Theory of Gas Discharge

Transcription

1 Boris M. Smirnov Theory of Gas Discharge Plasma l Springer

2 Contents 1 Introduction 1 Part I Processes in Gas Discharge Plasma 2 Properties of Gas Discharge Plasma Equilibria and Distributions of Particles in Gases and Plasmas Basic Plasma Parameters Transport Coefficients Ionization Equilibrium in Gas Discharge Plasma Thermoemission of Electrons from the Cathode Parameters of Helium and Argon Atoms and Ions 25 3 Elementary Processes in Gas Discharge Plasma Elastic Collisions of Classical Atomic Particles Elastic Electron-Atom Scattering in Slow Collisions Inelastic Electron Collisions with Atoms Resonant Atom Transitions in Collisions with Electrons Transitions Between Neighboring Atom States in Collisions With Electrons Atom Ionization by Electron Impact Recombination of Electrons and Ions in Plasma Three Body Processes and Stepwise Ionization of Atoms Collision Processes Involving Ions 62 4 Radiative Processes in Gas Discharge Plasma Radiative Transitions in Atoms Photoionization and Photorecombination Process Broadening of Spectral Lines 69 vii

3 viii Contents 4.4 Cross Section and Absorption Coefficient for Resonant Photons Propagation of Resonant Radiation in the Gas Resonant Radiation in Excited Helium and Argon Block Model for Atom Levels 88 Part II Kinetics and Transport Plasma Phenomena in Gas Discharge 5 Collision Processes in Kinetics of Gas Discharge Plasma Kinetic Equation for Charged Particles Integral Relations for an Average Momentum and Energy of a Charged Particle in Gas in Electric Field Integral of Electron-Atom Collisions Landau Collision Integral Kinetics of Fast Electrons in Plasma Electron Regimes in Gas Discharge Plasma Kinetic Processes in Gas Discharge Plasma Distribution Function of Electrons Located in Rareness Gas in Electric Field Regime of High Electron Density in Electron Kinetics Atom Excitation as Electron Diffusion in Energy Space Efficiency of Atom Excitation by Electron Impact Electron Distribution Function Above the Atom Excitation Threshold Electron Kinetics in Gas in Strong Field Transport Processes in Gas Discharge Plasma Transport Phenomena in Gases Electron Drift in Gas in External Electric Field Electrons in Gas of Hard Spheres Conductivity of Weakly Ionized Gas Electron Thermal Conductivity of Helium Arc Plasma Ion Drift and Diffusion in Gas in External Electric Field Ambipolar Diffusion of Plasma in Gas in Electric Field Heat Processes in Gas Discharge Plasma Plasma Transport in Magnetic Field 193

4 Contents ix Part III Processes in Gas Discharge 8 Ionization Equilibrium in Gas Discharge Plasma Townsend Scheme for Self-maintaining of Gas Discharge 8.2 Ionization Equilibrium in Positive Column 199 of Gas Discharge Stepwise Ionization of Atoms in Positive Column Plasma of Positive Column of Low Pressure Gas.. Discharge Heat Processes in Positive Column of Gas Discharge Local Thermodynamic Equilibrium in Arc Plasma of High Pressure Ionization Equilibrium in Arc Plasma of High Pressure Cathode and Wall Processes Electric Breakdown of Gases Electron Emission from Cathode in Ion Collisions Properties of Cathode Region of Glow Discharge Transition from Glow Discharge to Arc and Townsend Discharges Plasma Sheath at Walls Principles of Magnetron Discharge 252 Part IV Helium and Argon Gas Discharge Plasmas 10 Atom Excitation in Helium and Argon Uniform Plasma Excitation of Metastable State in Helium Plasma at Low Electron Concentrations Excitation of Metastable State in Helium Plasma at High Electron Concentrations Inelastic Electron Collisions with Excited Helium Atoms Excitation of Atoms in Argon Gas Discharge Plasma Continuous Spectrum of Radiation of Equilibrium Plasma Tail of the Energy Distribution Function of Electrons Ionization in Helium and Argon Gas Discharge Plasma Single Ionization of Atoms in Helium Gas Discharge Plasma Stepwise Ionization of Atoms in Helium Gas Discharge Plasma Single and Stepwise Ionization of Atoms in Argon Gas Discharge Plasma 303

5 x Contents 11.4 Thermodynamic of Stepwise Ionization in Gas Discharge Plasma Ionization in Argon Gas Discharge Plasma Involving Excited Atoms Helium and Argon Plasma in Positive Column of Gas Discharge Schottky Regime for Ionization Equilibrium in Positive Column Stepwise Ionization in Helium Positive Column Ionization in Argon Gas Discharge Plasma of Positive Column Hot Gas Discharge Plasma of Positive Column Capillary Discharge Processes at Boundaries of Gas Discharge Plasma Cathode Plasma of Glow Discharge Near Equilibrium Cathode Layer of Abnormal Glow Discharge Transition Region in Glow Discharge The Wall Plasma Sheath for Positive Column in Helium and Argon Magnetron Plasma in Helium and Argon Principles of Gas Discharge Plasma Gas Discharge Plasma as Complex Physical Object Self-consistent Character of Processes Involving Excited Atom States Regimes of Gas Discharge Plasma Conclusion 398 Appendix 399 References 409 Index 421