arxiv: v1 [physics.optics] 4 Jan 2012

Transcription

1 Boosting the Figure Of Merit of LR-se refrtive inex sensing y phse-sensitive mesurements Kristof Loewijks, 1,2, Willem Vn Roy, 1 Gustf Borghs, 1,3 Lieset Lge, 1,3 n ol Vn Dorpe 1,2 1 IMEC, Kpelreef 75, B-3001 Leuven, Belgium 2 Deprtment of eletril engineering (EAT), KU Leuven, Leuven, Belgium 3 Deprtment of hysis n Astronomy, KU Leuven, Leuven, Belgium rxiv: v1 [physis.optis] 4 Jn 2012 Lolize surfe plsmon resonnes possess very interesting properties for wie vriety of sensing pplitions. In mny of the existing pplitions only the intensity of the reflete or trnsmitte signls is tken into ount, while the phse informtion is ignore. At the enter frequeny of (lolize) surfe plsmon resonne, the eletron lou mkes the trnsition etween in- n out-of-phse osilltion with respet to the inient wve. Here we show tht this informtion n experimentlly e extrte y performing phse-sensitive mesurements, whih result in linewiths tht re lmost one orer of mgnitue smller thn those for intensity se mesurements. As this phse trnsition is n intrinsi property of plsmon resonne, this opens up mny possiilities for oosting the figure of merit (FOM) of refrtive inex sensing y tking into ount the phse of the plsmon resonne. We experimentlly investigte this for two moel systems: rnomly istriute gol nnoisks n gol nnorings on top of ontinuous gol lyer n ieletri sper n oserve FOM vlues up to 8.3 n 16.5 for the respetive nnoprtiles. AC numers: The olletive osilltions of the free eletrons in nol metls hve een stuie extensively over the pst ees for wie vriety of pplitions. Both propgting surfe plsmon polriton () n lolize surfe plsmon resonne (LR) moes posess very interesting properties, with pplitions in sensing (refrtive inex sensing [1 6], ER [7]), metmterils [8], wveguiing [9, 10] n enhne oupling to tive semionutor omponents (e.g. photovolti ells [11], AERs [12, 13]). Refrtive inex sensing is y fr the most stuie pplition n llows lel-free n rel-time etetion of hnges in the ieletri environment of the plsmoni nnostrutures. Moreover, y funtionlizing the nnostrutures, the sensors n e me speifi to prtiulr moleule. In former works, reserh groups hve followe vrious pths in orer to optimize the nnostruture esigns suh tht higher sensitivities (λ/n) figures of merit (FOM = (λ/n)/fwhm) n lower etetion limits (DLs) n e hieve. Reently lot of progress hs een me in line with tuning (Fno resonnes, surine) to reh this gol [1, 2, 14 17]. In ny resonnt system, pronoune trnsition from in- to out-of-phse osilltion is oserve roun the enter frequeny of the resonne with respet to the riving fore. This is lso the se for (lolize) surfe plsmon resonnes, where the eletron lou mkes the trnsition etween inn out-of-phse osilltion with respet to the inient wve. In se of onventionl R sensing, it ws lrey shown tht these trnsitions n e proe y phse sensitive mesurements, whih show muh smller spetrl/ngulr footprint ompre to their intensity Corresponing uthor: kristof.loewijks@ime.e se ounterprts [3, 4]. Here we show tht using stnr spetrosopi ellipsometry mesurements, we n mesure similr phse jumps roun the enter frequeny of lolize surfe plsmon resonnes. For our two moel systems, we investigte the ngle- n polriztion epenent refletion spetr n the phse ifferene etween - n -polrize wves, using lokin mesurements. In this work we investigte lolize surfe plsmon resonnes in rnomly istriute gol nnoprtiles on top of ontinuous gol lyer n ieletri sper y spetrosopi ellipsometry. The investigte smple strutures re illustrte in Fig. 1 n onsist of glss sustrte overe with 100nm gol (Au) lyer, 50nm sili (io 2 ) sper n rnomly istriute Au nnoprtiles tht were frite using olloil lithogrphy [18, 19]. The nnorings (Fig 1 n ) hve n outer imeter of 150 nm n height of 60 nm while the less ensely pke nnoisks (Fig 1 n ) hve imeter of 140 nm n height of 30 nm. The verge (enter-to-enter) inter-prtile istne is 250 nm for nnorings n 350 nm for nnoisks. For oth smple strutues, 10 nm Ti hesion lyer ws sputtere on top of glss sustrte, followe y 100 nm Au lyer n 50 nm io 2 sper lyer. For the gol nnorings self-ssemle monolyer of 100 nm olystyrene () es ws eposite on top n susequently overe with 30 nm of Au y sputter eposition. The nnorings re rete y iretionl ion em milling, opening up the top perture of the nnorings rn removing ny gol in etween the nnoprtiles [18]. For the gol nnoisks srifiil MMA lyer is spinote on top of the Au n io 2 lyers. A self-ssemle monolyer of 140 nm es ws eposite on top n serves s templte for the eposition of 5 nm Au hr msk y evportion. The es re peele off using tpe n

2 2 susequently holes re forme in the MMA lyer elow y RIE oxygen plsm ething. In the finl steps, Au isks re eposite in the holes y evportion n the MMA resist is lifte off in etone [19]. By snning the ngle of iniene, the eletri ipole resonnes (Fig 1 g n j) in the nnoprtiles eome spetrlly etune for oth polriztion sttes. Both for - n -polrize wves, the eletri ipole in the nnoprtile ouples to n eletri qurupole in the omine nnoprtile/gol film omplex (Fig 1 f n i), whih gives rise to n inue mgneti ipole (Fig 1 h n k) perpeniulr to the eletri ipole in the nnoprtile. The ngle epenent spetrosopi ellipsometry mesurements were performe using ommeril GE5 [20] ellipsometer n home-uilt setup se on photo-elsti moultor (EM) [21]. For the GE5 setup, the polriztion of the inient em is moulte etween n y rotting polrizer, while for the EM-se setup, the polriztion is moulte etween liner n left- n right- irulr polriztion sttes. Both mesurement setups hve ifferent signlto-noise rtios in ifferent spetrl rnges, so epening on the spetrl position of the LR we hoose the setup tht performs est. All spetrosopi ellipsometry mesurements shown here were performe with the GE5 setup, exept for the refrtive inex sensing mesurements on gol rings in fig 5. The phse informtion is extrte y performing lokin mesurements t the moultion frequeny. The mesure quntities tn(ψ) n os( ) re relte y the min eqution of ellipsometry: ρ = R R = tn(ψ)exp(i ) = tn(ψ)(os( )+isin( )) (1) e f g h E E s θ k i j k FIG. 1: Overview of the smple struture, mesurement onfigurtion n the involve plsmoni moes. () n () hemti smple overview of 1µm 2 re of rings n isks. () n () nning eletron mirosope pitures of the ring n isk smples. le r 500nm. (e) Mesurement onfigurtion for the two polriztion sttes. (f) n (i) imulte hrge plots t resonne for rings n isks. (g) n (j) imulte eletri fiel intensity t the eletri ipole resonne for rings n isks. (h) n (k) imulte inue mgneti ipole for rings n isks. n represent the mplitue refletion rtio etween n (tn(ψ)) n the phse ifferene etween the reflete signls for the 2 polriztions (reflete in the os( ) vlue). In tht wy, the ngle epenene of the plsmon resonnes n the extremely nrrow phse trnsitions t their entrl frequeny oul e proe experimentlly. By properly esigning the nnoprtile shpe n ensity, the interprtile oupling n e tune resulting in two spetrlly slightly etune resonnes for - n -polrize inient light. An overview of the ngle epenent mesurements on the nnorings is given in figure 2. nels n show the intensity se refletion spetr for - n -polrize inient wves, while pnels n show the refletion rtio tn(ψ) n the phse ifferene os( ) etween the two polriztion sttes. With inresing inient ngle, the -resonne shows lue shift, while the -resonne shows re shift. These resonne shifts re reflete in the phse sensitive ellipsometry mesurements, in whih t the enter frequeny of the plsmon resonnes minimum n mximum in the refletion rtio (Fig 2 ), n pronoune phse ifferene etween n (Fig 2 ) is oserve. The ngle- n polriztion epenent optil response of our smples ws simulte using Comsol multiphysis [22] (figure 3). The ifferent spetr were lulte for squre lttie of rings with pith of 250 nm (mthe to the experimentl verge interprtile istne). By using perioi (Bloh) ounry onitions n snning ll the ngles involve for oth polriztions, the ngle epenent refletion n the ellipsometri prmeters were extrte. The reflete wves for - n -polrize wves were reore n their eletri n mgneti fiels were verge out over one unit ell, llowing to extrt the mplitue n phse in orer to evlute the vlues of tn(ψ) n os( ). A nie qulittive greement is otine, where the - resonne n -resonnes show the lue shift (Fig 3 ) n re shift (Fig 3 ) respetively, similr to the experimentl t. Contrry to the mesure t, the minimum of the refletion ip shows erese with inresing ngle of iniene. This ehvior n e ttriute to the rnom prtile istriution in our

3 3 FIG. 2: Angle epenent mesurement t for gol nnorings. () n () Mesure intensity se refletion spetr for - n -polriztions. () Mesure vlues of tn(ψ), the mplitue refletion rtio etween - n - polriztions. () Mesure vlues of os( ), with the phse ifferene etween oth polriztion sttes. smples, tht gives rise to inhomogeneous roening, whih is most pronoune for lrge ngles of iniene ue to inresing spot sizes. This explins why the mxim n minim in the refletion rtio (tn(ψ)) re not oserve t the lrgest ngle of iniene in the experimentl spetr, ontrry to the simulte t(fig 3 ). Interestingly, if we ompre the mgnitue of the phse ifferene etween n, we lerly oserve tht the lrgest trnsitions re oserve t the mxim n minim in the refletion rtio, whih our roun 45 o in the experiments (Fig 2 ), n t 75 o in simultions (Fig 3 ). imilr mesurements were performe for gol nnoisks, whih hve omprle sizes to the rings, ut re less ensely pke ue to ifferent frition prmeters. An overview of the ngle epenent mesurements for oth polriztions is given in figure 4. Both for - (Fig 4 ) n -polrize (Fig 4 ) wves, the eletri ipole resonnes re lue shifte ompre to the nnorings. With inresing ngle of iniene, for the -polriztion, minor lue shift is oserve, while the -resonne shows pronoune re shift. Both resonnes show muh more spetrl overlp ompre to the nnorings, whih results in totlly ifferent ehvior in their refletion rtio tn(ψ) (Fig 4 ). For smll ngles of iniene we oserve mximum in the refletion rtio t shorter wvelengths, while t lrger ngles of iniene the -resonne shifts to longer wvelengths with respet to the -resonne, resulting in similr spetr s for gol nnorings. If we tke loser looktthephseiffereneetweenn(fig4), we oserve gin two phse jumps, one for eh polriztion stte, whih re smller in mgnitue ompre to the FIG. 3: Agle epenent simultion t for perioi rry of gol nnorings. () n () imulte intensity se refletion spetr for - n -polriztions. () imulte vlues of tn(ψ), the refletion rtio etween - n - polriztions. () imulte vlues of os( ), with the phse ifferene etween oth polriztion sttes. nnorings. These smller phse jumps n e ttriute to the inrese spetrl overlp for the two polriztion sttes, whih results in smller overll phse ifferene. FIG. 4: Angle epenent mesurements on gol nnoisks. Refletion spetr for - () n -polriztion (). () Refletion rtio tn(ψ). () hse ifferene os( ). For the two nnoprtile geometries, we hve illustrte tht we n lerly ientify the phse trnsitions t the LR frequeny for the ifferent polriztion sttes. Now we wnt to tke loser look t the plsmon moes involve n the ominting inter-prtile oupling mehnism. For oth polriztion sttes n eletri ipole is exite in the nnoprtile (Figure 1 g n j), whih shows very ro linewith (roun 140 nm for rings n 100 nm for isks). This

4 4 eletri ipole resonne ouples iretly(-polriztion) or pitively (-polriztion) to n eletri qurupole moe in the omine nnoprtile/gol film omplex (Figure 1 f n i). The eletri qurupole moe lso results in n inue mgneti ipole moment (Figure 1 h n k), whih is ligne perpeniulr to the eletri ipole in the nnoprtiles. By vrying the ngle of iniene n the polriztion, oth the oupling effiieny to the ifferent moes n the phse retrtion re snne, resulting in spetrl shifts of the plsmon resonnes. The inter-prtile oupling is meite y eletri ipole/qurupole oupling n mgneti ipole oupling, oth in the longituinl n trnsversl iretion. If the sttere fiels of the nnoprtile re in phse(out of phse) with the inient wve in the neigoring prtiles, the lol resonne will e enhne (oppose) n show lue (re) shift. FIG. 5: Refrtive inex sensing mesurements on gol nnoisks n nnorings for 45 o iniene. () Comprison of phse-sensitive mesurements (lk) n intensity se mesurements (re) on gol nnorings in ir, illustrting rmti line with reution in the phse-ifferene etween n. () Refrtive inex sensing mesurements on isks n isks with vrile onentrtions of glyerol in wter. In next step, the smples were mounte in flowell to perform refrtive inex sensing mesurements with ifferent onentrtions of glyerol in wter. An overview of the sensing mesurements is presente in figure 5. In pnel, the linewith reution for the phsesensitive mesurements with respet to the intensityse refletion mesurements is lerly illustrte for nnorings in ir. At the ip of the LR for oth polriztion sttes, nrrow phse trnsition is oserve in os( ). nel shows the wvelength shift s funtion of inresing glyerol onentrtions in wter. Here we use n inient ngle of 70 o, suh tht the inient ngle t the smple/solution interfe mthes the 45 o inient ngle of the referene mesurement in ir. As expete, with inresing refrtive inex, we oserve re-shift of oth resonne positions. Different plsmon moes re exite for - n -polriztion, whih show ifferent sensitivities to the refrtive inex. Moreover, epening on the spetrl position of oth resonnes n their spetrl overlp, the shpe of the os( ) signls n hnge rmtilly for the ifferent nnoprtiles, whih n e lerly oserve when ompring the spetr for isks n rings. In orer to lulte the figure of merit of the 2 moel systems, we lulte TABLE I: Comprison etween intensity- n phse-sensitive refletion mesurements on gol nnoisks n nnorings t n iniene ngle of 45 o. Disks Rings λ/n (nm/riu) FWHM refletion (nm) FOM refletion FWHM os( ) (nm) FOM os( ) FOM inrese rtio the sensitivities for the omine phse-sensitive os( ) signls of the - n -moes n ompre these with the mplitue se refletion t. In the overview presente in tle 1, we n lerly see tht the phse sensitive mesurements show muh nrrower line withs ompre to their intensity-se ounterprts. Due to this rmti erese in the spetrl footprint, the FOM oul e ooste 3.9 n 6.1 times up to 8.3 n 16.5 for nnoisks n nnorings respetively. To summrize, we hve shown tht the FOM for refletion se refrtive inex sensing n e lrgely inrese y mesuring the phse of the reflete em inste of its intensity only. Aroun the enter frequeny of the LR, the eletron lou mkes the trnsition of in- to out-of-phse osilltion with respet to the riving fiel, whih is n intrinsi property of plsmon resonne. This phse jump shows muh smller spetrl footprint thn the intensity se refletion mesurements, resulting in muh nrrower line withs n lrgely inrese vlues of the FOM. For the nnoprtiles investigte in this work, we mnge to inrese the FOM up to 6 times for intrinsilly ro ipole resonnes. Aknowlegements: The uthors thnk E. Vnenpls n J. Feyerts for tehnil support. K.L. Aknowleges IWT Flners n.v.d. knowleges FWO Flners for finnil support. [1] Ho F., Norlner., onnefru Y., Vn Dorpe., Mier. A., Tunility of urint Dipolr n Fno-Type lsmon Resonnes in Metlli Ring/Disk Cvities: Implitions for Nnosle Optil ensing AC Nno 3, pp (2009) [2] Verellen N., Vn Dorpe., Hung C., Loewijks K., Vnenosh G. A. E., Lge L. n Moshhlkov V.V., lsmon Line hping using Nnorosses for High sensitivity LR ensing. Nno Lett. 11 (2), pp (2011)

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