ESS 5855 Surface Engineering for. MicroElectroMechanicalechanical Systems. Fall 2010
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1 ESS 5855 Surface Engineering for Microelectromechanical Systems Fall 2010 MicroElectroMechanicalechanical Systems Miniaturized systems with integrated electrical and mechanical components for actuation and sensing applications Physical World MEMS Sensors Actuators Microelectronics Texas Instruments, Digital Micromirror Device Digital Light Processor (DLP)
2 Introduction Scaling Swimming Introduction Walking on water is possible but swimming is not fun
3 Outline Introduction (3) Capillarity (6) Thermodynamics (3) Electrical Double Layers (3) Electrokinetic Phenomena (3) van der Waals Forces (3) Colloids and Colloidal Stability (3)
4 Outline Surfactants and Interfacial Phenomena (3) Characterization (3) MEMS Reliability (3) BioMEMS (3) Flow and Droplet Manipulation (3) Self Assembly (3) Capillarity Surface tension Young-Laplace equation
5 Contact angle Capillarity Electrical Double Layers
6 Electrokinetic Phenomena Electrophoresis Electroosmosis van der Waals Forces Intermolecular attractive forces
7 Colloids Surfactants
8 Surfactants and Interfacial Phenomena Hydrophilic head Hydrophobic tail Lipid Bilayer Cavity Surface Treatment (a). Au on glass side+ SAMs θ=110.7 Hydrophobic SAMs* θ=56.7 Hydrophilic SAMs (-COOH) (b) Au on micro posts θ=109.9 dia: 60μm pitch:40μm θ=73.8 dia:80μm Pitch: 180μm (c) Au on micro posts +SAMs θ=143.6 Hydrophobic SAMs* dia: 60μm pitch:40μm θ=12.4 Hydrophilic SAMs (-COOH) dia:80μm Pitch: 180μm
9 Controlled Interfaces AFM It consists of a sensor that responds to a force and a detector that measures the sensor s response
10 BioMEMS MicroElectroMechanicalechanical Systems Miniaturized systems with integrated electrical and mechanical components for actuation and sensing applications Physical World MEMS Sensors Actuators Microelectronics Texas Instruments, Digital Micromirror Device Digital Light Processor (DLP)
11 Liquid Manipulation Massively parallel manipulation of single cells and microparticles using optical images
12 Self Assembly
13 Current Status of Surface Related MEMS Research MEMS Abstracts 298 Accepted 75 Oral presentations
14 MEMS Abstracts 279 Accepted 47 Oral presentations MEMS Abstracts 267 Accepted 43 Oral presentations
15 MEMS Abstracts 221 Accepted 43 Oral presentations MEMS Abstracts 236 Accepted 42 Oral presentations
16 Transducers Abstracts 600 Accepted 220 Oral presentations Transducers Abstracts 514 Accepted 199 Oral presentations
17 MicroTAS Abstracts 660 Accepted 65 Oral presentations MicroTAS Abstracts (980) 539 Accepted (580) 66 Oral presentations
18 Classification Design, Simulation, and Theoretical Concepts with Experimental Verification Materials and Device Characterization Fabrication and Packaging Technologies Biomedical/Chemical Micro Sensors and Systems Mechanical Sensors and Systems Micro-Actuators Micro-Fluidic Components and Systems Physical MEMS (Optical, Thermal, Magneto) RF MEMS Nanoelectromechanical Devices and Systems Power MEMS & Energy Harvesting Most Popular Keywords RF MEMS Optical MEMS Resonator(s) CMOS MEMS 6-7, Microswitch 7 Actuator DNA 6, Gyroscope 7-6 Microfluidic(s) Drug delivery 6, Carbon Nanotube - 6
19 Surface Related Keywords Surface tension Stiction Self-assembly Electro-phoresis/-osmosis Electrowetting Dielectrophoresis Droplet -8-3 Particles Parylene - 8, PDMS - 6 Self Assembly and Packaging
20 TOWARDS OPTIMAL DESIGNS FOR SELF- ALIGNMENT IN SURFACE TENSION DRIVEN MIRCO-ASSEMBLY
21 SEQUENTIAL SELF-ASSEMBLY BY CONTROLLING INTERACTIVE FORCES BETWEEN MICROPARTICLES
22
23 NON-ROBOTIC FABRICATION OF PACKAGED MICROSYSTEMS BY SHAPE-AND-SOLDER- DIRECTED SELF-ASSEMBLY
24 SELF-ASSEMBLY OF MEMS COMPONENTS IN AIR ASSISTED BY DIAPHRAGM AGITATION FROM MICRO-PATTERNS TO NANO- STRUCTURES BY CONTROLLABLE COLLOIDAL AGGREGATION AT AIR-WATER INTERFACE
25 A 3D BIOLOGICAL FILTRATION MATRIX USING SELF-ASSEMBLED MICROSPHERES INSIDEMICROCHANNELS AND GELATIN SACRIFICIAL LAYER
26 Cell and Particle Handling A MICROFLUIDIC DEVICE FOR ELECTROFUSION OF BIOLOGICAL MEMBRANES
27 LIPID BILAYER MICROCHAMBERS: AN OPTICAL DETECTION SYSTEM FOR MEMBRANE TRANSPORT A CONTINUOUS CELL SEPARATION CHIP USING HYDRODYNAMIC DIELECTROPHORESIS PROCESS
28 MICROVISON-ACTIVATED AUTOMATIC OPTICAL MANIPULATOR FOR MICROSCOPIC PARTICLES
29
30 Optical MEMS LIQUID LENS TECHNOLOGY: PRINCIPLE OF ELECTROWETTING BASED LENSES AND APPLICATIONS TO IMAGING
31 Electrowetting-Based Displays: Bringing Microfluidics Alive On-Screen TUNABLE MICRODOUBLET LENS ARRAY
32
33 BioMedical Devices
34 PARYLENE FLEXIBLE NEURAL PROBE WITH MICRO FLUIDIC CHANNEL COMPACT, SEAMLESS INTEGRATION OF ACTIVE DOSING AND ACTUATION WITH MICRONEEDLES FOR TRANSDERMAL DRUG DELIVERY
35 DETACHABLE SILICON MICRONEEDLE STAMPS FOR ALLERGY SKIN PRICK TESTING NANOMECHANICAL PROTEIN DETECTORS USING ELECTROTHERMAL NANO-GAP ACTUATORS
36 Actuators ENHANCED ELECTRO-OSMOTIC PUMPING WITH LIQUID BRIDGE AND FIELD EFFECT FLOW RECTIFICATION
37 NOVEL STRUCTURE FOR PASSIVE CO2 DEGASSING IN DMFC
38 Micropumping by Directional Growth and Hydrophobic Venting of Bubbles ENGINEERING SURFACE ROUGHNESS TO MANIPULATE DROPLETS IN MICROFLUIDIC SYSTEMS
39 Physical Sensors RF Devices and Resonators Force & Stress Sensors
40 Stiction Vapor Phase Anti-Stiction Coatings for MEMS
41 A Lateral, Self-cleaning, Direct Contact MEMS Switch
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