Trends in «More than Moore» and IUNET activity. Andrea L. Lacaita
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1 Trends in «More than Moore» and IUNET activity Andrea L. Lacaita
2 Ouline Pervasion domains: Moore+MtM The Italian MEMS «pilot line» LAB4MEMS challenges and results Conclusions
3 The expanding universe of electronics... Human Biotech 2020 Services Boxes m electronics 2010 Post-PC 2000 PC 1970 PCTV... Internet SoC+RF Nanotechnology H.De Man Roma XXI 01 3
4 From sensing nodes to cloud
5 Converging trends
6 Ouline Pervasion domains: Moore+MtM The Italian MEMS «pilot line» LAB4MEMS challenges and results Conclusions
7 MEMS Market Forecast Source: Yole April 2014 Device CAGR Micro displays 57,80% Oscillators 52,70% Microfluidics for research 34,80% Inertial combos 28,40% PIR and thermopiles 23,50% Microfluidics for IVD 23,10% Projection systems 17,70% Microdispensers 16,30% Others 16,10% RF MEMS 15,50% Microphones 13,20% Microbolometers 12,50% Other optical MEMS 10,00% Pressure sensors 7,70% InkJet heads 1,10% Accelerometers -3,40% Gyroscopes -3,70% Digital compass -5,10%
8 MEMS Market players Source: Yole 2014
9 Lab4MEMS Lab4MEMS aims to establish a European Pilot Line for innovative technologies on advanced piezoelectric and magnetic materials, including advanced Packaging technologies to meet the ever evolving market needs. Demonstration Device Fully integrated print-head Piezo electric energy harvester Ultrasonic microphones AMR Magnetic sensors (3 axis) Lorentz type Magnetometer (3 axis) Photonic Crystal piezo actuator UniBO PoliMI UniPi ENIAC : Lab4MEMS
10 Planar AMR devices + R R R + R R H H 1 R0 Hk Hk 2
11 3 axis magnetometers V1Y Vb GND V2Y V2X Vb GND V1X Z-axis sensor die (90 degrees tilted) F i/2 X B i/2 F F
12 Experimental results and modeling t = 50nm samples t = 20nm samples Symbols = exp. data Lines = sim. results
13 AMR physical model From Tumanski (2001) p.95 L. Gan et al. IEEE Trans on Magnetics (2000)
14 AMR readout chain Wheatstone bridge Auto-zeroing amplifier Switching power mode to mitigate power dissipation Amplifier bandwidth of 45kHz
15 Figure of Merit - Magnetometers Device ±FSR [mt] Noise [mt] Band [Hz] Current [ma] FoM [nt ma/ Hz] STM LIS3MDL Bosch BMM Freescale MAG Asahi Kasei AK Honeywell HMC AMR performance per sensing axis
16 Lorentz Magnetometer F i/2 Parallel-plate capacitors are designed inside the device X B i/2 F ΔC α Q L i B C 0 z
17 Lorentz Magnetometer Design S F,n 4k T b b Off resonance Sensitivity improves by lowering the damping factor - b:
18 Lorentz readout chain and drive Lorentz Charge amplifier Filter OSC+Mixer
19 Figure of Merit - Magnetometers Device ±FSR [mt] Noise [mt] Band [Hz] Current [ma] FoM [nt ma/ Hz] STM LIS3MDL Bosch BMM Freescale MAG Asahi Kasei AK Honeywell HMC AMR Lorentz performance per axis
20 Lab4MEMS Lab4MEMS aims to establish a European Pilot Line for innovative technologies on advanced piezoelectric and magnetic materials, including advanced Packaging technologies to meet the ever evolving market needs. Demonstration Device Fully integrated print-head Piezo electric energy harvester Ultrasonic microphones AMR Magnetic sensors (3 axis) Lorentz type Magnetometer (3 axis) Photonic Crystal piezo actuator UniBO ENIAC : Lab4MEMS
21 piezo power converters h = E OUT / E IN
22 Synchronous Electric Charge Extraction charge extraction C P energy storage C P
23 Synchronous Electric Charge Extraction (SECE) ideal diodes h = E OUT / E IN ideal diodes g = V TH / V P
24 Multi source piezo harvester 40 Hz, 0.11g RMS intrinsic power consumption extra harvested power
25 Performance Comparison with SoA WORK Ramadass, IEEE JSSC 2012 Krihely, IEEE TPEL 2011 Elliot, Eurosensors 2012 Kong, IEEE TPEL 2012 Colomer, IEEE T.Ind.El Ferrari, S&A 2008 NO. OF SRCS SOURCE TYPE MAX. INPUT VOLTAGE POWER CONVERSION TECHNIQUE ESTIMATED CURRENT CONSUMPTION SUPPLY) RANGE OF HARVESTED POWER SELF- STARTING TECHNOLOGY ELECTRICAL EFFICIENCY 1 Piezo 5 V SSHI 1 ua uw Yes Integrated 85% 1 Piezo 12 V * SSHI 7 ua 3.96 uw Yes Discrete 80% 1 Piezo n.a. SSPB 80 ua 3 uw n.a. Discrete n.a. 1 Piezo 10 V DCM Flyback ua 8.4 uw Yes Discrete 72% 4 Piezo, RF, PV, TEG 2.5 V 3 Piezo n.a. UNIBO 3 Piezo 20V UNIBO design target 5 Piezo 5V Parallel-connected LDOs Parallel-connected passive rectifiers SECE with shared inductor SECE with shared inductor 30 ua 6.4uW Yes Integrated 52-85% passive. 32 uw * Yes Discrete n.a ua 300uW Yes Discrete 74% < 200 na 5uW 1 mw Yes Integrated 80%
26 Lab4MEMS Lab4MEMS aims to establish a European Pilot Line for innovative technologies on advanced piezoelectric and magnetic materials, including advanced Packaging technologies to meet the ever evolving market needs. Demonstration Device Fully integrated print-head Piezo electric energy harvester Ultrasonic microphones AMR Magnetic sensors (3 axis) Lorentz type Magnetometer (3 axis) Photonic Crystal piezo actuator UniPi ENIAC : Lab4MEMS
27 Phononic Crystals 1D 2D 3D Periodic modulation of one or more mechanical properties elasticity density cross section phononic bandgap
28 Resonant mass sensing in Lab4mems Flexural vibration modes - piezoelectric actuation and detection Piezo transducers
29 Resonant mass sensing in Lab4mems Flexural vibration modes - piezoelectric actuation and detection Transmitted frequency (FEM)
30 Resonant mass sensing in Lab4mems Flexural vibration modes - piezoelectric actuation and detection Blocked frequency (FEM)
31 Flexural PC design Five mask process (backside cavity, metal1, piezo, metal2, fronside etch) Si SiO2 Metal1 Piezo Metal2
32 Performance Comparison with SoA Sensor type Quality factor Mass/area sensitivity (Hz/Hz)/(kg/m 2 ) Operating frequency (MHz) Quarz Crystal Microbalance (QCM) >10000 (air) 1 10 Capacitive CMOS 7000 (vac) 1000 (in vac) 3 Surface Acoustic Wave (SAW) Film bulk acoustic resonators (FBAR) 1100 (air) Piezoresistive NEMS 900 (vac) 2600 (in vac) 127 Proposed Ph-C sensor (vac) >10 (50) 10
33 Conclusioni H2020 applicazioni pervasive e clouding MEMS dispositivi e microsistemi La Pilot Line italiana e IUNET
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