Index. A Ang, W., 188 ARMAX, 217, 221 Atomic force microscopy (AFM), 2, 110, 111 Automated sperm immobilization system,

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1 Index A Ang, W., 188 ARMAX, 217, 221 Atomic force microscopy (AFM), 2, 110, 111 Automated sperm immobilization system, B Berkovitz, A., 258 Bouc Wen model FF control, 208 hysteresis modeling and compensation (see also Feedforward (FF) control system) dynamic model, experimental investigations, 176 experimental outputs, 178 generalization studies, identification, statical hysteresis, 71 Brokate formula, 191 C CASA method. See Computer-assisted sperm analysis (CASA) method Clayton, G.M., 209 Clegg, J.C., 93 Closed-loop control system equivalent weighted scheme, 77 performances, 149, 150 piezomicropositioning actuators, 188 robust control design, 126 state-feedback control equations, scheme, weighted scheme, 76, 77 Compensation techniques creep compensation advantages, 219 aim, 217, 218 characterization, 215, 216 experimental results, 219 modeling and identification, feedforward compensation (see Inverse rate-dependent Prandtl Ishlinskii model; Piezomicropositioning actuators) hysteresis compensation (see also Hysteresis modeling and compensation) advantages, 214 characterization, 211, 212 experimental results, 214, 215 modeling and identification, principles, 214, 215 vibration compensation characterization, 219, 220 experimental results, 224, 225 modeling and identification, performances, 222, 224 shaper the input control, 221, 223 step response, 222, 223 Computer-assisted sperm analysis (CASA) method, 253, 262. See also Sperm tracking methods Creep compensation advantages, 219 aim, 217, 218 characterization, 215, 216 experimental results, 219 modeling and identification, Croft, D., 209 M. Rakotondrabe (ed.), Smart Materials-Based Actuators at the Micro/Nano-Scale: Characterization, Control, and Applications, DOI / , Springer Science+Business Media New York

2 266 Index D DNA integrity analysis, 253, dof multimorph piezoelectric actuator creep characterization, experimental setup, 63, 65 H control technique, robust standard, 74 Cauchy Schwartz inequality, 79 closed-loop system, complementary sensitivity function, 77 controllers, gabarits and weighting functions, matricial transfer functions, 78 principle and specifications, standard form, 77, 78 microgripper, 61, 62 modeling and identification procedure, 67 controlled system, 74 dynamics, general formulation, nominal models, 73 statical hysteresis, uncertainties weightings, 73 static characterization coupling effect, 64, 65 direct and coupling hysteresis, 64, 66 step responses, 66, 67 Dynamic threshold, 192, 199 E Equivalent parametric model, Esbrook, A., 188 Euler Bernoulli theory, 32 F Feedback control systems control architecture, 97 feedforward control, 93 hybrid systems, impulsive control (see Impulsive state multiplication (ISM)) linear feedback control techniques, multiple control objectives, nonlinear control, 91 piecewise affine signals, piecewise constant signals, reference signal shaping, 93 repetitive reference signals, 92 Feedforward (FF) control system Bouc Wen approach, 208 cantilever, 207, 208 compensation (see Compensation techniques) design and development, 207 experimental setup, 209, 210 feedback control system, 93 inverse multiplicative structure (see Inverse multiplicative structure) microgrippers, 207, 208 nonlinear piezoelectric cantilevered actuator, Preisach and Prandtl Ishlinskii approach, 208 principle of, 208, 209 Fiicker image approach, 257 Finite element simulation (FES) COMSOL Multiphysics 4.3., 35 experimental results, 34, 37 magnetic hybrid material, 35 physical parameters, 36 resulting curves, displacement, 36, 37 simulated setup, 35 viscoelasticity, 37 Fitting ellipse approach, 254 Force sensor calibration process sequence, 240 fabrication process, 240, 241 helical nanobelt (see Thin-film piezoresistive HNB force sensors assembly) G Ge, P., 188 H HA assay. See Hyaluronic acid (HA) assay H control technique, robust standard, 74 Cauchy Schwartz inequality, 79 closed-loop system, complementary sensitivity function, 77 controllers calculation, implementation, gabarits and weighting functions, matricial transfer functions, 78 principle and specifications, standard form, 77, 78 (see also Standard H technique) Helical nanobelt (HNB) force sensors. See also Thin-film piezoresistive HNB force sensors assembly large-range sensors, piezoresistive, 232 working principle of, 232, 233 High-resolution transmission electron microscope (HRTEM), 26, 27

3 Index 267 Hu, H., 188 Huszar, G., 253, 259 Hyaluronic acid (HA) assay, 253, 259 Hybrid control approach, See also Nanopositioning Hysteresis modeling and compensation applications, 171 Bouc Wen model experimental outputs, 178 generalization studies, identification, categories, 172 dynamic model, experimental investigations, 176 feedback controller, 172 FF control schemes, (see also Feedforward (FF) control system) inverse-based, 12 LSSVM dynamic model identification, kernel function, 175 mapping, 174 modeling and testing, parameters, 176 rate-dependent, 173 regression model development, 174 model-based, 12 nonlinear piezoelectric cantilevered actuator backlash operator, 153, 154 characterization, experimental results, 154 hysterons, 153 Preisach and, rate-dependent compensation (see Piezomicropositioning actuators) I ICSI. See Intracytoplasmic sperm injection (ICSI) Impulsive state multiplication (ISM) definition, feedback systems (see also Feedback control systems) control architecture, 97 multiple control objectives, piecewise affine signals, piecewise constant signals, multiplicative signal transformation, signal transformation approach, stability criterion, transient performance, triangular waveforms, tracking, InGaAs/GaAs HNBs, Input shaping technique, vibration compensation characterization, 219, 220 experimental results, 224, 225 modeling and identification, performances, 222, 224 shaper the input control, 221, 223 step response, 222, 223 Integral action. See State-feedback control technique, nonlinear piezoelectric cantilevered actuator Intracytoplasmic sperm injection (ICSI), 252 Inverse multiplicative structure creep compensation advantage, 219 aim, 217, 218 characterization, 215, 216 experimental results, 219 modeling and identification, hysteresis compensation advantages, 214 characterization, 211, 212 experimental results, 214, 215 modeling and identification, principles, 214, 215 Inverse rate-dependent Prandtl Ishlinskii model Brokate formula, 191 characterization and positioning errors, 203, 204 feedforward compensation compensation effectiveness, 197 excitation frequencies, 195, 196 hysteresis loops, input output characteristics, 196 low-excitation frequencies, 199 measured output displacement, 196, 197 positioning errors, triangular waveform, open-loop control system, 190, 191 prediction errors, 202, 203 ISM. See Impulsive state multiplication (ISM) J Jouaneh, M., 188 K Kalman filter, 150, 257 Kernel function, 175

4 268 Index Keyence LC2420 sensor, 210 Kuhnen, K., 204 L Leang, K., 188 Least squares support vector machines (LSSVM) dynamic model identification, kernel function, 175 mapping, 174 modeling and testing, parameters, 176 rate-dependent, 173 regression model development, 174 Linear feedback control techniques, Linear Kalman filtering (LKF) implementation, noise and state-space representation, 158, 159 LSSVM. See Least squares support vector machines (LSSVM) M Macroscopical principle and equations, 5 6 Magnetic hybrid material actuation properties basic theory, experimental setup, finite element simulation, (see also Finite element simulation (FES)) geometries, 31 magnetic sensors, 30 characterization cost, 16 elasticity, 15 magnetic properties coercivity, 27 color change, 27 magnetization curve, 27, 28 superparamagnetic behavior, 29 ZFC and FC analyses, 28, 29 manufacturing, 16 polymer matrix/na-cmc chemical structure, 17 functional properties, 17 pseudoplastic behavior viscosity, 18 role of, 17 precursor hybrid material, 20 computed d values, 24 diffraction patterns, 23 Fe 2+ ions, 21 HRTEM image, 26, 27 infrared spectrum, 21, 22, 24, 25 Na-CMC, steps, Scherrer equation, 23, 24 STEM images, 25, 26 vibration mode, 22 X-ray diffraction, 21, 22 in situ synthesis, 18 Fe 2 O 3 /Na-CMC, 19 pre-mix, 19 stages of, 19, 20 Matlab-Simulink software, 57 Microgrippers, 61, 62, 136, 137, 207, 208 Micro/nanorobotics. See Thin-film piezoresistive HNB force sensors assembly Microscopical principle, 4 5 Motile sperm organellar morphology examination (MSOME), Multiplicative signal transformation, ISM, N Nafisi, V.R., 253, 254 Nanoelectromechanical systems (NEMS). See Thin-film piezoresistive HNB force sensors assembly Nanopositioning atomic force microscopy, 110, 111 cantilever, 111 feedback control FF control, 93 hybrid systems, linear feedback control techniques, reference signal shaping, 93 repetitive reference signals, 92 feedback loop, 90, 111 impulsive control ISM (see Impulsive state multiplication (ISM)) and signal transformation approach, measurement noise ISM-based controller, 113, 114 positioning error, 114 spectral characteristics, 114 multiobjective impulsive control, 115, 116 scanning probe microscopy, 90 tracking piecewise affine signals, Nonlinear piezoelectric cantilevered actuator closed-loop control technique, 149, 150 experimental setup,

5 Index 269 Kalman filtering, 150 linearization advantage, 157 FF control, hysteresis characterization, hysteresis modeling, LKF, principle scheme of, 152, 153 static and dynamic model, self-sensing technique, 150 state-feedback control (see State-feedback control technique, nonlinear piezoelectric cantilevered actuator) O Open-loop control system, 188, 190, 191, 208. See also Feedforward (FF) control system; Inverse rate-dependent Otsu s adaptive thresholding algorithm, 254 P Performances inclusion theorem (PIT) cantilevered actuator (see Piezoelectric cantilevered actuators) frequency domain, 45 PI controller computation, robust control design (see Robust control approach) time domain, 45 Physike Instrumente (PI) controller computation closed-loop scheme, 142, 143 experimental step responses, 145 magnitudes, 144, 145 PIT approach, subpaving, 144 Piecewise reference signals affine signals definition, 100 impulsive control for, second-order positioner, 101 state multiplication matrix, 101, 102 tracking error, 101 constant signals definition, 98 nanopositioners, 100 state multiplication matrix, 98 tracking performance, 98, 99 Piezoelectric-based microactuators application experiments setup, 136, 137 interval model derivation, microgripper, 136, 137 PI controller computation, specifications and controller structure, 139 ceramics and crystals, 6 interval tools definitions, interval system, 124 operations, performances inclusion theorem, posteriori performances analysis, properties, 7 8 PZT, 6, 7 robust control design closed-loop model, 126 feedback system, 125 initial box, 129 interval reference model, 127 PIT theorem, 128 SISO interval system, 125 SIVIA algorithm, 129 subpaving, 129 standard H technique augmented system, 131 closed-loop system, 130, 131 Kharitonov vertex polynomials, 133 SIVIA algorithm, 133 Piezoelectric cantilevered actuators bilayer bimorph actuator, 46, 47 dynamic model, 49 equivalent parametric model, interval techniques applications, 42 definitions, 43 operations, performances inclusion theorem, 45 transfer function representation, 44 multilayered actuator, 46, 47 static model, 46, types, 42 unimorph piezoelectric actuator experimental validation, problem formulation, reference model, 51 Piezomicropositioning actuators advantages, 187 characterization and positioning errors, 203, 204 closed-loop control system, 188 experimental setup hysteresis modeling, 195

6 270 Index Piezomicropositioning actuators (cont.) parameter identifications, results, 193 feedforward compensation excitation frequencies, 195, 196 hysteresis loops, inverse compensator, 196 low-excitation frequencies, 199 rate-dependent hysteresis, triangular waveform, hysteresis nonlinearities, 188 open-loop control system, 188 advantage, 189 dynamic threshold, 192 feedforward compensator, 188, 189 inverse rate-dependent, numerical implementation, rate-dependent, 190 prediction errors, 202, 203 PIT. See Performances inclusion theorem (PIT) Posteriori performances analysis, advantage, 189 dynamic threshold, 192 feedforward compensator, 188, 189 hysteresis modeling and compensation, 11 inverse rate-dependent, (see also Inverse rate-dependent ) numerical implementation, rate-dependent, 190 statical hysteresis, 71 Precursor hybrid material, 20 computed d values, 24 diffraction patterns, 23 Fe 2+ ions, 21 HRTEM image, 26, 27 infrared spectrum, 21, 22, 24, 25 Na-CMC, steps, Scherrer equation, 23, 24 STEM images, 25, 26 vibration mode, 22 X-ray diffraction, 21, 22 R Rate-dependent, 190. See also Inverse rate-dependent Resonant frequency, 49, 50 Riccati equation, 159 Robust control approach closed-loop system, 126 feedback system, 125 initial box, 129 interval reference model, 127 SISO interval system, 125 SIVIA algorithm, 129 standard H technique, (see also Standard H technique) subpaving, 129 S Sader, J.E., 242 Scanning probe microscopy (SPM), 90, 92, 93 Scanning transmission electron microscope (STEM), 24 Scherrer equation, 23 Shan, Y., 188 Shi, L.Z., 253 Signal transformation approach (STA) tracking performance, 116, 117 transformation functions Φ, Φ 1, 104 transient performance, Single-sperm tracking algorithm, 253 SISO interval system, 125 Sjöström, M., 204 SMM. See State multiplication matrix (SMM) Sodium carboxymethyl cellulose (Na-CMC) chemical structure, 17 functional properties, 17 infrared spectrum, 22 pseudoplastic behavior viscosity, 18 role of, 17 X-ray diffraction, 20, 21 Song, G., 188 Sperm tracking methods beating amplitude, 257, 258 CASA method, 253, 262 DNA integrity analysis, 253, 259 head tracking, 253 direction vector, 255 filters and image enhancements, 254 fitting ellipse, 254 ROI image, 254, 255 SHROI, 255 template matching approach, 254 thresholding approach, 254, 255 human sperm cell structure, 251, 252 hyaluronic acid assay, 253 intracytoplasmic sperm injection, 252 manipulation, 259 immobilization, micropipette aspiration and positioning,

7 Index 271 morphology analysis, motility analysis, motility grade, 252, 253 single-sperm tracking algorithm, 253 tail tracking direction vector, 255, 256 fiicker image approach, 257 STROI, template matching algorithm, 253 STA. See Signal transformation approach (STA) Standard H technique. See also H control technique, robust standard augmented system, 131 closed-loop system, 130, 131 Kharitonov vertex polynomials, 133 PI controller computation closed-loop scheme, 142, 143 experimental step responses, 145 magnitudes, 144, 145 subpaving, 144 posteriori performances analysis, SIVIA algorithm, 133 State-feedback control technique, nonlinear piezoelectric cantilevered actuator augmented feedback gain calculations, equations, closed loop, implementations, pole assignment, 160 principles of, 162 scheme, closed loop, State multiplication matrix (SMM), 94, 98 Statical hysteresis Bouc Wen model, 71 Prandtl Ishlinskii approach, 71 Preisach approach, 71 quadrilateral approximation approach, STEM. See Scanning transmission electron microscope (STEM) T Template matching approach, 253, 254 Thin-film piezoresistive HNB force sensors assembly applications, 229, 230 AFM cantilever, 242 calibration procedure, electromechanical measurements, 245, 246 InGaAs/GaAs, measurement results, 244, 245 stiffness calibration, 245, 246 external field-assisted assembly electromechanical characterization, 238 ES and EM force, experimental analysis, 236, 237 FEM simulation, 235, 236 MATLAB script, 239 process comparison, 239, 240 external force-generating system, features and drawbacks, 232 helical morphology, 232 interconnection layer fabrication, large-range force sensors, packaging process, 230 resistance spot welding, 240, 241 working principle of, 232, 233 Thresholding approach, 254, 255 U Unimorph piezoelectric actuator experimental validation fabrication, interval reference model, 55 materials, unimorph sizes computation, FF control, 209 problem formulation, reference model, 51 V Vibration compensation characterization, 219, 220 experimental results, 224, 225 impulse sequences, 221, 223 modeling and identification, performances summary, 222, 224 step response, 222, 223 Visone, C., 204

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