Introduction to Microeletromechanical Systems (MEMS) Lecture 9 Topics. MEMS Overview
|
|
- Lesley Eaton
- 5 years ago
- Views:
Transcription
1 Introduction to Microeletromechanical Systems (MEMS) Lecture 9 Topics MicroOptoElectroMechanical Systems (MOEMS) Grating Light Valves Corner Cube Reflector (CCR) MEMS Light Modulator Optical Switch Micromirrors Tunable IR Filter Interferometry Field Emission Display MEMS Overview Introduction & Background History & Market Methodology Devices & Structures Processes & Foundries Micromachining: lithography, deposition, etching,
2 Grating Light Valve MEMS display array fabricated in CMOS compatible process. Each pixel is made up of multiple ribbon-like structures, which can be moved up or down over a very small distance (only a fraction of the wavelength of light) by controlling electrostatic forces. The ribbons are arranged such that each pixel is capable of either reflecting or diffracting light. Invented by D. Bloom (Stanford) Developed since 1994 by Silicon Light Machines, Sunnyvale CA, Acquired by Cypress Semiconductors 7/000 Exclusive license with Sony Grating Light Valve
3 Grating Light Valve Ribbons at same height: reflection Ribbons at height difference d: diffraction; no reflection when d=λ/4 (maximum diffraction) Intensity of 1st order diffraction lobes: I = I sin π d λ I 1 max max ( ) maximum1st order diffracted intensity Diffraction d Reflection d [D.T. Amm and R.W. Corrigan 1998] Movable Ribbons Grating Light Valve
4 Grating Light Valve Grating Light Valve Design features: Usually 6 ribbons per pixel: 150µm x 00µm Very high switching speeds Switching: thresholds, hysteresis CMOS fabrication compatible (Cypress Semiconductor) Allows a variety of system architectures, including very simple designs: D pixel array (passive array) 1D scan line Analog display (note: non-linear transfer function, snap-in point)
5 Grating Light Valve Grating Light Valve Different GLV Arrangements
6 Corner Cube Reflector (CCR) Corner cube retroreflector reflects light directly back down its incident path. Common in bicycle and road reflectors, and on the moon. [Comtois and Bright 1996] [Chu, Lo, Berg and Pister 1997] 1 kbps over 100 meters Parallel Beams CCR Design Specifications: 500 m distance 56 kbps Issues: Switching speed Accuracy Diffraction Size Parallel Beams
7 CCR Design Hinged Plate Membrane silicon nitrate poly0 poly1 poly Schematic Design: Reflective material: Au hinged plates (locked in vertical position) 1 membrane (horizontal, deformable) Use MCNC MUMPs (3 layer polysilicon process) CCR Design Determine minimum size of plates and membranes: Want ring diameter of 1st diffractive minimum < 1 m λ / d = sin θ tan θ = 0.5/500 = 10-3 d = λ 10 3 = 10-6 m = µm (KrCl excimer laser) Detector (Ø 1m) Laser CCR Distance 500 m
8 CCR Design Accuracy of mirror plates: Center of reflected beam should lie within 1 m radius θ tan θ = 0.5/500 = 10-3 = 1 mrad Detector (Ø 1m) Laser CCR Distance 500 m CCR Design Mirror deflection: Gap, g Membrane Thickness, d Gap: oxide1 ( µm) + oxide (0.75 µm) =.75 µm Radius of curvature: r = ( r g) r = g + d + ( d ) 8g = 4mm silicon nitrate poly0 poly1 poly
9 CCR Design Membrane (bridge) Deflection: ρ y( x) = y( d E I = wt ) = ρd 3 y = ρ( 10 y 6 10 x /(4EI)( d x) Young's modulus, 4 7 m N 384EI 6 ρ m) 4 ρ force density (pressure) 1 bending moment of inertia ( Pa 10 6 m ( m) 3 1) Required force (conservative estimate): 7 m F = ρ d = y / 6 10 d N for y = g = µm weget F = 0. 74mN CCR Design Electrostatic actuation Capacitance: 1 ε C = F = 1 d g = F m( 10 8 CV g = V F m 6 m) m =.159pF Required voltage: V N = 8 F m = 160V This voltage is too high! solutions: More accurate analysis of required force (non-linear, pull-in point, ) Design modifications
10 Switching speed Estimate spring constant: K = F / y = 0.74mN µm = 370 Calculate mass: m = ρ Si V = ρ d Resonance frequency: Si CCR Design N m 3 t = kg = 0.17µg ω = πf = K m f = ω / π = 1 π K m 33kHz 56 kbps is feasible! CCR Design Power Estimate work for switching membrane: E = g 0 Fds = g 0 Ksds = 1 Kg = ( ) Nm 1.4nJ Power: P = Ef = 1.4nJ 56kHz = 78µW Compare with energy stored in capacitor E = CV = J. 75µJ P =.75µJ 56kHz = 154mW
11 CCR Design Other assumptions: Very smooth mirror surfaces No obstacles, no fog Is deflected membrane really curved, or mostly flat? Other problems: If we reduce the required voltage by reducing the membrane stiffness, then we also reduce the resonance frequency and the bit rate What else? MEMS Light Modulators Modulator Type Motion Side View Cantilever Bending Torsional Plate Rotation Membrane Drumhead Suspended Plate Vertical [Kovacs, 1998, p.46]
12 Optical Switches MEMS Optical Switches: modulation of light w/o conversion to/from electrical signal All optical network switch: 56 input and output channels Switch time ca. 10 ms 16 x 16 micromirror array MUMPs like polysilicon process Electrostatic DOF actuation with position feedback MicroStar Technology (Lucent Bell Labs 1999) Micromirror on Crystal Planes Beam Splitter MOEMS reflectors and beam splitters [Rosengren et al., 1994] V-groove for fiber positioning
13 Tunable IR Filter Parallel plate array polarizes light of wavelength λ > d Plates d F Two orthogonal arrays act as filter with cutoff frequency λ = d Flexures Pull on structure to increase cutoff wavelength [Ohnstein et al., 1995 and 1996] Interferometry Basic idea: two plates at distance d = n λ with n small (usually 1) Constructive interference for all wavelengths λ = d/n λ for visible light (or IR, UV) is within range of many micromachined thin film thicknesses d Refractive indices can be varied from 1.38 (MgF ) to.4 (TiO ) Semi-transparent Mirrors
14 Field Emission Display Strong electrostatic field pulls electrons off the sharp tips and accelerate them towards display [See for example, W. Hofmann, L.-Y. Chen, J. H. Das and N. C. MacDonald, 1996]
Y. C. Lee. Micro-Scale Engineering I Microelectromechanical Systems (MEMS)
Micro-Scale Engineering I Microelectromechanical Systems (MEMS) Y. C. Lee Department of Mechanical Engineering University of Colorado Boulder, CO 80309-0427 leeyc@colorado.edu January 15, 2014 1 Contents
More informationCHAPTER 5 FIXED GUIDED BEAM ANALYSIS
77 CHAPTER 5 FIXED GUIDED BEAM ANALYSIS 5.1 INTRODUCTION Fixed guided clamped and cantilever beams have been designed and analyzed using ANSYS and their performance were calculated. Maximum deflection
More information1. Narrative Overview Questions
Homework 4 Due Nov. 16, 010 Required Reading: Text and Lecture Slides on Downloadable from Course WEB site: http://courses.washington.edu/overney/nme498.html 1. Narrative Overview Questions Question 1
More information2.76/2.760 Multiscale Systems Design & Manufacturing
2.76/2.760 Multiscale Systems Design & Manufacturing Fall 2004 MOEMS Devices for Optical communications system Switches and micromirror for Add/drops Diagrams removed for copyright reasons. MOEMS MEMS
More informationOutline. 4 Mechanical Sensors Introduction General Mechanical properties Piezoresistivity Piezoresistive Sensors Capacitive sensors Applications
Sensor devices Outline 4 Mechanical Sensors Introduction General Mechanical properties Piezoresistivity Piezoresistive Sensors Capacitive sensors Applications Introduction Two Major classes of mechanical
More informationCHAPTER 4 DESIGN AND ANALYSIS OF CANTILEVER BEAM ELECTROSTATIC ACTUATORS
61 CHAPTER 4 DESIGN AND ANALYSIS OF CANTILEVER BEAM ELECTROSTATIC ACTUATORS 4.1 INTRODUCTION The analysis of cantilever beams of small dimensions taking into the effect of fringing fields is studied and
More informationEECS C245 ME C218 Midterm Exam
University of California at Berkeley College of Engineering EECS C245 ME C218 Midterm Eam Fall 2003 Prof. Roger T. Howe October 15, 2003 Dr. Thara Srinivasan Guidelines Your name: SOLUTIONS Circle your
More informationSINGLE-STEP ASSEMBLY OF COMPLEX 3-D MICROSTRUCTURES
SINGLE-STEP ASSEMBLY OF COMPLEX 3-D MICROSTRUCTURES Elliot E. Hui, Roger T. Howe, and M. Steven Rodgers* Berkeley Sensor & Actuator Center, University of California, Berkeley, CA 94720-1774, USA *Intelligent
More informationSENSOR DEVICES MECHANICAL SENSORS
SENSOR DEVICES MECHANICAL SENSORS OUTLINE 4 Mechanical Sensors Introduction General mechanical properties Piezoresistivity Piezoresistive sensors Capacitive sensors Applications INTRODUCTION MECHANICAL
More informationSupplementary Figures
Supplementary Figures Supplementary Figure 1 Molecular structures of functional materials involved in our SGOTFT devices. Supplementary Figure 2 Capacitance measurements of a SGOTFT device. (a) Capacitance
More informationDesign and Simulation of Comb Drive Capacitive Accelerometer by Using MEMS Intellisuite Design Tool
Design and Simulation of Comb Drive Capacitive Accelerometer by Using MEMS Intellisuite Design Tool Gireesh K C 1, Harisha M 2, Karthick Raj M 3, Karthikkumar M 4, Thenmoli M 5 UG Students, Department
More informationEE C247B / ME C218 INTRODUCTION TO MEMS DESIGN SPRING 2016 C. NGUYEN PROBLEM SET #4
Issued: Wednesday, March 4, 2016 PROBLEM SET #4 Due: Monday, March 14, 2016, 8:00 a.m. in the EE C247B homework box near 125 Cory. 1. This problem considers bending of a simple cantilever and several methods
More informationDesign of Electrostatic Actuators for MOEMS Applications
Design of Electrostatic Actuators for MOEMS Applications Dooyoung Hah 1,, Hiroshi Toshiyoshi 1,3, and Ming C. Wu 1 1 Department of Electrical Engineering, University of California, Los Angeles Box 951594,
More informationFoundations of MEMS. Chang Liu. McCormick School of Engineering and Applied Science Northwestern University. International Edition Contributions by
Foundations of MEMS Second Edition Chang Liu McCormick School of Engineering and Applied Science Northwestern University International Edition Contributions by Vaishali B. Mungurwadi B. V. Bhoomaraddi
More informationEE C247B / ME C218 INTRODUCTION TO MEMS DESIGN SPRING 2014 C. Nguyen PROBLEM SET #4
Issued: Wednesday, Mar. 5, 2014 PROBLEM SET #4 Due (at 9 a.m.): Tuesday Mar. 18, 2014, in the EE C247B HW box near 125 Cory. 1. Suppose you would like to fabricate the suspended cross beam structure below
More informationMODELING AND CONTROL OF MEMS MICROMIRROR ARRAYS WITH NONLINEARITIES AND PARAMETRIC UNCERTAINTIES
MODELING AND CONTROL OF MEMS MICROMIRROR ARRAYS WITH NONLINEARITIES AND PARAMETRIC UNCERTAINTIES By JESSICA RAE BRONSON A DISSERTATION PRESENTED TO THE GRADUATE SCHOOL OF THE UNIVERSITY OF FLORIDA IN PARTIAL
More informationModeling and simulation of multiport RF switch
Journal of Physics: Conference Series Modeling and simulation of multiport RF switch To cite this article: J Vijay et al 006 J. Phys.: Conf. Ser. 4 715 View the article online for updates and enhancements.
More informationTunable MEMS Capacitor for RF Applications
Tunable MEMS Capacitor for RF Applications Shriram H S *1, Tushar Nimje 1, Dhruv Vakharia 1 1 BITS Pilani, Rajasthan, India *1167, 1 st Main, 2 nd Block, BEL Layout, Vidyaranyapura, Bangalore 560097; email:
More information2D BEAM STEERING USING ELECTROSTATIC AND THERMAL ACTUATION FOR NETWORKED CONTROL ABSTRACT
D BEAM STEERING USING ELECTROSTATIC AND THERMAL ACTUATION FOR NETWORKED CONTROL Jitendra Makwana 1, Stephen Phillips 1, Lifeng Wang 1, Nathan Wedge, and Vincenzo Liberatore 1 Department of Electrical Engineering,
More informationDesign And Analysis of Microcantilevers With Various Shapes Using COMSOL Multiphysics Software
Design And Analysis of Microcantilevers With Various Shapes Using COMSOL Multiphysics Software V. Mounika Reddy 1, G.V.Sunil Kumar 2 1,2 Department of Electronics and Instrumentation Engineering, Sree
More informationSURFACE TENSION SELF-ASSEMBLY FOR THREE DIMENSIONAL MICRO-OPTO-ELECTRO-MECHANICAL SYSTEMS
SURFACE TENSION SELF-ASSEMBLY FOR THREE DIMENSIONAL MICRO-OPTO-ELECTRO-MECHANICAL SYSTEMS Researcher: Young Ki Hong Supervisor: Richard R. A. Syms Optical and Semiconductor Device Group Department of Electrical
More informationObjectives. Fundamentals of Dynamics: Module 9 : Robot Dynamics & controls. Lecture 31 : Robot dynamics equation (LE & NE methods) and examples
\ Module 9 : Robot Dynamics & controls Lecture 31 : Robot dynamics equation (LE & NE methods) and examples Objectives In this course you will learn the following Fundamentals of Dynamics Coriolis component
More informationSupplementary Methods A. Sample fabrication
Supplementary Methods A. Sample fabrication Supplementary Figure 1(a) shows the SEM photograph of a typical sample, with three suspended graphene resonators in an array. The cross-section schematic is
More informationDecember 1999 FINAL TECHNICAL REPORT 1 Mar Mar 98
REPORT DOCUMENTATION PAGE AFRL-SR- BL_TR " Public reporting burden for this collection of information is estimated to average 1 hour per response, including the time for reviewing instruct the collection
More informationAnalytical Design of Micro Electro Mechanical Systems (MEMS) based Piezoelectric Accelerometer for high g acceleration
Analytical Design of Micro Electro Mechanical Systems (MEMS) based Piezoelectric Accelerometer for high g acceleration Arti Arora 1, Himanshu Monga 2, Anil Arora 3 Baddi University of Emerging Science
More informationA Vertical Electrostatic Actuator with Extended Digital Range via Tailored Topology
A Vertical Electrostatic Actuator with Extended Digital Range via Tailored Topology Yanhang Zhang and Martin L. Dunn Department of Mechanical Engineering University of Colorado at Boulder Boulder, CO 80309
More informationCharacterization of MEMS Devices
MEMS: Characterization Characterization of MEMS Devices Prasanna S. Gandhi Assistant Professor, Department of Mechanical Engineering, Indian Institute of Technology, Bombay, Recap Characterization of MEMS
More informationDesign and Analysis of dual Axis MEMS Capacitive Accelerometer
International Journal of Electronics Engineering Research. ISSN 0975-6450 Volume 9, Number 5 (2017) pp. 779-790 Research India Publications http://www.ripublication.com Design and Analysis of dual Axis
More informationThe activities of micro-force measurement below 10 mn in Center for Measurement Standards
The activities of micro-force measurement below 10 mn in Center for Measurement Standards Sheng-Jui Chen and Sheau-Shi Pan With contribution from : Ya-Ko Chih, Chung-Lin Wu, Fu-Lung Pan, Chin-Fen Tuan
More informationMODELING OF T-SHAPED MICROCANTILEVER RESONATORS. Margarita Narducci, Eduard Figueras, Isabel Gràcia, Luis Fonseca, Joaquin Santander, Carles Cané
Stresa, Italy, 5-7 April 007 MODELING OF T-SHAPED MICROCANTILEVER RESONATORS Margarita Narducci, Eduard Figueras, Isabel Gràcia, Luis Fonseca, Joaquin Santander, Carles Centro Nacional de Microelectrónica
More informationDesign and fabrication of multi-dimensional RF MEMS variable capacitors
University of South Florida Scholar Commons Graduate Theses and Dissertations Graduate School 2003 Design and fabrication of multi-dimensional RF MEMS variable capacitors Hariharasudhan T. Kannan University
More informationImaging Methods: Scanning Force Microscopy (SFM / AFM)
Imaging Methods: Scanning Force Microscopy (SFM / AFM) The atomic force microscope (AFM) probes the surface of a sample with a sharp tip, a couple of microns long and often less than 100 Å in diameter.
More informationOptical and Photonic Glasses. Lecture 30. Femtosecond Laser Irradiation and Acoustooptic. Professor Rui Almeida
Optical and Photonic Glasses : Femtosecond Laser Irradiation and Acoustooptic Effects Professor Rui Almeida International Materials Institute For New Functionality in Glass Lehigh University Femto second
More informationSupplementary Figure 3. Transmission spectrum of Glass/ITO substrate.
Supplementary Figure 1. The AFM height and SKPM images of PET/Ag-mesh/PH1000 and PET/Ag-mesh/PH1000/PEDOT:PSS substrates. (a, e) AFM height images on the flat PET area. (c, g) AFM height images on Ag-mesh
More informationFour Degrees-of-Freedom Micromachined Gyroscope
Microsystems Laboratory Technical Report Four Degrees-of-Freedom Micromachined Gyroscope Cenk Acar 23 October 2001 Technical Report No: MSL-01003 cfl2001 Cenk Acar Contents Contents List of Figures Abstract
More informationDESIGN, FABRICATION AND ELECTROMECHANICAL CHARACTERISTICS OF A MEMS BASED MICROMIRROR
XIX IMEKO World Congress Fundamental and Applied Metrology September 6 11, 2009, Lisbon, Portugal DESIGN, FABRICATION AND ELECTROMECHANICAL CHARACTERISTICS OF A MEMS BASED MICROMIRROR Talari Rambabu 1,
More informationChapter 3. Design for manufacture of Fabry-Perot cavity sensors
Chapter 3 Design for manufacture of Fabry-Perot cavity sensors When Fabry-Perot cavity sensors are manufactured, the thickness of each layer must be tightly controlled to achieve the target performance
More informationPhysics 240 Fall 2003: Final Exam. Please print your name: Please list your discussion section number: Please list your discussion instructor:
Physics 40 Fall 003: Final Exam Please print your name: Please list your discussion section number: Please list your discussion instructor: Form #1 Instructions 1. Fill in your name above. This will be
More informationChapter 2 Lateral Series Switches
Chapter 2 Lateral Series Switches The objective of this chapter is to study the lateral RF MEMS series switch [1 14]. The switch consists of a silicon-core (Si-core) transmission line and a cantilever
More information1. In Young s double slit experiment, when the illumination is white light, the higherorder fringes are in color.
TRUE-FALSE STATEMENTS: ELECTRICITY: 1. Electric field lines originate on negative charges. 2. The flux of the electric field over a closed surface is proportional to the net charge enclosed by the surface.
More informationDEVELOPMENT OF A MEMS REPULSIVE ACTUATOR FOR LARGE OUT-OF-PLANE FORCE
DEVELOPMENT OF A MEMS REPULSIVE ACTUATOR FOR LARGE OUT-OF-PLANE FORCE by Imran Khan A thesis submitted in conformity with the requirements for the degree of Masters of Applied Science Graduate Department
More informationDEVELOPMENT OF MEASURING SYSTEM FOR STRESS BY MEANS OF IMAGE PLATE FOR LABORATORY X-RAY EXPERIMENT
Copyright JCPDS - International Centre for Diffraction Data 003, Advances in X-ray Analysis, Volume 46. 6 DEVELOPMENT OF MEASURING SYSTEM FOR STRESS BY MEANS OF IMAGE PLATE FOR LABORATORY X-RAY EXPERIMENT
More informationEnhanced performance of microbolometer. using coupled feed horn antenna
Enhanced performance of microbolometer using coupled feed horn antenna Kuntae Kim*,a, Jong-Yeon Park*, Ho-Kwan Kang*, Jong-oh Park*, Sung Moon*, Jung-ho Park a * Korea Institute of Science and Technology,
More informationMEMS PARALLEL PLATE ACTUATORS: PULL-IN, PULL-OUT AND OTHER TRANSITIONS
MEMS PARALLEL PLATE ACTUATORS: PULL-IN, PULL-OUT AND OTHER TRANSITIONS Subrahmanyam Gorthi, Atanu Mohanty and Anindya Chatterjee* Supercomputer Education and Research Centre, Indian Institute of Science,
More informationDesign and Optimization of Piezoelectric Dual-Mode Micro-Mirror
Design and Optimization of Piezoelectric Dual-Mode Micro-Mirror Jichao Zhong, Xingguo Xiong, Zheng Yao, Junling Hu*, Prabir Patra* Department of Electrical and Computer Engineering, *Department of Mechanical
More informationDeformable MEMS grating for wide tunability and high operating speed
Deformable MEMS grating for wide tunability and high operating speed Maurizio Tormen (1), Yves-Alain Peter (2), Philippe Niedermann (1), Arno Hoogerwerf (1), Herbert Shea (3) and Ross Stanley (1) 1 Centre
More informationEE 5344 Introduction to MEMS CHAPTER 6 Mechanical Sensors. 1. Position Displacement x, θ 2. Velocity, speed Kinematic
I. Mechanical Measurands: 1. Classification of main types: EE 5344 Introduction MEMS CHAPTER 6 Mechanical Sensors 1. Position Displacement x, θ. Velocity, speed Kinematic dx dθ v =, = ω 3. Acceleration
More informationThe Pull-In of Symmetrically and Asymmetrically Driven Microstructures and the Use in DC Voltage References
IEEE Instrumentation and Measurement Technology Conference Anchorage, AK, USA, 1-3 May 00 The Pull-In of Symmetrically and Asymmetrically Driven Microstructures and the Use in DC Voltage References L.A.
More informationIntroduction to Scanning Probe Microscopy
WORKSHOP Nanoscience on the Tip Introduction to Scanning Probe Microscopy Table of Contents: 1 Historic Perspectives... 1 2 Scanning Force Microscopy (SFM)... 2 2.1. Contact Mode... 2 2.2. AC Mode Imaging...
More informationContactless Excitation of MEMS Resonant Sensors by Electromagnetic Driving
Presented at the COMSOL Conference 2009 Milan University of Brescia Department of Electronics for Automation Contactless Excitation of MEMS Resonant Sensors by Electromagnetic Driving Marco Baù, VF V.
More informationIntermittent-Contact Mode Force Microscopy & Electrostatic Force Microscopy (EFM)
WORKSHOP Nanoscience on the Tip Intermittent-Contact Mode Force Microscopy & Electrostatic Force Microscopy (EFM) Table of Contents: 1. Motivation... 1. Simple Harmonic Motion... 1 3. AC-Mode Imaging...
More informationLecture 11: Introduction to diffraction of light
Lecture 11: Introduction to diffraction of light Diffraction of waves in everyday life and applications Diffraction in everyday life Diffraction in applications Spectroscopy: physics, chemistry, medicine,
More informationSimple piezoresistive accelerometer
Simple piezoresistive pressure sensor Simple piezoresistive accelerometer Simple capacitive accelerometer Cap wafer C(x)=C(x(a)) Cap wafer may be micromachined silicon, pyrex, Serves as over-range protection,
More informationCharacterization of MEMS Devices
MEMS: Characterization Characterization of MEMS Devices Prasanna S. Gandhi Assistant Professor, Department of Mechanical Engineering, Indian Institute of Technology, Bombay, Recap Fabrication of MEMS Conventional
More informationA) n 1 > n 2 > n 3 B) n 1 > n 3 > n 2 C) n 2 > n 1 > n 3 D) n 2 > n 3 > n 1 E) n 3 > n 1 > n 2
55) The diagram shows the path of a light ray in three different materials. The index of refraction for each material is shown in the upper right portion of the material. What is the correct order for
More informationInterference- Michelson Interferometer. Interference lecture by Dr. T.Vishwam
Interference- Michelson Interferometer Interference lecture by Dr. T.Vishwam * Measurement of the coherence length of a spectral line * Measurement of thickness of thin transparent flakes * Measurement
More informationLecture 4 Scanning Probe Microscopy (SPM)
Lecture 4 Scanning Probe Microscopy (SPM) General components of SPM; Tip --- the probe; Cantilever --- the indicator of the tip; Tip-sample interaction --- the feedback system; Scanner --- piezoelectric
More informationPiezoresistive Sensors
Piezoresistive Sensors Outline Piezoresistivity of metal and semiconductor Gauge factor Piezoresistors Metal, silicon and polysilicon Close view of the piezoresistivity of single crystal silicon Considerations
More informationBasic Laboratory. Materials Science and Engineering. Atomic Force Microscopy (AFM)
Basic Laboratory Materials Science and Engineering Atomic Force Microscopy (AFM) M108 Stand: 20.10.2015 Aim: Presentation of an application of the AFM for studying surface morphology. Inhalt 1.Introduction...
More informationOptimizing the Performance of MEMS Electrostatic Comb Drive Actuator with Different Flexure Springs
Optimizing the Performance of MEMS Electrostatic Comb Drive Actuator with Different Flexure Springs Shefali Gupta 1, Tanu Pahwa 1, Rakesh Narwal 1, B.Prasad 1, Dinesh Kumar 1 1 Electronic Science Department,
More informationELECTROSTATIC combdrives have been widely used for
472 JOURNAL OF LIGHTWAVE TECHNOLOGY, VOL. 25, NO. 2, FEBRUARY 2007 Dynamic Response Modeling of MEMS Micromirror Corner Cube Reflectors With Angular Vertical Combdrives Young Ki Hong and Richard R. A.
More informationCBSE 12th Physics 2016 Unsolved Paper Delhi Board ARYAN INSTITUTE
CBSE 12th Physics 2016 Unsolved Paper Delhi Board CBSE 12th Physics 2016 Unsolved Paper Delhi Board TIME - 3HR. QUESTIONS - 26 THE MARKS ARE MENTIONED ON EACH QUESTION SECTION-A Q.1. A point charge +Q
More informationIntegrating MEMS Electro-Static Driven Micro-Probe and Laser Doppler Vibrometer for Non-Contact Vibration Mode SPM System Design
Tamkang Journal of Science and Engineering, Vol. 12, No. 4, pp. 399 407 (2009) 399 Integrating MEMS Electro-Static Driven Micro-Probe and Laser Doppler Vibrometer for Non-Contact Vibration Mode SPM System
More informationPRE-BOARD EXAMINATION STD : XII MARKS : 150
PRE-BOARD EXAMINATION STD : XII MARKS : 150 SUB : PHYSICS TIME : 3.00 Hrs I.Choose the correct answer: 30x1=30 1.Which of the following quantities not a scalar? a)electric flux b) electric potential c)
More informationEE C245 / ME C218 INTRODUCTION TO MEMS DESIGN FALL 2009 PROBLEM SET #7. Due (at 7 p.m.): Thursday, Dec. 10, 2009, in the EE C245 HW box in 240 Cory.
Issued: Thursday, Nov. 24, 2009 PROBLEM SET #7 Due (at 7 p.m.): Thursday, Dec. 10, 2009, in the EE C245 HW box in 240 Cory. 1. Gyroscopes are inertial sensors that measure rotation rate, which is an extremely
More informationLecture 9: Introduction to Diffraction of Light
Lecture 9: Introduction to Diffraction of Light Lecture aims to explain: 1. Diffraction of waves in everyday life and applications 2. Interference of two one dimensional electromagnetic waves 3. Typical
More informationDielectric Meta-Reflectarray for Broadband Linear Polarization Conversion and Optical Vortex Generation
Supporting Information Dielectric Meta-Reflectarray for Broadband Linear Polarization Conversion and Optical Vortex Generation Yuanmu Yang, Wenyi Wang, Parikshit Moitra, Ivan I. Kravchenko, Dayrl P. Briggs,
More information20 MHz Free-Free Beam Microelectromechanical Filter with High Quality Factor
20 MHz Free-Free Beam Microelectromechanical Filter with High Quality Factor Group 4 Yang Lu 1, Tianfeng Lu 1, Han Wang 2, Zichen Tang 2 1 Department of Material Science and Engineering 2 Department of
More informationECE 484 Semiconductor Lasers
ECE 484 Semiconductor Lasers Dr. Lukas Chrostowski Department of Electrical and Computer Engineering University of British Columbia January, 2013 Module Learning Objectives: Understand the importance of
More informationModule 26: Atomic Force Microscopy. Lecture 40: Atomic Force Microscopy 3: Additional Modes of AFM
Module 26: Atomic Force Microscopy Lecture 40: Atomic Force Microscopy 3: Additional Modes of AFM 1 The AFM apart from generating the information about the topography of the sample features can be used
More informationDESIGN AND FABRICATION OF THE MICRO- ACCELEROMETER USING PIEZOELECTRIC THIN FILMS
DESIGN AND FABRICATION OF THE MICRO- ACCELEROMETER USING PIEZOELECTRIC THIN FILMS JYH-CHENG YU and FU-HSIN LAI Department of Mechanical Engineering National Taiwan University of Science and Technology
More information4 pt. (in J) 3.A
Mark Reeves - Physics 22, Fall 2011 1 A point charge of mass 0.0699 kg and charge q = +6.87 µc is suspended by a thread between the vertical parallel plates of a parallel-plate capacitor, as shown in the
More informationDesign and Simulation of A MEMS Based Horseshoe Shaped Low Current Lorentz Deformable Mirror (LCL-DM).
Design and Simulation of A MEMS Based Horseshoe Shaped Low Current Lorentz Deformable Mirror (LCL-DM). Byoungyoul Park 1, Tao Chen 1, Cyrus Shafai 1 1 Electrical and Computer Engineering, University of
More informationFree-Space MEMS Tunable Optical Filter in (110) Silicon
Free-Space MEMS Tunable Optical Filter in (110) Silicon Ariel Lipson & Eric M. Yeatman Optical & Semiconductor Group Outline Device - Optical Filter Optical analysis Fabrication Schematic Fabricated 2
More informationMEMS tunable gratings with analog actuation
Information Sciences 149 (2003) 31 40 www.elsevier.com/locate/ins MEMS tunable gratings with analog actuation Wei-Chuan Shih *, Chee Wei Wong, Yong Bae Jeon, Sang-Gook Kim, George Barbastathis Department
More informationOptics.
Optics www.optics.rochester.edu/classes/opt100/opt100page.html Course outline Light is a Ray (Geometrical Optics) 1. Nature of light 2. Production and measurement of light 3. Geometrical optics 4. Matrix
More informationQuestion 1. (Marks 16)
5 Question 1. (Marks 16) Consider the circuit shown in the figure, where C 1 = 6.00µF, C 2 = 3.00µF, and V = 20.0V. Capacitor C 1 is first charged by closing switch S 1. Switch S 1 is then opened, and
More informationEE C245 ME C218 Introduction to MEMS Design
EE C245 ME C218 Introduction to MEMS Design Fall 2007 Prof. Clark T.-C. Nguyen Dept. of Electrical Engineering & Computer Sciences University of California at Berkeley Berkeley, CA 94720 Lecture 22: Capacitive
More informationCHM 424 EXAM 2 - COVER PAGE FALL
CHM 44 EXAM - COVER PAGE FALL 006 There are seven numbered pages with five questions. Answer the questions on the exam. Exams done in ink are eligible for regrade, those done in pencil will not be regraded.
More informationMicromechanical Instruments for Ferromagnetic Measurements
Micromechanical Instruments for Ferromagnetic Measurements John Moreland NIST 325 Broadway, Boulder, CO, 80305 Phone:+1-303-497-3641 FAX: +1-303-497-3725 E-mail: moreland@boulder.nist.gov Presented at
More informationInstitute for Electron Microscopy and Nanoanalysis Graz Centre for Electron Microscopy
Institute for Electron Microscopy and Nanoanalysis Graz Centre for Electron Microscopy Micromechanics Ass.Prof. Priv.-Doz. DI Dr. Harald Plank a,b a Institute of Electron Microscopy and Nanoanalysis, Graz
More informationTunable GaN-Based Laser Diode
Tunable GaN-Based Laser Diode Christoph Eichler We have investigated the wavelength tuning characteristics of a GaN-based cw-laser diode with an emission wavelength of 425 nm. Temperature dependent spectra
More informationThermal Sensors and Actuators
Thermal Sensors and Actuators Part I Fundamentals of heat transfer Heat transfer occurs where there is a temperature gradient until an equilibrium is reached. Four major mechanism Thermal conduction Natural
More informationInstrumentation and Operation
Instrumentation and Operation 1 STM Instrumentation COMPONENTS sharp metal tip scanning system and control electronics feedback electronics (keeps tunneling current constant) image processing system data
More informationDesign of a MEMS Capacitive Comb-drive Accelerometer
Design of a MEMS Capacitive Comb-drive Accelerometer Tolga Kaya* 1, Behrouz Shiari 2, Kevin Petsch 1 and David Yates 2 1 Central Michigan University, 2 University of Michigan * kaya2t@cmich.edu Abstract:
More informationLASER TRAPPING MICRO-PROBE FOR NANO-CMM
LASER TRAPPING MICRO-PROBE FOR NANO-CMM T. Miyoshi, Y. Takaya and S. Takahashi Division of Production and Measurement System Engineering Department of Mechanical Engineering and Systems Osaka University,
More information(Refer Slide Time: 1: 19)
Mechanical Measurements and Metrology Prof. S. P. Venkateshan Department of Mechanical Engineering Indian Institute of Technology, Madras Module - 4 Lecture - 46 Force Measurement So this will be lecture
More informationAccelerated Neutral Atom Beam Processing of Ultra-thin Membranes to Enhance EUV Transmittance. February 22, 2015
Accelerated Neutral Atom Beam Processing of Ultra-thin Membranes to Enhance EUV Transmittance February 22, 2015 1 Participation / Contacts Exogenesis Corporation, ANAB Technology Sean Kirkpatrick, Son
More informationCHARACTERIZATION of NANOMATERIALS KHP
CHARACTERIZATION of NANOMATERIALS Overview of the most common nanocharacterization techniques MAIN CHARACTERIZATION TECHNIQUES: 1.Transmission Electron Microscope (TEM) 2. Scanning Electron Microscope
More informationPHYSICS WORKSHEET CLASS : XII
PHYSICS WORKSHEET CLASS : XII Chapter 2 Topic: Electrostatic potential and Capacitance LEVEL 1 1. Define electric potential. Derive the expression for the electric potential at any point due to a point
More informationAbstract. 1 Introduction
In R. A. Adey et al., eds., Simulation and Design of Microsystems and Microstructures (Proceedings of the 1st International Conference on Simulation and Design of Microsystems and Microstructures), Computational
More informationMechanical characterization of single crystal BaTiO 3 film and insitu. XRD observation of microstructure change due to
76 Chapter 4 Mechanical characterization of single crystal BaTiO 3 film and insitu XRD observation of microstructure change due to mechanical loading 4.1 Introduction Ferroelectric materials have many
More informationPiezoelectric Actuator for Micro Robot Used in Nanosatellite
Piezoelectric Actuator for Micro Robot Used in Nanosatellite R Bansevicius, S Navickaite, V Jurenas and A Bubulis PIEZOELECTRIC ACTUATOR FOR MICRO ROBOT USED IN NANOSATELLITE. R Bansevicius 1, S Navickaite,
More informationNanomaterials and their Optical Applications
Nanomaterials and their Optical Applications Winter Semester 2012 Lecture 08 rachel.grange@uni-jena.de http://www.iap.uni-jena.de/multiphoton Outline: Photonic crystals 2 1. Photonic crystals vs electronic
More informationElectrostatic Micromechanical Actuator with. Extended Range of Travel
Electrostatic Micromechanical Actuator with Extended Range of Travel Edward K. Chan, and Robert W. Dutton, Fellow, IEEE Abstract The practical design issues of an electrostatic micromechanical actuator
More informationComb Resonator Design (1)
Lecture 5: Comb Resonator Design (1) Sh School of felectrical ti lengineering i and dcomputer Science, Si Seoul National University Nano/Micro Systems & Controls Laboratory Email: dicho@snu.ac.kr URL:
More informationA THERMAL ACTUATOR DESIGN USING TORSIONAL LOADING TO ACHIEVE OUT-OF-PLANE MOTION AND FORCE TRANSMISSION
A THERMAL ACTUATOR DESIGN USING TORSIONAL LOADING TO ACHIEVE OUT-OF-PLANE MOTION AND FORCE TRANSMISSION Anargyros Panayotopoulos MEMS Division, Mechanical Engineering Dept. University of California, Berkeley,
More informationEE C245 ME C218 Introduction to MEMS Design
EE C245 ME C218 Introduction to MEMS Design Fall 2007 Prof. Clark T.-C. Nguyen Dept. of Electrical Engineering & Computer Sciences University of California at Berkeley Berkeley, CA 94720 Lecture 23: Electrical
More informationKENDRIYA VIDYALAYA SANGATHAN, HYDERABAD REGION
KENDRIYA VIDYALAYA SANGATHAN, HYDERABAD REGION SAMPLE PAPER 03 (2017-18) SUBJECT: PHYSICS (043) BLUE PRINT : CLASS XII UNIT VSA (1 mark) SA - I (2 marks) SA II (3 marks) VBQ (4 marks) LA (5 marks) Total
More informationModeling and Design of MEMS Accelerometer to detect vibrations on chest wall
Modeling and Design of MEMS Accelerometer to detect vibrations on chest wall P. Georgia Chris Selwyna 1, J.Samson Isaac 2 1 M.Tech Biomedical Instrumentation, Department of EIE, Karunya University, Coimbatore
More information