Appendix A Glossary of Mathematical Symbols

Transcription

1 Appendix A Glossary of Mathematical Symbols This Appendix summarizes the mathematical symbols that are used throughout the book. Several symbols have multiple meanings; for example, α is used to represent the temperature coefficient of resistance, the coefficient of thermal expansion, and the Hooge factor. We have tried to separate these overloaded symbols in the text and make their meaning clear whenever they are used. Symbols that are only used once or twice (e.g. the Tsai model for phosphorus predeposition) are not included in the table for succinctness. J. C. Doll and B. L. Pruitt, Piezoresistor Design and Applications, 195 Microsystems and Nanosystems, DOI: 107/ , Springer Science+Business Media New York 2013

2 196 Appendix A: Glossary of Mathematical Symbols Table A.1 Glossary of mathematical symbols Symbol Units Description α - Hooge factor α ppm/k Coefficient of thermal expansion α ppm/k Temperature coefficient of resistance β - Sensitivity factor β1 - Sensitivity factor (piezoresistance factor effect) β2 - Sensitivity factor (depth effect) ɛ F/m Electrical permittivity ɛ - Mechanical strain η Pa-s Fluid viscosity γ - Resistance factor m Thermal healing length μ cm 2 /V-sec Carrier mobility ω rad/s Angular frequency π 1/Pa Piezoresistive coefficient π ref 1/Pa Piezoresistive coefficient at 300 K and cm 3 π l 1/Pa Longitudinal piezoresistive coefficient π t 1/Pa Transverse piezoresistive coefficient φ - Transverse loading factor ρ -m Electrical resistivity ρ kg/m 3 Density ρ f kg/m 3 Fluid density σ Pa Mechanical stress σ S/m Electrical conductivity A m 2 Cross-sectional or film area A VJ V/ Hz Amplifier Johnson voltage noise coefficient A VF V Amplifier 1/f voltage noise coefficient A IJ A/ Hz Amplifier Johnson current noise coefficient A IF A Amplifier 1/f current noise coefficient b kg/s Drag coefficient C 1/m Curvature C Pa Elastic stiffness tensor C F Electrical capacitance D m 2 /s Diffusivity d 31 pm/v Transverse piezoelectric coefficient E Pa Elastic modulus E F ev Fermi energy level E g ev Bandgap energy F TMN N/ Hz Thermomechanical force noise f 3dB Hz -3 db frequency f 0 Hz Undamped first resonant mode frequency f d Hz Damped first resonant mode frequency f min Hz Minimum measurement frequency f max Hz Maximum measurement frequency G - Amplifier gain G W/K Thermal conductance (continued)

3 Appendix A: Glossary of Mathematical Symbols 197 Table A.1 (continued) Symbol Units Description G f W/m-K Structure-fluid thermal conductance per unit length h ef f W/m 2 -K Effective convection coefficient h J-sec Planck s constant I m 4 Second moment of area I A Electrical current J A/m 2 Electrical current density k W/m-K Thermal conductivity k N/m Spring constant k b J/K Boltzmann s constant l m Sensor length l pr m Piezoresistor length m kg Mass m ef f kg Effective mass MDD m Minimum detectable displacement MDF N Minimum detectable force N cm 3 Dopant concentration N A cm 3 Acceptor dopant concentration N B cm 3 Background dopant concentration N D cm 3 Donor dopant concentration N epi cm 3 Epitaxial layer dopant concentration n cm 3 Carrier density n i cm 3 Intrinsic carrier density N pr - Number of piezoresistors in the Wheatstone bridge N ef f - Effective number of carriers N total - Total number of carriers N ef f z µm 2 Effective carrier density per unit area Nz total µm 2 Total carrier density per unit area P m Perimeter P - Piezoresistance factor P - Average piezoresistance factor q C Single electron charge Q C Electrical polarization charge Q - Quality factor R Total electrical resistance R K/W Thermal resistance R contact Contact resistance R excess Excess electrical resistance R pr Piezoresistor electrical resistance R s / Sheet resistance S 1/Pa Elastic compliance tensor S XV V/m Displacement sensitivity S FV V/N Force sensitivity S A V 2 /Hz Amplifier noise power spectral density S H V 2 /Hz Hooge (1/f) noise power spectral density (continued)

4 198 Appendix A: Glossary of Mathematical Symbols Table A.1 (continued) Symbol Units Description S J V 2 /Hz Johnson noise power spectral density S TMN V 2 /Hz Thermomechanical noise power spectral density T K Temperature T K Ambient temperature T pr K Average piezoresistor temperature T n - Temperature normalized to 300 K t s Time t m Sensor thickness t j m Junction depth t pr m Epitaxial piezoresistor thickness V bias V Resistor bias voltage V bridge V Bridge bias voltage V A V/ Hz Amplifier noise spectral density V H V/ Hz Hooge (1/f) noise spectral density V J V/ Hz Johnson noise spectral density V noise V/ Hz Overall noise spectral density V TMN V/ Hz Thermomechanical noise spectral density w m Sensor width w pr m Piezoresistor width W W Electrical power dissipation z n m Neutral axis

5 Appendix B Ion Implantation Lookup Tables The following lookup tables can be used to calculate the sensitivity factor (β1 and β 2 ), effective density of carriers per unit area (Nz ef f ), sheet resistance (R s ) and junction depth (t j ) for boron, phosphorus and arsenic ion implantation processes. Park presented the first version of these lookup tables in 2010 [133, 295]. The following tables generalize the results to multiple dopant types and include tables for additional parameters (Nz ef f, R s and t j ). The TSUPREM-4 templates and combination of Python and MATLAB scripts used to generate the tables are part of our open source piezoresistor design code (Appendix C). In all of the tables, the first number corresponds to a process with only an inert anneal while the second number (in parentheses) corresponds to a process with a 1,500 Å wet passivation oxide grown immediately before the N 2 anneal. The wet passivation oxide was grown at the indicated process temperature for 66, 15, or 5 minutes at 900, 1,000, or 1,100 C, respectively. Junction depths are calculated assuming a background resistivity of 10 -cm. J. C. Doll and B. L. Pruitt, Piezoresistor Design and Applications, 199 Microsystems and Nanosystems, DOI: 107/ , Springer Science+Business Media New York 2013

6 200 Appendix B: Ion Implantation Lookup Tables Table B.1 Look-up table for β 1 (-) and β 2 (µm) for boron ion implantation Dose (cm 2 ) Energy (kev) Temp.(c) Time (min) β (0.82) 20 1, (0.83) 1, (0.85) (0.23) 0.22 (0.37) 0.75 (0.82) (0.86) 0.13 (0.24) 0.26 () 0.75 (0.82) (0.86) 0.14 (0.24) 0.29 (0.42) 0.75 (0.82) (0.86) 0.14 (0.25) 0.33 (0.45) 0.75 (0.82) (0.86) 0.15 (0.25) (0.82) (0.86) 0.16 (0.26) 0.38 (0.49) 0.75 (0.82) (0.87) (0.19) 0.16 (0.26) 0.41 (0.51) 0.75 (0.82) (0.87) (0.19) 0.17 (0.27) 0.43 (0.52) , (0.81) 1, (0.83) 0.22 (0.26) 0.22 (0.30) (0.42) (0.81) (0.26) 0.22 (0.30) 0.31 (0.44) (0.81) (0.26) 0.23 (0.30) (0.82) (0.26) 0.23 (0.31) 0.37 (0.49) (0.82) (0.26) 0.23 (0.31) (0.51) (0.82) 0.79 (0.85) 0.22 (0.26) 0.24 (0.32) 0.42 (0.52) (0.82) 0.80 (0.85) 0.22 (0.26) 0.24 (0.32) 0.44 (0.54) (0.82) 0.80 (0.85) 0.22 (0.26) 0.25 (0.32) 0.47 (0.56) , (0.81) 1, (0.83) (0.31) (0.34) 0.33 (0.45) (0.81) 0.79 (0.83) (0.31) (0.34) 0.36 () (0.81) 0.79 (0.83) (0.31) 0.29 (0.35) (0.81) 0.79 (0.83) (0.31) 0.29 (0.35) 0.41 (0.52) (0.81) 0.80 (0.31) 0.29 (0.36) 0.44 (0.54) (0.81) 0.80 (0.31) 0.30 (0.36) 0.46 (0.55) (0.81) 0.80 (0.31) 0.30 (0.36) (0.57) (0.81) 0.80 (0.31) 0.30 (0.37) 0.50 (0.59) (0.67) 20 1, , (0.69) 0.05 (0.16) (0.23) 0.25 (0.38) 0.47 (0.67) (0.69) (0.16) 0.14 (0.24) 0.29 () (0.68) 0.55 (0.67) 0.60 (0.70) (0.16) 0.16 (0.24) 0.33 (0.43) 0.49 (0.68) 0.55 (0.67) 0.61 (0.70) 0.07 (0.16) 0.17 (0.25) 0.36 (0.45) 0.50 (0.68) 0.56 (0.67) 0.62 (0.71) 0.08 (0.16) 0.18 (0.26) () 0.51 (0.68) 0.56 (0.67) 0.62 (0.71) 0.08 (0.16) 0.19 (0.26) (0.68) 0.57 (0.67) 0.63 (0.71) 0.09 (0.16) 0.20 (0.27) 0.45 (0.52) 0.52 (0.68) 0.57 (0.68) 0.63 (0.71) 0.09 (0.17) 0.21 (0.27) 0.47 (0.54) (0.25) (0.25) (0.25) (0.25) (0.26) (0.26) (0.26) (0.26) (continued)

7 Appendix B: Ion Implantation Lookup Tables 201 Table B.1 (continued) Dose (cm 2 )Energy (kev)temp. ( C) Time (min) β , , (0.68) 0.19 (0.29) 0.27 () (0.68) 0.20 (0.29) 0.31 (0.43) (0.69) 0.21 (0.30) 0.35 (0.46) (0.69) 0.21 (0.30) 0.38 () (0.69) 0.22 (0.31) (0.70) 0.23 (0.31) 0.44 (0.52) (0.70) 0.24 (0.31) 0.46 (0.54) 0.58 (0.67) 0.64 (0.70) 0.24 (0.32) (0.56) , , (0.67) 0.27 (0.34) 0.26 (0.35) 0.32 (0.45) (0.68) 0.27 (0.34) 0.27 (0.36) (0.68) 0.27 (0.34) 0.27 (0.36) (0.69) 0.27 (0.34) (0.37) 0.41 (0.52) (0.69) 0.27 (0.34) 0.29 (0.37) 0.44 (0.54) (0.69) 0.27 (0.34) 0.29 (0.37) 0.46 (0.56) (0.69) 0.27 (0.34) 0.30 (0.38) 0.49 (0.57) (0.70) 0.27 (0.34) 0.30 (0.38) 0.51 (0.59) 900 (0.51) 20 1, (0.45) 1, () 0.14 (0.20) 0.30 (0.39) (0.51) 0.41 (0.46) () () 0.17 (0.21) 0.37 (0.44) 0.41 (0.46) 0.41 (0.49) () 0.19 (0.23) (0.49) (0.13) 0.21 (0.25) (0.51) (0.13) 0.22 (0.26) 0.52 (0.54) (0.51) (0.13) 0.24 (0.27) 0.56 (0.57) (0.51) 0.41 () 0.45 (0.51) 0.11 (0.14) 0.25 () 0.59 (0.60) (0.51) 0.42 () 0.45 (0.51) (0.14) 0.27 (0.29) 0.63 (0.62) ,000 (0.42) 1, (0.45) (0.20) 0.32 (0.41) (0.42) (0.46) (0.22) 0.39 (0.45) (0.42) (0.23) 0.45 (0.49) (0.42) (0.25) 0.49 (0.53) (0.42) 0.43 () (0.26) 0.53 (0.56) (0.42) 0.44 () () 0.57 (0.59) (0.42) 0.44 (0.49) (0.29) 0.61 (0.62) 0.41 (0.42) 0.45 (0.49) 0.18 (0.31) 0.64 (0.64) ,000 (0.41) 1, (0.45) 0.26 (0.27) 0.21 (0.23) 0.34 (0.42) (0.41) (0.46) 0.26 () 0.22 (0.24) 0.41 (0.51) (0.41) 0.42 (0.46) 0.26 () 0.24 (0.25) 0.46 (0.51) (0.51) (0.41) () 0.25 (0.27) 0.51 (0.54) (0.51) (0.41) () 0.26 () 0.55 (0.57) (0.41) 0.44 () 0.26 () (0.29) 0.58 (0.60) (0.41) 0.44 () 0.26 () 0.29 (0.30) 0.62 (0.63) (0.41) 0.45 (0.49) 0.26 () 0.30 (0.32) 0.65

8 202 Appendix B: Ion Implantation Lookup Tables Table B.2 Look-up table for β 1 (-) and β 2 (µm) for phosphorus ion implantation Dose (cm 2 ) Energy (kev) Temp. ( C) Time (min) β , (0.86) 1, (0.91) 0.03 (0.09) 0.07 (0.16) 0.20 (0.32) (0.87) 0.78 (0.91) 0.03 (0.09) 0.08 (0.17) 0.25 (0.35) (0.87) 0.78 (0.91) (0.09) 0.09 (0.17) 0.29 (0.37) (0.87) 0.79 (0.92) (0.09) 0.32 () (0.87) 0.80 (0.92) (0.09) (0.42) (0.87) 0.80 (0.92) (0.09) (0.19) 0.39 (0.44) (0.87) 0.81 (0.92) (0.09) 0.13 (0.19) 0.41 (0.46) (0.87) 0.81 (0.92) () 0.13 (0.20) 0.44 () (0.73) , (0.78) 1, (0.85) () 0.08 (0.17) 0.20 (0.35) 0.65 (0.73) 0.68 (0.78) 0.76 (0.85) () (0.38) 0.65 (0.73) 0.69 (0.79) 0.77 (0.85) () 0.29 () 0.65 (0.73) 0.70 (0.79) 0.77 (0.86) () 0.11 (0.19) 0.33 (0.43) 0.65 (0.73) 0.70 (0.79) 0.78 (0.86) () (0.19) 0.36 (0.45) 0.65 (0.73) 0.71 (0.79) 0.78 (0.86) 0.07 () 0.13 (0.20) (0.73) 0.71 (0.79) 0.79 (0.86) 0.07 () 0.13 (0.20) (0.73) 0.72 (0.79) 0.79 (0.86) 0.07 () 0.14 (0.21) 0.44 (0.52) (0.73) 80 1, (0.76) 1, (0.82) () 0.11 (0.19) 0.22 (0.36) 0.69 (0.73) 0.71 (0.77) 0.76 (0.83) () (0.19) 0.26 (0.39) 0.69 (0.73) 0.71 (0.77) 0.77 (0.83) () 0.13 (0.20) 0.30 (0.41) 0.69 (0.73) 0.71 (0.77) 0.78 (0.83) () 0.13 (0.20) 0.33 (0.44) 0.69 (0.73) 0.72 (0.77) 0.78 () 0.14 (0.20) 0.37 (0.46) 0.69 (0.73) 0.72 (0.77) 0.79 () 0.15 (0.21) 0.39 () 0.69 (0.73) 0.72 (0.77) 0.79 () 0.15 (0.21) 0.42 (0.51) 0.69 (0.73) 0.73 (0.77) 0.79 () 0.16 (0.22) 0.45 (0.53) (0.64) 20 1, (0.74) 1, (0.82) 0.09 (0.09) (0.16) 0.20 (0.34) (0.74) 0.59 (0.82) 0.09 (0.09) 0.11 (0.17) 0.24 (0.37) (0.74) 0.61 (0.83) 0.09 (0.09) (0.17) () (0.74) 0.62 (0.83) (0.09) 0.31 (0.43) (0.74) 0.62 (0.83) (0.09) (0.45) (0.75) 0.63 (0.09) 0.14 (0.19) 0.37 () (0.75) 0.64 (0.09) 0.15 (0.19) (0.75) 0.64 (0.09) 0.15 (0.20) 0.42 (0.52) (0.57) 0.05 () 0.43 (0.57) () 0.44 (0.57) 0.07 () 0.45 (0.57) 0.08 () 0.46 (0.57) 0.08 (0.13) 0.46 (0.57) 0.09 (0.13) 0.47 (0.57) 0.09 (0.13) 0.47 (0.57) 0.09 (0.13) (continued)

9 Appendix B: Ion Implantation Lookup Tables 203 Table B.2 (continued) Dose (cm 2 )Energy (kev)temp. ( C) Time (min) β , (0.59) 1, (0.71) 0.09 (0.14) 0.20 (0.34) 0.49 (0.59) 0.57 (0.72) (0.15) 0.24 (0.37) 0.50 (0.60) 0.58 (0.72) 0.11 (0.15) (0.39) 0.50 (0.60) 0.59 (0.73) (0.16) 0.31 (0.42) 0.51 (0.60) 0.60 (0.73) 0.13 (0.16) 0.34 (0.44) 0.51 (0.61) 0.61 (0.73) 0.14 (0.17) (0.61) 0.61 (0.74) (0.49) 0.52 (0.61) 0.62 (0.74) (0.51) (0.55) 80 1, (0.56) 1, (0.67) 0.05 (0.13) 0.09 (0.14) 0.20 (0.33) 0.42 (0.55) 0.49 (0.56) 0.57 (0.68) 0.05 (0.13) (0.15) 0.24 (0.36) 0.42 (0.55) 0.50 (0.57) 0.58 (0.68) (0.13) 0.11 (0.15) (0.38) 0.42 (0.55) 0.50 (0.57) 0.59 (0.69) (0.13) (0.16) 0.31 (0.41) 0.43 (0.55) 0.51 (0.57) 0.60 (0.69) (0.13) 0.13 (0.16) 0.34 (0.43) 0.43 (0.55) 0.52 (0.58) 0.61 (0.70) (0.13) 0.13 (0.17) 0.37 (0.46) 0.44 (0.56) 0.52 (0.58) 0.61 (0.70) (0.13) 0.14 (0.17) 0.39 () 0.44 (0.56) 0.53 (0.58) 0.62 (0.70) 0.07 (0.13) (0.53) 20 1, (0.49) 1, (0.59) 0.53 () 0.35 (0.15) 0.36 (0.30) 0.49 (0.53) 0.39 (0.49) 0.41 (0.60) 0.54 () 0.35 (0.15) 0.38 (0.33) 0.49 (0.53) (0.49) 0.42 (0.61) 0.55 () 0.36 (0.16) 0.41 (0.36) 0.49 (0.53) 0.43 (0.62) 0.55 () 0.36 (0.16) 0.43 (0.39) 0.49 (0.53) 0.43 (0.62) 0.56 () 0.36 (0.17) 0.45 (0.41) (0.53) 0.44 (0.63) 0.56 (0.29) (0.43) (0.54) (0.51) 0.44 (0.63) 0.56 (0.29) (0.46) (0.54) 0.41 (0.51) 0.45 (0.63) 0.56 (0.29) 0.37 (0.19) 0.51 () () , (0.39) 1, (0.46) 0.15 (0.59) 0.22 (0.25) 0.26 (0.27) 0.39 () 0.33 (0.39) (0.59) 0.22 (0.26) 0.30 (0.30) 0.39 (0.49) 0.33 (0.39) 0.38 () 0.18 (0.59) 0.22 (0.26) 0.34 (0.33) 0.39 (0.49) 0.33 (0.39) 0.38 (0.49) 0.19 (0.60) 0.23 (0.27) 0.37 (0.36) (0.49) 0.34 () 0.39 (0.49) 0.20 (0.59) 0.24 (0.27) (0.38) (0.49) 0.34 () 0.21 (0.59) 0.24 () 0.42 (0.41) (0.49) 0.34 () 0.22 (0.59) 0.25 () 0.45 (0.43) (0.49) 0.35 () 0.41 (0.51) 0.23 (0.60) 0.26 () 0.47 (0.45) , (0.37) 1, (0.43) 0.08 (0.59) 0.17 (0.25) 0.25 (0.27) (0.37) 0.36 (0.45) 0.09 (0.60) 0.18 (0.26) 0.29 (0.30) (0.38) 0.38 (0.46) 0.11 (0.60) 0.19 (0.26) 0.33 (0.33) (0.38) 0.39 (0.46) (0.60) 0.19 (0.27) 0.36 (0.36) (0.38) (0.61) 0.20 (0.27) 0.39 (0.39) (0.38) () 0.14 (0.61) 0.21 () 0.41 (0.41) (0.39) 0.41 () 0.15 (0.61) 0.22 () 0.44 (0.43) (0.39) 0.41 (0.49) 0.16 (0.61) 0.23 (0.29) 0.46 (0.45)

10 204 Appendix B: Ion Implantation Lookup Tables Table B.3 Look-up table for β 1 (-) and β 2 (µm) for arsenic ion implantation Dose (cm 2 )Energy (kev)temp. ( C) Time (min) β , (0.90) 1, (0.93) 0.01 (0.01) (0.08) (0.90) 0.80 (0.94) 0.01 (0.01) (0.09) (0.91) 0.81 (0.94) 0.01 (0.01) () (0.91) 0.82 (0.94) 0.01 (0.01) (0.11) 0.67 (0.85) 0.75 (0.91) 0.82 (0.94) 0.01 (0.01) () 0.13 () 0.67 (0.85) 0.75 (0.91) 0.83 (0.95) 0.01 (0.01) () 0.14 (0.13) 0.67 (0.85) 0.76 (0.91) 0.83 (0.95) (0.01) 0.05 () 0.15 (0.14) 0.68 (0.85) 0.76 (0.92) 0.83 (0.95) (0.01) 0.05 () 0.16 (0.14) (0.69) , (0.73) 1, (0.81) () (0.09) 0.54 (0.69) 0.60 (0.73) 0.68 (0.82) () () () 0.54 (0.69) 0.61 (0.74) 0.69 (0.83) () () 0.11 () 0.54 (0.69) 0.62 (0.74) 0.70 (0.83) () () 0.13 (0.13) 0.55 (0.69) 0.62 (0.75) 0.71 (0.83) () 0.05 () 0.14 (0.14) 0.55 (0.69) 0.63 (0.75) 0.71 () 0.05 (0.05) 0.15 (0.15) 0.55 (0.70) 0.63 (0.75) 0.72 () 0.05 (0.05) 0.16 (0.16) 0.56 (0.70) 0.63 (0.76) 0.72 () (0.05) 0.17 (0.17) , (0.68) 1, (0.76) () 0.08 (0.09) (0.68) 0.68 (0.77) () (0.11) (0.69) 0.70 (0.78) 0.05 (0.05) () (0.70) 0.70 (0.78) 0.05 (0.05) 0.13 (0.13) (0.70) 0.71 (0.79) 0.05 (0.05) 0.14 (0.14) (0.70) 0.72 (0.79) (0.05) 0.15 (0.15) (0.71) 0.72 (0.05) 0.16 (0.16) (0.71) 0.72 () 0.17 (0.17) (0.70) 20 1, , (0.87) 0.01 (0.01) (0.08) 0.46 (0.71) 0.55 (0.81) 0.64 (0.88) 0.01 (0.01) () 0.46 (0.71) 0.56 (0.82) 0.65 (0.89) 0.01 (0.01) (0.11) 0.47 (0.71) 0.57 (0.82) 0.66 (0.89) (0.01) 0.05 () 0.13 () (0.72) 0.57 (0.82) 0.67 (0.89) (0.01) 0.05 () 0.14 (0.13) (0.72) 0.58 (0.83) 0.67 (0.89) () 0.05 () 0.15 (0.14) 0.49 (0.72) 0.58 (0.83) 0.68 (0.90) () 0.05 () 0.16 (0.15) 0.49 (0.73) 0.59 (0.83) 0.68 (0.90) () (0.05) 0.17 (0.16) (0.49) (0.01) 0.36 (0.01) 0.36 () 0.36 (0.51) () 0.36 (0.51) () 0.36 (0.52) () 0.37 (0.52) () 0.37 (0.52) () (continued)

11 Appendix B: Ion Implantation Lookup Tables 205 Table B.3 (continued) Dose (cm 2 )Energy (kev)temp. ( C) Time (min) β , (0.56) 1,100 (0.67) (0.09) (0.57) 0.49 (0.68) () (0.11) 0.41 (0.58) 0.51 (0.69) 0.05 () 0.14 () 0.42 (0.59) 0.52 (0.70) (0.05) 0.15 (0.13) 0.43 (0.60) 0.52 (0.71) (0.05) 0.16 (0.15) 0.44 (0.60) 0.53 (0.71) (0.05) 0.17 (0.16) 0.44 (0.61) 0.54 (0.72) 0.07 () 0.19 (0.17) 0.45 (0.61) 0.54 (0.72) 0.07 () (0.44) 80 1,000 1,100 (0.61) () () () 0.37 (0.44) 0.41 (0.51) 0.50 (0.63) () 0.05 () (0.11) 0.37 (0.45) 0.42 (0.52) 0.51 (0.64) () 0.05 (0.05) 0.14 (0.13) 0.37 (0.45) 0.43 (0.53) 0.52 (0.64) () (0.05) 0.15 (0.14) 0.37 (0.46) 0.44 (0.54) 0.53 () () 0.16 (0.15) 0.37 (0.46) 0.44 (0.54) 0.53 () 0.07 () 0.17 (0.16) 0.37 (0.46) 0.45 (0.55) () 0.07 () 0.19 (0.17) (0.55) () 0.07 () , (0.62) 1, (0.73) (0.01) (0.09) 0.33 (0.51) 0.37 (0.63) 0.45 (0.74) (0.01) () 0.34 (0.52) 0.37 (0.64) 0.46 (0.75) (0.01) 0.05 () 0.14 () 0.34 (0.53) (0.76) (0.01) () 0.16 (0.13) 0.34 (0.53) 0.39 (0.76) () () 0.17 (0.14) 0.34 (0.54) (0.77) () 0.07 (0.05) 0.19 (0.15) 0.34 (0.54) 0.49 (0.77) () 0.07 (0.05) 0.20 (0.16) 0.34 (0.54) (0.67) 0.50 (0.78) () 0.08 (0.05) 0.21 (0.17) (0.31) ,000 (0.35) 1, () () () (0.32) 0.29 (0.35) 0.32 () () 0.05 (0.05) 0.15 (0.14) (0.32) 0.29 (0.36) 0.33 (0.49) 0.03 () () 0.17 (0.15) (0.33) 0.29 (0.37) () () 0.19 (0.17) 0.29 (0.33) 0.29 (0.37) () 0.07 (0.07) (0.33) 0.30 (0.38) 0.35 (0.51) (0.07) 0.23 (0.19) 0.29 (0.33) 0.30 (0.38) 0.35 (0.52) (0.08) 0.24 (0.20) 0.29 (0.33) 0.30 (0.39) 0.36 (0.52) (0.08) 0.25 (0.21) 900 (0.29) 80 1,000 (0.32) 1, (0.42) (0.05) (0.13) (0.30) 0.29 (0.33) 0.32 (0.43) 0.05 (0.05) 0.15 (0.15) (0.31) 0.29 (0.33) 0.33 (0.44) () 0.17 (0.16) (0.31) 0.29 (0.34) 0.34 (0.45) 0.03 () 0.19 (0.31) 0.30 (0.34) 0.35 (0.45) (0.07) 0.21 (0.19) (0.31) 0.30 (0.35) 0.35 (0.46) (0.07) 0.23 (0.20) (0.31) 0.30 (0.35) 0.36 (0.46) (0.08) 0.24 (0.21) (0.31) 0.30 (0.35) (0.08) 0.25 (0.23)

12 206 Appendix B: Ion Implantation Lookup Tables Table B.4 Look-up table for Rs ( / ) for boron ion implantation Dose (cm 2 ) Energy (kev) Temp. ( C) e2 (8.49e2) 20 1, e2 (7.72e2) 1, e2 (6.02e2) Time (min) e2 (8.50e2) 4.47e2 (7.67e2) 3.15e2 (5.87e2) 5.78e2 (8.51e2) 4.32e2 (7.63e2) 2.98e2 (5.73e2) 5.72e2 (8.52e2) 4.21e2 (7.59e2) 2.86e2 (5.62e2) 5.66e2 (8.52e2) 4.10e2 (7.55e2) 2.77e2 (5.51e2) 5.61e2 (8.53e2) 4.01e2 (7.52e2) 2.68e2 (5.42e2) 5.57e2 (8.53e2) 3.93e2 (7.48e2) 2.62e2 (5.34e2) 5.53e2 (8.53e2) 3.86e2 (7.44e2) 2.56e2 (5.26e2) e2 (4.69e2) , e2 (4.66e2) 1, e2 (4.17e2) 3.67e2 (4.69e2) 3.44e2 (4.65e2) 2.89e2 (4.08e2) 3.67e2 (4.69e2) 3.40e2 (4.64e2) 2.79e2 (4.00e2) 3.67e2 (4.70e2) 3.36e2 (4.63e2) 2.70e2 (3.93e2) 3.66e2 (4.70e2) 3.33e2 (4.61e2) 2.63e2 (3.87e2) 3.66e2 (4.70e2) 3.30e2 (4.60e2) 2.57e2 (3.82e2) 3.65e2 (4.70e2) 3.27e2 (4.59e2) 2.52e2 (3.77e2) 3.65e2 (4.71e2) 3.25e2 (4.57e2) 2.47e2 (3.72e2) e2 (3.75e2) 80 1, e2 (3.78e2) 1, e2 (3.53e2) 3.10e2 (3.76e2) 3.04e2 (3.78e2) 2.71e2 (3.47e2) 3.10e2 (3.76e2) 3.02e2 (3.77e2) 2.64e2 (3.41e2) 3.11e2 (3.76e2) 3.00e2 (3.76e2) 2.58e2 (3.36e2) 3.11e2 (3.76e2) 2.98e2 (3.76e2) 2.52e2 (3.31e2) 3.11e2 (3.76e2) 2.97e2 (3.75e2) 2.47e2 (3.27e2) 3.11e2 (3.76e2) 2.96e2 (3.74e2) 2.43e2 (3.23e2) 3.11e2 (3.77e2) 2.94e2 (3.73e2) 2.39e2 (3.19e2) e1 (2.20e2) 20 1, e1 (1.30e2) 1, e1 (1.00e2) 9.21e1 (2.20e2) 6.53e1 (1.30e2) 5.27e1 (9.80e1) 8.93e1 (2.20e2) 6.32e1 (1.29e2) 5.11e1 (9.60e1) 8.79e1 (2.21e2) 6.17e1 (1.28e2) 5.00e1 (9.43e1) 8.83e1 (2.21e2) 6.05e1 (1.27e2) 4.90e1 (9.27e1) 8.81e1 (2.21e2) 5.96e1 (1.27e2) 4.82e1 (9.13e1) 8.74e1 (2.22e2) 5.87e1 (1.26e2) 4.75e1 (9.00e1) 8.64e1 (2.22e2) 5.80e1 (1.25e2) 4.68e1 (8.88e1) e1 (1.04e2) 6.62e1 (1.05e2) 6.64e1 (1.05e2) 6.66e1 (1.05e2) 6.68e1 (1.05e2) 6.69e1 (1.05e2) 6.70e1 (1.05e2) 6.70e1 (1.06e2) (continued)

13 Appendix B: Ion Implantation Lookup Tables 207 Table B.4 (continued) Dose (cm 2 ) Energy (kev) Temp. ( C) , e1 (9.71e1) 1, e1 (8.40e1) Time (min) e1 (9.70e1) 5.26e1 (8.23e1) 5.99e1 (9.68e1) 5.13e1 (8.09e1) 5.91e1 (9.66e1) 5.02e1 (7.96e1) 5.85e1 (9.63e1) 4.93e1 (7.85e1) 5.79e1 (9.61e1) 4.85e1 (7.74e1) 5.74e1 (9.58e1) 4.78e1 (7.65e1) 5.69e1 (9.55e1) 4.72e1 (7.56e1) e1 (8.10e1) 80 1, e1 (7.96e1) 1, e1 (7.37e1) 6.01e1 (8.11e1) 5.60e1 (7.97e1) 5.07e1 (7.26e1) 6.00e1 (8.12e1) 5.54e1 (7.97e1) 4.97e1 (7.17e1) 5.99e1 (8.13e1) 5.49e1 (7.96e1) 4.88e1 (7.07e1) 5.98e1 (8.14e1) 5.45e1 (7.95e1) 4.81e1 (6.99e1) 5.97e1 (8.15e1) 5.42e1 (7.95e1) 4.74e1 (6.91e1) 5.97e1 (8.16e1) 5.39e1 (7.93e1) 4.68e1 (6.84e1) 5.96e1 (8.17e1) 5.36e1 (7.92e1) 4.63e1 (6.77e1) e1 (5.90e1) 20 1, e1 (2.12e1) 1, e0 (1.24e1) 5.74e1 (5.70e1) 1.81e1 (2.04e1) 7.00e0 (1.22e1) 5.47e1 (5.52e1) 1.60e1 (1.98e1) 6.88e0 (1.20e1) 5.25e1 (5.35e1) 1.45e1 (1.93e1) 6.79e0 (1.18e1) 5.06e1 (5.20e1) 1.34e1 (1.90e1) 6.72e0 (1.17e1) 4.89e1 (5.10e1) 1.25e1 (1.87e1) 6.66e0 (1.16e1) 4.74e1 (5.03e1) 1.17e1 (1.85e1) 6.61e0 (1.15e1) 4.60e1 (4.94e1) 1.13e1 (1.83e1) 6.57e0 (1.14e1) e1 (3.84e1) , e1 (1.53e1) 1, e0 (1.03e1) 3.49e1 (3.79e1) 1.44e1 (1.40e1) 6.70e0 (1.01e1) 3.41e1 (3.75e1) 1.31e1 (1.30e1) 6.59e0 (9.91e0) 3.34e1 (3.71e1) 1.21e1 (1.22e1) 6.51e0 (9.78e0) 3.28e1 (3.67e1) 1.14e1 (1.15e1) 6.44e0 (9.68e0) 3.22e1 (3.62e1) 1.08e1 (1.09e1) 6.39e0 (9.59e0) 3.16e1 (3.58e1) 1.03e1 (1.05e1) 6.34e0 (9.51e0) 3.11e1 (3.55e1) 9.81e0 (1.02e1) 6.30e0 (9.45e0) e1 (2.64e1) 80 1, e1 (1.31e1) 1, e0 (9.46e0) 2.38e1 (2.68e1) 1.17e1 (1.20e1) 6.59e0 (9.30e0) 2.34e1 (2.69e1) 1.09e1 (1.12e1) 6.49e0 (9.17e0) 2.30e1 (2.68e1) 1.03e1 (1.06e1) 6.41e0 (9.07e0) 2.27e1 (2.67e1) 9.77e0 (1.01e1) 6.35e0 (8.98e0) 2.25e1 (2.66e1) 9.32e0 (9.73e0) 6.30e0 (8.90e0) 2.23e1 (2.65e1) 8.94e0 (9.35e0) 6.26e0 (8.83e0) 2.21e1 (2.63e1) 8.64e0 (9.12e0) 6.22e0 (8.77e0)

14 208 Appendix B: Ion Implantation Lookup Tables Table B.5 Look-up table for Rs ( / ) for phosphorus ion implantation Dose (cm 2 ) Energy (kev) Temp. ( C) e2 (7.10e2) 20 1, e2 (8.53e2) 1, e2 (9.15e2) Time (min) e2 (7.05e2) 3.04e2 (8.41e2) 2.07e2 (8.90e2) 3.80e2 (7.01e2) 2.92e2 (8.30e2) 1.95e2 (8.68e2) 3.75e2 (6.98e2) 2.83e2 (8.20e2) 1.87e2 (8.51e2) 3.70e2 (6.95e2) 2.75e2 (8.11e2) 1.80e2 (8.36e2) 3.66e2 (6.92e2) 2.68e2 (8.02e2) 1.74e2 (8.23e2) 3.63e2 (6.90e2) 2.63e2 (7.94e2) 1.70e2 (8.12e2) 3.59e2 (6.88e2) 2.58e2 (7.86e2) 1.66e2 (8.02e2) e2 (3.29e2) , e2 (3.12e2) 1, e2 (3.16e2) 2.67e2 (3.28e2) 2.32e2 (3.09e2) 1.69e2 (3.05e2) 2.63e2 (3.26e2) 2.26e2 (3.05e2) 1.60e2 (2.96e2) 2.61e2 (3.25e2) 2.21e2 (3.02e2) 1.53e2 (2.89e2) 2.60e2 (3.24e2) 2.16e2 (2.99e2) 1.48e2 (2.83e2) 2.58e2 (3.24e2) 2.12e2 (2.96e2) 1.43e2 (2.77e2) 2.57e2 (3.23e2) 2.08e2 (2.94e2) 1.40e2 (2.72e2) 2.56e2 (3.22e2) 2.05e2 (2.91e2) 1.37e2 (2.67e2) e2 (2.76e2) 80 1, e2 (2.49e2) 1, e2 (2.37e2) 2.39e2 (2.75e2) 2.22e2 (2.46e2) 1.70e2 (2.29e2) 2.37e2 (2.74e2) 2.18e2 (2.44e2) 1.61e2 (2.23e2) 2.36e2 (2.74e2) 2.14e2 (2.41e2) 1.55e2 (2.17e2) 2.36e2 (2.73e2) 2.10e2 (2.39e2) 1.50e2 (2.12e2) 2.35e2 (2.72e2) 2.07e2 (2.37e2) 1.46e2 (2.08e2) 2.35e2 (2.72e2) 2.04e2 (2.35e2) 1.42e2 (2.05e2) 2.34e2 (2.71e2) 2.02e2 (2.34e2) 1.39e2 (2.01e2) e1 (1.74e2) 20 1, e1 (2.16e2) 1, e1 (2.33e2) 4.95e1 (1.73e2) 4.67e1 (2.14e2) 4.03e1 (2.25e2) 4.86e1 (1.72e2) 4.62e1 (2.11e2) 3.91e1 (2.19e2) 4.81e1 (1.72e2) 4.56e1 (2.09e2) 3.81e1 (2.13e2) 4.78e1 (1.71e2) 4.52e1 (2.07e2) 3.73e1 (2.08e2) 4.75e1 (1.71e2) 4.48e1 (2.05e2) 3.67e1 (2.04e2) 4.73e1 (1.71e2) 4.44e1 (2.03e2) 3.61e1 (2.00e2) 4.71e1 (1.70e2) 4.41e1 (2.01e2) 3.56e1 (1.96e2) e1 (6.61e1) 4.28e1 (6.60e1) 4.11e1 (6.58e1) 4.00e1 (6.57e1) 3.93e1 (6.56e1) 3.88e1 (6.55e1) 3.84e1 (6.54e1) 3.81e1 (6.53e1) (continued)

15 Appendix B: Ion Implantation Lookup Tables 209 Table B.5 (continued) Dose (cm 2 ) Energy (kev) Temp. ( C) , e1 (6.63e1) 1, e1 (8.17e1) Time (min) e1 (6.57e1) 3.22e1 (7.95e1) 3.67e1 (6.51e1) 3.13e1 (7.77e1) 3.63e1 (6.46e1) 3.06e1 (7.61e1) 3.59e1 (6.41e1) 3.00e1 (7.46e1) 3.56e1 (6.36e1) 2.95e1 (7.34e1) 3.53e1 (6.32e1) 2.91e1 (7.22e1) 3.50e1 (6.28e1) 2.87e1 (7.11e1) e1 (5.34e1) 80 1, e1 (5.05e1) 1, e1 (5.94e1) 4.40e1 (5.32e1) 3.84e1 (5.01e1) 3.31e1 (5.79e1) 4.31e1 (5.31e1) 3.79e1 (4.97e1) 3.22e1 (5.67e1) 4.25e1 (5.29e1) 3.74e1 (4.93e1) 3.14e1 (5.56e1) 4.21e1 (5.28e1) 3.70e1 (4.90e1) 3.09e1 (5.47e1) 4.17e1 (5.28e1) 3.67e1 (4.87e1) 3.03e1 (5.38e1) 4.14e1 (5.27e1) 3.64e1 (4.84e1) 2.99e1 (5.31e1) 4.11e1 (5.26e1) 3.61e1 (4.81e1) 2.95e1 (5.24e1) e0 (2.20e1) 20 1, e0 (2.58e1) 1, e0 (3.22e1) 9.66e0 (2.19e1) 5.83e0 (2.56e1) 5.46e0 (3.15e1) 9.39e0 (2.19e1) 5.75e0 (2.55e1) 5.40e0 (3.10e1) 9.14e0 (2.18e1) 5.70e0 (2.53e1) 5.35e0 (3.05e1) 8.91e0 (2.18e1) 5.65e0 (2.52e1) 5.31e0 (3.01e1) 8.70e0 (2.18e1) 5.62e0 (2.51e1) 5.28e0 (2.97e1) 8.51e0 (2.18e1) 5.59e0 (2.50e1) 5.25e0 (2.94e1) 8.32e0 (2.17e1) 5.57e0 (2.49e1) 5.22e0 (2.90e1) e1 (7.76e0) , e0 (6.93e0) 1, e0 (1.10e1) 1.49e1 (7.70e0) 5.27e0 (6.87e0) 4.48e0 (1.08e1) 1.40e1 (7.64e0) 5.09e0 (6.82e0) 4.40e0 (1.06e1) 1.32e1 (7.60e0) 4.97e0 (6.78e0) 4.34e0 (1.05e1) 1.26e1 (7.57e0) 4.89e0 (6.75e0) 4.28e0 (1.04e1) 1.20e1 (7.54e0) 4.82e0 (6.71e0) 4.24e0 (1.03e1) 1.15e1 (7.52e0) 4.76e0 (6.68e0) 4.21e0 (1.02e1) 1.10e1 (7.50e0) 4.72e0 (6.67e0) 4.17e0 (1.01e1) e1 (6.58e0) 80 1, e0 (6.14e0) 1, e0 (8.95e0) 1.45e1 (6.55e0) 5.81e0 (6.06e0) 4.64e0 (8.80e0) 1.36e1 (6.50e0) 5.50e0 (6.00e0) 4.55e0 (8.68e0) 1.29e1 (6.46e0) 5.31e0 (5.96e0) 4.48e0 (8.57e0) 1.24e1 (6.40e0) 5.19e0 (5.92e0) 4.42e0 (8.49e0) 1.19e1 (6.35e0) 5.10e0 (5.89e0) 4.38e0 (8.41e0) 1.15e1 (6.31e0) 5.03e0 (5.86e0) 4.34e0 (8.35e0) 1.12e1 (6.28e0) 4.97e0 (5.83e0) 4.31e0 (8.28e0)

16 210 Appendix B: Ion Implantation Lookup Tables Table B.6 Look-up table for Rs ( / ) for arsenic ion implantation Dose (cm 2 ) Energy (kev) Temp. ( C) e3 (1.04e4) 20 1, e3 (9.61e3) 1, e2 (7.13e3) Time (min) e3 (9.95e3) 1.13e3 (9.06e3) 7.17e2 (6.87e3) 1.50e3 (9.58e3) 1.08e3 (8.68e3) 6.74e2 (6.69e3) 1.47e3 (9.28e3) 1.04e3 (8.41e3) 6.42e2 (6.56e3) 1.45e3 (9.03e3) 1.01e3 (8.19e3) 6.18e2 (6.47e3) 1.43e3 (8.81e3) 9.84e2 (8.02e3) 5.98e2 (6.39e3) 1.42e3 (8.62e3) 9.61e2 (7.86e3) 5.81e2 (6.33e3) 1.40e3 (8.46e3) 9.41e2 (7.72e3) 5.67e2 (6.28e3) e2 (1.43e3) , e2 (1.02e3) 1, e2 (8.29e2) 3.55e2 (1.39e3) 2.95e2 (9.81e2) 2.26e2 (7.75e2) 3.48e2 (1.36e3) 2.88e2 (9.50e2) 2.16e2 (7.35e2) 3.44e2 (1.33e3) 2.82e2 (9.24e2) 2.08e2 (7.05e2) 3.41e2 (1.31e3) 2.77e2 (9.03e2) 2.02e2 (6.81e2) 3.38e2 (1.29e3) 2.73e2 (8.84e2) 1.97e2 (6.61e2) 3.35e2 (1.27e3) 2.69e2 (8.68e2) 1.92e2 (6.44e2) 3.33e2 (1.26e3) 2.66e2 (8.53e2) 1.89e2 (6.29e2) e2 (8.71e2) 80 1, e2 (5.85e2) 1, e2 (4.90e2) 3.21e2 (8.46e2) 2.89e2 (5.68e2) 2.29e2 (4.62e2) 3.17e2 (8.29e2) 2.84e2 (5.55e2) 2.19e2 (4.40e2) 3.15e2 (8.18e2) 2.79e2 (5.43e2) 2.11e2 (4.24e2) 3.14e2 (8.10e2) 2.75e2 (5.34e2) 2.05e2 (4.11e2) 3.13e2 (8.04e2) 2.72e2 (5.25e2) 2.00e2 (3.99e2) 3.12e2 (7.98e2) 2.69e2 (5.17e2) 1.96e2 (3.89e2) 3.11e2 (7.93e2) 2.66e2 (5.10e2) 1.92e2 (3.81e2) e2 (2.28e3) 20 1, e2 (2.57e3) 1, e2 (1.91e3) 2.54e2 (2.21e3) 1.93e2 (2.42e3) 1.52e2 (1.78e3) 2.44e2 (2.16e3) 1.88e2 (2.30e3) 1.46e2 (1.69e3) 2.37e2 (2.12e3) 1.84e2 (2.22e3) 1.41e2 (1.63e3) 2.32e2 (2.09e3) 1.82e2 (2.15e3) 1.38e2 (1.58e3) 2.29e2 (2.06e3) 1.79e2 (2.09e3) 1.35e2 (1.53e3) 2.26e2 (2.04e3) 1.77e2 (2.04e3) 1.32e2 (1.50e3) 2.23e2 (2.02e3) 1.75e2 (2.00e3) 1.30e2 (1.47e3) e2 (3.29e2) 9.49e1 (3.22e2) 8.92e1 (3.16e2) 8.47e1 (3.12e2) 8.10e1 (3.08e2) 7.79e1 (3.05e2) 7.54e1 (3.02e2) 7.31e1 (3.00e2) (continued)

17 Appendix B: Ion Implantation Lookup Tables 211 Table B.6 (continued) Dose (cm 2 ) Energy (kev) Temp. ( C) , e1 (2.36e2) 1, e1 (2.19e2) Time (min) e1 (2.30e2) 3.74e1 (2.09e2) 4.61e1 (2.25e2) 3.64e1 (2.01e2) 4.47e1 (2.21e2) 3.57e1 (1.95e2) 4.38e1 (2.18e2) 3.51e1 (1.89e2) 4.30e1 (2.14e2) 3.46e1 (1.85e2) 4.23e1 (2.12e2) 3.42e1 (1.81e2) 4.18e1 (2.09e2) 3.38e1 (1.78e2) e1 (1.87e2) 80 1, e1 (1.24e2) 1, e1 (1.26e2) 8.24e1 (1.81e2) 4.88e1 (1.21e2) 3.85e1 (1.21e2) 7.87e1 (1.76e2) 4.71e1 (1.19e2) 3.75e1 (1.18e2) 7.59e1 (1.72e2) 4.58e1 (1.17e2) 3.68e1 (1.15e2) 7.36e1 (1.69e2) 4.49e1 (1.15e2) 3.62e1 (1.12e2) 7.15e1 (1.66e2) 4.41e1 (1.14e2) 3.57e1 (1.10e2) 6.98e1 (1.64e2) 4.35e1 (1.13e2) 3.52e1 (1.08e2) 6.82e1 (1.62e2) 4.30e1 (1.12e2) 3.48e1 (1.07e2) e1 (4.35e2) 20 1, e1 (4.47e2) 1, e1 (3.92e2) 7.06e1 (4.24e2) 3.44e1 (4.32e2) 2.42e1 (3.69e2) 6.77e1 (4.15e2) 3.24e1 (4.19e2) 2.35e1 (3.52e2) 6.51e1 (4.08e2) 3.10e1 (4.09e2) 2.30e1 (3.39e2) 6.28e1 (4.03e2) 3.00e1 (4.01e2) 2.26e1 (3.28e2) 6.07e1 (3.98e2) 2.92e1 (3.93e2) 2.23e1 (3.19e2) 5.88e1 (3.94e2) 2.86e1 (3.87e2) 2.20e1 (3.12e2) 5.73e1 (3.90e2) 2.81e1 (3.81e2) 2.18e1 (3.05e2) e1 (5.45e1) , e1 (3.14e1) 1, e0 (2.98e1) 3.92e1 (5.36e1) 1.90e1 (2.90e1) 7.90e0 (2.89e1) 3.82e1 (5.24e1) 1.71e1 (2.73e1) 7.24e0 (2.83e1) 3.72e1 (5.11e1) 1.58e1 (2.62e1) 6.82e0 (2.78e1) 3.62e1 (4.98e1) 1.48e1 (2.53e1) 6.50e0 (2.74e1) 3.53e1 (4.87e1) 1.40e1 (2.46e1) 6.27e0 (2.70e1) 3.45e1 (4.77e1) 1.33e1 (2.40e1) 6.08e0 (2.67e1) 3.37e1 (4.67e1) 1.28e1 (2.35e1) 5.92e0 (2.65e1) e1 (4.05e1) 80 1, e1 (2.56e1) 1, e0 (1.85e1) 4.20e1 (4.04e1) 1.89e1 (2.33e1) 7.96e0 (1.78e1) 4.02e1 (3.98e1) 1.71e1 (2.16e1) 7.33e0 (1.73e1) 3.88e1 (3.91e1) 1.58e1 (2.05e1) 6.90e0 (1.70e1) 3.75e1 (3.84e1) 1.48e1 (1.95e1) 6.59e0 (1.67e1) 3.64e1 (3.77e1) 1.40e1 (1.88e1) 6.35e0 (1.65e1) 3.54e1 (3.70e1) 1.33e1 (1.82e1) 6.16e0 (1.63e1) 3.45e1 (3.64e1) 1.28e1 (1.77e1) 6.01e0 (1.61e1)

18 212 Appendix B: Ion Implantation Lookup Tables Table B.7 Look-up table for N z ef f (µm 2 ) for boron ion implantation Dose (cm 2 ) Energy (kev) Temp. ( C) e5 (4.44e5) 20 1, e6 (4.49e5) 1, e6 (5.06e5) Time (min) e5 (4.43e5) 1.27e6 (4.47e5) 1.57e6 (5.08e5) 9.20e5 (4.41e5) 1.31e6 (4.46e5) 1.60e6 (5.11e5) 9.33e5 (4.40e5) 1.33e6 (4.44e5) 1.62e6 (5.14e5) 9.45e5 (4.39e5) 1.36e6 (4.42e5) 1.63e6 (5.17e5) 9.56e5 (4.38e5) 1.38e6 (4.41e5) 1.65e6 (5.20e5) 9.65e5 (4.37e5) 1.39e6 (4.40e5) 1.66e6 (5.22e5) 9.74e5 (4.36e5) 1.41e6 (4.39e5) 1.66e6 (5.24e5) e6 (9.01e5) , e6 (8.49e5) 1, e6 (8.26e5) 1.37e6 (8.99e5) 1.49e6 (8.45e5) 1.62e6 (8.30e5) 1.37e6 (8.98e5) 1.50e6 (8.41e5) 1.64e6 (8.31e5) 1.37e6 (8.96e5) 1.51e6 (8.38e5) 1.65e6 (8.34e5) 1.37e6 (8.95e5) 1.52e6 (8.36e5) 1.66e6 (8.35e5) 1.37e6 (8.93e5) 1.52e6 (8.33e5) 1.67e6 (8.38e5) 1.37e6 (8.91e5) 1.53e6 (8.30e5) 1.68e6 (8.41e5) 1.37e6 (8.90e5) 1.53e6 (8.28e5) 1.69e6 (8.43e5) e6 (1.15e6) 80 1, e6 (1.08e6) 1, e6 (1.02e6) 1.58e6 (1.14e6) 1.62e6 (1.08e6) 1.68e6 (1.02e6) 1.57e6 (1.14e6) 1.62e6 (1.07e6) 1.68e6 (1.02e6) 1.57e6 (1.14e6) 1.62e6 (1.07e6) 1.69e6 (1.02e6) 1.57e6 (1.14e6) 1.63e6 (1.07e6) 1.69e6 (1.03e6) 1.57e6 (1.14e6) 1.63e6 (1.06e6) 1.70e6 (1.03e6) 1.57e6 (1.14e6) 1.63e6 (1.06e6) 1.71e6 (1.03e6) 1.57e6 (1.14e6) 1.63e6 (1.06e6) 1.71e6 (1.03e6) e7 (3.39e6) 20 1, e7 (6.00e6) 1, e7 (6.97e6) 1.16e7 (3.38e6) 1.59e7 (5.98e6) 1.75e7 (6.98e6) 1.20e7 (3.36e6) 1.62e7 (5.95e6) 1.76e7 (6.99e6) 1.21e7 (3.35e6) 1.64e7 (5.93e6) 1.76e7 (7.00e6) 1.19e7 (3.33e6) 1.65e7 (5.92e6) 1.77e7 (7.02e6) 1.19e7 (3.32e6) 1.67e7 (5.91e6) 1.77e7 (7.04e6) 1.19e7 (3.31e6) 1.68e7 (5.91e6) 1.77e7 (7.06e6) 1.19e7 (3.29e6) 1.69e7 (5.90e6) 1.77e7 (7.07e6) e7 (7.38e6) 1.38e7 (7.36e6) 1.38e7 (7.33e6) 1.37e7 (7.31e6) 1.36e7 (7.29e6) 1.36e7 (7.27e6) 1.36e7 (7.25e6) 1.36e7 (7.23e6) (continued)

19 Appendix B: Ion Implantation Lookup Tables 213 Table B.7 (continued) Dose (cm 2 ) Energy (kev) Temp. ( C) , e7 (8.02e6) 1, e7 (8.65e6) Time (min) e7 (8.00e6) 1.71e7 (8.66e6) 1.56e7 (7.98e6) 1.72e7 (8.67e6) 1.58e7 (7.96e6) 1.73e7 (8.69e6) 1.59e7 (7.96e6) 1.73e7 (8.70e6) 1.61e7 (7.95e6) 1.73e7 (8.71e6) 1.62e7 (7.94e6) 1.74e7 (8.72e6) 1.63e7 (7.94e6) 1.74e7 (8.73e6) e7 (9.41e6) 80 1, e7 (9.64e6) 1, e7 (9.90e6) 1.43e7 (9.39e6) 1.58e7 (9.60e6) 1.71e7 (9.91e6) 1.43e7 (9.37e6) 1.60e7 (9.57e6) 1.73e7 (9.91e6) 1.43e7 (9.35e6) 1.61e7 (9.55e6) 1.73e7 (9.92e6) 1.43e7 (9.33e6) 1.62e7 (9.53e6) 1.74e7 (9.93e6) 1.43e7 (9.31e6) 1.63e7 (9.52e6) 1.75e7 (9.95e6) 1.44e7 (9.29e6) 1.64e7 (9.51e6) 1.75e7 (9.96e6) 1.44e7 (9.27e6) 1.64e7 (9.50e6) 1.75e7 (9.96e6) e7 (1.74e7) 20 1, e7 (5.45e7) 1, e8 (9.26e7) 1.83e7 (1.81e7) 6.65e7 (5.64e7) 1.76e8 (9.34e7) 1.93e7 (1.88e7) 7.53e7 (5.78e7) 1.77e8 (9.39e7) 2.03e7 (1.94e7) 8.31e7 (5.90e7) 1.78e8 (9.43e7) 2.11e7 (2.00e7) 9.02e7 (5.98e7) 1.78e8 (9.46e7) 2.19e7 (2.04e7) 9.67e7 (6.05e7) 1.78e8 (9.49e7) 2.27e7 (2.07e7) 1.03e8 (6.10e7) 1.79e8 (9.51e7) 2.34e7 (2.10e7) 1.07e8 (6.15e7) 1.79e8 (9.53e7) e7 (2.63e7) , e7 (7.79e7) 1, e8 (1.14e8) 2.97e7 (2.67e7) 8.44e7 (8.54e7) 1.84e8 (1.15e8) 3.05e7 (2.70e7) 9.30e7 (9.24e7) 1.85e8 (1.16e8) 3.12e7 (2.74e7) 1.00e8 (9.84e7) 1.86e8 (1.17e8) 3.19e7 (2.78e7) 1.07e8 (1.04e8) 1.86e8 (1.17e8) 3.26e7 (2.82e7) 1.13e8 (1.10e8) 1.86e8 (1.17e8) 3.33e7 (2.85e7) 1.19e8 (1.15e8) 1.87e8 (1.18e8) 3.39e7 (2.89e7) 1.24e8 (1.17e8) 1.87e8 (1.18e8) e7 (3.77e7) 80 1, e7 (8.97e7) 1, e8 (1.24e8) 4.30e7 (3.71e7) 1.02e8 (9.86e7) 1.87e8 (1.25e8) 4.39e7 (3.69e7) 1.10e8 (1.06e8) 1.88e8 (1.26e8) 4.47e7 (3.70e7) 1.17e8 (1.14e8) 1.88e8 (1.27e8) 4.54e7 (3.72e7) 1.24e8 (1.19e8) 1.89e8 (1.27e8) 4.59e7 (3.74e7) 1.31e8 (1.24e8) 1.89e8 (1.27e8) 4.65e7 (3.76e7) 1.36e8 (1.29e8) 1.89e8 (1.28e8) 4.71e7 (3.79e7) 1.41e8 (1.32e8) 1.89e8 (1.28e8)

20 214 Appendix B: Ion Implantation Lookup Tables Table B.8 Look-up table for N z ef f (µm 2 ) for phosphorus ion implantation Dose (cm 2 ) Energy (kev) Temp. ( C) e6 (3.01e5) 20 1, e6 (1.63e5) 1, e6 (1.02e5) Time (min) e6 (3.04e5) 1.26e6 (1.64e5) 1.25e6 (1.02e5) 1.16e6 (3.07e5) 1.26e6 (1.65e5) 1.26e6 (1.02e5) 1.18e6 (3.08e5) 1.26e6 (1.65e5) 1.26e6 (1.03e5) 1.19e6 (3.09e5) 1.26e6 (1.66e5) 1.26e6 (1.03e5) 1.20e6 (3.10e5) 1.25e6 (1.66e5) 1.27e6 (1.03e5) 1.21e6 (3.11e5) 1.25e6 (1.67e5) 1.27e6 (1.03e5) 1.21e6 (3.12e5) 1.26e6 (1.67e5) 1.27e6 (1.03e5) e6 (9.41e5) , e6 (7.84e5) 1, e6 (5.14e5) 1.45e6 (9.46e5) 1.66e6 (7.87e5) 1.71e6 (5.17e5) 1.48e6 (9.50e5) 1.68e6 (7.90e5) 1.72e6 (5.20e5) 1.50e6 (9.53e5) 1.69e6 (7.91e5) 1.72e6 (5.23e5) 1.51e6 (9.55e5) 1.70e6 (7.93e5) 1.72e6 (5.25e5) 1.52e6 (9.58e5) 1.71e6 (7.95e5) 1.73e6 (5.27e5) 1.53e6 (9.60e5) 1.71e6 (7.97e5) 1.73e6 (5.28e5) 1.54e6 (9.61e5) 1.71e6 (7.98e5) 1.73e6 (5.29e5) e6 (1.11e6) 80 1, e6 (1.08e6) 1, e6 (8.07e5) 1.46e6 (1.11e6) 1.57e6 (1.09e6) 1.66e6 (8.11e5) 1.48e6 (1.12e6) 1.59e6 (1.09e6) 1.66e6 (8.15e5) 1.49e6 (1.12e6) 1.60e6 (1.09e6) 1.66e6 (8.19e5) 1.49e6 (1.12e6) 1.61e6 (1.09e6) 1.67e6 (8.22e5) 1.50e6 (1.12e6) 1.62e6 (1.10e6) 1.67e6 (8.24e5) 1.50e6 (1.13e6) 1.63e6 (1.10e6) 1.67e6 (8.26e5) 1.50e6 (1.13e6) 1.63e6 (1.10e6) 1.68e6 (8.28e5) e7 (2.52e6) 20 1, e7 (1.45e6) 1, e7 (8.44e5) 1.28e7 (2.53e6) 1.38e7 (1.45e6) 1.37e7 (8.49e5) 1.31e7 (2.54e6) 1.38e7 (1.46e6) 1.36e7 (8.54e5) 1.31e7 (2.55e6) 1.39e7 (1.46e6) 1.35e7 (8.57e5) 1.32e7 (2.55e6) 1.39e7 (1.46e6) 1.35e7 (8.60e5) 1.32e7 (2.55e6) 1.39e7 (1.47e6) 1.34e7 (8.64e5) 1.33e7 (2.56e6) 1.39e7 (1.47e6) 1.34e7 (8.67e5) 1.33e7 (2.56e6) 1.39e7 (1.47e6) 1.33e7 (8.69e5) e7 (8.26e6) 1.72e7 (8.28e6) 1.76e7 (8.29e6) 1.78e7 (8.30e6) 1.79e7 (8.31e6) 1.80e7 (8.32e6) 1.81e7 (8.32e6) 1.81e7 (8.33e6) (continued)

21 Appendix B: Ion Implantation Lookup Tables 215 Table B.8 (continued) Dose (cm 2 ) Energy (kev) Temp. ( C) , e7 (8.34e6) 1, e7 (4.40e6) Time (min) e7 (8.34e6) 1.85e7 (4.40e6) 1.89e7 (8.34e6) 1.83e7 (4.40e6) 1.89e7 (8.34e6) 1.82e7 (4.40e6) 1.89e7 (8.33e6) 1.82e7 (4.40e6) 1.89e7 (8.33e6) 1.81e7 (4.41e6) 1.89e7 (8.32e6) 1.80e7 (4.41e6) 1.88e7 (8.32e6) 1.80e7 (4.41e6) e7 (1.07e7) 80 1, e7 (1.19e7) 1, e7 (7.10e6) 1.61e7 (1.07e7) 1.80e7 (1.19e7) 1.78e7 (7.10e6) 1.65e7 (1.08e7) 1.81e7 (1.19e7) 1.77e7 (7.08e6) 1.67e7 (1.08e7) 1.81e7 (1.19e7) 1.76e7 (7.08e6) 1.69e7 (1.08e7) 1.82e7 (1.19e7) 1.75e7 (7.07e6) 1.70e7 (1.08e7) 1.82e7 (1.19e7) 1.75e7 (7.07e6) 1.71e7 (1.08e7) 1.82e7 (1.19e7) 1.74e7 (7.07e6) 1.71e7 (1.08e7) 1.82e7 (1.19e7) 1.73e7 (7.06e6) e7 (2.64e7) 20 1, e8 (2.71e7) 1, e8 (1.71e7) 6.49e7 (2.65e7) 1.34e8 (2.71e7) 1.42e8 (1.70e7) 6.68e7 (2.65e7) 1.35e8 (2.71e7) 1.42e8 (1.69e7) 6.88e7 (2.66e7) 1.36e8 (2.72e7) 1.43e8 (1.69e7) 7.09e7 (2.66e7) 1.37e8 (2.72e7) 1.43e8 (1.69e7) 7.30e7 (2.66e7) 1.37e8 (2.72e7) 1.43e8 (1.68e7) 7.51e7 (2.66e7) 1.38e8 (2.72e7) 1.44e8 (1.68e7) 7.73e7 (2.67e7) 1.38e8 (2.72e7) 1.44e8 (1.68e7) e7 (8.78e7) , e8 (1.18e8) 1, e8 (6.90e7) 5.30e7 (8.87e7) 1.81e8 (1.19e8) 1.98e8 (6.88e7) 5.64e7 (8.93e7) 1.85e8 (1.19e8) 1.98e8 (6.86e7) 5.95e7 (9.00e7) 1.88e8 (1.19e8) 1.98e8 (6.84e7) 6.25e7 (9.06e7) 1.89e8 (1.20e8) 1.98e8 (6.83e7) 6.54e7 (9.09e7) 1.90e8 (1.20e8) 1.98e8 (6.81e7) 6.82e7 (9.12e7) 1.91e8 (1.20e8) 1.98e8 (6.80e7) 7.09e7 (9.14e7) 1.92e8 (1.20e8) 1.98e8 (6.78e7) e7 (1.10e8) 80 1, e8 (1.38e8) 1, e8 (8.81e7) 6.80e7 (1.11e8) 1.73e8 (1.39e8) 1.92e8 (8.78e7) 7.15e7 (1.12e8) 1.79e8 (1.40e8) 1.92e8 (8.76e7) 7.35e7 (1.13e8) 1.83e8 (1.40e8) 1.92e8 (8.74e7) 7.50e7 (1.14e8) 1.84e8 (1.40e8) 1.92e8 (8.72e7) 7.64e7 (1.15e8) 1.86e8 (1.41e8) 1.91e8 (8.70e7) 7.81e7 (1.16e8) 1.86e8 (1.41e8) 1.91e8 (8.68e7) 7.97e7 (1.17e8) 1.87e8 (1.41e8) 1.91e8 (8.67e7)

22 216 Appendix B: Ion Implantation Lookup Tables Table B.9 Look-up table for N z ef f (µm 2 ) for arsenic ion implantation Dose (cm 2 ) Energy (kev) Temp. ( C) e5 (1.38e4) 20 1, e5 (1.03e4) 1, e5 (1.00e4) Time (min) e5 (1.46e4) 2.94e5 (1.06e4) 3.12e5 (1.00e4) 2.52e5 (1.52e4) 2.96e5 (1.08e4) 3.14e5 (1.00e4) 2.57e5 (1.57e4) 2.98e5 (1.09e4) 3.16e5 (9.98e3) 2.61e5 (1.62e4) 2.99e5 (1.10e4) 3.17e5 (9.96e3) 2.65e5 (1.65e4) 3.01e5 (1.11e4) 3.18e5 (9.93e3) 2.68e5 (1.69e4) 3.02e5 (1.11e4) 3.19e5 (9.91e3) 2.70e5 (1.72e4) 3.03e5 (1.12e4) 3.20e5 (9.87e3) e6 (2.09e5) , e6 (2.93e5) 1, e6 (2.51e5) 1.44e6 (2.19e5) 1.81e6 (3.05e5) 1.89e6 (2.55e5) 1.48e6 (2.27e5) 1.84e6 (3.13e5) 1.88e6 (2.57e5) 1.51e6 (2.34e5) 1.87e6 (3.19e5) 1.87e6 (2.59e5) 1.53e6 (2.40e5) 1.88e6 (3.23e5) 1.87e6 (2.60e5) 1.55e6 (2.45e5) 1.90e6 (3.27e5) 1.87e6 (2.61e5) 1.56e6 (2.50e5) 1.91e6 (3.30e5) 1.87e6 (2.62e5) 1.58e6 (2.54e5) 1.91e6 (3.32e5) 1.86e6 (2.63e5) e6 (3.48e5) 80 1, e6 (5.92e5) 1, e6 (5.64e5) 1.36e6 (3.66e5) 1.59e6 (6.13e5) 1.80e6 (5.74e5) 1.39e6 (3.78e5) 1.62e6 (6.28e5) 1.80e6 (5.80e5) 1.40e6 (3.87e5) 1.65e6 (6.40e5) 1.81e6 (5.84e5) 1.41e6 (3.93e5) 1.67e6 (6.50e5) 1.80e6 (5.86e5) 1.42e6 (3.98e5) 1.69e6 (6.59e5) 1.81e6 (5.89e5) 1.43e6 (4.02e5) 1.71e6 (6.66e5) 1.80e6 (5.91e5) 1.43e6 (4.05e5) 1.72e6 (6.73e5) 1.80e6 (5.93e5) e6 (1.44e5) 20 1, e6 (8.07e4) 1, e6 (6.74e4) 3.01e6 (1.50e5) 3.55e6 (8.37e4) 3.37e6 (6.82e4) 3.12e6 (1.53e5) 3.55e6 (8.57e4) 3.35e6 (6.87e4) 3.21e6 (1.55e5) 3.55e6 (8.70e4) 3.33e6 (6.90e4) 3.27e6 (1.57e5) 3.54e6 (8.80e4) 3.32e6 (6.94e4) 3.31e6 (1.58e5) 3.53e6 (8.87e4) 3.30e6 (6.96e4) 3.34e6 (1.60e5) 3.52e6 (8.93e4) 3.29e6 (6.97e4) 3.37e6 (1.61e5) 3.51e6 (8.98e4) 3.29e6 (6.99e4) e6 (2.13e6) 9.60e6 (2.18e6) 1.04e7 (2.21e6) 1.10e7 (2.24e6) 1.16e7 (2.26e6) 1.22e7 (2.27e6) 1.26e7 (2.29e6) 1.31e7 (2.30e6) (continued)

23 Appendix B: Ion Implantation Lookup Tables 217 Table B.9 (continued) Dose (cm 2 ) Energy (kev) Temp. ( C) , e7 (2.67e6) 1, e7 (2.02e6) Time (min) e7 (2.70e6) 2.10e7 (2.01e6) 2.01e7 (2.71e6) 2.10e7 (2.01e6) 2.04e7 (2.72e6) 2.09e7 (2.01e6) 2.06e7 (2.72e6) 2.09e7 (2.00e6) 2.07e7 (2.72e6) 2.08e7 (2.00e6) 2.08e7 (2.72e6) 2.08e7 (2.00e6) 2.09e7 (2.72e6) 2.07e7 (2.00e6) e6 (4.01e6) 80 1, e7 (5.85e6) 1, e7 (4.38e6) 1.04e7 (4.15e6) 1.85e7 (5.93e6) 2.02e7 (4.36e6) 1.11e7 (4.26e6) 1.90e7 (5.97e6) 2.02e7 (4.35e6) 1.16e7 (4.36e6) 1.93e7 (6.00e6) 2.01e7 (4.33e6) 1.20e7 (4.45e6) 1.95e7 (6.03e6) 2.01e7 (4.32e6) 1.25e7 (4.52e6) 1.97e7 (6.05e6) 2.00e7 (4.30e6) 1.28e7 (4.58e6) 1.98e7 (6.06e6) 1.99e7 (4.30e6) 1.32e7 (4.63e6) 1.99e7 (6.06e6) 1.99e7 (4.28e6) e7 (1.73e6) 20 1, e7 (1.21e6) 1, e7 (8.46e5) 1.58e7 (1.75e6) 3.02e7 (1.21e6) 3.58e7 (8.50e5) 1.64e7 (1.76e6) 3.14e7 (1.21e6) 3.59e7 (8.51e5) 1.70e7 (1.77e6) 3.22e7 (1.20e6) 3.60e7 (8.53e5) 1.76e7 (1.77e6) 3.28e7 (1.20e6) 3.60e7 (8.54e5) 1.82e7 (1.78e6) 3.33e7 (1.20e6) 3.59e7 (8.55e5) 1.87e7 (1.78e6) 3.37e7 (1.20e6) 3.59e7 (8.56e5) 1.92e7 (1.78e6) 3.40e7 (1.20e6) 3.59e7 (8.57e5) e7 (2.18e7) , e7 (3.48e7) 1, e8 (2.81e7) 3.26e7 (2.16e7) 7.00e7 (3.68e7) 1.47e8 (2.81e7) 3.32e7 (2.20e7) 7.69e7 (3.84e7) 1.57e8 (2.81e7) 3.41e7 (2.24e7) 8.24e7 (3.94e7) 1.63e8 (2.81e7) 3.50e7 (2.29e7) 8.73e7 (4.03e7) 1.68e8 (2.80e7) 3.59e7 (2.34e7) 9.16e7 (4.09e7) 1.72e8 (2.80e7) 3.68e7 (2.38e7) 9.51e7 (4.15e7) 1.76e8 (2.80e7) 3.76e7 (2.43e7) 9.86e7 (4.19e7) 1.79e8 (2.79e7) e7 (3.03e7) 80 1, e7 (4.51e7) 1, e8 (5.00e7) 2.79e7 (2.95e7) 6.89e7 (4.90e7) 1.46e8 (5.06e7) 2.93e7 (2.96e7) 7.57e7 (5.20e7) 1.54e8 (5.09e7) 3.07e7 (3.00e7) 8.15e7 (5.44e7) 1.61e8 (5.12e7) 3.19e7 (3.06e7) 8.64e7 (5.63e7) 1.66e8 (5.13e7) 3.30e7 (3.11e7) 9.06e7 (5.79e7) 1.70e8 (5.14e7) 3.40e7 (3.16e7) 9.44e7 (5.93e7) 1.73e8 (5.14e7) 3.50e7 (3.22e7) 9.79e7 (6.04e7) 1.75e8 (5.15e7)

24 218 Appendix B: Ion Implantation Lookup Tables Table B.10 Look-up table for t j (µm) for boron ion implantation Dose (cm 2 ) Energy (kev) Temp. ( C) Time (min) (0.74) 0.59(0.74) 0.59(0.74) 0.59(0.74) 0.60(0.75) 0.60(0.75) 0.61(0.75) 0.61(0.75) 20 1, (0.94) 0.70(0.96) 0.74(0.99) 0.77(1.01) 0.80(1.03) 0.83(1.05) 0.86(1.07) 0.89(1.09) 1, (1.57) 1.29(1.69) 1.46(1.80) 1.60(1.90) 1.73(2.00) 1.86(2.08) 1.97(2.17) 2.07(2.25) (1.08) 0.99(1.08) 1.00(1.08) 1.00(1.08) 1.00(1.09) 1.00(1.09) 1.00(1.09) 1.01(1.09) , (1.22) 1.04(1.24) 1.06(1.26) 1.09(1.28) 1.12(1.30) 1.14(1.31) 1.16(1.33) 1.19(1.35) 1, (1.78) 1.53(1.89) 1.67(2.00) 1.80(2.10) 1.92(2.19) 2.03(2.28) 2.13(2.37) 2.23(2.45) (1.28) 1.21(1.29) 1.21(1.29) 1.22(1.29) 1.22(1.29) 1.22(1.29) 1.22(1.29) 1.22(1.29) 80 1, (1.39) 1.23(1.41) 1.25(1.43) 1.27(1.45) 1.30(1.46) 1.32(1.48) 1.34(1.50) 1.36(1.51) 1, (1.92) 1.68(2.03) 1.82(2.13) 1.94(2.23) 2.06(2.32) 2.16(2.41) 2.26(2.49) 2.36(2.57) (0.75) 0.62(0.75) 0.64(0.76) 0.66(0.76) 0.68(0.76) 0.70(0.76) 0.71(0.77) 0.73(0.77) 20 1, (1.09) 0.88(1.12) 0.96(1.16) 1.02(1.19) 1.08(1.22) 1.14(1.25) 1.19(1.28) 1.24(1.31) 1, (1.92) 1.70(2.07) 1.92(2.21) 2.10(2.34) 2.27(2.46) 2.42(2.58) 2.56(2.68) 2.69(2.79) (1.51) 1.46(1.51) 1.47(1.51) 1.47(1.51) 1.47(1.52) 1.48(1.52) 1.48(1.52) 1.49(1.52) , (1.58) 1.49(1.60) 1.52(1.62) 1.55(1.64) 1.58(1.66) 1.60(1.67) 1.63(1.69) 1.65(1.71) 1, (2.13) 1.94(2.26) 2.10(2.39) 2.24(2.51) 2.39(2.62) 2.52(2.73) 2.65(2.84) 2.77(2.94) (1.95) 1.92(1.95) 1.92(1.95) 1.93(1.95) 1.93(1.95) 1.93(1.95) 1.94(1.95) 1.94(1.96) 80 1, (1.95) 1.87(1.96) 1.89(1.98) 1.92(2.00) 1.94(2.01) 1.96(2.03) 1.99(2.05) 2.01(2.06) 1, (2.41) 2.25(2.53) 2.39(2.64) 2.52(2.75) 2.63(2.86) 2.75(2.96) 2.86(3.05) 2.96(3.14) (1.16) 1.09(1.17) 1.11(1.19) 1.13(1.21) 1.14(1.22) 1.16(1.24) 1.18(1.25) 1.20(1.27) 20 1, (1.59) 1.52(1.69) 1.70(1.77) 1.86(1.85) 2.01(1.92) 2.15(1.98) 2.28(2.04) 2.40(2.10) 1, (2.67) 3.05(2.92) 3.35(3.14) 3.61(3.34) 3.84(3.52) 4.06(3.68) 4.25(3.84) 4.43(3.98) (1.86) 1.84(1.86) 1.85(1.87) 1.87(1.88) 1.88(1.88) 1.89(1.89) 1.90(1.90) 1.92(1.90) , (2.04) 2.03(2.13) 2.11(2.21) 2.20(2.30) 2.28(2.39) 2.37(2.49) 2.47(2.60) 2.58(2.69) 1, (2.85) 3.14(3.11) 3.44(3.34) 3.70(3.54) 3.94(3.73) 4.15(3.90) 4.35(4.06) 4.53(4.21) (2.76) 2.78(2.76) 2.79(2.77) 2.80(2.77) 2.80(2.77) 2.81(2.77) 2.82(2.78) 2.83(2.78) 80 1, (2.72) 2.76(2.79) 2.83(2.86) 2.89(2.92) 2.96(2.98) 3.02(3.04) 3.08(3.10) 3.14(3.15) 1, (3.14) 3.33(3.32) 3.57(3.52) 3.80(3.70) 4.03(3.88) 4.23(4.05) 4.42(4.20) 4.60(4.36)

25 Appendix B: Ion Implantation Lookup Tables 219 Table B.11 Look-up table for t j (µm) for phosphorus ion implantation Dose (cm 2 ) Energy (kev) Temp. ( C) Time (min) (0.45) 0.29(0.45) 0.29(0.45) 0.29(0.45) 0.30(0.46) 0.30(0.46) 0.30(0.46) 0.31(0.46) 20 1, (0.67) 0.43(0.68) 0.47(0.70) 0.51(0.72) 0.55(0.73) 0.59(0.75) 0.62(0.76) 0.65(0.78) 1, (1.17) 1.12(1.26) 1.29(1.33) 1.43(1.41) 1.55(1.48) 1.67(1.54) 1.77(1.61) 1.88(1.67) (0.58) 0.51(0.58) 0.51(0.58) 0.51(0.58) 0.51(0.59) 0.52(0.59) 0.52(0.59) 0.52(0.59) , (0.82) (0.86) 0.63(0.88) 0.66(0.90) 0.68(0.91) 0.71(0.93) 0.73(0.95) 1, (1.42) 1.18(1.52) 1.34(1.62) 1.48(1.71) 1.61(1.79) 1.73(1.87) 1.84(1.95) 1.94(2.02) (0.71) 0.66(0.71) 0.66(0.71) 0.67(0.71) 0.67(0.71) 0.67(0.71) 0.67(0.72) 0.67(0.72) 80 1, (0.91) 0.71(0.93) 0.73(0.94) 0.75(0.96) 0.77(0.98) 0.79(0.99) 0.81(1.01) 0.83(1.02) 1, (1.52) 1.22(1.62) 1.38(1.72) 1.51(1.81) 1.64(1.90) 1.75(1.98) 1.86(2.06) 1.96(2.14) (0.58) 0.90(0.59) 0.92(0.59) 0.93(0.59) 0.94(0.59) 0.95(0.60) 0.96(0.60) 0.96(0.60) 20 1, (0.82) (0.86) 0.93(0.88) 0.96(0.90) 0.99(0.92) 1.02(0.94) 1.04(0.96) 1, (1.48) 1.49(1.59) 1.68(1.69) 1.84(1.78) 1.99(1.87) 2.13(1.96) 2.25(2.04) 2.37(2.12) (0.96) 0.73(0.97) 0.77(0.97) 0.81(0.97) 0.84(0.97) 0.86(0.98) 0.88(0.98) 0.90(0.98) , (0.91) 0.80(0.94) 0.85(0.97) 0.89(0.99) 0.93(1.02) 0.97(1.04) 1.00(1.07) 1.04(1.09) 1, (1.73) 1.52(1.85) 1.72(1.97) 1.90(2.08) 2.05(2.18) 2.19(2.28) 2.32(2.37) 2.44(2.46) (1.07) 0.82(1.08) 0.83(1.08) 0.84(1.09) 0.84(1.09) 0.85(1.09) 0.86(1.09) 0.87(1.10) 80 1, (0.98) 0.89(1.01) 0.91(1.03) 0.94(1.06) 0.97(1.08) 0.99(1.11) 1.02(1.13) 1.05(1.16) 1, (1.80) 1.52(1.93) 1.72(2.05) 1.89(2.16) 2.04(2.27) 2.18(2.37) 2.31(2.47) 2.43(2.56) (2.53) 4.98(2.54) 4.98(2.54) 4.98(2.55) 4.98(2.55) 4.98(2.56) 4.98(2.56) 4.98(2.56) 20 1, (1.19) 4.59(1.22) 4.60(1.24) 4.61(1.27) 4.63(1.30) 4.65(1.32) 4.66(1.35) 4.68(1.37) 1, (1.89) 4.24(2.04) 4.32(2.17) 4.40(2.30) 4.49(2.42) 4.58(2.54) 4.69(2.64) 4.85(2.75) (4.23) 2.20(4.22) 2.31(4.24) 2.42(4.22) 2.52(4.19) 2.62(4.19) 2.71(4.19) 2.80(4.20) , (2.94) 2.93(2.95) 2.94(2.97) 2.97(2.99) 2.99(3.00) 3.01(3.01) 3.03(3.03) 3.05(3.04) 1, (2.03) 2.74(2.23) 2.90(2.41) 3.08(2.58) 3.24(2.73) 3.41(2.88) 3.56(3.01) 3.71(3.13) (4.19) 1.42(4.19) 1.56(4.21) 1.69(4.17) 1.81(4.22) 1.93(4.22) 2.03(4.20) 2.13(4.19) 80 1, (3.09) 2.31(3.11) 2.35(3.12) 2.39(3.14) 2.43(3.15) 2.46(3.17) 2.49(3.18) 2.52(3.20) 1, (2.09) 2.47(2.31) 2.72(2.50) 2.94(2.67) 3.13(2.83) 3.31(2.98) 3.48(3.12) 3.64(3.25)

26 220 Appendix B: Ion Implantation Lookup Tables Table B.12 Look-up table for t j (µm) for arsenic ion implantation Dose (cm 2 ) Energy (kev) Temp. ( C) Time (min) () 0.16() 0.16() 0.16() 0.16() 0.16() 0.16() 0.16() 20 1, () 0.17(0.13) 0.18(0.14) 0.19(0.14) 0.20(0.15) 0.21(0.15) 0.22(0.16) 0.23(0.17) 1, (0.27) 0.41(0.30) 0.46(0.34) 0.51(0.37) 0.56(0.39) 0.60(0.42) 0.64(0.44) 0.67(0.46) (0.25) 0.35(0.25) 0.35(0.25) 0.35(0.25) 0.35(0.25) 0.35(0.25) 0.35(0.25) 0.35(0.25) , (0.29) 0.35(0.29) 0.36(0.29) 0.36(0.30) 0.36(0.30) 0.36(0.30) 0.37(0.30) 0.37(0.31) 1, () 0.51(0.45) (0.55) 0.68(0.58) 0.73(0.62) (0.69) (0.41) 0.51(0.41) 0.51(0.41) 0.51(0.41) 0.51(0.41) 0.51(0.41) 0.51(0.41) 0.51(0.41) 80 1, (0.44) 0.52(0.44) 0.52(0.45) 0.52(0.45) 0.52(0.45) 0.52(0.45) 0.53(0.45) 0.53(0.45) 1, (0.51) 0.58(0.54) 0.62(0.58) 0.66(0.62) (0.69) 0.79(0.73) 0.83(0.76) (0.11) 0.19(0.11) 0.19(0.11) 0.19(0.11) 0.19(0.11) 0.19(0.11) 0.19(0.11) 0.19(0.11) 20 1, (0.15) 0.22(0.16) 0.24(0.17) (0.19) 0.30(0.20) 0.31(0.21) 1, (0.33) 0.53(0.38) 0.60(0.43) (0.53) 0.82(0.56) 0.86(0.59) (0.23) 0.39(0.23) 0.39(0.23) 0.39(0.23) 0.39(0.23) 0.39(0.23) 0.39(0.23) 0.39(0.23) , (0.31) (0.31) (0.31) (0.31) 0.41(0.32) 0.42(0.32) 0.44(0.32) 0.45(0.33) 1, (0.49) 0.72(0.56) 0.81(0.62) 0.89(0.67) 0.96(0.72) 1.02(0.76) (0.38) 0.55(0.38) 0.55(0.38) 0.55(0.38) 0.55(0.38) 0.55(0.38) 0.55(0.38) 0.55(0.38) 80 1, (0.44) 0.55(0.44) 0.55(0.45) 0.55(0.45) 0.55(0.45) 0.56(0.45) 0.56(0.45) 0.56(0.46) 1, (0.57) 0.73(0.63) 0.82(0.69) 0.90(0.75) (0.85) 1.08(0.89) 1.13(0.93) (0.08) 0.20(0.09) 0.20(0.09) 0.20(0.09) 0.20() 0.20() 0.20() 0.21(0.11) 20 1, (0.17) 0.33(0.19) 0.37(0.20) (0.22) 0.43(0.23) 0.45(0.24) (0.25) 0.50(0.26) 1, (0.43) (0.55) 0.99(0.60) (0.69) 1.20(0.73) 1.26(0.77) (0.29) 0.46(0.29) 0.46(0.29) 0.46(0.29) 0.46(0.29) 0.46(0.29) 0.46(0.29) 0.46(0.29) , (0.35) 0.47(0.38) (0.41) 0.51(0.44) 0.55() (0.53) 0.66(0.55) 1, (0.74) (0.93) 1.40(1.00) 1.51(1.07) 1.61(1.13) 1.71(1.18) 1.79(1.24) () 0.65() 0.65() 0.65() 0.65() 0.65() 0.65() 0.65() 80 1, (0.53) 0.66(0.53) 0.66(0.54) 0.66(0.54) 0.66(0.55) 0.66(0.57) 0.67(0.59) 0.68(0.61) 1, (0.85) 1.12(0.96) 1.26(1.05) 1.39(1.14) 1.51(1.21) 1.61(1.28) 1.70(1.34) 1.79(1.40)