 0 stroke Stroke end Ø2~Ø Ø10~Ø Ø40, Ø Vertical type Non-rotation type (K) For Ø2~Ø8...6mm For Ø10~Ø mm 10, 13, 16, 20, 25, 32, 40, 50 NBR (Black) 50º shore 10, 16, 25, 40 S EE N EXT P AGE F LAT TPE - FLAT WITH RIB F LAT T PE Model ØA ØB ØC E:M3x0.5 E:M5x0.8 D F D F ZPT02U ZPT04U ZPT06U ZPT08U Model ØA ØB C D E F G Flat Flat with rib ZPT10 C U ZPT13 C U ZPT16 C U D EEP T PE Model ØA ØB C D E F G ZPT10D ZPT16D

14 6.12 VACUUM VACUUM PADS S ERIES ZP ZPT PAD V ERTICAL T PE WITH B UFFER ZPT N P AD D IAMETER 02 Ø2 04 Ø4 06 Ø6 08 Ø8 10 Ø10 13 Ø13 16 Ø16 20 Ø20 25 Ø25 32 Ø32 40 Ø40 50 Ø50 P AD T PE U Flat C Flat with Rib (Not ø2,4,6,8) D Deep (ø10,16,25,40) B Bellows (Not ø2,4) P AD M ATERIAL N Nitrile rubber (standard) S Silicon rubber U Urethane F Fluorine rubber GN Anti-static Nitrile rubber GS Anti-static Silicon rubber M OUNTING T HREAD Male thread V ACUUM E NTR Onetouch tube fitting Symbol Thread dia. Ø2~Ø8 Ø10~Ø32 Ø40~Ø50 A8 M8X1 A10 M10X1 A14 M14X1 Symbol Port size Ø2~Ø8 Ø10~Ø32 Ø40~Ø50 04 Ø4 tube 06 Ø6 tube 08 Ø8 tube B UFFER Symbol Stroke Ø2~Ø8 Ø10~Ø32 Ø40~Ø50 K6 6mm K10 10mm J6 6mm J10 10mm Non-Rotating Non-Rotating With Buffer With Buffer ZPR VACUUM PADS H ORIZONTAL T PE VACUUM E NTR W ITH B UFFER - ONE UCH F ITTING Vacuum Entry Buffer Type Buffer Stroke Horizontal type Non-rotation type (K) For Ø2~Ø8...6mm For Ø10~Ø mm P AD D IAMETERS Ø2, Ø4, Ø6, Ø8 Pad Type Flat type Flat with rib Deep type Pad Diameter (mm) Material (Color) Hardness 2, 4, 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 10, 13, 16, 20, 25, 32, 40, 50 NBR (Black) 50º shore 10, 16, 25, 40 F LAT T PE ØD:Ø4 ØD:Ø6 Model ØA ØB ØC E F ØG E F ØG ZPR02U ZPR04U ZPR06U ZPR08U A PPLICABLE T UBE MORE DIMENSIONS S EE N EXT P AGE Applicable Tube O.D. ØE Ø Ø6 12.8

15 VACUUM VACUUM PADS S ERIES ZP 6.13 F LAT TPE - FLAT WITH R IB P AD D IAMETERS Ø10, Ø13, Ø16 Model ØA ØB C D E F G H I Flat Flat with Rib ZPR10 C U ZPR13 C U ZPR16 C U D EEP T PE Model A ØB C D E F G H I ZPR10D ZPR16D P AD D IAMETERS Ø20, Ø25, Ø32 A PPLICABLE T UBE Applicable Tube O.D. ØP Q R ØS Ø Ø F LAT TPE - FLAT WITH RIB Model A ØB C D E F G H I Flat Flat with Rib ZPR ZPR ZPR D EEP T PE Model ØA ØB C D E F G H I ZPR25D P AD D IAMETERS Ø40, Ø50 ZPR PAD H ORIZONTAL T PE WITH B UFFER P AD 02 Ø2 04 Ø4 06 Ø6 08 Ø8 10 Ø10 13 Ø13 ZPR D IAMETER 16 Ø16 20 Ø20 25 Ø25 32 Ø32 40 Ø40 50 Ø50 P AD T PE U Flat C Flat with Rib (Not ø2,4,6,8) D Deep (ø10,16,25,40) B Bellows (Not ø2,4) P AD M ATERIAL N Nitrile Rubber (standard) S Silicon Rubber U Urethane F Fluorine Rubber GN Anti-static Nitrile Rubber GS Anti-static Silicon Rubber F LAT TPE - FLAT WITH R IB A PPLICABLE T UBE Applicable Tube OD ØP Q R ØS Ø Ø Ø M OUNTING T HREAD Male Thread Symbol Thread Dia Ø2~Ø8 Ø10~Ø16 Ø20~Ø32 Ø40~Ø50 A8 M8X1 A10 M10X1 A14 M14X1 V ACUUM E NTR Onetouch Tube Fitting Symbol Port Size Ø2~Ø8 Ø10~Ø16 Ø20~Ø32 Ø40~Ø50 04 Ø4 Tube 06 Ø6 Tube 08 Ø8 Tube B UFFER Symbol Stroke Ø2~Ø8 Ø10~Ø16 Ø20~Ø32 Ø40~Ø50 K6 6mm Non-Rotating K10 10mm Non-Rotating J6 6mm With Buffer J10 10mm With Buffer Model ØA ØB C D E F G H I Flat Flat with Rib ZPR40 C U ZPR50 C U D EEP T PE A PPLICABLE T UBE Applicable Tube OD ØP Q R ØS Model ØA ØB C D E F G H I Ø ZPR40D Ø

16 6.14 VACUUM VACUUM PADS S ERIES ZP ZPR VACUUM PADS H ORIZONTAL T PE VACUUM E NTR W ITHOUT B UFFER - ONE UCH F ITTING Vacuum Entry Pad Type Flat Type Flat with Rib Deep Type Pad Dia (mm) Horizontal Type Connection With One-touch Tube Fitting 2, 4, 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 10, 13, 16, 20, 25, 32, 40, 50 Material (Color) NBR (Black) Hardness 50º 10, 16, 25, 40 P AD D IAMETERS Ø2, Ø4, Ø6, Ø8 P AD D IAMETERS Ø10, Ø13, Ø16 F LAT T PE F: M5X0.8 F: M6X1 Model ØA ØB ØC D E D E ZPR02U ZPR04U ZPR06U ZPR08U A PPLICABLE T UBE Applicable Tube OD ØG H I ØJ Ø Ø F LAT TPE - FLAT WITH R IB Model ØA ØB C D E F D EEP T PE A PPLICABLE T UBE I: M5X0.8 I: M6X1 G H G H Flat Flat with rib ZPR10 C U ZPR13 C U ZPR16 C U I: M5X0.8 I: M6X1 Model ØA ØB C D E F G H G H ZPR10D ZPR16D MORE DIMENSIONS S EE N EXT P AGE Applicable ØP Q R ØS Tube OD Ø Ø S EE N EXT P AGE

17 VACUUM VACUUM PADS S ERIES ZP 6.15 P AD D IAMETERS Ø20, Ø25, Ø32 P AD D IAMETERS Ø40, Ø50 F LAT TPE - FLAT WITH R IB I: M6X1 I: M8X1 Model ØA ØB C D E F G H G H Flat Flat with rib ZPR20 C U ZPR25 C U ZPR32 C U D EEP T PE I: M6X1 I: M8X1 Model ØA ØB C D E F G H G H ZPR25D A PPLICABLE T UBE Applicable Tube OD ØP Q R ØS Ø Ø Ø P AD D IAMETER 02 Ø2 04 Ø4 06 Ø6 08 Ø8 10 Ø10 13 Ø13 16 Ø16 20 Ø20 25 Ø25 32 Ø32 40 Ø40 50 Ø50 ZPR F LAT TPE - FLAT WITH R IB I: M6X1 I: M8X1 Model ØA ØB C D E F G H G H Flat Flat with rib ZPR40 C U ZPR50 C U D EEP T PE I: M6X1 I: M8X1 Model ØA ØB C D E F G H G H ZPR40D A PPLICABLE T UBE Applicable ØP Q R ØS Tube OD Ø Ø ZPR P A D H O R I Z O N T A L T P E W I T H O U T B U F F E R P AD T PE U Flat C Flat with Rib (Not ø2,4,6,8) D Deep (ø10,16,25,40) B Bellows (Not ø2,4) P AD M ATERIAL N Nitrile Rubber (Standard) S Silicon Rubber U Urethane F Fluorine Rubber GN Anti-static Nitrile Rubber GS Anti-static Silicon Rubber M OUNTING T HREAD Male Thread Symbol Thread Dia Ø2~Ø8 Ø10~Ø16 Ø20~Ø32 Ø40~Ø50 A5 M5X0.8 A6 M6X1 A8 M8X1 V ACUUM E NTR One- Touch Tube Fitting Symbol Port Size Ø2~Ø8 Ø10~Ø16 Ø20~Ø32 Ø40~Ø50 04 Ø4 tube 06 Ø6 tube 08 Ø8 tube

18 6.16 VACUUM VACUUM PADS S ERIES ZP ZP SERIES VACUUM PADS ZP VACUUM P ADS ZP VACUUM P ADS 288 Standard Options 12 Diameters 4 Types 6 Materials ZP VACUUM P ADS F LAT T PE P AD Part No Type ØA ØC ØB D E F ZP02U U ZP04U U ZP06U U ZP08U U ZP10U U ZP13U U ZP16U U ZP20U U ZP25U U ZP32U U ZP40U U ZP50U U ZP VACUUM P ADS Part No Type ØA ØB ØC ØD E F ØG ØH ZP06B B ZP08B B ZP10B B ZP13B B ZP16B B ZP20B B ZP25B B ZP32B B ZP40B B ZP50B B D EEP T PE P AD Part No Type G ØC ØB ØD E F ZP10D D ZP16D D ZP25D D ZP40D D F LAT T PE P AD WITH R IB ZP VACUUM P ADS ZP Part No Type ØA ØC ØB ØD E F ZP10C C ZP13C C ZP16C C ZP20C C ZP25C C ZP32C C ZP40C C ZP50C C P AD D IAMETER 02 Ø2 04 Ø4 06 Ø6 08 Ø8 10 Ø10 13 Ø13 16 Ø16 20 Ø20 25 Ø25 32 Ø32 40 Ø40 50 Ø50 P AD M ATERIAL N Nitrile Rubber (Standard) S Silicon Rubber U Urethane F Fluorine Rubber GN Anti-static Nitrile Rubber GS Anti-static Silicon Rubber P AD T PE U Flat C Flat with Rib (Not ø2,4,6,8) D Deep (ø10,16,25,40) B Bellows (Not ø2,4)

19 VACUUM VACUUM PADS S ERIES ZPT/ZPX 6.17 H EAV D UT VACUUM PADS S ERIES ZPT/ZPX Wide Range of Materials: NBR, Silicon, Fluorine, Urethane, EPM Heavy Duty Range of Sizes from Ø40 ~ Ø125 Choice of Mounting Styles - Orthogonal or Axial Vacuum Entry Optional Spring Loaded Buffer 4 Choices of Buffer Stroke Standard Type Buffer Mount Type ZPT Axial Vacuum Entry ZPX 90º Vacuum Entry Buffer Stroke Ø Pad Ø40 Ø50 Ø63 Ø80 Ø100 Ø S EE INSIDE FRONT COVER FOR DETAILS OF OUR LOCAL SALES OFFICE

20 6.18 VACUUM S OLENOID VALVES VACUUM S OLENOID VALVE R EFERRAL This section is written to assist the selection of solenoid valves for use in vacuum applications. B ACKGROUND Many current pneumatic solenoid valves are actually of solenoid-pilot construction. The solenoid does not operate directly upon the spool or poppet within the valve. What the solenoid does is open a very small pilot valve. This controls the passage of air bled from the P or pressure port of the valve. The main valve is pneumatically operated by this air, switched by the solenoid. The advantages of this arrangement, using the air pressure within the valve to do the work, are dramatically reduced size and power consumption of the solenoid, and a faster response. The disadvantage is that this type of valve is incapable of operating without pressure applied as in a vacuum system. T HREE-PORT VALVES D IRECT A CTING VT SERIES (SEE V ALVE S ECTION) VACUUM V ERSION Also the design of spool or poppet used in a valve may rely on positive pressure for its operation. e.g. A poppet may be pushed on to a seat by positive pressure, but lifted back off by vacuum, resulting in a leak. For this reason internal design may preclude ostensibly suitable valves from vacuum applications. VALVE T PES AVAILABLE To operate a solenoid pilot valve in a vacuum system, a separate pressure supply must be supplied to the valve to move the spool or poppet as described above. This is known as External Pilot type and can be used when a separate positive pressure supply can be provided. The alternative option is to operate the spool directly with the solenoid the direct acting type. This can be used in a pure vacuum system, when no positive pressure supply is available. F IVE-PORT VALVES S BOD P ARTED (SEE V ALVE S ECTION) Series VT Not Available In The USA VT SERIES VT3 V S SERIES S 20 X20 S IZE V OLTAGE B AC24v (Not VT325v) 3 AC110v (Not VT325v) 5 DC24v 6 DC12v (Not VT325v) 7 AC230v (Not VT325v) P ORTWA Refer to series VT307/327 L AMP O N S URGE Refer to series VT307/327 E LECTRICAL E NTR Refer to Series VT307/327 S IZE E NTER AS S TANDARD P ART F OR E XTERNAL P ILOT 3 5 (Except DIN Electrical Entry is not possible) 7 VZ100 SERIES (SEE V ALVE S ECTION) External Pilot Types VG342R (See Valve Section) VP34lR, VP54lR, VP74lR (See Valve Section) VNB Series (See Valve Section) S/SX BASE M OUNTED S ERIES (TO SUIT T PE 42 MANIFOLDS) VQ BASE M OUNTED S ERIES (PLUG- IN) VQ 0 R S IZE 1 2 T PE AS S TANDARD AS S TANDARD F OR E XTERNAL P ILOT S S ERIES S X SX S IZE R O RDER AS S TANDARD T PE O RDER AS S TANDARD T PE F OR E XTERNAL P ILOT S POOL 0 Metal 1 Rubber

21 VACUUM C HECK VALVE S ERIES NAK C HECK VALVE FOR VACUUM Can be used with Vaccum Pressure -3 to -100kPa Low Cracking Pressure: 0.03Mpa (N)AK2000 SERIES Proof Pressure Operating Pressure Range Fluid Temperature Port Size Effective Area Pressure Vacuum 1.5MPa / 220PSI ~ 1MPa / 0.4 ~ 145PSI -3 to -100KPa / -0.4 ~ 14.5PSI Air 5 ~ 60ºC / 40 ~ 40ºF Rc(PT) 1/8, 1/4 01: 25mm 2 02: 27.5mm 2 S ERIES NAK Model Port Size NPT A B C NAK2000-N01, , NAK4000-N02, 03, , 3 8, NAK6000-N06, , ( N ) A K S E R I E S (N)AK 000 M ODEL 2 1/4 4 1/2 6 1 P ORT T HREAD Nil Rc(PT)* N NPT F G(PF)* * Remove N when ordering P ORT S IZE 01 1/8 02 1/4 03 3/8 04 1/2 06 3/ S EE INSIDE FRONT COVER FOR FOR FURTHER TECHNICAL DETAILS ON THIS DETAILS OF OUR LOCAL SALES OFFICE PRODUCT CONSULT SMC CUSTOMER SERVICE

22 6.20 VACUUM E JECTOR U NIT:FOR VQ1000 VACUUM E JECTOR U NIT VQ1000 SERIES B ASE M OUNTED, PLUG- IN T PE Vacuum Ejector mounted on Manifold Base Avoids the requirement for Separate Valve and Vacuum Ejector Reduces Piping and Wiring Space Saving Unit No. VVQ J A&C M VVQ J B&D M Nozzle Diameter (mm) Max Suction Flow Rate (Nl/min) Max Vacuum Pressure -630mmHg Max Operating Pressure 0.8MPa / 120PSI Standard Supply Pressure 0.5Mpa / 70PSI Operating Temperature 5~50 0 C / 40~120ºF EJECTOR UNITS Max No of Units No of Valve Stations Vacuum Ejector Unit VVQ1000 I J M M ANIFOLD T PE 1 Plug-in Unit V ACUUM P RESSURE S WITCH ZSE1 00 N OZZLE D IAMETER & VACUUM S WITCH O PTION A Ø0.7 Including Vacuum Release Valve with Vacuum Switch B Ø1.0 Including Vacuum Release Valve with Vacuum Switch C Ø0.7 Including Vacuum Release Valve without Vacuum Switch D Ø1.0 Including Vacuum Release Valve without Vacuum Switch E LECTRICAL E NTR Blank With 0.6m Grommet Lead L With 3m Grommet Lead C With 0.6m Connector Lead CL With 3m Connector Lead CN Without Connector Lead When ordering switch with lead wire of 5m long, indicate both part numbers (see below). V ACUUM E JECTOR V ALVE VVQ1000 I J S WITCH T PE/VOLTAGE H OW TO O RDER C ONNECTOR M ANIFOLD T PE 1 Plug-in Unit (SOLID S TATE: 12~24VDC) Without lead wire (connector 1pc, socket 4pcs)...ZS-20-A 14 NPN/1 setting, three revolution adjustment With lead wire...zs-20-5a-50 N OZZLE D IAMETER 15 NPN/1 setting, adjustment A Ø0.7: With Vacuum Release Valve 16 NPN/2 setting, three revolution B Ø1.0: With Vacuum Release Valve adjustment 17 NPN/2 setting, adjustment 18 NPN/1 setting, three revolution adjustment, analog L EAD W IRE 19 NPN/1 setting, adjustment, Blank 0.6m 55 analog 30 3m PNP/1 setting, adjustment 50 5m S EE N EXT P AGE

23 L INEAR A CTUATOR: FREE M OUNT C LINDER FOR VACUUM S ERIES ZCDUK 6.21 F REE M OUNT C LINDER FOR VACUUM S ERIES ZCDUK Vacuum Connection through Piston Rod Precise and Direct Mounting Non-Rotating Piston Rod Bore Sizes Ø10~32mm Auto Switches Available Cylinder Bore (mm) 10, 16, 20, 25, 32 Type Double Acting Type/Non-Rotating Piston Rod Fluid Air Proof Pressure 1MPa / 145PSI Max Operating Pressure 0.7MPa / 100PSI Min Operating Pressure Ø10, Ø16, - 0.7kgf/cm 2 / 10PSI Ø20, Ø25, Ø32-0.6kgf/cm 2 / 9PSI Vacuum Port Pressure -760 mmhg ~ 6kgf/cm 2 / -15 ~ 90PSI Ambient and Fluid Temperature 5 ~ 60 C / 40 ~ 140ºF Lubrication Not Required Cushion Both Side Rubber Cushion Stroke allowance Thread tolerance JIS 2 Class Rod tip screw : es or No es, No (Pad Direct Mounting) Mounting Basic Type Non-rotating piston rod accuracy Ø10 Ø16 Ø20 Ø25 Ø32 ±0.8.±0.5 S ERIES ZCDUK ZC UK D A UTOSWITCH - Without D With T PE C cap mounting/male thread D Cap mounting/pad direct mounting Q Rod mounting/male thread R Rod mounting/pad direct mounting B ORE S IZE 10 Ø10mm 16 Ø16mm 20 Ø20mm 25 Ø25mm 32 Ø32mm S TROKE 5,10,15,20,25,30 Ø10,16mm only 5,10,15,20,25,30,40,50 Ø20,25,32mm only A UTO S WITCHES Reed D-90 (DC Only) D-97 (w/led, DC Only) A-90A (AC or DC) D-93A (w/led, AC or DC) Solid State D-F9N (W/LED, 3 Wire NPN) D-F9P (W/LED, 3 Wire PNP) D-F9B (W/LED, 2 Wire) N O O F S WITCHES - 2 Switches S 1Switch Safety Note For cap type mounting, care should be taken not to exceed 6 bar when ejecting the workpiece S EE INSIDE FRONT COVER FOR FOR FURTHER TECHNICAL DETAILS ON THIS DETAILS OF OUR LOCAL SALES OFFICE PRODUCT CONSULT SMC CUSTOMER SERVICE

24 6.22 VACUUM VACUUM E JECTOR S ERIES ZU ZU VACUUM E JECTOR Integrated One Touch Tube Fittings for 6mm Tube High Flow and High Vacuum Variants 2 Nozzle Sizes Available Standard Product is Copper Free Lightweight Fluid Max Operating Pressure Ambient Temperature Range Tube Size Normal Operating Pressure Air 0.7MPa / 100PSI 5~60ºC / 40~140ºF 6mm 0.45MPa / 65PSI S M B O L S Model Nozzle Diameter (mm) ZU05S ZU07S ZU05L ZU07L ZU VACUUM E JECTOR ZU Vacuum Generated Suction Flow Rate Air Consumption mmhg PSI nl/min nl/min N OZZLE D IAMETER mm mm V ACUUM T PE S High Vacuum Type (-640mmHg / -12PSI) L Low Vacuum Type (-360mmHg / -7PSI) S ERIES ZU A PPLICABLE T UBE OD Ø 6 A PPLICABLE T UBE OD Ø 6