Lens Design I. Lecture 13: Correction II Herbert Gross. Summer term

Transcription

1 Les Desig I Leture 3: Corretio II Herbert Gross Suer ter 5

2 Preliir Shedule 3.4. Bsis.4. Properties of optil sstres I Properties of optil sstres II Properties of optil sstres III 5.5. Adved hdlig I Aberrtios I 7.6. Aberrtios II Wve berrtios, Zerike poloils Itrodutio, Ze iterfe, eues, file hdlig, preferees, Editors, updtes, widows, oordites, Sste desriptio, 3D geoetr, perture, field, wvelegth Dieters, stop d pupil, vigettig, Louts, Mterils, Glss tlogs, Rtre, R fs d splig, Footprits Tpes of surfes, rdil eleets, les properties, Igig, gifitio, pril pproitio d odellig, teleetriit, ifiit objet diste d fol ige, lol/globl oordites Copoet reversl, sste isertio, slig of sstes, spheres, grtigs d diffrtive surfes, grdiet edi, solves Add fold irror, sle sste, slider, ultiofigurtio, uiversl plot, dieter tpes, les tlogs Represettio of geoetril berrtios, Spot digr, Trsverse berrtio digrs, Aberrtio epsios, Prir berrtios Aberrtios III Poit spred futio, Optil trsfer futio Optiiztio I Priiples of olier optiiztio, Optiiztio i optil desig, Globl optiiztio ethods, Solves d pikups, vribles, Sesitivit of vribles i optil sstes.6. Optiiztio II Ssteti ethods d optiiztio proess, Strtig poits, Optiiztio i Ze 9.6. Igig Fudetls of Fourier optis, Phsil optil ige fortio, Igig i Ze 6.7. Corretio I Corretio II Setr priiple, Les bedig, Corretig spheril berrtio, Co, stop positio, Astigtis, Field fltteig, Chrotil orretio, Retrofous d telephoto setup, Desig ethod Field leses, Stop positio ifluee, Aspheres d higher orders, Priiples of glss seletio, Sesitivit of sste orretio

3 3 Cotets. Higher order berrtios. Aspheres 3. Freefor surfes 4. Miselleous

4 4 Higher Order Aberrtios: Ahrote, Aspheres Splitted hrote hrot broke ott spheri ir spe r zoe Aspheril surfe... zoe zoe Ref : H. Zügge

5 5 Merte Surfe Sll differee i refrtive ide Growig higher order otributios R NA Merte surfe rdius oetri NA =.5 NA =. NA =. - 6 / 9-6 / 9 6 / 9 5 / / / D

6 6 Higher Order Aberrtios: Merte Surfe Merte surfe: - low ide step - strog bedig - il higher berrtios geerted Trsverse spheril berrtio O.5 ( O.5 (b Merte surfe Fro : H. Zügge

7 Poloil Aspheril Surfe Stdrd rottiol-setri desriptio Bsi for of oi setio superiposed b Tlor epsio of z z( h h h M h 4 h... Rdil diste to optil is... Curvture... Coi ostt... Apheril oeffiiets,5,5 h^4 h^6 h^8 h^ h^ h^4 h^6,,4,6,8, h Ref: K. Uhledorf 7

8 8 Aspheril Surfes Additiol degrees of freedo for orretio Et orretio of spheril berrtio for fiite uber of perture rs Strog sphere: oeffiiets with high orders, lrge osilltive residul devitios i zoes Lotio of spheril surfes:. spheril berrtio: er pupil. distortio d stigtis: er ige ple orreted poits Use of ore th sphere: ritil, itertio d orreltio of higher oders t u' residul spheril berrtio SPH

9 Aspheril Epsio Order Iproveet b higher orders Geertio of high grdiets D(r 6. order 5 D rs [] 3 4. order 8. order. order. order r order k

10 Aspheres: Corretio of Higher Order Corretio t disrete splig Lrge devitios betwee splig poits Lrger osilltios for higher orders Better desriptio: slope, defies r bedig residul spheril trsverse berrtios perfet orretig surfe Correted poits with ' = orreted poits residul gle devitio poits with il gle error pril rge ' = dz A /d rel sphere with osilltios z A

11 Poloil Aspheril Surfe Forbes Aspheres - Q o New orthogoliztio d orliztio usig Jobi-poloils Q z( h h h M 4 h / h Q h / h requires orliztio rdius h (: oversio to stdrd spheres possible,5 Me squre slope M / 5,5 -,5,,4,6,8, h^4*q h^4*q h^4*q h^4*q3 h^4*q4 h^4*q5 - h Ref: K. Uhledorf

12 Poloil Aspheril Surfe Forbes Aspheres - Q bfs Liit grdiets b speil hoie of the slr produt (: oversio to stdrd spheres ot possible h u u z( h h M B / h h u it u : h,5 Me squre slope / h M,,4,6,8, u(-ub u(-ub u(-ub u(-ub3 u(-ub4 u(-ub5 -,5 h Ref: K. Uhledorf

13 Reduig the Nuber of Leses with Aspheres Eple photogrphi zoo les Equivlet perfore 9 leses redued to 6 leses Overll legth redued Photogrphi les f = 53, F# = 6.5 ll spheril, 9 leses D is field D D D p p p p b 3 spheres, 6 leses, shorter, better perfore D is field D D D A A 3 A p p p p Ref: H. Zügge

14 Lithogrphi Projetio: Iproveet b Aspheres Cosiderble redutio of legth d dieter b spheril surfes Perfore equivlet NA =.8 spheril 3 leses leses reovble b NA =.8, 8 spheril surfes -9% -3% 9 leses Ref: W. Ulrih

15 5 Aspheriztio of Cer Les Seletio of oe spheril surfe i photogrphi les S S 5 S 9 S S4..5 spheril berrtio o surfe ide spheril sste: 97 surfe : 96 surfe 5: 85 surfe 9: 87 surfe : 78 surfe 4: stigtis surfe ide distortio surfe ide surfe ide

16 6 Freefor Sstes: Surfe Represettios Eteded poloils lssil o-orthogol ooil represettio Zerike surfe Ol useful for irulr pupils d low orders Splies Lolized desriptio, hrd to optiize, good for ufturig hrteriztio Geerlized Forbes poloils Proisig ew pproh, two tpes, strog reltio to tolerig Rdil bsis futios No-orthogol lol desriptio pproh, good for lol effet desriptio Wvelets Not preferred for sooth surfes, ol fesible for tolerig Fourier represettio Clssil desriptio without ssuptios, but ot dpted to berrtios Sooth vs segeted, fetted, steps, o-fert surfes Rel world is still ore oplited

17 Eteded poloils i,: Zerike epsio Eteded Forbes sphere Epsio i other orthogol poloil sstes: Legedre, Chebhev,... Fourier epsio Epsio ito o-orthogol lol shifted Gussi futios (RBF Cubi splie, loll i pth j,k defied s poloils of order 3 7 Freefor Sstes: Equtios of Desriptio,, ( (, ( z, ( ( (, ( j j j Z z si( os(, ( r Q b r r Q r r r r r z k j jk k j z 3 3,, ( w w e z, ( (, ( ik ik e B z, Re ( (, (

18 Geerlized pproh for orthogol surfe deopositio Slope orthogolit is gurteed d is relted to tolerig 8 Freefor Sstes: Forbes Surfes Ref: C.Meke/G.Forbes, AOT (3p.97 si( os(, ( r Q b r r Q r r r r r z

19 9 Freefor Sstes: Et Tilorig Histor: - et solutios of Fert-priiple for oe wvelegth d ol few field poits orrespodig to the uber of surfes - developet of lgoriths for illuitio tilorig - ostl ethods re pplible for illuitio d igig Diesio: - D is uh esier / 3D is oplited d ofte ot uique SMS-ethod of Mio - ostrutio of the surfes r b r with siple proedure - pproved ethod i illuitio d igig Ries tilorig - ethod used sie loger tie - et lgorith ot kow Oliker-Method for illuitio pproitio of sooth surfe b sequee of prboli rs Relit: - due to fiite size of surse s dbrodbd pplitios tilored ethods re ol useful for fidig good strtig sste for optiiztio

20 Freefor Sstes: Optiiztio Optiiztio of sstes with freefor surfes: - huge uber of degrees of freedo - lrge differees i overgee ordig to surfe represettio - lol vs globl ifluee futios - defiitio of perfore d forultio of erit futio is oplited d ubersoe Clssil sste tri for lol defied splies is ill oditioed Strtig sstes: - still ore iportt s i ovetiol optis - ol few well kow sstes published - lrger rhive for strtig sstes ot vilble util ow - ow eperiee usull is poor Best lotio of FFF surfes iside the sste: - still ore iportt s i the se of irulr setri spheres - o riteri kow util ow

21 Freefor Sstes: Applitios Geerl purpose: - freefor surfes re useful for opt sstes with sll size - due to high perfore requireets i igig sstes d liited tehologil ur ost of the pplitios re i illuitio sstes - irror sstes re developed first i strooil sstes with oplited setr-free geoetr to void etrl obsurtio HMD Hed outed devie with etree size ostrits HUD Hed up displ, ol few surfes llowed Shiefspiegler - strooil sstes without etrl obsurtio - EUV irror sstes for et geertio lithogrph sstes Illuitio sstes Vrious pplitios, sooth d segeted

22 Field Leses Field les: i or er ige ples Ifluees ol the hief r: pupil shifted Critil: ojugtio to ige ple, surfe errors shrpl see rgil r hief r field les i iteredite ige ple les L les L shifted pupil origil pupil

23 3 Field Les i Edosope Ref : H. Zügge

24 4 Ifluee of Stop Positio o Perfore R pth of hief r depeds o stop positio stop positios spot

25 5 Effet of Stop Positio Eple photogrphi les stop Sll il shift of stop hges trverse berrtios I prtiulr o is strogl iflueed Ref: H.Zügge

26 Preter of Eetriit Reltive positio of stop iside sste Qutittive esure: Preter of eetriit (h bsolut vlues h h CR CR h h MR MR Speil ses: = ige ple = - pupil ple = se effetive diste fro ige d pupil pupil ige rgil r h MR h CR h CR (i hief r surfe o j

27 7 Preter of Eetriit Eple: eetriit for ll surfes Chge: = objet pupil rgil r height hief r height ige surfe ide.5 eetriit surfe ide objet stop ige

28 Astigtis of Oblique Mirrors Mirror with fiite iidee gle: effetive fol legths irror f t Ros i f sg R os i s i Mirror itrodues stigtis D s' st s R si i R os i R os i s s os i C fol lie L R s' sg D s' st D s' / R Pretri behvior of sles stigtis.9.8 s / R = s / R = s / R = s / R = s / R = i

29 Shiefspiegler-Telesopes Telesopes with tilted eleets Astigti solutio for two irrors d 3 obj r r r d objet ple d d 3 d 4 4 ige irror M, r ige ple i d 5 d irror M, r

30 Mgi Mirror Priiple: Bkside irror, tdioptri les Advtges: Mirror be de spheril Refrtive surfe orrets spheril Sste be de erl plti F S sph, S o orreted 4 spheril o /r

31 Mgi Mirror Seidel surfe otributios of rel les: Spheril orretio perfet Residul il hroti uvoidble spheril o stigtis -5 urvture distortio il hroti lterl hroti su

32 3 Aberrtios Liited b Vigettig Clippig of outer o rs b vigettig Cosequees: - redued brightess - isotropi resolutio without vigettierug with vigettierug tgetil / sgittl Ref: H.Zügge

33 Telephoto Sstes Cobitio of positiv d egtive les: Shift of the first priipl ple i frot of the sste The itersetio legth is sller th the fol legth: redutio ftor k Tpil vlues: k = Fol legths: f f b Overll legth f ' d f ' ( k d f dkf ' d f kf ' P' b b L k f ' Free itersetio legth f ' s ' sf k f ' d d k f '

34 Retrofol Sste Cobitio of egtive d positive les: Shift of the seod priipl ple behid the sste The itersetio legth is lrger th the fol legth Applitio: sstes for lrge free workig diste Correspods to iverse telephoto sste P' f ' s '

35 Telephoto d iverse Telephoto Priiple Retrofous sste results for telephoto sste b iversio priipl ple P' telephoto sste ige ple retrofous sste iverse telephoto fol legth f