Product Overview. Ultimate NanoScience. Combined Scanning Probe Microscopy, Electron Spectroscopy and Thin-Film technology from a single supplier

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1 Ultimate NanoScience Product Overview Combined Scanning Probe Microscopy, Electron Spectroscopy and Thin-Film technology from a single supplier o th d t c ti c t ch ppo t d o p od ct More than 1100 man-years of experience in NanoScience h t o c ti c c t tio th t

2 Serving Your Scientific Challenges In May 2017 we celebrated our second birthday since the establishment of Scienta Omicron from the merger of VG Scienta and Omicron NanoTechnology. This merger combined three world-class areas of expertise scanning probe microscopy, electron spectroscopy, and UHV system design providing customers with an experienced partner for well-supported and stable instruments employing the most advanced technology. But the merger has brought additional benefits. As a privately held, financially sound company, we have increased the pace of our investments in technology, facilities and employees for long term technology and manufacturing leadership. The merger provided a modern operational framework for the entire organization, increasing our responsiveness to customer needs while reducing costs. A new, higher capacity production facility has just opened for our sister company and key supplier, VacGen, and our new purpose-built facility for electron spectroscopy products opened in Uppsala in Our customers will benefit from these investments with individualized solutions provided rapidly at an affordable price. The Scienta Omicron merger was notable in having two similarly sized companies possessing similar core business models. This preexisting compatibility translated into a rapid merging of best practices in all of our operations. This has fed our significant and ongoing hiring of scientists and engineers for development and customer support. Our increase in customer support translates directly into increased customer productivity. Now, as the largest company supporting the UHV surface science community, Scienta Omicron thanks you for your support in our first two years. We look forward to serving the research community for a long time to come. 2

3 Customer advantages from Scienta Omicron: More than 30 years forefront experience in scientific instrumentation Turn-key ARPES, XPS, SPM, and MBE solutions First-class UHV engineering Local points of contact around the globe Shortest time between installation and publication

4 4 Scanning Probe Microscopy Enabling Forefront Research... In only one year after the Nobel prize was awarded to Gerd Binnig and Heinrich Rohrer - our legendary STM 1 was created. It established our position as innovative manufacturer of scanning probe microscopes providing leading edge technology for forefront research and science. Today we offer a wide variety of SPM techniques for UHV at variable temperatures (from 25 K to 1500 K), low temperature applications (down to 0.5 K) or for large samples of up to 4 in diameter. These instruments are available as stand-alone components, within turn-key UHV SPM systems and also as part of multi-technique solutions tailored to our customer needs. LT STM: Extended hold times to > 65 hours Increased spectroscopy resolution New cabling for GHz signals for improved time resolution Scienta Omicron s leading QPlus AFM technology LT NANOPROBE: Four independent scanning tunneling microscopes Excellent STM performance for spectroscopy and manipulation 4-Point transport measurements with atomic precision Base temperature T < 5 K Simultaneous SEM navigation at low temperatures VT SPM: 25 K 1500 K T ru e p A ST M Improved di/dv spectroscopy Beam deflection & QPlus AFM In-situ evaporation Fermi SPM: 15 K 400 K Compact design Sample and tip cooled Low thermal drift Large Sample SPM: Samples up to 4 diameter Fab line compatible T ru e p A ST M Improved di/dv spectroscopy Beam deflection & QPlus sensor AFM MATRIX 4: New high performance AFM PLL for advanced QPlus AFM TipGuard and PLLGuide Integrated Lock-In New compact design for easy access

5 Fermi DryCool TM SPM: Cryogen-free cooling for unlimited operation at low & variable temperatures Independent tip & sample temperature control from LT to above RT Ultra-low noise level below 1 pm with active cooling Superior drift performance Scienta Omicron s leading QPlus AFM technology TESLA JT SPM: > 5 Days uninterrupted measurement time in magnetic fields Base temperature T < 1.4 K with 4 He Dry UHV magnet B Z > 3 T Optical access & ease of use STM and advanced spectroscopy Leading QPlus AFM technology TESLA JT SPM LT STM LT NANOPROBE Fermi SPM Fermi DryCool TM SPM VT SPM Tips 0.65K 1.4K Temperature Range 5K 5K 77.5K RT 5K 77.5K RT 10K 400K 10K 400K 25K RT 1500K Scanning Probe Microscopy at a glance: Leading edge SPM technology and performance Comprehensive portfolio of UHV SPM methods from STM and spectroscopy to AFM with QPlus and beam deflection techniques Quality and reliability standards to enable our customers for successful research hot tip cold tip 5

6 Electron Spectroscopy ARPES, XPS and more... In 1983 two years after receiving the Nobel prize Prof. Kai Siegbahn co-founded Scienta for the continued development of electron spectrometers and systems. Since the start, we have been established as the market leading, most innovative supplier of high end photoelectron spectroscopy. hν = 9.25 kev hν = 1.48 kev HAXPES-Lab features: Window to the bulk - HAXPES provides information from below the surface Designed for high intensity HAXPES measurements From synchrotrons to home lab: 24/7 access to HAXPES Scienta Omicron s offering also includes other electron analysers and a wide range of standard sources such as UV and X-ray sources, LEED, electron guns, ion guns, charge neutralizers, and Gas Cluster Ion Beam Source GCIB for XPS, UPS, ARPES, Auger, ISS, etc. Some spectroscopy solutions are shown here... HiPP-Lab features: Proven high stability and good resolution under extreme conditions Exchangeable chamber concept for application flexibility and easy operation Differential pumping philosophy delivering high efficiency Swift acceleration mode for higher intensity NanoESCA features: Live View energy-filtered 2D real & momentum space imaging Precise sample spot definition for small area ARPES Zoom from full 180 ARPES overview to detailed features LHe cooled microscopy sample stage Excellent 2D imaging energy resolution (< 25 mev) XPS-Lab features: Flexible high performance XPS for stand-alone or multi tool cluster systems One- or two-stage concept Fast thin and thick film analysis with ultimate sensitivity ARGUS CU features: Compression unit lens for highest intensity XPS State of the art 128 channel detector Scanning, ng, snap shot and small area analysis modes 6

7 DA30-L ARPES analysis chambers VUV5K R3000 ARPES-Lab features: Best technology featuring DA30-L or R3000 analysers Advanced software and automation Comprehensive ARPES solution with single supplier responsibility Configurable and Extendable to multi tool systems Largest reference base and best track record 8 ARTOF-2 Various ARPES-instruments: DA30-L 8000: - Fermi surface mapping made easy - Detect the smallest of variations using highest angular and energy resolution - Electric deflection for high precision and accuracy one spot measurements ARPES analysis chambers - designed according to your needs R A Compact and Powerful Analysis Tool VUV5K - the most intense He-light source on the market ARTOF-2 - for angle-resolved photoelectron spectroscopy Electron Spectroscopy at a glance: State-of-the-art, patented analyser technology Integration expertise and application knowledge Largest component range and professional selection assistance Many years of experience Product offering from components to complete systems Range of analysers for different segments and applications 7

8 Molecular Beam Epitaxy Modular MBE Systems and more... Since 1998 we have focussed on the increasing demands of the growth and characterisation of high-purity epitaxial layers (MBE) combined with in-situ scanning probe microscope (SPM) and electron spectroscopy (XPS, ARPES, SAM). The MBE-series of systems fulfil the most stringent requirements of modern nanotechnology research. Therefore, our MBE systems employ state-of-theart components for the MBE growth. Lab10 MBE system features: Designed for Scienta Omicron flag style sample holders Flexible configurations Up to 8 effusion cell ports Growth process controlled by advanced software Ability to combine with multiple modules (analysis, cluster, ) EVO25/50 MBE system features: Designed for 1 and 2 substrates (smaller is possible) Flexible configurations Up to 10 effusion cell ports & cluster flange Growth process controlled by advanced software Ability to combine with multiple modules (analysis, cluster, ) PRO-75/100 MBE system features: Designed for 3 and 4 substrates (smaller is possible) Flexible configurations Up to 12 effusion cell ports + cluster flange Growth process controlled by advanced software Ability to combine with multiple modules (analysis, cluster, ) Custom MBE System Multi-technique system* - used for in-situ growth and analysis of functional materials by STM, AFM, RHEED, wafer curvature measurement and XPS. Main features: Placed in a state-of-the-art clean room laboratory Consists of a transfer-, an analysis- and two PRO-100 MBE-modules Configured for in-situ investigation of novel materials for Spintronics & Optoelectronics on 4 wafers E-Beam Evaporators, Effusion Cells, Cracker & Valved Sources 8 *Picture courtesy: Prof. Hommel, Wrocław Research Centre EIT+ (PL)

9 Above: 4 multi-module cluster tool installed at the HNF (Helmholtz Nanofabrication Facility) in the FZ Juelich (Forschungszentrum Jülich, Germany). It consists of several MBE (Metal, III-V) and UHV sputter deposition chambers interconnected by a combination of linear transfer lines and central distribution chambers equipped with a telescopic transfer arm. Vacuum connection is also realized to an ALD deposition tool (FlexAL) via a buffer/sample-flip chamber. Molecular Beam Epitaxy at a glance: MBE on sample sizes from 10x10mm up to 4 wafers Available as stand alone systems or cluster version Versatilely configurable and customizable Best in combination with Scienta Omicron analysis systems 9

10 Customer Specific Solutions Based on unparalleled experience... With more than 30 years experience and several hundreds of UHV systems installed worldwide, we have earned an excellent reputation as a partner for customer-specific solutions. These cover the integration of not only Scienta Omicron instrumentation, but also 3rd party components, the connection to existing UHV systems, or the bespoke engineering of complex multi-chamber cluster systems. With the largest sales and service organisation in the industry, Scienta Omicron can always offer a local sales representative e to help customers through the consultation process. We can draw from a huge base of proven solutions as starting points and refine them with support from the experts in our headquarters on crucial topics such as an efficient workflow, clean sample preparation, chamber configuration, magnetic shielding, mechanical vibrations, or cleanroom compatibility. Our customized and standard systems both benefit from German quality design and manufacturing, as well as from integrated solutions such as our MISTRAL system control. Scienta Omicron s product portfolio is supplemented by a network of renowned partners. rs. This allows us, as a single supplier, to offer a broad spectrum of UHV research solutions with guaranteed performance of the entire system. Our customers benefit from having a single entry point for services and the shortest possible time to results for their unique system solution. Bespoke MULTIPROBE MXPS UHV system with two energy analysers and an X-ray monochromator or for angle-resolved XPS from ionic liquids. UHV system combining leading-edge analytical tools in angle-resolved photoelectron spectroscopy and low-temperature STM on a single bench. Customised R&D system for infrared spectroscopy and temperature-programmed desorption, used for industrial chemical engineering. 10

11 Cluster system installed at the Institute for Quantum Computing, Univ. of Waterloo (CAN) consisting of: 5 deposition modules Preparation chamber for mask alignment Analytical module Wafer handling (2 ) under true UHV conditions The chambers are designed for: Oxide, Metal and Topological Insulator MBE Superconducting Material and Magnetic Material Sputtering Surface Analysis via XPS, UPS and AES This tool offers a broad range of materials that can be grown and enables the combination of different material classes for the development of novel quantum materials. NanoSAM-Lab features: Versatile research UHV-SEM with ultimate resolution < 3nm Scanning Auger microscopy (SAM) with drift correction, ultimate resolution < 6nm Upgrades with magnetic domain imaging (SEMPA) and focussed ion beam milling (FIB) Further options: sputter depth profiling, XPS, EBSD, CL, EBL, EDX, EBID, etc. Sample stage with heating and LHe cooling options Customer Specific Solutions at a glance: Proven track-record for customized solutions of any complexity Interactive solution-finding process with expert backup from our headquarters Shortest time to results and lowest risk of failure 11

12 How to contact us c op c Asia & Australia We have sales representatives and agents around the world - and right next door. Please check our website for your local contact and partner. Many thanks. info@scientaomicron.com Specifications and descriptions contained in this brochure are subject to change without notice. Product Overview / V01/July 17