Modelling of low-temperature plasmas: kinetic and transport mechanisms. L.L. Alves
|
|
- Darlene Jordan
- 6 years ago
- Views:
Transcription
1 Modelling of low-temperature plasmas: kinetic and transport mechanisms L.L. Alves Instituto de Plasmas e Fusão Nuclear Instituto Superior Técnico, Universidade de Lisboa Lisboa, Portugal Atelier Fonctionnalisation de surfaces par plasmas: Techniques et Applications 6-8 juin 2017, GREMI Orléans
2 Modelling of low-temperature plasmas Goal: understand and predict 2
3 Modelling of low-temperature plasmas Interaction between species (in volume and at the wall) Interaction with surface electrons Rotational excitation Vibrational excitation Electronic excitation Fragmentation Chemistry Ionization heavy-species 3
4 Modelling of low-temperature plasmas Modelling approaches Statistical models Kinetic models Fluid models Hybrid models (combination of the above) 4
5 Modelling of low-temperature plasmas Outline Kinetic modelling The electron Boltzmann equation Fluid modelling The hydrodynamic transport equations Hybrid modelling Joining the pieces Example results Final remarks and questions 5
6 Modelling of low-temperature plasmas Key references Kinetics and Spectroscopy of Low Temperature Plasmas J. Loureiro and J. Amorim, 2016, Springer International Publishing Principles of Plasma Discharges and Materials Processing M. A. Lieberman and A. J. Lichtenberg, 1994, John Wiley Lecture Notes on Principles of Plasma Processing F. F. Chen and J.P. Chang, 2003, Kluwer Academic / Plenum Publishers Plasma Physics, Volumes 1 and 2 Jean-Loup Delcroix, 1965 / 1968, J. Wiley Motions of Ions and Electrons W. P. Allis, Handbuch der Physik, vol. 21, 1956, S. Flugge, Springer-Verlag Berlin Electron kinetics in atomic and molecular plasmas C. M. Ferreira and J. Loureiro, Plasma Sources Sci. Technol. 9 (2000) Fluid modelling of the positive column of direct-current glow discharges L. L. Alves, Plasma Sources Sci. Technol. 16 (2007)
7 Kinetic modelling The electron Boltzmann equation
8 Kinetic modelling The master kinetic equation Inclusion of an energy description Definition of boundary conditions Complete problem : 6D long run times F(r,v,t) is the distribution function, representing the number of particles per unit volume in phase space (r,v), at time t. 8
9 Kinetic modelling The electron Boltzmann equation Rate of F in configuration space due to collisions in time in velocity space Force acting upon particles The total electric field acting on electrons dc space-charge field hf field at frequency ω 9
10 Charge separation at the boundaries The space-charge sheath 10
11 Charge separation at the boundaries The space-charge sheath 11 Space-charge field, E s
12 Charge separation at the boundaries The space-charge sheath 12 Space-charge field, E s
13 Charge separation at the boundaries The space-charge sheath 1.0 n e / n e (0) ; n p / n e (0) r/r Source: LL Alves, PSST (2007) 13
14 The electron Boltzmann equation The two-term approximation Disregard the space-charge electric field acting on electrons dc space-charge field hf field at frequency ω No external magnetic field The electron distribution function F is expanded in spherical harmonics in velocity space in Fourier series in time Isotropic component (energy relaxation) Anisotropic components (transport) 14
15 The homogeneous electron Boltzmann equation Input data: working parameters Independent parameters 15
16 The homogeneous electron Boltzmann equation Input data: collisional data ν = c Nσ c ( 2eu m) 1/ 2 ( 2eu ) 1/ 2 q, ν = Niσ m ij N = i= 0 N Gas density N i 0 Chemistry model (heavy-species kinetics) 16
17 Input data Excitation / ionization mechanisms 17
18 Input data Cross sections Data from Bibliography Databases (e.g. LXCat: 18
19 Input data The LXCat database 19
20 The homogeneous electron Boltzmann equation The electron energy distribution function (EEDF) Courtesy of Bolsig ( 20
21 Fluid modelling The hydrodynamic transport equations
22 Fluid modelling The hydrodynamic transport equations No energy description Use of the hydrodynamic approximation moments of a kinetic equation rate balance equations (particle / energy) flux equations (charged particle / neutral species) Definition of boundary conditions Short run times 22
23 Fluid modelling The moments of the Boltzmann equation Particle balance equation Energy balance equation Particle flux equation Energy flux equation 23
24 Fluid modelling Summary of the hydrodynamic equations The particle balance equation (continuity equation) The flux equation (drift-diffusion approximation) The energy balance equation
25 Fluid modelling Poisson s equation Poisson s equation for the space-charge field r r E = e ( ) n i n e ε ma 200 ma Space-charge field, E s E r /N (10-16 V cm 2 ) p = 0.3 torr p = 5 torr Helium dc discharge r/r Source: LL Alves, PSST (2007)
26 Fluid modelling Boundary conditions: plasma-surface interaction Wall-loss probability β = 1 ζ : total loss probability γ: recombination probability s : sticking probability film 1-β β s γ = β-s
27 Fluid modelling Boundary conditions: plasma-surface interaction Recombination probability Dynamical MC (BKL algorithm) X Dedicated exp Model Source: V Guerra and D Marinov, PSST (2016)
28 Fluid / Chemistry modelling Collisional Radiative Models (CRM) n r r Γ = t r r Γ = D n n ν I System of coupled equations for the various plasma species n t = D 2 n n ν I transport kinetics
29 Fluid / Chemistry modelling Collisional Radiative Models (CRM) Transport rates D D 2 n Λ 2 n For electrons, the transport parameters can be related with the EEDF Electron free diffusion coefficient D e = 0 2 v 3ν c F n 0 0 e 4πv 2 dv = function ( E N ) Electron mobility µ e = 0 ev 3mν c 1 n e 0 F 0 2 4πv dv v = function ( E N )
30 Fluid / Chemistry modelling Collisional Radiative Models (CRM) Reaction rates (for collisional-radiative kinetic mechanisms) n ν I = n ν j j j n k ν k For electrons, the collision frequencies can be related with the EEDF Electron rate coefficients C j ν j n e N = 0 σ v j 0 F 0 2 4πv dv n = e function ( E N )
31 Fluid / Chemistry modelling Collisional Radiative Models (CRM) Kinetic data: example for nitrogen Source: LL Alves et al, PSST (2012)
32 Fluid / Chemistry modelling Collisional Radiative Models (CRM) Kinetic data: example for nitrogen Source: LL Alves et al, PSST (2012)
33 Hybrid modelling joining the pieces
34 Closing the calculation Eigenvalue calculation of the excitation field n t = D n n N DN 2 2 ν I 2 1 n nν I = 0 = N 2 Λ PDE solution (with boundary condition for the charged-particle density) 2 n n = 1 Λ 2 = const Electron gain/loss balance (Schottky condition) ν I N DN = ( N Λ) 2 E N EIGENVALUE
35 Hybrid modelling Joining the pieces E/N (initial value) Electron cross sections Electron energy distribution function Schottky condition satisfied? E/N (update) Kinetic module Boltzmann solver for electrons Fluid module Chemistry solver for neutral / charged heavy-species Electron rate coefficients transport parameters Other rate coefficients Densities and fluxes of charged particles
36 Hybrid modelling The LisbOn KInetics code (LoKI) Modular tools with state-of-the-art kinetic schemes and transport description, including Boltzmann solver Chemistry solver
37 Example results
38 Kinetic calculations EEDF for argon Influence of - excitation frequency - e-e collisions A B A: ω/n = 0 E/N = 3x10-16 V cm 2 B: n e / N 0, full 10-4, dashed ω/n = 2x10-6 cm 3 s -1 E/N = 3x10-15 V cm 2 Source: CM Ferreira and J Loureiro, PSST (2000) 38
39 Kinetic calculations EEDF and VDF for nitrogen E/N = V cm 2 ω/n = K T V = 2000 K 6000 K 6000 K 4000 K 3000 K 2000 K T V = 2000 K E/N = V cm 2 ω/n = 0 Source: CM Ferreira and J Loureiro, PSST (2000) 39
40 Kinetic calculations Swarm studies for oxygen (influence of rotational mechanisms) DCO CC-CAR discrete collisional operator continuous approximation rotations (with Chapman-Cowling correction) Source: MA Ridenti et al, PSST (2016) 40
41 Hybrid calculations dc discharge in helium Space-charge potential and electron mean energy pr (torr cm) p = 0.4 Torr 150 ma simulations (x 0.5), 50 ma 200 ma 10 V (V) -10 ε(0) (ev) -20 simulation measurement [Kimura et al (1995)] r/r 1 measurements Kaneda (1979),,, Dote and Shimada (1982), Sato (1993) 1 10 NR (10 16 cm -2 ) Source: LL Alves, PSST (2007) 41
42 Hybrid calculations capacitive discharge in N 2 and N 2 -H 2 Self-bias potential and radiative transition intensities - V dc (V) N 2 1mbar 0.5 mbar 0.2 mbar W eff (W) Intensity SPS(0,0) (a.u.) Intensity FNS(0,0) (a.u) N 2 1mbar 0.2 mbar z (cm) N 2 -H mbar 0.6 mbar Source: LL Alves et al, PSST (2012) H 2 /(H 2 N 2 ) (%) 42
43 Hybrid calculations microwave discharge in air Absolute densities of N 2 species N 2 (B) --- n e increased 20% T g 80K N 2 (C) N 2 (B) 129 W 129 W Source: GD Stancu et al, JPD (2016) 43
44 Hybrid calculations microwave discharge in air Absolute densities of atomic species N (3p 4 S) 129 W O (3p 5 P) 129 W --- n e increased 20% T g 80K Source: GD Stancu et al, JPD (2016) 44
45 Hybrid calculations microwave discharge in air Vibrational temperature of the N 2 (C) state Influence of the wall deactivation coefficient γ N2 = 1.1x10-3 γ N2 = W Source: GD Stancu et al, JPD (2016) 45
46 Verification of codes Round-robin call A round robin test is an interlaboratory test (measurement, analysis, or experiment) performed independently several times. This can involve multiple independent scientists performing the test with the use of the same method in different equipment, or a variety of methods and equipment. In reality it is often a combination of the two, for example if a sample is analyzed, or one (or more) of its properties is measured by different laboratories using different methods, or even just by different units of equipment of identical construction. (Source: Wikipedia, April 2017) Following the GEC16 workshop on LXCat The need for a community wide activity on validation of plasma chemical kinetics in commonly used gases has been clearly identified. ( ) we would like to propose a round-robin to acess the consistency in results of calculations from different participants in a simplified system. (coordination: Sergey Pancheshnyi) 46
47 Verification of codes Round-robin exercise General conditions Gas temperature (constant) 300 K Species Gas pressure (constant) 0.1 bar e electrons Initial density of electrons 1 cm -3 Ar neutrals Initial density of ions 1 cm -3 Ar positive ions Time interval s Ar* excited states Processes and rates e Ar e Ar scattering cross section provided e Ar e Ar* scattering cross section provided e Ar e e Ar scattering cross section provided Ar e e Ar e C (cm 6 s -1 ) = 8.75x10-27 Te (4.5) Input parameter E N ( Td) = 43 t(ms) exp t [ (ms)] 47
48 Final remarks
49 Modelling of low-temperature plasmas Final remarks and questions Modelling tools are formidable aides for understanding and predicting the behaviour of low-temperature plasmas (LTPs) The main difficulties in deploying LTP models are - describing the plasma excitation and transport (particularly if spatial effects are relevant) - defining a kinetic scheme for the plasma species (and finding the corresponding elementary data) Modelling tools need - verification, e.g. based on crossed-benchmarking, round-robin exercises (the community is currently starting a collective to meet this goal) - validation of results, by comparing simulations with experiment (collaboration with experimental teams is most welcome) Questions? 49
Influence of vibrational kinetics in a low pressure capacitively coupled hydrogen discharge
Influence of vibrational kinetics in a low pressure capacitively coupled hydrogen discharge L. Marques 1, A. Salabas 1, G. Gousset 2, L. L. Alves 1 1 Centro de Física dos Plasmas, Instituto Superior Técnico,
More informationTheory of Gas Discharge
Boris M. Smirnov Theory of Gas Discharge Plasma l Springer Contents 1 Introduction 1 Part I Processes in Gas Discharge Plasma 2 Properties of Gas Discharge Plasma 13 2.1 Equilibria and Distributions of
More informationMODELING AND SIMULATION OF LOW TEMPERATURE PLASMA DISCHARGES
MODELING AND SIMULATION OF LOW TEMPERATURE PLASMA DISCHARGES Michael A. Lieberman University of California, Berkeley lieber@eecs.berkeley.edu DOE Center on Annual Meeting May 2015 Download this talk: http://www.eecs.berkeley.edu/~lieber
More informationNumerical simulation of Vibrationally Active Ar-H2 Microwave Plasma
Numerical simulation of Vibrationally Active Ar-H2 Microwave Plasma F. Bosi 1, M. Magarotto 2, P. de Carlo 2, M. Manente 2, F. Trezzolani 2, D. Pavarin 2, D. Melazzi 2, P. Alotto 1, R. Bertani 1 1 Department
More informationSolution of time-dependent Boltzmann equation for electrons in non-thermal plasma
Solution of time-dependent Boltzmann equation for electrons in non-thermal plasma Z. Bonaventura, D. Trunec Department of Physical Electronics Faculty of Science Masaryk University Kotlářská 2, Brno, CZ-61137,
More informationFundamentals of Plasma Physics Transport in weakly ionized plasmas
Fundamentals of Plasma Physics Transport in weakly ionized plasmas APPLAuSE Instituto Superior Técnico Instituto de Plasmas e Fusão Nuclear Luís L Alves (based on Vasco Guerra s original slides) 1 As perguntas
More informationPlasma Modeling with COMSOL Multiphysics
Plasma Modeling with COMSOL Multiphysics Copyright 2014 COMSOL. Any of the images, text, and equations here may be copied and modified for your own internal use. All trademarks are the property of their
More informationLow Temperature Plasma Technology Laboratory
Low Temperature Plasma Technology Laboratory Equilibrium theory for plasma discharges of finite length Francis F. Chen and Davide Curreli LTP-6 June, Electrical Engineering Department Los Angeles, California
More informationPIC-MCC simulations for complex plasmas
GRADUATE SUMMER INSTITUTE "Complex Plasmas August 4, 008 PIC-MCC simulations for complex plasmas Irina Schweigert Institute of Theoretical and Applied Mechanics, SB RAS, Novosibirsk Outline GRADUATE SUMMER
More informationCopyright 1996, by the author(s). All rights reserved.
Copyright 1996, by the author(s). All rights reserved. Permission to make digital or hard copies of all or part of this work for personal or classroom use is granted without fee provided that copies are
More informationModeling plasma-based CO 2 conversion: From chemistry to plasma design
Modeling plasma-based CO 2 conversion: From chemistry to plasma design Annemie Bogaerts T. Kozak, R. Snoeckx, G. Trenchev, K. Van Laer Research group PLASMANT, University of Antwerp, Belgium CO 2 + CH
More information4 Modeling of a capacitive RF discharge
4 Modeling of a capacitive discharge 4.1 PIC MCC model for capacitive discharge Capacitive radio frequency () discharges are very popular, both in laboratory research for the production of low-temperature
More informationInplane Microwave Plasma
Inplane Microwave Plasma Introduction Wave heated discharges may be very simple where a plane wave is guided into a reactor using a waveguide or very complicated as in the case with ECR (electron cyclotron
More informationSolution of Time-dependent Boltzmann Equation
WDS'5 Proceedings of Contributed Papers, Part III, 613 619, 5. ISBN 8-8673-59- MATFYZPRESS Solution of Time-dependent Boltzmann Equation Z. Bonaventura, D. Trunec, and D. Nečas Masaryk University, Faculty
More informationPhysique des plasmas radiofréquence Pascal Chabert
Physique des plasmas radiofréquence Pascal Chabert LPP, Ecole Polytechnique pascal.chabert@lpp.polytechnique.fr Planning trois cours : Lundi 30 Janvier: Rappels de physique des plasmas froids Lundi 6 Février:
More informationContents: 1) IEC and Helicon 2) What is HIIPER? 3) Analysis of Helicon 4) Coupling of the Helicon and the IEC 5) Conclusions 6) Acknowledgments
Contents: 1) IEC and Helicon 2) What is HIIPER? 3) Analysis of Helicon 4) Coupling of the Helicon and the IEC 5) Conclusions 6) Acknowledgments IEC:! IEC at UIUC modified into a space thruster.! IEC has
More informationEffect of Gas Flow Rate and Gas Composition in Ar/CH 4 Inductively Coupled Plasmas
COMSOL CONFERENCE BOSTON 2011 Effect of Gas Flow Rate and Gas Composition in Ar/CH 4 Inductively Coupled Plasmas Keisoku Engineering System Co., Ltd., JAPAN Dr. Lizhu Tong October 14, 2011 1 Contents 1.
More informationBrief documentation of BOLSIG+ version 07/2015
Brief documentation of BOLSIG+ version 7/215 G. J. M. Hagelaar Laboratoire Plasma et Conversion d Energie (LAPLACE), Université Paul Sabatier, 118 route de Narbonne, 3162 Toulouse Cedex 9 gerjan.hagelaar@laplace.univ-tlse.fr
More informationPIC-MCC/Fluid Hybrid Model for Low Pressure Capacitively Coupled O 2 Plasma
PIC-MCC/Fluid Hybrid Model for Low Pressure Capacitively Coupled O 2 Plasma Kallol Bera a, Shahid Rauf a and Ken Collins a a Applied Materials, Inc. 974 E. Arques Ave., M/S 81517, Sunnyvale, CA 9485, USA
More informationFeature-level Compensation & Control
Feature-level Compensation & Control 2 Plasma Eray Aydil, UCSB, Mike Lieberman, UCB and David Graves UCB Workshop November 19, 2003 Berkeley, CA 3 Feature Profile Evolution Simulation Eray S. Aydil University
More informationScattering in Cold- Cathode Discharges
Simulating Electron Scattering in Cold- Cathode Discharges Alexander Khrabrov, Igor Kaganovich*, Vladimir I. Demidov**, George Petrov*** *Princeton Plasma Physics Laboratory ** Wright-Patterson Air Force
More informationPIC-MCC/Fluid Hybrid Model for Low Pressure Capacitively Coupled O 2 Plasma
PIC-MCC/Fluid Hybrid Model for Low Pressure Capacitively Coupled O 2 Plasma Kallol Bera a, Shahid Rauf a and Ken Collins a a Applied Materials, Inc. 974 E. Arques Ave., M/S 81517, Sunnyvale, CA 9485, USA
More informationEffect of small amounts of hydrogen added to argon glow discharges: Hybrid Monte Carlo fluid model
PHYSICAL REVIEW E, VOLUME 65, 056402 Effect of small amounts of hydrogen added to argon glow discharges: Hybrid Monte Carlo fluid model Annemie Bogaerts* and Renaat Gijbels Department of Chemistry, University
More informationDOE WEB SEMINAR,
DOE WEB SEMINAR, 2013.03.29 Electron energy distribution function of the plasma in the presence of both capacitive field and inductive field : from electron heating to plasma processing control 1 mm PR
More informationECE 989 Advanced Topics in Plasma Spring 2019
ECE 989 Advanced Topics in Plasma Spring 209 Instructor: Schedule: Office Hours: Peng Zhang Room 323 EB Tel. (57) 353-3654 E-mail: pz@egr.msu.edu Tu Th 2:40 PM 2:00 PM, 2250 Engineering Building Tu Th
More informationNARROW GAP ELECTRONEGATIVE CAPACITIVE DISCHARGES AND STOCHASTIC HEATING
NARRW GAP ELECTRNEGATIVE CAPACITIVE DISCHARGES AND STCHASTIC HEATING M.A. Lieberman, E. Kawamura, and A.J. Lichtenberg Department of Electrical Engineering and Computer Sciences University of California
More informationDynamical Monte-Carlo Simulation of Surface Kinetics
Dynamical Monte-Carlo Simulation of Surface Kinetics V. Guerra and J. Loureiro Centro de Física dos Plasmas, Instituto Superior Técnico, 1049-001 Lisboa, Portugal Abstract. This wor presents a theoretical
More informationSimulation of the Interaction Between Two Counterflowing Rarefied Jets
Simulation of the Interaction Between Two Counterflowing Rarefied Jets Cyril Galitzine and Iain D. Boyd Department of Aerospace Engineering, University of Michigan, Ann Arbor, MI 48109 Abstract. A preliminary
More information65 th GEC, October 22-26, 2012
65 th GEC, October 22-26, 2012 2D Fluid/Analytical Simulation of Multi-Frequency Capacitively-Coupled Plasma Reactors (CCPs) E. Kawamura, M.A. Lieberman, D.B. Graves and A.J. Lichtenberg A fast 2D hybrid
More informationThe Computational Simulation of the Positive Ion Propagation to Uneven Substrates
WDS' Proceedings of Contributed Papers, Part II, 5 9,. ISBN 978-8-778-85-9 MATFYZPRESS The Computational Simulation of the Positive Ion Propagation to Uneven Substrates V. Hrubý and R. Hrach Charles University,
More informationElectron Transport Coefficients in a Helium Xenon Mixture
ISSN 1068-3356, Bulletin of the Lebedev Physics Institute, 2014, Vol. 41, No. 10, pp. 285 291. c Allerton Press, Inc., 2014. Original Russian Text c S.A. Mayorov, 2014, published in Kratkie Soobshcheniya
More informationEFFECT OF PRESSURE AND ELECTRODE SEPARATION ON PLASMA UNIFORMITY IN DUAL FREQUENCY CAPACITIVELY COUPLED PLASMA TOOLS *
EFFECT OF PRESSURE AND ELECTRODE SEPARATION ON PLASMA UNIFORMITY IN DUAL FREQUENCY CAPACITIVELY COUPLED PLASMA TOOLS * Yang Yang a) and Mark J. Kushner b) a) Department of Electrical and Computer Engineering
More informationSCALING OF PLASMA SOURCES FOR O 2 ( 1 ) GENERATION FOR CHEMICAL OXYGEN-IODINE LASERS
SCALING OF PLASMA SOURCES FOR O 2 ( 1 ) GENERATION FOR CHEMICAL OXYGEN-IODINE LASERS D. Shane Stafford and Mark J. Kushner Department of Electrical and Computer Engineering Urbana, IL 61801 http://uigelz.ece.uiuc.edu
More informationCharacteristics and classification of plasmas
Characteristics and classification of plasmas PlasTEP trainings course and Summer school 2011 Warsaw/Szczecin Indrek Jõgi, University of Tartu Partfinanced by the European Union (European Regional Development
More informationKinetic models of nonequilibrium nitrogen and hydrogen plasma for diagnostics of gas discharges
Journal of Physics: Conference Series Kinetic models of nonequilibrium nitrogen and hydrogen plasma for diagnostics of gas discharges To cite this article: Yu A Lebedev et al 2010 J. Phys.: Conf. Ser.
More informationTwo-dimensional Fluid Simulation of an RF Capacitively Coupled Ar/H 2 Discharge
Two-dimensional Fluid Simulation of an RF Capacitively Coupled Ar/H 2 Discharge Lizhu Tong Keisoku Engineering System Co., Ltd., Japan September 18, 2014 Keisoku Engineering System Co., Ltd., 1-9-5 Uchikanda,
More informationFINAL REPORT. DOE Grant DE-FG03-87ER13727
FINAL REPORT DOE Grant DE-FG03-87ER13727 Dynamics of Electronegative Plasmas for Materials Processing Allan J. Lichtenberg and Michael A. Lieberman Department of Electrical Engineering and Computer Sciences
More informationarxiv: v1 [physics.plasm-ph] 10 Nov 2014
arxiv:1411.2464v1 [physics.plasm-ph] 10 Nov 2014 Effects of fast atoms and energy-dependent secondary electron emission yields in PIC/MCC simulations of capacitively coupled plasmas A. Derzsi 1, I. Korolov
More informationElectron-Vibrational Energy Exchange in Nitrogen-Containing Plasma: a Comparison Between an Analytical Approach and a Kinetic Model
Electron-Vibrational Energy Exchange in Nitrogen-Containing Plasma: a Comparison Between an Analytical Approach and a Kinetic Model YANG Wei ( ) and DONG Zhiwei ( ) Institute of Applied Physics and Computational
More informationExtremely far from equilibrium: the multiscale dynamics of streamer discharges
Extremely far from equilibrium: the multiscale dynamics of streamer discharges Ute Ebert 1,2 1 Centrum Wiskunde & Informatica Amsterdam 2 Eindhoven University of Technology http://www.cwi.nl/~ebert www.cwi.nl/~ebert
More informationNumerical studies on the breakdown process in gas discharges
Eindhoven University of Technology Department of Applied Physics Group of Elementary Processes in Gas Discharges Numerical studies on the breakdown process in gas discharges P. Verhoeven EPG 12-04 March
More informationANGULAR DEPENDENCE OF ELECTRON VELOCITY DISTRIBUTIONS IN LOW-PRESSURE INDUCTIVELY COUPLED PLASMAS 1
ANGULAR DEPENDENCE OF ELECTRON VELOCITY DISTRIBUTIONS IN LOW-PRESSURE INDUCTIVELY COUPLED PLASMAS 1 Alex V. Vasenkov 2, and Mark J. Kushner Department of Electrical and Computer Engineering Urbana, IL
More informationMONTE CARLO SIMULATION OF RADIATION TRAPPING IN ELECTRODELESS LAMPS: A STUDY OF COLLISIONAL BROADENERS*
MONTE CARLO SIMULATION OF RADIATION TRAPPING IN ELECTRODELESS LAMPS: A STUDY OF COLLISIONAL BROADENERS* Kapil Rajaraman** and Mark J. Kushner*** **Department of Physics ***Department of Electrical and
More informationExtrel Application Note
Extrel Application Note Real-Time Plasma Monitoring and Detection of Trace H 2 O and HF Species in an Argon Based Plasma Jian Wei, 575 Epsilon Drive, Pittsburgh, PA 15238. (Presented at the 191st Electrochemical
More informationChapter 7 Plasma Basic
Chapter 7 Plasma Basic Hong Xiao, Ph. D. hxiao89@hotmail.com www2.austin.cc.tx.us/hongxiao/book.htm Hong Xiao, Ph. D. www2.austin.cc.tx.us/hongxiao/book.htm 1 Objectives List at least three IC processes
More informationOne dimensional hybrid Maxwell-Boltzmann model of shearth evolution
Technical collection One dimensional hybrid Maxwell-Boltzmann model of shearth evolution 27 - Conferences publications P. Sarrailh L. Garrigues G. J. M. Hagelaar J. P. Boeuf G. Sandolache S. Rowe B. Jusselin
More informationPRINCIPLES OF PLASMA DISCHARGES AND MATERIALS PROCESSING
PRINCIPLES OF PLASMA DISCHARGES AND MATERIALS PROCESSING Second Edition MICHAEL A. LIEBERMAN ALLAN J, LICHTENBERG WILEY- INTERSCIENCE A JOHN WILEY & SONS, INC PUBLICATION CONTENTS PREFACE xrrii PREFACE
More informationMODELING OF SEASONING OF REACTORS: EFFECTS OF ION ENERGY DISTRIBUTIONS TO CHAMBER WALLS*
MODELING OF SEASONING OF REACTORS: EFFECTS OF ION ENERGY DISTRIBUTIONS TO CHAMBER WALLS* Ankur Agarwal a) and Mark J. Kushner b) a) Department of Chemical and Biomolecular Engineering University of Illinois,
More informationP. Diomede, D. J. Economou and V. M. Donnelly Plasma Processing Laboratory, University of Houston
P. Diomede, D. J. Economou and V. M. Donnelly Plasma Processing Laboratory, University of Houston 1 Outline Introduction PIC-MCC simulation of tailored bias on boundary electrode Semi-analytic model Comparison
More informationA global (volume averaged) model of a chlorine discharge
A global (volume averaged) model of a chlorine discharge Eyþór Gísli Þorsteinsson and Jón Tómas Guðmundsson Science Institute, University of Iceland, Iceland Department of Electrical and Computer Engineering,
More informationarxiv: v2 [physics.plasm-ph] 23 Feb 2013
arxiv:1302.4114v2 [physics.plasm-ph] 23 Feb 2013 High order fluid model for streamer discharges: I. Derivation of model and transport data S. Dujko 1,2, A.H. Markosyan 1, R.D. White 3 and U. Ebert 1,4
More informationNonlinear Diffusion in Magnetized Discharges. Francis F. Chen. Electrical Engineering Department
Nonlinear Diffusion in Magnetized Discharges Francis F. Chen Electrical Engineering Department PPG-1579 January, 1998 Revised April, 1998 Nonlinear Diffusion in Magnetized Discharges Francis F. Chen Electrical
More informationMulti-fluid Simulation Models for Inductively Coupled Plasma Sources
Multi-fluid Simulation Models for Inductively Coupled Plasma Sources Madhusudhan Kundrapu, Seth A. Veitzer, Peter H. Stoltz, Kristian R.C. Beckwith Tech-X Corporation, Boulder, CO, USA and Jonathan Smith
More informationMODELING OF AN ECR SOURCE FOR MATERIALS PROCESSING USING A TWO DIMENSIONAL HYBRID PLASMA EQUIPMENT MODEL. Ron L. Kinder and Mark J.
TECHCON 98 Las Vegas, Nevada September 9-11, 1998 MODELING OF AN ECR SOURCE FOR MATERIALS PROCESSING USING A TWO DIMENSIONAL HYBRID PLASMA EQUIPMENT MODEL Ron L. Kinder and Mark J. Kushner Department of
More informationDual-RadioFrequency Capacitively-Coupled Plasma Reactors. Tomás Oliveira Fartaria nº58595
Dual-RadioFrequency Capacitively-Coupled Plasma Reactors Tomás Oliveira Fartaria nº58595 Index Capacitive Reactors Dual Frequency Capacitively-Coupled reactors o Apparatus for improved etching uniformity
More informationNONLINEAR ELECTROMAGNETICS MODEL OF AN ASYMMETRICALLY DRIVEN CAPACITIVE DISCHARGE
NONLINEAR ELECTROMAGNETICS MODEL OF AN ASYMMETRICALLY DRIVEN CAPACITIVE DISCHARGE M.A. Lieberman Department of Electrical Engineering and Computer Sciences University of California Berkeley, CA 94720 Collaborators:
More informationEffect of Applied Electric Field and Pressure on the Electron Avalanche Growth
Effect of Applied Electric Field and Pressure on the Electron Avalanche Growth L. ZEGHICHI (), L. MOKHNACHE (2), and M. DJEBABRA (3) () Department of Physics, Ouargla University, P.O Box.5, OUARGLA 3,
More informationADVENTURES IN TWO-DIMENSIONAL PARTICLE-IN-CELL SIMULATIONS OF ELECTRONEGATIVE DISCHARGES
ADVENTURES IN TWO-DIMENSIONAL PARTICLE-IN-CELL SIMULATIONS OF ELECTRONEGATIVE DISCHARGES PART 1: DOUBLE LAYERS IN A TWO REGION DISCHARGE E. Kawamura, A.J. Lichtenberg, M.A. Lieberman and J.P. Verboncoeur
More informationThe low-field density peak in helicon discharges
PHYSICS OF PLASMAS VOLUME 10, NUMBER 6 JUNE 2003 Francis F. Chen a) Electrical Engineering Department, University of California, Los Angeles, Los Angeles, California 90095-1597 Received 10 December 2002;
More informationModeling and Simulation of Plasma Based Applications in the Microwave and RF Frequency Range
Modeling and Simulation of Plasma Based Applications in the Microwave and RF Frequency Range Dr.-Ing. Frank H. Scharf CST of America What is a plasma? What is a plasma? Often referred to as The fourth
More information7. Non-LTE basic concepts
7. Non-LTE basic concepts LTE vs NLTE occupation numbers rate equation transition probabilities: collisional and radiative examples: hot stars, A supergiants 10/13/2003 Spring 2016 LTE LTE vs NLTE each
More informationElectron temperature is the temperature that describes, through Maxwell's law, the kinetic energy distribution of the free electrons.
10.3.1.1 Excitation and radiation of spectra 10.3.1.1.1 Plasmas A plasma of the type occurring in spectrochemical radiation sources may be described as a gas which is at least partly ionized and contains
More informationChapter 7. Plasma Basics
Chapter 7 Plasma Basics 2006/4/12 1 Objectives List at least three IC processes using plasma Name three important collisions in plasma Describe mean free path Explain how plasma enhance etch and CVD processes
More informationThe Role of Secondary Electrons in Low Pressure RF Glow Discharge
WDS'05 Proceedings of Contributed Papers, Part II, 306 312, 2005. ISBN 80-86732-59-2 MATFYZPRESS The Role of Secondary Electrons in Low Pressure RF Glow Discharge O. Brzobohatý and D. Trunec Department
More informationCross sections and transport properties of negative ions in rare gases
Journal of Physics: Conference Series Cross sections and transport properties of negative ions in rare gases To cite this article: J V Jovanovi and Z Lj Petrovi 2009 J. Phys.: Conf. Ser. 62 02004 View
More informationMODELING PLASMA PROCESSING DISCHARGES
MODELING PROCESSING DISCHARGES M.A. Lieberman Department of Electrical Engineering and Computer Sciences University of California Berkeley, CA 94720 Collaborators: E. Kawamura, D.B. Graves, and A.J. Lichtenberg,
More informationLecture 6 Plasmas. Chapters 10 &16 Wolf and Tauber. ECE611 / CHE611 Electronic Materials Processing Fall John Labram 1/68
Lecture 6 Plasmas Chapters 10 &16 Wolf and Tauber 1/68 Announcements Homework: Homework will be returned to you on Thursday (12 th October). Solutions will be also posted online on Thursday (12 th October)
More informationDepartment of Aerospace Engineering and Engineering Mechanics, The University of Texas at Austin, Austin, Texas 78712, USA
1 MAGNETIZED DIRECT CURRENT MICRODISCHARGE, I: EFFECT OF THE GAS PRESSURE Dmitry Levko and Laxminarayan L. Raja Department of Aerospace Engineering and Engineering Mechanics, The University of Texas at
More informationEffects of fast atoms and energy-dependent secondary electron emission yields in PIC/ MCC simulations of capacitively coupled plasmas
(14pp) Plasma Sources Science and Technology doi:10.1088/0963-0252/24/3/034002 Effects of fast atoms and energy-dependent secondary electron emission yields in PIC/ MCC simulations of capacitively coupled
More informationLow Temperature Plasma Technology Laboratory
Low Temperature Plasma Technology Laboratory CENTRAL PEAKING OF MAGNETIZED GAS DISCHARGES Francis F. Chen and Davide Curreli LTP-1210 Oct. 2012 Electrical Engineering Department Los Angeles, California
More informationPlasma Chamber. Fortgeschrittenes Praktikum I. Supervisors: Baran Eren, Dr. Marco Wisse, Dr. Laurent Marot. Abstract
Plasma Chamber Fortgeschrittenes Praktikum I Supervisors: Baran Eren, Dr. Marco Wisse, Dr. Laurent Marot Abstract The aims of this experiment are to be familiar with a vacuum chamber, to understand what
More informationGeneration of ELF/VLF waves
Abstract HAARP is a high power transmitter facility operating in the HF frequency range. After an upgrade to 3.6 MW power scheduled in 2006 it will have an effective radiated power (ERP) of the order of
More informationCollisional-Radiative Models and the Emission of Light
Collisional-Radiative Models and the Emission of Light F.B. Rosmej Sorbonne Universités, Pierre et Marie Curie, Paris, France and Ecole Polytechnique, LULI-PAPD, Palaiseau, France frank.rosmej@upmc.fr
More informationCHAPTER 8. SUMMARY AND OUTLOOK 90 Under the operational conditions used in the present work the translation temperatures can be obtained from the Dopp
Chapter 8 Summary and outlook In the present work reactive plasmas have been investigated by comparing experimentally obtained densities with the results from a simple chemical model. The studies have
More informationNumerical Study of Power Deposition, Transport and Acceleration Phenomena in Helicon Plasma Thrusters
Numerical Study of Power Deposition, Transport and Acceleration Phenomena in Helicon Plasma Thrusters M. Magarotto, M. Manente, P. de Calro, F. Trezzolani, D. Pavarin, and D. Melazzi CISAS, Padova, Italy
More informationPARTICLE MODELLING OF PARALLEL PLATE RADIO FREQUENCY DISCHARGE PLASMAS IN HYDROGEN: INFLUENCE OF PRESSURE
Journal of Optoelectronics and Advanced Materials Vol. 7, No. 5, October 2005, p. 2363-2369 PARTICLE MODELLING OF PARALLEL PLATE RADIO FREQUENCY DISCHARGE PLASMAS IN HYDROGEN: INFLUENCE OF PRESSURE P.
More informationWorkshops on X-band and high gradients: collaboration and resource
Workshops on X-band and high gradients: collaboration and resource 25 October 2012 International workshop on breakdown science and high gradient technology 18-20 April 2012 in KEK 25 October 2012 International
More informationMODERN PHYSICS OF PLASMAS (19 lectures)
UNIT OF STUDY OUTLINE (PHYS 3021, 3921, 3024, 3924, 3025, 3925) MODERN PHYSICS OF PLASMAS (19 lectures) Course coordinator and principal lecturer: Dr Kostya (Ken) Ostrikov Lecturer (normal student stream,
More informationⅠ. Vacuum Technology. 1. Introduction Vacuum empty in Greek Torricelli Vacuum 2 ) 760 mm. mbar 2 ) Enclosure. To pump. Thin Film Technology
Ⅰ. Vacuum Technology. Introduction Vacuum empty in Greek 643 Torricelli Vacuum 76 mm Hg Enclosure F ma 76mmHg 76Torr atm (76cm) (3.6g / cm 3 ) (98.665cm/sec ).33 6 dynes/ cm.33bar.33 5 ascal( N / m ).4696
More informationINTRODUCTION TO THE HYBRID PLASMA EQUIPMENT MODEL
INTRODUCTION TO THE HYBRID PLASMA EQUIPMENT MODEL Prof. Mark J. Kushner Department of Electrical and Computer Engineering 1406 W. Green St. Urbana, IL 61801 217-144-5137 mjk@uiuc.edu http://uigelz.ece.uiuc.edu
More informationEffect of negative ions on the characteristics of plasma in a cylindrical discharge
Araghi and Dorranian Journal of Theoritical and Applied Physics 2013, 7:41 RESEARCH Open Access Effect of negative ions on the characteristics of plasma in a cylindrical discharge Farnaz Araghi and Davoud
More informationStudy of a Micro Hollow Cathode Discharge at medium argon gas pressure
Study of a Micro Hollow Cathode Discharge at medium argon gas pressure Claudia LAZZARONI Antoine ROUSSEAU Pascal CHABERT LPP Ecole Polytechnique, Palaiseau, FRANCE Nader SADEGHI LSP Grenoble, FRANCE I-V
More informationGEC ICP Reactor, Argon/Oxygen Chemistry
GEC ICP Reactor, Argon/Oxygen Chemistry Introduction Electronegative discharges exhibit very different characteristics to electropositive discharges due to the presence of negative ions. Examples of electronegative
More informationResidual resistance simulation of an air spark gap switch.
Residual resistance simulation of an air spark gap switch. V. V. Tikhomirov, S.E. Siahlo February 27, 2015 arxiv:1502.07499v1 [physics.acc-ph] 26 Feb 2015 Research Institute for Nuclear Problems, Belarusian
More informationATOMS. Central field model (4 quantum numbers + Pauli exclusion) n = 1, 2, 3,... 0 l n 1 (0, 1, 2, 3 s, p, d, f) m l l, m s = ±1/2
ATOMS Central field model (4 quantum numbers + Pauli exclusion) n = 1, 2, 3,... 0 l n 1 (0, 1, 2, 3 s, p, d, f) m l l, m s = ±1/2 Spectroscopic notation: 2S+1 L J (Z 40) L is total orbital angular momentum
More informationFluid equations, magnetohydrodynamics
Fluid equations, magnetohydrodynamics Multi-fluid theory Equation of state Single-fluid theory Generalised Ohm s law Magnetic tension and plasma beta Stationarity and equilibria Validity of magnetohydrodynamics
More informationDevelopment of a Hall Thruster Fully Kinetic Simulation Model Using Artificial Electron Mass
Development of a Hall Thruster Fully Kinetic Simulation Model Using Artificial Electron Mass IEPC-013-178 Presented at the 33rd International Electric Propulsion Conference, The George Washington University
More informationFigure 1.1: Ionization and Recombination
Chapter 1 Introduction 1.1 What is a Plasma? 1.1.1 An ionized gas A plasma is a gas in which an important fraction of the atoms is ionized, so that the electrons and ions are separately free. When does
More informationEtching Issues - Anisotropy. Dry Etching. Dry Etching Overview. Etching Issues - Selectivity
Etching Issues - Anisotropy Dry Etching Dr. Bruce K. Gale Fundamentals of Micromachining BIOEN 6421 EL EN 5221 and 6221 ME EN 5960 and 6960 Isotropic etchants etch at the same rate in every direction mask
More informationModeling of an EHD corona flow in nitrogen gas using an asymmetric capacitor for propulsion. Abstract. Introduction
Modeling of an EHD corona flow in nitrogen gas using an asymmetric capacitor for propulsion Alexandre A. Martins Institute for Plasmas and Nuclear Fusion & Instituto Superior Técnico, Av. Rovisco Pais,
More informationOverview of FRC-related modeling (July 2014-present)
Overview of FRC-related modeling (July 2014-present) Artan Qerushi AFRL-UCLA Basic Research Collaboration Workshop January 20th, 2015 AFTC PA Release# 15009, 16 Jan 2015 Artan Qerushi (AFRL) FRC modeling
More informationCharacteristics of Positive Ions in the Sheath Region of Magnetized Collisional Electronegative Discharges
Plasma Science and Technology, Vol.6, No.6, Jun. 204 Characteristics of Positive Ions in the Sheath Region of Magnetized Collisional Electronegative Discharges M. M. HATAMI, A. R. NIKNAM 2 Physics Department
More informationElectron Density and Ion Flux in Diffusion Chamber of Low Pressure RF Helicon Reactor
WDS'06 Proceedings of Contributed Papers, Part II, 150 155, 2006. ISBN 80-86732-85-1 MATFYZPRESS Electron Density and Ion Flux in Diffusion Chamber of Low Pressure RF Helicon Reactor R. Šmíd Masaryk University,
More informationEvaluated electron and positronmolecule scattering data for modelling particle transport in the energy range ev
Evaluated electron and positronmolecule scattering data for modelling particle transport in the energy range 0-10000 ev Gustavo García Instituto de Física Fundamental Consejo Superior de Investigaciones
More informationMultidimensional Numerical Simulation of Glow Discharge by Using the N-BEE-Time Splitting Method
Plasma Science and Technology, Vol.14, No.9, Sep. 2012 Multidimensional Numerical Simulation of Glow Discharge by Using the N-BEE-Time Splitting Method Benyssaad KRALOUA, Ali HENNAD Electrical Engineering
More informationIonization Detectors
Ionization Detectors Basic operation Charged particle passes through a gas (argon, air, ) and ionizes it Electrons and ions are collected by the detector anode and cathode Often there is secondary ionization
More informationEquilibrium model for two low-pressure electronegative plasmas connected by a double layer
PHYSICS OF PLASMAS 13, 093504 2006 Equilibrium model for two low-pressure electronegative plasmas connected by a double layer P. Chabert, a N. Plihon, C. S. Corr, and J.-L. Raimbault Laboratoire de Physique
More informationAn advanced simulation code for Hall effect thrusters
An advanced simulation code for Hall effect thrusters P. Fajardo, M. Merino, E. Ahedo pablo.fajardo@uc3m.es EPIC Workshop October 2017, Madrid Contents Plasmas and Space propulsion Team (EP2-UC3M) CHEOPS
More informationLECTURE 5 SUMMARY OF KEY IDEAS
LECTURE 5 SUMMARY OF KEY IDEAS Etching is a processing step following lithography: it transfers a circuit image from the photoresist to materials form which devices are made or to hard masking or sacrificial
More informationHiden EQP Applications
Hiden EQP Applications Mass/Energy Analyser for Plasma Diagnostics and Characterisation EQP Overview The Hiden EQP System is an advanced plasma diagnostic tool with combined high transmission ion energy
More information