3.99 (.16) REF (17.21) REF Technical Specifications. (see pag. 41)

Transcription

1 ENE MEN S HV /FF CHNGE CFG MDE S HV /FF FSE YE 00/0 8 00/0 o n u m p GGE C o n t r o lle r Local Serial HV HV emote Enable HV FF EME / HV SEL GGE EME / HV NELCK NELCK Dual Controller on umps utline Drawing.00 (.0) EF D L 6. (6.7) EF 77.0 (6.97) EF.99 (.6) EF 7.0 (7.) EF.00 (.0) EF.0 (.6) EF.0 (8.) EF 8.0 (.8) EF he new Dual ion pump controller is a state-of-the-art unit able to operate two different ion pumps simultaneously and independently. t is suited to start and operate ion pumps of any type (, StarCell ) and size (from 0 to 00 l/s). large two line LCD display allows simultaneous reading of individual pump voltage, current and pressure, while the variable voltage feature allows optimum pumping speed and pressure readings in the whole operating pressure range. he unit features built-in set points, remote operation, and.9 (.7) EF 0.00 (7.99) EF 9.00 (.7) EF optional S computer interface. he Dual is the only existing unit that combines ion pump and pressure gauge control*. n fact, it is also capable of driving EYESYS gauges (Convecorr and Mini Bayard lpert). his makes it the most versatile, compact and cost effective solution for pumping and controlling vacuum systems. nput Voltage 0 to 0 VC or 80 to 6 VC not selectable nput Frequency 7 to 6 Hz Dimension standard rack: H = 77 mm, W =. mm, D = 0 mm Display 6 characters, lines LCD large display Minimum Configuration HV utput, Set oint / emote Control Card Maximum Configuration HV utput, Set oint / emote Control Card, Computer nterface, Eyesys Control nterface utput Voltage (pen Circuit) rogrammable between ±000 V and ±7000 V utput Current (Short Circuit) rogrammable between 00 and 00 m ower (Maximum) rogrammable between 00 and 00 W HV Connector Fischer type 0 echnical Specifications Modes of peration Local/emote, Start/rotect, Fixed/Variable Voltage Front anel eadings utput Voltage, ressure (ascal, mbar, orr) Current (Minimum readable current 0 n) EN 0 Class Group, EN , EN , EN , EN , EN 600- utput ecorder Signal nalog, Æ to VDC logarithmic proportional to pressure nalog, Æ to 7 VDC linear proportional to voltage Set oint / emote Control Card nputs HV /FF command and selection of operating mode (Start/rotect, Fixed/Step Voltage) Set oint / emote Control Card utputs Set oint, High Voltage n, nterlock k, Fault, emote Mode, rotect Mode and Voltage for the emote nput StarCell, riode (see pag. ) *For configurations with alternative computer interfaces and gauge control capability, please contact your local Varian representative. Varian, nc. Vacuum echnologies

2 Dual Controller Dual dvantages ressure eading he Dual unit is preprogrammed to automatically convert any Vaclon lus pump current reading into pressure. hanks to its ability to detect ion current as low as 0 n, and resolving increments as low as 0 n, it allows pressure measurement in the 0-0 mbar range. o ensure a reliable pressure reading (comparable to an ion gauge) down to the HV region, the Dual optimizes the applied high voltage as a function of pressures. s a result, leakage current is minimized, thus providing more accurate pressure readings. umping Speed he optimization of applied High Voltage in accordance with operating pressure, allows improved pumping speed performance. he optimization is based on the fact that the energy with which the ion bombards the cathode is the nominal applied High Voltage, reduced by the space charge effect due to the electron cloud present in the ion pump cell. Since the space charge effect is pressure related, a variable HV is applied to maintain an optimum bombardment energy, resulting in the best possible pumping performance at any pressure. 00 Combination umps umping Speed Combination umps umping Speed Dual Variable Voltage 000 m ypical Leakage Current rea with Conventional Controller % of Nominal Speed 0 Conventional Controllers t different fixed voltages Current () 00 m 0 m m DL eading ressure (mbar) 0, m ressure (mbar) rdering nformation Description Weight kg (bs) art Number Dual Controller ne ump Negative 0 V 0.0 (.0) wo umps Negative 0 V. (.) ne ump ositive 0 V 0.0 (.0) wo umps ositive 0 V. (.) ne ump Negative 0 V 0.0 (.0) wo umps Negative 0 V. (.) ne ump ositive 0 V 0.0 (.0) wo umps ositive 0 V. (.) ne ump Negative, with S nterface 0 V 0.0 (.0) wo umps Negative, with S nterface 0 V. (.) ne ump ositive, with S nterface 0 V 0.0 (.0) wo umps ositive, with S nterface 0 V. (.) 9970 ne ump Negative, with S nterface 0 V 0.0 (.0) 9970 wo umps Negative, with S nterface 0 V. (.) 9970 ne ump ositive, with S nterface 0 V 0.0 (.0) 9970 wo umps ositive, with S nterface 0 V. (.) 9970 Configurations with alternative computer interfaces and gauge control capability available on request. ccessories and Cables ack adapter 9. (0.0) HV bakeable cable, radiation resistant, m ( ft.) long, with nterlock 0.9 (.0) HV bakeable cable, radiation resistant, 7 m ( ft.) long, with nterlock.6 (.) HV bakeable cable, radiation resistant, 0 m ( ft.) long, with nterlock. (.0) HV bakeable cable, radiation resistant, 0 m (66 ft.) long, with nterlock. (0.0) Varian, nc. Vacuum echnologies

3 M C E N made in taly varian Spa Lein V L G E Ï 6 9 L Y MiniVac Controller on umps utline Drawing 00 (7.87) EF 06.0 (.89) EF 9.0 (.98) EF 0.0 (.0) EF 8.0 (.09) EF.0 (.78) EF MiniVac V=m HGH LD m kv H.V. MDEL SEL 000 VDC VL Hz he MiniVac on ump Controller is designed to economically operate any Vaclon lus type and size:, and StarCell, from 0 to 00. he MiniVac is very compact and light, and can be operated in a local or remote mode. Medium pumps (Vaclon lus 0 to 7) can be operated at any pressure below x 0 - mbar (continuous operation). Large pumps (Vaclon lus 0 to 00) can be operated at any pressure below x 0-6 mbar (continuous operation). he MiniVac is designed to withstand continuous operation at short circuit conditions, without damaging the ion pump or itself. V battery-operable version is available for portable applications. 0 J00 CCESSY nput 90 to 0 VC or 80 to 0 VC or VDC utput Voltage: ± 000 VDC (open load) Current: m (short circuit) Maximum ower: W ( kv at 7 m) Front anel HV, HGH LD, and LY LEDs LED bargraph linear scale for current and voltage indication ecorder utput 0 to +0 VDC linear proportional to current (0 V = 0 m) echnical Specifications Safety: EN600- EM/EMC: EN6000--, EN6000--, EN rdering nformation ear anel Nine pin D type connector with following available signals and commands ecorder outputs: 0 to + VDC, linear proportional to HV ( V = kv) 0 to +0 VDC, linear proportional to current (0 V = 0 m) 0 to +0 VDC, linear proportional to current (0 V= m) HV confirm signal: Contact rating at 0 VC; 0. at 0 VDC emote HV /FF (interlock) command HV connector: Fischer type 0 or King type, 0 kv Description Weight kg (bs) art Number MiniVac Controller With any Vacon lus pump MiniVac, FSCHE HV connector, S plug, 0 V preset. (.0) 9909 MiniVac, FSCHE HV connector, European plug, 0 V preset. (.0) MiniVac, FSCHE HV connector, VDC. (.0) With small Vacon pumps ( and 8 l/s) MiniVac, KNG HV connector, S plug, 0 V preset. (.0) MiniVac, KNG HV connector, European plug, 0 V preset. (.0) 9909 MiniVac, KNG HV connector, VDC. (.0) ccessories and Cables 9 ack adapter. (0.0) With any Vacon lus pump HV bakeable cable, radiation resistant, m ( ft.) long, with nterlock 0.9 (.0) HV bakeable cable, radiation resistant, 7 m ( ft.) long, with nterlock.6 (.) HV bakeable cable, radiation resistant, 0 m ( ft.) long, with nterlock. (.0) HV bakeable cable, radiation resistant, 0 m (66 ft.) long, with nterlock. (0.0) With small Vacon pumps ( and 8 l/s) HV bakeable cable, radiation resistant, m ( ft.) long, with nterlock for l/s pump 0.9 (.0) HV cable, m (0 ft.) long, for 8 l/s Vacon pumps 0.9 (.0) 907 StarCell, riode Varian, nc. Vacuum echnologies

4 EME / MEN S on ump Controller SE N J6 SEL LNE N Vac 0 Hz 7 mp. KV S S F.6 F.6 Kv EC EME HV NELCK Kv HV HV FF 7Kv HV NELCK MidiVac Controller utline Drawing.0 (0.) 86.8 (.). (0.). (8.). (.6) V 6.0 (6.) MidiVac 6. (6.) 77.0 (7.0). (0.) front view o 7. (.8) he MidiVac Vacon lus controller is a new, state-of-the-art unit designed to power and control Vacon lus pumps of any size and type. t can also be used to power any other ion pump. he MidiVac is a compact yet powerful 0 Watt control unit, operable in local or remote mode (S, S, or S8). t features a large, easy-to-read digital display, and can measure ion currents as low as 00 n, allowing for accurate pressure measurements in the 0-0 mbar pressure range. perating voltage is selectable (KV, KV, or 7KV) to optimize pumping performance and pressure measurement at any. (0.) 0. (8.0) rear view operating pressure and, although the MidiVac is tailored to medium size ion pumps, it is perfectly suited for use with large ion pumps, up to Vacon lus 00, at pressures below 0 - mbar. nits with double high voltage output are also available. nput Voltage 90 to 0 or 80 to 6 VC utput Voltage Selectable for,, or 7 KV, ositive or Negative Short Circuit Current 00 m ower (Maximum) 0 w maximum ( KV at 0 m) Dimensions standard rack Front panel High voltage reading (00V resolution) ump current reading (00 n minimum current reading) echnical Specifications perating mode selection emote/local Start/rotect //7 KV output ear panel HV Connector: Fischer nput: emote on/off utput: n/ff Status Start/rotect Status Fault Status 0-0V linear rec output proportional to voltage 0-V logarithmic output proportional to current Safety EN 600- Emi/emc EC 000--, 000--, 000--, en 0 class a group StarCell, riode Varian, nc. Vacuum echnologies

5 on umps rdering nformation Description Weight kg (bs) art Number MidiVac, Negative output 0 VC. (0.0) MidiVac, ositive output 0 VC. (0.0) 9900 MidiVac, Negative output 0 VC. (0.0) 9900 MidiVac, ositive output 0 VC. (0.0) 9900 MidiVac, Double output 0 VC. (0.0) 9900 MidiVac, Double output 0 VC. (0.0) 9900 MidiVac, Double output 0 VC. (0.0) MidiVac, Double output 0 VC. (0.0) Cables HV bakeable cable, radiation resistant, m ( ft.) long, with interlock 0.9 (.0) HV bakeable cable, radiation resistant, 7 m ( ft.) long, with interlock.6 (.) HV bakeable cable, radiation resistant, 0 m ( ft.) long, with interlock. (.0) HV bakeable cable, radiation resistant, 0 m (66 ft.) long, with interlock. (0.0) ccessories Set point 0. (.0) 9900 S computer interface 0. (.0) 9900 S computer interface 0. (.0) 990 S 8 computer interface 0. (.0) 990 ack adapter 9. (.0) Varian, nc. Vacuum echnologies