With buffer. Vacuum entry port Mounting. Female. thread VAC. Barb. fitting. One-touch fitting VAC. One-touch. fitting VAC. Barb.

Transcription

1 Type to Series ZPT Vertical vacuum entry to Series ZPR Lateral vacuum entry with One-touch fitting to Series ZP Lateral vacuum entry with arb fitting Pad form (ompatible with all models) Vacuum Pad Series ZP Vacuum entry port Mounting Male thread emale thread One-touch fitting One-touch fitting arb fitting arb fitting Without buffer (ommon) (ommon) Male thread emale thread Male thread emale thread V V V V V V With buffer Vacuum entry port emale thread arb fitting One-touch fitting One-touch fitting arb fitting Mounting uffer body uffer body uffer body uffer body uffer body Non-rotating ø2 to ø: Stroke, 10, 1, 2 mm ø10 to ø32: Stroke 10, 20, 30, 0, 0 mm ø0, ø0: Stroke 10, 20, 30, 0 mm V emale thread lat (U) lat with ribs () Deep (D) ellows () Thin flat (UT) Thin with ribs (T) V V arb fitting One-touch fitting arb fitting V V One-touch fitting Z ZR ZM ZH ZU ZL Z ZQ Z ZP ZU MJ Misc. 2 x lat lat with ribs Deep ellows Thin flat Thin flat with ribs 3. x x 10 ø2 ø ø ø ø10 ø13 ø1 ø20 ø2 ø32 ø0 ø0 (ø2 to ø12) Pad material ø2 to ø12 (Option: ø10 to ø20) NR (lack), Silicon rubber (White), Urethane rubber (rown), luoro rubber (lack with green mark), onductive NR (lack with one white mark), onductive silicon rubber (lack with two white marks) Pad selection Made to Order Pad Material and haracteristics haracteristics Material NR Silicon rubber Urethane rubber luoro rubber onductive NR onductive silicon rubber Durometer HS (± ) Refer to technical data on pages to for the calculation of lift force and response time. 1. lliptic pad 2. Large size pad Operating temperature range ( ) 0 to to to 0 0 to 20 0 to 10 to 200 Oil resistance gasoline Oil resistance benzol : Little or no influence : an be used depending on conditions : Not suitable ase resistance cid resistance Weatherability Ozone resistance brasion resistance Waterproof Solvent resistance (enzene, toluene) The above table covers only general characteristics of subject rubber materials. Pad materials used by SM pass the JIS standards; however the actual performance depends on operating conditions

2 Vacuum Pad: Lateral Vacuum ntry with arb itting Without uffer Series ZP Specifications Vacuum entry Mounting pplicable tube dia. Thread dia. Direction Lateral onnection arb fitting 2 x, 3. x, x 10 Thin section series (ø10 to ø1) ø, ø Nylon tube, ø, ø Urethane tube ø2 to ø ø10 to ø1 ø20 to ø32 ø0, ø0 ø, ø Nylon tube, ø, ø Urethane tube ø, ø Nylon tube, ø, ø Urethane tube ø Nylon tube, ø Urethane tube onnection Male thread emale thread 2 x, 3. x, x 10 Thin section series (ø10 to ø1) ø2 to ø ø10 to ø1 M x 0., M x 1 M x 0., M x 1 M x 0., M x 0. M x 0., M x 1 ø20 to ø32 ø0 to ø0 M x 1, M x 1 M x 1, M x 1 M x 0., M x 1, M x 1.2 M x 1, M x 1.2 Pad Type Pad form Pad dia. (mm) Material (olor) Durometer lat 2,,,, 2 x, 3. x, x 10, 10, 13, 1, 20, 2, 32, 0, 0 lat with ribs Deep ellows 10, 13, 1, 20, 2, 32, 0, 0 10, 1, 2, 0,, 10, 13, 1, 20, Thin flat/thin flat with ribs 10, 13, 1 2, 32, 0, 0 NR (lack), Silicon rubber (White), Urethane rubber (rown), luoro rubber (lack with green mark) onductive NR (lack with one white mark), onductinve silicon rubber (lack with two white marks) NR (0 ), Silicon rubber (0 ), Urenthane rubber/luoro rubber (0 ) onductive NR (0 ), onductive silicon rubber (0 ) Weight/Male Thread (emale thread) Pad form onnection ZP02 to to 1 (Thin section series) ZP10 ZP13 ZP1 ZP20 lat lat with ribs Deep ellows M M M M M M M M M M M M 1 (11) 32 (2) 1 (11) 1 (11) 1 except except ø2, ø ø2, ø 33 (2) (2) (2) 31 (2) 32 (2) 33 (2) 3 (2) (2) 33 (2) (g) 33 () ZP2 (30) 3 (30) 3 (29) (30) 3 (30) 3 (29) (30) 3 (30) 3 (2) (30) 3 (30) 3 (29) ZP32 ZP0 ZP0 3 (3) (3) (3) 9 (3) ( ): igures for female thread connections. 2 (3) (3) (33) 0 (3) (3) (3) 3 (3) (3) (3) 9 (3) P to

3 Vacuum Pad: Lateral Vacuum ntry with arb itting without uffer Series ZP ZP200 ZP30 ZP010 ZP02 ZP0 ZP0 ZP0 ZP10 ZP13 ZP1 ZP20 ZP2 ZP32 ZP0 ZP0 Pad dia. (ømm) 2 x 3. x x lat (U) Series ZP Without buffer lat with ribs () ZP (mm) 02 0 ø2 ø 0 ø 0 ø 10 ø10 13 ø13 1 ø1 20 ø20 2 ø2 32 ø32 0 ø0 0 ø0 U D Pad dia. Pad type (Refer to Table (1) for applications.) Table (1) Pad Diameter/Pad Type Pad form Deep ellows (D) () Pad type Material 02 U N N lat lat with ribs Deep ellows Thin flat (UT) Thin flat with ribs (T) Dia. (mm) 2 x Type 3. x x lat lat with ribs Deep ellows Thin flat Thin flat with ribs How to Order Vacuum entry port Material Vacuum entry port (arb fitting) Mounting thread ø, ø tube ø, ø tube ø tube Male thread M x 0. M x 1 M x 1 M x 1 M x 1 M x 1 Mounting thread (Refer to Table (2) for applications.) Vacuum entry port (Refer to Table (2) for applications.) Table (2) Vacuum ntry/mounting Thread Diameter N NR S Silicon rubber U Urethane rubber luoro rubber GN onductive NR (ø2 to ø1) GS onductive silicon rubber (ø2 to ø1) ø20 or larger are manufactured upon a receipt of order. Mounting emale thread M x 0. M x 0. M x 0. M x 1 M x 0. M x 1 M x 1.2 M x 1 M x 1.2 onnection Thread dia. /Port size ø2 to ø ø10 to ø1 ø20 to ø32 ø0, ø0 N ø Nylon tube arb N ø Nylon tube Vacuum fitting entry U ø Urethane tube U ø Urethane tube M x 0. Male M x 1 thread M x 1 Mounting M x 0. emale M x 0. thread M x 1 M x 1.2 Z ZR ZM ZH ZU ZL Z ZQ Z ZP ZU MJ Misc

4 Series ZP onnection arb itting Vacuum ntry Port Lateral Pad orm Mounting lat/lat with ribs/deep/ Thin flat/thin flat with ribs/lliptic Size lat type ø2, ø, ø, ø Size ø20, ø2, ø32 lat/thin flat type/thin flat with ribs lat Deep: ZP2D only Hexagon width across flats Hexagon width across flats (M:, M: 12) Male thread Hexagon width across flats (M:, M: 12) Hexagon width across flats 10 (Miniature tube fitting Series M) Hexagon width across flats lliptic øe a c Hexagon width across flats 12 (Miniature tube fitting Series M) Hexagon width across flats Hexagon width across flats 12 lat with ribs (Miniature tube fitting Series M) Hexagon width across flats b d lat H: M x 0. H: M x 1 ø ø ø D D ZP02U ZP0U ZP0U 2. ZP0U 9 1 ZP200U ZP30U ZP010U a 2 3. b c d øe pplicable Tubing pplicable tube O.D. N (Nylon tube ø/2.) N (Nylon tube ø/) U (Soft tube ø/2.) U (Soft tube ø/) P Q ør lat/lat with Ribs H: M x 1 H: M x 1 ø ø D G G lat lat with ribs U ZP U ZP U ZP Deep H: M x 1 H: M x 1 ø ø D G G ZP2D pplicable Tubing pplicable tube O.D. N (Nylon tube ø/2.) N (Nylon tube ø/) U (Soft tube ø/2.) U (Soft tube ø/) P Q ør ZP10UT ZP13UT ZP1UT ZP10T ZP13T lat ZP1T of D, are the same. Size ø10, ø13, ø1 Size ø0, ø0 Deep: ZP10D/1D only lat Deep: ZP0D only Hexagon width across flats Hexagon width across flats Hexagon width across flats (M:, M: 12) Hexagon width across flats (M:, M: 12) Hexagon width across flats 12 Hexagon width across flats 12 Hexagon width across flats 12 (Miniature tube fitting Series M) Hexagon width across flats Hexagon width across flats 12 (Miniature tube fitting Series M) Hexagon width across flats (Miniature tube fitting Series M) Hexagon width across flats lat with ribs (Miniature tube fitting Series M) Hexagon width across flats lat with ribs lat/lat with Ribs H: M x 0. H: M x 1 ø ø D G G lat lat with ribs U ZP U ZP U ZP Deep H: M x 0. H: M x 1 ø ø D G G ZP10D ZP1D pplicable Tubing pplicable tube O.D. N (Nylon tube ø/2.) N (Nylon tube ø/) U (Soft tube ø/2.) U (Soft tube ø/) P Q ør lat/lat with Ribs H: M x 1 H: M x 1 ø ø D G G lat lat with ribs U ZP U 2 1 ZP Deep H: M x 1 H: M x 1 ø ø D G G ZP0D

5 Vacuum Pad: Lateral Vacuum ntry with arb itting without uffer Series ZP onnection arb itting Pad orm ellows Vacuum ntry Port Lateral Mounting Male thread Size ø, ø Size ø20, ø2, ø32 ellows ellows ZP0 ZP0 ø ø 9 pplicable Tubing ø 2. pplicable tubing N (Nylon tube, ø/2.) N (Nylon tube, ø/) U (Urethane tube, ø/2.) U (Urethane tube, ø/) H: M x 0. H: M x 1 D D 20 P Q 2 0. ør øk pplicable Tubing Size ø10, ø13, ø1 Size ø0, ø0 ellows Hexagon width across flats Hexagon width across flats 10 (Miniature tube fitting Series M) Hexagon width across flats øl ø ø D H: M x 1 H: M x 1 G G øk øl ZP20 ZP ZP pplicable tubing N (Nylon tube, ø/2.) N (Nylon tube, ø/) U (Urethane tube, ø/2.) U (Urethane tube, ø/) ellows Hexagon width across flats Hexagon width across flats 12 (Miniature tube fitting Series M) Hexagon width across flats P Q ør Z ZR ZM ZH ZU ZL Z ZQ Z ZP ZU MJ Misc. Hexagon width across flats Hexagon width across flats 12 Hexagon width across flats (M:, M: 12) Hexagon width across flats 12 (Miniature tube fitting Series M) Hexagon width across flats (Miniature tube fitting Series M) Hexagon width across flats ø ø D H: M x 0. H: M x 1 G G ZP10 ZP13 ZP pplicable Tubing pplicable tubing N (Nylon tube, ø/2.) N (Nylon tube, ø/) U (Urethane tube, ø/2.) U (Urethane tube, ø/) P Q ør øk øl ZP0 ZP0 ø 0 0 ø D 2 H: M x 1 H: M x 1 G G øk øl

6 Series ZP onnection arb fitting Vacuum ntry Port Lateral Pad orm Mounting Size ø2, ø, ø, ø Size ø20, ø2, ø32 lat/thin flat/thin flat with ribs lat lat/lat with ribs/deep/thin flat/ Thin flat with ribs/lliptic emale thread Deep: ZP2D only Hexagon width across flats 10 (Miniature tube fitting Series M) Hexagon width across flats lliptic b d øe a c Hexagon width across flats 12 (Miniature tube fitting Series M) Hexagon width across flats Hexagon width across flats 12 lat with ribs (Miniature tube fitting Series M) Hexagon width across flats lat/lat with Ribs G: M x 0. G: M x 0. ø ø ø D D ZP02U ZP0U ZP0U 2. ZP0U 9 1 a b c d øe ZP200U ZP30U ZP010U ZP10UT ZP13UT ZP1UT ZP10T ZP13T ZP1T pplicable Tubing pplicable tube O. D. N (Nylon tube ø/2.) N (Nylon tube ø/) U (Soft tube ø/2.) U (Soft tube ø/) P Q ør of D are the same. lat/lat with Ribs G: M x 0. G: M x 1 G: M x 1.2 ø ø D lat lat with ribs U ZP U ZP U ZP Deep Size ø10, ø13, ø1 Size ø0, ø0 pplicable Tubing lat Deep: ZP10D/1D only lat Deep: ZP0D only G: M x 0. G: M x 1 G: M x 1.2 ø ø D ZP2D pplicable tube O. D. N (Nylon tube ø/2.) N (Nylon tube ø/) P Q ør U (Soft 1. tube ø/2.) 1. U (Soft 1. tube ø/) 2. Hexagon width across flats 12 (Miniature tube fitting Series M) Hexagon width across flats lat with ribs Hexagon width across flats 12 (Miniature tube fitting Series M) Hexagon width across flats Hexagon width across flats 12 (Miniature tube fitting Series M) Hexagon width across flats M x 0. lat with ribs Hexagon width across flats 12 (Miniature tube fitting Series M) Hexagon width across flats lat/lat with Ribs G: M x 0. G: M x 1 ø ø D lat lat with ribs U ZP U ZP U ZP Deep G: M x 0. G: M x 1 ø ø D ZP10D ZP1D pplicable Tubing pplicable tube O. D. N (Nylon tube ø/2.) N (Nylon tube ø/) U (Soft tube ø/2.) U (Soft tube ø/) P Q ør lat/lat with Ribs G: M x 1 G: M x 1.2 ø ø D lat lat with ribs U ZP U ZP Deep G: M x 1 G: M x 1.2 ø ø D ZP0D

7 Vacuum Pad: Lateral Vacuum ntry with arb itting without uffer Series ZP onnection arb fitting Pad orm ellows Vacuum ntry Port Lateral Mounting emale thread Size ø, ø Size ø20, ø2, ø32 ellows ellows ZP0 ZP0 pplicable Tubing pplicable Tubing Size ø10, ø13, ø1 Size ø0, ø0 ellows Hexagon width across flats 10 ø ø 9 ø 2. pplicable tube N (Nylon tube, ø/2.) N (Nylon tube, ø/) U (Urethane tube, ø/2.) U (Urethane tube, ø/) G: M x 0. G: M x 0. D D P (Miniature tube fitting Series M) Hexagon width across flats Q ør øk 3.3. øl ø ø D G: M x 0. G: M x 1 G: M x 1.2 øk øl ZP ZP ZP pplicable tube N (Nylon tube, ø/2.) N (Nylon tube, ø/) U (Urethane tube, ø/2.) U (Urethane tube, ø/) ellows Hexagon width across flats 12 P (Miniature tube fitting Series M) Hexagon width across flats Q ør Z ZR ZM ZH ZU ZL Z ZQ Z ZP ZU MJ Misc. Hexagon width across flats 12 Hexagon width across flats 12 (Miniature tube fitting Series M) Hexagon width across flats (Miniature tube fitting Series M) Hexagon width across flats ZP10 ZP13 ZP1 ø ø pplicable Tubing D pplicable tube N (Nylon tube, ø/2.) N (Nylon tube, ø/) U (Urethane tube, ø/2.) U (Urethane tube, ø/) G: M x 0. G: M x 1 P Q ør øk øl ZP0 ZP0 ø 0 0 ø D 2 G: M x 1 G: M x 1.2 øk øl

8 Vacuum Pad: Lateral Vacuum ntry with arb itting With uffer Series ZP Specifications Vacuum entry Mounting pplicable tubing dia. Thread dia. Direction onnection 2 x, 3. x, x 10 ø10 to ø1 (Thin section series) ø2 to ø ø10 to ø1 ø20 to ø32 ø0, ø0 2 x, 3. x, x 10 ø10 to ø1 (Thin section series) ø2 to ø ø10 to ø1 ø20 to ø32 ø0 to ø0 uffer type uffer stroke Lateral arb fitting ø, ø Nylon tube, ø, ø Urethane tube ø, ø Nylon tube, ø, ø Urethane tube ø, ø Nylon tube, ø, ø Urethane tube ø Nylon tube, ø Urethane tube M x 1 Male thread M10 x 1 Male thread M10 x 1 Male thread M1 x 1 Male thread Rotating (J)/Non-rotating (K) or ø2 to ø, 10, 1, 2 mm or ø10 to ø32 10, 20, 30, 0, 0 mm or ø0, ø0 10, 20, 30, 0 mm Spring Reactive orce (N) Dia. (mm) 0 stroke Stroke end ø2 to ø 0. N 1.2 N ø10 to ø N 3.0 N ø0, ø0 2.0 N.0 N Refer to ø2 to ø for Thin flat, Thin flat with ribs and lipse type. Pad Type Pad form Pad dia. (mm) Material (olor) Durometer Weight Stroke (mm) lat 2,,,, 2 x, 3. x, x 10, 10, 13, 1, 20, 2, 32, 0, 0 lat with ribs Deep ellows 10, 13, 1, 20, 2, 32, 0, 0 10, 1, 2, 0,, 10, 13, 1, 20, Thin flat/thin flat with ribs 10, 13, 1 2, 32, 0, 0 NR (lack), Silicon rubber (White), Urethane rubber (rown), luoro rubber (lack with green mark) onductive NR (lack with one white mark), onductinve silicon rubber (lack with two white marks) NR (0 ), Silicon rubber (0 ), Urenthane rubber/luoro rubber (0 ) onductive NR (0 ), onductive silicon rubber (0 ) Pad form lat/ lat with ribs ZP200 ZP30 ZP010 ZP02 to 0 ZP10 to 1 (Thin section series) 10 ZP to 1 20 ZP 2 ZP 32 ZP 0 ZP Deep 1 11 (g) ellows Weight by Stroke (g) Stroke (mm) ZP02 to ZP10 to ZP0, P to

9 Vacuum Pad: Lateral Vacuum ntry with arb itting with uffer Series ZP How to Order Series ZP With buffer ZP (mm) x x 010 x ø2 0 ø 0 ø 0 ø 10 ø10 13 ø13 1 ø1 20 ø20 2 ø2 32 ø32 0 ø0 0 ø0 Pad type (Refer to Table (1) for applications.) U lat lat with ribs D Deep ellows UT Thin flat T Thin flat with ribs Table (1) Pad Diameter/Pad Type Dia. (mm) Type 2 x 3. x x 10 lat lat with ribs Deep ellows Thin flat Thin flat with ribs 2 1 U GS K 20 U J K Material uffer type 10 Mounting thread (Refer to Table (3) for applications.) Vacuum entry port (Refer to Table (3) for applications.) uffer stroke (Refer to Table (2) for applications.) Rotating Non-rotating N NR S Silicon rubber U Urethane rubber luoro rubber GN onductive NR (ø2 to ø1) GS onductive silicon rubber (ø2 to ø1) ø20 or large are manufactured upon receipt of order Z ZR ZM ZH ZU ZL Z ZQ Z ZP ZU MJ Misc. Table (2) Pad Diameter/Stroke Dia. (mm) Thin flat/thin flat with ribs 2 x 3. x x 10 2 Stroke Table (3) Vacuum ntry/mounting Thread Diameter Vacuum entry Mounting One-touch fitting Male thread N N U U 10 1 Thread dia./ Port size ø Nylon tube ø Nylon tube ø Urethane tube ø Urethane tube M x 1 M10 x 1 M1 x 1 ø2 to ø 2 x, 3. x x 10 ø10 to ø1 (Thin section series) ø10 to ø32 ø0, ø

10 Series ZP onnection arb fitting Pad orm lat/thin flat/thin flat with ribs/lliptic Vacuum ntry Port Lateral Mounting Male thread lat ø2, ø, ø, ø Hexagon width across flats Hexagon width across flats 12 Hexagon width across flats 10 Hexagon width across flats lliptic øe a c b d lat lliptic ZP02U-- 2 ZP0U-- ZP0U-- ZP0U-- by Stroke ZPU1-- ZPU10-- ZPU1-- ZPU2-- D a ZP200U ZP30U 2 3. ZP010U ø tube ø tube G H J G H J Thin lat/thin lat with Ribs b c d øe ZP10UT ZP13UT ZP1UT ZP10T ZP13T ZP1T

11 Vacuum Pad: Lateral Vacuum ntry with arb itting with uffer Series ZP onnection Vacuum ntry Port arb fitting Lateral Pad orm Mounting lat/lat with ribs/deep Male thread lat/lat with ribs ø10, ø13, ø1 Deep ø10, ø1 lat/lat with Ribs U ZP10-10 U ZP13-10 U ZP1-10 by Stroke U ZP U ZP U ZP U ZP U ZP Hexagon width across flats Hexagon width across flats 1 Hexagon width across flats 12 D Hexagon width across flats lat ø10, ø13 ø1 G G lat with ribs lat with ribs H 23 1 Deep ZP10D--10 ZP1D--10 by Stroke ZPD ZPD ZPD ZPD0--10 ZPD by Tubing ZP--10 ZP--10 Hexagon width across flats Hexagon width across flats 1 Hexagon width across flats J ø10 ø1 G G K L Hexagon width across flats D H 23 1 Z ZR ZM ZH ZU ZL Z ZQ Z ZP ZU MJ Misc

12 Series ZP onnection Vacuum ntry Port arb fitting Lateral Pad orm Mounting lat/lat with ribs/deep Male thread lat/lat with ribs ø20, ø2, ø32 Deep ø2 Hexagon width across flats Hexagon width across flats Hexagon width across flats 1 Hexagon width across flats 1 Hexagon width across flats 12 Hexagon width across flats Hexagon width across flats 12 Hexagon width across flats lat with ribs lat/lat with Ribs U ZP20-10 U ZP2-10 U ZP32-10 by Stroke U ZP U ZP U ZP U ZP U ZP D lat ø20, ø2 ø32 G G lat with ribs H 23 1 Deep ZP2D ZP2D ZP2D ZP2D0--10 ZP2D by Tubing G H J K L ZP ZP

13 Vacuum Pad: Lateral Vacuum ntry with arb itting with uffer Series ZP onnection Vacuum ntry Port arb fitting Lateral Pad orm Mounting lat/lat with ribs/deep Male thread lat/lat with ribs Hexagon width across flats 10 ø0, ø0 Deep ø0 Hexagon width across flats 10 Hexagon width across flats 19 lat/lat with Ribs U ZP0 --1 U ZP0 --1 by Stroke Hexagon width across flats 12 U ZP U ZP U ZP U ZP 0--1 Hexagon width across flats D lat lat with ribs ø0 ø0 G G H lat with ribs Deep Hexagon width across flats 19 Hexagon width across flats 12 ZP0D10--1 ZP0D20--1 ZP0D30--1 ZP0D G H Hexagon width across flats Z ZR ZM ZH ZU ZL Z ZQ Z ZP ZU MJ Misc

14 Series ZP onnection Vacuum ntry Port arb fitting Lateral Pad orm Mounting ellows Male thread ellows ø, ø ellows ø10, ø13, ø1 Hexagon width across flats Hexagon width across flats Hexagon width across flats 1 Hexagon width across flats 12 Hexagon width across flats Hexagon width across flats 12 Hexagon width across flats Hexagon width across flats 10 ellows ZP0-- ZP0-- by Stroke ZP1-- ZP10-- ZP1-- ZP D M N ø tube ø tube G H G H ellows D M N ZP ZP ZP by Stroke ø10 ø13 ø1 ø tube ø tube H G G G J K L J K L ZP ZP ZP ZP ZP

15 Vacuum Pad: Lateral Vacuum ntry with arb itting with uffer Series ZP onnection Vacuum ntry Port arb fitting Lateral Pad orm Mounting ellows Male thread ellows ø20, ø2, ø32 ellows ø0, ø0 Hexagon width across flats Hexagon width across flats 10 ellows Hexagon width across flats 1 Hexagon width across flats 12 D M N ZP ZP ZP by Stroke Hexagon width across flats ø20 ø2 ø32 ø tube ø tube H G G G J K L J K L ZP ZP ZP ZP ZP ellows ZP0--1 by Stroke D M 2. ZP ZP10--1 ZP20--1 ZP30--1 ZP0--1 Hexagon width across flats 19 Hexagon width across flats 12 Hexagon width across flats N ø0 ø0 G G H Z ZR ZM ZH ZU ZL Z ZQ Z ZP ZU MJ Misc

16 Series ZP Vacuum Pad/omponents Refer to page to for part numbers of e to y. onstruction Series ZPT Series ZPR Series ZP r uffer r uffer e daptor r uffer e daptor t daptor y daptor w Lock ring w Lock ring w Lock ring q Pad q Pad q Pad q Pad With buffer With buffer With buffer omponent Parts No. Description q w e r t y Pad Lock ring dapter uffer dapter dapter Material onductive NR, onductive silicon rubber NR, Silicon rubber, Urethane rubber, luoro rubber rass rass rass rass, PT rass Note lectroless nickel plated lectroless nickel plated lectroless nickel plated lectroless nickel plated lectroless nickel plated Maintenance of Pad Since pads are essentially rubber, deterioration is unavoidable. The rate of deterioration depends upon factors such as conditions of use, environment and temperature. Regular maintenance should be performed. If any damage, splitting, cracking or abrasion has occurred in a pad which appears to be harmful, replace it immediately. lso, take care not to damage the outside surface of the pad. How to Replace 1. Pull the lock ring upward, and after lifting it to the adaptor, remove the old pad by pulling it downward. 2. While holding the lock ring in the raised position, place a new pad onto the adaptor. 3. onfirm that the pad is securely in place, and then return the lock ring to its original position. Lock ring daptor Replacement Pad Deteriorated New pad

17 Vacuum Pad Series ZP Replacement Parts: Pad Unit (With lock ring/without lock ring) How to Order Pad Unit ZP 10 U N 19 How to Order Lock Ring Unit ZPL 1 Pad dia. (mm) 02 0 ø2 ø 0 ø 0 ø 10 ø10 13 ø13 1 ø1 20 ø20 2 ø2 32 ø32 0 ø0 0 ø0 Pad type U D ZP02U to 0U lat lat with ribs Deep ellows lat (U) Lock ring Nil -19 With lock ring Without lock ring (ø10 or larger) Material N NR S Silicon rubber U Urethane rubber luoro rubber GN onductive NR (ø2 to ø1) GS onductive silicon rubber (ø2 to ø1) ø20 or large are manufactured upon receipt of order. ZP10 to 0 lat with ribs () pplicable pad dia. (mm) 1 ø10 to ø1 2 ø20 to ø32 3 ø0, ø0 Z ZR ZM ZH ZU ZL Z ZQ Z ZP ZU MJ Misc. ZP10U to 0U Size ø ø ø ød ZP ZP ZP ZP ZP ZP ZP ZP ZP10D to 0D Deep (D) Size ø ø ø ød ZP02U U ZP0U U0. 1. ZP0U U0 2. ZP0U U ZP10U U ZP13U U ZP1U U ZP20U U ZP2U U ZP32U U ZP0U U ZP0U U Put in the symbol for material at the end of model no Size ø ø ø ød ZP10D D ZP1D D ZP2D D ZP0D D

18 Series ZP Replacement Parts: Pad Unit (With lock ring/without lock ring) ellows ()/With Lock Ring : ø to ø ZP0 to 0 uffer Mounting Nut d H NTJ-01 M x SNJ-00 M x SNJ-010 M x SNJ-01 M10 x SN-01 M1 x : ø10 to ø0 ZP10 to 0 Size ø ø ø ød øg øh ZP ZP ZP ZP ZP ZP ZP ZP ZP ZP Put in the symbol for material at the end of model no

19 Vacuum Pad Series ZP Replacement Parts: Pad Unit (With lock ring/without lock ring) How to Order/Pad Unit Thin flat (UT), Thin flat with ribs (T) ZP 10 UT N Thin flat ø Thin flat with ribs ø 10 ø10 13 ø13 1 ø1 Pad type UT Thin flat T Thin flat with ribs Material N NR S Silicon rubber U Urethane rubber luoro rubber GN onductive NR GS onductive silicon rubber ø ø ZPUT ZP10UT ZP13UT ZP1UT (mm) 1 1. ø ø ZPT ZP10T ZP13T ZP1T (mm) 0. 1 lliptic ZP 200 U N 2 x 200 (readth x Length) x 010 x 10 U Pad type lat Material N NR S Silicon rubber U Urethane rubber luoro rubber GN onductive NR GS onductive silicon rubber ø ø ø ø ø1. ø Z ZR ZM ZH ZU ZL Z ZQ Z ZP ZU MJ Misc ZP200U ZP30U ZP010U

20 Series ZP Replacement Parts: daptor/uffer (Series ZP) Without buffer The same symbol Replacement of the symbol onstruction [Pad model no.] ZP 0 UN N q Type adaptor w uffer Pad dia to to to 32 0, 0 Lock ring [q Type adaptor] ZP N Pad Pad With buffer [Pad model no.] ZP 0 UGN K20 U 1 Pad dia to to to 32 0, 0 uffer connection thread Thread dia [q Type adaptor] ZP U [w uffer] ZP 3 K20 Refer to ø2 to ø for Thin flat, Thin flat with ribs, and lliptic

21 Series ZP Made to Order Specifications: Please consult with SM for detailed specifications, dimensions and delivery. 1. lliptic Pad/Without uffer Z Non-standard elliptic pads without buffer for Series ZPT, ZPR, and ZP. Specifications pplicable model Vacuum entry Series Mounting Pad material Direction onnection pplicable Pad Diameter ZPT ZPT/ZPR/ZP (Without buffer) ZPR ZP Vertical Lateral Lateral emale thread ir sunction filter arb fitting Two ø3. mounting holes are provided. Mount the pad with bolts at the desired position. NR, Silicon rubber, Urethane rubber, luoro rubber, onductive NR, onductive silicon rubber readth x Length (mm) 3. x x 10 x 20 x 30 x 10 x Series ZPT Series ZPR Series ZP readth x Length (mm) x 30 x 10 x 20 x 30 x 20 x 30 ZR ZM ZH ZU ZL Z ZQ Z ZP ZU MJ Misc. Long dia. Short dia

22 Series ZP Made to Order Specifications: Please consult with SM for detailed specifications, dimensions and delivery. 2. lliptic Pad/With uffer Non-standard elliptic pads with buffer for Series ZPT, ZPR, and ZP. Suitable for picking oblong loads in a space-saving application. Specifications pplicable model ZPT/ZPR/ZP (With buffer) Series ZPT ZPR ZP Direction Vertical Lateral Lateral Vacuum entry onnection emale thread arb fitting ir suction filter ir suction filter arb fitting Mounting uffer type Male thread Male thread Non-rotating (K) Male/emale thread Pad material NR, Silicon rubber, Urethane rubber, luoro rubber, onductive NR, onductive silicon rubber Please consult with SM for applicable strokes. pplicable Pad Diameter readth x Length (mm) 3. x x 10 x 20 x 30 x 10 x Series ZPT Series ZPR Series ZP readth x Length (mm) x 30 x 10 x 20 x 30 x 20 x 30 Long dia. Short dia

23 Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZP Ideal for heavy weight material or objects with a large surface area. xample: RT, ar body : ø0, ø0, ø3, ø0, ø, ø12 Pad material: NR, Silicon rubber, Urethane rubber, luoro rubber, PR Z ZR ZM ZH ZU ZL Type Mounting Without buffer Vacuum entry port Mounting With buffer Vacuum entry port Page Z ZQ Series ZPT Vertical vacuum entry Male thread emale thread emale thread ommon uffer body (Male thread) emale thread to Z ZP ZU MJ Misc. Series ZP Lateral vacuum entry emale thread emale thread uffer body (Male thread) emale thread to Series ZPT ZP Pad dia. uffer stroke 2 0 ø0 ø0 ø3 ø0 ø ø12 Pad Material and haracteristics : Little or no influence : an be used depending on conditions : Not suitable haracteristics Material NR Silicon rubber Urethane rubber luoro rubber PR Durometer HS (± ) Operating temperature range ( ) 0 to to to 0 0 to to 10 Oil resistance gasoline Oil resistance benzol ase resistance cid resistance Weatherability Ozone resistance brasion resistance The above table covers only general characteristics of subject rubber materials. Pad materials used by SM pass the nominal JIS material standards; however, actual performance depends on operating conditions. Waterproof Solvent resistance (enzene, toluene)

24 Series ZPT/ZP Selection vacuum pad diameter (ød) can be determined by calculation if the lifting force needed to perform the work function is known. The weight of the workpiece and any potential dynamic forces involved during movement (lifting, stopping, rotating, etc.) need to be considered. The area of one pad can be divided to an equivalent area of multiple pads (n) as necessary, based on these forces and the shape of the load. alculation alculation Method: Pad Diameter vacuum pad diameter with applied safety factor based on lifting orientation of workpiece (vertical or horizontal) can be derived from calculations or by using the Selection Graph shown below. ød = 3.1 x 1 P x W n x t x 0 ød : (mm) Pad n : Number of pads used W : Lifting force (N) P : Stable vacuum pressure (kpa) t : Safety factor: Horizontal pad contact: (dynamic) Vertical pad contact: (dynamic) W Horizontal lifting W Vertical lifting asically avoid this use. ( ) Selection Graph The pad diameter required for horizontal (selection graphs (1) and (2)) or vertical contact can be found by setting the weight of the work the number ob pads to contact the workpiece and the stable adsorption vacuumu pressure. Selection Graph (1) Selection Graph of Pad Diameter by Lift orce Horizontal (Reference value) (mm) kPa -kpa -0kPa -kpa -0kPa -kpa -0kPa -kpa -0kPa -kpa Lifting force (N) Selection Graph (2) Selection Graph of Pad Diameter by Lift orce Vertical (Reference value) (mm) kPa -kpa -0kPa -kpa -0kPa -kpa -0kPa -kpa -0kPa -kpa Lifting force (N) How to read xample: Work load 20 kg (Lifting force: 19 N) onditions: Desired number of pads pcs. Working vacuum pressure 0 kpa Horizontal lifting <Selection procedure> rom left condition Lifting force per pad: 19 N pcs. = 39.2 N rom Selection Graph (1) as horizontal lifting Lifting force 39.2 N xtend to the y-axis from the corresponding point of vacuum pressure 0 kpa; result is to select a pad diameter bigger than 3 mm

25 Series ZPT/ZP pplication Data Theoretical Lifting orce Theoretical lifting force for pad can be derived from calculations or taken directly from theoretical lifting force table. alculation W = P x S x 0.1 x 1 t Theoretical Lifting orce W : Lifting force (N) Pad P : Stable vacuum pressure (kpa) S : Pad area (cm 2 ) t : actor of safety: Horizontal pad contact : (dynamic) Vertical pad contact : (dynamic) Horizontal lifting The theoretical lifting force (not including the safety factor) is found from the pad diameter and vacuum pressure. The required lifting force is then found by dividing the theoretical lifting force by the safety factor. Lifting force = Theoretical lifting force t Theoretical Lifting orce (Theoretical lifting force = P x S x 0.1) (mm) dsorption area (cm 2 ) Vacuum pressure (kpa) ø ø ø ø ø W ø (N) W Vertical lifting asically ( avoid this use. ) Z ZR ZM ZH ZU ZL Z ZQ Z ZP ZU MJ Misc. Precautions 1. The quantity and placement of pads should be considered when transferred work has a large surface area. Pad 2. Vacuum response time and vacuum breaking time are influenced by internal volume of large bellows size pad, which has more volume than the large flat ribbed type pad. When response time is important, consider the following measures: Use a larger capacity ejector. Set a vacuum breaking valve. Support bracket Install support brackets to prevent a workpiece from dropping according to your requirements

26 Vacuum Pad: Large/Heavy Duty Type Lateral Vacuum ntry Without uffer Series ZP Specifications Mounting Vacuum entry direction onnection ø0, ø0 ø3, ø0 ø, ø12 Vacuum entry port Thread dia. Lateral emale thread M x 1.2, M10 x 1. M10 x 1., M12 x 1. M10 x 1., M12 x 1. Rc 1 Z ZR ZM ZH Pad Type (mm) Material (olor) Durometer ø0, ø0, ø3, ø0, ø, ø12 NR (lack), Silicon rubber (White), Urethane rubber (rown), luoro rubber (lack with mark.), PR (lack with mark -) NR/Silicone rubber/pr (0 ), Urethane/luoro rubber (0 ) ZU ZL Z ZQ Weight Pad dia. ø0 ø0 ø3 ø0 ø ø12 Silicon rubber Urethane rubber luoro rubber PR (g) Weight (NR) Weight (g) Weight (g) ZP0H-01- ZPH ZPH ZP12H ZP12H ZP0H ZP0H-01- ZP0H ZP3H ZP3H ZP0H ZP0H dd or deduct the weight shown in the table on the left for other materials. Z ZP ZU MJ Misc. ZP How to Order 0 H N 01 (mm) 0 0 ø0 ø0 3 ø3 0 ø0 ø 12 ø12 Mounting thread M x M10 x M12 x 1. Vacuum entry 01 Rc 1 ø0, ø0 ø3, ø0 ø, ø12 H Pad type Heavy duty Material N NR S Silicon rubber U Urethane rubber luoro rubber PR

27 Series ZP 0 ZP 0 H-01- (emale thread) ZP H-01- (emale thread) 3 0 Hexagon width across flats 21 Hexagon width across flats 21 Width across flats 3 Width across flats 2 ø ø ø ø3 (mm) ø ø ZP0H M x 1.2 ZP0H M10 x 1. ZP0H M x 1.2 ZP0H M10 x 1. ZP3H ZP3H ZP0H ZP0H (mm) ø ø D G M10 x M12 x M10 x M12 x 1. ZP 12 H-01- (emale thread) Hexagon width across flats 21 Width across flats 0 ø ø ø ø0 (mm) ø ø ZPH M10 x 1. ZPH M12 x 1. ZP12H M10 x 1. ZP12H M12 x

28 Vacuum Pad: Large/Heavy Duty Type Lateral Vacuum ntry With uffer Series ZP Specifications Mounting Vacuum entry direction onnection ø0, ø0 ø3, ø0 ø, ø12 Vacuum entry port Thread dia. Vertical Male thread M1 x 1. M1 x 1. M22 x 1. Rc 1 uffer stroke uffer type ø0 to ø0 ø, ø12 Rotating (J) 2 mm, 0 mm, mm 2 mm, 0 mm, mm, mm Z ZR ZM ZH Pad Type (mm) Material (olor) Durometer ø0, ø0, ø3, ø0, ø, ø12 NR (lack), Silicon rubber (White), Urethane rubber (rown), luoro rubber (lack with mark.), PR (lack with mark -) NR/Silicone rubber/pr (0 ), Urethane/luoro rubber (0 ) ZU ZL Z ZQ Weight Pad dia. ø0 ø0 ø3 ø0 ø ø12 Silicon rubber Urethane rubber luoro rubber PR (g) Weight (NR) Weight (g) Weight (g) ZP0HNJ ZP0HNJ ZP0HNJ ZP0HNJ ZP0HNJ ZPHNJ ZP0HNJ ZPHNJ ZP0HNJ ZPHNJ ZP0HNJ ZPHNJ ZP3HNJ ZP12HNJ ZP3HNJ ZP12HNJ ZP3HNJ ZP12HNJ ZP0HNJ ZP12HNJ dd or deduct the weight shown in the table on the left for other materials. Z ZP ZU MJ Misc. ZP 0 H N J 2 How to Order 01 1 (mm) 0 0 ø0 ø0 3 ø3 0 ø0 ø 12 ø12 Vacuum entry 01 Rc 1 Mounting thread 1 22 M1 x 1. (ø0 to ø0) M22 x 1. (ø, ø12) Pad type uffer stroke (Rotating) H Heavy duty Stroke ø0 ø0 ø3 ø0 ø ø Material N NR S Silicon rubber U Urethane rubber Spring orce luoro rubber ø0 to ø0 PR irst mounting load.9 N Second mounting load 11. N ø, ø12 10 N 1 N

29 Series ZP 0 ZP 0 HJ-01-1 (With buffer) ZP 0 HJ-01-1 (With buffer) 3 Hexagon width across flats 2 Hexagon width across flats 1 Hexagon width across flats 1 Hexagon width across flats 2 Width across flats 1 Hexagon width across flats 21 Width across flats 2 Width across flats 1 Hexagon width across flats 21 Width across flats 3 (mm) ø ø D ZP0HJ ZP0HJ ZP0HJ ZP0HJ ZP0HJ ZP0HJ ZP3HJ ZP3HJ ZP3HJ-01-1 ZP0HJ ZP0HJ ZP0HJ-01-1 (mm) ø ø D G H ZP 12 HJ (With buffer) Hexagon width across flats 30 Hexagon width across flats 1 Hexagon width across flats 21 Width across flats 19 ZPHJ ZPHJ ZPHJ ZPHJ ZP12HJ ZP12HJ ZP12HJ ZP12HJ (mm) ø ø D

30 Vacuum Pads for Heavy Duty Material Handling Series ZPT/ZP onstruction Series ZPT Series ZP How to Order Pad Unit ZP 0 Pad dia. (mm) 0 0 ø0 ø0 3 ø3 0 ø0 ø 12 ø12 H N Pad type H Heavy duty Material N S U Replacement Parts/Pad Unit NR Silicon rubber Urethane rubber luoro rubber PR Pad Unit Weight (NR) ZP0HN ZP0HN ZP3HN ZP0HN ZPHN ZP12HN omponent Parts No. Description Material Surface treatment q Pad NR, Silicone rubber, Urethane rubber, luoro rubber, PR w e dapter plate Piston rod luminum arbon steel Hard chrome plated r Spring Stainless steel t uffer body luminum y uffer adaptor rass lectroless nickel plated u daptor rass lectroless nickel plated i type adaptor rass lectroless nickel plated o Mounting nut Rolled steel lack zinc chromated Weight (g) dd NR weight to the table on the right for other materials. Pad dia. ø0 ø0 ø3 ø0 ø ø12 Silicon rubber Urethane rubber luoro rubber PR (g) Z ZR ZM ZH ZU ZL Z ZQ Z ZP ZU MJ Misc. 0 3 ZP 0H ZP 0H ZP 12H ø ø ZP0H 0 2 ZP0H 0 2 (mm) ø 32 2 ø ø ZP3H 3 ZP0H D 0 1 (mm) 3.. ø ø ZPH 103 ZP12H (mm) ø

31 Series ZPT/ZP How to ssemble/disassemble How to Distinguish Different Pad Materials Pad Mark Hexagon socket head screw daptor plate daptor plate hecking the mark on the pad's interior surface as shown in the figure on the left. Material NR Silicon rubber Urethane rubber luoro rubber PR olor lack White rown lack lack Mark. - Gap Remove bolts with a hex. key wrench from the pad underside. Tighten new pad with the bolts ensuring there is no gap between the adaptor plate and the pad. Replacement Parts/Mounting Nut How to Order ZPN M1 d Mounting thread M1 M1 x 1. M1 M1 x 1. M22 M22 x 1. Mounting nut part number for M1 x 1 is SN-01. H d SN M1 x 1 ZPN-M M1 x 1. ZPN-M M1 x 1. ZPN-M M22 x 1. (mm) H 9 olts 11 ø. d M3 x M x M x 0. (mm) L

32 Vacuum Pad: Large Size ellows Type Series ZPT/ZP Pad Diameter: ø0, ø0, ø3, ø0, ø, ø12 Z ZR ZM Ideal for loads with a curved surface, heavyweight loads and loads with large surface area. ZH ZU ZL Z ZQ Z ZP ZU MJ Misc. or transfer of RT or transfer of cardboard box or automotive production line

33 Vacuum Pad: Large Size ellows Type Series ZPT/ZP : ø0, ø0, ø3, ø0, ø, ø12 Pad material: NR, Silicone rubber, Urethane rubber, luoro rubber, PR Series ZPT Vertical vacuum entry Series ZP Lateral vacuum entry uffer With buffer With buffer Mounting Male thread emale thread uffer mounting (Male thread) emale thread uffer mounting (Male thread) Vacuum entry port emale thread ommon emale thread emale thread emale thread P to P to P to 92 P to 90 P to 9 Pad dia. uffer stroke (mm) 2 0 uffer stroke ø0 ø0 ø3 ø0 ø ø12 Pad Material and haracteristics : Little or no influence : an be used depending on conditions. : Not suitable Material haracteristics NR Silicon rubber Urethane rubber luoro rubber PR Durometer HS (± ) Operating temperature range ( ) 0to to 20 0to0 0to20 20 to 10 Oil resistance gasoline Oil resistance benzol ase resistance cid resistance Weatherability Ozone resistance The above table covers only general characteristics of subject rubber materials. Pad materials used by SM pass the nominal JIS material standards; however, actual performance depends on operating conditions. Solvent brasion resistance Waterproof resistance (enzene, toluene)

34 Large Size ellows Type Series ZPT/ZP Interchangeable with flat pad with ribs for heavy loads. When changing to a different shape pad due to load change, the pad can be easily interchanged. lat pad with ribs for heavy load ellows pad for heavy load Z ZR ZM Possible combinationsame pad diameter, ø0 and ø0, ø3 and ø0, ø and ø12 Possible adsorption to cylindrical loads with easy fit to the load shape. Diameter of cylindrical workpiece which can be absorbed: ø Table (1) Diameter of ylindrical Workpiece Which can be bsorbed. (Reference value) Dia. of cylindrical workpiece which can be absorbed: ø (1) ZP 0H ø0 or more 0H ø or more 3H ø120 or more 0H ø10 or more H ø10 or more 12H ø230 or more Note 1) Please consult with SM when requiring a diameter smaller than shown in table. Note 2) Regard values mentioned above as reference only, since actual valves may depend on operating conditions. ZH ZU ZL Z ZQ Z ZP ZU MJ Misc. Pushing force for adsorption is almost equivalent to return force of buffer spring. Pad shape permits adsorption to sloped surfaces. When a workpiece could be deformed during adsorption or transportion. (xample of a cardboard box) When the adsorption surface of a workpiece is slanted. (Maximum angle: ) Regard values mentioned above as reference only, since actual valves may depend on operating conditions

35 Vacuum Pad: Large Size ellows Type Lateral Vacuum ntry Without uffer Series ZP Specifications Mounting Vacuum entry direction onnection Thread dia. ø0, ø0 ø3, ø0 ø, ø12 Vacuum entry port Pad Type (mm) Material (olor) Durometer Weight Lateral amale thread M x 1.2 M10 x 1. M10 x 1. M12 x 1. M10 x 1. M12 x 1. Rc 1/ ø0, ø0, ø3, ø0, ø, ø12 NR (lack), Silicone rubber (White), Urethane rubber (rown), luoro rubber (lack with mark. ), PR (lack with mark.) NR/Silicone rubber/pr (0 ), Urethane/luoro rubber (0 ) (g) Z ZR ZM ZH ZU ZL Z ZQ Z ZP ZU NR Weight Weight ZP0HN ZP 0HN ZP0HN-01-1 ZPHN ZP3HN ZP12HN dd NR weight to below table for other materials. Pad dia. Silicon Urethane luoro rubber rubber rubber PR ø0 ø0 ø3 ø0 ø ø MJ Misc. How to Order ZP 0 H N (mm) 0 ø0 Mounting thread ø0, ø0 ø3, ø0 ø,, ø12 0 ø0 M x ø3 10 M10 x 1. 0 ø0 12 M12 x 1. ø 12 ø12 Pad type Vacuum entry 01 Rc 1/ H Large bellows pad Material N NR S Silicon rubber U Urethane rubber luoro rubber PR

36 Series ZP 0 ZP 0H-01- (emale thread) ZP 0H-01- (emale thread) Rc 1/ I Rc 1/ I Hexagon width across flats Hexagon width across flats H Width across flats 2 ø2 3-M3 x 0. H 10 Width across flats 3 ø -M x 0. G 10 G ø3 ø1 ø ø ø ød ø ø3 ø ø ø ød ZP0H ZP0H D G 0. H 9 2. I M x 1.2 M10 x 1. M x 1.2 M10 x 1. (mm) ZP3H ZP0H D G 3. H 0. (mm) I M10 x M12 x 1. M10 x M12 x 1. ZP 12 H-01- (emale thread) Rc 1/ Hexagon width across flats 2 I 11 Width across flats 0 ø0 -M x 0. G H 11 ø ø0 ø ø ø ød (mm) ZPH ZP12H D G H I M10 x 1. M12 x 1. M10 x 1. M12 x

37 Vacuum Pad: Large Size ellows Type Lateral Vacuum ntry With uffer Series ZP Specifications Z Mounting Vacuum entry direction onnection Thread dia. ø0, ø0 ø3, ø0 ø, ø12 Lateral Male thread M1 x 1. M1 x 1. M22 x 1. uffer stroke uffer type ø0 to ø0 ø, ø12 Rotating (J) 2, 0, mm 2, 0,, mm ZR ZM ZH Vacuum entry port Rc 1/ ZU NR Pad Type (mm) Material (olor) Durometer Weight Weight Weight ZP0HNJ ZP 0HNJ ZPHNJ ZP0HNJ ZP3HNJ ZP12HNJ ZP0HNJ ø0, ø0, ø3, ø0, ø, ø12 NR (lack), Silicone rubber (White), Urethane rubber (rown), luoro rubber (lack with mark.), PR (lack with mark -) NR/Silicone rubber/pr (0 ), Urethane/luoro rubber (0 ) dd NR weight to below table for other materials. Pad dia. ø0 ø0 ø3 ø0 ø ø12 Silicon rubber Urethane rubber luoro rubber PR (g) ZL Z ZQ Z ZP ZU MJ Misc. How to Order ZP 0 H N J (mm) 0 ø0 0 ø0 3 ø3 0 ø0 ø 12 ø12 Pad type H Large bellows pad Spring orce ø0 to ø0 irst mounting load.9 N Second mounting load 11. N ø, ø10 irst mounting load 10 N Second mounting load 1 N Material N NR S Silicon rubber U Urethane rubber luoro rubber PR Mounting thread 1 M1 x 1. (ø0 to ø0) 22 M22 x 1. (ø, ø12) Vacuum entry 01 Rc 1/ pplicable buffer stroke (Rotating) Stroke ø0 ø0 ø3 ø0 ø ø

38 Series ZP ZP0HJ ZP0HJ D G H 9 I J ZP3HJ ZP0HJ D..1 3 G H I (mm) J Hexagon width across flats 1 M22 x 1. Hexagon width across flats 30 Rc 1/ Width across flats 19 Hexagon width across flats 21 Width across flats 0 -M x 0. G H 11 I I Hexagon width across flats 1 Hexagon width across flats 1 9 Hexagon width across flats 2 Hexagon width across flats 2 3 I 0 ZP 0HJ-01-1 (Male thread) ZP HJ-01-1 (Male thread) J 9 3 Rc 1/ Hexagon width across flats 21 H 10 Width across flats 2 G 10 ø3 ø1 ø ø ø ød M1 x 1. Width across flats 1 ø2 3-M3 x 0. (mm) J Rc 1/ Hexagon width across flats 21 9 H 10 M1 x 1. Width across flats 1 Width across flats 3 -M x 0. ø G 10 ø ø3 ø ø ø ød ZP 12 HJ (Male thread) J ø0 ø ø0 ø ø ø ød ZPHJ ZP12HJ D G (mm) H I J

39 Vacuum Pad: Large Size ellows Type Vertical Vacuum ntry with uffer Series ZPT/ZP onstruction Series ZPT Series ZP y o (mm) 0 ø0 0 ø0 3 ø3 0 ø0 ø 12 ø12 u o w q How to Order ZP 0 H N Material N NR S Silicon rubber U Urethane rubber luoro rubber PR Pad type H Large bellows pad y o t r e w q t r e i w q No. Replacement Parts/Pad Unit Weight NR omponent Parts q w e r t y u i o ZP 0HN ZP 0HN ZP 3HN ZP 0HN ZPHN ZP12HN Description Pad dapter plate Piston rod Spring uffer body uffer adaptor daptor type adaptor Mounting nut Weight Material NR, Silicone rubber, Urethane rubber, luoro rubber, PR luminum arbon steel Stainless steel luminum rass rass rass Rolled steel Surface treatment Hard chrome plated lectroless nickel plated lectroless nickel plated lectroless nickel plated lack zinc chromated dd NR weight to below table for other materials. Pad dia. ø0 ø0 ø3 ø0 ø ø12 Silicon rubber Urethane rubber luoro rubber (g) PR Z ZR ZM ZH ZU ZL Z ZQ Z ZP ZU MJ Misc. 0 0 ZP 0H ZP H ZP H ø 3-ø. 3-ø 3 0 -ø -ø 3. G 12 -ø9. -ø ø ø1 ø ø ø ød ø ø3 ø ø ø ød ø10 ø0 ø ø ø ød ZP0H 0 ZP0H D (mm) (mm) (mm) D G D ZP3H ZPH ZP0H ZP12H

40 Series ZPT/ZP How to ssemble/disassemble Remove bolts with a hex. key wrench from the pad underside. Tighten new pad with the bolts ensuring there is no gap between the adapter plate and the pad. Pad Mark dapter plate dapter plate How to Distinguish Different Pad Materials heck for the indicator mark on the pad's interior surface as shown in the figue at left. Material NR Silicon rubber Urethane rubber luoro rubber PR olor lack White rown lack lack Mark Hexagon set screw x Gap Replacement Parts/Mounting Nut How to Order ZPN M1 d Mounting thread M1 M1 x 1. M1 M1 x 1. M22 M22 x 1. Mounting nut part number for M1x1 is SN-01. H SN-01 ZPN-M1 ZPN-M1 ZPN-M d M1 x 1 M1 x 1. M1 x 1. M22 x 1. (mm) H 9 olts (Hexagonal Socket Head ap Screw) d ø (mm) d L L M3 x 0. M x 0. M x

41 Vacuum Pad New More shapes and sizes of pads. pplicable for various types of work pieces ompact/short/nozzle ompact, Space-saving ø0. to ø1 P. 1 to 9 Mark-free ø to ø12 P. 2 to 29 or use where adsorption marks must not be left on work pieces. Thin lat/lat ø to ø30 P. 10 to 12 Sponge ø to ø1 P. 30 to 32 or sheets or vinyl or work pieces with bumps ellows ø2 to ø P. 13 to 1 or spherical work pieces or work pieces with inclined surface Heavy-duty ø32 to ø30 P. 33 to or heavy or large work pieces Oval or rectangular work pieces 3. x to x 30 P. 1 to 23 Special onfiguration P. 9, 0 or stage setting of disks (D, DVD) or glass substrates all Spline uffer all spline guide is used to the buffer. ø2 to ø P. 2 Vacuum Saving Valve P. 1 to an restrict the reduction of vacuum pressure even when there is no workpiece. Series ZP2 T.S-

42 Vacuum Pad Series ZP2/ZP Pad Diameter List Pad type U Page of ZP2 P Note) : Series ZP2 : Series ZP lat lat with rib Thin flat (pad) Thin flat with rib MU U U UT T P. 2 P. P. P. 1 P. 1 P. 10 P. 1 Note) Note) ellows (pad) J M P. 13 P. 1 ZJ P. 1 Deep D Nozzle pad N P. 9 lat pad MT P. 11 Oval pad W U P x x x x 10 x 20 x 30 x 30 2 x 3. x x 10 x 10 x 20 x 30 x 20 x 30 H P. 33 Heavy-duty pad HT H P. 33 P. 3 HW P. 3 Mark-free pad Related pad U H P. 2 P. 2 Sponge pad S P. 30 Resin attachment K P. 29 Pad with ball spline buffer U P. 2 Heavy-duty ball joint pad H H P. 3 P. 3 yclone pad (Non-contact pad) Made to Order P. 2 Note) The ZP2 series is blast type. Products other than above Vacuum pad for transferring disks P. 9 Vacuum pad for fixing panel P. 0 Vacuum saving valve P. 1 ront matter 1

43 Rotary ctuators Vane Style Rack & Pinion Style ir Grippers Parallel Style ngular Style Vacuum quipment Vacuum jector ir Suction ilter Vacuum Pad Related quipment for Vacuum System est Pneumatics Rotary ctuators Vane Style Rack & Pinion Style ir Grippers Parallel Style ngular Style Vacuum quipment Vacuum jector ir Suction ilter Vacuum Pad Related quipment for Vacuum System Ver. 1 uto Switches est Pneumatics Rotary ctuators Vane Style Rack & Pinion Style ir Grippers Parallel Style ngular Style Vacuum quipment Vacuum jector ir Suction ilter Vacuum Pad Related quipment for Vacuum System Ver. 1 uto Switches est Pneumatics Rotary ctuators Vane Style Rack & Pinion Style ir Grippers Parallel Style ngular Style Vacuum quipment Vacuum jector ir Suction ilter Vacuum Pad Related quipment for Vacuum System Ver. 1 uto Switches est Pneumatics Rotary ctuators Vane Style Rack & Pinion Style ir Grippers Parallel Style ngular Style Vacuum quipment Vacuum jector ir Suction ilter Vacuum Pad Related quipment for Vacuum System Ver. 1 uto Switches uto Switches : Refer to SM website or pages 111 to 123 in est Pneumatics No. for details of the ZP series. SM vacuum pad Pad Diameter List Search U Page of ZP2 P. 1 est Pneumatics est Pneumatics Ver. 1 atalog of ZP MU U U UT T P. 2 P. P. P. 1 P. 1 P. 10 J M ZJ D P. 1 P. 13 P. 1 P. 1 N MT P. 9 P. 11 W P. 1 U H HT H P. 33 P. 33 P x 0 HW U H P. 3 P. 2 P. 2 S K U H H P. 30 P. 29 P. 2 P. 3 P. 3 ront matter 2

44 Series ZP2 Series Variations Variations Pad Type Diameter dapter type Page ompact Pad lat or adsorption of general work pieces or adsorption of work pieces with flat and not deformed surface lat with rib or a workpiece which is likely to deform or for releasing a workpiece certainly Thin flat or a workpiece which is likely to deform ellows or adsorption of work pieces with inclined surface Single unit Single unit Single unit U UT lat lat with rib Thin flat ø3, ø ø, ø, ø ø, ø Series ZP ommon adapter P. 1 P. 1 P. 1 ellows ø, ø P. 1 Single unit Short-type Pad Space-saving in the height direction MU ø2, ø3., ø ø, ø, ø ø10, ø1 P. 2 Single unit With adapter U lat ø2, ø, ø ø, ø1 P. Single unit With adapter U ø2, ø3, ø ø, ø P. Single unit Nozzle Pad or adsorption of small components such as I chips Single unit With adapter N Nozzle ø0., ø1.1 P. 9 Thin lat Pad or adsorption of soft work pieces such as thin sheets or vinyl. Wrinkling or deformation during adsorption is reduced. UT Thin flat (Skirt) ø, ø, ø11 ø1, ø1 ø20 P. 10 Single unit Series ZP ommon adapter ront matter 3

45 Series Variations lat Pad ellows Pad Variations or adsorption of flexible sheets or film. Deformation of the flat surface during adsorption is reduced. or use where there is no space for the buffer (spring type). or adsorption of work pieces with inclined surface Single unit With adapter MT Pad Type Thin flat (With groove) Diameter ø10, ø1 ø20, ø2 ø30 dapter type Page P. 11 ø, ø9, ø10 J ellows ø1, ø1 (Multistage type) ø1, ø2 P. 13 ø30 Single unit Series ZP ommon adapter M ø, ø, ø ø10, ø1 ø20 P. 1 Single unit With adapter ellows ZJ ø2, ø, ø ø, ø0, ø P. 1 Single unit ront matter

46 Series ZP2 Series Variations Variations Type Pad Diameter dapter type Page last-type Pad last treatment to create finely uneven surface for adsorption. Work pieces can be removed easily. U lat ø P. 1 Single unit lat with rib ø, ø P. 1 Single unit ellows ø, ø P. 1 Single unit J ellows (Multistage type) ø10, ø1 ø2, ø30 Series ZP ommon adapter P. 13 Single unit MU lat ø2, ø3., ø ø, ø, ø ø10, ø1 P. 2 Single unit With adapter U lat ø2, ø, ø P. Single unit With adapter MT Thin flat (With groove) ø10, ø1 ø20, ø2 ø30 P. 11 Single unit With adapter M ellows ø, ø, ø ø10, ø1 ø20 P. 1 Single unit With adapter ront matter

47 Series Variations Variations Type Pad Diameter dapter type Page Oval Pad or work pieces with limitations on the adsorption surface P. 1 Single unit P. 1 With adapter: Vacuum inlet direction Vertical 3. x x 10 x 10 x 10 P. 19 With buffer: Vacuum inlet direction Vertical W Oval x 20 x 20 x 20 x 20 x 30 x 30 x 30 x 30 P. 21 With adapter: Vacuum inlet direction Lateral P. 23 With buffer: Vacuum inlet direction Lateral Pad with all Spline uffer all spline guide is used to the buffer. U lat ø2, ø ø, ø P. 2 With buffer: Vacuum inlet direction Vertical Series ZP ommon adapter ront matter

48 Series ZP2 Series Variations Variations Type Pad Diameter dapter type Page Mark-free Pad or use where adsorption marks must not be left on work pieces. Standard pad lear trace of the pad Single unit U lat ø, ø, ø ø10, ø1 ø2, ø32 ø0, ø0 Series ZP ommon adapter P. 2 Mark-free pad No trace on the object Mark-free NR pad Stuck fluororesin pad Single unit H Heavy-duty (lat with rib) ø0, ø0 ø3, ø0 ø, ø12 P. 2 Related Pad Made to Order yclone Pad (Non-contact pad) P. 2 Resin ttachment Mark-free. Prevents sticking of the rubber and the workpiece. ttachment Single unit With pad ellows ø, ø ø10, ø13 ø1, ø20 ø2, ø32 Series ZP ommon adapter P. 29 Sponge Pad or adsorption of work pieces with bumps Single unit S Sponge ø, ø ø, ø10 ø1 P. 30 P. 31 With adapter Heavy-duty Pad or heavy or large work pieces H Heavy-duty (lat with rib) ø32, ø300 ø30 P. 33 HT Heavy-duty (Thin flat with rib) ø10, ø20 P. 33 H Heavy-duty (ellows) ø32, ø10 P. 3 HW Heavy-duty (Oval) 30 x 0 P. 3 ront matter

49 Series Variations Variations Type Pad Diameter Page Heavy-duty all Joint Pad or adsorption of work pieces with inclined or curved surface With adapter: Vacuum inlet direction Vertical P. 3 P. 3 With adapter: Vacuum inlet direction Lateral H Heavy-duty (lat with rib) ø0 ø0 ø3 ø0 ø ø12 P. 39 With buffer: Vacuum inlet direction Vertical P. 1 With buffer: Vacuum inlet direction Lateral P. 3 With adapter: Vacuum inlet direction Vertical P. With adapter: Vacuum inlet direction Lateral H Heavy-duty (ellows) ø0 ø0 ø3 ø0 ø ø12 P. With buffer: Vacuum inlet direction Vertical P. With buffer: Vacuum inlet direction Lateral ront matter

50 Series ZP Variations Type Pad Diameter dapter type Page Heavy-duty Pad Heavy-duty type (lat with rib) Ideal for heavy or large work pieces such as RT and automobile bodies Heavy-duty type (ellows) Ideal for work pieces with curved surface Ideal for heavy or large work pieces H H Heavy-duty (lat with rib) Heavy-duty (ellows) ø0, ø0 ø3, ø0 ø, ø12 Series ZP ommon adapter P. 9 P. 9 pplications (Pad/dapter) Variations Note Page Vacuum Pad for Transferring Disks or adsorbing circular components like D and DVD ellows mechanism is realized in the pad to dampen the impact to the work. 20 x 2 (ID x OD: PD 22.) P. 9 Vacuum Pad for ixing Panel or adsorbing and fixing the stage of panels or glass circuit board, etc. ellows mechanism allows complete contact with curved work surface. Glass circuit board P. 0 Vacuum Saving Valve an restrict the reduction of vacuum pressure even when there is no workpiece. No need for switching operation when changing work pieces Multiple vacuum pads can be operated by one ejector. onnection thread size for pad side M x 0. M x 1 M x 1.2 R1/ Rc1/ G1/ NPT1/ P. 1 Series ZP2/ZP dapter/uffer pplicable Pad List P. Series ZP dapter ssembly Part No. P. Series ZP2 Mounting dapter Part No. P. 9 Series ZP2 uffer ssembly Part No. P. Series ZP Mounting dapter Part No. P. 2 Series ZP uffer ssembly Part No. P. 0 Series ZP2 dapter ssembly Part No. P. ront matter 9

51 Vacuum quipment Selection 1 eatures of Vacuum dsorption ront matter 11 2 Vacuum Pad Selection ront matter 11 3 Vacuum Pad Selection Procedures Points for Selecting Vacuum Pads. Theoretical Lifting orce. Shear orce and Moment pplied to Vacuum Pad Lifting orce and Vacuum Pad Diameter 1. Theoretical Lifting orce Vacuum Pad Type Vacuum Pad Material Rubber Material and Properties olor and Identification uffer ttachment Pad Selection by Work Type Vacuum Pad Durability Selection of Vacuum jector and Vacuum Switching Valve ront matter 1 alculating Vacuum jector and Switching Valve Size with the ormula Leakage Volume during Work dsorption ront matter 1 Leakage volume from onductance of Work Leakage volume from dsorption Test dsorption Response Time ront matter 1 Relationship between Vacuum Pressure and Response Time after Supply Valve (Switching Valve) is Operated alculating dsorption Response Time with the ormula dsorption Response Time from the Selection Graph Precautions on Vacuum quipment Selection and SM s Proposal ront matter 20 Safety Measures Precautions on Vacuum quipment Selection Vacuum jector or Pump and Number of Vacuum Pads Vacuum jector Selection and Handling Precautions Supply Pressure of Vacuum jector Timing for Vacuum Generation and Suction Verification. Timing for Vacuum Generation. Suction Verification. Set Pressure for Vacuum Pressure Switch Dust Handling of Vacuum quipment Vacuum quipment Selection xample ront matter 2 Transfer of Semiconductor hips Data ront matter 2 Selection Graph Glossary of Terms ountermeasures for Vacuum dsorption System Problems (Troubleshooting) Non-conformance xamples Time of Replacement of Vacuum Pad ront matter 10

52 Selection 1 eatures of Vacuum dsorption Vacuum adsorption system as a method to hold a workpiece has the following features. asy construction ompatible with any place where adsorption is possible. No need for accurate positioning ompatible with soft and easily-deformed work pieces However, special care is required in the following conditions. Workpiece may drop under certain conditions since it is transferred being adsorbed. Liquid or foreign matter around the workpiece may be sucked into the equipment. Large adsorption area is necessary to get large gripping force. Vacuum pad (rubber) may deteriorate. ully understand the features above and select the equipment that suits your operating conditions. 2 Vacuum Pad Selection Vacuum Pad Selection Procedures 1) ully taking into account the balance of a workpiece, identify the adsorption positioning, number of pads and applicable pad diameter (or pad area). 2) ind the theoretical lifting force from the identified adsorption area (pad area x number of pads) and vacuum pressure, and then find the lifting force considering actual lifting and safety factor of transfer condition. 3) Determine a pad diameter (or pad area) that is sufficient to ensure the lifting force is greater than the workpiece mass. ) Determine the pad type and materials, and the necessity of buffer based on the operating environment, and the workpiece shape and materials. The above shows selection procedures for general vacuum pads; thus, they will not be applicable for all pads. ustomers are required to conduct a test on their own and to select applicable adsorption conditions and pads based on the test results. Points for Selecting Vacuum Pads. Theoretical Lifting orce The theoretical lifting force is determined by vacuum pressure and contact area of the vacuum pad. Since the theoretical lifting force is the value measured at the static state, the safety factor responding to the actual operating conditions must be estimated in the actual operation. It is not necessarily true that higher vacuum pressure is better. xtremely high vacuum pressure may cause problems. When the vacuum pressure is unnecessarily high, pads are likely to be worn out quickly and cracked, which makes the pad service life shorter. Doubling the vacuum pressure makes the theoretical lifting force double, while to doubling the pad diameter makes the theoretical lifting force quadruple. When the vacuum pressure (set pressure) is high, it makes not only response time longer, but also the necessary energy to generate a vacuum larger. xample) Theoretical lifting force = Pressure x rea ø20 ø0 rea (cm 2 ) Vacuum pressure [0-kPa] Theoretical lifting force 12. N Theoretical lifting force 0.23 N 2 times Vacuum pressure [0-kPa] Theoretical lifting force 2.11 N Theoretical lifting force. N times ront matter 11

53 Selection. Shear orce and Moment pplied to Vacuum Pad Vacuum pads are not resistant to shear force (parallel force with adsorption surface) and moment. Minimize the moment applied to the vacuum pad with the position of the workpiece center of gravity in mind. The acceleration rate of the movement must be as small as possible, and make sure to take into consideration the wind pressure and impact. If measures to slow down the acceleration rate are introduced, safety to prevent the workpiece from dropping will improve. void lifting the workpiece by adsorbing the vertical side with a vacuum pad (vertical lifting) if possible. When it is unavoidable, a sufficient safety factor must be secured. Lifting orce, Moment, Horizontal orce To lift a workpiece vertically, make sure to take into consideration the acceleration rate, wind pressure, impact, etc., in addition to the mass of the workpiece. (Refer to ig. 1) ecause the pads are susceptible to moments, mount the pad so as not to allow the workpiece to create a moment. (Refer to ig. 2) When a workpiece that is suspended horizontally is moved laterally, the workpiece could shift depending on the extent of the acceleration rate or the size of the friction coefficient between the pad and the workpiece. Therefore, the acceleration rate of the lateral movement must be minimized. (Refer to ig. 3) Loading by acceleration and wind pressure lifting Lifting direction Pad positioning aution for friction force between pad and workpiece ig. 1 Pad ig. 2 Pad Pad ig. Pad 3 alance of Pad and Work Make sure that the pad's suction surface is not larger than the surface of the workpiece to prevent vacuum leakage and unstable picking. Pad aution Guide for drop prevention If multiple pads are used for transferring a flat object with a large surface area, properly allocate the pads to maintain balance. lso make sure that the pads are aligned properly to prevent them from becoming disengaged along the edges. Pad aution Guide for drop prevention Provide an auxiliary device (example: a guide for preventing the workpieces from dropping) as necessary. Mounting Position s a rule, the unit must be installed horizontally. lthough a diagonal or a vertical installation should be avoided whenever possible, if the unit must be installed in such a manner, be certain to guarantee guide and absolute safety. Pad Horizontal lifting Vertical lifting Guide ront matter 12

54 Selection Lifting orce and Vacuum Pad Diameter 1. Theoretical Lifting orce Set the vacuum pressure below the pressure that has been stabilized after adsorption. However, when a workpiece is permeable or has a rough surface, note that the vacuum pressure drops since the workpiece takes air in. In such a case, carry out an adsorption test for confirmation. The vacuum pressure when using an ejector is approximately 0 kpa as a guide. The theoretical lifting force of a pad can be found by calculation or from the theoretical lifting force table. alculation Pad W = P x S x 0.1 x 1 t W : Lifting force (N) P : Vacuum pressure (kpa) S : Pad area (cm 2 ) t : Safety factor Horizontal lifting: or more Vertical lifting: or more Horizontal lifting Vertical lifting This type of application should basically be avoided. Theoretical Lifting orce The theoretical lifting force (not including the safety factor) is found from the pad diameter and vacuum pressure. The required lifting force is then found by dividing the theoretical lifting force by the safety factor t. Lifting force = Theoretical lifting force t (1) Theoretical Lifting orce (Theoretical lifting force = P x S x 0.1) Pad Diameter (ø2 to ø0) (N) (mm) ø2 ø ø ø ø10 ø13 ø1 ø20 ø2 ø32 ø0 ø0 Pad area S (cm 2 ) Vacuum pressure (kpa) Pad Diameter (ø3 to ø30) (N) (mm) ø3 ø0 ø ø12 ø10 ø20 ø300 ø30 Pad area S (cm 2 ) Vacuum pressure (kpa) Oval Pad (2 x to x 30) (N) Pad size (mm) 2 x 3. x x 10 x 10 x 10 x 20 x 20 x 20 x 20 x 30 x 30 x 30 x 30 Pad area S (cm 2 ) Vacuum pressure (kpa) ront matter

55 Selection Vacuum Pad Type Vacuum pads are available in flat, deep, bellows, thin flat, with rib, and oval types, etc. Select the optimal shape in accordance with the workpiece and operating environment. Please contact SM for shapes not included in this catalog. Pad Type Pad shape pplication Pad shape pplication lat To be used when adsorption surface of work is flat and not deformed. all joint To be used when adsorption surface of work is not horizontal. lat with rib To be used when work is likely to deform or in the case of releasing work certainly. Deep To be used when work is curved shape. Long stroke buffer To be used when work height is not even or cushioning toward work is required. ellows To be used when there is not enough space to install buffer or adsorption surface of work is slanted. Large To be used when work is heavy weight. Oval To be used when work has limited adsorption surface or long in length and work is required to locate precisely. onductive s one of the countermeasures against the static electricity, rubber material with reduced resistance is used. or antistatic measures Vacuum Pad Material It is necessary to determine vacuum pad materials carefully taking into account the workpiece shape, adaptability in the operating environment, effect after being adsorbed, electrical conductivity, etc. ased on the work transfer example for each material, select after confirming the characteristics (adaptability) of rubber. Vacuum Pad/xample of Work Transfer Material Material NR Silicone rubber Urethane rubber KM onductive NR onductive silicone rubber pplication Transfer of general work, orrugated board, Veneer plate, Iron plate and others Semiconductor, Removing from die-casting, Thin work, ood processor orrugated board, Iron plate, Veneer plate hemical work General work of semiconductor (Static electricity resistance) Semiconductor (Static electricity) ront matter 1

56 Selection Rubber Material and Properties Main features Pure gum property (specific gravity) Physical properties of blended gum hemical resistance Oil resistance lkaline resistance cid resistance Impact resilience brasion resistance Tear resistance lex crack resistance Maximum operation temperature Minimum operation temperature Volume resistivity (Ωcm) Heat aging Weather resistance Ozone resistance Gasoline/Gas oil enzene/toluene lcohol ther Ketone (MK) thyl acetate Water Organic acid Strong alkali Weak alkali General name Gas permeability resistance Organic acid of high concentration Organic acid of low concentration NR (Nitrile rubber) Good oil resistance, abrasion resistance, and aging resistance / / / / / Silicone rubber xcellent heat resistance, and cold resistance / / / / / / Urethane rubber xcellent mechanical strength / / / KM (luoro rubber) est heat resistance, and chemical resistance / / / / R (hloroprene rubber) Well balanced weather resistance, ozone resistance, and chemical resistance PR (thylenepropylene rubber) Good aging resistance, ozone resistance, and electrical properties / onductive NR (Nitrile rubber) Good oil resistance, abrasion resistance, and aging resistance. onductive or less / / / / / onductive silicone rubber Very excellent heat resistance, and cold resistance. onductive / / / or less = xcellent --- Not affected at all, or almost no effect = Good --- ffected a little, but adequate resistance depending on conditions = etter not to use if possible = Unsuitable for usage. Severely affected. Properties, chemical resistance, and other values are not guaranteed. These values depend on the operating environment, so they cannot be guaranteed by SM. Thorough research and confirmation are necessary before usage / / / / / / / / onductive silicone sponge xcellent heat insulation, and impact resilience 0. g/cm 3 / x 10 onductive R sponge (hloroprene sponge) xcellent impact resilience, and sound insulation. lame retardance 0.11 g/cm 3 / x 10 olor and Identification General name NR (Nitrile rubber) Silicone rubber Urethane rubber KM (luoro rubber) R (hloroprene rubber) PR (thylenepropylene rubber) onductive NR (Nitrile rubber) onductive silicone rubber onductive silicone sponge onductive R sponge (hloroprene sponge) olor of rubber lack White rown lack lack lack lack lack lack lack Identification (Dot or stamp) Green 1 dot Red 1 dot Silver 1 dot Silver 2 dots ront matter 1

57 Selection uffer ttachment Use a buffer when there is a variation in the height of work pieces and fragile work pieces are adsorbed (cushioning is necessary). If it is necessary to further position the pad and the workpiece, use a non-rotating buffer. Unsteady Distance between Pad and Work If the pad and the workpiece cannot be positioned properly, such as when picking a workpiece having an uneven height, use a built-in spring type pad with a buffer. This type of pad acts as a cushion between the pad and the workpiece. If it is necessary to further position the pad and the workpiece, use a non-rotating buffer. Pad Pad Pad Selection by Work Type arefully select a pad for the following work pieces. 1. Porous Work To pick a permeable workpiece such as paper, select a pad with a small diameter that is sufficient to lift the workpiece. ecause a large amount of air leakage could reduce the pad s suction force, it may be necessary to increase the capacity of an ejector or vacuum pump or enlarge the conductance area of the piping passage. 2. lat Plate Work When a workpiece with a large surface area such as sheet glass or P is suspended, the workpiece could move in a wavelike motion if a large force is applied by wind pressure or by an impact. Therefore, it is necessary to ensure the proper allocation and size of pads. Plate glass, circuit board, etc. Porous work 3. Soft Work If a soft workpiece such as vinyl, paper, or thin sheet is picked up, the vacuum pressure could cause the workpiece to deform or wrinkle. In such a case, it will be necessary to use a small pad or a ribbed pad and reduce the vacuum pressure. Pad. Impact to Pad When pushing a pad to a workpiece, make sure not to apply an impact or a large force which would lead to premature deformation, cracking, or wearing of the pad. The pad should be pushed against the workpiece to the extent that its skirt portion deforms or that its ribbed portion comes into slight contact with the workpiece. specially, when using a smaller diameter pad, make sure to locate it correctly. Decide the position not to strike Vinyl, paper, etc. Vacuum Pad Durability Need to be careful of the vacuum pad (rubber) deterioration. The vacuum pad s adsorption surface will be worn out when it is used for a certain period of time, and the outer diameter gradually becomes smaller. The lifting force becomes weaker as the pad diameter becomes smaller, but absorption is still possible. Since the vacuum pad replacement period greatly varies depending on the operating environment, it is extremely difficult to estimate the replacement period. Specify the period taking into account the actual operating conditions. ront matter 1

58 Selection 3 Selection of Vacuum jector and Vacuum Switching Valve alculating Vacuum jector and Switching Valve Size with the ormula verage suction flow rate for achieving adsorption response time V x 0 Q = + QL T1 T2 = 3 x T1 Max. suction flow rate Qmax = (2 to 3) x Q L/min (NR) <Selection Procedure> Q : verage suction flow rate L/min (NR) V : Piping capacity (L) T1 : rrival time to stable Pv 3% after adsorption (sec) T2 : rrival time to stable Pv 9% after adsorption (sec) QL : Leakage volume during work adsorption L/min (NR) Note 1) jector Select the ejector with the greater maximum suction flow rate from the Qmax indicated above. Direct operation valve Qmax onductance = [dm 3 /(s bar)] x 11.1 Select a valve (solenoid valve) having a conductance that is greater than that of the conductance formula given above from the related equipment (page 12 in est Pneumatics No. ). Note 1) QL: 0 when no leakage occurs during adsorbing a workpiece. If there is leakage during adsorbing a workpiece, find the leakage volume based on. Leakage Volume during Work dsorption. Note 2) Tube piping capacity can be found in. Data: Piping apacity by Tube I.D. (Selection Graph (2)). Leakage Volume during Work dsorption ir could be drawn in depending on the type of workpiece. s a result, the vacuum pressure in the pad becomes reduced and the amount of vacuum that is necessary for adsorption cannot be attained. When this type of workpiece must be handled, it is necessary to select the proper size of the ejector and the vacuum switching valve by taking into consideration the amount of air that could leak through the workpiece. Leakage Volume from onductance of Work Pad Ventilation work Pad Rough work surface Leakage volume QL = 11.1 x x L QL: Leakage volume L/min (NR) L: onductance between work and pad, and work opening area [dm 3 /(s bar)] Leakage Volume from dsorption Test s described in the illustration below, pick up the workpiece with the ejector, using an ejector, pad and a vacuum gauge. t this time, read vacuum pressure P1, obtain the suction flow rate from the flow-rate characteristics graph for the ejector that is being used, and render this amount as the leakage of the workpiece. Vacuum pressure: P1 Pad ZH0S, ZH0DS xhaust haracteristics low-rate haracteristics Supply pressure {0. MPa} Work xercise: Using a supply pressure of 0. MPa, when the ejector (ZH0S) picks up a workpiece that leaks air, the vacuum gauge indicated a pressure of 3 kpa. alculate the leakage volume from the workpiece. <Selection Procedure> When obtaining the suction flow rate at a vacuum pressure of 3 kpa from the ZH0DS flow-rate characteristics graph, the suction flow rate is L/min (NR). Leakage volume Suction flow rate L/min (NR) ront matter 1 Vacuum pressure (kpa) Vacuum acuum pressure pressure ir consumption Suction flow w rate Supply pressure (MPa) Suction flow rate (L/min (NR)) ir consumption (L/min (NR)) Vacuum pressure (kpa) Suction flow rate (L/min (NR))

59 Selection dsorption Response Time When a vacuum pad is used for the adsorption transfer of a workpiece, the approximate adsorption response time can be obtained (the length of time it takes for the pad s internal vacuum pressure to reach the pressure that is required for adsorption after the supply valve {vacuum switching valve} has been operated). n approximate adsorption response time can be obtained through formulas and selection graphs. Relationship between Vacuum Pressure and Response Time after Supply Valve (Switching Valve) is Operated The relationship between vacuum pressure and response time after the supply valve (switching valve) is operated as shown below. Vacuum System ircuit Vacuum Pressure and Response Time after Supply Valve (Switching Valve) is Operated Supply valve Switching valve Supply valve (Switching valve) operation Work Pad Work Pad Vacuum pressure (P) rrival time (sec) Pv: inal vacuum pressure T1 : rrival time to 3% of final vacuum pressure Pv T2 : rrival time to 9% of final vacuum pressure Pv alculating dsorption Response Time with the ormula dsorption response times T1 and T2 can be obtained through the formulas given below. dsorption response time T1 = V x 0 Q dsorption response time T2 = 3 x T1 Piping capacity V = 3.1 D 2 x L x 1 (L) 0 T1 : rrival time to 3% of final vacuum pressure Pv (sec) T2 : rrival time to 9% of final vacuum pressure Pv (sec) Q1 : verage suction flow rate L/min (NR) alculation of average suction flow rate jector Q1 = (1/2 to 1/3) x jector max. suction flow rate L/min (NR) Vacuum pump Q1 = (1/2 to 1/3) x 11.1 x onductance of vacuum pump [dm 3 /(s bar)] D : Piping diameter (mm) L : Length from ejector and switch valve to pad (m) V : Piping capacity from ejector and switching valve to pad (L) Q2: Max. flow from ejector and switching valve to pad by piping system Q2 = S x 11.1 L/min (NR) Q : Smaller one between the Q1 and Q2 L/min (NR) : onductance of piping [dm 3 /(s bar)] or the conductance, the equivalent conductance can be found in. Data: onductance by Tube I.D. (Selection Graph (3)). ront matter 1

60 Selection dsorption Response Time from the Selection Graph 1. Tube Piping apacity Piping capacity from the ejector and switching valve at vacuum pump to the pad can be found in. Data: Piping apacity by Tube I.D. (Selection Graph (2)). 2. Obtain the adsorption response times. y operating the supply valve (switching valve) that controls the ejector (vacuum pump), the adsorption response times T1 and T2 that elapsed before the prescribed vacuum pressure is reached can be obtained from the Selection Graph (1). Selection Graph (1) dsorption Response Time Q x 11.1 [dm3 /(s bar)] Valve conductance = Max. suction flow rate Q (L/min (NR)) Piping capacity rrival time of vacuum pressure (3%) T1 (sec) rrival time of vacuum pressure (9%) T2 (sec) onversely, the size of the ejector or the size of the switching valve of the vacuum pump system can be obtained from the adsorption response time. How to read the graph xample 1: or obtaining the adsorption response time until the pressure in the piping system with a piping capacity of 0.02 L is discharged to 3% (T1) of the final vacuum pressure through the use of the vacuum ejector ZH0S with a maximum suction flow rate of 12 L/min (NR). <Selection Procedure> rom the point at which the vacuum ejector s maximum vacuum suction flow rate of 12 L/min (NR) and the piping capacity of 0.02 L intersect, the adsorption response time T1 that elapses until 3% of the maximum vacuum pressure is reached can be obtained. (Sequence in Selection Graph (1), ) T1 0.3 seconds. xample 2: or obtaining the discharge response time until the internal pressure in the L tank is discharged to 9% (T2) of the final vacuum pressure through the use of a valve with a conductance of 3. [dm 3 /(s bar)]. <Selection Procedure> rom the point at which the valve s conductance of 3. [dm 3 /(s bar)] and the piping capacity of L intersect, the discharge response time (T2) that elapses until 9% of the final vacuum pressure is reached can be obtained. (Sequence in Selection Graph (1), ) T2 12 seconds. ront matter 19

61 Selection Precautions on Vacuum quipment Selection and SM s Proposal Safety Measures Make sure to provide a safe design for a vacuum pressure drop due to a disruption of power supply, or a lack of supply air. Drop prevention measures must be taken in particular when dropping a workpiece presents some degree of danger. Precautions on Vacuum quipment Selection s a countermeasure for power outages, select a supply valve that is normally open or one that is equipped with a selfholding function. Select a vacuum switching valve that has a conductance that does not reduce the composite conductance consisting of the areas from the pad to the ejector. or the release valve, select a 2/3 port valve with a low vacuum specification. lso, use a needle valve to regulate the release flow rate. During the adsorption and transfer of a workpiece, verification of the vacuum switch is recommended. In addition, visually verify the vacuum gauge when handling a heavy or a hazardous item. The ZSP1 type is optimal for the adsorption and transfer of small parts using a suction nozzle with a small diameter. Install a filter (Series Z, Z, Z) before the pressure switch if the ambient air is of low quality. Use a suction filter (Series Z, Z, Z) to protect the switching valve and to prevent the ejector from becoming clogged. lso, a suction filter must be used in a dusty environment. If only the unit's filter is used, it will become clogged quickly. Vacuum jector or Pump and Number of Vacuum Pads jector and number of pads Vacuum pump and number of pads Vacuum line Tank Vacuum source Ideally, one pad should be used for each ejector. When more than one pad is attached to a single ejector, if one of the work pieces becomes detached, the vacuum pressure will drop, causing other work pieces to become detached. Therefore, the countermeasures listed below must be taken. djust the needle valve to minimize the pressure fluctuation between adsorption and non-adsorption operations. Provide a vacuum switching valve to each individual pad to minimize the influences on other pads if an adsorption error occurs. Ideally, one pad should be used for each line. When more than one pad is attached to a single vacuum line, take the countermeasures listed below. djust the needle valve to minimize the pressure fluctuation between adsorption and non-adsorption operation. Include a tank and a vacuum pressure reduction valve (vacuum pressure regulator valve) to stabilize the source pressure. Provide a vacuum switching valve to each individual pad to minimize the influences on other pads if an adsorption error occurs. ront matter 20

62 Selection Vacuum jector Selection and Handling Precautions jector Selection jector Nozzle Diameter Selection There are 2 types of ejector flow-rate characteristics: the high vacuum type (S type) and the high flow type (L type). During the selection, pay particular attention to the vacuum pressure when adsorbing work pieces that leak. High Vacuum Type low-rate haracteristics/ ZH13S High low Type low-rate haracteristics/ ZH13L Vacuum pressure Leakage If a considerable amount of leakage occurs between the workpiece and the pad, resulting in incomplete adsorption, or to shorten the adsorption and transfer time, select an ejector nozzle with a larger diameter from the ZH, ZM, ZR, or ZL series. Vacuum pressure (kpa) Vacuum pressure (kpa) Manifold Use Individual exhaust entralized exhaust Suction flow rate (L/min (NR)) Suction flow rate (L/min (NR)) The vacuum pressure varies in accordance with the leakage volumes indicated in the above diagrams. If the leakage volume is 30 L/min (NR), the vacuum pressure of the S type is 20 kpa q w e, and for the L type it is 33 kpa q' w' e'. If the leakage volume is L/min (NR), the vacuum pressure of the S type is 0 kpa r t y, and for the L type it is kpa r' t' y'. Thus, if the leakage volume is 30 L/min (NR) the L type can attain a higher vacuum pressure, and if the leakage volume is L/min (NR), the S type can attain a higher vacuum pressure. Thus, during the selection process, make sure to take the flow-rate characteristics of the high vacuum type (S type) and the high flow type (L type) into consideration in order to select the type that is optimal for your application. If there are a large number of ejectors that are linked on a manifold and operate simultaneously, use the builtin silencer type or the port exhaust type. If there are a large number of ejectors that are linked on a manifold, which exhaust collectively, install a silencer at both ends. If the exhaust must be discharged outdoors through piping, make sure that the diameter of the piping is large enough that its back pressure will not affect the operation of the ejectors. If the vacuum ejector makes an intermittent noise (abnormal noise) from exhaust at a certain supply pressure, the vacuum pressure will not be stable. It will not be any problem if the vacuum ejector is used under this condition. However, if the noise is disturbing or might affect the operation of the vacuum pressure switch, lower or raise supply pressure a little at a time, and use in an air pressure range that does not produce the intermittent noise. Supply Pressure of Vacuum jector Use the vacuum ejector at the standard supply pressure. The maximum vacuum pressure and suction flow rate can be obtained when the vacuum ejector is used at the standard supply pressure, and as a result, adsorption response time also improves. rom the viewpoint of energy-saving, it is the most effective to use the ejector at the standard supply pressure. Since using it at the excessive supply pressure causes a decline in the ejector performance, do not use it at a supply pressure exceeding the standard supply. ront matter 21

63 Selection Timing for Vacuum Generation and Suction Verification. Timing for Vacuum Generation The time for opening/closing the valve will be counted if a vacuum is generated after the adsorption pad descends to adsorb a workpiece. lso, there is a timing delay risk for the generating vacuum since the operational pattern for the verification switch, which is used for detecting the descending vacuum pad, is not even. To solve this issue, we recommend that vacuum be generated in advance, before the vacuum pad begins to descend to the workpiece. dopt this method after confirming that there will be no misalignment resulting from the workpiece s light mass.. Suction Verification When lifting the vacuum pad after absorbing a workpiece, confirm that there is a suction verification signal from the vacuum pressure switch, before the vacuum pad is lifted. If the vacuum pad is lifted, based on the timing of a timer, etc., there is a risk that the workpiece may be left behind. In general adsorption transfer, the time for adsorbing a workpiece is slightly different since the position of the vacuum pad and the workpiece are different after every operation. Therefore, program a sequence in which the suction completion is verified by a vacuum pressure switch, etc. before moving to the next operation.. Set Pressure for Vacuum Pressure Switch Set the optimum value after calculating the required vacuum pressure for lifting a workpiece. If a higher pressure than required is set, there is a possibility of being unable to confirm the suction even though the workpiece is adsorbed. This will result in a suction error. When setting vacuum pressure switch set values, you should set using a lower pressure, with which a workpiece can be adsorbed, only after considering the acceleration or vibration when a workpiece is transferred. The set value of the vacuum pressure switch shortens the time to lift a workpiece. Since the switch detects whether the workpiece is lifted or not, the pressure must be set high enough to detect it. Vacuum Pressure Switch (Series ZS), Vacuum Pressure Gauge (Series GZ) When adsorbing and transferring a workpiece, verify at the vacuum pressure switch as much as possible (In addition, visually verify the vacuum gauge, especially when handling a heavy or a hazardous item.). pprox. ø1 adsorption nozzle The difference in pressure between ON and O becomes small depending on the capacity of the ejector and vacuum pump. In such a case, it will be necessary to use ZSP1 that can detect a small hysteresis or a flow switch. Note) vacuum generator with a large suction capacity will not be detected properly, so an ejector with an appropriate capacity must be selected. Since the hysteresis is small, vacuum pressure must be stabilized. Timing hart xample During adsorption ylinder UP ylinder DOWN ylinder switch Supply valve Release valve During vacuum release V port vacuum pressure Vacuum pressure switch set value y lowering the setting of the vacuum switch, the takt time can be shortened. tmospheric pressure Suction verification switch ZSP1 low sensor PMV Refer to the est Pneumatics No. for details. Vacuum pressure gauge GZ Vacuum pressure switch Vacuum pressure at operation ront matter 22

64 Selection Dust Handling of Vacuum quipment When the vacuum equipment is used, not only the workpiece, but also dust in the surrounding environment is taken in the equipment. Preventing the intrusion of dust is required more than for any other pneumatic equipment. Some of SM s vacuum equipment comes with a filter, but when there is a large amount of dust, an additional filter must be installed. When vaporized materials such as oil or adhesive are sucked into the equipment, they accumulate inside, which may cause problems. It is important to prevent dust from entering the vacuum equipment as much as possible. (1) Make sure to keep the working environment and surrounding area of the workpiece clean so that dust will not be sucked in the equipment. (2) heck the amount and types of dust before using the equipment and install a filter, etc., in the piping when necessary. In particular, equipment used to capture dust, such as a vacuum cleaner, require a special filter. (3) onduct a test and make sure that operating conditions are cleared before using the equipment. () Perform filter maintenance depending on the amount of dirt. () ilter clogging generates a pressure difference between the adsorption and ejector parts. This requires attention, since clogging can prevent proper adsorption from being achieved. ir Suction ilter (Series Z, Z, Z) To protect the switching valve and the ejector from becoming clogged, a suction filter in the vacuum circuit is recommended. When using an ejector in a dusty environment, the unit s filter will become clogged quickly, so it is recommended that the Z, Z or Z series be used concurrently. Vacuum Line quipment Selection Determine the volume of the suction filter and the conductance of the switching valve in accordance with the maximum suction flow rate of the ejector and the vacuum pump. Make sure that the conductance is greater than the value that has been obtained through the formula given below. (If the devices are connected in series in the vacuum line, their conductances must be combined.) = Qmax x 11.1 : onductance [dm 3 /(s bar)] Qmax: Max. suction flow rate L/min (NR) ront matter 23

65 Selection Vacuum quipment Selection xample Transfer of Semiconductor hips Selection conditions: (1) Workpiece: Semiconductor chips : mm x mm x 1 mm, Mass: 1 g (2) Vacuum piping length: 1 m (3) dsorption response time: 300 msec or less 1. Vacuum Pad Selection (1) ased on the workpiece size, the pad diameter is mm (1 pc.). (2) Using the formula on the front matter 13, confirm the lifting force. W = P x S x 0.1 x 1/t W = 1 g = N = P x 0.13 x 0.1 x 1/ S = π/ x (0.) 2 = 0.13 cm 2 P = 3.0 kpa t = (Horizontal lifting) ccording to the calculation, 3.0 kpa or more of vacuum pressure can adsorb the workpiece. (3) ased on the work shape and type, select: Pad type: lat Pad material: Silicone () ccording to the results above, select a vacuum pad part number ZPT0US-. (Specify the vacuum entry port () from the pad mounting status.) 2. Vacuum jector Selection (1) ind the vacuum piping capacity. ssuming that the tube I.D. is 2 mm, the piping capacity is as follows: V = π/ x D 2 x L x 1/0 = π/ x 2 2 x 1 x 1/0 = L (2) ssuming that leakage (QL) during adsorption is 0, find the average suction flow rate to meet the adsorption response time using the formula on the front matter 1. Q = (V x 0) /T1 + QL = ( x 0) / = 0.2 L rom the formula on the front matter 1, the maximum suction flow rate Qmax is Qmax = (2 to 3) x Q = (2 to 3) x 0.2 = 1.2 to 1. L/min (NR) ccording to the maximum suction flow rate of the vacuum ejector, a nozzle with a 0. diameter can be used. If the vacuum ejector Z series is used, representative model Z10 can be selected. (ased on the operating conditions, specify the complete part number for the vacuum ejector used.) 3. dsorption Response Time onfirmation onfirm the adsorption response time based on the characteristics of the vacuum ejector selected. (1) The maximum suction flow rate of the vacuum ejector Z10 is L/min. rom the formula on the front matter 1, the average suction flow rate Q1 is as follows: Q1 = (1/2 to 1/3) x jector s max. suction flow rate = (1/2 to 1/3) x = 2. to 1. L/min (2) Next, find the maximum flow rate Q2 of the piping. The conductance is 0.22 from the Selection Graph (3). rom the formula on the front matter 1, the maximum flow rate is as follows: Q2 = x x 11.1 = x 0.22 x 11.1 = 12.2 L/min (3) Since Q2 is smaller than Q1, Q = Q1. Thus, from the formula on the front matter 1, the adsorption response time is as follows: T = (V x 0)/Q = ( x 0)/1. = second = 109 msec It is possible to confirm that the calculation result satisfies the required specification of 300 msec. ront matter 2

66 Selection Data Selection Graph Selection Graph (2) Piping apacity by Tube I.D. Piping capacity V (L) Tube I.D. Tube length L (m) How to read the graph xample: or obtaining the capacity of tube I.D. ø and 1 meter length <Selection Procedure> y extending leftward from the point at which the 1 meter tube length on the horizontal axis intersects the line for a tube I.D. ø, the piping capacity approximately equvalent to 0.02 L can be obtained on the vertical axis. Piping capacity 0.02 L Selection Graph (3) onductance by Tube I.D. 10 Tube I.D. ø9.. quivalent conductance [dm 3 (s bar)] Tube length (m) How to read the graph xample: Tube size ø/ø and 1 meter length <Selection Procedure> y extending leftward from the point at which the 1 meter tube length on the horizontal axis intersects the line for a tube I.D. ø, the equivalent conductance approximately 3. [dm 3 /(s bar)] can be obtained on the vertical axis. quivalent conductance 3. [dm 3 /(s bar)] ront matter 2

67 Selection Glossary of Terms Terms (Max.) suction flow rate Maximum vacuum pressure ir consumption Standard supply pressure xhaust characteristics low-rate characteristics Vacuum pressure switch Suction verification switch (ir) supply valve (Vacuum) release valve low adjustment valve Release pressure Pilot pressure xternal release Vacuum port xhaust port Supply port ack pressure Leakage Response time verage suction flow rate onductive pad Vacuum pressure jector ir suction filter Description Volume of air taken in by the ejector. The maximum value is the volume of air taken in without having anything connected to the vacuum port. The maximum value of the vacuum pressure generated by the ejector The compressed volume of air consumed by the ejector The optimal supply pressure for operating the ejector The relationship between the vacuum pressure and the suction flow rate when the supply pressure to the ejector has been changed. The relationship between the vacuum pressure and the suction flow rate with the standard supply pressure supplied to the ejector. Pressure switch for verifying the adsorption of a workpiece Switch, based on an air pressure bridge, for verifying the adsorption of a workpiece. It is used when the adsorption pad and the nozzle are extremely small. Valve for supplying compressed air to the ejector Valve for supplying positive pressure or air for breaking the vacuum state of the adsorption pad Valve for adjusting the volume of air for breaking the vacuum Pressure for breaking the vacuum Pressure for operating the ejector valve The action of breaking the vacuum using externally supplied air instead of using the ejector unit Port for generating vacuum Port for exhausting air consumed by the ejector, and air taken in from the vacuum port. Port for supplying air to the ejector Pressure inside the exhaust port The entry of air into the vacuum passage, such as from an area between a workpiece and a pad, or between a fitting and a tube. The vacuum pressure decreases when leakage occurs. The time from the application of the rated voltage to the supply valve or release valve, until V port pressure reaches the specified pressure. The suction flow rate by the ejector or pump for calculating the response speed. It is 1 2 to 1 3 of the maximum suction flow rate. low electrical resistance pad for electrostatic prevention measure ny pressure below the atmospheric pressure. When the atmospheric pressure is used as a reference, the pressure is presented by kpa (G), and when the absolute pressure is used as a reference, the pressure is represented by kpa (abs). When referencing a piece of vacuum equipment such as an ejector, the pressure is generally represented by kpa. unit for generating vacuum by discharging the compressed air from a nozzle at a high speed, based on the phenomenon in which the pressure is reduced when the air around the nozzle is sucked. Vacuum filter provided in the vacuum passage for preventing the dust intrusion into the ejector, vacuum pump, or peripheral equipment ront matter 2

68 Selection ountermeasures for Vacuum dsorption System Problems (Troubleshooting) ondition & Description of improvement Initial adsorption problem (During trial operation) ontributing factor dsorption area is small. (Lifting force is lower than the workpiece mass.) Vacuum pressure is low. (Leakage from adsorption surface) (ir permeable workpiece) Vacuum pressure is low. (Leakage from vacuum piping) ountermeasure Reconfirm the relationship between workpiece mass and lifting force. Use a vacuum pad with a large adsorption area. Increase the quantity of vacuum pads. liminate (reduce) leakage from adsorption surface. Reconsider shape of vacuum pad. onfirm the relationship between suction flow rate and arrival pressure of vacuum ejector. Use a vacuum ejector with a high suction flow rate. Increase adsorption area. Repair leakage point. Internal volume of vacuum circuit is large. onfirm the relationship between internal volume of the vacuum circuit and suction flow rate of the vacuum ejector. Reduce internal volume of the vacuum circuit. Use a vacuum ejector with a high suction flow rate. Pressure drop of vacuum piping is large. Reconsider vacuum piping. Use a shorter or larger tube (with appropriate diameter). Inadequate supply pressure of vacuum ejector Measure supply pressure in vacuum generation state. Use standard supply pressure. Reconsider compressed air circuit (line). logging of nozzle or diffuser (Infiltration of foreign objects during piping) Remove foreign objects. Late vacuum achieving time (Shortening of response time) Supply valve (switching valve) is not being activated. Workpiece deforms during adsorption. Internal volume of vacuum circuit is large. Pressure drop of vacuum piping is large. Measure supply voltage at the solenoid valve with a tester. Review electric circuits, wiring and connectors. Use in the rated voltage range. Since a workpiece is thin, it deforms and leakage occurs. Use a pad for adsorption of thin objects. onfirm the relationship between internal volume of the vacuum circuit and suction flow rate of the vacuum ejector. Reduce internal volume of the vacuum circuit. Use a vacuum ejector with a high suction flow rate. Reconsider vacuum piping. Use a shorter or larger tube (with appropriate diameter). ront matter 2 Using the product as close to the highest vacuum power in the specifications. Setting of vacuum pressure switch is too high. Set vacuum pressure to minimum necessary value by optimizing the pad diameter, etc. s the vacuum power of an ejector (venturi) rises, the vacuum flow actually lowers. When an ejector is used at its highest possible vacuum value, the vacuum flow will lower. Due to this, the amount of time needed to achieve adsorption is lengthened. One should consider an increase in the diameter of the ejector nozzle or an increase the size of the vacuum pad utilized in order to lower the required vacuum pressure, maximum the vacuum flow, and speed up the adsorption process. Set to suitable setting pressure.

69 Selection ondition & Description of improvement luctuation in vacuum pressure ontributing factor luctuation in supply pressure Vacuum pressure may fluctuate under certain conditions due to ejector characteristics. ountermeasure Reconsider compressed air circuit (line). (ddition of a tank, etc.) Lower or raise supply pressure a little at a time, and use in a supply pressure range where vacuum pressure does not fluctuate. Occurrence of abnormal noise (intermittent noise) from exhaust of vacuum ejector Intermittent noise may occur under certain conditions due to ejector characteristics. Lower or raise supply pressure a little at a time, and use in a supply pressure range where the intermittent noise does not occur. ir leakage from vacuum port of manifold type vacuum ejector dsorption problem over time (dsorption was normal during trial operation.) xhaust air from the ejector enters the vacuum port of another ejector that is stopped. logging of suction filter logging of sound absorbing material logging of nozzle or diffuser Use a vacuum ejector with a check valve. (Please contact SM for the part no. of an ejector with a check valve.) Replace filters. Improve installation environment. Replace sound absorbing materials. dd a filter to supply (compressed) air circuit. Install an additional suction filter. Remove foreign objects. dd a filter to supply (compressed) air circuit. Install an additional suction filter. Vacuum pad (rubber) deterioration, cracking, etc. Replace vacuum pads. onfirm compatibility of vacuum pad material and workpiece. Workpiece is not released. Inadequate release flow rate Viscosity increase due to vacuum pad (rubber) wear Open release flow adjustment needle. Replace vacuum pads. onfirm compatibility of vacuum pad material and workpiece. Vacuum pressure is too high. Set vacuum pressure to minimum necessary value. ffects due to static electricity Use a conductive pad. ront matter 2

70 Selection Non-conformance xamples No problem occurred during the test, but adsorption becomes unstable after starting operation. [Possible causes] Setting of the vacuum switch is not appropriate. Supply pressure is unstable. Vacuum pressure does not reach the set pressure. There is leakage between the workpiece and the vacuum pad. [Remedy] 1) Set the pressure for the vacuum equipment (supply pressure, if using an ejector) to the necessary vacuum pressure during the adsorption of the work pieces. nd set the set pressure for the vacuum switch to the necessary vacuum pressure for adsorption. 2) It is presumed that there was leakage during the test, but it was not serious enough to prevent adsorption. Revise the vacuum ejector and the shape, diameter, and material of the vacuum pad. Revise the vacuum pad. dsorption becomes unstable after replacing the pad. [Possible causes] Initial setting conditions (vacuum pressure, vacuum switch setting, height of the pad) have changed. Settings have changed because the pad was worn out or had permanent setting due to the operating environment. When the pad was replaced, leakage was generated from the screw connection part, or the engagement between the pad and the adapter. [Remedy] 1) Revise the operating conditions including vacuum pressure, the set pressure of the vacuum switch, and the height of the pad. 2) Revise the engagement. Identical pads are used to adsorb identical work pieces, but some of the pads cannot adsorb the work pieces. [Possible causes] There is leakage between the workpiece and the vacuum pad. The supply circuit for the cylinder, the solenoid valve and the ejector is in the same pneumatic circuit system. The supply pressure decreases when they are used simultaneously. (Vacuum pressure does not increase) There is leakage from the screw connection part or the engagement between the pad and the adapter. [Remedy] 1) Revise the pad diameter, shape, material, vacuum ejector (suction flow rate), etc. 2) Revise the pneumatic circuit. 3) Revise the engagement. In principle, vacuum pads are molded using a die. Therefore, there is minimal variance in dimensions between products. The workpiece cannot be separated from the pad. The workpiece sticks to the rubber part of the bellows. [Possible causes] The adhesiveness of the rubber material is high. dhesiveness increases due to the operating environment (wearing of the pad, etc.). Vacuum pressure is higher than necessary, so excessive force (adhesiveness of the rubber + vacuum pressure) is applied to the pad (rubber part). [Remedy] 1) Revise the shape, material, and quantity of vacuum pads. 2) Reduce the vacuum pressure. If inadequate lifting force causes a problem in transferring the work pieces due to the reduction of vacuum pressure, increase the number of pads, or select pads with larger diameter. ront matter 29

71 Selection When mounted with the nut, sometimes the buffer operation is not smooth, or the buffer does not slide. [Possible causes] The tightening torque of the nut for mounting the buffer is too high. Particles stuck to the sliding surface, or it is scratched. Lateral load applied to the piston rod, causing eccentric wearing. [Remedy] Tighten the nut to the recommended tightening torque. The nut may become loose depending on the operating conditions and environment. e sure to perform regular maintenance. General Purpose Product specifications Nut tightening torque Product part no. Mounting thread size ø2 to ø1 200 to 010 ø10 to ø32 ø20 to ø0 ZP (02 to 0) U, ZP (10 to 1) UT, T ZP (200 to 010) U ZP (10 to 32) U,,, D ZP (10 to 1) ZP (0, 0) U,,, D ZP (20 to 0) M x 1 M10 x 1 M1 x 1 1. to 2.0 N m 2. to 3. N m. to. N m Heavy-duty Pad Product specifications Product part no. Mounting thread size uffer body material ø0, ø0 ø3, ø0 ø, ø12 ZP (0/0) H ZP (0/0) H ZP (3/0) H ZP (3/0) H ZP (/12) H ZP (/12) H J J J J J J J J J M1 x 1. M1 x 1. M22 x 1. luminum alloy rass Steel luminum alloy rass Steel luminum alloy rass Steel Heavy-duty all Joint Pad Product specifications Product part no. Mounting thread size uffer body material ø0, ø0 ø3, ø0 ø, ø12 ZP2- (0/0) H J rass M1 x 1. ZP2- (0/0) H J Steel ZP2- (3/0) H J rass M22 x 1. ZP2- (3/0) H J Steel ZP2- (/12) H J rass M22 x 1. ZP2- (/12) H J Steel Nut tightening torque 9. to 10. N m 2 to 32 N m to 2 N m 9. to 10. N m 2 to 32 N m to 2 N m 9. to 10. N m to 0 N m to 0 N m Nut tightening torque 2 to 32 N m to 2 N m to 0 N m to 0 N m to 0 N m to 0 N m Time of Replacement of Vacuum Pad The vacuum pad is disposable. Replace it on a regular basis. ontinued use of the vacuum pad will cause wear and tear on the adsorption surface, and the exterior dimensions will gradually get smaller and smaller. s the pad diameter gets smaller, lifting force will decrease, though adsorption is possible. It is extremely difficult to provide advice on the frequency of vacuum pad exchange. This is because there are numerous factors at work, including surface roughness, operationg environment (temperature, humidity, ozone, solvents, etc.), and operating conditions (vacuum pressure, workpiece weight, pressing force of the vacuum pad on the workpiece, presence or absence of a buffer, etc.). Thus, the customer should decide when the vacuum pad should be exchanged, based on its condition at time of initial use. The bolt may become loose depending on the operating conditions and environment. e sure to perform regular maintenance. Recommended Tightening Torque for Replacement of Heavy-duty Pad Product specifications olt tightening Product part no. olt torque ø0, ø0 ø3, ø0 ø, ø12 ZP (0/0) H ZP (0/0) H ZP (3/0) H ZP (3/0) H ZP (/12) H ZP (/12) H M3 x M x M x to 0.9 N m 0.9 to 1.1 N m 2.3 to 2. N m ssemble parts with recommended tightening torque. ront matter 30

72 2 ompact Pad ø3, ø, ø, ø, ø, ø /Type U: lat : lat with rib UT: Thin flat : ellows types of ø3 to ø are added. pplicable for the ZP series adapter Pad unit ZP2 last type ø3 ø ø ø ø ø ø last type: Work pieces can be removed easily. How to Order 03 UN Pad material Material N NR S Silicone rubber U Urethane rubber KM GN onductive NR GS onductive silicone rubber : Pad Unit Pad type 03 0 Pad type () U (lat) (lat with rib) UT (Thin flat) (ellows) ZP2-03U ø ZP2-0U ø ZP2-0UT ZP2-0UT ZP2-0 ZP2-0 ø ø ø ø ø1. ø3 ø3. 0. ø1. ø ø. 0. ø1.2 ø 0.3 ø0. ø 0.3 ø ø ø dapter Mounting If an adapter will be made by the customer, design the adapter with the dimensions shown below. ø ø2. ø3.3 ø ø ø9 ø2. ø. ø ø9 ø10 ZP2-0 ZP2-0 ZP2-0 R ø2. ø 0. ø2. ø 0. ø2. ø R 2 ø ø ø9 R ø2. ø3. ø.9 Note) R part has to be smooth with no corners. Refer to page for adapter applicable to the ZP series. 1

73 Short-type Pad ø2, ø3., ø, ø, ø, ø, ø10, ø1 /Type MU: lat Space-saving in the height direction : Pad Unit Pad unit ZP2 last type 02 ø2 03 ø3. 0 ø 0 ø 0 ø 0 ø 10 ø10 1 ø1 last type: Work pieces can be removed easily. How to Order 02 MU N Pad type Type MU lat Pad material Material N NR S Silicone rubber U Urethane rubber KM GN onductive NR GS onductive silicone rubber ZP2-02MU ZP2-03MU ZP2-0MU ø ø ø ø3 ø3 ø3 ø2 ø2 ø2 ZP2-0MU ø ø3 ø ø1 0. ø1 0. ø1. 0. ø1. 0. ø2 ø3. ø ø ø2. ø3. ø. ø. ZP2-0MU ø. ø ø ZP2-0MU ø ø ø dapter Mounting If an adapter will be made by the customer, design the adapter with the dimensions shown below. pplicable pad 02MU/03MU/0MU/0MU. ø2 ø ø ø2 ø ø ø1.2 ø2 ø3 R R ZP2-10MU ø ø ø ZP2-1MU ø9 ø ø pplicable pad 0MU/0MU/10MU/1MU ø ø ø2 ø ø R R ø10 ø10. ø1 ø1. Note) R part has to be smooth with no corners. Refer to page 9 for adapter applicable to the ZP2 series. 2

74 Series ZP2 With adapter ZP2 T 02 MU N 3 Vacuum inlet direction Direction T Vertical last type ø2 ø3. ø ø ø ø ø10 ø1 last type: Work pieces can be removed easily. : With dapter Pad type Type MU lat How to Order Mounting () Thread size (M3 x 0. Male thread) H (M x 0. Male thread) (M x 0. emale thread) Pad material Material N NR S Silicone rubber U Urethane rubber KM GN onductive NR GS onductive silicone rubber 0 Replacement Part No. ZP2-T02MU-3 ZP2-T03MU-3 ZP2-T0MU-3 ZP2-T0MU-3 ZP2-T0MU-H ZP2-T0MU-H ZP2-T10MU-H ZP2-T1MU-H ZP2-T0MU- ZP2-T0MU- ZP2-T10MU- ZP2-T1MU- 0 0 Pad unit part no. ZP2-02MU ZP2-03MU ZP2-0MU ZP2-0MU ZP2-0MU ZP2-0MU ZP2-10MU ZP2-1MU ZP2-0MU ZP2-0MU ZP2-10MU ZP2-1MU 10 Note) in the table indicates the pad material. 1 dapter part no. ZP2-M01P ZP2-M02P ZP2-M0 ZP2-T02MU-3 ZP2-T03MU-3 ZP2-T0MU-3 Width across flat M3 x 0. Width across flat M3 x 0. Width across flat M3 x 0. (9) (9) (9) ø1 0. ø1 0. ø ø2 ø3. ø ø2. ø3. ø. Width across flat (9) ZP2-T0MU-3 ZP2-T0MU-H ZP2-T0MU-H M3 x (11.) 1.. M x 0. ø1. ø Width across flat 1. (12) M x 0. ø1. ø Width across flat 1. ø ø 0. ø 1.2 ø ø. ø. ø. 3

75 Short-type Pad Series ZP2 : With dapter ZP2-T10MU-H ZP2-T1MU-H M x 0. ø1. M x 0. ø1. (12) ø Width across flat 1. (13) ø Width across flat 1. 2 ø10 ø ø1 ø1. ZP2-T0MU- ZP2-T0MU- Width across flat M x 0. Width across flat M x 0. Width across flat M x 0. 2 (1).. (1.) (1).. ø2 0. ø2 1.2 ø ø ø. ø. ZP2-T10MU- ZP2-T1MU- Width across flat M x 0. (1). ø2 ø10 ø ø2 ø1 ø1.

76 2. Short-type Pad ø2, ø, ø, ø, ø1 /Type U: lat Space-saving in the height direction : Pad Unit ZP2-02U ø ø2. Pad unit ZP2 last type 02 ø2 0 ø 0 ø 0 1 ø ø1 last type: Work pieces can be removed easily. How to Order 02 U N Pad type Type U lat Pad material Material N NR S Silicone rubber U Urethane rubber KM GN onductive NR GS onductive silicone rubber ZP2-0U ø ø2. ø1. 0. ø ø. ø ø2. ø ø ø1. 0. ø1. 0. ø ø ø. ø9 ø ø ø ø2 ø2. ZP2-0U ZP2-0U ZP2-1U dapter Mounting If an adapter will be made by the customer, design the adapter with the dimensions shown below. R R ø2 ø1 ø1. ø1. ø3 ø. Note) R part has to be smooth with no corners. Refer to page 0 for adapter applicable to the ZP2 series.

77 Short-type Pad Series ZP2 With adapter ZP2 T 02 U N Vacuum inlet direction Direction T Vertical last type ø2 ø ø ø ø1 last type: Work pieces can be removed easily. : With dapter Pad type Type U lat How to Order Mounting H Pad material Thread size M x 0. M x 0. Material N NR S Silicone rubber U Urethane rubber KM GN onductive NR GS onductive silicone rubber dapter type Hexagon O.D. Hexagon socket head Replacement Part No. ZP2-T02U- ZP2-T0U- ZP2-T0U- ZP2-T0U- ZP2-T1U- ZP2-T02U-H ZP2-T0U-H ZP2-T0U-H ZP2-T0U-H ZP2-T1U-H Pad unit part no. ZP2-02U ZP2-0U ZP2-0U ZP2-0U ZP2-1U ZP2-02U ZP2-0U ZP2-0U ZP2-0U ZP2-1U Note) in the table indicates the pad material. dapter part no. ZP2-Z01P ZP2-Z02P Width across flat ZP2-T02U- M x 0. Width across flat ZP2-T0U- M x 0. (10) (10) ø1.2 ø2 ø2. 0. ø1. ø ø. 0. Width across flat ZP2-T0U- M x 0. Width across flat ZP2-T0U- M x 0. (10) 2. (10) ø1. ø ø. 0. ø1. ø ø9 0. Width across flat ZP2-T1U- M x 0. (11) ø1. ø1 ø1. 1.

78 Series ZP2 : With dapter ZP2-T02U-H M x 0. ZP2-T0U-H M x 0. (9) ø Width across flat 1. (9) Width across flat 1. M x 0. M x 0. (9) Width across flat 1. (9) Width across flat 1. ø1. ø ø. 0. ø1. ø ø9 0. ø1. M x 0. Width across flat ø ø1.2 ø2 ø2. 0. ø1. ø ø. 0. ZP2-T0U-H ZP2-T0U-H ø ø ZP2-T1U-H (10) 1. ø ø1 1. ø1.

79 Short-type Pad ø2, ø3, ø, ø, ø /Type U: lat Space-saving in the height direction Pad unit ZP2 How to Order 02 U N last type ø2 ø3 ø ø ø last type: Work pieces can be removed easily. Pad type Type U lat Pad material Material N NR S Silicone rubber U Urethane rubber KM GN onductive NR GS onductive silicone rubber : Pad Unit ZP2-02U ZP2-03U ZP2-0U ø ø2 ø ø2 ø ø2 ø ø ø. ø ø2. ø ø ø ø ø2 ø3 ø2. ø3. ZP2-0U ZP2-0U ø2.2 ø ø.3 ø2.2 ø ø.3

80 Nozzle Pad ø0., ø1.1 /Type N: Nozzle or adsorption of small components (such as I chips) : Pad Unit Pad unit ZP2 How to Order 0 N N 0 ø0. 11 ø1.1 Pad type Type N Nozzle Pad material Material N NR S Silicone rubber U Urethane rubber KM GN onductive NR GS onductive silicone rubber ZP2-0N ø ø2 ZP2-11N ø ø2 dapter Mounting If an adapter will be made by the customer, design the adapter with the dimensions shown below R ø0. ø1.1 ø1. ø2 ø1.1 ø2.2 Note) R part has to be smooth with no corners. Refer to page 0 for adapter applicable to the ZP2 series. R How to Order With adapter ZP2 T 0 N N Vacuum entry direction Direction T Vertical Pad type 0 11 ø0. ø1.1 N Type Nozzle : With dapter Pad material Material N NR S Silicone rubber U Urethane rubber KM GN onductive NR GS onductive silicone rubber Mounting Thread size M x 0. Replacement Part No. ZP2-T0N- ZP2-T11N- Pad unit part no. ZP2-0N ZP2-11N dapter part no. ZP2-Z21P Note) in the table indicates the pad material. Width across flat ZP2-T0N- M x 0. Width across flat ZP2-T11N- M x 0. (1.) 3 3. (1.) ø0. ø1. ø1.1 ø2

81 Thin lat Pad ø, ø, ø11, ø1, ø1, ø20 /Type UT: Thin flat (Skirt) or adsorption of soft work pieces such as thin sheets or vinyl. Wrinkling or deformation during adsorption is reduced. pplicable for the ZP series adapter : Pad Unit Pad unit 0 ø 0 ø 11 ø11 1 ø1 1 ø1 20 ø20 ZP2 UT How to Order 11 UT N Pad type Type Thin flat (Skirt) Pad material Material N NR S Silicone rubber U Urethane rubber KM GN onductive NR GS onductive silicone rubber ZP2-0UT ø ZP2-0UT ø ZP2-11UT ø ZP2-1UT ø 12 ø2. ø1. ø1. 1. ø ø1.2 ø 0.3 ø0. ø 0.3 ø2. ø11. ø ZP2-1UT ø2. ø1 ø19 1. dapter Mounting If an adapter will be made by the customer, design the adapter with the dimensions shown below. ø.9 ZP2-20UT ø R R 2 12 R ø2. ø3. ø.9 1. Note) R part has to be smooth with no corners. Refer to page for adapter applicable to the ZP series. ø2. ø20 ø21 10

82 lat Pad ø10, ø1, ø20, ø2, ø30 /Type MT: Thin flat (with groove) dsorption surface with groove (0.3) Pad unit or adsorption of thin sheets or film Deformation of the flat surface during adsorption is reduced. Note 1) Not suitable for transferring work pieces which apply a load. Note 2) Wrinkling may be generated depending on the sheet thickness. onfirm the thickness before use. : Pad Unit ZP2 last type 10 ø10 1 ø1 20 ø20 2 ø2 30 ø30 last type: Work pieces can be removed easily. How to Order 10 MT N Pad material Material N NR S Silicone rubber KM GN onductive NR GS onductive silicone rubber Pad type Type MT Thin flat (With groove) ZP2-10MT ZP2-1MT ZP2-20MT ZP2-2MT ø. ø ø ø. ø ø ø13. ø10 ø ø1 ø10 ø ø1. ø10 ø11 (0.3) ø1. ø1 ø1 (0.3) ø1. ø20 ø21 (0.3) ø1. ø2 ø2 (0.3) ZP2-30MT ø1 ø10 ø 2 dapter Mounting. ø1. ø30 ø31 2 (0.3) pplicable pad 10MT/1MT If an adapter will be made by the customer, design the adapter with the dimensions shown below. pplicable pad 20MT/2MT/30MT R 2 2 R R R ø ø ø ø10 Note) R part has to be smooth with no corners. Refer to page 9 for adapter applicable to the ZP2 series. 11

83 lat Pad Series ZP2 With adapter ø10 ø1 ø20 ø2 ø30 ZP2-T10MT-H ZP2 T 10 MT N H last type last type: Work pieces can be removed easily. M x 0. (10.). 1 Vacuum inlet direction Direction T Vertical Width across flat 1. Pad type Type MT Thin flat (With groove) : With dapter ø (10.) ZP2-T1MT-H M x ø Width across flat 1. How to Order Pad material Mounting () Thread size () H (M x 0. Male thread) (M x 0. emale thread) Material N NR S Silicone rubber KM GN onductive NR GS onductive silicone rubber 10 ZP2-T20MT-H M x 0. (10.). 1 ø Replacement Part No. ZP2-T10MT-H ZP2-T1MT-H ZP2-T20MT-H ZP2-T2MT-H ZP2-T30MT-H ZP2-T10MT- ZP2-T1MT Pad unit part no. ZP2-10MT ZP2-1MT ZP2-20MT ZP2-2MT ZP2-30MT ZP2-10MT ZP2-1MT Note) in the table indicates the pad material. Width across flat 2. (10.). 1 ZP2-T2MT-H M x 0. ø1 dapter part no. ZP2-M02 ZP2-M03 ZP2-M0 Width across flat 2. ø1. ø10 ø11 (0.3) ø1. ø1 ø1 (0.3) ø1. ø20 ø21 (0.3) ø1. ø2 ø2 (0.3) (10.). 1 ZP2-T30MT-H M x 0. ø1 Width across flat Width across flat 2. ZP2-T10MT- (13.). M x 0.. Width across flat ZP2-T1MT- (13.). M x 0.. ø1. ø30 ø31 (0.3) ø1. ø10 ø11 (0.3) ø1. ø1 ø1 (0.3) 12

84 ellows Pad ø, ø9, ø10, ø1, ø1, ø1, ø2, ø30 /Type J: ellows (Multistage type) or use where there is no space for the buffer (spring type) Work pieces with inclined adsorption surface pplicable for the ZP series adapter : Pad Unit Pad unit ZP2 last type ø ø9 ø10 ø1 ø1 ø1 2 ø2 30 ø30 last type: Work pieces can be removed easily. How to Order 0 JN 19 Pad material N S U GN GS Material NR Silicone rubber Urethane rubber KM onductive NR onductive silicone rubber Pad type Type J ellows (Multistage type) With/Without lock ring Nill With lock ring 19 Without lock ring Note) Note) ø, ø10, ø1 are not available. 1. ZP2-0J ø Lock ring 1 ZP2-09J ø13 1. ZP2-10J ø dapter Mounting If an adapter will be made by the customer, design the adapter with the dimensions shown below. pplicable pad 0J/10J/1J ø.9. ø13 ø ø2. ø. ø10 ø11 ø12 ø Lock ring ø2. ø ø ø ø3 ø9 ø10 ZP2-1J ZP2-1J ZP2-1J Lock ring 2 0. R R R ø2. ø3. ø.9 pplicable pad 09J/1J/1J 2 R 30 R ø1 1 1 R R Lock ring ø3 ø1 ø1 ZP2-2J ø1 Lock ring ø2. ø11. ø1 ø1 ø1 ZP2-30J ø1 ø ø.2 ø1 ø1. R R R ø2. ø. ø ø. pplicable pad 2J/30J 30 9 R R ø2 ø ø10.2 ø2 ø ø32 ø ø13. ø30 ø R ø3. ø ø ø.9 Note) R part has to be smooth with no corners. Refer to page for adapter applicable to the ZP series.

85 ellows Pad ø, ø, ø, ø10, ø1, ø20 /Type M: ellows or use where there is no space for the buffer (spring type) Work pieces with inclined adsorption surface : Pad Unit Pad unit ZP2 last type 0 ø 0 ø 0 ø 10 ø10 1 ø1 20 ø20 How to Order 0 M N Pad type Type M ellows last type: Work pieces can be removed easily. Pad material Material N NR S Silicone rubber U Urethane rubber KM GN onductive NR GS onductive silicone rubber ZP2-0M ø. ø3 ø2 ø1. 1. ZP2-0M ø ø ø 2 2 ZP2-0M ø ø ø ø10. ø. ø1. ø.1 ø. ø11 ø. ø ø1. 9 ø2. ø3.3 ø ø ø. ø11 ø. ø ø1 ø9. ø2. ø. ø ø9 ZP2-10M ZP2-1M ZP2-20M ø1 ø10. ø.. 3. ø. ø10 ø11 ø9. ø1 ø1 ø12 ø20 ø If an adapter will be made by the customer, design the adapter with the dimensions shown below. pplicable pad pplicable pad pplicable pad pplicable pad 0M 0M/0M 10M/1M 20M M x 0. M x 0. ø2. ø2. ø1.2 ø2 ø3 R R 2 ø1. ø ø Note) R part has to be smooth with no corners. Refer to pages 9 and 0 for adapter applicable to the ZP2 series. dapter Mounting R R 2 ø. Width across flat ø10. Width across flat 3 1

86 Series ZP2 Width across flat (11) With adapter ø ZP2 M3 x (1) T Vacuum inlet direction Direction T Vertical last type ø ø ø ø10 ø1 ø20 last type: Work pieces can be removed easily. : With dapter 9 0 M 3. (1) 9 3. ø Width across flat 1. ø. ø9. 1. ø1. N M x 0. How to Order 3 Mounting () Thread size () 3 (M3 x 0. Male thread) H (M x 0. Male thread) (M x 0. emale thread) Pad material Material N NR S Silicone rubber U Urethane rubber KM GN onductive NR GS onductive silicone rubber Pad type Type M ellows ZP2-T0M-3 ZP2-T0M-H ZP2-T0M-H ZP2-T10M-H 1. ø1. 0 M x 0. ø 0 Width across flat (13) Replacement Part No. ZP2-T0M-3 ZP2-T0M-H ZP2-T0M-H ZP2-T10M-H ZP2-T1M-H ZP2-T20M-H ZP2-T0M- ZP2-T0M- ø2. ø Pad unit part no. ZP2-0M ZP2-0M ZP2-0M ZP2-10M ZP2-1M ZP2-20M ZP2-0M ZP2-0M Note) in the table indicates the pad material. ø11 dapter part no. ZP2-M01P ZP2-M02P ZP2-M0 ZP2-M0 ZP2-M0 M x 0. Width across flat 3 3 ø1.2 ø3.3 ø. ø10 ø.1 ø. ø ø ø ø9 ø11 ZP2-T1M-H ZP2-T20M-H ZP2-T0M- ZP2-T0M- ø1 3. (1.) 11 ø1. ø2. ø11 M x 0. Width across flat 3. (1) 13 ø1 ø2. M x 0. Width across flat 3. Width across flat (1) 9 ø. M x 0.. Width across flat (1) 9 ø9. M x 0.. ø1 ø20 ø2 ø2 ø1 ø21 ø3.3 ø. ø ø ø ø9 1

87 ellows Pad ø2, ø, ø, ø, ø0, ø /Type ZJ: ellows or use where there is no space for the buffer (spring type) Work pieces with inclined adsorption surface Pad unit ZP2 02 ø2 0 ø 0 ø 0 ø 0 ø0 ø How to Order 02 ZJ N Pad material Material N NR S Silicone rubber U Urethane rubber KM GN onductive NR GS onductive silicone rubber Pad type Type ZJ ellows : Pad Unit ZP2-02ZJ ZP2-0ZJ ZP2-0ZJ ZP2-0ZJ ø ø ø2.2 ø. ø.3 ø.2 ø... ø ø1. ø2. ø3.3 ø ø ø ø.3 ø. ø. ø. ø ø2 ø30 ø21 ø ø3. ø ø1 ø2 ø2. ø3. ZP2-0ZJ ZP2-ZJ ø29 ø0 ø ø3 ø ø0 1

88 a a () () Oval Pad Pad size 3. x to x 30 /Type W: Oval or work pieces with limitations on the adsorption surface : Pad Unit Pad unit Size 3. x x 10 x 10 x 10 x 20 x 20 ZP2 Pad size Size 020 x x x x x x 30 How to Order 30 WN Pad material Material N NR S Silicone rubber U Urethane rubber KM GN onductive NR GS onductive silicone rubber Pad type Type W Oval ZP2- W ZP2-20 W ZP2-30 W pplicable pad 020W/020W/020W/020W - pplicable pad 030W/030W/030W/030W - ø. ø () a b ZP2-30W ZP2-010W ZP2-010W ZP2-010W a 3.. b x ZP2-020W ZP2-020W ZP2-020W ZP2-020W a 9 2 x 1. 2 x ZP2-030W ZP2-030W ZP2-030W ZP2-030W a 9 2 x 1. 2 x pplicable pad 30W/010W/010W/010W dapter Mounting If an adapter will be made by the customer, design the adapter with the dimensions shown below. ø ø3 ø ø3 ø ø3 ø20. Note) R part has to be smooth with no corners. Refer to page 9 for adapter applicable to the ZP2 series. 1

89 Oval Pad: With dapter (Vacuum Inlet Direction: Vertical) Series ZP2 How to Order With adapter Vacuum inlet direction Direction T Vertical ZP2 T 30 WN Size 3. x x 10 x 10 x 10 x 20 x Pad size Size x 20 x 20 x 30 x 30 x 30 x 30 : With dapter Pad material Vacuum inlet Thread size M x 0. Material N NR S Silicone rubber U Urethane rubber KM GN onductive NR GS onductive silicone rubber Pad type Type W Oval Replacement Part No. Pad unit part no. dapter part no. ZP2-T30W- ZP2-30W ZP2-T010W- ZP2-010W ZP2-001 ZP2-T010W- ZP2-010W ZP2-T010W- ZP2-010W ZP2-T020W- ZP2-020W ZP2-T020W- ZP2-020W ZP2-002 ZP2-T020W- ZP2-020W ZP2-T020W- ZP2-020W ZP2-T030W- ZP2-030W ZP2-T030W- ZP2-030W ZP2-003 ZP2-T030W- ZP2-030W ZP2-T030W- ZP2-030W Note) in the table indicates the pad material. ZP2-T W- ZP2-T 20 W- M x ø M x ø11 (1) ZP2-T30W- ZP2-T010W- ZP2-T010W- ZP2-T010W- a a 3.. b b x (1) a ZP2-T020W- ZP2-T020W- ZP2-T020W- ZP2-T020W- a x 1. 2 x ZP2-T 30 W- M x ø19 (1) a ZP2-T030W- ZP2-T030W- ZP2-T030W- ZP2-T030W- a 9 2 x 1. 2 x

90 Series ZP2 With buffer Vacuum inlet direction Size 3. x x 10 x 10 x 10 x 20 x 20 Width across flat ZP2 T 30 WNK10 T Pad size Size x 20 x 20 x 30 x 30 x 30 x 30 Pad type W Type Oval M x 0. Direction Vertical uffer Specifications Stroke (mm) Spring reactive t 0 stroke (N) force t buffer stroke (N) Tightening torque : With uffer ZP2-T WK - Pad material () Material N NR S Silicone rubber U Urethane rubber KM GN onductive NR GS onductive silicone rubber uffer specification Specification K Non-rotating 10, 20, 30, 0, N m ±% How to Order uffer stroke ( ) Stroke 10 mm 20 mm 30 mm 0 mm 0 mm Width across flat Vacuum inlet () 0 0 Replacement Part No. Pad unit part no. ZP2-T30WK - ZP2-30W ZP2-T010WK - ZP2-010W ZP2-T010WK - ZP2-010W ZP2-T010WK - ZP2-010W ZP2-T020WK - ZP2-020W ZP2-T020WK - ZP2-020W ZP2-T020WK - ZP2-020W ZP2-T020WK - ZP2-020W ZP2-T030WK - ZP2-030W ZP2-T030WK - ZP2-030W ZP2-T030WK - ZP2-030W ZP2-T030WK - ZP2-030W Note 1) in the table indicates the pad material. Note 2) in the table indicates the buffer stroke. M x 0. pplicable tube O.D. M x 0. ø one-touch fitting ø one-touch fitting dapter part no. ZP2-001 ZP2-002 ZP2-003 ZP2-T 20 WK - uffer assembly part no. ZP2K uffer stroke Stroke mm mm mm 0 0 mm 0 0 mm - Vacuum inlet pplicable tube O.D. M x 0. ø onetouch fitting 0 ø onetouch 0 fitting Note 3) in the table indicates the vacuum inlet. () D Width across flat 1 M x 0. Width across flat M x 0. Width across flat 1 M10 x 1 M x 0. M10 x 1 () D 13 3 Width across flat 1 M x 0. 3 M10 x 1 a b ZP2-T30WK - ZP2-T010WK - ZP2-T010WK - ZP2-T010WK - a 3.. b 2 x a ZP2-T020WK - ZP2-T020WK - ZP2-T020WK - ZP2-T020WK - a 9 2 x 1. 2 x ZP2-T 30 WK - () D common for all three drawings (per buffer stroke) Stroke ( ) D a ZP2-T030WK - ZP2-T030WK - ZP2-T030WK - ZP2-T030WK - a 9 2 x 1. 2 x

91 Oval Pad: With uffer (Vacuum Inlet Direction: Vertical) Series ZP2 : With uffer ZP2-T WK ZP2-T 20 WK - 0 Width across flat J øh Width across flat J øh (G) Width across flat M x 0. (G) Width across flat M x 0. () 13 Width across flat M10 x 1 () 13 Width across flat M10 x 1 D M x 0. D M x 0. Width across flat J Width across flat Width across flat 1 øh M x 0. M10 x 1 M x 0. a b a ZP2-T30WK - ZP2-T010WK - ZP2-T010WK - ZP2-T010WK a 3.. b x ZP2-T020WK - ZP2-T020WK - ZP2-T020WK - ZP2-T020WK a 9 2 x 1. 2 x ZP2-T 30 WK - 0 (G) () D a ZP2-T030WK - ZP2-T030WK - ZP2-T030WK - ZP2-T030WK a x 1. 2 x common for all three drawings (per buffer stroke) H: ø H: ø Stroke ( ) D G 13.9 J G 1. J 10 20

92 Series ZP2 Male thread mounting Without buffer Vacuum inlet direction Direction R Lateral Width across flat Width across flat Q Width across flat Width across flat 10 How to Order ZP2 R 30 WN 0 Pad size Size 3. x x 10 x 10 x 10 x 20 x 20 x 20 x 20 x 30 x 30 x 30 x 30 W : Without uffer 0 0 Pad type Type Oval Pad material () Replacement Part No. ZP2-R30W-- ZP2-R010W-- ZP2-R010W-- ZP2-R010W-- ZP2-R020W-- ZP2-R020W-- ZP2-R020W-- ZP2-R020W-- ZP2-R030W-- ZP2-R030W-- ZP2-R030W-- ZP2-R030W-- Material N NR S Silicone rubber U Urethane rubber KM GN onductive NR GS onductive silicone rubber ZP2-R30W-- ZP2-R010W-- ZP2-R010W-- ZP2-R010W-- ZP2-R020W-- ZP2-R020W-- ZP2-R020W-- ZP2-R020W-- ZP2-R030W-- ZP2-R030W-- ZP2-R030W-- ZP2-R030W-- Note 1) in the table indicates the pad material. Note 2) in the table indicates the vacuum inlet. Q Vacuum inlet () 0 0 Mounting Thread size M x 0. (Male thread) M x 0. (emale thread) pplicable tube O.D. ø ø Pad unit part no. ZP2-30W ZP2-010W ZP2-010W ZP2-010W ZP2-020W ZP2-020W ZP2-020W ZP2-020W ZP2-030W ZP2-030W ZP2-030W ZP2-030W emale thread mounting Width across flat Width across flat 10 dapter part no. ZP2-001 ZP2-002 ZP2-003 Type R adapter part no. ZPRS-- ZPRS-- Vacuum inlet pplicable tube O.D. 0 ø 0 ø 0 0 ZP2-R W- - ZP2-R 20 W- - ZP2-R 30 W- - 0 Q 0 21 M x 0. P 21 M x 0. P 21 M x 0. P M x øs (0) M x R 31 øs (0) R 1.9 M x øs (0) R a b a a ZP2-R30W-- ZP2-R010W-- ZP2-R010W-- ZP2-R010W-- a 3.. b x ZP2-R020W-- ZP2-R020W-- ZP2-R020W-- ZP2-R020W-- a 9 2 x 1. 2 x ZP2-R030W-- ZP2-R030W-- ZP2-R030W-- ZP2-R030W-- a. 9 2 x x common for all three drawings (per applicable tube) pplicable tube O.D. () ø ø P Q R S

93 Oval Pad: Without uffer (Vacuum Inlet Direction: Lateral) Series ZP2 : Without uffer 0 ZP2-R W- 0-0 ZP2-R 20 W- 0 - Width across flat 10 Q M x 0. P Width across flat 10 Q M x 0. P (39) øs R M x 0. (39) R øs M x 0. a b a ZP2-R30W-- ZP2-R010W-- ZP2-R010W-- ZP2-R010W-- a 3.. b x ZP2-R020W-- ZP2-R020W-- ZP2-R020W-- ZP2-R020W-- a 9 2 x 1. 2 x ZP2-R 30 W- 0 - Width across flat 10 Q M x 0. P (39) R øs M x 0. a ZP2-R030W-- ZP2-R030W-- ZP2-R030W-- ZP2-R030W-- a 9 2 x 1. 2 x common for all three drawings (per applicable tube) pplicable tube O.D. () ø ø P Q R S

94 Series ZP2 With buffer Vacuum inlet direction Size 3. x x 10 x 10 x 10 x 20 x 20 How to Order ZP2 R 30 WNK10 0 R Pad size Direction Lateral Size x 20 x 20 x 30 x 30 x 30 x 30 Pad material () Pad type W Material N NR S Silicone rubber U Urethane rubber KM GN onductive NR GS onductive silicone rubber Type Oval uffer Specifications (Non-rotating) uffer specification Specification K Non-rotating Replacement Part No. Vacuum inlet () pplicable tube O.D. 0 ø 0 ø uffer stroke ( ) Stroke 10 mm 20 mm 30 mm 0 mm 0 mm Pad unit part no. dapter part no. ZP2-R30WK - ZP2-30W ZP2-R010WK - ZP2-010W ZP2-001 ZP2-R010WK - ZP2-010W ZP2-R010WK - ZP2-010W ZP2-R020WK - ZP2-020W ZP2-R020WK - ZP2-020W ZP2-002 ZP2-R020WK - ZP2-020W ZP2-R020WK - ZP2-020W ZP2-R030WK - ZP2-030W ZP2-R030WK - ZP2-030W ZP2-003 ZP2-R030WK - ZP2-030W ZP2-R030WK - ZP2-030W Note 1) in the table indicates the pad material. Note 2) in the table indicates the buffer stroke. Type R adapter part no. ZPRS-- Vacuum inlet pplicable tube O.D. 0 ø 0 ø uffer assembly part no. ZP2K uffer stroke Stroke mm mm mm 0 0 mm 0 0 mm Note 3) in the table indicates the vacuum inlet. Stroke (mm) Spring reactive t 0 stroke (N) force t buffer stroke (N) Tightening torque 10, 20, 30, 0, N m ±% : With uffer () D ZP2-R WK - ZP2-R 20 WK - ZP2-R 30 WK - 0 Width across flat Width across flat Width across flat M10 x 1 Q øs R M x 0. P () D Width across flat Width across flat Width across flat Q M10 x 1 R øs P M x 0. () D Width across flat 1 Width across flat Width across flat M10 x 1 Q R øs P M x 0. a ZP2-R30WK - ZP2-R010WK - ZP2-R010WK - ZP2-R010WK - 23 b a 3.. b a common for all three drawings (per stroke) (per applicable tube) Stroke ( ) x D ZP2-R020WK - ZP2-R020WK - ZP2-R020WK - ZP2-R020WK Stroke ( ) a 9 D x 1. 2 x a pplicable tube O.D. () ø ø P ZP2-R030WK - ZP2-R030WK - ZP2-R030WK - ZP2-R030WK - a Q x x R S

95 Pad with all Spline uffer ø2, ø, ø, ø /Type U: lat all spline guide is used to the buffer. How to Order uffer Specifications Specifications Stroke (mm) Spring reactive t 0 stroke (N) force t buffer stroke (N) ZP2-T02US all spline T Vacuum inlet ZP2 02 U N S direction Direction T Vertical 02 ø2 0 ø 0 ø 0 ø Pad type Type U lat Replacement Part No. Pad unit part no. ZP2-T02US ZP02U ZP2-T0US ZP0U ZP2-T0US ZP0U ZP2-T0US ZP0U Note) in the table indicates the pad material. uffer stroke Stroke mm uffer specification Specification S all spline Pad material Material N NR S Silicone rubber U Urethane rubber KM GN onductive NR GS onductive silicone rubber dapter part no. uffer assembly part no. ZPT1- ZP2-T3S 1 1 x 3. M x 0. (9.) Width across flat 2. ø Gasket 12 Width across flat ø ø ø M x 0. ZP2-T02US ZP2-T0US ZP2-T0US ZP2-T0US

96 Mark-free Pad Series Minimizes the transfer of rubber constituents to the workpiece. Si board Pad dsorption mark Standard silicone rubber nlarged view μm nalysis equipment: Scanning probe microscope Measurement conditions: Measurement mode tomic force microscope DM mode Sample conditions: Press the vacuum pad to the Si board for 1 hour. Monitoring location: Monitored at a randomly selected location where adsorption marks were likely due to contact between the vacuum pad and Si board. 1 Mark-free NR Pad Minimizes the transfer of rubber constituents which is supposed to be the cause of adsorption. : ø to ø12 μm Heavy-duty type 2 Stuck luororesin Pad luororesin sheet is baked onto the pad adsorption surface. Prevents the transfer of rubber constituents. : ø0 to ø12 μm 3 Resin ttachment PK material is used for the pad adsorption surface. Prevents the transfer of rubber constituents. : ø to ø32 μm Related Pad yclone Pad No adsorption mark is left because the vacuum pad does not come into contact with the workpiece. Made to Order ttachment μm 2 The above adsorption marks show sample data. ctual results will depend on the conditions.

97 Series ZP2 Pad type Material of the adsorption part (Part in contact with the workpiece) Visual checking dsorption mark 1 ondition 2 (Initial value) Vapor method 3 Operating temperature range ( ) Static friction ratio 1 Mark-free NR pad Mark-free NR (Specially treated ) to 0 0. NR + Stuck fluororesin to 0 Standard Mark-free Pad Series 2 3 Stuck fluororesin pad Resin attachment yclone pad Made to Order Series ZP (Standard material) luororubber + Stuck fluororesin PK onductive PK (Volume resistivity: 1 x 10 Ωcm) NR luororubber onductive NR/Silicone rubber Silicone rubber Urethane rubber to to 0 Standard: to 0 (No freezing) dsorption mark characteristics [: Little or no influence : an be used depending on the conditions. : Not suitable] The above table is for reference when selecting the pad. Values and evaluation are reference data only. Preparatory testing under actual operating conditions is recommended. 1 dsorption mark 2 ondition 3 Vapor method Specially treated Static friction ratio Indicates the transfer of rubber constituents from the pad. Visual evaluation of the adsorption mark Method of applying vapor to the workpiece to visually check for adsorption marks NR is specially treated to modify and reduce the transfer of rubber constituents. Static friction ratio when the workpiece (glass) is adsorbed by the pad. (NR = 1 as a benchmark) When the cyclone pad is used, the pad does not come into contact with the workpiece (glass). The customer needs to install a guide for holding. leaning method [Mark-free NR pad/stuck fluororesin pad/resin attachment] lways clean the product before operation and when carrying out regular maintenance. 1) Hold the part other than the adsorption surface. Non particle-generating vinyl gloves are recommended. 2) Soak a non particle-generating cloth in 2-propanol (isopropyl alcohol) (purity > 99.%). This solution is a recommendation. If not available, use a solution with high purity which does not affect the material properties. 3) Wipe the adsorption surface (pad/resin attachment) and the part that comes into contact with the workpiece. ) Dry them with clean air blow. (Or, wipe again with a dry non particle-generating cloth.) 2

98 Mark-free Pad ø, ø, ø, ø10, ø1, ø2, ø32, ø0, ø0 /Type U: lat Pad which reduces the adsorption marks left on the workpiece by rubber The pad is made from markfree NR, and the NR is then specially treated to minimize the transfer of rubber constituents to the workpiece. pplicable for the ZP series adapter : Pad Unit Pad unit ZP2 0 ø 0 ø 0 ø 10 ø10 1 ø1 2 ø2 32 ø32 0 ø0 0 ø0 How to Order 0 UL Pad type Type U lat 19 Pad material Material L Mark-free NR With/Without lock ring Nill With lock ring 19 Without lock ring Note) Note) ø10 or larger ZP2-0 to 0UL ø Lock ring ZP2-10 to 0UL ød 12 ZP2-0UL ZP2-0UL ZP2-0UL. 9 ø ø ø ZP2-10UL ZP2-1UL ZP2-2UL ZP2-32UL ZP2-0UL ZP2-0UL ø ø ø D pplicable pad 0U/0U/0U ø.9 dapter Mounting If an adapter will be made by the customer, design the adapter with the dimensions shown below. pplicable pad 10U/1U pplicable pad 2U/32U R pplicable pad 0U/0U 30 2 R R 30 R R R 30 R 2 0. R R R R ø2. ø3. ø.9 ø2. ø. ø ø. Note) R part has to be smooth with no corners. Refer to page for adapter applicable to the ZP series. 1 R R 2 9 R R R R ø3. ø ø ø.9 R ø. ø ø9 ø11. 2

99 Mark-free Pad ø0, ø0, ø3, ø0, ø, ø12 /Type H: Heavy-duty (lat with rib) Pad which reduces the adsorption marks left on the workpiece by rubber The pad is made from markfree NR, and the NR is then specially treated to minimize the transfer of rubber constituents to the workpiece. Prevents rubber constituents of the pad from transferring by baking the fluororesin sheet to the adsorption surface. Pad unit ZP2 0 ø0 0 ø0 3 ø3 0 ø0 ø 12 ø12 Pad type Type H Heavy-duty (lat with rib) How to Order 0 HL Stuck fluororesin Pad material Material L Mark-free NR NT NR + Stuck fluororesin T luororubber + Stuck fluororesin : Pad Unit 0 3 ZP2-0H ZP2-0H ZP2-12H 11. ø ø ø ø D ø ø ø ø.. 21 ø ø10 ø ø.. 3 x x x 3 x. x x 9. ZP2-0H ZP2-0H ZP2-3H ZP2-0H D ZP2-H ZP2-12H

100 Resin ttachment ø, ø, ø10, ø13, ø1, ø20, ø2, ø32 No adsorption marks (rubber constituents) are left on the workpiece. voids direct contact between the workpiece and the rubber by installing a PK attachment to the bellows pad to prevent the transfer of rubber constituents. Prevents sticking of the pad (rubber) and the workpiece. Ideal for the ZP series bellows pad (ø to ø32) ZP2 0 ZP0 0 ZP0 10 ZP10 13 ZP13 1 ZP1 20 ZP20 2 ZP2 32 ZP32 0 KP How to Order ttachment material Material P PK GP onductive PK How to Order (When ordering with a pad) ellows pad When ordering with a pad, put, below the part number of the pad as shown below. Note that the pad is not delivered with the attachment assembled. This attachment can only be assembled onto SM s standard bellows pad. When the attachment is made of conductive PK, use conductive material for the pad. ttachment Ordering example ZPT0NJ10-- ZP2-0KP ellows pad part no. Resin attachment part no. D ø ø ø ZP2-0K ZP2-0K ZP2-10K pplicable pad ZP0 ZP0 ZP ZP2-13K ZP ZP2-1K ZP1 1 1 ZP2-20K ZP ZP2-2K ZP2 2 2 ZP2-32K ZP Note 1) in the table indicates the attachment material. Note 2) in the table indicates the pad material. D «Precautions» lean the product before using the attachment. This product is not cleaned after machining. If the product is used in the condition in which it is shipped, residual material may be left on the work pieces. lean before usage. If you have any questions, please contact SM. If contact with hard material is a problem, do not use this product. PK material and cut parts fall under the security trade control

101 Sponge Pad ø, ø, ø, ø10, ø1 /Type S: Sponge or adsorption of work pieces with bumps Pad unit ZP2 Pad O.D. 0 ø 0 ø 0 ø 10 ø10 1 ø1 How to Order 0 S GS Pad material Material GS onductive silicone G onductive R Pad type Type S Sponge : Pad Unit ZP2-0S ZP2-0S ZP2-0S ø1. ø3 ø ø ø ø ZP2-10S ZP2-1S ø ø10 ø10 ø1 dapter Mounting If an adapter will be made by the customer, design the adapter with the dimensions shown below. pplicable pad 0S pplicable pad 0S pplicable pad 0S pplicable pad 10S pplicable pad 1S ø0. 1. ø1. 1. ø2. 1. ø.1 1. ø.1 ø1. ø3.1 ø.1 ø.1 ø10.1 ø2.1 ø3.9 ø.9 ø.9 ø10.9 Refer to pages 0 and 1 for adapter applicable to the ZP2 series. 30

102 Series ZP2 With adapter ZP2 Vacuum inlet direction Direction T Vertical Pad O.D. 0 ø 0 ø 0 ø 10 ø10 1 ø1 T 0 S GS 3 Pad type Type S Sponge How to Order Mounting 3 3 Pad material GS G Material onductive silicone onductive R Thread size M3 x 0. (Male thread) M x 0. (Male thread) M3 x 0. (emale thread) M x 0. (emale thread) pplicable pad O.D. symbol Replacement Part No. ZP2-T0S-3 ZP2-T0S- ZP2-T0S- ZP2-T10S- ZP2-T1S- ZP2-T0S-3 ZP2-T0S- ZP2-T0S- ZP2-T10S- ZP2-T1S- Pad unit part no. ZP2-0S ZP2-0S ZP2-0S ZP2-10S ZP2-1S ZP2-0S ZP2-0S ZP2-0S ZP2-10S ZP2-1S Note) in the table indicates the pad material. dapter part no. ZP2-S01P ZP2-S02P ZP2-S03P ZP2-S0P ZP2-S0P ZP2-S11 ZP2-S12 ZP2-S13 ZP2-S1 ZP2-S1 : With dapter ZP2-T0S-3 ZP2-T0S- ZP2-T0S- Width across flat M3 x 0. Width across flat M x 0. Width across flat M x (10) (11) (11) ø0. ø1. ø2. ø1. ø ø3 ø ø ø 31

103 Sponge Pad Series ZP2 : With dapter ZP2-T10S- ZP2-T1S- Width across flat 10 M x 0. Width across flat 1 M x 0. (12) (12) ø2. ø ø10 ø2. ø10 ø1 Width across flat M3 x 0. Width across flat M x 0. Width across flat M x 0. (10.). 3. (12) (12) ø0. ø1. ø ø1. ø3 ø ø2. ø ø Width across flat 10 M x 0. Width across flat 1 M x 0. (10) (10) 1 1 ZP2-T0S-3 ZP2-T0S- ZP2-T0S ZP2-T10S- ZP2-T1S- ø.1 ø ø10 ø.1 ø10 ø1 32

104 Heavy-duty Pad ø32, ø10, ø20, ø300, ø30 /Type H: Heavy-duty (lat with rib) HT: Heavy-duty (Thin flat with rib) Reinforced pad to prevent deformation when transferring heavy or large work pieces Pad unit ZP2 How to Order 32 HN 32 ø32 10 ø10 20 ø ø ø30 Pad material Material N NR S Silicone rubber KM R Note) Silicone rubber is only applicable to the ø32 pad. : Pad Unit Pad type () Pad type H (lat with rib) HT (Thin flat with rib) ZP2-32H ø2 2. ø ø ø3 1 3 x 3 3 x ZP2-300H ZP2-30H ø20 x M x 1.2 ø10 ø ø2 19 ø2 ø29 ø30 ø301 ø3 x 9 x 1 x 9 x 1 33

105 Heavy-duty Pad Series ZP2 ZP2-10HT ZP2-20HT ø ø10 x M x 1.2 ø ø20 1 ø ø10 ø20 ø1 0 x 9 x 1 x 10 x 1 3

106 Heavy-duty Pad ø32, ø10 /Type H: Heavy-duty (ellows) or heavy or large work pieces How to Order Pad unit ZP2 32 ø32 10 ø10 32 H N Pad material Material N NR S Silicone rubber KM R Note) Silicone rubber is only applicable to the ø32 pad. Pad type Type H Heavy-duty (ellows) : Pad Unit ZP2-32H ZP2-10H ø109 x ø1 ø2 x ø9 3 x ø 3 x ø ø ø1 ø22 ø32 ø33 ø3 ø12 ø0 ø10 ø10 ø12 ø1 3

107 Heavy-duty Pad Pad size 30 x 0 /Type HW: Heavy-duty (Oval) or heavy or large work pieces How to Order Pad unit ZP2 300 Pad size Pad size 30 x HW N Pad material Material N NR S Silicone rubber KM R Pad type Type HW Heavy-duty (Oval) : Pad Unit ZP2-300HW ø ø 1 3 x x 0 3 3

108 Heavy-duty all Joint Pad ø0, ø0, ø3, ø0, ø, ø12 /Type H: Heavy-duty (lat with rib) or adsorption of work pieces with inclined surface Replacement Part No. Pad unit part no. dapter assembly part no. ZP2-T0H ZP0H With three ZP2-T1 ZP2-T0H ZP0H M3 bolts ZP2-T3H ZP3H With four ZP2-T2 ZP2-T0H ZP0H M bolts ZP2-TH ZPH With four ZP2-T3 ZP2-T12H ZP12H M bolts Note) in the table indicates the pad material. : With dapter With adapter ZP2 Vacuum inlet direction Direction T Vertical Specification (mechanism) Specification all joint 0 ø0 0 ø0 3 ø3 0 ø0 H ø 12 ø12 How to Order T 0H N Pad type Type Heavy-duty (lat with rib) Vacuum inlet direction Vertical Pad material () Material N NR S Silicone rubber U Urethane rubber KM PR 0 ZP2-T 0H Width across flat 19 Width across flat 19 M1 x 1 Rc1/ (9) ø ø2 ø1 ø ø 3 3 x M3 x 10 ZP2-T0H ZP2-T0H ZP2-T 0H ZP2-T 12H Width across flat 22 Width across flat 22 M1 x 1. Rc1/ Width across flat 22 Width across flat 22 M1 x 1. Rc1/ 9. () D ø0 (1.) ø ø ø3 ø ø x M x ø ø0 ø ø. x M x 12 ZP2-T3H ZP2-T0H D ZP2-TH ZP2-T12H

109 Heavy-duty all Joint Pad Series ZP2 With adapter ZP2 M1 x 1 Width across flat 19 0 Vacuum inlet direction Direction Lateral Specification (mechanism) Specification all joint ø0 ø0 ø3 ø0 ø ø12 : With dapter 0 ZP2-0 H H N How to Order Pad material () N S U Pad type H Material NR Silicone rubber Urethane rubber KM PR Type Heavy-duty (lat with rib) Replacement Part No. ZP2-0H ZP2-0H ZP2-3H ZP2-0H ZP2-H ZP2-12H Vacuum inlet direction Lateral Pad unit part no. ZP0H ZP0H ZP3H ZP0H ZPH ZP12H Note) in the table indicates the pad material. dapter assembly part no. ZP2-1 With three M3 bolts ZP2-2 With four M bolts ZP2-3 With four M bolts 9. (1) M x 0. ø ø2 ø1 ø ø 3 3 x M3 x 10 ZP2-0H ZP2-0H ZP2-0 H ZP2-12H M1 x 1. Width across flat 22 M1 x 1. Width across flat () D Rc1/ ø0 (102.) ø0 Rc1/ x M x ø ø3 ø ø x M x ø ø0 ø ø. ZP2-3H ZP2-0H D ZP2-H ZP2-12H

110 Series ZP2 How to Order With buffer ZP2 T 0H N J 2 Vacuum inlet direction Direction T Vertical Specification (mechanism) Specification all joint uffer stroke () pplicable Stroke pad 2 0 ZP0H ZP0H ZP3H ZP0H ZPH ZP12H ø0 ø0 ø3 ø0 ø ø12 uffer specification J J Specification Rotating With bushing Material: rass Rotating With bushing Material: Steel Vacuum inlet direction Vertical H Pad type Type Heavy-duty (lat with rib) Pad material () N S U Material NR Silicone rubber Urethane rubber KM PR Replacement Part No. Pad unit part no. ZP2-T0H(J/J)2 ZP2-T0H(J/J)0 ZP0H ZP2-T0H(J/J) ZP2-T0H(J/J)2 ZP2-T0H(J/J)0 ZP0H ZP2-T0H(J/J) ZP2-T3H(J/J)2 ZP2-T3H(J/J)0 ZP3H ZP2-T3H(J/J) ZP2-T3H(J/J) ZP2-T0H(J/J)2 ZP2-T0H(J/J)0 ZP0H ZP2-T0H(J/J) ZP2-T0H(J/J) ZP2-TH(J/J)2 ZP2-TH(J/J)0 ZPH ZP2-TH(J/J) ZP2-TH(J/J) ZP2-T12H(J/J)2 ZP2-T12H(J/J)0 ZP12H ZP2-T12H(J/J) ZP2-T12H(J/J) Note) in the table indicates the pad material. uffer assembly part no. ZP2-T1(J/J)2 ZP2-T1(J/J)0 ZP2-T1(J/J) ZP2-T1(J/J)2 ZP2-T1(J/J)0 ZP2-T1(J/J) ZP2-T2(J/J)2 ZP2-T2(J/J)0 ZP2-T2(J/J) ZP2-T2(J/J) ZP2-T2(J/J)2 ZP2-T2(J/J)0 ZP2-T2(J/J) ZP2-T2(J/J) ZP2-T3(J/J)2 ZP2-T3(J/J)0 ZP2-T3(J/J) ZP2-T3(J/J) ZP2-T3(J/J)2 ZP2-T3(J/J)0 ZP2-T3(J/J) ZP2-T3(J/J) With three M3 bolts With four M bolts With four M bolts uffer Specifications Stroke (mm) Spring reactive force uffer specifications t 0 stroke (N) t buffer stroke (N) J J ø0, ø0 ø3, ø0, ø, ø12 2, 0, 2, 0,, Rotating With bushing uffer body material: rass Tightening torque: 30 N m ±% Tightening torque: N m ±% Tightening torque: 0 N m ±% Rotating With bushing uffer body material: Steel Tightening torque: 0 N m ±% 39

111 Heavy-duty all Joint Pad Series ZP2 : With uffer 0 ZP2-T H J 0 J Width across flat 1 Rc1/ () D Width across flat M1 x 1. Width across flat 13 ushing ø30 30 ø2 ø1 ø ø x M3 x 10 ZP2-T0H(J/J)2 ZP2-T0H(J/J)0 ZP2-T0H(J/J) ZP2-T0H(J/J)2 ZP2-T0H(J/J)0 ZP2-T0H(J/J) D ZP2-T H J 0 J ZP2-T 12H J J Width across flat 1 Width across flat 1 Rc1/ Rc1/ Width across flat 30 ushing 0 Width across flat 30 ushing () M22 x 1. Width across flat 1 () D M22 x 1. Width across flat 1. D ø ø0 x M x ø ø3 ø ø x M x ø ø0 ø ø. ZP2-T3H(J/J)2 ZP2-T3H(J/J)0 ZP2-T3H(J/J) ZP2-T3H(J/J) ZP2-T0H(J/J)2 ZP2-T0H(J/J)0 ZP2-T0H(J/J) ZP2-T0H(J/J) D ZP2-TH(J/J)2 ZP2-TH(J/J)0 ZP2-TH(J/J) ZP2-TH(J/J) ZP2-T12H(J/J)2 ZP2-T12H(J/J)0 ZP2-T12H(J/J) ZP2-T12H(J/J) D

112 Series ZP2 With buffer ZP2 Vacuum inlet direction Direction Lateral Specification (mechanism) Specification all joint H N J 2 ø0 ø0 ø3 ø0 ø ø12 Pad type Type H Heavy-duty (lat with rib) How to Order uffer stroke () Stroke 2 0 pplicable pad uffer specification J J Pad material () N S U Material NR Silicone rubber Urethane rubber KM PR Specification Rotating With bushing Material: rass Rotating With bushing Material: Steel ZP0H ZP0H ZP3H ZP0H ZPH ZP12H Vacuum inlet direction Lateral Replacement Part No. Pad unit part no. ZP2-0H(J/J)2 ZP2-0H(J/J)0 ZP0H ZP2-0H(J/J) ZP2-0H(J/J)2 ZP2-0H(J/J)0 ZP0H ZP2-0H(J/J) ZP2-3H(J/J)2 ZP2-3H(J/J)0 ZP2-3H(J/J) ZP3H ZP2-3H(J/J) ZP2-0H(J/J)2 ZP2-0H(J/J)0 ZP2-0H(J/J) ZP0H ZP2-0H(J/J) ZP2-H(J/J)2 ZP2-H(J/J)0 ZP2-H(J/J) ZPH ZP2-H(J/J) ZP2-12H(J/J)2 ZP2-12H(J/J)0 ZP2-12H(J/J) ZP12H ZP2-12H(J/J) Note) in the table indicates the pad material. uffer assembly part no. ZP2-1(J/J)2 ZP2-1(J/J)0 ZP2-1(J/J) ZP2-1(J/J)2 ZP2-1(J/J)0 ZP2-1(J/J) ZP2-2(J/J)2 ZP2-2(J/J)0 ZP2-2(J/J) ZP2-2(J/J) ZP2-2(J/J)2 ZP2-2(J/J)0 ZP2-2(J/J) ZP2-2(J/J) ZP2-3(J/J)2 ZP2-3(J/J)0 ZP2-3(J/J) ZP2-3(J/J) ZP2-3(J/J)2 ZP2-3(J/J)0 ZP2-3(J/J) ZP2-3(J/J) With three M3 bolts With four M bolts With four M bolts uffer Specifications Stroke (mm) Spring reactive force uffer specifications t 0 stroke (N) t buffer stroke (N) J J ø0, ø0 ø3, ø0, ø, ø12 2, 0, 2, 0,, Tightening torque: 30 N m ±% Tightening torque: 0 N m ±% Rotating With bushing uffer body material: rass Rotating With bushing uffer body material: Steel Tightening torque: N m ±% Tightening torque: N m ±% 1

113 Heavy-duty all Joint Pad Series ZP2 : With uffer 0 ZP2- H J 0 J Width across flat 1 () D 3 1 Width across flat M1 x 1. Width across flat 13 M x ø30 ø2 30 ø1 ø ø 3 1. ushing 3 x M3 x 10 ZP2-0H(J/J)2 ZP2-0H(J/J)0 ZP2-0H(J/J) ZP2-0H(J/J)2 ZP2-0H(J/J)0 ZP2-0H(J/J) D ZP2- H J 0 J ZP2-12H J J Width across flat 1 Width across flat Width across flat 30 M22 x 1. ushing D 0 21 Width across flat 30 M22 x 1. ushing () Width across flat 22 Rc1/ () Rc1/. D ø0 x M x Width across flat ø0 x M x ZP2-3H(J/J)2 ZP2-3H(J/J)0 ZP2-3H(J/J) ZP2-3H(J/J) ZP2-0H(J/J)2 ZP2-0H(J/J)0 ZP2-0H(J/J) ZP2-0H(J/J) 30 ø ø3 ø ø D ZP2-H(J/J)2 ZP2-H(J/J)0 ZP2-H(J/J) ZP2-H(J/J) ZP2-12H(J/J)2 ZP2-12H(J/J)0 ZP2-12H(J/J) ZP2-12H(J/J) 30 ø ø0 ø ø D

114 Heavy-duty all Joint Pad ø0, ø0, ø3, ø0, ø, ø12 /Type H: Heavy-duty (ellows) or adsorption of work pieces with inclined or curved surface Width across flat 19 Width across flat 19 M1 x 1 Rc1/ ZP2 Vacuum inlet direction Direction T Vertical Specification (mechanism) Replacement Part No. Specification Pad unit part no. dapter assembly part no. all joint ZP2-T0H ZP0H With three ZP2-T1 ZP2-T0H ZP0H M3 bolts ZP2-T3H ZP3H With four 0 ø0 ZP2-T2 ZP2-T0H ZP0H M bolts 0 ø0 ZP2-TH ZPH With four 3 ø3 ZP2-T3 H ZP2-T12H ZP12H M bolts 0 ø0 Note) in the table indicates the pad material. ø 12 ø12 : With dapter 0 ZP2-T 0H With adapter How to Order T 0H N Pad type Type Heavy-duty (ellows) Vacuum inlet direction Vertical Pad material () Material N NR S Silicone rubber U Urethane rubber KM PR (G) ø30 3 ZP2-T H 1. Width across flat 22 Width across flat ø0 30 ø2 ø1 ød ø ø ø Rc1/ M1 x 1. 3 x M3 x 10 0 ZP2-T H (G) ZP2-T0H ZP2-T0H D Width across flat 22 Width across flat 22 (G) G 1. ø M1 x 1. Rc1/ x M x 12 ZP2-T3H ZP2-T0H D 30 ø ø3 ød ø ø ø G x M x ZP2-TH ZP2-T12H D ø ø0 ød ø ø ø G

115 Heavy-duty all Joint Pad Series ZP2 With adapter ZP2 M1 x 1 Width across flat 19 0 Vacuum inlet direction Direction Lateral Specification (mechanism) Specification all joint ø0 ø0 ø3 ø0 ø ø12 : With dapter 0 ZP2-0 H H N How to Order Pad material () N S U Pad type H Material NR Silicone rubber Urethane rubber KM PR Type Heavy-duty (ellows) Vacuum inlet direction Lateral Replacement Part No. Pad unit part no. dapter assembly part no. ZP2-0H ZP0H With three ZP2-1 ZP2-0H ZP0H M3 bolts ZP2-3H ZP3H With four ZP2-2 ZP2-0H ZP0H M bolts ZP2-H ZPH With four ZP2-3 ZP2-12H ZP12H M bolts Note) in the table indicates the pad material. (G) M x 0. ø M1 x 1. Width across flat ø2 ø1 ød ø ø ø 3 x M3 x 10 ZP2-0H ZP2-0H 3 ZP2-0 H ZP2-12H D M1 x 1. Width across flat 22 2 G Width across flat 22 (G) 0. Width across flat Rc1/ ø0 (G) ø0 Rc1/ x M x 12 ZP2-3H ZP2-0H ø ø3 ød ø ø ø D G x M x ZP2-H ZP2-12H ø ø0 ød ø ø ø D G

116 Series ZP2 How to Order With buffer ZP2 T Vacuum inlet direction Direction T Vertical Specification (mechanism) Specification all joint H H N J 2 ø0 ø0 ø3 ø0 ø ø12 Pad type Type Heavy-duty (ellows) uffer stroke () Stroke 2 0 pplicable pad uffer specification J J Pad material () N S U Material NR Silicone rubber Urethane rubber KM PR Specification Rotating With bushing Material: rass Rotating With bushing Material: Steel ZP0H ZP0H ZP3H ZP0H ZPH ZP12H Vacuum inlet direction Vertical Replacement Part No. Pad unit part no. ZP2-T0H(J/J)2 ZP2-T0H(J/J)0 ZP0H ZP2-T0H(J/J) ZP2-T0H(J/J)2 ZP2-T0H(J/J)0 ZP0H ZP2-T0H(J/J) ZP2-T3H(J/J)2 ZP2-T3H(J/J)0 ZP2-T3H(J/J) ZP3H ZP2-T3H(J/J) ZP2-T0H(J/J)2 ZP2-T0H(J/J)0 ZP2-T0H(J/J) ZP0H ZP2-T0H(J/J) ZP2-TH(J/J)2 ZP2-TH(J/J)0 ZP2-TH(J/J) ZPH ZP2-TH(J/J) ZP2-T12H(J/J)2 ZP2-T12H(J/J)0 ZP12H ZP2-T12H(J/J) ZP2-T12H(J/J) Note) in the table indicates the pad material. uffer assembly part no. ZP2-T1(J/J)2 ZP2-T1(J/J)0 ZP2-T1(J/J) ZP2-T1(J/J)2 ZP2-T1(J/J)0 ZP2-T1(J/J) ZP2-T2(J/J)2 ZP2-T2(J/J)0 ZP2-T2(J/J) ZP2-T2(J/J) ZP2-T2(J/J)2 ZP2-T2(J/J)0 ZP2-T2(J/J) ZP2-T2(J/J) ZP2-T3(J/J)2 ZP2-T3(J/J)0 ZP2-T3(J/J) ZP2-T3(J/J) ZP2-T3(J/J)2 ZP2-T3(J/J)0 ZP2-T3(J/J) ZP2-T3(J/J) With three M3 bolts With four M bolts With four M bolts uffer Specifications Stroke (mm) Spring reactive force uffer specifications t 0 stroke (N) t buffer stroke (N) J J ø0, ø0 ø3, ø0, ø, ø12 2, 0, 2, 0,, Rotating With bushing uffer body material: rass Tightening torque: 30 N m ±% Tightening torque: N m ±% Rotating With bushing uffer body material: Steel Tightening torque: 0 N m ±% Tightening torque: N m ±%

117 Heavy-duty all Joint Pad Series ZP2 : With uffer 0 ZP2-T H J 0 J Width across flat 1 Rc1/ (H) G Width across flat M1 x 1. Width across flat 13 ushing ø ø2 ø1 ød ø ø ø 3 x M3 x 10 ZP2-T0H(J/J)2 ZP2-T0H(J/J)0 ZP2-T0H(J/J) ZP2-T0H(J/J)2 ZP2-T0H(J/J)0 ZP2-T0H(J/J) D G H ZP2-T H J 0 J ZP2-T H Width across flat Width across flat 30 Rc1/ ushing 12 J J Width across flat Width across flat 30 M22 x 1. Rc1/ ushing (H) G M22 x 1. Width across flat 1 (H) G Width across flat ø0 x M x ø0 x M x 12 ZP2-T3H(J/J)2 ZP2-T3H(J/J)0 ZP2-T3H(J/J) ZP2-T3H(J/J) ZP2-T0H(J/J)2 ZP2-T0H(J/J)0 ZP2-T0H(J/J) ZP2-T0H(J/J) ø ø3 ød ø ø ø 3 D G H ZP2-TH(J/J)2 ZP2-TH(J/J)0 ZP2-TH(J/J) ZP2-TH(J/J) ZP2-T12H(J/J)2 ZP2-T12H(J/J)0 ZP2-T12H(J/J) ZP2-T12H(J/J) ø ø0 ød ø ø ø D G H

118 Series ZP2 How to Order With buffer ZP2 Vacuum inlet direction Direction T Lateral Specification (mechanism) Specification all joint H H N J 2 ø0 ø0 ø3 ø0 ø ø12 Pad type Type Heavy-duty (ellows) uffer stroke () Stroke 2 0 pplicable pad uffer specification J J Pad material () N S U Material NR Silicone rubber Urethane rubber KM PR Specification Rotating With bushing Material: rass Rotating With bushing Material: Steel ZP0H ZP0H ZP3H ZP0H ZPH ZP12H Vacuum inlet direction Lateral Replacement Part No. Pad unit part no. ZP2-0H(J/J)2 ZP2-0H(J/J)0 ZP0H ZP2-0H(J/J) ZP2-0H(J/J)2 ZP2-0H(J/J)0 ZP0H ZP2-0H(J/J) ZP2-3H(J/J)2 ZP2-3H(J/J)0 ZP2-3H(J/J) ZP3H ZP2-3H(J/J) ZP2-0H(J/J)2 ZP2-0H(J/J)0 ZP2-0H(J/J) ZP0H ZP2-0H(J/J) ZP2-H(J/J)2 ZP2-H(J/J)0 ZP2-H(J/J) ZPH ZP2-H(J/J) ZP2-12H(J/J)2 ZP2-12H(J/J)0 ZP12H ZP2-12H(J/J) ZP2-12H(J/J) Note) in the table indicates the pad material. uffer assembly part no. ZP2-1(J/J)2 ZP2-1(J/J)0 ZP2-1(J/J) ZP2-1(J/J)2 ZP2-1(J/J)0 ZP2-1(J/J) ZP2-2(J/J)2 ZP2-2(J/J)0 ZP2-2(J/J) ZP2-2(J/J) ZP2-2(J/J)2 ZP2-2(J/J)0 ZP2-2(J/J) ZP2-2(J/J) ZP2-3(J/J)2 ZP2-3(J/J)0 ZP2-3(J/J) ZP2-3(J/J) ZP2-3(J/J)2 ZP2-3(J/J)0 ZP2-3(J/J) ZP2-3(J/J) With three M3 bolts With four M bolts With four M bolts uffer Specifications Stroke (mm) Spring reactive force uffer specifications t 0 stroke (N) t buffer stroke (N) J J ø0, ø0 ø3, ø0, ø, ø12 2, 0, 2, 0,, Tightening torque: 30 N m ±% Tightening torque: 0 N m ±% Rotating With bushing uffer body material: rass Rotating With bushing uffer body material: Steel Tightening torque: N m ±% Tightening torque: N m ±%

119 Heavy-duty all Joint Pad Series ZP2 : With uffer 0 ZP2- H J 0 J Width across flat 1 (H) 0. G 3 1 Width across flat M1 x 1. Width across flat 13 M x ø30 ushing ø2 ø1 ød ø ø ø 3 x M3 x 10 ZP2-0H(J/J)2 ZP2-0H(J/J)0 ZP2-0H(J/J) ZP2-0H(J/J)2 ZP2-0H(J/J)0 ZP2-0H(J/J) D G H ZP2- H J 0 J ZP2- H (H) Width across flat G. Width across flat 30 M22 x 1. Width across flat 22 Rc1/ ø0 ushing x M x 10 (H) 12 J J Width across flat 1 Width across flat 30 G Rc1/ Width across flat M22 x 1. ø0 ushing x M x ø ø3 ød ø ø ø 30 ø ø0 ød ø ø ø ZP2-3H(J/J)2 ZP2-3H(J/J)0 ZP2-3H(J/J) ZP2-3H(J/J) ZP2-0H(J/J)2 ZP2-0H(J/J)0 ZP2-0H(J/J) ZP2-0H(J/J) D G H ZP2-H(J/J)2 ZP2-H(J/J)0 ZP2-H(J/J) ZP2-H(J/J) ZP2-12H(J/J)2 ZP2-12H(J/J)0 ZP2-12H(J/J) ZP2-12H(J/J) D G H

120 Heavy-duty Pad ø0, ø0, ø3, ø0, ø, ø12 /Type H: Heavy-duty (lat with rib) H: Heavy-duty (ellows) Reinforced pad prevents deformation when transferring heavy or large work pieces. : Pad Unit Pad unit ZP0 HN 0 ø0 0 ø0 3 ø3 0 ø0 ø 12 ø12 How to Order Pad material Material N NR S Silicone rubber U Urethane rubber KM PR Pad type Type H Heavy-duty (lat with rib) H Heavy-duty (ellows) ZP 0H ZP H ZP H ø ø ø ø D 0 ø ø ø ø.. 21 ø10 12 ø ø ø.. 3 x x x 1 3 x. x 3 0 x 9. ZP0H 0 ZP0H ZP3H 3 ZP0H D ZPH ZP12H ZP 0H ZP H ZP H ø 3 x ø 3 x ø. 0 ø x ø x ø 12 ø x ø9. x ø 3. G ZP0H ZP0H ø 1 2 ø1 ø ø ø ød 2 3 D ZP3H ZP0H ø ø3 ø ø ø ød D G ZPH ZP12H 12 ø ø0 ø ø ø ød 9 9 D

121 Heavy-duty Pad Series ZP With adapter H H ø0 ø0 ø3 ø0 ø ø12 Pad material () N S U ZPT0 H N Type Heavy-duty (lat with rib) Heavy-duty (ellows) Material NR Silicone rubber Urethane rubber KM PR Pad type ( ) : With dapter 1 ZPT0-1 ZPT0-1N ZPT0-1T ZPT0-1N ZPT0-1T ZPT3-1N ZPT3-1T ZPT0-1N ZPT0-1T ZPT -1N ZPT -1T ZPT12-1N ZPT12-1T How to Order Mounting thread size (Vacuum inlet) Mounting Replacement Part No. Male thread 1 1N 1T 1 1N 1T ZPT 0 H-1 (Male thread) ZPT 0 H-1 (Male thread) ZPT 12H-1 (Male thread) M1 x 1 M1 x 1. emale thread Pad unit part no. dapter assembly part no. ZP-T1-01 ZP0 ZP-T1-N01 ZP-T1-T01 With three ZP-T1-01 M3 bolts ZP0 ZP-T1-N01 ZP-T1-T01 ZP-T2-01 ZP3 ZP-T2-N01 ZP-T2-T01 With four ZP-T2-01 M bolts ZP0 ZP-T2-N01 ZP-T2-T01 ZP-T3-01 ZP ZP-T3-N01 ZP-T3-T01 With four ZP-T3-01 M bolts ZP12 ZP-T3-N01 ZP-T3-T01 Vacuum inlet direction Vertical Thread size Rc1/ NPT1/ NPT1/ Rc1/ NPT1/ NPT1/ M x 1.2 M10 x 1. M12 x 1. M1 x 1. ø0, ø0 ø3, ø0 ø, ø12 Pad unit part no. dapter assembly part no. ZPT0 - ZP-T1- ZP0 ZPT0-10 ZP-T1-10 With three ZPT0 - ZP-T1- M3 bolts ZP0 ZPT0-10 ZP-T1-10 ZPT3 - ZP-T2- ZPT3-10 ZP-T2-10 ZPT3-12 ZP3 ZP-T2-12 ZPT3-1 ZP-T2-1 With four ZPT0 - ZP-T2- M bolts ZPT0-10 ZP-T2-10 ZPT0-12 ZP0 ZP-T2-12 ZPT0-1 ZP-T2-1 ZPT -12 ZP-T3-12 ZP ZPT -1 ZP-T3-1 With four ZPT12-12 ZP-T3-12 M bolts ZP12 ZPT12-1 ZP-T3-1 Note 1) in the table indicates the pad type. Note 2) in the table indicates the pad material. Width across flat 19 1/ (Rc, NPT, NPT) Width across flat 22 1/ (Rc, NPT, NPT) Width across flat 22 1/ (Rc, NPT, NPT) Width across flat 19 ø2 ø x M x ø0 x M x 10 3 x M3 x D Width across flat 2 Width across flat 2 ø3 ø ø ø ø ø ø ø ø ZPT0H-1 ZPT0H ZPT3H-1 ZPT0H D ZPTH-1 ZPT12H

122 Series ZP : With dapter 0 ZPT 0 H-1 (Male thread) 3 ZPT 0 H-1 (Male thread) ZPT 12H-1 (Male thread) M1 x 1. Width across flat 19 G 2 M1 x 1 ø2 1/ (Rc, NPT, NPT) Width across flat 19 3 x M3 x Width across flat 22 G M1 x / (Rc, NPT, NPT) Width across flat 2 ø x M x G Width across flat / (Rc, NPT, NPT) Width across flat 2 ø0 x M x 10 ø3 ø1 ø ø ø ød ø ø3 ø ø ø ød ø ø0 ø ø ø ød ZPT0H-1 ZPT0H D 3 ZPT3H-1 ZPT0H D ZPTH-1 ZPT12H D ZPT0H-1 ZPT0H G ZPT3H-1 ZPT0H G ZPTH-1 ZPT12H G ZPT 0 H- (emale thread) ZPT 0 H- (emale thread) Width across flat 2 ø2 3 x M3 x Width across flat 3 x M x D 10 ø ø ø ø ø 1 3 ZPT0H- ZPT0H-10 ZPT0H- ZPT0H M x 1.2 M10 x 1. M x 1.2 M10 x 1. ZPT3H- ZPT3H-10 ZPT3H-12 ZPT3H-1 ZPT0H- ZPT0H-10 ZPT0H-12 ZPT0H D M x 1.2 M10 x 1. M12 x 1. M1 x 1. M x 1.2 M10 x 1. M12 x 1. M1 x

123 Heavy-duty Pad Series ZP : With dapter ZPT 0 12H- (emale thread) ZPT 0 H- (emale thread) Width across flat 0 ø0 x M x 10 Width across flat 2 ø2 G 3 x M3 x ø10 ø ø ø ø1 ø ø ø ød ø0 Width across flat 0 G x M x 10 Width across flat 3 ø G x M x ZPTH-12 ZPTH-1 ZPT12H-12 ZPT12H M12 x 1. M1 x 1. M12 x 1. M1 x 1. ZPT0H- ZPT0H-10 ZPT0H- ZPT0H D G M x 1.2 M10 x M x 1.2 M10 x ZPT 0 H- (emale thread) ZPT 12H- (emale thread) ø ø3 ø ø ø ød ø10 ø0 ø ø ø ød ZPT3H- ZPT3H-10 ZPT3H-12 ZPT3H-1 ZPT0H- ZPT0H-10 ZPT0H-12 ZPT0H D G M x 1.2 M10 x 1. M12 x 1. M1 x 1. M x 1.2 M10 x 1. M12 x 1. M1 x ZPTH-12 ZPTH-1 ZPT12H-12 ZPT12H-1 12 D G M12 x 1. M1 x M12 x 1. M1 x 1. 2

124 Series ZP Without buffer ø0 ø0 ø3 ø0 ø ø12 Pad material () N S U ZP 0 H N : Without uffer H H Material NR Silicone rubber Urethane rubber KM PR Pad type ( ) Type Heavy-duty (lat with rib) Heavy-duty (ellows) 01 Vacuum inlet thread size 01 N01 T01 Replacement Part No. Thread size Rc1/ NPT1/ NPT1/ How to Order Mounting thread size Thread size M x 1.2 M10 x 1. M12 x 1. Pad unit part no. dapter assembly part no. ZP0-01- ZP ZP0 -N01- ZP-1-N01- ZP0 -T01- ZP-1-T01- With three ZP0 ZP ZP M3 bolts ZP0 -N01-10 ZP-1-N01-10 ZP0 -T01-10 ZP-1-T01-10 ZP0-01- ZP ZP0 -N01- ZP-1-N01- ZP0 -T01- ZP-1-T01- With three ZP0 ZP ZP M3 bolts ZP0 -N01-10 ZP-1-N01-10 ZP0 -T01-10 ZP-1-T01-10 ZP ZP ZP3 -N01-10 ZP-2-N01-10 ZP3 -T01-10 ZP-2-T01-10 With four ZP3 ZP ZP M bolts ZP3 -N01-12 ZP-2-N01-12 ZP3 -T01-12 ZP-2-T01-12 Note 1) in the table indicates the pad type. Note 2) in the table indicates the pad material. ø0, ø0 ø3, ø0 ø, ø12 ZP ZP0 -N01-10 ZP0 -T01-10 ZP ZP0 -N01-12 ZP0 -T01-12 ZP ZP -N01-10 ZP -T01-10 ZP ZP -N01-12 ZP -T01-12 ZP ZP12 -N01-10 ZP12 -T01-10 ZP ZP12 -N01-12 ZP12 -T01-12 Vacuum inlet direction Lateral Pad unit part no. dapter assembly part no. ZP ZP-2-N01-10 ZP-2-T01-10 With four ZP0 ZP M bolts ZP-2-N01-12 ZP-2-T01-12 ZP ZP-3-N01-10 ZP-3-T01-10 With four ZP ZP M bolts ZP-3-N01-12 ZP-3-T01-12 ZP ZP-3-N01-10 ZP-3-T01-10 With four ZP12 ZP M bolts ZP-3-N01-12 ZP-3-T ZP H ZP H ZP H / (Rc, NPT, NPT) 1/ (Rc, NPT, NPT) G Width across flat 21 Width across flat 21 1/ (Rc, NPT, NPT) 3 x M3 x ø x M x Width across flat 21 ø0 x M x 10 D ø ø ø ø ø ø ø ø D G ZP0H M x 1.2 ZP3H M10 x 1. ZPH ZP0H M10 x 1. ZP3H M12 x 1. ZPH ZP0H M x 1.2 ZP0H M10 x 1. ZP12H ZP0H M10 x 1. ZP0H M12 x 1. ZP12H M10 x 1. M12 x 1. M10 x 1. M12 x 1.

125 Heavy-duty Pad Series ZP : Without uffer 0 3 ZP H ZP H ZP H / (Rc, NPT, NPT) I 1/ (Rc, NPT, NPT) Width across flat 21 I 11 1/ (Rc, NPT, NPT) Width across flat 21 I 11 ø Width across flat x M x 10 ø0 H ø2 3 x M3 x H x M x G H G G ø3 ø1 ø ø ø ød ø ø3 ø ø ø ød ø ø0 ø ø ø ød ZP0H ZP0H ZP0H ZP0H D ZP3H ZP3H ZP0H ZP0H D ZPH ZPH ZP12H ZP12H D ZP0H ZP0H ZP0H ZP0H G 0. H 9 2. I M x 1.2 M10 x 1. M x 1.2 M10 x ZP3H ZP3H ZP0H ZP0H G 3. H 0. I M10 x 1. M12 x 1. M10 x 1. M12 x ZPH ZPH ZP12H ZP12H G. H I M10 x 1. M12 x 1. M10 x 1. M12 x 1. 3.

126 Series ZP How to Order With buffer ZPT ø0 ø0 ø3 ø0 ø ø12 Pad material () N S U Material NR Silicone rubber Urethane rubber KM PR Stroke 2 0 Pad type ( ) Type Heavy-duty H (lat with rib) Heavy-duty H (ellows) ø0 J J J ø0 0 HNJ uffer body material ( ) Material luminum alloy rass + With bushing Steel + With bushing 2 uffer stroke () ø3 ø0 ø ø12 uffer Specifications (Rotating) Stroke (mm) Spring t 0 stroke (N) reactive force t buffer stroke (N) : With uffer ø0 to ø0 ø, ø12 2, 0, 2, 0,, Vacuum inlet thread size 01 N01 T01 Thread size Rc1/ NPT1/ NPT1/ Mounting thread size 1 22 Replacement Part No. Thread size M1 x 1. (ø0 to ø0) M22 x 1. (ø, ø12) Tightening Torque ZPT0 2-(/N/T)01-1 ZPT0 0-(/N/T)01-1 ZP0 ZPT0 -(/N/T)01-1 ZPT0 2-(/N/T)01-1 ZPT0 0-(/N/T)01-1 ZP0 ZPT0 -(/N/T)01-1 ZPT3 2-(/N/T)01-1 ZPT3 0-(/N/T)01-1 ZP3 ZPT3 -(/N/T)01-1 ZPT0 2-(/N/T)01-1 ZPT0 0-(/N/T)01-1 ZP0 ZPT0 -(/N/T)01-1 ZPT 2-(/N/T)01-22 ZPT 0-(/N/T)01-22 ZP ZPT -(/N/T)01-22 ZPT -(/N/T)01-22 ZPT12 2-(/N/T)01-22 ZPT12 0-(/N/T)01-22 ZP12 ZPT12 -(/N/T)01-22 ZPT12 -(/N/T)01-22 Note 1) in the table indicates the pad type. uffer body luminum rass Mounting material alloy + thread size With bushing M1 x M22 x ontrol value shall be ±% of the tightening torque. Steel + With bushing Pad unit part no. uffer assembly part no. ZP-T1 2-(/N/T)01 ZP-T1 0-(/N/T)01 ZP-T1 -(/N/T)01 ZP-T1 2-(/N/T)01 ZP-T1 0-(/N/T)01 ZP-T1 -(/N/T)01 ZP-T2 2-(/N/T)01 ZP-T2 0-(/N/T)01 ZP-T2 -(/N/T)01 ZP-T2 2-(/N/T)01 ZP-T2 0-(/N/T)01 ZP-T2 -(/N/T)01 ZP-T3 2-(/N/T)01 ZP-T3 0-(/N/T)01 ZP-T3 -(/N/T)01 ZP-T3 -(/N/T)01 ZP-T3 2-(/N/T)01 ZP-T3 0-(/N/T)01 ZP-T3 -(/N/T)01 ZP-T3 -(/N/T)01 Note 2) in the table indicates the pad material. Note 3) in the table indicates the buffer body material. Vacuum inlet direction Vertical 0 (N m) With three M3 bolts With four M bolts With four M bolts 3 ZPT H - -1 ZPT H ZPT H Width across flat 1 1/ (Rc, NPT, NPT) 20. Width across flat Width across flat 1 Width across flat 2 1/ (Rc, NPT, NPT) 2 Width across flat 1 Width across flat 30 1/ (Rc, NPT, NPT) 3 x M3 x x M x x M x 10 D () (D) (D) ø ø ø ø ø ø D D ZPT0H ZPT3H ZPTH ZPT0H ZPT3H ZPTH ZPT0H ZPT3H ZPTH ZPT0H ZPT0H ZPTH ZPT0H ZPT0H ZPT12H ZPT0H ZPT0H ZPT12H ZPT12H ZPT12H D

127 Heavy-duty Pad Series ZP : With uffer 3 ZPT H - -1 ZPT H ZPT H (H) G Width across flat 1 Width across flat M1 x 1. 1/ (Rc, NPT, NPT) ø2 3 x M3 x (H) G Width across flat 1 Width across flat 2 9 M1 x 1. 1/ (Rc, NPT, NPT) ø x M x 9 (H) 0 2 G Width across flat 1 M22 x 1. Width across flat 30 1/ (Rc, NPT, NPT) ø0 x M x 10 ø3 ø1 ø ø ø ød ø3 ø3 ø ø ø ød ø ø0 ø ø ø ød ZPT0H ZPT0H ZPT0H ZPT0H ZPT0H ZPT0H ZPT0H ZPT0H ZPT0H ZPT0H ZPT0H ZPT0H G H D ZPT3H ZPT3H ZPT3H ZPT0H ZPT0H ZPT0H ZPT3H ZPT3H ZPT3H ZPT0H ZPT0H ZPT0H G H D ZPTH ZPTH ZPTH ZPTH ZPT12H ZPT12H ZPT12H ZPT12H ZPTH ZPTH ZPTH ZPTH ZPT12H ZPT12H ZPT12H ZPT12H G H D

128 Series ZP How to Order With buffer ZP ø0 ø0 ø3 ø0 ø ø12 Pad material () N S U Material NR Silicone rubber Urethane rubber KM PR Stroke 2 0 ø0 ø0 Stroke (mm) Spring t 0 stroke (N) reactive force t buffer stroke (N) H H Pad type ( ) J J J 0 HNJ2 Type Heavy-duty (lat with rib) Heavy-duty (ellows) uffer body material ( ) Material luminum alloy rass + With bushing Steel + With bushing uffer stroke () ø3 ø0 ø ø12 uffer Specifications (Rotating) : With uffer ø0 to ø0 ø, ø12 2, 0, 2, 0,, Vacuum inlet thread size 01 N01 T01 Thread size Rc1/ NPT1/ NPT1/ Mounting thread size 1 22 Replacement Part No. Thread size M1 x 1. (ø0 to ø0) M22 x 1. (ø, ø12) Tightening Torque ZP0 2-(/N/T)01-1 ZP0 0-(/N/T)01-1 ZP0 ZP0 -(/N/T)01-1 ZP0 2-(/N/T)01-1 ZP0 0-(/N/T)01-1 ZP0 ZP0 -(/N/T)01-1 ZP3 2-(/N/T)01-1 ZP3 0-(/N/T)01-1 ZP3 ZP3 -(/N/T)01-1 ZP0 2-(/N/T)01-1 ZP0 0-(/N/T)01-1 ZP0 ZP0 -(/N/T)01-1 ZP 2-(/N/T)01-22 ZP 0-(/N/T)01-22 ZP ZP -(/N/T)01-22 ZP -(/N/T)01-22 ZP12 2-(/N/T)01-22 ZP12 0-(/N/T)01-22 ZP12 ZP12 -(/N/T)01-22 ZP12 -(/N/T)01-22 Note 1) in the table indicates the pad type. Vacuum inlet direction Lateral (N m) uffer body luminum rass Steel Mounting material alloy + + thread size With bushing With bushing M1 x 1. M22 x ontrol value shall be ±% of the tightening torque. Pad unit part no. uffer assembly part no. ZP-1 2-(/N/T)01 ZP-1 0-(/N/T)01 ZP-1 -(/N/T)01 ZP-1 2-(/N/T)01 ZP-1 0-(/N/T)01 ZP-1 -(/N/T)01 ZP-2 2-(/N/T)01 ZP-2 0-(/N/T)01 ZP-2 -(/N/T)01 ZP-2 2-(/N/T)01 ZP-2 0-(/N/T)01 ZP-2 -(/N/T)01 ZP-3 2-(/N/T)01 ZP-3 0-(/N/T)01 ZP-3 -(/N/T)01 ZP-3 -(/N/T)01 ZP-3 2-(/N/T)01 ZP-3 0-(/N/T)01 ZP-3 -(/N/T)01 ZP-3 -(/N/T)01 Note 2) in the table indicates the pad material. Note 3) in the table indicates the buffer body material. With three M3 bolts With four M bolts With four M bolts ZP 3 ZP H - -1 H ZP H Width across flat 1 Width across flat Width across flat 1 Width across flat 2 12 Width across flat 30 Width across flat 1 (D) 21 1/ (Rc, NPT, NPT) Width across flat 21 3 x M3 x (H) G 1/ (Rc, NPT, NPT) Width across flat 21 x M x (D) M22 x 1. 1/ (Rc, NPT, NPT) Width across flat 21 x M x 10 D ø ø ø ø ø ø D D G H ZP0H ZP3H ZPH ZP0H ZP3H ZPH ZP0H ZP3H ZPH ZP0H ZP0H ZPH ZP0H ZP0H ZP12H ZP0H ZP0H ZP12H ZP12H ZP12H D

129 Heavy-duty Pad Series ZP : With uffer (J) 3 ZP H - -1 ZP H / (Rc, NPT, NPT) 3 1 I 9 9 Width across flat 21 H G ø3 ø1 ø ø ø ød Width across flat 1 Width across flat 2 M1 x 1. ø2 3 x M3 x (J) 1/ (Rc, NPT, NPT) 3 1 I 9 9 Width across flat 21 H G ø ø3 ø ø ø ød Width across flat 1 Width across flat 2 M1 x 1. x M x ø (J) 0 21 I ZP H / (Rc, NPT, NPT) H Width across flat 21 G ø ø0 ø ø ø ød Width across flat 1 M22 x 1. ø0 Width across flat 30 x M x 10 ZP0H ZP0H ZP0H ZP0H ZP0H ZP0H ZP0H ZP0H ZP0H ZP0H ZP0H ZP0H D G H I J ZP3H ZP3H ZP3H ZP0H ZP0H ZP0H ZP3H ZP3H ZP3H ZP0H ZP0H ZP0H D G H I J ZPH ZPH ZPH ZPH ZP12H ZP12H ZP12H ZP12H ZPH ZPH ZPH ZPH ZP12H ZP12H ZP12H ZP12H D G H I J

130 Vacuum Pad for Transferring Disks or adsorbing and transferring disks of digital household electric appliances (D, DVD) or adsorbing circular components like D and DVD ellows mechanism is realized in the pad to dampen the impact to the work. How to Order ZP2 Z1 001 S Pad material Material S Silicone rubber GS Urethane rubber ZP2-Z PD 22. ZPT1- is a recommended adapter. (our adapters are necessary.) See below for mounting. Refer to the est Pneumatics No. for details. PD 22. x ø x M x 0. Vac. Vac. Vac. ZPT1-20 xample of attachment (ø2.) 0. Ring-shaped adsorption area x

131 Vacuum Pad for ixing Panel or adsorbing and fixing the stage of LD panels, etc. ellows mechanism allows complete contact with curved work surface. ZP2-Z002 ZP2-Z ø11 ø9 q w 90 x ø e ø20 ø1 q w 90 x ø e ø ( ) ø9. x ø ø12 ( ) x ø2. ø20 omponent Parts No. Part no. Description ZP2-Z2 ZP2-Z2 ZP2-Z2 Pad Joint Mounting plate Material PT KM luminum alloy Note lear anodized omponent Parts No. Part no. Description ZP2-Z3 ZP2-Z3 ZP2-Z3 Pad Joint Mounting plate Material PT KM luminum alloy Note lear anodized How to use The plate for air purging should be prepared by the customer. The plate needs to have supporting points. (void applying the weight of the workpiece directly to the pad.) Place the workpiece on the pad horizontally. Workpiece Mounting plate Supporting point Vacuum When a hole is made in the plate, the dimension shall be ( ) or less. 0

132 No.0. No.0. Vacuum Saving Valve an restrict the reduction of vacuum pressure even when there is no workpiece. When multiple vacuum pads are operated by one vacuum generator, and some of them are not holding the workpiece, the reduction of vacuum pressure is restricted and the workpiece can remain held by the rest of pads. Without workpiece Suction of workpiece Without workpiece How to Order onnection thread symbol for pad side Male thread connection pplicable fixed orifice size Thread size M M 01 R1/ Male G1 G1/ thread N1 NPT1/ Pad side emale thread connection Thread pplicable fixed orifice size 01 G1 N1 size M M Rc1/ G1/ NPT1/ ZP2V Pad side emale thread 03 ixed orifice size ixed orifice size (mm) Specifications onnection thread size for pad side ixed orifice size (mm) luid Max. operating pressure range (MPa) Max. operating vacuum pressure range (kpa) mbient and fluid temperature ( ) lement nominal filtration rating (μm) Min. operating flow rate (L/min (NR)) M, M M, R1/, G1/, NPT1/ ir 0 to 0. 0 to to 0 (No freezing) No need for switching operation when changing work pieces When the work pieces have different shapes, the control circuit can be simplified. Use of ZP2V Vacuum saving valve ZP2V Vacuum generator xisting way Vacuum generator Valve PL Sensor STOP The operation can be switched simply. Only the ZP2V is needed. The sensor checks the workpiece size, and the valve switches the pads. 1