CapaciTorr HV Pumps. making innovation happen,together

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Arabella Hensley
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1 CapaciTorr HV Pumps making innovation happen,together

CapaciTorr HV HIGHLIGHTS General Features High pumping speed for all active gases High sorption capacity and increased lifetime Constant pumping speed in HV and UHV pressure region Reversible pumping

air leaks Suitable for viton sealed systems Applications Improving ultimate vacuum in combination with ion, diffusion, cryogenic or turbomolecular pumps Surface analysis systems Particle

storing and releasing hydrogen isotopes Plasma machines Hydrogen traps Impurities removal in rare gas filled devices CapaciTorr HV: high vacuum NEG Pumps Early NEG pumps, developed by SAES Getters in

These two getter alloys became the benchmark in different UHV applications. CapaciTorr HV pumps use the new sintered porous getter alloy ZAO.

To achieve this, the CapaciTorr HV pump has to be operated at moderate temperature (around 200 C).

2 CapaciTorr HV HIGHLIGHTS General Features High pumping speed for all active gases High sorption capacity and increased lifetime Constant pumping speed in HV and UHV pressure region Reversible pumping of hydrogen and its isotopes Operation in the presence of high magnetic fields Oil free and vibration free Low weight Fast pumpdown after air venting and without baking Capable of coping with large air leaks Suitable for viton sealed systems Applications Improving ultimate vacuum in combination with ion, diffusion, cryogenic or turbomolecular pumps Surface analysis systems Particle accelerators, synchrotron radiation sources and related equipment Process pumps for vacuum devices and deposition chambers Thin films deposition systems Portable vacuum instrumentation Pumping, storing and releasing hydrogen isotopes Plasma machines Hydrogen traps Impurities removal in rare gas filled devices CapaciTorr HV: high vacuum NEG Pumps Early NEG pumps, developed by SAES Getters in the 70s, used mechanically compressed St 707 getter powder (Zr-V-Fe). The replacement in the 90s of compressed getters with sintered getters (St 172 ) was a major technological step forward. These two getter alloys became the benchmark in different UHV applications. CapaciTorr HV pumps use the new sintered porous getter alloy ZAO. Due to the ability of ZAO to sorb large amount of air, water and CO/CO2, the CapaciTorr HV is the first NEG pump which can be routinely used in the high vacuum regime (i.e., Torr). To achieve this, the CapaciTorr HV pump has to be operated at moderate temperature (around 200 C). The operation temperature and the peculiar nature of the ZAO alloy allow reactivating the pump after a very long operation period. If required, the pump can also be used at room temperature in UHV environments. Pumps are available in CF35, CF63, CF150, and CF200 flanges. The pumping speed for H2 ranges between 210 l/s and 2100 l/s. The pumping speeds and capacities for water and air are also remarkably high. The pump is provided with an external housing to stabilize the pump temperature and minimize the power consumption during operation (5-50 W, depending on the model). Versions without the housing are also available. The NEG cartridge can be easily replaced once saturated. Typical applications are in the field of particle and medical accelerators, colliders with large gas load, LINAC, booster, synchrotron beamlines in high vacuum, film deposition systems.

3 Connector Flange External Shielding Cartridge Body

4 T 3 (external red grid) T 1 (flange) T 2 (body) T.Work. (C) Power (W) T 1 (C) T 2 (C) T 3 (C) CapaciTorr HV RT CapaciTorr HV RT CapaciTorr HV RT

5 CapaciTorr HV 200 HIGHLIGHTS General Features High pumping speed for all active gases High sorption capacity and increased lifetime Costant pumping speed in HV, UHV and XHV Reversible pumping of hydrogen and its isotopes Operation in the presence of high magnetic fields Oil free and vibration free Low weight Fast pumpdown after air venting and without baking Capable of coping with large air leaks Suitable for viton sealed systems The CapaciTorr HV 200 pump uses the innovative ZAO getter alloy (Ti Zr V Al) in the form of highly porous sintered disks. The pump, which has a very compact design, provides high pumping performance in the high vacuum (HV) regime (i.e Torr range) for all getterable gases like H 2, N 2, H 2 O, CO/CO 2 and O 2. This is achieved operating the getter cartridge at moderate temperature ( 200 C). Thanks to the extremely high gas sorption capacity, the pump can cope with large air leakages or sudden gas burst typical of high vacuum systems. Use of the pump in UHV range is also possible operating the getter cartridge at room temperature. The CapaciTorr HV 200 consists of: built in heater that directly connects to the flange power feedthrough an external housing with CF63 connecting flange a Non Evaporable Getter cartridge using the ZAO sintered disks The getter cartridge is very durable and designed for prolonged operation. Once spent it can be easily replaced. A bakeable connector provides an easy and fast connection to the pump power supply to activate and power the NEG cartridge. The CapaciTorr HV 200 is also available with CF 35 connecting flange. Applications Improving ultimate vacuum in combination with ion, diffusion, cryogenic or turbomolecular pumps Surface analysis systems Particle accelerators, synchrotron radiation sources and related equipment Process pumps for vacuum devices and deposition chambers Thin films deposition systems Portable vacuum instrumentation Pumping, storing and releasing hydrogen isotopes Impurities removal in rare gas filled devices ø Dimensions in mm Ordering Information Product Product description Code CapaciTorr HV 200 pump on CF63 CAPACITORR HV 200 5H0156 CapaciTorr HV 200 pump on CF35 CAPACITORR HV 200 CF35 5H0159 Power supply + output cables CAPACITORR HV 200 POWER SUPPLY 3B0455 Input cable CABLE MAINS INPUT CF35 3MT 3B0338 ø114 making innovation happen, together

6 1000 CapaciTorr HV 200 sorption test (according to ASTM F798-97) CF CF35 CapaciTorr HV 200 Pumping Speed (l/s) Activation: 550 C x 60' Sorption pressure: 1e-6Torr Sorption temperature: 200 C 1 0,0001 0,001 0,01 0, Typical Pump Characteristics Number of sorption cycles Sorbed Quantity (Torr l ) CapaciTorr HV 200 on CF35 >20 cycles CapaciTorr HV 200 on CF63 Alloy Type ZAO Alloy Composition Zr V Ti Al Getter Mass (g) 140 Getter Surface (cm 2 ) 432 H Pumping Speed (l/s)@200 C O CO N H Sorption Capacity O 2 Single cycle at 200 C 200 (Torr l) CO 2 Single cycle at 200 C 40 N 2 Single cycle at 200 C 200 H 2 O 2 N 2 CO 2 The SAES Group manufacturing companies are ISO9001 certified and the Italian companies are also ISO14001 certified. Full information about our certifications for each company of the Group are available on our website at: D.VS Note: Pumping speed data refer to the initial values measured at pump inlet. The Single run capacity is intended as the recommended absorbed quantity per run allowing to perform more than 20 sorption cycles. In case of operation under lower gas loads or at RT, the pump can be reactivated 100 times or more. CapaciTorr HV 200 on CF 63 CapaciTorr HV 200 on CF 35 Heating parameters Activation 54 W Operation at 200 C 8.6 W Activation 54 W Operation at 200 C 7.5 W SAES Group. Printed in Italy. All rights reserved. SAES, ZAO and CapaciTorr are registered trademarks of SAES Group. SAES Group reserves the right to change or modify product specifications at any timewithout notice. SAES Group neg_technology@saes-.com

CapaciTorr HV 1600 HIGHLIGHTS General Features High pumping speed for all active gases High sorption capacity and increased lifetime Costant pumping speed in HV, UHV and XHV Reversible pumping of

7 CapaciTorr HV 1600 HIGHLIGHTS General Features High pumping speed for all active gases High sorption capacity and increased lifetime Costant pumping speed in HV, UHV and XHV Reversible pumping of hydrogen and its isotopes Operation in the presence of high magnetic fields Oil free and vibration free Low weight Fast pumpdown after air venting and without baking Capable of coping with large air leaks Suitable for viton sealed systems Applications The CapaciTorr HV 1600 pump uses the innovative ZAO getter alloy (Ti Zr V Al) in the form of highly porous sintered disks. The pump, which has a very compact design, provides high pumping performance in the high vacuum (HV) regime (i.e Torr range) for all getterable gases like H 2, N 2, H 2 O, CO/CO 2 and O 2. This is achieved operating the getter cartridge at moderate temperature ( 200 C). Thanks to the extremely high gas sorption capacity, the pump can cope with large air leakages or sudden gas burst typical of high vacuum systems. Use of the pump in UHV range is also possible operating the getter cartridge at room temperature. The CapaciTorr HV 1600 consists of: built in heater that directly connects to the flange power feedthrough an external housing with CF150 connecting flange a Non Evaporable Getter cartridge using the ZAO sintered disks The getter cartridge is very durable and designed for prolonged operation. Once spent it can be easily replaced. A bakeable connector provides an easy and fast connection to the pump power supply to activate and power the NEG cartridge. ø ø 203 Improving ultimate vacuum in combination with ion, diffusion, cryogenic or turbomolecular pumps Surface analysis systems Particle accelerators, synchrotron radiation sources and related equipment Process pumps for vacuum devices and deposition chambers Thin films deposition systems Portable vacuum instrumentation Pumping, storing and releasing hydrogen isotopes Impurities removal in rare gas filled devices 257 Dimensions in mm Ordering Information Product Product description Code CapaciTorr HV 1600 pump CAPACITORR HV H0157 Power supply** NEG POWER C1* 3B0501 Output cable*** Cable supply output V Mt 3B0337 * Other models, able to simultaneously drive 2, 3 or 4 pumps are also available. **The power supply includes also the main input cable ***Longer output cables are available making innovation happen, together

8 10000 CapaciTorr HV 1600 sorption test (according to ASTM F798-97) CapaciTorr HV 1600 Pumping Speed (l/s) Typical Pump Characteristics CapaciTorr HV 1600 Alloy Type Alloy Composition ZAO Zr V Ti Al Getter Mass (g) 690 Getter Surface (cm 2 ) 2190 Pumping Speed (l/s)@180 C Sorption Capacity (Torr l) Activation: 550 C x 60' Sorption pressure 1e-6Torr Sorption temperature: 180 C 10 0,0001 0,001 0,01 0, Number of sorption cycles Sorbed Quantity (Torr l ) H O CO N H O 2 Single cycle at 180 C 800 CO 2 Single cycle at 180 C 160 N 2 Single cycle at 180 C 800 >20 cycles H 2 O 2 CO 2 N 2 The SAES Group manufacturing companies are ISO9001 certified and the Italian companies are also ISO14001 certified. Full information about our certifications for each company of the Group are available on our website at: D.VS Note: Pumping speed data refer to the initial values measured at pump inlet. The Single run capacity is intended as the recommended absorbed quantity per run allowing to perform more than 20 sorption cycles. In case of operation under lower gas loads or at RT, the pump can be reactivated 100 times or more. CapaciTorr HV 1600 Heating parameters Activation at 550 C Operation at 180 C controlled by thermocouple SAES Group. Printed in Italy. All rights reserved. SAES, ZAO and CapaciTorr are registered trademarks of SAES Group. SAES Group reserves the right to change or modify product specifications at any timewithout notice. SAES Group neg_technology@saes-.com

9 CapaciTorr HV 2100 HIGHLIGHTS General Features High pumping speed for all active gases High sorption capacity and increased lifetime Costant pumping speed in HV, UHV and XHV Reversible pumping of hydrogen and its isotopes Operation in the presence of high magnetic fields Oil free and vibration free Low weight Fast pumpdown after air venting and without baking Capable of coping with large air leaks Suitable for viton sealed systems The CapaciTorr HV 2100 pump uses the innovative ZAO getter alloy (Ti Zr V Al) in the form of highly porous sintered disks. The pump, which has a very compact design, provides high pumping performance in the high vacuum (HV) regime (i.e Torr range) for all getterable gases like H 2, N 2, H 2 O, CO/CO 2 and O 2. This is achieved operating the getter cartridge at moderate temperature ( 200 C). Thanks to the extremely high gas sorption capacity, the pump can cope with large air leakages or sudden gas burst typical of high vacuum systems. Use of the pump in UHV range is also possible operating the getter cartridge at room temperature. The CapaciTorr HV 2100 consists of: built in heater that directly connects to the flange power feedthrough an external housing with CF200 connecting flange a Non Evaporable Getter cartridge using the ZAO sintered disks The getter cartridge is very durable and designed for prolonged operation. Once spent it can be easily replaced. A bakeable connector provides an easy and fast connection to the pump power supply to activate and power the NEG cartridge. ø253,5 230 ø257 Applications Improving ultimate vacuum in combination with ion, diffusion, cryogenic or turbomolecular pumps Surface analysis systems Particle accelerators, synchrotron radiation sources and related equipment Process pumps for vacuum devices and deposition chambers Thin films deposition systems Portable vacuum instrumentation Pumping, storing and releasing hydrogen isotopes Impurities removal in rare gas filled devices 265 Dimensions in mm Ordering Information Product Product description Code CapaciTorr HV 2100 pump CAPACITORR HV H0158 Power supply** NEG POWER C1* 3B0501 Output cable*** Cable supply output V Mt 3B0337 * Other models, able to simultaneously drive 2, 3 or 4 pumps are also available. **The power supply includes also the main input cable ***Longer output cables are available making innovation happen, together

10 10000 CapaciTorr HV 2100 sorption test (according to ASTM F798-97) CapaciTorr HV 2100 H 2 Pumping Speed (l/s) Typical Pump Characteristics CapaciTorr HV 2100 Alloy Type Alloy Composition ZAO Zr V Ti Al Getter Mass (g) 1130 Getter Surface (cm 2 ) 3580 Pumping Speed (l/s)@180 C Sorption Capacity (Torr l) Activation: 550 C x 60' Sorption pressure 1e-6Torr Sorption temperature: 180 C 10 0,0001 0,001 0,01 0, Sorbed Quantity (Torr l ) H O CO N H O 2 Single run at 180 C 1300 CO 2 Single run at 180 C 260 N 2 Single run at 180 C 1300 Number of runs (sorption cycles) >20 O 2 CO 2 N 2 The SAES Group manufacturing companies are ISO9001 certified and the Italian companies are also ISO14001 certified. Full information about our certifications for each company of the Group are available on our website at: D.VS Note: Pumping speed data refer to the initial values measured at pump inlet. The Single run capacity is intended as the recommended absorbed quantity per run allowing to perform more than 20 sorption cycles. In case of operation under lower gas loads or at RT, the pump can be reactivated 100 times or more. CapaciTorr HV 2100 Heating parameters Activation at 550 C Operation at 180 C controlled by thermocouple SAES Group. Printed in Italy. All rights reserved. SAES, ZAO and CapaciTorr are registered trademarks of SAES Group. SAES Group reserves the right to change or modify product specifications at any timewithout notice. SAES Group neg_technology@saes-.com

CapaciTorr HV 200 Power Supply HIGHLIGHTS Line Voltage Supply voltage: 110-240 V AC Frequency: 50-60 Hz Mains cord connector: IEC Type 6A 250V Over-voltage class: Cat II Line Protection Required

11 CapaciTorr HV 200 Power Supply HIGHLIGHTS Line Voltage Supply voltage: V AC Frequency: Hz Mains cord connector: IEC Type 6A 250V Over-voltage class: Cat II Line Protection Required Supply protection: 6 A Fuse or Circuit Breaker Differential switch: 30 ma Isolation type: Class I Output Output voltage V DC : ( ) V Output power : ( ) A Instrument Protection Power Supply for CapaciTorr HV 200 The CapaciTorr HV 200 Power Supply is an electronic unit specifically designed for controlling the activation and working processes of the CapaciTorr HV 200 getter pump. The instrument receives line voltage ( V AC, Hz), converts to DC voltage of 16.5 V DC and supply the getter pump by way of a microprocessor-based electronic control card. The instrument is designed to control the getter pump in two different modes: Activation Working In the activation mode, the instrument supplies the power necessary to heat up the getter pump to the activation temperature (~500 C). In this operating mode, the CapaciTorr HV 200 power supply deliver 100% of the available power. In the working mode, the instrument supplies the power necessary to heat up the getter pump to the working temperature (~200 C). Working modes for CapaciTorr HV 200 on CF 63 and CF 35 flanges are available. NEG supply output cable 5 meters long is directly integrated in the power supply. Internal line fuse: ( ) A T Overload protection: Electronic control High Temp. Protection: Electronic control Dimensions 72 x 144 x 300 mm (HxWxD) Weight 2,1 kg Product description CapaciTorr HV 200 Power Supply Cable mains input CF 35 3Mt Ordering Information Code 3B0455 3B0338 making innovation happen, together

NEG POWER Multicontroller HIGHLIGHTS Input: Maximum power: 3.5 kw Supply voltage: 110-220 VAC Frequency: 50-60 Hz Input current: 1 x 18.

12 NEG POWER Multicontroller HIGHLIGHTS Input: Maximum power: 3.5 kw Supply voltage: VAC Frequency: Hz Input current: 1 x 18.5/9 A Noise at 1 mt: < 40 dba Mains cord connector: IEC Type 16A 250V Output 1-4 at 110 V Output power: 700 W+overload Output voltage: 0-110V DC Overload: 110% for one minute Supply current 10 A (at 70V DC ) Main features of NEG POWER Switching power controller Simultaneous activation/conditioning of up to 4 NEG pumps Local control by user friendly touch screen controller Remote control by RS232 interface with ASCII protocol Remote control by RS485 interface with Modbus protocol (RTU) Remote control by standard Ethernet interface Temperature monitoring and regulation Automatic power regulation for different pump configurations Diagnostic features (open/short connection, broken thermocouple, broken heating filament, overheating control, etc.) Unit switches into stand-by mode after a long time of non-operation making innovation happen, together neg_technology@saes-.com D.VS Multicontroller for NEXTorr, CapaciTorr, CapaciTorr HV and SORB-AC pumps The NEG POWER is an electronic unit specifically designed to control the activation process of NEXTorr, CapaciTorr, CapaciTorr HV and SORB-AC pumps with or without a thermocouple. The NEG POWER can simultaneously activate up to four different NEXTorr, CapaciTorr, CapaciTorr HV and SORB-AC pumps. It supplies Adjustable DC voltage up to 110 V Current up to 10 A Power up to 700 W per channel LAN, RS232 or RS485 remote control. The unit has a user friendly touch screen display to control the pumps. It is also possible to control the NEG POWER by the SAES remote control software. The parameters of the GP SORB-AC, CapaciTorr, CapaciTorr HV and NEXTorr pump series are preset in the software, making the activation as simple as selecting the pump. The activation process can be easily customized by inputting the electrical parameters and the desired temperature. The summary table below lists the pump models whose parameters are preset in the NEG POWER software. Ordering Information Product description Code Pump Models NEG POWER C1* 3B0501 All pumps NEG POWER C2* 3B0502 All pumps NEG POWER C3* 3B0503 All pumps NEG POWER C4 3B0504 All pumps Cable supply output V MT** 3B0337 CapaciTorr D 2000, CapaciTorr D 3500, GP 100, GP 200, GP 500, CapaciTorr HV 1600, CapaciTorr HV 2100 Cable supply output V MT** 3B0345 GP 100, GP 200, GP 500 Cable supply output with K-TC/3MT-V1.1-HT** 3B0420 CapaciTorr D 1000, NEXTorr D 300-5, NEXTorr D 500-5, NEXTorr D , NEXTorr D Cable supply output V1.1-CF 35 3MT** 3B0347 CapaciTorr D NEG POWER-NEXTorr D100/D200 OUTPUT CABLE-5MT** 3B0469 NEXTorr D 100-5, NEXTorr D 200-5, CapaciTorr D 100, CapaciTorr D 200 Cable supply output V1.1-2F 3MT** 3B0370 GP 50 *It can be upgraded to NEG POWER Models controlling more pumps. ** Other cables lenghts are available on request The SAES Group manufacturing companies are ISO9001 certified, the Asian and Italian companies are also ISO14001 certified. Full information about our certifications for each company of the Group is available on our website at: SAES Group. Printed in Italy. All rights reserved. SAES and CapaciTorr are registered trademarks of SAES Group. SAES Group reserves the right to change or modify product specifications at any timewithout notice.

13 B.VS The SAES Group manufacturing companies are ISO9001 certified and the Italian companies are also ISO14001 certified. Full information about certifications for each company of the Group are available on the corporate website at: SAES Group. Printed in Italy. All rights reserved. SAES and CapaciTorr are registered trademarks of SAES Group. SAES Group reserves the right to change or modify product specifications at any time without notice. SAES Group

CapaciTorr HV 200 HIGHLIGHTS

CapaciTorr HV 200 HIGHLIGHTS CapaciTorr HV 200 General Features High pumping speed for all active gases High sorption capacity and increased lifetime Costant pumping speed in HV, UHV and XHV Reversible pumping of hydrogen and its