Pressure sensors. C27 series. Absolute pressure sensor die

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1 Series/Type: Ordering cde: Date: ersin: 3 Cntent f header bars 1 and 2 f data sheet will be autmatically entered in headers and fters! Please fill in the table and then change the clr t "white". This ensures that the table disappears (invisible) fr the custmer PDF. Dn't change frmatting when entering r pasting text in the table and dn't add any cell r line in and t it! Identificatin/Classificatin 1 (header 1 + tp left bar): Identificatin/Classificatin 2 (header 2 + bttm left header bar): Ordering cde: (tp right header bar) Series/Type: (tp right header bar) Preliminary data (ptinal): (if necessary) Pressure sensrs AS SEN PD EPCOS AG Reprductin, publicatin and disseminatin f this publicatin, enclsures heret and the infrmatin cntained therein withut EPCOS' prir express cnsent is prhibited. EPCOS AG is a TDK Grup Cmpany.

2 Applicatins Medical devices Autmtive Autmatin Features Piezresistive MEMS technlgy Dimensins: mm Square diaphragm Measured media (frnt side): Dry nn-aggressive gases. Unsuitable fr substances which react with glass, silicn r aluminum. Whetstne bridge with m utput, ratimetric t supply vltage Rated pressure ranges 0.25 up t 1.0 bar Optins Temperature sensing dide Delivery mde Tray Dimensinal drawings Nte1 allwable edge disruptins 100 µm max. electrical diagram checked bnd pads all dimensins in µm Si 100 glass Nte1: gemetry f diaphragm depend n specificatin X5 X1 R1R2 R3 R4 X4 X3 X9 X8 X2 X1 : X2 : X3 : X4 : X5 : X8 : X9 : DD+ ut DD DD ut+ Dide (N) Dide (P) Please read Cautins and warnings and Page 2 f 8

3 Technical data Abslute maximum ratings Parameter Symbl Cnditins Min. Typ. Max. Units Supply vltage Maximum supply vltage DD Withut damage 1) 10 Temperature ranges 2) C Operating temperature range T a Fr t <15 min C Strage temperature range T st 3) C Pressure ranges Operating pressure ranges p r Abslute pressure 4) bar Over pressure p v Abslute pressure 5) 3 p r Burst pressure p berst Abslute pressure 6) 5 p r Electrical specificatins Parameter Symbl Cnditins Min. Typ. Max. Units Supply vltage / bridge resistance Operating supply vltage DD 7) Ttal bridge resistance R 25 C 8) kω Temperature cefficient f ttal bridge resistance Output DD = 5 α Rs C 9) /K 2 β Rs Offset 25 C 10) m Sensitivity 25 C 13) See next table m/bar Temperature cefficient f the sensitivity Pressure hysteresis α S C 15) /K 2 β S Optinal temperature sensing dide phys 16) % FS Frward dide vltage 25 C, I F = 50 µa 17) m Temperature cefficient f frward dide vltage Lng-term stability (Full scale nrmal utput FSON = 120 m) Temperature hysteresis f ffset TH 0 Temperature cycle drift f ffset TCD 0 High temperature drift f ffset HTD 0 Lng term stability f ffset LTS 0 TC 25 C, I F = 50 µa 18) m/k 0.35 ± % FSON 0.25 ± % FSON 0.25 ± % FSON 0.45 ± % FSON Please read Cautins and warnings and Page 3 f 8

4 Operating pressures and rdering cdes 25 C, DD = 5 Symbl Typ. Typ. Typ. Units Operating pressure 4) p r bar Temperature cefficient TC 0 f ffset vltage (unglued) 11) [min/typ/max] + TC 0 8/±4/8 8/±4/8 8/±4/8 µ/k 4/±2/4 4/±2/4 4/±2/4 µ/k Nnlinearity 14) [typ/max] L ±0.2/±0.3 ±0.2/±0.3 ±0.3/±0.4 % FS Sensitivity 13) [min/typ/max] S 300/400/ /300/375 90/120/150 m/bar Temperature sensing dide present yes yes yes Prduct type AEA C27/2 G05 D AEA C27/2 G05 D AEA C27/2 G05 D Ordering cde B58600C5010A003 B58600C5010A004 B58600C5010A005 Other perating pressures upn request. Please read Cautins and warnings and Page 4 f 8

5 Symbls and terms 1) 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) Maximum pwer supply DD This is the maximal allwed vltage, which may be applied t the piezresistive bridge circuit withut damage. Operating temperature range T a This is the perating Temperature range T a,min t T a,max. Because mst f the sensr parameters depend n assembling cnditins like gluing, wire bnding etc, the die has t be tested ver the perating temperature range by the custmer fully assembled. Fr design verificatin and prcess cntrl samples munted n a TO39 base are tested ver a reduced measuring temperature range f T meas,min t T meas,max. Strage temperature range T st If the pressure sensr dies are stred in the temperature range T st,min t T st,max withut applied vltage pwer supply, this will nt affect the perfrmance f the pressure sensr dies. Operating pressure range p r In the perating pressure range 0 t p r,max the pressure sensr die utput characteristic is as defined in this specificatin. Over pressure p O Pressure cycles in the pressure range 0 t p v d nt affect the perfrmance f the pressure sensr dies. Burst pressure p berst Up t the burst pressure p berst the diaphragm f the sensr die will nt be destryed mechanically. This parameter is tested at rm temperature n samples munted n a TO39 base by increasing the applied pressure until the diaphragm is destryed. Operating pwer supply DD The pressure sensr parameters are defined fr a pwer supply vltage f DD = 5. In the perating pwer supply vltage range DD,min t DD,max the ratimetric parameters r( DD) like sensitivity, ffset vltage and the temperature cefficient f the ffset vltage are defined by: r ( ) DD = DD r(5[]) 5[] Ttal bridge resistance R S The ttal bridge resistance is defined between pad X1 and X3, X4 (see the dimensinal drawing in this data sheet) f the clsed piezresistive bridge circuit. The ttal bridge resistance is in a gd apprximatin the utput impedance f the piezresistive bridge circuit. This parameter is tested cmpletely n a wafer (wafer level test measurement). Temperature cefficients f resistance α Rs and β Rs: The temperature cefficients f resistance are tested fr design verificatin n samples, munted n a TO39 base ver a reduced temperature range T meas, min = 20 C t T meas, max = 80 C with T R = 25 C. The temperature cefficients f first and secnd rder are defined with the plynmial: R (T) = R S S (T = 25 C ) 1 +α Rs 2 ( T 25 C) +β Rs ( T 25 C ) The cefficients α Rs and β Rs are calculated using the three measurement pints f R s(t) at T meas,min, T R and T meas,max. Offset vltage 0 The ffset vltage 0 is the utput vltage ut(p = 0 bar abs) at zer abslute pressure and fr a bridge vltage pwer supply DD = 5. Befre andic glass bnding the ffset vltage is tested cmpletely n a wafer (wafer level test measurement) with limits 25 m< < 25 m. Fr design verificatin 0 is measured n samples munted n a TO39 base by extraplating the utput characteristic t zer bar. It shuld be nted that this parameter may be influenced by assembly. Temperature cefficient f ffset vltage TC 0 The temperature cefficients f ffset vltage are defined fr a bridge vltage pwer supply DD = 5. These parameters strngly depend n assembly cnditins like gluing, wire bnding etc. The temperature cefficients f ffset vltage are tested fr design verificatin n samples, munted n a TO39 base ver a reduced temperature range T meas, min = 20 C t T meas, max = 80 C with T R = 25 C. Assuming the ffset vltage is mainly due t induce stress TC 0 may be calculated by extraplating using: 2 2 ( 1+ α (T 25 C) + β (T 25 C) ) ( (25 C) + v (T 25 C) + v (T 25 C ) 0 (T) = s s 1 2 ) Please read Cautins and warnings and Page 5 f 8

6 12) 13) 14) 15) 16) 17) 18) α s and β s are the linear and nnlinear temperature cefficient f the sensitivity respectively (see 15). Therefre TC + and TC are defined fr the measurement temperature range by: Full scale value FS TC + (T = T max max ) (25 C) 25 C FS = ut (p r max TC ) (T = T min min ) (25 C) 25 C Sensitivity S The sensitivity is defined fr a bridge vltage pwer supply DD = 5. It can be determined by the frmula: S = ut (p p rmax r max ) This parameter is tested fr prcess cntrl n samples, munted n a TO39 base. Nnlinearity L This parameter may be influenced by assembly. The nnlinearity is measured using the endpint methd. Assuming a characteristic, this can be apprximated by a plynmial f secnd rder, where the maximum is at p x = p rmax/2. The nnlinearity is defined at p x = p rmax/2, using the equatin: L = ut ut (p (p ) x rmax ) p p This parameter is tested fr prcess cntrl n samples, munted n a TO39 base. Temperature cefficient f sensitivity α S and β S: These parameters may be influenced by assembly. The temperature cefficients f sensitivity are tested fr design verificatin n samples, munted n a TO39 base ver a reduced temperature range T meas, min = 20 C t T meas, max = 80 C with T R = 25 C. The temperature cefficients f first and secnd rder are defined with the plynmial: S (T) = S (T = 25 C) 1 +α S x rmax 2 ( T 25 C) +β ( T 25 C) The cefficients α S and β S are calculated using the three measurement pints f S(T) at T meas,min, T R and T meas,max. Pressure hysteresis phys The pressure hysteresis is the difference between utput vltages at cnstant pressure and cnstant temperature while applying a pressure cycle with pressure steps f p r, min, p 1, p 2, p 3, p r,max, p 3, p 2, p 1, p r, min: phys = ut,2 (p ) With k = min, 1, 2, 3, max. The pressure steps are: p rmin = 0, p 1 = 0.25 p r,max, p 2 = 0.5 p r,max, p 3 = 0.75 p r, max, p r,max. This parameter is tested fr design verificatin n samples, munted n a TO39 base. Frward dide vltage F The vltage drp is measured acrss ande and cathde by a frward current f 47 µa. This parameter is tested cmpletely n a wafer (wafer level test measurement). Temperature cefficient f frward dide vltage TC F The temperature sensitivity f dide vltage drp is defined by the measured values at 20 C and 80 C using the equatin: TC F = F (T k meas,max T meas,max FS ) T ut,1 F (T S (p k meas,min ) meas,min With T meas,min = 20 C and T meas,max = 80 C and the measurement is dne with a cnstant current f 50 µa. The estimated temperature cefficient is als valid at temperatures between 40 C and 135 C. This parameter is tested fr design verificatin n samples munted n a TO39 base. Reliability data Fr lng-term stability f ffset vltage LTS 0 please refer t the defined Aktiv Sensr s standard AS in chapter Reliability data n the internet. ) Please read Cautins and warnings and Page 6 f 8

7 Cautins and warnings Strage (general) All pressure sensrs shuld be stred in their riginal packaging. They shuld nt be placed in harmful envirnments such as crrsive gases nr expsed t heat r direct sunlight, which may cause defrmatins. Similar effects may result frm extreme strage temperatures and climatic cnditins. Avid string the sensr dies in an envirnment where cndensatin may frm r in a lcatin expsed t crrsive gases, which will adversely affect their perfrmance. Plastic materials shuld nt be used fr wrapping/packing when string r transprting these dies, as they may becme charged. Pressure sensr dies shuld be used sn after pening their seal and packaging. Operatin (general) Media cmpatibility with the pressure sensrs must be ensured t prevent their failure. The use f ther media can cause damage and malfunctin. Never use pressure sensrs in atmspheres cntaining explsive liquids r gases. Ensure pressure equalizatin t the envirnment, if gauge pressure sensrs are used. Avid perating the pressure sensrs in an envirnment where cndensatin may frm r in a lcatin expsed t crrsive gases. These envirnments adversely affect their perfrmance. If the perating pressure is nt within the rated pressure range, it may change the utput characteristics. This may als happen with pressure sensr dies if an incrrect munting methd is used. Be sure that the applicable pressure des nt exceed the verpressure, as it may damage the pressure sensr. D nt exceed the maximum rated supply vltage nr the rated strage temperature range, as it may damage the pressure sensr. Temperature variatins in bth the ambient cnditins and the media (liquid r gas) can affect the accuracy f the utput signal frm the pressure sensrs. Be sure t check the perating temperature range and thermal errr specificatin f the pressure sensrs t determine their suitability fr the applicatin. Cnnectins must be wired in accrdance with the terminal assignment specified in the data sheets. Care shuld be taken as reversed pin cnnectins can damage the pressure transmitters r degrade their perfrmance. Cntact between the pressure sensr terminals and metals r ther materials may cause errrs in the utput characteristics. Design ntes (dies) This specificatin describes the mechanical, electrical and physical requirements f a piezresistive sensr die fr measuring pressure. The specified parameters are valid fr the pressure sensr die with pressure applicatin either t the frnt r back side f the diaphragm as described in the data sheet. Pressure applicatin t the ther side may result in differing data. Mst f the parameters are influenced by assembly cnditins. Hence these parameters and the reliability have t be specified fr each specific applicatin and tested ver its temperature range by the custmer. Handling/Munting (dies) Pressure sensr dies shuld be handled apprpriately and nt be tuched with bare hands. They shuld nly be picked up manually by the sides using tweezers. Their tp surface shuld never be tuched with tweezers. Latex glves shuld nt be used fr handling them, as this will inhibit the curing f the adhesive used t bnd the die t the carrier. When handling, be careful t avid cuts caused by the sharp-edged terminals. The sensr die must nt be cntaminated during manufacturing prcesses (gluing, sldering, silk-screen prcess). The package f pressure sensr dies shuld nt t be pened until the die is munted and shuld be clsed after use. The sensr die must nt be cleaned. The sensr die must nt be damaged during the assembly prcess (especially scratches n the diaphragm). Sldering (transducers, transmitters) The thermal capacity f pressure sensrs is nrmally lw, s steps shuld be taken t minimize the effects f external heat. High temperatures may lead t damage r changes in characteristics. A nn-crrsive type f flux resin shuld nrmally be used and cmplete remval f the flux is recmmended. Avid rapid cling due t dipping in slvent. Nte that the utput signal may change if pressure is applied t the terminals during sldering. This listing des nt claim t be cmplete, but merely reflects the experience f EPCOS AG. Please read Cautins and warnings and Page 7 f 8

8 Imprtant ntes The fllwing applies t all prducts named in this publicatin: 1. Sme parts f this publicatin cntain statements abut the suitability f ur prducts fr certain areas f applicatin. These statements are based n ur knwledge f typical requirements that are ften placed n ur prducts in the areas f applicatin cncerned. We nevertheless expressly pint ut that such statements cannt be regarded as binding statements abut the suitability f ur prducts fr a particular custmer applicatin. As a rule, EPCOS is either unfamiliar with individual custmer applicatins r less familiar with them than the custmers themselves. Fr these reasns, it is always ultimately incumbent n the custmer t check and decide whether an EPCOS prduct with the prperties described in the prduct specificatin is suitable fr use in a particular custmer applicatin. 2. We als pint ut that in individual cases, a malfunctin f electrnic cmpnents r failure befre the end f their usual service life cannt be cmpletely ruled ut in the current state f the art, even if they are perated as specified. In custmer applicatins requiring a very high level f peratinal safety and especially in custmer applicatins in which the malfunctin r failure f an electrnic cmpnent culd endanger human life r health (e.g. in accident preventin r life-saving systems), it must therefre be ensured by means f suitable design f the custmer applicatin r ther actin taken by the custmer (e.g. installatin f prtective circuitry r redundancy) that n injury r damage is sustained by third parties in the event f malfunctin r failure f an electrnic cmpnent. 3. The warnings, cautins and prduct-specific ntes must be bserved. 4. In rder t satisfy certain technical requirements, sme f the prducts described in this publicatin may cntain substances subject t restrictins in certain jurisdictins (e.g. because they are classed as hazardus). Useful infrmatin n this will be fund in ur Material Data Sheets n the Internet ( Shuld yu have any mre detailed questins, please cntact ur sales ffices. 5. We cnstantly strive t imprve ur prducts. Cnsequently, the prducts described in this publicatin may change frm time t time. The same is true f the crrespnding prduct specificatins. Please check therefre t what extent prduct descriptins and specificatins cntained in this publicatin are still applicable befre r when yu place an rder. We als reserve the right t discntinue prductin and delivery f prducts. Cnsequently, we cannt guarantee that all prducts named in this publicatin will always be available. The afrementined des nt apply in the case f individual agreements deviating frm the freging fr custmer-specific prducts. 6. Unless therwise agreed in individual cntracts, all rders are subject t the current versin f the General Terms f Delivery fr Prducts and Services in the Electrical Industry published by the German Electrical and Electrnics Industry Assciatin (ZEI). 7. The trade names EPCOS, BAOKE, Alu-X, CeraDide, CSMP, CSSP, CTS, DSSP, MiniBlue, MiniCell, MKK, MLSC, MtrCap, PCC, PhaseCap, PhaseCube, PhaseMd, PhiCap, SIFERRIT, SIFI, SIKOREL, SilverCap, SIMDAD, SIMID, SineFrmer, SIO, SIP5D, SIP5K, ThermFuse, WindCap are trademarks registered r pending in Eurpe and in ther cuntries. Further infrmatin will be fund n the Internet at Page 8 f 8

Pressure sensors. C33 series. Preliminary data AS SEN PD

Pressure sensors. C33 series. Preliminary data AS SEN PD Series/Type: Ordering code: Date: 2009-08-03 Version: 3 Content of header bars 1 and 2 of data sheet will be automatically entered in headers and footers! Please fill in the table and then change the color