VACUUM PUMPING METHODS

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3 VACUUM PUMPING METHODS VACUUM PUMPS (METHODS) Positive Displacement Vacuum Gas Transfer Vacuum Kinetic Vacuum Entrapment Vacuum Adsorption Reciprocating Displacement Rotary Drag Fluid Entrainment Ion Transfer Cold Trap Diaphragm Liquid Ring Gaseous Ring Ejector Bulk Getter Getter Piston Rotary Piston Turbine Liquid Jet Diffusion Getter Ion Sublimation Multiple Vane Rotary Sliding Vane Rotary Axial Flow Gas Jet Diffusion Ejector Self Purifying Diffusion Evaporation Ion Rotary Plunger Radial Flow Vapor Jet Fractionating Diffusion Sputter Ion Dry Roots Molecular Drag Cryopump Turbomolecular Condenser

4 Pressure Equivalents Atmospheric Pressure (Standard) = , , gauge pressure (psig) pounds per square inch (psia) inches of mercury millimeter of mercury torr millitorr or microns pascal bar millibar

5 PRESSURE RANGES RANGE PRESSURE ROUGH (LOW) VACUUM 759 TO 1 x 10-3 (mbar) HIGH VACUUM 1 x 10-3 TO 1 x 10-8 (mbar) ULTRA HIGH VACUUM LESS THAN 1 x 10-8 (mbar) (Page 17 manual)

6 Viscous and Molecular Flow Viscous Flow (momentum transfer between molecules) Molecular Flow (molecules move independently)

7 FLOW REGIMES Viscous Flow: Distance between molecules is small; collisions between molecules dominate; flow through momentum transfer; generally P greater than 0.1 mbar Transition Flow: Region between viscous and molecular flow Molecular Flow: Distance between molecules is large; collisions between molecules and wall dominate; flow through random motion; -3 generally P smaller than 10 mbar

8 Conductance in Viscous Flow Under viscous flow conditions doubling the pipe diameter increases the conductance sixteen times. The conductance is INVERSELY related to the pipe length (Page 28 manual)

9 Viscous Flow (Long Round Tube; air) C = 1.38 x 10 2 x d 4 x P 1 + P 2 (l/sec) l 2 d = diameter of tube in cm l = length of tube in cm P 1 = inlet pressure in torr = exit pressure in torr P 2

10 Viscous Flow (Long Round Tube; nitrogen) EXAMPLE: d = 4 cm l = 100 cm P 1 = 2 torr P 2 = 1 torr C = 138 x d 4 x P 1 + P 2 (liter/sec) l 2 C = 138 x 256 x 3 (liter/sec) C = 530 (liter/sec)

11 Conductance in Molecular Flow Under molecular flow conditions doubling the pipe diameter increases the conductance eight times. The conductance is INVERSELY related to the pipe length.

12 Conductance in Molecular Flow (Long Round Tube) C = 3.81 x d 3 x l T M (l/sec) d = diameter of tube in cm l = length of tube in cm T = temperature (K) M = A.M.U.

13 Conductance in Molecular Flow (Long Round Tube) EXAMPLE: T = 295 K (22 O C) M = 28 (nitrogen) C = 3.81 x d 3 x l = 3.81 x d 3 x l = x d 3 l T M (l/sec) (l/sec)

14 EXAMPLE: T = 295 K (22 O C) M = 28 (nitrogen) C = 3.81 x d 3 x l = 3.81 x d 3 x l = x d 3 l = x 0.64 = 7.9 (l/sec) T M (l/sec) d = 4 cm l = 100 cm (l/sec)

15 Series Conductance R T = R 1 + R 2 1 = C T C 1 C 2 1 = C 1 + C 2 C T C 1 x C 2 C T = C 1 x C 2 C 1 + C 2 C 1 C 2 SYSTEM PUMP

16 GAS LOAD Outgassing Permeation Diffusion Real Leaks Virtual Backstreaming GAS LOAD (Q) IS EXPRESSED IN: mbar liters per second

17 down Curve Volume Pressure (mbar) Surface Desorption Diffusion Permeation Time (sec)

18 PUMP OPERATING RANGES Ultra High Vacuum High Vacuum Rotary Vane Mechanical Rotary Piston Mechanical Dry Mechanical Sorption Blower/Booster High Vac. s Rough Vacuum Venturi Ultra-High Vac. s P (mbar)

19 Rotary Vane, Oil-Sealed Mechanical (Page 45 manual)

20 Mechanism

21 OIL BACKSTREAMING 2 PRESSURE LEVELS: LESS THAN 0.2 mbar

22 PUMP OPERATING RANGES Diffusion Turbo Cryo Ultra High Vacuum High Vacuum Roughing s Rough Vacuum Liquid Nitrogen Trap Ion Tit. Subl P (Torr)

23 VACUUM SYSTEM USE a Chamber High Vac. Roughing Fore Hi-Vac. Valve Roughing Valve Foreline Valve Vent Valve Roughing Gauge High Vac. Gauge 3a 3

24 Oil Diffusion

25 Construction (Page 66 manual)

26 How the Works

27 How the Works

28 Release of Vapors (Page 67 manual)

29 First stage vapors are separated from others

30 ing Speed ing Speed (Air) Critical Point 1. Compression Ratio Limit 2. Constant Speed 3. Constant Q (Overload) 4. Mechanical Effect Inlet Pressure (Torr)

31 Maximum Tolerable Foreline Pressure

32 VACUUM SYSTEM USE LN2 COLD TRAP

33 Turbomolecular INLET FLANGE ROTOR BODY STATOR BLADES HIGH PUMPING SPEED HIGH COMPRESSION BEARING EXHAUST HIGH FREQ. MOTOR BEARING

34 Rotor - stator assembly

35 Operation Molecule V Moving Wall with Speed V Principle of the Turbomolecular

36 Roughing through the turbo Chamber Turbo Roughing Vent Valve Roughing Gauge High Vac. Gauge 3

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