Peer-reviewed publications of Dr. Niclas Roxhed. H-index: 15

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1 Peer-reviewed publications of Dr. Niclas Roxhed. H-index: 15 Journal publications in refereed international journals: [1] P. Nadeau, D. El-Damak, D. Glettig, Y. L. Kong, S. Mo, C. Cleveland, L. Booth, N. Roxhed, R. Langer, A. P. Chandrakasan, G. Traverso, Prolonged energy harvesting for ingestible devices, Nature Biomed. Eng, 1, 0022, [2] F. Ribet, G. Stemme, N. Roxhed, Ultra-miniaturization of a planar amperometric sensor targeting continuous intradermal glucose monitoring, Biosens. Bioelect. vol. 90, pp , [3] M. Rajabi, N. Roxhed, R. Z. Shafagh, T. Haraldsson, A. C. Fischer, W. van der Wijngaart G. Stemme, F. Niklaus, Flexible and Stretchable Microneedle Patches with Integrated Rigid Stainless Steel Microneedles for Transdermal Biointerfacing, PlosONE, [4] G. Lenk, J. Hansson, O. Beck, N. Roxhed, The effect of drying on the homogeneity of DBS, Bioanalysis, Vol. 7, No. 16, Pages , [5] G. Lenk, S. Sandkvist, A. Pohanka, G. Stemme, O. Beck, N. Roxhed, A disposable sampling device to collect volume-measured DBS directly from a fingerprick onto DBS paper, Bioanalysis, Vol. 7, No. 16, Pages , [6] Gatty, H.K., Stemme, G., Roxhed, N., A wafer-level liquid cavity integrated amperometric gas sensor with ppb-level nitric oxide gas sensitivity, Vol. 25, No. 10, J. Micromech. Microeng,, [7] Schmidt T., Zhang M., Sychugov I., Roxhed N., Linnros J. Nanopore arrays in a silicon membrane for parallel single-molecule detection: fabrication, Nanotechnology 26, [8] A. C. Fischer, F. Forsberg, M. Lapisa, S.J. Bleiker, G. Stemme, N. Roxhed and F. Niklaus, Integrating MEMS and ICs, Microsystems & Nanoengineering 1, 15005, [9] Gatty, H.K., Leijonmarck, S., Antelius, M., Stemme, G., Roxhed, N., An amperometric nitric oxide sensor with fast response and ppb-level concentration detection relevant to asthma monitoring, Sensors and Actuators, B: Chemical, 209, pp , [10] Forsberg, F., Lapadatu, A., Kittilsland, G., Martinsen, S., Roxhed, N., Fischer, A.C., Stemme, G., Samel, B., Ericsson, P., Hoivik, N., Bakke, T., Bring, M., Kvisteroy, T., Ror, A., Niklaus, F. CMOS-integrated Si/SiGe quantum-well infrared microbolometer focal plane arrays manufactured with very large-scale heterogeneous 3-d integration, IEEE J. Sel. Topics Quantum Electronics, 21 (4), art. no , 2015 [11] Bleiker, S. J., Fischer, A. C., Shah, U., Somjit, N., Haraldsson, T., Roxhed, N., Oberhammer, J., Stemme, G., Niklaus, F., High-Aspect-ratio through silicon vias for high-frequency application fabricated by magnetic assembly of gold-coated nickel wires, IEEE Trans. Components, Packaging and Manufacturing Techno, 5 (1), art. no , pp , 2015 [12] Zhang, M., Schmidt, T., Sangghaleh, F., Roxhed, N., Sychugov, I., Linnros, J. Oxidation of nanopores in a silicon membrane: Self-limiting formation of sub-10 nm circular openings, Nanotechnology, 25 (35), art. no , 2014 [13] S. Johansson, A. Eklund, J. Malm, G. Stemme, N. Roxhed. A MEMS-based passive hydrocephalus shunt for body position controlled intracranial pressure regulation, Biomed Microdevices, [14] M. Hultström, N. Roxhed, L. Nordquist, Intradermal insulin delivery: A promising future for diabetes management, J. Diabetes Sci Tech., 8 (3), pp [15] H.K. Gatty, S. Schröder, F. Niklaus, N. Roxhed, G. Stemme, Temporary Wafer Bonding and Debonding for 3D Integration Using an Electrochemically Active Polymer Adhesive, ECS J. Solid State Sci. Technol., vol. 3, issue 5, [16] S. Johansson, G. Stemme, N. Roxhed, A MEMS-based Passive Air Flow Regulator for Handheld Breath Diagnostics, Sens. & Actuators A Physical, 215, pp , 2014 [17] G. Pardon, H. K. Gatty, G. Stemme, W. van der Wijngaart, N. Roxhed, Pt-Al2O3 dual-layer ALD coating in high aspect ratio nanopores, Nanotechnology , Page 1 of 6

2 [18] F. Forsberg, N. Roxhed, A.C. Fischer, B. Samel, P. Ericsson, N. Hoivik, A. Lapadatu, M. Bring, G. Kittilsland, G. Stemme, F. Niklaus, Very large scale heterogeneous integration (VLSHI) and wafer-level vacuum packaging for infrared bolometer focal plane arrays, Infrared Phys. and Technol., 60, pp , 2013 [19] M. Antelius, A. Fischer, N. Roxhed, G. Stemme, F. Niklaus, "Wafer-level Vacuum Sealing by Coining of Wire Bonded Gold Bumps", IEEE Journal of MicroElecroMechanical Systems (JMEMS), no 99, 2013 [20] A.C. Fischer, J.G. Korvink, N. Roxhed, G. Stemme, U. Wallrabe, F. Niklaus, Wire Bonding Creates New Opportunities for Microsystem Integration, J. Micromech. Microeng , [21] F. Forsberg, F. Saharil, T. Haraldsson, N. Roxhed, G. Stemme, W. Van Der Wijngaart, F. Niklaus, A comparative study of the bonding energy in adhesive wafer bonding, J. Micromech. Microeng , 2013 [22] S.J. Bleiker, A.C. Fischer, N. Somjit, T. Haraldsson, N. Roxhed, G. Stemme, F. Niklaus, High Aspect Ratio Through Silicon Vias (TSVs) for High-Frequency Applications Fabricated by Automated Magnetic Assembly of Gold-Coated Nickel Wires, J. Micromech. Microeng , [23] F. Forsberg, N. Roxhed, T. Haraldsson, Y. Liu, G. Stemme, F. Niklaus, Batch Transfer of Radially Expanded Die Arrays for Heterogeneous Integration Using Different Wafer Sizes, IEEE J. of Microelectromechanical Systems, Vol.21, No.5, pp , [24] M. Antelius, A. Fischer, F. Niklaus, G. Stemme, N. Roxhed, "Hermetic integration of liquids using high-speed stud bump bonding for cavity sealing at wafer level," J. Micromech. Microeng , 2012 (Number of citations: Not found) [25] A.C. Fischer, H.S.J Bleiker, T. Haraldsson, N. Roxhed, G. Stemme, F. Niklaus, Very High Aspect Ratio Through-Silicon Vias (TSVs) Fabricated Using Automated Magnetic Assembly of Nickel Wires, Journal of Micromechanics and Microengineering, Vol.22, pp , [26] A. C. Fischer, M. Grange, N. Roxhed, R. Weerasekera, D. Pamunuwa, G. Stemme and F. Niklaus, Wire-bonded through-silicon vias with low capacitive substrate coupling, J. Micromech. Microeng , 2011 (Number of citations: 5) [27] M. Sterner, N. Roxhed, G. Stemme, J. Oberhammer, Electrochemically assisted maskless selective removal of metal layers for three-dimensional micromachined SOI RF MEMS transmission lines and devices, IEEE Journal of MicroElecroMechanical Systems (JMEMS), vol. 20, (no. 4,) pp , 2011 (Number of citations: 1) [28] M. Sterner, N. Roxhed, G. Stemme, J. Oberhammer, Static zero-power-consumption coplanar-waveguide integrated DC-to-RF metal-contact MEMS switches in two-port and three-port configuration IEEE Transactions on Electron Devices, vol. 57 pp , (jul) 2010 (Number of citations: 6) [29] Niklaus, F., Decharat, A., Forsberg, F., Roxhed, N., Lapisa, M., Populin, M., Zimmer, M., Lemm, L., Stemme, G., Wafer bonding with nano-imprint resists as sacrificial adhesive for fabrication of silicon-on-integrated-circuit (SOIC) wafers in 3D integration of MEMS and ICs, Sensors and Actuators, A: Physical, 154(1), , 2009 (Number of citations: 11) [30] N. Roxhed, P. Griss, G. Stemme, "Membrane-sealed Hollow Microneedles and Related Administration Schemes for Transdermal Drug Delivery," Biomedical Microdevices, vol. 10, (no. 2,) pp , (apr) 2008 (Number of citations: 21) [31] N. Roxhed, B. Samel, L. Nordquist, P. Griss, G. Stemme, "Painless Drug Delivery through Microneedle-based Transdermal Patches featuring Active Infusion," IEEE Transactions on Biomedical Engineering, vol. 55 pp , (mar) 2008 (Number of citations: 24) [32] N. Roxhed, T. C. Gasser, P. Griss, G. A. Holzapfel, G. Stemme, "Penetration-enhanced Ultrasharp Microneedles and Prediction on Skin Interaction for Efficient Transdermal Drug Delivery," IEEE Journal of MicroElecroMechanical Systems (JMEMS), vol. 16, (no. 6,) pp , (dec) 2007 (Number of citations: 20) [33] L. Nordquist, N. Roxhed, P. Griss, G. Stemme, "Novel Microneedle Patches for Active Insulin Delivery are Efficient in Maintaining Glycaemic Control: An Initial Comparison with Page 2 of 6

3 Subcutaneous Administration," Pharmaceutical Research, vol. 24, (no. 7,) pp , (Jul) 2007 (Number of citations: 35) [34] N. Roxhed, P. Griss., G. Stemme, "A method for tapered deep reactive ion etching using a modified Bosch process," J. Micromech. Microeng., vol. 17, (no. 5,) pp , (may) 2007 (Number of citations: 10) [35] N. Roxhed, S. Rydholm, B. Samel, W. van der Wijngaart, P. Griss, G. Stemme, "A compact, low-cost microliter-range liquid dispenser based on expandable microspheres," Journal of Micromechanics and Microengineering pp , (dec) 2006 (Number of citations: 8) [36] J. Melin, G. Gimenéz, N. Roxhed, W. van der Wijngaart and G. Stemme, A Fast Passive and Planar Liquid Sample Micromixer, Lab on a Chip, 2004, 3, (Number of citations: 33) [37] J. Melin, G. Gimenéz, N. Roxhed, P. Griss, W. van der Wijngaart and G. Stemme, A liquidtriggered liquid microvalve for on-chip flow control, Sensors and Actuators B: Chemical, vol. 100, no 3, p , 2004 (Number of citations: 32) Papers at peer-reviewed international scientific conferences: [38] X. Wang, G. Stemme, N. Roxhed, High aspect ratio silicon field emitter arrays (FEAs) as miniaturized stable electron source for catheter-based radiotherapy, To appear, Proc. MEMS 2017, Las Vegas, NV, USA, [39] G. Lenk, J. Hansson, W. van der Wijngaart, G. Stemme, N. Roxhed, Capillary driven and volume-metred blood-plasma separation. Proc. Transducers 2015, Anchorage, USA, [40] G. Lenk, G. Stemme, N. Roxhed, Dry reagent storage in dissolvable films and liquid triggered release for programmed multi-step lab-on-chip-diagnostics. Proc. MEMS 2015, Estoril, Portugal, [41] Forsberg, F., Roxhed, N., Colinge, C., Stemme, G., Niklaus, F. Integration of distributed Ge islands onto Si wafers by adhesive wafer bonding and low-temperature Ge exfoliation Proc. MEMS 2015, Estoril, Portugal, [42] G. Lenk, G. Stemme, N. Roxhed, Delay valving in capillary driven devices based on dissolvable thin films,. Proc. µtas 2014, San Antonio, USA, [43] M. Rajabi, A. C. Fischer, N. Roxhed, G. Stemme, F. Niklaus, Magnetic Assembly of 31- Gauge Hypodermic Needles into a Microneedle Array, 3 rd Int. conf. on Microneedles, Baltimore, USA, [44] S. Johansson, G. Stemme, N. Roxhed, A Novel Constant Flow Regulation Principle for Compact Breath Diagnostics, Proc. MEMS 2014, San Francisco, USA, [45] G. Lenk, A. Pohanka, G. Stemme, O. Beck, N. Roxhed. A Disposable Chip Enabling Metering In Dried Blood Spot Sampling. Proc. µtas 2013, Freiburg, Germany, [46] S. Johansson, A. Eklund, J. Malm, G. Stemme, N. Roxhed, A MEMS-based passive hydrocephalus shunt with adaptive flow characteristics, Proceedings IEEE Int. Conf. on Solid- State Sensors, Actuators, and Microsystems (Transducers), [47] S. Johansson, G. Stemme, N. Roxhed, A Compact Passive Air Flow Regulator for Portable Breath Diagnostics, Proc. MEMS 2013, Taipei, Taiwan, oral talk, [48] H.K. Gatty, S. Leijonmarck, M. Antelius, G. Stemme, N. Roxhed, A ppb-level, Miniaturized Fast Response Amperometric Nitric Oxide Sensor For Asthma Diagnosis,Proc. MEMS 2013, Taipei, Taiwan, [49] H.K. Gatty, F. Niklaus, G. Stemme, N. Roxhed Temporary Wafer Bonding and Debonding by Electrorelease for Thin Wafer Handling in 3D Integration, Proc. MEMS 2013, Taipei, Taiwan, [50] F. Forsberg, F. Saharil, G. Stemme, N. Roxhed, W. van der Wijngaart, T. Haraldsson, F. Niklaus, Low Temperature Adhesive Wafer Bonding Using OSTE(+) for Heterogeneous 3D MEMS Integration, Proc. MEMS 2013, Taipei, Taiwan, Page 3 of 6

4 [51] F. Niklaus, M. Lapisa, S.J. Bleiker, V. Dubois, N. Roxhed, A.C. Fischer, F. Forsberg, G. Stemme, D. Grogg, M. Despont, Wafer-Level Heterogeneous 3D Integration for MEMS and NEMS, Proc. LTB-3D 2012, pp , Tokyo, Japan. (Invited Presentation) [52] G.B. Malm, M. Kolahdouz, F. Forsberg, N. Roxhed, F. Niklaus, Micromechanical Process Integration and Material Optimization for High Performance Silicon-Germanium Bolometers, Proc. MRS 2012, Vol.1437, San Francisco, USA. (Invited Presentation) [53] A.C. Fischer, S.J. Bleiker, N. Somjit, N. Roxhed, T. Haraldsson, G. Stemme and F. Niklaus, High Aspect Ratio TSVs Fabricated by Magnetic Self-Assembly of Gold-Coated Nickel Wires, Proc. ECTC 2012, pp , San Diego, USA. [54] F. Forsberg, N. Roxhed, T. Haraldsson, G. Stemme, F. Niklaus, Use of Expandable Handle Substrate for Wafer-Level Transfer of Dies in Heterogeneous Integration and Packaging of MEMS, Proc. WaferBond 2011, pp , Chemnitz, Germany. [55] F. Forsberg, A.C. Fischer, G. Stemme, N. Roxhed, F. Niklaus, P. Ericsson, B. Samel, Highperformance infrared micro-bolometer arrays manufactured using very large scale heterogeneous integration, 16th Int. Conf. on Optical MEMS and Nanophotonics, OMN2011, (Invited Presentation) [56] Per S. Ericsson, Andreas Fischer, Fredrik Forsberg, Niclas Roxhed, Björn Samel, Susan Savage, Göran Stemme, Stanley Wissmar, Olof Öberg, Frank Niklaus, "Toward 17µm pitch heterogeneously integrated Si/SiGe quantum well bolometer focal plane arrays," Proc. SPIE Volume 8012, 2011 [57] Mikael Antelius, Andreas Fischer, Niclas Roxhed, Göran Stemme, Frank Niklaus, "Roomtemperature wafer-level vacuum sealing by compression of high-speed wire bonded gold bumps," Proceedings IEEE International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers), 2011 [58] F. Forsberg, N. Roxhed, G. Stemme, F. Niklaus, Heterogeneous integration technology for combination of different wafer sizes using an expandable handle substrate, Proc. IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp , (Number of citations: Not found) [59] Mikael Antelius, Andreas Fischer, Frank Niklaus, Göran Stemme, Niclas Roxhed, "Hermetic integration of liquids in MEMS by room temperature, high-speed plugging of liquid-filled cavities at wafer level," Proceedings IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp , (Number of citations: 1) [60] Andreas Fischer, Niclas Roxhed, Tommy Haraldsson, Nora Heinig, Göran Stemme, Frank Niklaus, "Fabrication of High Aspect Ratio Through Silicon Vias (TSVs) by Magnetic Assembly of Nickel Wires," Proceedings IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp , 2011, (Number of citations: Not found) [61] Fischer, A., Forsberg, F., Lapisa, M. A., Roxhed, N., Stemme, G., Zimmer, F., Niklaus, F. (2010). Heterogeneous integration for optical MEMS. Paper presented at the rd Annual Meeting of the IEEE Photonics Society, PHOTINICS 2010, (Number of citations: Not found) [62] N. Roxhed, Microneedle Fabrication and Challenges on a New Drug Administration Standard, 1 st Int. Conf. on Microneedles, Atlanta, USA, May 2010, Invited talk, (Number of citations: Not found) [63] Niclas Roxhed, Frank Niklaus, Andreas Fischer, Fredrik Forsberg, Per Ericsson, Anders Elfving, Kaiying Wang, Nils Hoivik, Low-Cost Uncooled Microbolometers for Thermal Imaging, SPIE Photonics Europe Conference (Number of citations: 1) [64] Andreas Fischer, Niclas Roxhed, Göran Stemme, Frank Niklaus, Low-Cost Through Silicon Vias (TSVs) With Wire-Bonded Metal Cores And Low Substrate-Coupling, Proceedings IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2010 (Number of citations: 2) [65] Andreas Fischer, Martin Lapisa, Niclas Roxhed, Göran Stemme, Frank Niklaus, Selective Electroless Nickel Plating On Oxygen-Plasma-Activated Gold Seed Layers For The Fabrication Of Low Contact Resistance Vias And Microstructures, Proceedings IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2010 (Number of citations: 1) Page 4 of 6

5 [66] Niclas Roxhed, Frank Niklaus, Adhesive Wafer Bonding and Applications, Proceedings of Waferbond'09, (Number of citations: Not found) [67] Forsberg, F., Roxhed, N., Ericsson, P., Wissmar, S., Niklaus, F., Stemme, G. Highperformance quantum-well silicon-germanium bolometers using IC-compatible integration for low-cost infrared imagers TRANSDUCERS th International Conference on Solid- State Sensors, Actuators and Microsystems, pp , 2009 (Number of citations: 3) [68] M. Sterner, N. Roxhed, G. Stemme, J. Oberhammer, "Maskless selective electrochemically assisted wet etching of metal layers for 3D micromachined SOI RF MEMS devices," Proceedings IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2008 (Number of citations: 5) [69] M. Sterner, N. Roxhed, G. Stemme, J. Oberhammer, "Mechanically Tri-Stable SPDT Metal- Contact MEMS Switch Embedded in 3D Transmission Line," Proceedings European Microwave Conference, 2007 (Number of citations: 2) [70] N. Roxhed, P. Griss, G. Stemme, "Tapered deep reactive ion etching: method and characterization," Proceedings IEEE International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers), 2007 (Number of citations: 1) [71] T. Frisk, N. Roxhed, G. Stemme, "MEMS for Medical Technology Applications," SPIE Photonics West: MOEMS - MEMS Conference (San José, USA), 2007, Invited Plenary (G. Stemme) (Number of citations: Not found) [72] M. Sterner, N. Roxhed, G. Stemme, J. Oberhammer, "Coplanar-waveguide embedded mechanically-bistable DC-to-RF MEMS switches," Proceedings IEEE MTT-S International Microwave Symposium, 2007 (Number of citations: 4) [73] M. Sterner, N. Roxhed, G. Stemme, J. Oberhammer, "Mechanically bi-stable in-plane switch with dual-stiffness actuators," Proceedings IEEE International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers), 2007 (Number of citations: 1) [74] N. Roxhed, B. Samel, L. Nordquist, P. Griss, G. Stemme, "Compact, Seamless Integration of Active Dosing and Actuation with Microneedles for Transdermal Drug Delivery," Proceedings IEEE International Conference on Micro Electro MechanicalSystems (MEMS), 2006 (Number of citations: 1) [75] N. Roxhed, P. Griss, G. Stemme, Generic Leak-free Drug Storage and Delivery for Microneedle-based Systems, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Miami, p , 2005 (Number of citations: 3) [76] N. Roxhed, P. Griss, G. Stemme, Reliable in-vivo penetration and transdermal injection using ultra-sharp hollow microneedles Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05, Seoul, v 1, 2005, p (Number of citations: 4) [77] Soren Balslev, Niclas Roxhed, Patrick Griss, Göran Stemme, Anders Kristensen, Microfluidic Dye Laser With Compact, Low-Cost Liquid Dye Dispenser, International Conference on Miniaturized Systems for Chemistry and Life Sciences (Micro Total Analysis Systems), 2004 (Number of citations: Not found) [78] N. Roxhed, S. Rydholm, B. Samel, W. van der Wijngaart, P. Griss, G. Stemme, Low cost device for precise microliter range liquid dispensing, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Maastricht, p , 2004 (Number of citations: 6) [79] Jessica Melin, Guillem Gimenéz, Niclas Roxhed, Wouter van der Wijngaart, Göran Stemme, A 2-Dimensional Passive Micromixer, International Conference on Miniaturized Systems for Chemistry and Life Sciences (Micro Total Analysis Systems), 2003 (Number of citations: Not found) [80] J. Melin, G. Gimenéz, N. Roxhed, P. Griss, W. van der Wijngaart, G. Stemme, A Liquid- Triggered Liquid Microvalve, IEEE International Solid-State Sensors and Actuators Conference, 8-12 June 2003, (TRANSDUCERS 03), Boston, 2003 (Number of citations: Not found) Thesis Page 5 of 6

6 [81] N. Roxhed, A Fully Integrated Microneedle-based Transdermal Drug Delivery System, PhD Thesis, School of Electrical Engineering, KTH Royal Institute of Technology, Stockholm, Downloaded more than 8500 times from the KTH Library. Patents [82] Andreas Fischer, Göran Stemme, Frank Niklaus, Niclas Roxhed and Aerocrine AB, Method for plugging a hole and a plugged hole, PCT application [83] Hithesh K. Gatty, Göran Stemme, Niclas Roxhed, Nitric oxide sensor, Swedish, US, Japanese, Australian and Canadian patent applications, [84] Staffan Johansson, Göran Stemme, Jan Malm, Anders Eklund, Niclas Roxhed. A Cerebrospinal Fluid Shunt for Treatment of Hydrocephalus,, PCT application, 2013 [85] Niclas Roxhed, Micromachined fluid flow regulating device, US patent application, [86] Mina Rajabi, Andreas Fischer, Göran Stemme, Frank Niklaus, Niclas Roxhed, Micro-needle array and method of forming a micro-needle array, Swedish patent application, [87] Gabriel Lenk, Göran Stemme, Olof Beck, Niclas Roxhed, A Microfluidic Device, Use and Methods, PCT patent application, 2014 [88] Staffan Johansson, Göran Stemme, Niclas Roxhed, Fluid flow regulating device, PCT patent application, [89] Gabriel Lenk, Göran Stemme, Niclas Roxhed, A Method for Separating Blood Plasma and Metering Thereof, PCT patent application, [90] Federico Ribet, Göran Stemme, Niclas Roxhed, Glucose micro sensor, European patent application EP , 2016 [91] Xioajing Wang, Göran Stemme, Niclas Roxhed, A Stable Field Emission Source For Generating X-ray, Swedish patent application, 2017 [92] P. Nadeau, D. El-Damak, D. Glettig, Y. L. Kong, S. Mo, C. Cleveland, L. Booth, N. Roxhed, R. Langer, A. P. Chandrakasan, G. Traverso, Ingestible Power Harvesting Device, And Related Applications, U.S. Provisional Application No.: 15/498,268, 2017 [93] Alex G. Abramson,Ester Caffarel Salvador, Robert S Langer, C. Giovanni Traverso, Niclas Roxhed, Components With High Api Loading, U.S. Provisional Application No.: 62/507,665, 2017 Page 6 of 6

Unconventional Micro-Manufacturing and Integration Technologies. Frank Niklaus

Unconventional Micro-Manufacturing and Integration Technologies Frank Niklaus Outline Background Micro-Manufacturing and Integration Research Heterogeneous 3D Integration for MEMS & NEMS Integration and