DESIGN OPTIMIZATION OF NANO CAVITY BASED PHOTONIC ACCELEROMETER SENSOR FOR VEHICLE SYSTEM

Transcription

1 International Journal of Mechanical Engineering and Technology (IJMET) Volume 9, Issue 10, October 2018, pp , Article ID: IJMET_09_10_134 Available online at ISSN Print: and ISSN Online: IAEME Publication Scopus Indexed DESIGN OPTIMIZATION OF NANO CAVITY BASED PHOTONIC ACCELEROMETER SENSOR FOR VEHICLE SYSTEM Sundar Subramanian Department of Mechanical Engineering, JAIN (Deemed-to-be-University), Bangalore, Karnataka, India Dr. K. Gopalakrishna Centre for Incubation, Innovation, Research and Consultancy (CIIRC) Bangalore, Karnataka, India Dr. Thangadurai. N* Professor and Head, Department of Electronics and Communication Engineering School of Engineering and Technology, JAIN (Deemed-to-be-University), Bangalore, Karnataka, India *Corresponding Author ABSTRACT Over the past several decades many sensing system developed to detect displacement of mass. Photonic crystal based displacement sensing system which detect the displacement of suspended mass is most promising one. In the proposed work micro opto electromechanical system based accelerometer system which is configured with two dimensional photonic crystals in holes in slab and micro rods in air with ring resonator structure is analyzed. FDTD simulation is carried for three different aspect ratios in rods in air and holes in slab configuration. Quality factor of 2300 obtained for holes in slab configuration and 4500 obtained for rods in air configuration. Remarkable sensitivity of 3.33mm/g is obtained for rod in air configuration. Optical MEMS accelerometer based on photonic crystal micro ring resonator having tremendous application in vibration monitoring in automobile, aerospace and industrial, biomedical applications. Keyword head: Photonic crystal, Accelerometer, Rods in Air (RIA), Holes in slab (HIS), Vibration, Micro displacement, Optical MEMS, Resonator, Light Propagation, Q-factor. Cite this Article Sundar Subramanian, Dr. K. Gopalakrishna and Dr. Thangadurai. N, Design Optimization of Nano Cavity Based Photonic Accelerometer Sensor for Vehicle System, International Journal of Mechanical Engineering and Technology, 9(10), 2018, pp. (1304)-(1313)

2 Sundar Subramanian, Dr. K. Gopalakrishna and Dr. Thangadurai. N 1. INTRODUCTION Accelerometer and gyroscope having large application worldwide in many electronic devices as well as in automobile vibration control and navigation systems. Basic physics of accelerometer system involves spring and mass system. Body of mass attached to wall by spring having specific spring coefficient. When force is applied to mass it will displace in the direction of force in specific amount with acceleration. By using the Newton s law we gat equation F= ma = Fs (Force due to spring action).force due to spring tension written as kx, where x is the displacement of body from initial position, equating the forces we get ma = kx. Thus we see that acceleration is function of displacement. Acceleration is function of displacement a=f(x). Once we are able to measure the displacement of body, we can measure the acceleration of body. There are different methods to measure displacement x. These methods use resistive, inductive, capacitive techniques. Three techniques will describe the principle of acceleration measurement. However one cannot employ such as huge spring mass system inside accelerometer integrated chips. These were MEMS comes into play. System which includes mechanical as well as electronic components is fabricated at the scale of micrometre. These mems are employed inside accelerometer integrated chips, which helps it to keep its size small. MEMS IC s packaged in such a way that it consists of series of fixed plate on outer assembly. Internal movable assembly having small mass connected to outer assembly using an spring mass. In case of optical MEMS, which is mainly impacted by mems technology ability to steer or direct light is key requirement in optical mems. So optical MEMS is fusion of three technologies are micro optics, micro mechanics and microelectronics. Combining these technologies gives the advantages that less force for more displacement makes the system of optical MEMS more sensitive, since the photonics carries zero mass with minimum force operation of photonic devices are possible. Device can be mass produced at higher level with less electromagnetic interference due to less electrical circuits. Due to reduction of size and weights internal construction of chips it may be used different applications like communications, displays, data storages, detectors, adaptive optics, micro mirrors. Basic concepts of photonic crystal sensor involve controlling the light such that overall refractive index change in of micro cavity will bring out the wavelength shift. In this paper we work is carried out for a two dimensional photonic crystal based ring resonator structure with modulation of light waves using movable slab. This system proposed in both the holes in slab and rods in air configuration and multiple iterations with photonic crystal configuration is performed with varying aspect ratio i.e., radius of rod and holes. Mechanical analysis of spring mass system with movable finger attached is simulated for applied acceleration. 2. DESIGN AND WORKING PRINCIPLE Two dimensional photonic crystals with holes in slab and rods in air configuration is constructed with ring resonator. Photonic crystal structure is inserted in holes in slab and rods in air configuration as show in figure. Radius of holes and nano rods are chooses as 0.18µm based on quality factor obtained with number of iteration on radius 0.16µm and 0.17µm I configurations. Detailed parameters of photonic crystal configuration are shown below. Lattice constant between rods and holes = 1µm; Radius of rods and holes = 0.18µm Light source = Gaussian pulse width = 0.2; PhC structure dimension = 7µm 2µm editor@iaeme.com

3 Design Optimization of Nano Cavity Based Photonic Accelerometer Sensor for Vehicle System Light Source PhC Structure moving direction Movable PhC Structure Figure 1 Ring resonator structure in rods in air configuration of Photonic crystal Ring Resonator Structure Figure 2 Ring resonator structure in holes in slab configuration of Photonic Crystal Light Source Monitor Figure 3 MOEMS Ring resonator in HIS configuration Figure 4 MOEMS Ring resonator in RIA Configuration Figure 5 Defect slab movement in Ph.C. Spring Mass system Figure 6 Defect slab in configuration editor@iaeme.com

4 Sundar Subramanian, Dr. K. Gopalakrishna and Dr. Thangadurai. N 3. RESULTS AND DISCUSSION Two dimensional optical MEMS accelerometer with movable defect finger in photonic crystal rod in air and holes in slab ring resonator configuration is constructed.10µm 2µm movable defect finger is designed into photonic crystal configuration. Ring resonator structure in photonic crystal configuration used to confine the optical pulse. Between port 1 and port 2 movable finger is embedded which is attached to spring mass system. Acceleration due to mass in x, y and z direction is detected by displacement of defect slab in photonic crystal configurations. Radius of rod and holes in varied from 0.16 µm, 0.17µm, 0.18µm.High quality factor of 4500 is obtained for RIA configuration in 0.18µm radius. Distinct shift in wavelength is observed RIA configuration and remarkable range of frequency shift 0.36 to 0.39 is detected. Figure 7 to Figure 9 shows shift in wavelength for the hole radius of 0.16µm. Figure 10 to Figure 12 shows shift in wavelength for the hole radius of 0.17µm. Figure shows 13 to Figure 15 shows shift I wavelength for the hole radius of 0.18µm. Table 1 to Table 3 shows distinct wavelength shift for different hole radius of range 0.16µm to 0.17µm. Holes in slab configuration Table 1 Frequency Shift for 0.16µmHole radius Table 2 Frequency Shift for 0.17µm Hole radius High sensitivity of 3.33mm/g is found in RIA configuration of optical MEMS accelerometer of micro ring resonator. Quality factor of 2300 is achieved in Holes in Slab configuration of photonic crystal. Mechanical analysis considered in the proposed work with spring mass system given specific acceleration value and natural frequency. Figure 1 to Figure 4 shows design of optical MEMS accelerometer with micro ring resonator. Figure 5 shows displacement of defect slabs. Figure 16 shows light confinement in photonic crystal ring resonator configuration. Refractive index distribution in Photonic crystal configuration is depicted in figure 17. Figure 18 shows 3D view of holes in slab configuration editor@iaeme.com

5 Design Optimization of Nano Cavity Based Photonic Accelerometer Sensor for Vehicle System Table 3 Frequency Shift for 0.18µm Hole radius Radius of holes 0.16µm Figure 7 0 to 0.1µm displacement Figure to 0.3µm displacement Radius of holes 0.17µm Figure to 0.5µm displacement Figure to 0.1µm displacement Figure to 0.3µm displacement Figure 19 to Figure 27 shows shift in wavelength for different radius of rods in rod in air configuration. Table 4 to Table 6 shows tabulated values of spectrum shift for rods in air configuration. Figure 28 shows refractive index profile distribution and Figure 31 shows 3D view of rod in air configuration of optical MEMS accelerometer with micro ring resonator. Multiple optical MEMS accelerometer by micro ring resonator in rod in air configuration has been constructed. Array of optical MEMS accelerometer sensor is shown in figure 29 and Figure editor@iaeme.com

6 Sundar Subramanian, Dr. K. Gopalakrishna and Dr. Thangadurai. N Radius of holes 0.18 µm Figure to 0.5µm displacement Figure to 0.1µm displacement Figure to 0.3µm displacement Figure to 0.5µm displacement Figure 16.Light confinement in optical MEMS Ring resonator Figure 17. Index Profile defect slab in ring resonator HIS configuration editor@iaeme.com

7 Design Optimization of Nano Cavity Based Photonic Accelerometer Sensor for Vehicle System Figure 18. 3D configuration of Optical MEMS in RIA configuration Rod in AIR configuration Radius of rod 0.16µm Figure to 0.1µm displacement Figure to 0.3µm displacement Figure to 0.5µm displacement Table 4 Frequency Shift for 0.16µm Hole radius Radius of rod 0.17µm editor@iaeme.com

8 Sundar Subramanian, Dr. K. Gopalakrishna and Dr. Thangadurai. N Figure to 0.1µm displacement Figure to 0.3µm displacement Figure To 0.5µm displacement Radius of rod 0.18µm Figure to 0.1µm displacement Figure to 0.3µm displacement Figure To 0.5µm displacement Figure 28. Index profile of RIA configuration Table 6 Frequency Shift for 0.18µm Whole radius editor@iaeme.com

9 Design Optimization of Nano Cavity Based Photonic Accelerometer Sensor for Vehicle System Figure 29. Array of Optical MEMS ring resonator for RIA configuration Figure 30. Array of Optical MEMS ring resonator for RIA configuration with spring Mass system Figure 31. 3D Photonic crystal rod in air configured Optical MEMS accelerometer editor@iaeme.com

10 Sundar Subramanian, Dr. K. Gopalakrishna and Dr. Thangadurai. N 4. CONCLUSION Optical MEMS accelerometer based on photonic-crystal micro ring resonator have proposed in this work. Defect slab movement between and input and drop port of micro ring resonator key concept here. This concept is applied in photonic crystal rod in air and holes in slab configuration quality factor and sensitivity have been quantified. Micro displacement of defect slab between input and dropt port of micro ring resonator brings out a distinct shift in wavelength due to change in effective refractive index. High quality factor of 4500 obtained in RIA configuration and 2300 Q factor obtained for HIS configuration. Sensitivity of 3.33mm/g is found during the analysis. Optical MEMS accelerometer by photonic crystal micro-ring resonator finding, is tremendous application in vernation and inertial monitoring in automobile, aerospace, and different industrial application for health monitoring of structures. REFERENCES [1] P K Pattnaik, B VIjayaditya, T Srinivas Novel two dimensional optical MEMS accelerometer based on photonic crystal micro ring resonator, IEEE Explorer, July [2] Hailu Dessalegen, T Srinivas, Optical MEMS pressure sensor based on double ring resonator IEEE Explorer, December [3] Tarek Mamdouh, Diaa Khalil, A MEMS tunalble optical ring resonator filter Journal of optical quantum electronics, July 2005, Volume 37, Issue 9, pp [4] Yoshiteru Amemiya, Kazuki Noda, Takuma Sennichi and Shin Yokoyama, Design and characterization of MEMS optical devices using slot-ring resonator for low-voltage operation, Japanese Journal of Applied Physics, Volume 55, Number 4S, [5] Zhao X, Tsai Jm, Cai H, Ji Xm, Zhou J, Bao Mh, Huang Yp, Kwong Dl, Liu Aq, Optical Mems Pressure And Vibration Sensors Using Integrated Optical Ring Resonators, Optic Express, 2012 Apr 9;20(8): [6] X Zho. T Sai, H Cai, J Zhou, M H Bao, YP Haung, D L Kwang, A Q Liu, A Nano opto Mechanical Pressure Sensor, Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), th International,June [7] Mohammad H. Hasan, Fadi M. Alsaleem and Hassen M. Ouakad, A Novel Threshold Pressure Sensor Based on Nonlinear Dynamics of MEMS Arches, [8] A K Ismail, J S Burdess, A J Harris, C J McNeil, J Hedley, S C Changand G Suarez, The principle of a MEMS circular diaphragm mass sensor, Journal of Micromechanics and Microengineering, Volume 16, Number 8, 16 June [9] S.M.C. Abdulla, P. J. Harmsma, R.A. Nieuwland, J. Pozo, Soi based mechano-optical pressure sensor using a folded micro-ring resonator, Conference: 9th International Workshop on Nanomechanical Sensing (NMC 2012), Bombay Mumbai, India, [10] Sundar Subramanian, Anup M. Upadhyaya, Preeta Sharan, Structure Design of Photonic Crystal Based MOEMS Accelerometer Sensor for Supplemental Restraint System in Automobile Passenger Safety, Indian Journal of Science and Technology, Volume 10, Issue 29, August [11] Arash Sheikhaleh, Kambiz Abedi, Kian Jafari, An Optical MEMS Accelerometer Based on a Two-Dimensional Photonic Crystal Add-Drop Filter, Journal of lightwave Technology, [12] Alexander G. Krause, Martin Winger, Tim D. Blasius, Qiang Lin, Oskar Painter A microchip Opto-mechanical accelerometer, Journal of optics, 26th March editor@iaeme.com