AZtec LayerProbe TM. Layer thickness and composition characterisation in the SEM. ...the ultimate non-destructive, high-resolution solution.

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1 AZtec LayerProbe TM EDS Layer thickness and composition characterisation in the SEM...the ultimate non-destructive, high-resolution solution 300 nm 253 nm 198 nm

2 ds AZtec LayerProbe Overview Measure layer thickness on your SEM or your FIB-SEM THIN FILM LayerProbe analyses the composition and thickness of the surface and sub-surface layers of a specimen. A non-destructive tool based on established microanalysis technology, it is more cost-effective, higher resolution, and more accurate than dedicated film measurement tools. LayerProbe complements the elemental and phase information gained from conventional EDS analysis by also calculating the composition and thickness of the individual layers beneath the surface. When exploring complex layered structures, users can quickly compare theoretical models and actual measurements, and identify optimal analysis conditions. User profiles are easily set-up, allowing anyone to execute a pre-defined analysis condition and achieve consistent, high-quality results. LayerProbe is provided by Oxford Instruments, a company with over forty years of microanalysis experience and global customer support. LayerProbe is seamlessly integrated into the AZtec microanalysis system; installed AZtec systems can be quickly upgraded to include the new functionality. Non-destructive The composition and thicknesses of a multi-layered structure are calculated from an EDS measurement of the specimen surface - no need to prepare cross-sections High spatial resolution LayerProbe is the only high-resolution, nondestructive solution - it accurately characterises features down to 200 nm wide Accurate Layer thickness down to the nanometre scale can be measured quickly and accurately. The optimum SEM conditions for best accuracy are suggested during set-up AZtec Electron Image...Phase or X-ray map of surface 1 Al WSi 2 SiO 2 Si 300 nm 253 nm 198 nm LayerProbe delivers dramatically improved results compared to established methods. Cost effective LayerProbe turns the SEM into a high performance thin film and coating analyser. Comparable nondestructive techniques would require considerable additional investment in dedicated equipment Suitable for metallic layers With this X-ray based technique, metallic films can be measured at thicknesses far beyond their optical transparency. In addition, the excellent low energy sensitivity of our latest generation SDD detector, X-Max N, makes it possible to measure oxide formation on metals down to one nanometre thickness 2 AZtec LayerProbe AZtec LayerProbe 3

3 OATINGS Wide range of uses and applications From industrial use to the front-line of scientific research Semiconductor R&D Measure thickness and composition of metallisation and dielectric layers Accurately characterise oxide formation on bond pads (e.g. Cu oxide on Cu) Optimise thin film deposition processes (CVD, ALD, sputtering, evaporation) Solar cells Characterise active layers in thin film solar cells (CIGS, CdTe) Optimise TCO layer thickness and uniformity Characterise anti-reflection coating thickness and composition LayerProbe provides new insights into layered structures across solar cells and semiconductors. Nanoscience Measure uniformity of nanoparticle coatings Characterise contacts to nano-devices Relate device performance and structure using nondestructive layer measurements FILMS Application to FIB-SEM LayerProbe provides a complimentary technique to the cross-sectional analysis of layered specimens on FIB-SEMs. LayerProbe only takes seconds to characterise surface and sub-surface layers - it can be used as the measuring step during the deposition process It will assist the operator to reveal sub-surface layers or defects, and to pin-point locations where to cut with the FIB-SEM LayerProbe can also characterise and optimise the quality of layers deposited or processed in the FIB using gas assisted deposition and etching Optical Coatings Optimise the colour and transparency of optical coatings by accurately determining the film thickness and composition Compositional measurement uncovers non-uniformities not seen in conventional thickness measurements The quality of the contacts is crucial for device performance in nanodevices. LayerProbe will accurately and non-destructively characterises defects - even in buried metallisation layers. Above, a SEM image of a graphene device with Au/Cr contacts and, below, a representation of a carbon nanotube device. Industrial Coatings Suitable for decorative and structural coatings Uncover and accurately characterise sub-surface defects with minimal sample preparation Defects in the layers of a coated spring can be accurately characterised using LayerProbe. LayerProbe gives the FIB-SEM insight into what lies below the surface 4 AZtec LayerProbe AZtec LayerProbe 5

4 OWERFUL LayerProbe Workflow-oriented user interface... STRUCTURED...makes obtaining cutting-edge results routine Step 1: Model generation The starting model is created by defining the expected layer(s) composition and thicknesses. Using a unique algorithm, LayerProbe will then suggest the best kv and lines (Ka, La...) to use in the analysis. Materials are entered as a chemical formula, or can imported from a customisable materials database. From electron image to results in seconds Step 2: Image acquisition LayerProbe uses a navigator-based workflow that guides users through the different analysis steps: building a model of the layer structure in the specimen image and spectrum acquisition validation of the thickness and composition measurement by comparing the experimental and theoretical spectrum. The electron image is acquired. AZtec Autolock drift correction is available to eliminate the effects of sample drift and images up to 8k x 8k pixels can be acquired and stored. Step 3: Layer measurements The site(s) for the layer measurement(s) are chosen from the electron image or X-ray map. Data acquisition is completed within seconds. LayerProbe iteratively adapts the starting model to derive the actual layer thicknesses and compositions, which are then shown in the miniview window. The user can interrogate the results, compare information from two sites, and report the results using standard or customisable templates. Step 4: Confirmation In order to help validate the results, LayerProbe enables the user to compare the measured spectrum against a theoretical spectrum based on the calculated thickness and composition values. The effect of using different X-ray lines on the accuracy of the result can then be explored interactively. User defined standards can be chosen to further improve accuracy, if deemed necessary. 6 AZtec LayerProbe AZtec LayerProbe 7

5 iservice Global Customer Support Accredited, experienced, responsive, dedicated Oxford Instruments recognises that your success requires not just only world-class products, but also world-class service and support. Our global service team is renowned for delivering outstanding service to customers and microscope vendors: Hands-on and theory classroom training On-site training tailored to your specific needs Web-based courses and training videos Consultancy and application support Multi-layered maintenance and service contracts training help desk maintenance remote assist consultancy hardware upgrades parts & accessories application advice layered contracts software updating visit The materials presented here are summary in nature, subject to change, and intended for general information only. Oxford Instruments NanoAnalysis is certified to ISO9001, ISO14001 and OHSAS AZtec is a Registered Trademark of Oxford Instruments plc. STRATA.DLL SAMx. The following patent applications are applicable to LayerProbe: publication numbers JP , US , EP Oxford Instruments plc, All rights reserved. Document reference: OINA/AZtec/LayerProbe/Jan2013.