Index. b back diffusion, 392, 394 backflow, , 420 backing pressure critical, 398 backing pump, 445

Transcription

1 977 Index a absolute vacuum, 15 absorption, 223, 237, 463 absorption method, 659 AC motor, 256 accommodating time, 899 accommodation coefficient, 47, , 578 accommodation coefficient of tangential momentum, 716 activated charcoal, 532 activation energy, 221 adiabatic behavior, 92 adjustment helium leak detector, 677 adparticles, 221 adsorbate, 221 adsorbent, 221, 532 adsorption, 463, 701 adsorption behavior, 484 adsorption energy, 221 adsorption flux density, 226 adsorption heat, 221 adsorption kinetics, 226 adsorption phase, 223 adsorption pump, 453, 864 design, 457 operating suggestions, 461 ultimate pressure with two or more, 459 ultimate pressure, 458 working principle, 455 adsorption rate, 226 air composition, 34 density, 1, 34 standard pressure, 26 air conditioner, 675 air inflow, 117 air leak, 895 airflow, 114 alkali ion sensor, 673, 679, 896 Alpert, 15, 599 aluminum, 737 American Vacuum Society, 711, 727 ammonia, 896 Amontons, 6, 31 law, 31 amount of a substance, 30 analytics, 448 aperture, 98, 131 circular cross section, 147 Aristotle, 1 Arrhenius plot, 72 ASCII protocol, 814 at-rest pressure ratio, 391 ATEX 137, 340 ATEX 95, 340 atom, 1, 29 atomic bonds, 221 atomic mass relative, 31 atomic mass unit, 30 attractive-soft-sphere model, 66 auxiliary pump, 667 Avogadro s constant, 30 axial ion source, 638 axial ionizer, 638 axis length, 138 b back diffusion, 392, 394 backflow, , 420 backing pressure critical, 398 backing pump, 445 Handbook of Vacuum Technology.EditedbyKarlJousten Copyright 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim ISBN:

2 978 Index backpressure maximum, 381 baffle, 394 chevron, 394 plate, 394 shell, 394 baffle plate, 707 bake-out, 228 baking, 433, 807 Baliani, 2 ball bearing, 436, 447 base pressure, 440, 441, 446 bath cryopump, 542 bath cryostat, 513 Bayard, 15, 599 Bayard-Alpert ionization gauge, 605 beaming effect, 144 Beams, J. W., 15 bearing active magnetic, 436, 438 axial, 438 magnetic, 437 permanent magnet, 436, 437 radial magnet, 438 bearing arrangement quality, 436 Becker, W., 14, 414 bellows, 785 convoluted, 785 diaphragm, 785 Bernoulli s equation, 91, 375, 377 Berti, Gasparo, 2 BET isotherm, 234 BGK model equation for rarefied gas flow, , 174, 179 blade angle, 423 blade velocity, 421, 428 Blasius equation, 113 boiling point, 72 Boltzmann, 8, 38, 227 Boltzmann equation, Boltzmann s constant, 32 bombing, 912 booster pump, 669 Bourdon tube vacuum gauge, 559 Boyle, 5, 6, 9, 31 Boyle Mariotte law, 31, 698 brazed joints, 767, 768 brazing high-temperature, 768 Brunauer, 234 Brunauer-Emmett-Teller isotherm, 234 Brunel, 10 Bruno, 1 bubble emission method, 893 bulk getter pump, 454 bulk getters, 464 bulk velocity, , , 177, 194, 198 bus system, 811, 815 butane, 674 butterfly valve, 799 c calibration, 555, 685, 686, 723 leak detector, 677 reference leak, 677 temperature, recommended, 708 uncertainty, 678 calibration chamber, 706, 707, 711 flange arrangement, 707 calibration factor, 677 calibration gas, 701 calibration method comparison method, 710 optical method, 710 pressure vs. time method, 709 calibration system, 706 capacitance diaphragm gauge, 711 calibration, 712 long-term stability, 715 capacitance vacuum gauge, 566 capillary, 676 capillary depression, 691 capillary leak, 676 capsule element vacuum gauge, 558 capsule pump, 277 carbon dioxide, 882 carbon fiber sleeve, 431 Carnot cycle, 504 Carnot efficiency, 504 Carnot process, 504 cathode sputtering, 483 cavitation, 270 cavitation limit, 270 cavitation protection, 272, 276 Celsius temperature, 27 cemented joints, 772 ceramics, 743 gas permeability, 753 glass, 744 pure-oxide, 744 silicate, 743 CF components, 777

3 change of state adiabatic, 92, 505 isentropic, 91, 92 Chapman, 49, 68 characteristic vacuum pump, 726 charcoal activated, 532 Charles, 31 check valve, 280, 343 chemical diaphragm pump, 252 chemical process, 387 chemical pump, 260, 386 chemisorption, 221, 463 chevron baffle, 394 Chun, 243 circular tube, 112 conductance, 112 flow, 112 CIS (closed ion source), 637, 639 CL scattering law, 173, 179, , clamped flange, 777 Claude process, 508 Clausing, 8 Clausing, P., 130 Clausius-Clapeyron equation, 72 claw pump, 248, 303 compression principle, 304 exact profile, 304, 306 Northey type, 304 speed control, 309 clean room, 672 cleaning, 805 clearance, 420 coefficient of heat transfer, 357, 358 coefficient of heat transmission, 358 COF components, 778 coiled-tube condenser, 361 cold trap, 667, 911 collision mean time between collisions, 45 volume collision rate, 45 collision frequency, 36 collision integral, collision integral, reduced, 69 collision rate, 40 comparison method, 688, 710 component, 897 component in inlet line of pump, 146 components, 766, 768, 770, 772, 774, 776, 778, 780, 782, 784, 786, 788, 790, 792, 794, 796, 798, 800, 802, 804, 806, 808 compound pump, 416, 431, 432, 434, compound turbomolecular pump, 669 compression adiabatic, 334 internal, 303 isentropic, 334 isothermal, 334 polytropic, 335 compression manometer, 692 compression power, 335 compression ratio, 253, 313, 414, 420, 422, 425, 430, diffusion pump, 390 effective, 315 compression shock, 102, 381 oblique, 104 compression work, 333 computer simulation, 135 condensate, 539 thermal conductivity, 539 condensate layer growth rate, 540 condensation, 225, 329, 353, 355, 359, 433, 529 probability, 74 condensation area, 361 condensation flux density, 534 condensation heat, 353 condensation pump, 353 condensation temperature, 353, 361 condenser, 353, 354, 356, 358, 360, 362, 364, 366, 368, 370, 372, 374 condensate discharge, 366 control, 372 coolant, 362 direct contact, 384, 386, 388 surface, 384 conductance, 87, 125, 131, 707 aperture, 147 assembly, measurement, 160 circular tube, 112, 136 flow, molecular, 132 inherent, measurement, 158 intrinsic, 158 intrinsic, measurement, 158 long tube, circular cross section, 150 measurement, 158 reduced, 131, 158 reduced, measurement, 160 conductance function, 151 conductance leak, 676 Index 979

4 980 Index conduction flux thermal, 525 conductivity thermal, 55, 358, 539 conservation laws, 90 conservation of energy, 91, 102 conservation of mass, 90, 102 conservation of momentum, 91, 102 continuous flow cryostat, 516 contraction, 98 control rotor, 305 coolant, 353, 362, 750, 896 coolant leak, 909 cooling power, 504 cooling process, 505 cooling water, 362 copper, 737 OFHC, 738 corner valves, 797 corrugated-diaphragm vacuum gauge, 557 cosine distribution, 128 Couette flow cylindrical, plane, shear stress, 215 transversal, 214 counterflow leak detector advantages, 669 detection limit, 669 detection system, 668 principle, 668 response time, 669 roughing pump, 669 sensitivity, 668 sniffing, 672 counterpressure, 105, 107 covalent linkage, 221 coverage, 224 creep barrier, 395 Creux, Leon, 292 critical backing pressure, 398 critical point, 74, 95 cross section annular, 125 annular slot, 137 narrow, 126 rectangular, 125, 126, 137 crossover value, 540 cryo-condensation pump, 708 cryopump applications, 548 bath, 542 capacity, 537 evaporator, 543 pumping speed, 535 refrigerator, 511, 544 service life, 536 starting pressure, 533, 546 ultimate pressure, 533 cryosorption, 531 cryostat bath, 513 continuous flow, 516 metal, 515 refrigerator, 517 cryotechnology, 501 cryotrapping, 529 cycle time, 910 d Dalton, 33 Dalton s law, 267 Dalton s law of partial pressures, 33 Davies, Isaiah, 309 Dayton, 231 DC motor, 256 dead center, 250 top, 250 dead space, 250, 253, 304, 306 dead time, 654, 899 dead volume, 304 deflection angle, 109 degassing, 223, 395, 609 degree of freedom, 52, 54 Democritus, 1 density, 30 density ratio, 95 desorption electron-stimulated, 609, 622, 642 water vapor, 892 desorption energy, 221, 227 desorption flux density, 227 desorption kinetics, 226 desorption rate, 227 detection limit, 905 deterministic method of calculation, of gas flows, DeviceNet, 815 dew point temperature, 353 Dewar, 513 diameter hydraulic, 124 diaphragm bellows, 785 diaphragm clamping disc, 253 diaphragm pump, 252, 670

5 design principles, 259 pumping speed, 257 speed control, 256 ultimate pressure, 256 diaphragm vacuum gauge, 561 piezoresistive principle, 564 diffuse scattering, 172, 202 diffuse-specular model of gas-surface interaction, 172 diffusion, 34, 58, 222, 224, 226, 228, 230, 232, 234, , 240, 242, 244, 246, 900 diffusion coefficient, 59 plastic, 761 diffusion ejector pump, 400 diffusion pump, 376, 388 compression ratio, 390, 406 critical backing pressure, 397, 398 diffusion coefficient, 391 fore-vacuum tolerance, 397, 398, 406 fractionating, 395 operating suggestions, 397 pump fluid, 393 pumping probability, 400, 404 pumping speed, 397, 402, 404 diffusion-pump oil, 325 dimensionless flow rate, 215 dimensionless pumping speed, 215 diode pump, 487 differential, 490 dipole forces, 221 dipole moment, electrical, 66 direct contact condenser, 364, 384, 386, 388 direct flow helium leak detector detection system, 667 direct flow leak detector advantages, 668 detection limit, 668 principle, 667 response time, 668 sensitivity, 667 direct simulation Monte Carlo (DSMC) method. See probabilistic methods of calculation of gas flows, 176 discharge barometric, 367 discrete velocity method. See deterministic method of calculation of gas flows dished vessel head, 782, 784 dissociation, 609 distillation, 386 distribution function of velocity, double-focus, 665 drag residual, 575, 580 draining barometrical, 386 drive concepts, 256 drying, 370 duroplastic, 749 dust filter, 346 dynamic viscosity, 49 dynode, 654, 655 e Edison, 8, 17 effective pumping speed, 254 effective speed, 39 efficiency, volumetric, 315 effusion, 40 thermal, 154, 155 effusion rate, 155 effusion-volumetric flow, 41 Einstein, 15 ejector stages, 400 elastomer, 252, 747 electrical conductors analogue, 87 electrical dipole moment, 66 electron, 11 electron beam evaporator, 481 electron capture detector, 896 electron cloud, 66 electron collision, 599 electron multiplier secondary, 654 electron-beam welding, 767 electropolishing, 804 EM, SEM, 654 embrittlement hydrogen, 738 emission gas, 751, 756 emissivity, 429, 523, 539 emitting-cathode ionization gauge operating suggestions, 614 Emmett, 234 energy conservation, 91 energy-accommodation coefficient, 53 engine, internal combustion, 6 Enskog, 68 enthalpy, 503 enthalpy of solution, 244 enthalpy of vaporization, 72 Index 981

6 982 Index enthalpy of vaporization (continued ) specific, 72 entropy, 504 envelope method, 910 enveloping, 899, 907 epoxy resin, 749 equation of state, 31, 60 equation of state of an ideal gas, 31 ESD (electron-stimulated desorption), 609 etching, 804 Eucken, 56 evacuation speed, 442 evaporation, 71, 355 evaporation flux density, 534 evaporation getter pump, 454 evaporation pump, 473 design, 478 getter capacity, 477 material, 473 pumping speed, 474 evaporation rate, 74 evaporator cryopump, 543 exhalation ratio, 241 exhaust filter, 345 exhaust pressure, 430 expansion continuous, 688 static, 688 expansion engine, 507 expansion method continuous, 703 static, 698 static, additional volume, 700 static, calibration gas, 701 static, expansion ratio, 699, 701 static, expansion system, 699 expansion ratio, 701 explosion protection, 340 extensive quantities, 29 extractor cathode, 610 extractor ionization gauge, 610 f Faraday cup, 653 feedthrough, 787 electrical, 789 linear, 787 liquid, gas, 792 rotary, 788 FHH isotherm, 235 Fick s first law, 59 Fick s second law, 237 field, magnetic, 446 fieldbus, 815 fieldbus system, 439 filament material, 641 film test chamber, 913 fine-vacuum ionization gauge, 604 flame-ionizing detector, 896 flange connections, 775 flap valve, 799 Fleuss, H. A., 8 flexible joint, 785 flooding gas, 670 flow around corner, 107 choked, 96, 97, 113, 119 circular tube, 112 continuum, 80 critical, 94 duct, non-circular cross section, 124 effluent, 105 entire pressure range, 147 frictional-viscous, 110 gas-dynamic, 82 gas-species dependent, 126 inviscid viscous, 90 Knudsen, 81 laminar, 83, 112, 115, 125 long tube, 115 molecular, 80, 127, 131 molecular, circular tube, 135 molecular, long tube, 134 molecular, medium-sized tube, 135 molecular, short tube, 133 nozzle, 98 Prandtl-Meyer, 107 short tube, 115 stationary, 90 subsonic, 96 supersonic, 96 transitional, 81 tubular, 110 turbulent, 113, 115 velocity, 81, 112 viscous, 80 flow conductance, 87 flow divider, 709 flow function, 93, 95 flow pattern, 127 flow rate, 83 flow rate through an orifice,

7 Index 983 flow resistance, 87 flow types, 79 flowmeter of constant pressure, 704 fluoroplastic, 252 flux rate, 83, 84 foaming agent, 893 food packaging, 913 force frictional, 427 fore-vacuum pressure, 430, 431 fore-vacuum tolerance, 398, 406, 441 fouling factor, 361 four-stage dry-runner pump, 251 Fourier law, 169 fractionating, 395 Frankel-Halsey-Hill isotherm, 235 free path, 41 mean, 42, 43 free-molecular regime and gas flow, 164, 174, 177, , , , freezing point of water, 27 Fremerey, 15 frequency converter electronic, 439 mechanical, 439 Freundlich, 233 Freundlich adsorption isotherm, 234 Freundlich isotherm, 234 friction coefficient, 113 full flow filter, 344 funnel, 145 fused joints, 768 g Gaede, 12, 277, 283, 329, 388, 400, 416 Gaede pump, 12 compression ratio, 418 pumping speed, 417 Gaede pump stage, 416 Gaede s formula, 424 Gaede s molecular pump, 414, 416 Galilei, Galileo, 1 gas real, 60 gas ballast, 255, 280, 329 invention, 12 gas behavior, 65 gas discharge, 10, 615 gas dosing valve, 801 gas dynamics, 90 gas emission, 751, 756 gas flow, 80, 82 84, 86, 88, 90, 92, 94, 96, 98, 100, 102, 104, 106, 108, 110, 112, 114, 116, 118, 120, 122, 124, 126, 128, 130, 132, 134, 136, 138, 140, 142, 144, 146, 148, 150, 152, 154, 156, 158, 160, 162 gas flow rarefaction Biltzmann equation, gas-surface interaction law, global equilibrium, heat transfer, in pipes, and Knudsen number, local equilibrium, 166 macroscopic quantities, 164 methods of calculation, model equations, rarefaction parameter, temperature jump coefficient, thermal slip coefficient, through orifice, transport coefficients, velocity distribution function, viscous slip coefficient, gas friction, 575 gas jet vacuum pump, 376 gas laws, 26, 28, 30 32, 34, 36, 38, 40, 42, 44, 46, 48, 50, 52, 54, 56, 58, 60, 62, 64, 66, 68, 70, 72, 74, 76 gas load, 444 gas particle size, 41 gas permeability, 751 plastic, 754 gas state, 25 gas theory kinetic, 34 gas throughput, 449 gas-dynamic flow, 82 gas-friction vacuum gauge, 556, 573 residual drag, 575, 580 rotor heating, 578 gas-surface interaction law, gas-vapor mixture, 359 gate valve, 802 gauge coefficient, 601 gauge constant, 601 gauge sensitivity factor, 601 pressure-dependency, 601 Gay-Lussac s law, 31 Geissler, 8 GEM, 816 German Calibration Service, 711

8 984 Index Geryk, 8 getter operating mode, 463 types, 463 getter capacity, 469 getter pump, 453 Gifford-McMahon principle, 544 Gifford-McMahon process, 510 Gifford-McMahon refrigerator, 517 glass, 739 gas permeability, 753 hard, 742 quartz, 742 sintered, 743 soft, 742 glass bead blasting, 805 glass ceramics, 744 global equilibrium, gravitational wave detectors, 21 grease lubrication, 436, 447 ground-in connections, 774 growth rate condensate layer, 540 h Hagen-Poiseuille equation, 112 halogen leak detector, 896 alkali ion sensor, 679 infrared sensors, 680 hard-sphere model, 35, 61 Hauksbee, 8, 10 head cover, 253 heat capacity, 52 molar, 52 specific, 52 heat capacity at constant pressure, 52 heat conductivity, 169, 171 heat exchanger, 507 heat flow, 357 heat flux, 165, 169, 216 heat of adsorption, 221 heat transfer coefficient, 357, 358 heat transfer, through rarefied gases between two coaxial cylinders, between two plates, Couette flow, heat transmission coefficient, 358 heat transport, 51, 54 heat, produced, 427 heating wire, 605 Helicoflex seal, 779 helium, 881 atmospheric, 672 diffusion coefficient, 879 permeation leak, 675 reference leak, 677 search gas, 878 sensitivity of helium sector field mass spectrometer, 665 helium leak detector, 434, 663, 896 adjustment, 677 detection limit, 897 direct flow, detection system, 667 helium pumping speed, 897 inlet pressure, 665, 897 response time, 897 specifications, 897 time constant, 897 time response, 666 helium liquefier, 510, 511 helium pumping speed, 666, 668 helium sector field mass spectrometer, 664 Helmer, 611 hemispheres, 5 Henry adsorption isotherm, 233 Henry s law, 233 Hertz, 11 high-temperature brazed joints, 768 high-vacuum pump stand, 851 history, 2 16 Hittorf, 11 Ho, 400 Ho factor, 400, 422, 424 Hobson, 230 Hobson model, 228 Holweck pump, , Holweck pump stage, 419 Holweck rotor, 431 Holweck stage, 430, 670 Hooke, 5 horror vacui, 1 HSMS, 816 Hugoniot equation, 103 humidity relative, 76 Huygens, 5 hybrid pump, 397, 400 hydrogen, 882 hydrogen embrittlement, 738 i ice condenser, 362 indium, 738 induction period, 887

9 Index 985 inert gas-vapor mixture, 360 infrared absorption, 673 infrared sensor, 680 inlet conductance, 422 inlet pressure helium leak detector, 663 inlet valve, 338, 343 inspection equipment, 893 instability long-term, 718 intake flow, 82 Interbus, 815 internal combustion engine, 6 International Temperature Scale, 27 internuclear potential, 68 intrinsic conductance, 131 inversion curve, 505 ion current transmission, 646 ion detector, 631 ion getter pump, 454, 482, 865 design, 486 diode type, 487 distributed, 494 linear, 494 noble-gas stabilization, 490 operation, 495 pumping speed, 485, 487 residual gas spectrum, 494 service life, 486 starting pressure, 496 triode type, 491 working principle, 482 ion implantation, 483 ion rejection, 645 ion source, 631, 637 axial, 638 closed, 637, 639 molecular beam, 637, 640 open, 637, 638 ion spectroscopy gauge, 611 ionization differential, 599, 600 ionization gauge, 596, 685, 718 Bayard-Alpert, 605 calibration, 718 cold-cathode, 597 crossed-field, 597 emitting-cathode, design, 603 emitting-cathode, measurement principle, 599 extractor, 610 fine-vacuum, 604 heating wire, 605 history, 597 hot-cathode, 597 hot-cathode, design, 603 Lafferty, 613 long-term instability, 720 modulator method, 609 orientation, 626 parasitic errors, 608 pumping speed, 622 reading, gas species dependency, 623 triode, 597 ionization vacuum gauge, 868 isentropic behavior, 92 isentropic exponent, 53, 54, 92 ISO, 686 ISO 9000, 672 ISO thread, 776 isothermal flow, isotherms, 32 ITS-90, 27 j Jaeckel, 400 jet motive, 375 jet pump, 376, , 382, 384, 386, 388, 390, 392, 394, 396, 398, 400, 402, 404, 406, 408, 410 product vapor driven, 388 jet pump stage, 371 jet pumps, 106 jet vacuum pump, 376 joints brazed, 767 cemented, 772 flexible, 785 fused, 768 metallization, 771 welded, 766 Joule-Thomson effect, 505 k Kanazawa, 232 Kelvin, 27 Kelvin temperature, 27 kilogram, 29 kinetic theory of gases, 26, 28, 30, 32, 34, 36, 38, 40, 42, 44, 46, 48, 50, 52, 54, 56, 58, 60, 62, 64, 66, 68, 70, 72, 74, 76 klein flange components, 776 Klixon, 338

10 986 Index Knudsen, 12, 135 Knudsen approximation, 150 Knudsen flow, 81 Knudsen layer, 178, Knudsen minimum, Knudsen number, 79, 81, , 175, 182 Kovar, 770 Krönig, 35 Kwong, 62 l Lafferty ionization gauge, 613 Lambert-Beer s law, 659 lamella pump, 279 Langmuir, 14, 226 Langmuir adsorption isotherm, 233 Langmuir saturation, 235 Laval nozzle, 105 laws of thermodynamics fundamental, 502 layer model, 48 leak liquid, 888 liquid penetration, 888 liquid-tight, 889 localization of, 899 mass spectrum, 895 permeation leak, 887 pore-like, 885 surface tension of liquids, 888 types, 883 virtual, 888 leak detection, 878, 880, 882, 884, 886, 888, 890, 892, 894, 896, 898, 900, 902, 904, 906, 908, 910, 912, 914 series components, 909 leak detection method, 889 bombing, 912 envelope method, 910 requirements for inspection engineers, 889 series production, 894 sniffing method, 908 testing, integral, 897 leak detector, 662 counterflow, advantages, 669 counterflow, detection limit, 669 counterflow, detection system, 668 counterflow, principle, 668 counterflow, response time, 669 counterflow, roughing pump, 669 counterflow, sensitivity, 668 counterflow, sniffing, 672 direct flow, advantages, 668 direct flow, principle, 667 direct flow, response time, 668 direct flow, sensitivity, 667 dry, 670 refrigerant, 672 leak localization, 899 leak rate concentration correction, 898 conversion, 898 conversion factors, 883 mass flow, 883 pressure correction, 898 standardized, 898 units, 883 leak rate limit, 889, 909 Lennard-Jones potential, 66 Leucippus, 1 linearity, 678 linearity deviation, 678 linearized collision operator, linearized kinetic equation, 178, 195 liquefier, 511 liquid jet vacuum pump, 376, 377 applications, 378 suction pressure, 377 liquid manometer, 689 liquid ring pump, 247 liquid ring vacuum pump, 265 designs, 270 pumping speed, 267 working fluid, 267, 275 liquid-tight, 891 local equilibrium, 166 long-term instability, 718 long-term stability, 688, 715 Loschmidt constant, 32 Louthan, 244 lubricant, 793 m Mach angle, 105, 109 Mach line, 108 Mach number, 96, Macor, 739, 744 macro-characteristics, of gas flow, macroscopic properties, 34 Magdeburg hemispheres, 5 magnetic field, 446

11 magnetic sector analyzers, 649 magnetron, 620 inverted, 620 main rotor, 305 maintenance, 447 manipulator, 788 Mariotte, 31 mass, 29 conservation, 90 mass analyzer, 631, 643 mass density, 30 mass flow rate, 83, 177, 194, 200, , mass flow rates, 194 mass flowmeter thermal, 594 mass flux rate, 83 mass spectra of refrigerants, 674 mass spectrometer double-focusing, 664 software, 658 mass spectrometry, 631 mass spectrum artifacts, 642 materials, 734, 736, 738, 740, 742, 744, 746, 748, 750, 752, 754, 756, 758, 760, 762 ceramic, 743 gas emission, 751 plastic, 747 requirements on, 733 Maxwell, 8, 38, 43, 60 Maxwell distribution function, of velocity, , 174 Maxwell-Boltzmann velocity distribution, 37, 38 MBIS (molecular beam ion source), 637, 640 McLeod, 9, 11, 692 McMillan-Teller isotherm, 235 MCP, 657 mean free path, 42, 43 mean free path expression, 163, 169 mean molar mass, 33 mean residence time, 227 mean time between collisions, 45 measuring uncertainty, 678 membrane vacuum gauge, 561 MEMS, 649 mercury, 393 density, 691 mercury diffusion pump, 393 mercury U-tube, 692 metal cryostat, 515 metallization, 771 metals, 734 gas permeability, 751 saturation vapor pressure, 756 methane, 882, 896 method of calculation, of gas flows, micro-plasma welding, 767 microchannel plate detector, 657 microelectronics industry, 20 mixtures of different gas species, 33 modulator, 609 modulator method, 609 molar flow rate, 83 molar flux rate, 83 molar gas constant, 32 molar mass, 30 molar volume under standard conditions, 32 mole, 30 molecular beam method, 709 molecular flow, 127 molecular sieve, 532 molecular speed, 163 molecular state, 46 molecule, 29 momentum conservation, 91 monitoring, 811 monolayer adsorption isotherms, 232 monolayer formation time, 236 monolayer time, 236, 475 monomolecular layer, 223 Monte Carlo simulation, 135, 707 Moore, 241 most probable speed, 39 motive fluid, 375 motive jet, 375 motive steam, 379 motive-steam consumption, 382 motor AC, 256 three-phase, 256 brushless direct current, 439 DC, 256 brushless, 256 three-phase asynchronous, 439 motor switch, protective, 338 MSLD, 672 MT isotherm, 235 Mu-metal, 739 multilayer adsorption, 234 Index 987

12 988 Index multiple vane pump, 279, 829 multistage pump, 248 n National Institute of Standards and Technology, 687 Navier-Stokes equation, 174, 183, 186, 196 NEG material, 467 NEG pump, 464, 867 activation, 465, 471 applications, 471 design, 468 getter capacity, 469 operating recommendations, 472 pumping speed, 469 reactivation, 471 ventilation, 472 Nernst heat theorem, 505 neutral particle implantation, 484 Newcomen, Thomas, 9 Newton, 49 Newton s approach, 49 NIST, 687 noble gases, 11 noble-gas instability, 490 noble-gas stabilization, 490 non time counter (NTC) method, 176 non-diffuse scattering kernel, 182 non-isothermal flows, non-linearity, 678 nonmetals saturation vapor pressure, 757 Northey type, 304 Nottingham, 15, 598 nozzle cap vapor trap, 395 nozzle flow, 98 NPT thread, 776 number density, 164, 167, 170 number density of molecules, 30 number density of particles, 32 o Oatley s approach, 143 occlusion, 223 OFHC copper, 738 oil, 750 oil backflow, 328 oil blow, 280 oil blow-out, 287 oil cleaning, 343 oil diffusion pump, 393 oil filter, 280, 283, 343 oil level, 339 oil lubrication, 436, 437 oil reservoir, 280 oil-mist separator, 280, 283, 345 oil-vapor backflow, 446 OIS (open ion source), 637, 638 once-through lubrication, 281, 340 operating technique fine-vacuum, 839 high-vacuum, 847 low-vacuum, 827 ultrahigh-vacuum, 862 operation, valveless, 853 orbitron pump, 454, 496 oscillating positive displacement pump, 250 oscillating pumps, 247 oscillating rotating displacer, 248 outgassing, 237 outgassing ratio, 241 overlap ratio, 423 overpressure leak detection, 878, 896 with helium leak detector, 906 ozalid paper, 896 p p-v-diagram, 32 Périer, Florin, 3 parallel connection, 88 partial flow factor, 902 partial flow operation, 901 partial pressure, 633 minimum detectable, 633 partial pressure analysis, 631 partial pressure gauge contribution to neighboring mass, 633 ion source, 637 resolving power, 633 sensitivity, 633 partial pressure measurement optical methods, 659 partial pressure sensitivity, 665 partial pressures minimum detectable, 636 particle, 29 particle diameter, 50 particle flow, 131 particle flow rate, 83 particle mass relative, 31

13 Index 989 particle number, 29 particle properties, 65 particles, 249 pascal, 26 Pascal, Blaise, 3 pendulum slidegate valve, 802 Penning, 15, 599 Penning cell, 485, 618 Penning discharge, 483, 485 Penning gauges, 615 permeability, 751 glass, ceramics, 753 metals, 751 permeation, 243, 898 permeation leak, 675, 677 permeation rate, 244 Petit, Pierre, 3 Physikalisch-Technische Bundesanstalt, 687, 699 physisorption, 221, 463 piggyback design, 282 pipes, gas flow through as function of pressures and temperatures, definitions, free-molecular regime, of variable cross section, slip flow regime, under thermo-molecular pressure ratio (TPR), Pirani, 15, 583 Pirani vacuum gauge, 57 piston gauge, 695 effective area, 695 piston pump, 250 reciprocating, 250 Plücker, 11 plastic, 747 diffusion coefficient, 761 duroplastic, 749 elastomers, 747 gas permeability, 754 thermoplastic, 747 plate baffle, 394 plenists, 4 plug-type connector, 780 Pneurop, 248 Pneurop guidelines, 248 Poiseuille coefficient, , , 203, 216 Poiseuille flow, transversal, 214 Poisson s equations, 92 positive displacement pump, 247, 248, 250, 252, 254, 256, 258, 260, 262, 264, 266, 268, 270, 272, 274, 276, 278, 280, 282, 284, 286, 288, 290, 292, 294, 296, 298, 300, 302, 304, 306, 308, 310, 312, 314, 316, 318, 320, 322, 324, 326, 328, 330, 332, 334, 336, 338, 340, 342, 344, 346, 348, 350, 352 operating recommendations, 337 operating temperature, 329 power requirements, 333 technical safety recommendations, 340 positive displacement pump, oil-sealed oil backflow, 328 pumping speed, 323 ultimate partial pressure, 323 ultimate pressure, 323, 325 power frictional, 427, 429 specific, 307 thermal, 430 Prandtl number, Prandtl-Meyer flow, 107 Prandtl-Meyer procedure, 108 pressure, 25 absolute, 25 critical, 96, 114 differential measurement, 568 inherent, 61 inner, 61 standard, 26 pressure balance, 695, 697 pressure controller, 571 pressure difference, 557 pressure loss measurement, 891 pressure measurement, 868 pressure measuring transducer, 583 pressure ratio, 95, 122 static, 104 pressure rise measurement, 892 pressure scaling, 688 pressure standards, 687 pressure switch, 571 pressure testing, 890 pressure, ultimate, 820, 841 primary standard, 555, 686, 688 Prince Rupprecht, 12, 277 probabilistic method of calculation, of gas flows, , 212 probability of condensation, 74 process chemical, 387

14 990 Index process control advanced, 813 AEC, 818 APC, 813, 818, 819 FDC, 818, 819 PCA, 819 SPC, 818 process gas, 433 process gas flow, 822 process monitoring, 812 process parameter monitoring, 818 process sensor, , 818 process-data analysis, 816, 818, 819 production control, 813 Profibus, 815 profile head aperture, 298 Profinet, 815 pulse counting mode, 654 pump chemical, 260, 264, 386 compound, 416 corrosive-gas, 433 diffusion ejector, 400 hybrid, 400 molecular, 413, 415, 419 split-flow, 434 turbomolecular, 413, 430 turbomolecular, applications, 448 turbomolecular, base pressure, 441 turbomolecular, bearing arrangement, 436 turbomolecular, compression ratio, 422, 424, 441 turbomolecular, design, 430 turbomolecular, operating principle, 430 turbomolecular, operation, 445 turbomolecular, pumping mechanism, 421 turbomolecular, pumping speed, 423, 440 turbomolecular, safety requirements, 435 turbomolecular, thermal balance, 426 turbomolecular, ultimate pressure, 441 turbomolecular, venting, 446 pump combination, 307 pump fluid, 393 pump inlet, 121 pump oil fluorinated, 419 pump stage turbomolecular, 421, 422 pump stand fine-vacuum, 845 high-vacuum, 851 low-vacuum, 830 pump unit, 272, 321 pump-down curve, 228 pump-down time, 442, 831, 841, 861, 868 pumping capacity, 83 critical, 101 effective, 89 pumping probability, 422, 424 pumping speed, 85, 248, 253, 420, 422, 423, 440, 622, 726 effective, 88 influence of gas species, 257 net, 89 pumping speed measurement, 727 pumps dry, 23 pure-oxide ceramics, 744 purge gas, 433, 447, 449 pv flow, 84, 444 pv-diagram, 334 q QMS (quadrupole mass spectrometer), 637, 644 quadrupole mass analyzer, 644 quadrupole mass filter, 644 stability region, 646 quadrupole mass spectrometer, 632, 637, 643, 644, 646, 648, , 673, 721, 895 miniaturized, 648 transmission, 646 quality bearing arrangement, 436 quality standard ISO 9001, 897 quartz Bourdon tube vacuum gauge, 560 quartz glass, 742 quartz glass diaphragm, 679 r R134a, 674 R22, 674 R600, 674 R600a, 674 Röntgen, 11

15 Index 991 radiation, 429 thermal power, 523 radiation flux, 523 railways atmospheric, 9 vacuum, 9 Ramsay, 11 rarefaction parameter, , 182, , , , Raschig ring, 347 rate of flow, 84 rate of incidence, 40 rate of recombination, 242 Rayleigh, 11 real gases, 60 reciprocating piston pump, 250 recombination, 241 recombination rate, 242 Redhead, 231 Redlich, 62 reduced collision integral, 69 reduced flow rate, , , 212, 217 reduced temperature, 69 reduced virial coefficient, 69 reference leak, 675, 909 calibration, 677 helium, 677 temperature coefficient, 676 refilling equipment, 518 reflector electrode, 610 refrigerant, 672, 674 refrigerant leak detector, 672 refrigerant loss, 908 refrigerating power, 504 refrigerating system, 511 refrigerating technology, 501 refrigerator, 511, 675 Gifford-McMahon, 517 refrigerator cryopump, 511, 544 refrigerator cryostat, 517 refrigerators/air conditioners, 908 Regnault, 60 relative atomic mass, 31 relative humidity, 76 relative particle mass, 31 remote control, 439 replenishment equipment, 518 residence time, 227 residual drag, 580 residual gas analyzer, 631, 720 calibration, 720 resistance, 87, 131 resistance evaporator, 481 resolving power, 633 response time, 666, 670, 673, 905 reversible process, 504 Reynolds number, 79, 83, 111 RGA (residual gas analyzer), 631 Roots blower, 309 Roots pump, 248, 249, 309 basics, theoretical, 313 compression ratio, 313, 315 efficiency, volumetric, 315 gas flow, effective, 313 installation, 322 operating principle, 310 operating suggestions, 322 technical setup, 311 Roots, Francis M., 309 Roots, Philander H., 309 rotary plunger pump stages, 288 rotary-current asynchronous motor, 309 rotating displacer single-spool, 248 twin-spool, 248 rotating plunger pump, 247 rotating positive displacement pump dry compression, 248 liquid sealed, 247 lubricant-free, 249 single-shaft, 265 twin-spool, 295 rotation, 52 rotor, rotor disc, 413, 427, 430 rotor failure, 435 rotor fracture, 435, 436, 446 rotor temperature, 427, 445 s safety bearing, 437, 438 safety valve, 343 sapphire, 744 saturation flow rate, 368 saturation ratio, 76 saturation temperature, 353 saturation vapor pressure, 71, 72, 756 metals, 756 nonmetals, 757 Sawada, 292 sccm, 84 Schott, 5 screw type pump, 248, 295

16 992 Index screw type pump (continued ) pumping speed, 299 tooth profile, 295 scroll pump, 248, 291, 671 sealing faces, 772 sealing force, 773 sealing gap, 303 sealing with foil, 899 seals, 766, 768, 770, 772, 774, 776, 778, 780, 782, 784, 786, 788, 790, 792, 794, 796, 798, 800, 802, 804, 806, 808 search gas, 908 helium, 663 search gas method, 894 search gas species, 881 secondary electron multiplier, 654 secondary standard, 688 SECS, 816, 817 self-diffusion, 59 SEM, 654 SEMI, 815 semiconductor industry, 249, 811, sensitivity, 601, 720 sensitivity drift, 678 sensor integration, 812 series connection, 88, 141 components, 142 tube and aperture, 141 shear stress, , 168, 187 shear viscosity, 163 shell baffle, 394 shielding magnetic, 739 shock, 102 compression, 102 perpendicular, 102 straight, 102 shock surface, 91 Siegbahn, 420 Siegbahn pump stage, 420 Siegbahn s molecular pump, 420 sieve molecular, 532 Sievert s law, 466 silicate ceramics, 743 silicone oil, 325 sliding valve, 800 sliding vane rotary pump, 247, 277 dry, 248 oil-lubricated, 279 once-through lubricated, 281 operating behavior, 282 operating principle, 277 S model equation, for rarefied gas flow, 171 Smoluchowski, M., 134 sniffing device, 671 sniffing leak detection integral, 907 leak localization, 908 on refrigerators/air conditioners, 908 sniffing velocity, 908 sniffing method measurement results, 880 search gas distribution in front of a leak, 879 soldering, 767 solid condensation, 368 solubility, 244 solutionenthalpy, 244 sorption, , 226, 228, 230, 232, 234, 236, 238, 240, 242, 244, 246 sorption medium, 342 sorption phenomena, 221 sorption pump, 454, 456, 458, 460, 462, 464, 466, 468, 470, 472, 474, 476, 478, 480, 482, 484, 486, 488, 490, 492, 494, 496, 498 sorption trap, 342 space charge, 617 space simulation, 21 specific enthalpy of vaporization, 72 specific gas constant, 32 speed circumferential, 432 effective, 39 most probable, 39 speed control, 256, 309 speed of sound, 95 spinning rotor gauge, 573, 702, 716 calibration, 716 long-term instability, 718 split-flow pump, 434 Sprengel, 8 sputter ion pump, 454 noble-gas instability, 490 stability long-term, 688, 715 standard primary, 686 primary, comparison, 689 secondary, 688 standard condition, 29 standard pressure, 26

17 Index 993 standard temperature, 29 StarCell triode pump, 493 starting time, 900 state variables, 25, 29 static pressure ratio, 391 stationary flow, 167 stator disc, 413, 427, 430 steam jet vacuum pump, 371, 376, 379 multistage, 384 steel mild, 735 special alloys, 736 stainless, 736 Stefan-Boltzmann law, 429 sticking probability, 474 Stirling process, 509 straight-way valve, 798 stress mechanical, 427 sublimation, 71 sublimation getter pump, 454 sublimation pump, 473 suction chamber, 253, 254, 277 sulfur hexafluoride, 882, 896 superheat, 355 suppressor, 665 surface analysis, 21 surface area specific, 455 surface condensation rate, 74 surface condenser, 362, 384 surface coverage, 224 surface evaporation rate, 74 surface-adsorption rate, 226 surface-desorption rate, 227 Sutherland, 14, 44 Sutherland s constant, 44 Swagelok connector, 775 system control, 812 system leak detection, 902 response time, 904 sensitivity, 904 throttle valve, 903 system, ultrahigh-vacuum, 869 t T.D.C., 250 tangential velocity, 180 tangential-momentum accommodation coefficient, 47 tantalum, 491 TCP/IP, 814, 815 Teller, 234 Temkin isotherm, 234 temperature, 26 standard, 29 temperature coefficient, 675 temperature correction, 715 temperature difference, 154, 429 mean, 357 temperature jump coefficient, temperature of condensation, 361 temperature of dew point, 353 temperature ratio, 95 temperature scale thermodynamic, 31 test equipment, 677 test leak, 723, 909 calibration, 723 testing chamber method, 898 thermal conduction flux, 525 thermal conductivity, 34, 51, 55 thermal conductivity coefficient, of gas flow thermal conductivity vacuum gauge cleaning, 850 constant heating, 590 constant wire temperature, 587 operating guidelines, 593 thermal creep coefficient, , 200, thermal slip coefficient, thermal transpiration, 569, 625, 713 thermistors, 593 thermo-molecular pressure ratio (TPR), thermocouple vacuum gauge, 592 thermodynamic temperature, 27 thermodynamics fundamental laws, 502 thermoplastic, 747 Thomson, J., 11 throughput, 83 85, 440, 444 TIG welding, 766 tightness absolute, 889 tightness testing industrial, 909 standards, 890 terms, 890 tightness testing system, 910 time constant, 905 titanium, 491, 737 titanium evaporation pump, 479, 482, 866 tooth profile, 297 tooth type pump

18 994 Index tooth type pump (continued ) twin-spool, 248 tooth type rotary pump, 248 top dead center, 250 Torricelli, Evangelista, 2 transducer pressure measuring, 583 transmission probability, 127, 128, 400, 421, 424, 425 transpiration thermal, 154, 155, 569, 625, 713 transport coefficients, of gas flow Prandtl number, 170 thermal conductivity coefficient, viscosity coefficient, transport of frictional forces in gases, 47 transport properties of gases, 45 triode, 597 concentric, 604 triode pump, 491 triple point, 27 trochoidal pump, 290 tube conical, 145 constant cross-sectional area, 133 long, circular cross section, 150 simple cross section, 136 tube bend, 138 tube bundle condenser, 363 tube elbow, 138 tungsten inert-gas welding, 766 turbine condenser, 361 turbomolecular pump, 867 u U-tube manometer, 690 UHV system, 863 ultimate pressure, 253, 414, 433, 820, 841, 868 influence of gas species, 257 influence of rotational speed, 257 ultrahigh-vacuum system, 869 undercooling, 361 v vacuists, 4 vacuum absolute, 8, 15 definition, 1, 25 measurement, 14 railways, 9 relative, 26 vacuum annealing, 807 vacuum chamber method, 910 vacuum components, 779 cleaning, 805 vacuum drying system, 370 vacuum gauge Bourdon tube, 559 capacitance, 566 capsule element, 558 corrugated-diaphragm, 557 diaphragm, 561 gas-friction, 556, 573 ion spectroscopy, 611 mechanical, 556 membrane, 561 piezoelectric, 565 quartz Bourdon tube, 560 spinning rotor, 573 thermal conductivity, 587 thermocouple, 592 vacuum greases, 749 vacuum leak detection, 663, 877 vacuum process chamber, 812 vacuum process system, 811 vacuum process technology, 414, 444, 448 vacuum pump, 353 ultimate pressure, 820 vacuum pumps, 21 vacuum ranges, 21 vacuum system, 901 connecting points for leak detectors, 902 longest, 21 ultimate pressure, 820 vacuum technology applications, components, 766, 768, 770, 772, 774, 776, 778, 780, 782, 784, 786, 788, 790, 792, 794, 796, 798, 800, 802, 804, 806, 808 scope, seals, 766, 768, 770, 772, 774, 776, 778, 780, 782, 784, 786, 788, 790, 792, 794, 796, 798, 800, 802, 804, 806, 808 vacuum vessel, 780 design, 781 dimensioning, 782 valve, 795 butterfly, 799 corner, 797

19 Index 995 flap, 799 gas dosing, 801 sealing, 797 sliding, 800 straight-way, 798 valveless operation, 853 van der Waals, 61 equation of state, 61 van der Waals forces, 221 vane, 279 vane wear, 282 vapor, 71 saturated, 353 superheated, 354 vapor jet pump pumping speed, 404 vapor jet vacuum pump, 376 motive-steam consumption, 382 vapor pressure, 353 vapor pressure curve, 353 vapor pressure curves, 354 vapor trap, 394 nozzle cap, 395 VCR connector, 775 velocity acoustic, 95 critical, 97 velocity distribution function, of gas flow, for channel, 195 for Couette flow, , for cylindrical variables, for Poiseuille flows, 198 for thermal creeps, 199 for tube, 195 for wide channels, 198 in free-molecular regime, in slip flow regime, in transitional regime, of BGK model, 179, 184 of S model, velocity gradient, 168 velocity ratio, 422, 423 vena contracta, 98 vent valve, 431 venting, 446, 837, 861 vessel dished head, 784 double-walled, 784 vessel head dished, 782 vibration, 52 virial coefficient, 62 virial coefficient, reduced, 69 virial series, 62 viscosity, 34, 47 dynamic, 49 viscosity coefficient, of gas flow, viscous slip coefficient, viscous state, 46 volume, 25 inherent, 61 molar volume under standard conditions, 32 volume charge, 483, 617 volume collision rate, 45 volume flow rate, 83 volume flux rate, 83 von Baeyer, 15 von Guericke, Otto, 4 w wall flux density, wall pressure due to impacting particles, 35 wall thickness, 783 water freezing point, 27 triple point, 27 water jet pump, 377, 378 water ring pump, 265 water testing, pressurized, 889 water tightness, 889, 893 water vapor capacity, 331 water vapor desorption, 665, 892 water vapor tolerance, 331, 332, 374 weld seam, 907 welded joints, 766 welding electron-beam, 767 micro-plasma, 767 TIG, 766 tungsten inert-gas, 766 Wheatstone bridge, 589, 591 Wheeler flange, 778 window, 793 Winsock, 814 working pressure, 821, 822

20 996 Index x X-ray effect, 606 inverse, 609 X-ray limit, 622 X-rays, 11 z zeolite, 455, 747 zero-point compensation, 589 zero-point drift, 678