presented by Dietmar Köther

Transcription

1 R. Kulke, W. Simon, A. Lauer, M. Rittweger, P. Waldow, S. Stringfellow, R. Powell, M. Harrison, J.-P. Bertinet LTCC 1 on presented by Dietmar Köther

2 RAMP LTCC 2 Rapid Manufacture of Microwave and Power Modules European Brite Euram III Project (BE ) Partner Marconi-CL SOREP-ERULEC IMST HYWEL TNO NMRC October 98 - September 01 Country GB F GER NL NL IE IE

3 LTCC Test Tiles LTCC 3 DuPont 951 AX, Au 5743 post fire Ferro A6M, Au FX Ferro A6M, Ag FX DuPont 951 AX, Ag 6145

4 Geometry Parameters LTCC 4 1. Ferro A6M, Au FX30-025: t = µm h = µm w = 238 µm Ra = 0.4 µm 2. Ferro A6M, Ag FX33-229: t = µm h = µm w = 237 µm Ra = 0.4 µm 3. DuPont 951 AX, Ag 6145: t = µm h = µm w = 195 µm Ra = 0.4 µm 4. DuPont 951 AX, Au 5743 post fire: t = µm h = µm w = 180 µm Ra = 0.4 µm h w t LTCC Cross Section MS Line GND Mesh

5 Measured Parameters + Results LTCC 5 Geometry Substrate Thickness Microstrip Line Width and Thickness Via Diameter and Position Conductor Diffusion into Substrate Surface Circuit Geometry (ring, gap, line length ) DC + RF Parameters DC-Conductivity S-Parameter or Spectrum up to 40 GHz (On-Wafer) Evaluation Results Quality Factor Q Effective Permittivity ε eff of Microstrip Line Total Line Losses α

6 Formulas LTCC 6 Insertion Loss: S 21 Attenuation: a 21 (f) = 20 log S 21 (f) 3dB-Bandwidth: 2 f n = f n (l) f n (u) Loaded Quality: Q L (f n ) = f n / (2 f n ) Unloaded Quality: Q(f n ) = Q L (f n ) / [1- S 21 (f n ) ] Effective Permittivity: ε eff = (c 0 n) 2 / (π d f n ) 2 Total Line Losses: α = ( f n ε eff ) / (c 0 Q) [db/m] n: resonance frequency d: ring diameter

7 Measurement of S 21 LTCC S 21 [db] f 3 f 4 f 5 f 6 f f7 f 10 f f 12 f 13 9 f f 1 f measured on Ferro Ag: gap = 50µm Frequency / GHz

8 Quality LTCC Unloaded Q Q: Ferro Au Q: DuPont Ag Q: DuPont Au Q: Ferro Ag Frequency / GHz DuPont 951, Au: ε r =7.8, h=180µm, w=180µm, t=10µm, ρ== 8 mω/square, RGH=0.4µm, tanδ=4.7x10-3 ; (post-fire) DuPont 951, Ag: ε r =7.8, h=180µm, w=195µm, t=10µm, ρ== 3 mω/square, RGH=0.4µm, tanδ=4.7x10-3 Ferro A6-M, Au, ε r =5.9, h=190µm, w=240µm, t=12µm, ρ==7 mω/square, RGH=0.4µm, tanδ=1.2x10-3 Ferro A6-M, Ag, ε r =5.9, h=190µm, w=250µm, t=12µm, ρ== 5 mω/square, RGH=0.4µm, tanδ=1.2x10-3

9 Measured Line Losses Losses [db/cm] DuPont, Au DuPont, Ag Ferro, Au Ferro, Ag Frequency / GHz DuPont 951, Au: ε r =7.8, h=180µm, w=180µm, t=10µm, ρ== 8 mω/square, RGH=0.4µm, tanδ=4.7x10-3 ; (post-fire) DuPont 951, Ag: ε r =7.8, h=180µm, w=195µm, t=10µm, ρ== 3 mω/square, RGH=0.4µm, tanδ=4.7x10-3 Ferro A6-M, Au, ε r =5.9, h=190µm, w=240µm, t=12µm, ρ==7 mω/square, RGH=0.4µm, tanδ=1.2x10-3 Ferro A6-M, Ag, ε r =5.9, h=190µm, w=250µm, t=12µm, ρ== 5 mω/square, RGH=0.4µm, tanδ=1.2x10-3 LTCC 9

10 Ferro A6M: Losses LTCC 10 Losses [db/cm] Ferro, Au Ferro, Ag Rho+RGH+Tan(delta) Rho+RGH tanδ Ferro A6M ε r = 5.9 h = 190µm RGH = 0.4µm tanδ = 1.2x Rho Rgh Au w = 238µm t = 12µm ρ== 7 mω/sq Rho Frequency / GHz Ag w = 237µm t = 12µm ρ== 5 mω/sq. Simulation with LineCalc: w=238µm, t=12µm, ρ/ρ Au =1.6, RGH=0.4µm, tanδ=1.2x10-3

11 DuPont 951: Losses LTCC Losses [db/cm] DuPont 951, Ag DuPont 951, Au Rho+RGH+Tan(delta) Rho+RGH Rho tanδ Rgh Rho Frequency / GHz DuPont 951 ε r =7.8 h = 180µm t=10µm RGH=0.4µm tanδ=4.7x10-3 Ag w = 195µm t=10µm ρ== 3 mω/sq. Au (post-fire) w = 180µm t=10µm ρ== 8 mω/sq. Simulation with LineCalc: w=180µm, t=10µm, ρ/ρ Au =1.6, RGH=0.5µm, tanδ=5x10-3

12 Effective Permittivity LTCC Unexpected Measured Results 2. Geometry Inspection: Diffused Top Conductor 3. Full Wave Analysis (FDTD) E-Field Distribution Influence on ε eff and Z L 4. Libra Circuit Simulation Correction approach of diffused or recessed top conductor without correction with correction 5. Comparison of Measured and Simulated Data

13 Conductor Cross-View LTCC 13 post-fire co-fire Dupont 951 / Ag 6145 co-fire co-fire Ferro A6M / Ag Fx Silver Conductor Gold Conductor Dupont 951 / Au 5743 Ferro A6M / Au Fx30-025

14 FDTD-Simulations LTCC 14 E-Field Concentration MS-Line Recessed MS-Line

15 FDTD-Simulations II LTCC effective Permittivity recessed 50% recessed on top meas. on Ferro Au 100% Line Impedance / Ω recessed 50% recessed on top 0% % 56 50% 4.2 0% % Frequency / GHz Frequency / GHz

16 Circuit Simulation with Libra LTCC 16

17 Ferro AG Ring-Resonator LTCC 17 0 S12 / db 0 S12 / db MEAS: S12_G50 SIM: S12_G MEAS: S12_G50 SIM: S12_G freq / GHz no correction: ε r = 5.9 h = 185 µm w = 245 µm t = 15 µm Z L = 52.4 Ω ε eff = freq / GHz with correction: ε r = 6.25 h = 167 µm w = 245 µm t = 15 µm Z L = 48.3 Ω ε eff = 4.3

18 ε eff : Measurement + Simulation LTCC effective Permittivity DuPont: ε r = 7.8, Silver measured + simulated simulated (no correction) DuPont: measured DuPont: sim. with correction DuPont: simulation Ferro: measured Ferro: sim. with correction Ferro: simulation Ferro: ε r = 5.9, Gold measured + simulated simulated (no correction) Frequency / GHz

19 Outlook: LTCC RF-Benchmark LTCC 19 h = 130µm h = 200µm microstrip line ground DuPont 951: ε r = 7.8 h = 200µm h = 130µm h = 130µm stripline h = 200µm ground Conductors Vias Cavities

20 Microstrip Calibration Lines Micostrip Ring- Resonators Testlayout X = 66 mm Y = 66 mm Stripline Ring- Resonators LTCC 20 Coupled Striplines Microstrip to Stripline Transitions Conductivity Measurement X = 0 Y = 0 Stripline Calibration Kid Resolution Test Lines

21 Conclusion LTCC 21 Test Procedure for LTCC RF-Evaluation; Resulting Parameters: Quality Factor Effective Permittivity Line Losses Q ε eff Correction Approach for Diffused Top Conductors Benchmarking Activity has started α

22 IMST LTCC 22 Multilayer Library for LTCC-Elements (ADS) Consulting: Material, Foundry, RF + Antennas LTCC-Prototyping Capability Evaluation and Characterization Modules, Circuits and Antennas (GHz-Frequencies) Introduction to Production